JP2003085747A - Manufacturing method of magnetic disk - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method, by which the surface smoothness of a magnetic disk is restored, even when the smoothness of the surface of magnetic disk is damaged by a magnetic transfer. SOLUTION: By laminating a master for magnetic transfer which is formed so that a magnetic part becomes the shape of arraying pattern corresponding to a specific information signal, on the surface of the magnetic disk, and also by magnetizing the magnetic part of the master for magnetic transfer, the arraying pattern of the information signal of the master for magnetic transfer is transferred and recorded on the magnetic disk as a magnetized pattern of the information signal, and after that, the burnish process is applied on the magnetic disk.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic disk used in a hard disk device or a floppy (registered trademark) disk device.

[0002]

2. Description of the Related Art Currently, a hard disk drive, which is a typical magnetic disk device, has an areal recording density of 1 Gb.
A device that exceeds it / sqin has been commercialized, and in a few years, it is recognized that the technological progress is so rapid that the practical application of 10 Gbit / sqin is discussed.

The technical background that enables such a high recording density is due to the magnetoresistive element type head capable of reproducing a signal having a track width of only a few μm with good SN while improving the linear recording density. Is large. Further, as the recording density has increased, it has been required to reduce the flying height of the floating magnetic slider with respect to the magnetic recording medium, and there is an increasing possibility that the disk / slider contact may occur due to some factor during the flying. Under such circumstances, the recording medium is required to have a higher smoothness.

In order for the head to scan a narrow track accurately, the head tracking servo technology plays an important role. In a current hard disk drive using such a tracking servo technique, a servo signal for tracking, an address information signal, a reproduction clock signal, etc. are recorded at a constant angular interval during one round of the disk. Then, in the drive device, the position of the head is detected and corrected by these signals reproduced from the head at a constant time interval, so that the head is controlled to accurately scan the track.

The above-mentioned servo signal and address information signal,
The reproduction clock signal or the like serves as a reference signal for the head to accurately scan over the track, and therefore high positioning accuracy is required for writing (hereinafter referred to as formatting). In a current hard disk drive, a dedicated servo device (hereinafter referred to as a servo writer) incorporating a highly accurate position detection device utilizing optical interference is used to perform positioning by positioning a recording head.

However, the following problems exist in the formatting by the servo writer. That is,
It takes a lot of time to write a signal over a large number of tracks while positioning the head with high precision,
To improve productivity, many servo writers must be operated at the same time. In addition, a large amount of cost is required to introduce and maintain many servo writers, and these problems become more serious as the track density increases and the number of tracks increases.

Therefore, the formatting is not performed by the servo writer, but a disk called master in which all servo information is written in advance and a magnetic disk to be formatted are superposed, and transfer energy is externally applied to the master information. There has been proposed a method of collectively transferring data to a magnetic disk.

[0008] As an example thereof, Japanese Unexamined Patent Publication No. 10-40544
In this example, magnetic transfer is performed by bringing the magnetic recording medium and the convex portion of the master information carrier into close contact with each other and applying an external magnetic field.

[0009]

However, in the above-mentioned conventional magnetic transfer device, when an abnormal protrusion exists between the magnetic recording medium and the convex portion of the master information carrier, the magnetic recording medium and the convex portion of the master information carrier are brought into contact with each other to cause the magnetic recording medium to come into contact with each other. A depression is generated on the surface of the. Further, in this depressed portion, a minute protrusion of about 20 nm exists around the depressed portion depressed by about 50 nm. FIG. 16 shows the results of measuring such protrusions by an optical measuring method, and it can be seen that many fine protrusions of about 20 nm exist on the surface of the magnetic disk due to the above contact.

