JP2003080442A - Dicing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dicing device renewed and improved, applying compound vibration work by utilizing a simple device, which can more improve machining quality. SOLUTION: This dicing device, comprising a blade 22 rotated at a high speed to cut a workpiece and a spindle 30 rotating the blade 22 at a high speed, has a first vibration device 34 vibrating the spindle 30 in almost a perpendicular direction and a second vibration device 36 vibrating the spindle 30 in a direction with the blade 22 cutting the workpiece, to tender the dicing device characterized by making the blade 22 perform a compound motion to cut the workpiece by the first/second vibration devices. In such a constitution, by making compound vibration of the blade capable by a relatively simple structure, the workpiece can be cut smoothly and effectively. Moreover, by constituting the vibration device by a piezoelectric material, a vibration generating mechanism is more simplified.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing device, and more particularly to a dicing device capable of vibrating a workpiece.

[0002]

2. Description of the Related Art Conventionally, in a dicing process in which a kerf (cutting groove) is formed in a dice pattern to divide a workpiece into a plurality of pieces, a dicing device having a ring-shaped blade held by a flange is used. ing.

In such a dicing apparatus, a blade is rotated at a high speed to cut or cut a work piece placed on a chuck table. At this time, when a difficult-to-process material such as ceramic or composite material is processed, the occurrence of chipping, which is an irregular shape fracture, increases, and the wear and damage of the blade tend to increase. Also, when processing a metal material, a large burr is generated on the edge of the kerf.

Therefore, by vibrating the blade and / or the work piece by applying vibration in a predetermined direction to the work piece,
The processing quality is being improved. As an example of such vibration machining, there is a method of vibrating a chuck table on which a workpiece is placed, as described in JP-A-2000-15622.

[0005]

However, the above-mentioned conventional dicing apparatus has a problem that the structure of the apparatus becomes complicated in order to vibrate the chuck table.

There is also a problem that the work piece can be vibrated only in a predetermined direction with respect to the blade, and complex vibration cannot be applied between the blade and the work piece.

The present invention has been made in view of the above problems of the conventional dicing machine, and an object of the present invention is to perform complex vibration machining using a simple machine to improve machining quality. It is an object of the present invention to provide a new and improved dicing device that can be improved.

[0008]

In order to solve the above problems, according to a first aspect of the present invention, there is provided a blade for rotating at a high speed to cut a workpiece, and a spindle for rotating the blade at a high speed. The dicing device includes a first vibrating device that vibrates the spindle in a substantially vertical direction, and a second vibrating device that vibrates the spindle in a direction in which a blade cuts a workpiece, and first and second vibrating devices. According to the present invention, there is provided a dicing device, which is characterized in that the blade is subjected to a combined movement to cut the workpiece.

With this configuration, the blade can be subjected to the combined motion to perform the vibration machining, so that the workpiece can be cut smoothly and effectively as compared with the case where the blade is vibrated only in one predetermined direction. Further, since the blade is vibrated via the spindle, the device configuration for vibration machining is simpler than when the chuck table is vibrated. In addition,
The compound motion means that the blade vibrates in two dimensions or three dimensions by applying vibration not only in one predetermined direction but also in two different directions.

Further, if the first and second vibrating devices are constructed so as to generate vibration in response to expansion and contraction of the piezoelectric material, the mechanism for generating vibration is structurally simple and the cost is reduced. Can be achieved.

The first and second vibrating devices may be configured to generate vibration in response to expansion and contraction of the magnetostrictive material.

Further, the first and second vibrating devices may be controlled so that the combined movement of the blades becomes substantially elliptical vibration or substantially circular vibration.

If the first and second vibration devices are arranged in the spindle housing, the structure of the device for vibration machining can be simplified.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Referring to the accompanying drawings,
A preferred embodiment of the present invention will be described in detail. In the present specification and the drawings, components having substantially the same functional configuration are designated by the same reference numerals, and duplicate description will be omitted.

First, an outline of a dicing apparatus according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a dicing apparatus 1 according to the first embodiment.
It is a whole perspective view of 0.

