JP3587463B2 - Manufacturing method of magnetic disk - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing a magnetic disk used for a hard disk device or a floppy disk device.
[0002]
[Prior art]
At present, a hard disk drive, which is a typical magnetic disk device, has already been commercialized as a device having an areal recording density exceeding 1 Gbit / sqin. Is recognized.
[0003]
The technical background that has enabled such a high recording density largely depends on a magnetoresistive element type head capable of reproducing a signal having a track width of only several μm with good SN while improving the linear recording density. . Also, with the increase in the recording density, a reduction in the flying height of the floating magnetic slider with respect to the magnetic recording medium has been required, and the possibility of disk / slider contact occurring for some reason during flying has increased. Under such circumstances, the recording medium is required to have higher smoothness.
[0004]
The tracking servo technology of the head plays an important role for the head to accurately scan a narrow track. In a current hard disk drive using such a tracking servo technique, a servo signal for tracking, an address information signal, a reproduction clock signal, and the like are recorded at a constant angular interval during one round of the disk. In the drive device, the position of the head is detected and corrected based on these signals reproduced from the head at fixed time intervals, so that the head is controlled so as to scan the track accurately.
[0005]
The above-mentioned servo signal, address information signal, reproduced clock signal, and the like serve as reference signals for the head to accurately scan the track, and therefore, require high positioning for writing (hereinafter, referred to as formatting). Accuracy is required. In a current hard disk drive, formatting is performed by positioning a recording head using a dedicated servo device (hereinafter, referred to as a servo writer) incorporating a high-accuracy position detection device utilizing optical interference.
[0006]
However, the formatting by the servo writer has the following problems. In other words, it takes a lot of time to write signals over many tracks while positioning the head with high accuracy, and many servo writers must be operated simultaneously to increase productivity. In addition, introduction and maintenance of many servo writers require a large amount of cost, and these problems become more serious as the track density increases and the number of tracks increases.
[0007]
Therefore, instead of using a servo writer for formatting, a master disk on which all servo information has been written in advance and a magnetic disk to be formatted are superimposed, and the master information is transferred by applying transfer energy from the outside. Has been proposed.
[0008]
As one example, there is an example disclosed in Japanese Patent Application Laid-Open No. 10-45544. In this example, magnetic transfer is performed by bringing a magnetic recording medium into close contact with a convex portion of a master information carrier and applying an external magnetic field. .
[0009]
[Problems to be solved by the invention]
However, in the above-described conventional magnetic transfer device, when an abnormal projection exists between the magnetic recording medium and the convex portion of the master information carrier, a contact portion between them causes a depression on the surface of the magnetic recording medium. Further, in this depression, a small protrusion of about 20 nm is present around the depression of about 50 nm. FIG. 16 shows the results of measuring such protrusions by an optical measurement method, and it is understood that there are many fine protrusions of about 20 nm on the surface of the magnetic disk due to the contact.
[0010]
By the way, in a hard disk drive, the flying height of the slider from the surface of the magnetic disk is about 20 to 30 nm, and if there is a protrusion of about 20 nm on the magnetic disk, the magnetic head and the magnetic disk can be moved during data recording and reproduction. In such a case, the clearance between the magnetic head and the magnetic disk becomes large at the moment of the contact, and the recording / reproducing performance of a signal is reduced, and the magnetic head physically contacts the magnetic disk. This causes the life of the magnetic head to be shortened. As described above, according to the conventional magnetic transfer method, a large number of protrusions exist on the magnetic disk, and there is a problem that the recording / reproducing performance and the life of the magnetic head are reduced.
[0011]
The present invention has been made in view of such problems, and has as its object to provide a method for manufacturing a highly reliable magnetic disk that does not reduce the recording / reproducing performance of a signal or reduce the life of a magnetic head. And
[0012]
[Means for Solving the Problems]
In order to achieve this object, a method of manufacturing a magnetic disk according to the present invention includes forming a lubricant layer on a magnetic disk having a ferromagnetic layer, and then forming the magnetic portion into an array pattern shape corresponding to a predetermined information signal. The formed magnetic transfer master is superimposed on the surface of the magnetic disk, and the magnetic portion of the magnetic transfer master is magnetized, so that the array pattern of the information signals of the magnetic transfer master is used as the magnetization pattern of the information signal. The method is characterized in that the magnetic disk is transferred and recorded, and after the transfer recording step, the magnetic disk is subjected to burnishing .