By the way, in a hard disk drive, the flying height of the slider from the surface of the magnetic disk is about 20 to 30 nm.
If there is a protrusion of about nm, the magnetic head and the magnetic disk come into contact with each other during data recording / reproduction, and in such a case, the clearance between the magnetic head and the magnetic disk becomes large at the moment of contact. The signal recording / reproducing performance deteriorates, and the physical contact of the magnetic head with the magnetic disk causes the life of the magnetic head to decrease. As described above, according to the conventional magnetic transfer method, a large number of protrusions are present on the magnetic disk, and there is a problem that the recording / reproducing performance and the life of the magnetic head are shortened.

The present invention has been made in view of the above problems, and provides a method of manufacturing a highly reliable magnetic disk which does not deteriorate the performance of recording / reproducing a signal or the life of a magnetic head. The purpose is to

[0012]

In order to achieve this object, a method of manufacturing a magnetic disk according to the present invention comprises a magnetic transfer master in which magnetic parts are formed in an array pattern shape corresponding to a predetermined information signal. While superimposing on the surface of the magnetic disk, by magnetizing the magnetic portion of the magnetic transfer master, the array pattern of the information signal of the magnetic transfer master is transferred and recorded on the magnetic disk as a magnetization pattern of the information signal, After that, the magnetic disk is subjected to burnishing.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION In the method of manufacturing a magnetic disk according to the present invention, first, a magnetic transfer master in which magnetic portions are formed in an array pattern shape corresponding to a predetermined information signal is formed on the surface of the magnetic disk. And the magnetic part of the magnetic transfer master is magnetized. Thereby, the array pattern of the information signals of the magnetic transfer master is transferred and recorded on the magnetic disk as the magnetization pattern of the information signals. After that, the magnetic disk is burnished. By subjecting the surface of the magnetic disk after the magnetic transfer to the burnishing treatment, even if the smoothness of the surface of the magnetic disk is impaired by the magnetic transfer, the convex portions of the surface are scraped off, and the magnetic head and the magnetic disk It is possible to prevent physical contact with the minute protrusions above.

Further, preferably, after the magnetic disk is burnished, a magnetic transfer master is formed on the surface of the magnetic disk in which magnetic parts are formed in an array pattern shape corresponding to a predetermined information signal. By matching and magnetizing the magnetic part of the magnetic transfer master,
The array pattern of the information signal of the magnetic transfer master is transferred and recorded on the magnetic disk as the magnetization pattern of the information signal, and then the burnishing process is further performed on the magnetic disk. By performing magnetic transfer after burnishing the magnetic disk, foreign matter adhering to the slave can be reliably removed before magnetic transfer, preventing abnormal protrusions from occurring during magnetic transfer. It will be possible.

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) A method of manufacturing a magnetic recording medium according to the present embodiment will be described with reference to FIGS.

FIG. 1 shows a process chart of the present embodiment. As shown in FIG. 1, a ferromagnetic layer is formed on a disk substrate of aluminum or the like to form a magnetic disk body, and a lubricant is applied to the magnetic disk body. After forming the layer, magnetic transfer is performed, and then burnishing treatment is performed.

Here, for the step of forming the ferromagnetic layer and the step of forming the lubricant layer on the disk substrate, the technology conventionally known in the manufacturing steps of magnetic disks can be used as it is. For example, for forming the ferromagnetic layer, there is a method of providing the magnetic layer on a substrate made of aluminum by dry plating means such as vapor deposition or sputtering means. Further, a method of protecting the magnetic layer is usually employed by performing a step of providing a protective layer on the magnetic layer by dry plating means such as vapor deposition or sputtering means or by dipping or spin coating.

In the step of forming the lubricant layer, the magnetic disk is immersed in the lubricant solution and then pulled up at a predetermined speed to apply the lubricant to the entire surface of the magnetic disk. The thickness of the lubricant layer is 15 to 20 angstroms (1.5 to 2.0 nm), and carbon (C), hydrogen (H), oxygen (O), and fluorine (F) are desirable as constituent materials.

Next, the contents of the magnetic transfer process shown in FIG. 1 will be described in detail with reference to FIGS.