As shown in FIG. 1, the dicing apparatus main body 10 has a cutting unit 20 for cutting or cutting a workpiece 12 such as ceramic, and a chuck table 15 on which the workpiece 12 is placed. The workpiece 12 is supplied onto the chuck table 15 while being supported by the frame 14 by a fixing tape 13, for example. The chuck table 15 is movable relative to the cutting unit 20, and the chuck table 15 moves while cutting the workpiece 12 by a predetermined amount with a blade rotating at a high speed installed at the end of the cutting unit 20. As a result, cutting proceeds. On the contrary, the chuck table 15 may be fixed and the cutting unit 20 may move relatively to perform cutting.

The cutting unit 20 cuts the work piece 12 along the streets on the work surface to form an extremely thin kerf (cutting groove). After forming a plurality of kerfs in a predetermined direction in a substantially strip shape, the chuck table 15 is rotated, for example, by 90 degrees to form a plurality of new kerfs in a substantially strip shape in a direction substantially perpendicular to the direction of the formed kerf. As a result, the workpiece 12 can be diced.

Next, the overall construction of the cutting unit in this embodiment will be described with reference to FIG. In addition, in FIG.
It is a perspective view of the cutting unit 20 concerning this embodiment.

As shown in FIG. 2, the cutting unit 20 is
A ring-shaped blade 22, a flange 24 that holds the blade 22 from both sides, a shower nozzle 25 that supplies cutting water from the front in the cutting direction, a side nozzle 26 that supplies cutting water from both sides of the blade 22, and a wheel cover 28. ，
A spindle 30 that rotates the blade 22 via the flange 24, a spindle housing 32 in which the spindle 30 is provided, a first vibrating device 34 that vibrates the spindle 30 in a substantially vertical direction, and a blade 22 that covers the spindle 30. The second vibrating device 36 that vibrates the workpiece 12 in the cutting direction.

The blade 22 is formed in a substantially ring shape by electrodepositing abrasive grains such as diamond with a bond material such as nickel. The blade 22 has an extremely thin thickness, for example, 2
It is 0 to 30 μm. The blade 22 is axially attached to the spindle 30 while being sandwiched by the flange 24, and can rotate at a high speed, for example, at 30 krpm. The blade 22 rotating at a high speed cuts the outer periphery of the blade 22 along the street while cutting the surface of the workpiece 12 by a predetermined amount to form an ultrathin kerf. Cutting water is supplied during cutting, and the blade 22 and the processing point are cooled.

The flange 24 is made of, for example, a relatively hard metal such as stainless steel, and holds the blade 22 by sandwiching it from both sides. At this time, the flange 24 is
Since the substantially same region is sandwiched from both sides of the blade 22 with a uniform pressure, the blade 22 is not curved or deformed due to an unbalanced pressure, and the machined surface can be cut substantially linearly.

The shower nozzle 25 is disposed at a predetermined height from the machined surface on the front side of the blade 22 in the cutting direction, and has a hole or slit on the side facing the outer peripheral surface of the blade 22. Cutting water is discharged toward the tip of the blade 22 to cool the blade 22 and the processing point. The shower nozzle 25 may be formed integrally with the wheel cover 28, or may be provided above the blade 22 or on the rear side in the cutting direction. In addition, the cutting unit 20 does not always have to supply the shower nozzle 2 if sufficient cutting water can be supplied from the side nozzle 26.
It is not necessary to have 5.

The side nozzles 26 are installed on both sides of the blade 22 (one side is not shown in FIG. 2), for example, substantially parallel to the blade 22 and the machining surface, and slits provided on the side facing the blade 22. From the opening of the blade 22
Cutting water is discharged toward both sides to cool the blade 22 and the processing point. In addition, the side surface nozzle 26 is the blade 2
It may be provided only on one side of 2, and may not necessarily be provided.

The foil cover 28 not only prevents the cutting water from scattering around but also protects the blade 22,
It has a function of preventing the blade 22 from being exposed to prevent danger. The foil cover 28 is provided with various devices such as a shower nozzle 25 and a side nozzle, and can have various shapes according to the installation conditions and cutting conditions.

The spindle 30 is a rotary shaft for transmitting a driving force of a motor (not shown) or the like, is extended in the spindle housing 32, and has a flange 24 removably attached to one end thereof. The spindle 30 can rotate the blade 20 at a high speed via the flange 24.