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
In the method of manufacturing a magnetic disk of the present invention, first, a lubricant layer is formed on a magnetic disk having a ferromagnetic layer. Next, a magnetic transfer master in which a magnetic portion is formed in an array pattern shape corresponding to a predetermined information signal is superimposed on the surface of a magnetic disk, and the magnetic portion of the magnetic transfer master is magnetized. Thereby, the array pattern of the information signals of the magnetic transfer master is transferred and recorded on the magnetic disk as the magnetization pattern of the information signals. According to this method, even if particles are present on the magnetic disk and the magnetic transfer master, damage to the magnetic disk hardly occurs due to the effect of the lubricant.
[0014]
Preferably, a burnishing process is performed on the magnetic disk before forming the lubricant layer on the magnetic disk. The lubricant layer is preferably formed using a lubricant containing carbon, hydrogen, oxygen and fluorine. The thickness of the lubricant layer is preferably 1.5 to 0.2 nm.
[0015]
Preferably, after the step of transfer recording, the magnetic disk is subjected to burnishing. As a result, even if the smoothness of the magnetic disk surface is impaired by the magnetic transfer, the projections on the surface are shaved, and physical contact between the magnetic head and the minute projections on the magnetic disk can be prevented beforehand. .
[0016]
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0017]
(Embodiment 1)
A method for manufacturing the magnetic recording medium according to the present embodiment will be described with reference to FIGS.
[0018]
FIG. 1 shows a process chart of the present embodiment. As shown in FIG. 1, a ferromagnetic layer is formed on a disk substrate made of aluminum or the like to form a magnetic disk main body, and a lubricant layer is formed on the magnetic disk main body. After that, magnetic transfer is performed, and then burnishing is performed.
[0019]
Here, as for the step of forming a ferromagnetic layer and the step of forming a lubricant layer on the disk substrate, a technique conventionally known in a magnetic disk manufacturing process can be used as it is. For example, for forming a ferromagnetic layer, there is a method of providing a magnetic layer on a substrate made of aluminum by dry plating such as evaporation or sputtering. Further, a method of protecting the magnetic layer is usually adopted by performing a step of providing a protective layer on the magnetic layer by dry plating such as vapor deposition or sputtering, or by dipping or spin coating.
[0020]
In the step of forming a lubricant layer, the magnetic disk is immersed in a lubricant solution and then pulled up at a predetermined speed to apply the lubricant to the entire surface of the magnetic disk. The thickness of the lubricant layer is 15 to 20 angstroms (1.5 to 2.0 nm), and carbon (C), hydrogen (H), oxygen (O), and fluorine (F) are preferable as constituent materials.
[0021]
Next, the contents of the magnetic transfer step shown in FIG. 1 will be described in detail with reference to FIGS.
[0022]
FIG. 2 is a perspective view showing a cross section of a part of an apparatus for performing a magnetic transfer step in the present embodiment. In FIG. 2, reference numeral 1 denotes a donut disk-shaped magnetic disk, and reference numeral 2 denotes a disk-shaped magnetic transfer master for transferring and recording information signals on the magnetic disk 1 as a magnetization pattern. The master 2 is arranged so as to sandwich the magnetic disk 1 from above and below. Reference numeral 3 denotes a transfer surface of the master 2; 4 denotes a positioning ring fixed to the surface of the master 2 opposite to the transfer surface 3; 5 denotes an upper flange for holding one of the two masters 2; A lower flange 7 for holding the other one of the masters 2 is a flexible film connecting the master 2 to the upper flange 5 or the lower flange 6.
[0023]
Reference numeral 8 denotes a spindle made of an elastic body inserted through the center through hole of the magnetic disk 2 and the center through holes of the two masters 2. Reference numeral 9 denotes a cap for crushing and deforming the spindle 8. The spindle 8 has a cylindrical shape. The mandrel 9a of the cap 9 is inserted in the center. A predetermined gap is provided between the spindle 8 and the mandrel 9a. 10 is a master pedestal for supporting one of the spindle 8 and the master 2, 11 is an air passage for discharging air between the master 2 and the magnetic disk 1, and 12 is an air outlet for discharging air from the air passage. , 13 is a suction pump connected to the air outlet, 14 is a flange pedestal supporting the lower flange, and 15 is a magnet for transferring the magnetic pattern of the master 2 to the magnetic disk 1.
[0024]
Next, an example of a master used in the method of the present invention will be described.
[0025]
FIG. 3 schematically shows a plane of an example of the master 2. As shown in FIG. 3, one main surface of the master 2, that is, the surface of the magnetic disk 1 on the side in contact with the ferromagnetic layer surface is substantially The signal region 2a is formed radially.
