JP2003068186A - Plasma display panel and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a panel allowing a display of high quality without generating a withstand pressure failure or an error discharge between adjacent cells. SOLUTION: Electrode pairs consisting of display electrodes 3 and 4 are formed on the surface of a front substrate 1 in two or more lines. A dielectric layer 6 is formed on the front substrate 1 to cover the display electrode pairs. The display electrodes 3 and 4 are each formed of a transparent electrode 8 and a bus electrode 9. A light shielding material layer 16 is formed in a position above the area between adjacent display electrodes on the dielectric layer 6. The light shielding material layer 16 is formed so that its end part is located on the bus electrode 9. The light shielding material layer 16 is successively exposed and developed from the back side of the front substrate 1, whereby a light shielding layer 17 is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel used for a display device and the like and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, a plasma display panel (hereinafter referred to as "panel"), which has been attracting attention as a display device suitable for a thin type, has a structure shown in FIG. 4, for example. A substrate 1 and a back substrate 2 are provided. Here, in FIG. 4, the front substrate 1 and the rear substrate 2 are shown apart from the actual panel.

A plurality of display electrode pairs consisting of display electrodes 3 and display electrodes 4 are arranged on the front substrate 1, and a light shielding layer 5 is provided between the display electrode pairs. A dielectric layer 6 is formed so as to cover the display electrodes 3 and 4 and the light shielding layer 5, and a protective layer 7 made of magnesium oxide (MgO) is formed on the dielectric layer 6. The display electrodes 3 and 4 are made of indium tin oxide (ITO) or tin oxide (SnO ₂ ).
And a bus electrode 9 made of silver (Ag) or the like. The bus electrode 9 is formed on the transparent electrode 8 formed on the front substrate 1.

Display electrodes 3, 4 are provided on the rear substrate 2.
A plurality of address electrodes 10 are formed in a direction orthogonal to
A dielectric layer 11 is formed so as to cover the address electrodes 10. A partition wall 12 is formed on the dielectric layer 11 so as to be located between the address electrodes 10, and a phosphor layer 13 is applied to the surface of the dielectric layer 11 and the side surface of the partition wall 12.

A discharge space is formed between the front substrate 1 and the rear substrate 2, and a discharge gas composed of, for example, a mixed gas of neon (Ne) and xenon (Xe) is 400 to 60.
It is sealed at a pressure of 0 Torr. This discharge gas
Ultraviolet rays generated when a display discharge is generated between the display electrode 3 and the display electrode 4 forming the display electrode pair cause the phosphor layer 13 to emit light to display a color image.

Next, a method of forming the light shielding layer 5 and the like on the front substrate 1 will be described with reference to FIG. Although FIG. 5 is a sectional view, the front substrate 1 and the transparent electrode 8 are shown without hatching.

First, as shown in FIG. 5A, the display electrodes 3 and 4 composed of the transparent electrode 8 and the bus electrode 9 are formed on the front substrate 1. Next, the photosensitive light shielding material layer 14 is formed by the screen printing method (FIG. 5B). After that, the photomask 15 is placed on the light shielding material layer 14 and exposed (FIG. 5C). Subsequently, the light shielding material layer 14 is patterned by developing, and then baked to form the light shielding layer 5 (FIG. 5D). Next, the dielectric material layer 6 is formed by forming a dielectric material layer on the front substrate 1 so as to cover the transparent electrodes 8, the bus electrodes 9 and the light shielding layer 5 and baking the dielectric material layer.
And then a protective layer 7 made of MgO is formed on the dielectric layer 6 (FIG. 5E).

[0008]

However, in the conventional manufacturing method, the photomask 15 is exposed to light while being directly contacted with the light-shielding material layer 14, so that the photomask 15 has defects or dust or the like. If it adheres to the film, a defect may occur in the pattern shape of the light shielding layer 5 as a result. Further, the photomask 15 is aligned so that the position of the light shielding layer 5 is located at the intermediate position between the display electrode pair, but the photomask 15 is not always located at the intermediate position, and the photomask 15 may be displaced. there were. Furthermore, the front substrate 1 contracts during the firing of the electrodes when forming the display electrodes 3 and 4, so that the front substrate 1
It may be difficult to accurately align the photomask 15 on the entire surface of the photomask, and the photomask 15 may be partially displaced. In such a case, as shown in FIG. 6, the light shielding layer 5 is formed on the transparent electrode 8 and the bus electrode 9, and a defect such as a crack is generated in the dielectric layer 6 to cause a discharge gas. This may have caused a breakdown voltage failure when discharged. In addition, it also causes a decrease in contrast.