The spindle housing 32 is made of a metal material such as stainless steel, has a substantially cylindrical shape, and is installed so as to cover the spindle 30. The spindle housing 32 has a function of supporting and protecting the spindle 30 that rotates at high speed.

The first vibrating device 34 is provided at a predetermined distance (eg, about 250 mm) from the blade 22, for example, an upper vibrating device 34a provided at the upper end on the outer peripheral surface of the spindle housing 32, and a lower vibrating device at the lower end. The lower vibrating device 34b is provided. The first vibrating device 34 is
The spindle 30 can be vibrated in a direction substantially perpendicular to the processing surface, that is, the Z direction.

On the other hand, the second vibrating device 36 has a right vibrating device 36a provided at the right end on the outer peripheral surface of the spindle housing 32 and a left vibrating device 36a at a predetermined distance (eg, about 250 mm) from the blade 22, for example. The left-side vibrating device 36b provided in the. Such second vibrating device 36
Can vibrate the spindle 30 in the direction in which the blade 22 cuts the workpiece 12 (hereinafter, referred to as a substantially cutting direction), that is, in the Y direction.

The above-mentioned upper, lower, left and right vibrating devices 34a, 34b, 36a, 36b are, for example, P
The piezoelectric element is, for example, a substantially rectangular parallelepiped formed of a piezoelectric material such as ZT (lead zirconate titanate), crystal, barium titanate, or ceramics. The piezoelectric material exerts a piezoelectric effect (also referred to as a piezo effect) in which distortion occurs and a shape changes in a predetermined direction when a potential difference is applied to both ends to cause dielectric polarization. Therefore, the piezo element can convert electrical energy into mechanical work by utilizing such piezoelectric effect.

Next, the arrangement of the first and second vibrating devices according to this embodiment will be described in more detail with reference to FIG. 3 (a) is a right side view of the cutting unit 20 according to the present embodiment, and FIG. 3 (b) shows the first and second vibrating devices 34, 36 according to the present embodiment. It is sectional drawing of the cutting unit 20 in the position shown.

As shown in FIGS. 3 (a) and 3 (b), on the outer peripheral surface of the spindle housing 32, an upper vibrating device 34a is provided at the upper end and a lower vibrating device 34b is provided at the lower end.
The right vibration device 36a is at the right end, and the left vibration device 36 is at the left end.
b are arranged at substantially equal positions from the blade 22 at equal intervals. Such vibrating devices 34a, 34b, 36a, 3
When 6b is installed, it can be easily installed on the outer peripheral surface of the spindle housing 32 by, for example, bonding. Further, among these four vibrating devices, the upper vibrating device 34a and the lower vibrating device 34b are paired to constitute the first vibrating device 34 as described above, and the right vibrating device 36
a and the left-side vibrating device 36b form a pair to constitute the second vibrating device 36.

In this embodiment, the first vibration device 3
The fourth or second vibrating device 36 is symmetrically arranged on the outer peripheral surface of the spindle housing 32 at equal intervals, but the invention is not limited to such an example and may be arbitrarily arranged. The first vibrating device 34 and the second vibrating device 36 are provided with two vibrating devices (for example, the upper vibrating device 34a and the lower vibrating device 34b for the first vibrating device 34). Without limitation, it is equipped with either one of the vibration devices,
Alternatively, three or more vibration devices may be provided.

Next, the upper, lower, left and right vibrating devices 34a, 34b, 36a, arranged as described above,
A mechanism of generating vibration by 36b will be described.

The vibrating devices 34a, 34b, 36a,
A potential difference is applied to both ends of the 36b in the X direction so that, for example, the blade 22 side has a high potential and the opposite side to the blade 22 has a low potential (hereinafter referred to as a positive potential difference).
Then, the vibrating device performs a shape change that extends in the X direction. On the other hand, when a potential difference is applied to both ends so that the blade 22 side has a low potential and the opposite side to the blade 22 has a high potential (hereinafter, referred to as a negative potential difference), the above vibration device
A shape change that contracts in the X direction (expands in the Z direction) is performed.