[0026]
An enlarged view of a portion A surrounded by a dotted line in FIG. 3 is schematically shown in FIG. As shown in FIG. 4, the signal area 2a includes a magnetic information portion formed of a ferromagnetic thin film having a pattern corresponding to the information signal at a position corresponding to a digital information signal to be recorded on a magnetic recording medium, for example, preformat recording. Is formed. In FIG. 4, a hatched portion is a magnetic portion composed of a ferromagnetic thin film. The information pattern shown in FIG. 4 is obtained by sequentially arranging respective areas of a clock signal, a tracking servo signal, an address information signal, and the like in the track length direction. Note that the information pattern shown in FIG. 4 is an example, and the configuration, arrangement, and the like of the information pattern are appropriately determined according to the digital information signal recorded on the magnetic recording medium.
[0027]
For example, when a reference signal is first recorded on a magnetic film of a hard disk such as a hard disk drive and preformat recording such as a servo signal for tracking is performed based on the reference signal, the master according to the present invention is used to record the hard disk. Only the reference signal used for preformat recording is transferred and recorded on the magnetic film in advance, and the hard disk is built into the drive housing. Preformat recording such as servo signals for tracking is performed using the magnetic head of the hard disk drive. You may do so.
[0028]
FIG. 5 shows an enlarged view of a main part of the master. In FIG. 5, reference numeral 16 denotes a magnetic part made of a ferromagnetic thin film for transferring and recording a magnetization pattern on the magnetic disk 1, and 17 denotes a magnetic part 16 of the master 2. The grooves are provided radially on the transfer surface 3 provided.
[0029]
FIG. 6 shows a cross section of the signal region shown in FIGS. 3 and 4. As shown in FIG. 6, the master 2 has a disk shape made of a nonmagnetic material such as a Si substrate, a glass substrate, or a plastic substrate. A concave portion 2c is formed in one main surface of the base 2b, that is, a surface on the side in contact with the surface of the magnetic disk 1, in a plurality of fine array patterns corresponding to information signals, and a magnetic portion is formed in the concave portion 2c of the base 2b. It is formed by embedding a ferromagnetic thin film of No. 16.
[0030]
Here, as the ferromagnetic thin film, many types of magnetic materials can be used regardless of hard magnetic materials, semi-hard magnetic materials, and soft magnetic materials, and any material that can transfer and record digital information signals to a magnetic disk. Just fine. For example, Fe, Co, an Fe—Co alloy, or the like can be used. In order to generate a sufficient recording magnetic field irrespective of the type of the magnetic disk on which the information signal is recorded, the larger the saturation magnetic flux density of the magnetic material, the better. In particular, for a magnetic disk having a high coercive force exceeding 2000 Oe or a flexible disk having a large magnetic layer thickness, if the saturation magnetic flux density is 0.8 Tesla or less, sufficient recording may not be performed. Specifically, a magnetic material having a saturation magnetic flux density of 0.8 Tesla or more, preferably 1.0 Tesla or more is used. The thickness of the ferromagnetic thin film depends on the bit length, the saturation magnetization of the magnetic disk, and the thickness of the magnetic layer. For example, the bit length is about 1 μm, the saturation magnetization of the magnetic disk is about 500 emu / cc, When the thickness is about 20 nm, it may be about 50 nm to 500 nm.
[0031]
FIGS. 7 and 8 are views for explaining the operation of the apparatus for performing the magnetic transfer step in the present embodiment, and the operation in this step will be described below. First, as shown in FIG. 2, the magnetic disk 1 is sandwiched between two masters 2, and the positioning ring 4 and the center through hole of the magnetic disk 1 are both inserted into the spindle 8. When the positioning ring 4 and the center through hole of the magnetic disk 1 are inserted through the spindle 8, the upper flange 5 and the lower flange 6 are joined. At this time, the joint between the positioning ring 4 and the magnetic disk 1 is in the state shown in FIG. That is, the inner diameter of the master 2 is larger than the outer diameter of the spindle 8, and a slight clearance exists between the master 2 and the magnetic disk 1 in the thickness direction.
[0032]
Next, by pulling the core rod 9a in the direction of the arrow P shown in FIG. 2, the spindle 8 made of an elastic body is compressed and deformed by the cap 9 and is compressed in the thickness direction, and at the same time, its outer diameter increases. Then, as shown in FIG. 7B, the positioning ring 4 and the magnetic disk 1 are positioned from the inside of the center through hole by lining them. After the positioning of the magnetic disk 1 and the master 2 by the spindle 8 is completed, the suction pump 13 discharges air from the air discharge port 12 while the spindle 8 remains deformed.