FIG. 2 is a perspective view showing a part of an apparatus for carrying out the magnetic transfer step in the present embodiment in section. In FIG. 2, reference numeral 1 is a donut disk-shaped magnetic disk, and 2 is a disk-shaped magnetic transfer master for transferring and recording an information signal on the magnetic disk 1 as a magnetization pattern. Is formed, and the master 2 is arranged so as to sandwich the magnetic disk 1 from above and below. 3 is a transfer surface of the master 2, 4 is a positioning ring fixed to the surface of the master 2 opposite to the transfer surface 3, 5 is an upper flange for holding one of the two masters 2, and 6 is also 2 A lower flange 7 for holding the other of the two masters 2 is a flexible film for connecting the master 2 and the upper flange 5 or the lower flange 6.

Reference numeral 8 is a spindle made of an elastic body inserted through the central through hole of the magnetic disk 2 and the central through hole of the two masters 2, and 9 is a cap for crushing and deforming the spindle 8. The spindle 8 is a cylinder. It has a shape, and the mandrel 9a of the cap 9 is inserted in the central portion. Further, a predetermined gap is provided between the spindle 8 and the mandrel 9a. Reference numeral 10 is a master pedestal for supporting one of the spindle 8 and the master 2, 11 is an air passage for discharging air between the master 2 and the magnetic disk 1, and 12 is an air outlet for discharging air from the air passage. , 13 is a suction pump connected to the air outlet, 14 is a flange pedestal that supports the lower flange, and 15 is a magnet for transferring the magnetic pattern of the master 2 to the magnetic disk 1.

Next, an example of the master used in the method of the present invention will be described.

FIG. 3 schematically shows a plane of an example of the master 2, and as shown in FIG. 3, on one main surface of the master 2, that is, on the surface of the magnetic disk 1 which is in contact with the surface of the ferromagnetic layer. Have signal regions 2a formed in a substantially radial pattern.

An enlarged view of a portion A surrounded by a dotted line in FIG. 3 is schematically shown in FIG. As shown in FIG. 4, in the signal area 2a, a magnetic portion formed of a ferromagnetic thin film in a pattern shape corresponding to the digital information signal recorded on the magnetic recording medium, for example, preformat recording, is formed at a position corresponding to the information signal. Information pattern is formed. In FIG. 4, the hatched portion is a magnetic portion formed of a ferromagnetic thin film. The information pattern shown in FIG. 4 is
Each area of the clock signal, the tracking servo signal, the address information signal, etc. is sequentially arranged in the track length direction. The information pattern shown in FIG. 4 is an example, and the configuration, arrangement, etc. of the information pattern will be appropriately determined according to the digital information signal recorded on the magnetic recording medium.

For example, when a reference signal is first recorded on a magnetic film of a hard disk like a hard disk drive and preformat recording such as a tracking servo signal is performed based on the reference signal, the master according to the present invention is used. In advance, only the reference signal used for preformat recording is transferred and recorded on the magnetic film of the hard disk, and then the hard disk is incorporated into the drive housing, and the magnetic head of the hard disk drive is used for preformat recording such as tracking servo signals. You may do it.

FIG. 5 shows an enlarged main part of the master. In FIG. 5, 16 is a magnetic part made of a ferromagnetic thin film for transferring and recording a magnetization pattern on the magnetic disk 1, and 1 is a magnetic part.
Reference numeral 7 is a groove radially provided on the transfer surface 3 on which the magnetic portion 16 of the master 2 is provided.

Further, FIG. 6 shows a cross section of the signal region shown in FIGS. 3 and 4, and as shown in FIG.
A plurality of fine array patterns corresponding to information signals are formed on one main surface of the disk-shaped base 2b made of a non-magnetic material such as a Si substrate, a glass substrate, a plastic substrate, that is, the surface on the side where the surface of the magnetic disk 1 contacts. The concave portion 2c is formed in a shape, and the concave portion 2c of the base body 2b is formed by embedding a ferromagnetic thin film, which is the magnetic portion 16, in the concave portion 2c.