As described above, since the upper, lower, left and right vibrating devices 34a, 34b, 36a, 36b expand and contract in the X direction according to the applied potential difference, the positive potential difference and the negative potential difference are periodically generated. By alternately giving X
Vibration can be generated by repeatedly stretching and contracting in the direction. At this time, by changing the applied potential difference (voltage) in a substantially sinusoidal manner with time, the upper vibration device 34a can periodically generate vibration with a predetermined amplitude.

Next, a mechanism for vibrating the spindle by the first vibrating device according to this embodiment will be described in detail with reference to FIG. Note that FIG. 4 is an explanatory diagram of a mechanism in which the first vibrating device 34 according to the present embodiment vibrates the spindle 30.

As shown in FIG. 4, the first vibration device 34
Has an upper vibrating device 34a and a lower vibrating device 34b provided at the upper and lower ends of the spindle housing 32, respectively. When no voltage is applied to the first vibrating device 34, the upper vibrating device 34a and the lower vibrating device 34b are used.
Since neither of them expands or contracts, as shown by the solid line in FIG. 4, the spindle housing 32 and the spindle 30 are substantially parallel to the processing surface.

Here, when a negative potential difference is applied to the upper vibrating device 34a, the upper vibrating device 34a contracts in the X direction. Therefore, the upper end of the spindle housing 32 also becomes minute in the X direction as the upper vibrating device 34a contracts. Distorts and contracts.
At the same time, when a positive potential difference is applied to the lower vibrating device 34b, the lower vibrating device 34b expands in the X direction, so the lower end of the spindle housing 32 also extends in the X direction as the lower vibrating device 34b expands. It is slightly distorted and stretches.
Therefore, when the voltage is applied to the first vibrating device 34 as described above, the spindle housing 32 and the spindle 30 move in the positive Z direction (the direction away from the machined surface) as shown by the dotted line in FIG. For example, it is inclined about θ degrees. Therefore, the blade 22 also moves in the positive Z direction by about a.

On the other hand, although not shown, the upper vibration device 34
When a positive potential difference is applied to a and a negative potential difference is applied to the lower vibration device 34b, the spindle housing 32 and the spindle 30 are tilted in the negative direction of Z (direction approaching the machining surface) by the same principle as described above, 22 also moves in the negative Z direction by about a.

Therefore, as described above, the upper vibration device 34a
By continuously applying positive and negative potential differences to each of the upper and lower vibrating devices 34b, the upper vibrating device 34a and the lower vibrating device 34b alternately extend and contract, so that the spindle housing 32 moves in the positive Z direction. And alternate in the negative direction. Therefore, the blade 22 moves in the positive and negative directions of Z alternately. In this way, the first vibration device 34 can vibrate the spindle 30 and the blade 22 in a substantially vertical direction (that is, the Z direction) with a predetermined amplitude (for example, the amplitude of the blade 22 is about a).

The second vibrating device 36 can also vibrate the spindle 30 and the blade 22 in the substantially cutting direction (that is, the Y direction) in the same manner as the first vibrating device 34 described above.

Next, with reference to FIG. 5, a mode in which the first and second vibrating devices according to the present embodiment cause the blade to vibrate periodically will be described. In addition, FIG.
First and second vibrating devices 34, 3 according to the present embodiment
FIG. 6 is a front view of the blade 22 for showing a mode in which 6 vibrates the blade 22 periodically. In addition, FIG.
6 is a graph showing changes in potential difference applied to the first vibrating device 34. Further, FIG. 5C is a projection diagram in which the position of the center 30a of the spindle 30 when the blade 22 vibrates is projected onto the YZ plane.

First, the first vibration device 34
A mode in which 2 is vibrated periodically will be described.

As shown in FIG. 5 (a), at the time of cutting, the blade 22 rotating at a high speed cuts the outer periphery of the blade 22 into the processing surface at a predetermined cutting depth P while
2 is cut in the Y direction. During the cutting process, the first vibration device 34 can vibrate the blade 22 in the substantially vertical direction (that is, the Z direction) as described above. In addition,
The position of the blade 22 shown in FIG.
Is the position in the state where the
The center 30a of FIG. 3 is at the reference position (that is, the position at which the spindle 30 vibrates).