At this time, the positioning ring 4 is made of an elastic material, and the positioning ring 4 is deformed by the exhaust of the suction pump 13, so that the clearance between the magnetic disk 1 and the master 2 is zero as shown in FIG. , Resulting in a completely adhered state.
[0033]
That is, as shown in FIG. 2, the magnetic disk 1 has a closed space surrounded by an upper flange 5, a lower flange 6, two flexible rings 7, two masters 2, two positioning rings 4, and a spindle 8. When the air is discharged from the air discharge port 12, the pressure therein becomes lower than the atmospheric pressure. As a result, the two masters 2 receive a force in the direction sandwiching the magnetic disk 1 by the atmospheric pressure, and the transfer surface 3 of the master 2 and the surface of the magnetic disk 1 are strongly adhered. At this time, if a foreign substance such as a projection exists between the magnetic disk 1 and the master 2, a projection exists around the depression.
[0034]
When the contact between the magnetic disk 1 and the master 2 is completed, the magnet 15 is moved closer to the master 2 as shown in FIG. 8 to apply a magnetic field necessary for transfer, and the magnet 15 is moved in the circumferential direction of the magnetic disk 1, ie, as shown in FIG. By rotating the magnetic disk 1 in the direction of arrow B, transfer can be performed over the entire circumferential direction of the magnetic disk 1.
[0035]
Here, a procedure for transferring and recording an information signal corresponding to the pattern shape formed on the master on the magnetic disk will be described in more detail with reference to FIGS.
[0036]
First, in a state where the magnet 15 is close to the magnetic disk 1, the magnetic disk 1 is rotated in parallel with the magnetic disk 1 with the center axis of the magnetic disk 1 as a rotation axis, so that the magnetic disk 1 is previously moved in one direction as shown by the arrow in FIG. (Initial magnetization). Next, as described above, in a state where the master 2 is positioned and superposed on the magnetic disk 1, the master 2 and the magnetic disk 1 are uniformly brought into close contact with each other, and thereafter, as shown in FIG. By applying a magnetic field in the direction, the magnetic part 16 of the master 2 is magnetized, and a predetermined area 1b of the magnetic disk 1 superimposed on the master 2 corresponds to the pattern shape of the magnetic part 16 as shown in FIG. The recorded information signal is recorded. The arrow shown in FIG. 10 indicates the direction of the magnetic field of the magnetization pattern transferred and recorded on the magnetic disk 1 at this time.
[0037]
FIG. 11 shows the state of the magnetization process. As shown in FIG. 11, a magnetic field 16 is magnetized by applying an external magnetic field to the master 2 while the master 2 is in close contact with the magnetic disk 1. Thus, an information signal can be recorded on the ferromagnetic layer 1c of the magnetic disk 1. That is, by using the master 2 which is formed by forming the magnetic portion 11 made of a ferromagnetic thin film in an array pattern shape corresponding to a predetermined information signal on the non-magnetic base 2b, a magnetic pattern corresponding to the information signal is obtained. It can be magnetically transferred and recorded on the disk 1.
[0038]
As a method of transferring and recording the pattern of the master 2 on the magnetic disk 1, other than the method of applying an external magnetic field while the master 2 is in contact with the magnetic disk 1 as described above, the magnetic unit 16 of the master 2 may be used. Can be recorded by a method in which the master 2 is magnetized in advance and the master 2 is brought into close contact with the magnetic disk 1 in that state.
[0039]
Next, in the present invention, a burnishing process is performed as shown in FIG. 1. The details of the burnishing process will be described in detail with reference to FIG.
[0040]
FIG. 12 is a perspective view illustrating an apparatus for performing a burnishing process according to the present embodiment. As shown in FIG. 12, the apparatus for performing the burnishing process includes a spindle 21 for holding and rotating the magnetic disk 1 after performing the magnetic transfer step, a clamp mechanism 22 for fixing the magnetic disk 1 to the spindle 21, A head support mechanism 23 having a burnishing varnish head 20, a guide arm 24 for cantileverly supporting the head support mechanism 23 at the base thereof, and a magnetic field via the head support mechanism 23 and the guide arm 24 for the burnish head 20. A burnishing head positioning unit 25 for moving and positioning on the recording surface of the disk 1; a positioning control unit 26 for controlling the operation of the burnishing head positioning unit 25; a spindle control unit 27 for controlling the operation of the spindle 21; A controller 28 for controlling the controller 26 and the spindle controller 27 It is configured.