Here, as the ferromagnetic thin film, many kinds of magnetic materials can be used regardless of hard magnetic material, semi-hard magnetic material and soft magnetic material, and digital information signals can be transferred and recorded on the magnetic disk. Anything will do. For example, Fe, Co, an Fe-Co alloy, or the like can be used. It should be noted that in order to generate a sufficient recording magnetic field regardless of the type of the magnetic disk on which the information signal is recorded, it is preferable that the saturation flux density of the magnetic material is large. Especially 200
For a magnetic disk having a high coercive force exceeding 0 Oersted or a flexible disk having a large magnetic layer thickness, sufficient recording may not be possible when the saturation magnetic flux density is 0.8 Tesla or less, and therefore, in general, Is 0.8
A magnetic material having a saturation magnetic flux density of Tesla or more, preferably 1.0 Tesla or more is used. The thickness of the ferromagnetic thin film depends on the bit length, the saturation magnetization of the magnetic disk and the thickness of the magnetic layer. For example, the bit length is about 1 μm, the saturation magnetization of the magnetic disk is about 500 emu / cc, and the ferromagnetic layer of the magnetic disk is When the thickness is about 20 nm, 50 nm to 500
It may be about nm.

7 and 8 are diagrams for explaining the operation of the apparatus for performing the magnetic transfer step in the present embodiment, and the operation in this step will be described below. First, as shown in FIG. 2, the magnetic disk 1 is sandwiched between two masters 2, and the positioning ring 4 and the central through hole of the magnetic disk 1 are both inserted into the spindle 8. Further, when the positioning ring 4 and the central through hole of the magnetic disk 1 are inserted into the spindle 8, the upper flange 5 and the lower flange 6 are joined. This time,
The joint between the positioning ring 4 and the magnetic disk 1 is shown in FIG.
This is the state shown in (a). That is, the inner diameter of the master 2 is larger than the outer diameter of the spindle 8, and there is a slight clearance between the master 2 and the magnetic disk 1 in the thickness direction.

Next, the core rod 9a is pulled in the direction of the arrow P shown in FIG.
Is compressed and deformed by the cap 9 and is compressed in the thickness direction, and at the same time, its outer diameter increases, and as shown in FIG. 7B, the outer diameter of the positioning ring 4 and the central through hole of the magnetic disk 1 is changed from the inside. Position it in the lining state. When the spindle 8 completes the positioning of the magnetic disk 1 and the master 2, the spindle 8 remains deformed and the suction pump 13 discharges air from the air discharge port 12. At this time, the positioning ring 4 is made of a material having elasticity, and the positioning ring 4 is deformed by the exhaust of the suction pump 13, and as shown in FIG. 7C, the clearance between the magnetic disk 1 and the master 2 is zero. And a perfect close contact is achieved.

That is, as shown in FIG. 2, the magnetic disk 1 is surrounded by an upper flange 5, a lower flange 6, two flexible rings 7, two masters 2, two positioning rings 4, and a spindle 8. When the air is exhausted from the air exhaust port 12, the pressure therein becomes lower than the atmospheric pressure. As a result, the two masters 2 receive a force in the direction sandwiching the magnetic disk 1 by the atmospheric pressure, and the transfer surface 3 of the master 2 and the surface of the magnetic disk 1 come into close contact with each other. At this time, if a foreign matter such as a protrusion is present between the magnetic disk 1 and the master 2, a protrusion is present around the depressed portion.

When the close contact between the magnetic disk 1 and the master 2 is completed, the magnet 15 is brought close to the master 2 as shown in FIG. 8 to apply a magnetic field required for transfer, and the magnet 15 is moved in the circumferential direction of the magnetic disk 1. That is, by rotating in the direction of arrow B in FIG. 8, it is possible to perform transfer over the entire circumferential direction of the magnetic disk 1.

Here, the procedure for transferring and recording the information signal corresponding to the pattern shape formed on the master on the magnetic disk will be described in more detail with reference to FIGS. 9 to 11.