Here, the change in the potential difference applied to the first vibrating device 34 and the accompanying vibration of the spindle 30 and the blade 22 will be described with reference to FIGS. 5 (b) and 5 (c).

Incidentally, in FIG. 5B, the upper side vibration device 34
The potential difference change of a is shown by a solid line, and the potential difference change of the lower vibration device 34b is shown by a broken line. The potential difference shown in the graph of FIG. 5B is the potential of the blade-side end surface of the upper vibrating device 34a and the lower vibrating device 34b with reference to the end face opposite to the blade 22. That is, if the potential difference is positive, the end surface on the blade 22 side has a higher potential (the positive potential difference) than the end surface on the opposite side.
On the other hand, if the potential difference is negative, the end surface on the blade 22 side has a lower potential (the negative potential difference).

Further, FIG. 5C shows each position of the center 30 of the spindle 30 according to each potential difference applied to the first vibration device 34 illustrated in FIG. 5B. Also,
The position A shown in FIG. 5C corresponds to the reference position of the center 30a of the spindle 30.

As shown in FIG. 5B, the upper vibration device 3
A potential difference that changes with time in a substantially sinusoidal wave is applied to both ends of 4a and the lower vibration device 34b. Both waveforms are substantially the same, and the frequency is, for example, about 0.1 to 5 kHz.
Furthermore, the phase difference between the potential difference applied to the upper vibration device 34a and the potential difference applied to the second vibration device 36 is about 180
Degree (that is, half cycle). With such a configuration, the upper vibrating device 34a and the lower vibrating device 34b operate together so as to always move or stop the blade 22 and the spindle 30 in substantially the same substantially vertical direction. The mode will be specifically described below.

For example, first, at time A, the upper vibrating device 34a and the lower vibrating device 34b do not have a potential difference (no potential), and therefore neither expands or contracts. Therefore, the center 30a of the spindle 30 is at the reference position (position A in FIG. 5C).

Then, as time passes, the positive potential difference applied to the upper vibrating device 34a gradually increases, and the negative potential difference applied to the lower vibrating device 34b gradually increases. Along with this, the upper vibrating device 34a gradually expands and the lower vibrating device 34b gradually contracts, so that the center 30a of the spindle 30 moves substantially vertically downward.

Further, at time B, the upper vibration device 34a
Since the positive potential difference given to the lower vibration device 34b becomes substantially maximum and the negative potential difference given to the lower vibration device 34b becomes substantially maximum, the expansion of the upper vibration device 34a and the lower vibration device 3
The contraction of 4b becomes almost maximum, and the center of the spindle 30
a is closest to the processed surface (position B in FIG. 5C).

Thereafter, as the potential difference applied to the upper vibrating device 34a and the lower vibrating device 34b gradually decreases, the upper vibrating device 34a extends and the lower vibrating device 34a extends.
Since the contraction of b is gradually recovered, the center 30a of the spindle 30 moves substantially vertically upward.

Next, at time C, the upper vibration device 34a
Since neither of the lower vibrating device 34b and the lower vibrating device 34b has a potential difference, neither expands or contracts. Therefore, spindle 3
The center 30a of 0 reaches the reference position again (position A in FIG. 5C).

Further, this time, a negative potential difference is given to the upper vibrating device 34a and a positive potential difference is given to the lower vibrating device 34b, and the potential difference gradually increases as time passes. Along with this, the upper vibration device 34a gradually contracts and the lower vibration device 34b gradually expands, so that the center 30a of the spindle 30 moves substantially vertically upward.

Thereafter, at time D, the upper vibration device 34a
Since the negative potential difference applied to the upper vibration device 34a becomes substantially maximum and the positive potential difference applied to the lower vibration device 34b becomes substantially maximum, contraction of the upper vibration device 34a and lower vibration device 3
The extension of 4b is almost maximum, and the center 30 of the spindle 30
a is the farthest from the machined surface (position D in FIG. 5C).

Further, as the potential difference applied to the upper vibrating device 34a and the lower vibrating device 34b gradually decreases, the upper vibrating device 34a contracts and the lower vibrating device 34a.
Since the extension of b is gradually recovered, the center 30a of the spindle 30 moves downward in the substantially vertical direction.