Further, in the conventional manufacturing method, the light shielding material layer 1
4 is printed on substantially the entire surface of the front substrate 1 to form a light-shielding layer 5 having a predetermined pattern by a photolithography method, and the unnecessary portion of the light-shielding material layer in the developing step of the light-shielding material layer 14 is a waste liquid after development. Is treated as. This unnecessary portion of the light shielding material layer corresponds to about 75% of the area of the front substrate 1 and the utilization efficiency of the material is poor.

Further, in the conventional panel, there is a problem that due to the influence of the discharge in a certain display electrode pair, the discharge is likely to occur in the adjacent display electrode pair, but the discharge is likely to occur, resulting in an erroneous discharge. It was

The present invention has been made to solve such a problem, and enables high-quality display without causing a breakdown voltage failure or erroneous discharge between adjacent display electrode pairs. The purpose is to realize the panel.

[0012]

In order to achieve this object, a method of manufacturing a plasma display panel according to the present invention comprises forming a plurality of display electrode pairs, each of which is a pair of display electrodes, on a surface of a substrate. Forming a dielectric layer on the surface of the substrate to cover the display electrode pairs, and forming a light shielding material layer on the dielectric layer at a position above a region between adjacent display electrode pairs; When forming the light-shielding layer by exposing and developing the light-shielding material layer from the back side of the substrate, a light-shielding region that shields light for exposure is provided on adjacent display electrodes across the region, The light shielding material layer is formed so that the end portion thereof is located on the light shielding region.

According to this method, the light-shielding layer is not formed on the display electrode in a state of riding on the display electrode. In addition, the display electrode is used instead of the light-shielding mask for the exposure process, and since it is not necessary to use the photomask, the exposure process can be easily performed, and the cost can be reduced.

Further, in the plasma display panel of the present invention, a plurality of display electrode pairs each consisting of a pair of display electrodes are arranged on one of the two substrates arranged to face each other so as to form a discharge space therebetween. A dielectric layer is formed on the substrate so as to cover the display electrode pairs, and a light-shielding layer is formed above the dielectric layers between adjacent display electrode pairs.

With this configuration, the light-shielding layer has a shape protruding into the discharge space between the adjacent display electrode pairs, and this shape hinders the movement of charges between the adjacent display electrode pairs, resulting in erroneous discharge. Can be prevented.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings of FIGS. 1 to
In FIG. 3, the same parts as those shown in FIGS. 4 to 6 are designated by the same reference numerals.

FIG. 1 is a cross-sectional view of an essential part showing a method of manufacturing a panel according to an embodiment of the present invention, which is a view for explaining a step of forming a display electrode, a light shielding layer and the like on a front substrate. is there. In FIG. 1, the front substrate 1 and the transparent electrode 8 are
The hatching is omitted.

First, as shown in FIG. 1A, a transparent electrode 8 made of ITO or SnO _{2 having} a thickness of about 3000 Å is formed on the surface of a front substrate 1 made of soda glass having a thickness of about 2.8 mm. After forming, the bus electrode 9 made of Ag is laminated on the transparent electrode 8. The transparent electrode 8 and the bus electrode 9 formed thereon constitute the display electrode 3 and the display electrode 4, respectively, and a plurality of display electrode pairs including the display electrode 3 and the display electrode 4 are arranged on the front substrate 1 in a plurality of rows. . In FIG. 1A, display electrodes 3 and display electrodes 4 in the center form a display electrode pair arranged in a predetermined row, and display electrodes 3 and display electrodes 4 on both sides are arranged in adjacent rows. It constitutes an electrode pair. Display electrodes 3, 4
Can be formed by a method such as a screen printing method or a photolithography method.