First, while the magnet 15 is brought close to the magnetic disk 1, the magnet 15 is rotated in parallel with the magnetic disk 1 with the central axis of the magnetic disk 1 as a rotation axis.
The magnetic disk 1 is magnetized in one direction in advance as indicated by the arrow (initial magnetization). Next, as described above, with the master 2 positioned and superposed on the magnetic disk 1, the master 2 and the magnetic disk 1 are evenly adhered to each other, and thereafter, as shown in FIG. By applying a magnetic field in the direction, the magnetic portion 16 of the master 2 is magnetized, and the predetermined region 1 of the magnetic disk 1 superposed on the master 2 is magnetized.
In b, an information signal corresponding to the pattern shape of the magnetic portion 16 is recorded as shown in FIG. The arrow shown in FIG. 10 indicates the direction of the magnetic field of the magnetization pattern transferred and recorded on the magnetic disk 1 at this time.

FIG. 11 shows a state during the magnetization process. As shown in FIG. 11, the magnetic field is applied to the master 2 from the outside while the master 2 is in close contact with the magnetic disk 1. By magnetizing, the information signal can be recorded in the ferromagnetic layer 1c of the magnetic disk 1. That is, by using the master 2 configured by forming the magnetic portion 11 made of a ferromagnetic thin film in the array pattern shape corresponding to a predetermined information signal on the non-magnetic substrate 2b, the magnetic pattern as a magnetic pattern corresponding to the information signal is obtained. The disc 1 can be magnetically transferred and recorded.

As a method for transferring and recording the pattern of the master 2 on the magnetic disk 1, in addition to the method of applying the external magnetic field in the state where the master 2 is in contact with the magnetic disk 1 as described above, the master 2 The information signal can be recorded by a method in which the magnetic portion 16 is magnetized in advance and the master 2 is brought into close contact with the magnetic disk 1 in that state.

Next, in the present invention, the burnishing process is performed as shown in FIG. 1. The contents of the burnishing process will be described in detail with reference to FIG.

FIG. 12 is a perspective view illustrating an apparatus for performing the burnishing process in this embodiment.
As shown in FIG. 12, the apparatus for performing the burnishing process includes a spindle 21 that holds and rotates the magnetic disk 1 after the magnetic transfer step, a clamp mechanism 22 that fixes the magnetic disk 1 to the spindle 21, Head support mechanism 2 including burnish head 20 for burnishing
3, a guide arm 24 that cantilever-supports the head support mechanism 23 at its base, and a burnishing head that moves and positions the burnish head 20 on the recording surface of the magnetic disk 1 via the head support mechanism 23 and the guide arm 24. A head positioning unit 25, a positioning control unit 26 that controls the operation of the burnish head positioning unit 25, a spindle control unit 27 that controls the operation of the spindle 21, and a controller 28 that controls the positioning control unit 26 and the spindle control unit 27. It consists of and.

First, the controller 28 causes the spindle controller 27 to rotate the magnetic disk 1 at a constant speed. Next, the burnish head positioning portion 25 is shown in FIG.
The positioning controller 26 controls the magnetic disk 1 and the burnish head 20 so that the magnetic disk 1 and the burnish head 20 are moved in the direction A. The method of setting this position is shown below.

The distance between the magnetic disk 1 and the burnish head 20 when the burnish head positioning portion 25 is located at an arbitrary position is measured in advance. Then, the distance to be moved to set the gap between the magnetic disk 1 and the burnish head 20 to a predetermined gap, for example, 15 nm is calculated and stored in the controller 28. The controller 28 moves the burnish head positioning unit 2 via the positioning control unit 26 so that the gap between the magnetic disk 1 and the burnish head 20 is 15 nm.
Set to. Here, the distance between the magnetic disk 1 and the burnish head 20, that is, 15 nm, is set to a value smaller than the flying height of the head when recording / reproducing is actually performed in the hard disk drive device.