After that, at time A ', since neither the upper vibrating device 34a nor the lower vibrating device 34b has a potential difference again, neither of them expands or contracts. Therefore, the center 30a of the spindle 30 returns to the reference position again (see FIG. 5).
Position A) in (c).

After that, the center 30a of the spindle 30 will be described.
Is the same step as above, and the position A shown in FIG.
→ The movement of position B → position A → position D → position A ... Is repeated. That is, by applying a substantially sinusoidal potential difference to the first vibrating device 34, the blade 22 can be vibrated in a substantially vertical direction at a predetermined frequency and amplitude. In the present embodiment, the frequency of the blade 22 is, for example, about 0.1 to 5 kHz, and the amplitude is, for example, about 2 to 30 μm.

The periodic vibration of the spindle 30 and the blade 22 by the first vibrating device 34 in the substantially vertical direction has been described above. On the other hand, the second vibrating device 36
Is given a potential difference that changes with time in a substantially sinusoidal manner in the same manner as described above, so that the center 30a of the spindle 30 is
The position A → position E → position A → position F → position A shown in FIG. 5C can be moved. That is, the second vibrating device 36 can periodically vibrate the blade 22 in the substantially cutting direction. The vibration frequency of the blade 22 is, for example, about 0.1 to 5 kHz, and the amplitude is, for example, about 2 to 30 μm.

The frequency and the amplitude of the vibration of the blade 22 can be controlled by adjusting the frequency and the amplitude of the substantially sinusoidal potential difference given to the first vibrating device 34 and the second vibrating device 36. it can.

Next, the combined movement of the blade 22 according to this embodiment will be described with reference to FIG. Note that FIG. 6A is a graph showing changes in the potential difference applied to the first vibrating device 34 and the second vibrating device 36. Also,
FIG. 6B shows the position of the center 30a of the spindle 30 during the combined movement of the blade 22 according to the present embodiment.
It is a projection figure projected on the Z plane.

As shown in FIG. 6A, since the first vibrating device 34 and the second vibrating device 36 generate vibrations simultaneously, the upper, lower, right and left vibrating devices 34a, 34
Each of b, 36a, and 36b is provided with a potential difference that changes periodically with time (represented by a solid line, a broken line, a dotted line, and a one-dot chain line, respectively). More specifically, regarding the first vibrating device 34, a substantially sinusoidal potential difference of a predetermined frequency is applied to the upper vibrating device 34a and the lower vibrating device 34b, and the phase difference between both is about 180 degrees. is there. Also,
Regarding the second vibrating device 36, the right-side vibrating device 36a and the left-side vibrating device 36b are provided with a substantially sinusoidal potential difference having a frequency substantially the same as the frequency of the first vibrating device 34, and the phase difference between them is Is also about 180 degrees. The first
The ratio between the amplitude of the potential difference applied to the vibration device 34 and the amplitude of the potential difference applied to the second vibration device 36 is, for example, about 3: 2.

With this configuration, as described with reference to FIG. 5, the upper vibrating device 34a and the lower vibrating device 34b jointly generate vibrations in a substantially vertical direction, and the right vibrating device 36a and the left vibrating device 36b jointly operate. As a result, vibration in the substantially cutting direction can be generated. Therefore, the first vibrating device 34 can vibrate the blade 22 in a substantially vertical direction, and at the same time, the second vibrating device 36 can vibrate the blade 22 in a substantially cutting direction. Therefore, the blade 22 simultaneously vibrates in the substantially vertical direction and the substantially cutting direction, and vibrates in a complex manner (that is, a composite movement).

Further, it should be noted that the upper side vibration device 34
a and the right side vibration device 36a have a phase difference of a potential difference of, for example, about 90 degrees, and the lower side vibration device 34b.
And the phase difference of the potential difference applied to the left vibration device 36b is also about 90 degrees. With this configuration, the first
Between the vibration of the blade 22 by the vibrating device 34 and the vibration of the blade 22 by the second vibrating device 34 is about 1 /
A deviation of 4 cycles occurs. Therefore, the blade 22 is not displaced in the substantially cutting direction by the second vibrating device 36 when the blade 22 is maximally displaced in the substantially vertical direction by the first vibrating device 34. On the other hand, when the second vibrating device 36 causes maximum displacement in the substantially cutting direction, the first vibrating device 34 does not cause displacement in the substantially vertical direction.

