JP2003083829A5 - - Google Patents
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- Publication number
- JP2003083829A5 JP2003083829A5 JP2001276077A JP2001276077A JP2003083829A5 JP 2003083829 A5 JP2003083829 A5 JP 2003083829A5 JP 2001276077 A JP2001276077 A JP 2001276077A JP 2001276077 A JP2001276077 A JP 2001276077A JP 2003083829 A5 JP2003083829 A5 JP 2003083829A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001276077A JP2003083829A (ja) | 2001-09-12 | 2001-09-12 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001276077A JP2003083829A (ja) | 2001-09-12 | 2001-09-12 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003083829A JP2003083829A (ja) | 2003-03-19 |
| JP2003083829A5 true JP2003083829A5 (ja) | 2010-05-20 |
Family
ID=19100837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001276077A Withdrawn JP2003083829A (ja) | 2001-09-12 | 2001-09-12 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003083829A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232886A (ja) * | 2007-03-22 | 2008-10-02 | Epson Toyocom Corp | 圧力センサ |
| JP5712666B2 (ja) * | 2011-02-18 | 2015-05-07 | セイコーエプソン株式会社 | 力検出器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4479070A (en) * | 1983-06-10 | 1984-10-23 | Sperry Corporation | Vibrating quartz diaphragm pressure sensor |
| JPH0519797Y2 (ja) * | 1985-05-22 | 1993-05-25 | ||
| JPS6461640A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
| JP2935050B2 (ja) * | 1990-04-16 | 1999-08-16 | 東洋通信機株式会社 | フロート或はバルーンを付した温度又は圧力センサ |
| FR2674627B1 (fr) * | 1991-03-27 | 1994-04-29 | Commissariat Energie Atomique | Capteur de pression resonant. |
| JPH1137859A (ja) * | 1997-07-17 | 1999-02-12 | Toyo Commun Equip Co Ltd | 圧力センサ用圧電振動子 |
| US6182513B1 (en) * | 1998-12-23 | 2001-02-06 | Radi Medical Systems Ab | Resonant sensor and method of making a pressure sensor comprising a resonant beam structure |
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2001
- 2001-09-12 JP JP2001276077A patent/JP2003083829A/ja not_active Withdrawn