Thereafter, when the magnetic disk 1 is rotated, the positioning controller 27 controls the burnishing head 20 to move in the direction B of FIG. Then, the burnishing process is performed on the surface that comes into contact with the master 2. As a result, an abnormal protrusion existing on the surface of the magnetic disk 1,
In particular, protrusions larger than the clearance between the magnetic disk and the magnetic head during recording / reproduction can be removed by collision energy.

FIG. 13 shows the result of measuring the surface state of the magnetic disk 1 after the burnishing treatment by an optical measuring method. As compared with FIG. 12 described in the related art, it can be seen that the microprojections existing on the surface of the magnetic disk 1 are drastically reduced by performing the burnishing process after the magnetic transfer process.

As described above, according to the present embodiment, by performing the burnishing treatment after the magnetic transfer step, the surface smoothness of the magnetic disk on which the magnetic transfer is performed is improved, and the signal recording / reproducing performance and It is possible to realize a highly reliable device that does not shorten the life of the magnetic head.

(Embodiment 2) A method according to Embodiment 2 of the present invention will be described with reference to FIGS.

FIG. 14 shows a process chart in the present embodiment, and each process has the same configuration as in the first embodiment. That is, the present embodiment is a method in which the ferromagnetic layer is formed on the disk substrate, the burnishing process is performed, the lubricant is then formed on the magnetic disk, and then the magnetic transfer step is performed.

First, in the present embodiment, the magnetic transfer step is carried out after the burnishing step, whereby foreign matter existing on the magnetic disk 1 can be removed in advance. Therefore, it becomes possible to prevent foreign matter from existing between the master 2 and the magnetic disk 1, and as in the first embodiment, the signal recording / reproducing performance and the life of the magnetic head are not reduced. It is possible to realize a highly reliable device.

Further, in the present embodiment, since the magnetic transfer step is performed after the step of applying the lubricant, damage occurring during magnetic transfer can be prevented. That is, during magnetic transfer, the magnetic disk 1 and the master 2
At the time of contacting with, before the contact is performed, a lubricant composed of carbon, hydrogen, oxygen, fluorine or the like is added in an amount of 1.5 to 2.0 n
By coating with a thickness of m, it is possible to prevent damage that may occur during contact between the two.

FIG. 15 shows an observation result of the surface of the magnetic disk generated when the magnetic transfer was performed without applying the lubricant. FIG. 15A shows a state of the entire surface of the magnetic disk after magnetic transfer. As shown in the figure, fine scratches having a longitudinal direction in the same direction are formed on the entire surface of the magnetic disk, particularly near the center. I understand. Figure 15 (b)
It is an enlarged view of such fine scratches, and it can be seen that the fine scratches have a recessed shape such as a scratch of about 3 to 5 μm.

That is, from these observation results, when the magnetic disk 1 and the master 2 are brought into contact with each other without applying the lubricant, fine scratches having the same directionality on the magnetic disk 1, especially near the center of the disk. It turns out that a lot of them occur. This is as shown in FIG.
It is considered that when the magnetic disk 1 and the master 2 come into close contact with each other, the spindle 8 is deformed so that the magnetic disk 1 and the master 2 are displaced from each other and scratches are generated at this time in the state where the lubricant is not applied. On the contrary, it was also clarified from the experimental result that damage is less likely to occur by applying a lubricant to the magnetic disk 1 prior to the magnetic transfer between the magnetic disk 1 and the master 2. This is because the lubricant acts as a protective film for preventing damage at the time of contact.

As described above, according to the present embodiment, by carrying out the magnetic transfer step after the burnishing step, the foreign matters existing on the magnetic disk can be removed in advance, so that the master and the magnetic disk can be removed. It is possible to prevent foreign matter from existing between the disc and the disc.

Further, since the magnetic transfer step is carried out after the step of applying the lubricant, it is possible to prevent damage which may occur at the time of contact between the two.