Therefore, as shown in FIG. 6B, the center 30a of the spindle 30 is located on a substantially elliptical orbit centered on the reference position and is located at position A → position B → position C → position D → position A.
Move to. The distance between position A and position C (ie,
The ratio of the length of the major axis of the ellipse) to the distance between the positions B and D (that is, the length of the minor axis of the ellipse) is, for example, about 3: 2. This is because the ratio of the amplitude of the potential difference applied to the first vibrating device 34 and the second vibrating device 36 as described above is, for example, about 3: 2. Note that the present invention is not limited to this example, and the amplitude ratio of the potential difference may be adjusted so that the locus of the center 30a of the spindle 30 becomes a substantially ellipse having different length ratios of the long axis and the short axis.

As described above, the spindle 30 has its center 30a by the first and second vibrating devices 34 and 36.
So that the locus of is almost elliptical (that is, elliptical vibration)
To do. Therefore, the blade 22 can perform a complex motion that causes an elliptical vibration during the cutting process to vibrate the workpiece 12. Therefore, the frictional force generated between the blade 22 and the workpiece 12 can be reduced to prevent the blade 22 from being caught, and the blade 22 and the workpiece 12 can be suppressed.
The cutting water enters between them to improve the cooling effect, which makes the cutting process smooth and effective. Therefore, for example, chipping that occurs on the kerf and burrs during metal material processing are reduced, processing accuracy is improved, and wear and damage of the blade 22 can be suppressed.

Next, the effect of the combined movement of the blade 22 according to this embodiment on the kerf width will be described.
As described in FIG. 4, the first and second vibration devices 3
By tilting the spindle housing 32 by 4, 36, the blade 22 can be vibrated with the amplitude a.
However, since the blade 22 also inclines at a predetermined angle with the inclination of the spindle housing 32, if the inclination of the blade 22 is excessive, the kerf width formed on the workpiece 12 is expanded, which impairs the processing quality. Come on.

In the present embodiment, assuming that the amplitude a of the blade 22 is, for example, about 5 μm, the blade having a radius of 30 mm expands the kerf width to a maximum of about 1.
2 μm is enough. Therefore, the effect of vibration processing on the kerf width is that the kerf width without vibration processing (for example, 25 to
It is very small compared to 300 μm). Therefore, the cutting process by the blade 22 which moves in a complex manner according to the present embodiment is useful because it does not significantly affect the processing quality.

The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims, and naturally, these are also within the technical scope of the present invention. It is understood that it belongs.

For example, the workpiece 12 to be diced may be a difficult-to-machine material such as ceramic, sapphire, composite material, various metal materials, semiconductor wafer, or the like.
Further, as the work piece 12, a magnetic head such as VTR or FDD, a crystal, a glass, a small electronic component, a piezoelectric crystal material typified by lithium niobate, or a brittle material such as ferrite can be applied.

Further, the first and the second according to the present embodiment
The piezo elements made of a piezoelectric material are used for the vibrating devices 34 and 36, but the present invention is not limited to this example. For example, a vibrator made of a magnetostrictive material, a giant magnetostrictive material, a vibrating plate, or a vibration generator. And so on.

The cutting unit 20 is not limited to the cutting process, but may be a cutting process for completely cutting the workpiece 12. The method for processing the work piece 12 is not limited to dicing for forming a kerf in the shape of a dice, but cutting for cutting or cutting the work piece 12 linearly only in a predetermined direction or in an arbitrary direction. Good.

Further, although the compound motion of the blade 22 according to the present embodiment is elliptical vibration, it is not limited to this example,
For example, the first vibrating device 34 and the second vibrating device 36
The blades 22 may be configured to perform a combined motion (that is, circular vibration) so as to draw a substantially circular locus by making the amplitudes of the potential differences given to them substantially the same. In addition, the blade 2 is adjusted by adjusting the amplitude of the potential difference applied to the first vibrating device 34 and the second vibrating device 36, the frequency, or the phase difference between the two.
2 can be made to perform a complex motion in various modes, such as a simple vibration or a vibration so that the locus becomes a substantially 8-shape.