[0041]
First, the magnetic disk 1 is rotated at a constant speed by the spindle controller 27 by the controller 28. Next, the burnish head positioning unit 25 is controlled by the positioning control unit 26 so as to move in the direction A in FIG. 12, and the position where the magnetic disk 1 and the burnish head 20 have a predetermined interval, for example, 15 nm. To stop. The setting method of this position will be described below.
[0042]
The distance between the magnetic disk 1 and the burnishing head 20 when the burnishing head positioning unit 25 is located at an arbitrary position is measured in advance. Then, the distance to be moved to make the distance between the magnetic disk 1 and the burnishing head 20 a predetermined distance, for example, 15 nm, is calculated and stored in the controller 28. The controller 28 moves the burnish head positioning unit 2 via the positioning control unit 26, and sets the distance between the magnetic disk 1 and the burnish head 20 to 15 nm. Here, the distance between the magnetic disk 1 and the burnishing head 20, that is, 15 nm, is set to a value smaller than the flying height of the head when performing recording and reproduction with an actual hard disk drive.
[0043]
Thereafter, the positioning control unit 27 controls the burnishing head 20 to move in the direction B of FIG. 12, that is, in the radial direction of the magnetic disk 1 while the magnetic disk 1 is rotated. Burnish processing is performed on the surface that has come into contact with. This makes it possible to remove abnormal protrusions present on the surface of the magnetic disk 1, particularly protrusions larger than the clearance between the magnetic disk and the magnetic head during recording and reproduction, by means of collision energy.
[0044]
FIG. 13 shows the results of measuring the surface state of the magnetic disk 1 after the burnishing treatment by an optical measuring method. Compared to FIG. 12 described in the related art, it can be seen that the fine projections present on the surface of the magnetic disk 1 are drastically reduced by performing the burnishing process after performing the magnetic transfer process.
[0045]
As described above, according to the present embodiment, by performing the burnishing process after the magnetic transfer process, the surface smoothness of the magnetic disk on which the magnetic transfer has been performed is improved, and the signal recording / reproducing performance and the magnetic head of the magnetic head are improved. It is possible to realize a highly reliable device without shortening the life.
[0046]
(Embodiment 2)
The method according to the second embodiment of the present invention will be described with reference to FIGS.
[0047]
FIG. 14 shows a process diagram in the present embodiment, and each process has the same configuration as in the first embodiment. That is, in the present embodiment, a method in which a ferromagnetic layer is formed on a disk substrate, burnishing is performed, a lubricant is formed on the magnetic disk, and then a magnetic transfer process is performed.
[0048]
First, in the present embodiment, a magnetic transfer step is performed after the burnishing step, whereby foreign substances present on the magnetic disk 1 can be removed in advance. It is possible to prevent the presence of foreign matter between the disk and the magnetic disk 1 in advance, and as in the first embodiment, it is possible to reduce the reliability of the signal recording / reproducing performance and the life of the magnetic head without lowering it. An expensive device can be realized.
[0049]
Further, in the present embodiment, since the magnetic transfer step is performed after the lubricant applying step, it is possible to prevent damage occurring during the magnetic transfer. That is, when the magnetic disk 1 and the master 2 come into contact with each other during the magnetic transfer, a lubricant composed of carbon, hydrogen, oxygen, fluorine, or the like is applied in a thickness of 1.5 to 2.0 nm before the contact. By doing so, it is possible to prevent damage that may occur when the two touch each other.
[0050]
FIG. 15 shows the results of observation of the magnetic disk surface generated when magnetic transfer was performed without applying a lubricant. FIG. 15A shows the state of the entire surface of the magnetic disk after magnetic transfer. As shown in FIG. 15A, fine scratches having a longitudinal direction in the same direction are generated on the entire surface of the magnetic disk, especially near the center. You can see that. FIG. 15B is an enlarged view of such a fine flaw, and it can be seen that the fine flaw has a concave shape such as a scratch of about 3 to 5 μm.