Subsequently, a dielectric paste made of a lead boric acid-based glass material is screen-printed on the surface of the front substrate 1 so as to cover the display electrode pairs made up of the display electrodes 3 and the display electrodes 4 and fired. A dielectric layer 6 having a thickness of about 30 μm is formed (FIG. 1B).

Next, a black paste of lead-based glass is printed on the dielectric layer 6 at a position above a region between adjacent display electrode pairs using a mask for screen printing to shield the light-shielding material layer 16. To form. At this time, the light shielding material layer 1
Both ends of 6 are located above the bus electrodes 9 of the display electrodes 3 and 4 which are adjacent to each other with the region between the display electrode pair interposed therebetween (FIG. 1C).

After that, the light-shielding material layer 16 is exposed using ultraviolet rays having an intensity of about 600 mJ / cm ² . At this time,
Irradiation of ultraviolet rays from the side of the predetermined surface of the front substrate 1 (the surface on which the display electrodes 3 and 4 and the dielectric layer 6 are formed is the front surface of the front substrate 1, so the predetermined surface is the back surface of the front substrate 1). (FIG. 1 (d)). At this time, the bus electrode 9 acts as a light-blocking region that blocks ultraviolet rays which are light for exposure,
The light shielding material layer 16 is exposed by using the bus electrode 9 as a light shielding mask. That is, the self-alignment exposure process is performed.

Next, the light-shielding material layer 16 that has been exposed to light is developed using an aqueous sodium carbonate solution, and the light-shielding material layer 16 is then developed.
Remove the unexposed part of. After that, the light shielding layer 17 is formed on the dielectric layer 6 by washing with pure water, drying and baking (FIG. 1E).

As described above, since the light-shielding material layer 16 is subjected to the self-alignment exposure process, and it is not necessary to use a photomask, the defect of the photomask and the pattern shape defect of the light-shielding layer 17 due to the adhesion of dust or the like. Will never occur. Further, the formed light-shielding layer 17 is accurately positioned above the region between the bus electrodes 9, so that the light-shielding layer 17 is not misaligned and formed.
Further, since the light shielding layer 17 is formed on the dielectric layer 6, it is possible to suppress the occurrence of defects such as cracks in the dielectric layer 6 which has been a problem in the conventional manufacturing method. further,
Since the light-shielding material layer 16 may be formed by coating within the necessary minimum range, the amount of the light-shielding material layer removed in the subsequent developing step is extremely small as compared with the conventional manufacturing method, and the light-shielding material It is possible to improve the use efficiency and reduce the cost.

After forming the light shielding layer 17 as described above, although not shown in FIG. 1, a protective layer 7 made of MgO is formed on the dielectric layer 6 so as to cover the light shielding layer 17 by using a vacuum deposition method. Form. This completes the formation of the components such as the display electrodes 3 and 4 and the light shielding layer 17 on the front substrate 1.

The structure of the back plate is the same as that of the conventional panel shown in FIG. 4, and its manufacturing method will be described.

First, a conductive material containing silver as a main component is applied in stripes at regular intervals by a screen printing method on a rear substrate 2 made of soda glass having a thickness of about 2.6 mm, and a thickness of about 5 is obtained. The address electrode 10 of 10 μm is formed. Subsequently, a lead-based glass paste is applied onto the rear substrate 2 so as to cover the address electrodes 10 and fired to a thickness of about 20 to 3
A 0 μm dielectric layer 11 is formed. Next, using a coating method by die coating, a paste-like partition wall material containing lead glass as a main component and alumina powder as an aggregate is applied and formed on the dielectric layer 11, and the sandblast method is used. The partition wall material is cut and baked, and the height is about 100 to 150.
The partition 12 having a thickness of μm is formed. After that, red, green, and blue phosphor inks are applied to the side surfaces of the partition walls 12 and the surface of the dielectric layer 11, dried, and baked to form the phosphor layers 13 of each color. This completes the formation of the predetermined constituent members on the rear substrate 2.

The front substrate 1 and the rear substrate 2 on which the predetermined constituent members are formed as described above are opposed to each other so that a discharge space is formed between the display electrodes 3 and 4 and the address electrode 10 at right angles. The front substrate 1 and the rear substrate 2 are arranged and the outer peripheral edge portions thereof are adhered with a sealing glass to form a panel. FIG. 2 is a cross-sectional view showing the main part of the panel according to the embodiment of the present invention thus obtained, and the transparent electrodes 8 are shown without hatching.

As shown in FIG. 2, a front substrate 1 and a rear substrate 2 are arranged so as to face each other so as to form a discharge space therebetween, and the front substrate 1 is composed of a pair of display electrodes 3 and display electrodes 4. A plurality of display electrode pairs are arranged in a plurality of rows, and the central display electrode 3 and the display electrode 4 constitute one display electrode pair.
The display electrodes 3 and 4 each include a transparent electrode 8 and a bus electrode 9, and a dielectric layer 6 is formed on the front substrate 1 so as to cover the display electrodes 3 and 4. In addition, a linear light-shielding layer 17 is formed above the dielectric layer 6 between adjacent display electrode pairs, and the width of the light-shielding layer 17 is almost equal to the distance between adjacent display electrode pairs. Is the same. Further, a protective layer 7 is formed on the dielectric layer 6 so as to cover the light shielding layer 17. In the discharge space,
Helium (He), neon (Ne) and xenon (X
e) Discharge gas composed of rare gas is 400 to 600 To
It is sealed at a pressure of rr.

One discharge cell formed by the discharge space at the intersection of the display electrode 3 and the display electrode 4 forming the display electrode pair and the address electrode 10 has a predetermined color (red, blue or green) in image display. It becomes a display unit. The phosphor layer 13 is caused to emit light by the ultraviolet rays generated when a display discharge is generated between the display electrode 3 and the display electrode 4 forming the display electrode pair, and a color image is displayed.

In the panel according to the present embodiment as described above, the light shielding layer 1 is provided above the adjacent display electrode pairs.
Since 7 is provided so as to project into the discharge space, the movement of charges between the discharge cells in the adjacent row is blocked by the light shielding layer 17, and the occurrence of erroneous discharge between the adjacent display electrode pairs is prevented. can do. Therefore, the distance between the adjacent display electrode pairs can be made smaller than that of the conventional panel, so that the light emitting region can be expanded correspondingly and the brightness can be improved. In addition, the light shielding layer 17
As a result, the whitish phosphor layer 13 that does not emit light is not visually recognized, so that the contrast of the image is improved. Furthermore, since the occurrence of defects such as cracks in the dielectric layer 6 is suppressed, it is possible to prevent the occurrence of breakdown voltage failure during panel operation.

Next, a panel according to another embodiment of the present invention will be described with reference to FIG. The difference from the panel of FIG. 2 is the pattern shape of the light shielding layer, and FIG.
FIG. 3 is a schematic plan view showing a positional relationship among the display electrodes 3, 4 and the partition wall 12 so as to be understood.

As in the panel shown in FIG. 2, the light shielding layer 18 is formed above the dielectric layer 6 between the adjacent display electrode pairs, but as shown in FIG. The light-shielding layer 18 is not formed in a region facing (the end of the partition wall 12 facing the protective layer 7). That is, the light shielding layer 18 is partially formed so that there is no portion that intersects with the partition wall 12. Therefore, the entire top of the barrier ribs 12 and the protective layer 7 are in contact with each other, so that erroneous discharge can be prevented from occurring between the discharge cells adjacent in the row direction.

Next, a method for forming the patterned light-shielding layer 18 shown in FIG. 3 will be described. In the method of manufacturing a panel described with reference to FIG. 1, as shown in FIG. 1D, ultraviolet rays are irradiated from the back side of the front substrate 1 to shield the light shielding material layer 1.
When exposing 6, the predetermined photomask is arranged on the back side of the front substrate 1, and ultraviolet rays are radiated through the photomask for exposure. In the photomask used at this time, a linear light-shielding region (a region that blocks light for exposure) having a width of the top of the partition 12 or a width slightly wider than that width is used as the partition 12
The photomask is formed on the back side of the front substrate 1 so that the linear light shielding regions are orthogonal to the display electrodes 3 and 4. When arranging the photomask, it is sufficient that the light-shielding region of the photomask and the bus electrode 9 acting as a light-shielding region that blocks ultraviolet rays are orthogonal to each other. Therefore, extremely high positional accuracy is not required, and the photomask is not required. It is extremely unlikely that the shape of the light shielding layer 18 is abnormal due to the displacement of the mask. By exposing the light shielding material layer 16 in this manner, as shown in FIG.
The light shielding layer 18 having the pattern shape shown in can be formed.

In the above embodiment, the case where the display electrode pair is composed of two display electrodes having transparent electrodes has been described, but the display electrode pair is formed of the first display electrode and the first display electrode formed on both sides thereof. Even when the display discharge is formed between the first display electrode and the second display electrodes on both sides of the first display electrode (at two locations), the same effect can be obtained by implementing the present invention. The effect can be obtained. Even when the display electrode pair is composed of, for example, four display electrodes, and the display discharge is performed between two display electrodes, the same effect can be obtained by implementing the present invention. As described above, even when three or more display electrodes are formed in one row, the present invention can be implemented assuming that the display electrodes form a display electrode pair including a pair of display electrodes. Furthermore, the present invention can be implemented even when the display electrode is composed of only a metal electrode without using a transparent electrode.

[0035]

As described above, according to the present invention, it is possible to realize a panel capable of high-quality display without causing a withstand voltage failure or erroneous discharge between adjacent display electrode pairs.

[Brief description of drawings]

1A to 1E are cross-sectional views of a main part showing a step of forming a light shielding layer and the like of a plasma display panel according to an embodiment of the present invention.

FIG. 2 is a sectional view of a plasma display panel according to an embodiment of the present invention.

FIG. 3 is a schematic plan view showing the shape of a light shielding layer of a plasma display panel according to another embodiment of the present invention.

FIG. 4 is a perspective view of a conventional plasma display panel.

5A to 5E are cross-sectional views of a main part showing a step of forming a light-shielding layer and the like of a conventional plasma display panel.

FIG. 6 is a cross-sectional view of an essential part showing a light-shielding layer formed by being displaced by a conventional plasma display panel manufacturing method.

[Explanation of symbols]

1 Front substrate 2 Back substrate 3, 4 display electrodes 5 Light-shielding layer 6, 11 Dielectric layer 7 protective layer 8 transparent electrodes 9 bus electrodes 10 address electrodes 12 partitions 13 Phosphor layer 14, 16 Light-shielding material layer 15 Photo mask 17, 18 Shading layer

Continued front page    (72) Inventor Morio Fujitani             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Taku Watanabe             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Nobuyuki Tai             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5C027 AA10                 5C040 GH06 GH07 JA15 LA17 MA02                       MA04 MA20 MA23

Claims (4)

[Claims] 1. A plurality of display electrode pairs consisting of a pair of display electrodes are formed in an array on a surface of a substrate, and a dielectric layer is formed on the surface of the substrate to cover the display electrode pairs.
A light-shielding material layer is formed at a position above the region between adjacent display electrode pairs on the dielectric layer, and then the light-shielding material layer is exposed and developed from the back side of the substrate to form the light-shielding layer. When forming, a light-shielding region that shields light for exposure is provided on the display electrodes adjacent to each other across the region, and the end portion of the light-shielding material layer is formed on the light-shielding region. And a method for manufacturing a plasma display panel. 2. A substrate using a photomask formed so that a region for blocking light for exposure corresponds to a position of a partition wall orthogonal to a display electrode, and the photomask is arranged on the back side of the substrate. The method for manufacturing a plasma display panel according to claim 1, wherein the light shielding material layer is exposed from the back side of the substrate through the photomask. 3. A plurality of display electrode pairs consisting of a pair of display electrodes are arranged and formed on one of the two substrates arranged to face each other so as to form a discharge space therebetween, and the display electrode pairs are formed. A plasma display panel comprising: a dielectric layer formed on the substrate so as to cover the substrate; and a light-shielding layer formed on the dielectric layer at an upper position between adjacent display electrode pairs. 4. A partition wall formed in a direction orthogonal to the light blocking layer between the two substrates, and the light blocking layer is partially formed so that there is no portion where the light blocking layer intersects with the partition wall. The plasma display panel according to claim 3, wherein the plasma display panel is formed.