Furthermore, in the present embodiment, the potential difference applied to the first and second vibrating devices 34, 36 is a potential difference that changes with time in a substantially sinusoidal shape, but is not limited to this example. As long as the vibrating device has a potential difference capable of generating vibration, it may be a potential difference that arbitrarily changes with time, for example, when a plurality of pulse-like or positive or negative potential differences having a predetermined value are alternately applied.

Further, the first and the second according to the present embodiment
Although the vibration devices 34 and 36 vibrate the spindle 30 in the substantially vertical direction and the substantially cutting direction, the present invention is not limited to such an example, and the spindle 30 may be vibrated in any two directions.

Further, the dicing machine according to the present embodiment has two vibrating devices, namely the first and second vibrating devices 34 and 36, and vibrates the spindle 30 and the blade 22 in two different directions. It is not limited to such an example. For example, three or more vibrating devices may be installed so that the blade 22 can vibrate in three or more different directions.

Although the blade 22 according to the present embodiment has a ring shape, the present invention is not limited to this example, and may be, for example, a hub blade in which a hub and a cutting edge portion are integrally formed. .

[0078]

As described above, in the dicing machine according to the present invention, since the blade makes a composite motion by the first vibrating device and the second vibrating device, the work piece can be vibrated in a complex manner. Therefore, the work piece can be cut more smoothly and effectively by, for example, generating chipping when processing a difficult-to-process material and reducing the size of burrs when processing a metal material. Therefore, it is possible to improve the processing quality and reduce blade wear and damage.

Further, since the blade is vibrated via the spindle, the mechanism for generating the vibration is relatively simple and the vibration control is easy. Therefore, the cost of the vibration device can be reduced, and complex vibration machining can be easily realized.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a dicing device according to a first embodiment.

FIG. 2 is a perspective view of a cutting unit according to the first embodiment.

FIG. 3A is a right side view of the cutting unit according to the first embodiment. FIG. 3B is a cross-sectional view of the cutting unit at a position where the first and second vibrating devices according to the first embodiment are arranged.

FIG. 4 is an explanatory diagram of a mechanism for vibrating the spindle by the first vibrating device according to the first embodiment.

FIG. 5A is a front view of a blade for showing a mode in which the first and second vibrating devices according to the first embodiment periodically vibrate the blade. Figure 5 (b)
[Fig. 4] is a graph showing changes in potential difference applied to the first vibrating device. FIG. 5C is a projection view in which the position of the center of the spindle when the blade vibrates is projected onto the YZ plane.

FIG. 6A is a graph showing changes in potential difference applied to the first vibrating device and the second vibrating device according to the first embodiment. FIG. 6B is a projection diagram in which the position of the center of the spindle during combined movement of the blade according to the first embodiment is projected onto the YZ plane.

[Explanation of symbols]

10: Dicing machine body 12: Workpiece 20: Cutting unit 22: Blade 30: Spindle 32: Spindle housing 34: First vibration device 34a: Upper vibration device 34b: Lower vibration device 36: Second vibration device 36a: Right side vibration device 36b: Left vibration device

Continued front page    (72) Inventor Isao Yukawa             2-14-3 Higashikotani, Ota-ku, Tokyo De Co., Ltd.             Within Isco F term (reference) 3C049 AA03 AA11 CB01 CB05 CB08

Claims (2)

[Claims] 1. A dicing device comprising a blade that rotates at a high speed to cut a workpiece and a spindle that rotates the blade at a high speed, a first vibrating device that vibrates the spindle in a substantially vertical direction, and Cutting a workpiece by having a second vibrating device that vibrates the spindle in a direction in which the blade cuts the workpiece, and causes the blade to perform a combined motion by the first and second vibrating devices. A dicing device characterized by. 2. The dicing device according to claim 1, wherein the first and second vibrating devices generate vibration in accordance with expansion and contraction of the piezoelectric material.