[0051]
That is, from these observation results, when the magnetic disk 1 and the master 2 are brought into contact with each other without applying the lubricant, fine scratches having the same direction on the magnetic disk 1 are generated particularly in the vicinity of the center of the disk. I found out. This is because, as shown in FIG. 7C, when the magnetic disk 1 and the master 2 come into close contact with each other, the magnetic disk 1 and the master 2 are displaced due to the deformation of the spindle 8 and the lubricant is not applied. It is considered that scratches occur at this time. Conversely, the experimental results also revealed that applying a lubricant to the magnetic disk 1 prior to the magnetic transfer between the magnetic disk 1 and the master 2 makes damage less likely to occur. This is because the lubricant plays a role of a protective film for preventing damage at the time of contact.
[0052]
As described above, according to the present embodiment, by performing the magnetic transfer process after the burnishing process, it is possible to remove foreign substances present on the magnetic disk in advance. It is possible to prevent the presence of foreign matter in between.
[0053]
In addition, since the magnetic transfer step is performed after the step of applying the lubricant, it is possible to prevent damage that may occur at the time of contact between the two.
[0054]
In the present embodiment, the magnetic transfer step is performed after the burnishing step. However, in combination with the first embodiment, the magnetic transfer step is performed after the burnishing step, and the burnishing step is further performed. For example, magnetic transfer can be performed with foreign matter present on the magnetic disk removed in advance, and the surface smoothness of the magnetic disk after magnetic transfer can be further improved, further improving the signal recording / reproducing performance and the durability of the magnetic head. In addition, a highly reliable device can be realized.
[0055]
In the above example, burnishing was performed using a burnishing head. However, the burnishing is not limited to this. For example, using a burnishing tape or buffing, tape or buffing and fine projections may be performed. The same effect can be obtained by a configuration in which the minute projections are removed by the collision energy.
[0056]
Also, the method of magnetic transfer is not limited to this, and a method of contacting the magnetic disk 1 and the master 2 using another method may be adopted.
[0057]
【The invention's effect】
According to the present invention, since the magnetic transfer process is performed after the lubricant application process, even if particles are present on the magnetic disk and the magnetic transfer master, damage that may occur when the magnetic disk and the magnetic transfer master come into contact with each other is eliminated. It can be prevented beforehand by the effect of the lubricant.
[Brief description of the drawings]
FIG. 1 is a process diagram showing a method of manufacturing a magnetic disk according to a first embodiment of the present invention. FIG. 2 is a perspective view showing a device for performing a magnetic transfer process in a partial cross section in the first embodiment of the present invention. FIG. 3 is a plan view illustrating a configuration of a master for performing the magnetic transfer process. FIG. 4 is an explanatory diagram illustrating a configuration of information signals formed on the master. FIG. FIG. 6 is a cross-sectional view illustrating the positioning of a disk when performing the magnetic transfer process. FIG. 8 is a cross-sectional view illustrating the disk positioning when performing the magnetic transfer process. FIG. 9 is a perspective view illustrating the operation of the apparatus when performing the magnetic transfer. FIG. 9 is a perspective view illustrating the state of the magnetic disk that has been subjected to initial magnetization in the magnetic transfer process. A perspective view for explaining a state of a magnetic disk on which transfer recording has been performed. FIG. 11 is a cross-sectional view illustrating the principle of transfer recording in the magnetic transfer process. FIG. 12 is a perspective view illustrating an apparatus for performing the burnishing process. FIG. 13 after performing the burnishing process. FIG. 14 is a process diagram showing a method of manufacturing a magnetic disk according to a second embodiment of the present invention. FIG. 15 is a magnetic disk when magnetic transfer is performed without applying a lubricant. FIG. 16 is an explanatory diagram for explaining a surface. FIG. 16 is an explanatory diagram showing a state of a magnetic disk surface after a magnetic disk and a master are brought into contact with each other in a conventional technique.
DESCRIPTION OF SYMBOLS 1 Magnetic disk 2 Master 2a Signal area 2b Base 15 Magnet 16 Magnetic part 20 Burnish head

Claims (3)

After forming a lubricant layer on a magnetic disk having a ferromagnetic layer, a magnetic transfer master formed by forming a magnetic portion into an array pattern shape corresponding to a predetermined information signal is superimposed on the surface of the magnetic disk. At the same time, by magnetizing the magnetic part of the magnetic transfer master, an array pattern of information signals of the magnetic transfer master is transferred and recorded on the magnetic disk as a magnetization pattern of the information signal. A method for manufacturing a magnetic disk that performs burnishing on the disk. The method according to claim 1, wherein the lubricant forming the lubricant layer contains carbon, hydrogen, oxygen, and fluorine. 2. The method according to claim 1, wherein the thickness of the lubricant layer is 1.5 to 2.0 nm.

Images