In the present embodiment, the magnetic transfer process is performed after the burnishing process. However, in combination with the first embodiment, that is, the magnetic transfer process is performed after the burnishing process, and the burnishing process is further performed. If you go through the process,
Magnetic transfer can be performed with foreign matter existing on the magnetic disk removed in advance, and the surface smoothness of the magnetic disk after magnetic transfer can be further improved, further improving the signal recording / reproducing performance and the durability of the magnetic head. It is possible to realize a highly reliable device.

In the above example, the burnishing treatment was performed using the burnishing head, but the invention is not limited to this. For example, a burnishing tape or buffing is used to tape or buffing. Even if the structure is such that the minute protrusion is removed by the collision energy between the minute protrusion and

The method of magnetic transfer is not limited to this, and another method may be used to bring the magnetic disk 1 and the master 2 into contact with each other.

[0056]

According to the present invention, even if the surface smoothness of the magnetic disk is impaired by the magnetic transfer, the surface smoothness of the magnetic disk is restored by performing the burnishing treatment after the magnetic transfer step. Therefore, it is possible to prevent the performance of signal recording / reproduction from being deteriorated and the life of the magnetic head from being shortened.

[Brief description of drawings]

FIG. 1 is a process diagram showing a method of manufacturing a magnetic disk according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing, in a partial cross section, an apparatus for performing a magnetic transfer step in the first embodiment of the present invention.

FIG. 3 is a plan view illustrating a configuration of a master for performing the magnetic transfer process.

FIG. 4 is an explanatory diagram illustrating a configuration of an information signal formed in the master.

FIG. 5 is an enlarged perspective view showing a main part of the master.

FIG. 6 is a sectional view of the same.

7A to 7C are cross-sectional views for explaining disk positioning when performing the magnetic transfer step.

FIG. 8 is a perspective view illustrating the operation of the apparatus when performing the magnetic transfer process.

FIG. 9 is a perspective view for explaining the state of a magnetic disk that has been initially magnetized in the same magnetic transfer step.

FIG. 10 is a perspective view for explaining the state of the magnetic disk on which transfer recording is performed in the same magnetic transfer step.

FIG. 11 is a cross-sectional view for explaining the transfer recording principle in the same magnetic transfer step.

FIG. 12 is a perspective view illustrating an apparatus for performing the burnishing process.

FIG. 13 is an explanatory view showing a state of the magnetic disk surface after the burnishing treatment.

FIG. 14 is a process diagram showing a method of manufacturing a magnetic disk according to a second embodiment of the present invention.

FIG. 15 is an explanatory diagram for explaining a magnetic disk surface when magnetic transfer is performed without applying a lubricant.

FIG. 16 is an explanatory view showing a state of a magnetic disk surface after a magnetic disk and a master are brought into contact with each other in the conventional technique.

[Explanation of symbols]

1 magnetic disk 2 master 2a Signal area 2b substrate 15 magnets 16 Magnetic part 20 burnish head

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kaoru Matsuoka             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Toshio Makabe             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5D112 GA09

Claims (2)

[Claims] 1. A magnetic transfer master having magnetic sections formed in an array pattern shape corresponding to a predetermined information signal is superposed on the surface of a magnetic disk, and the magnetic section of the magnetic transfer master is magnetized. By doing so, the array pattern of the information signal of the magnetic transfer master is transferred and recorded on the magnetic disk as a magnetization pattern of the information signal,
Thereafter, a burnishing treatment is applied to the magnetic disk, which is a method for manufacturing a magnetic disk. 2. A magnetic transfer master, which is obtained by subjecting a magnetic disk to burnishing and then forming a magnetic portion so as to have an array pattern shape corresponding to a predetermined information signal, and superimposing it on the surface of the magnetic disk. By magnetizing the magnetic portion of the magnetic transfer master, the array pattern of the information signals of the magnetic transfer master is transferred and recorded on the magnetic disk as a magnetization pattern of the information signals, and then burnished on the magnetic disk. A method of manufacturing a magnetic disk, comprising: