JP2003066478A - Anisotropic conductive film sticking device and anisotropic conductive film sticking method - Google Patents

Anisotropic conductive film sticking device and anisotropic conductive film sticking method

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Publication number
JP2003066478A
JP2003066478A JP2001254680A JP2001254680A JP2003066478A JP 2003066478 A JP2003066478 A JP 2003066478A JP 2001254680 A JP2001254680 A JP 2001254680A JP 2001254680 A JP2001254680 A JP 2001254680A JP 2003066478 A JP2003066478 A JP 2003066478A
Authority
JP
Japan
Prior art keywords
acf
conductive film
anisotropic conductive
tape
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001254680A
Other languages
Japanese (ja)
Inventor
Toshio Takahashi
利男 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2001254680A priority Critical patent/JP2003066478A/en
Publication of JP2003066478A publication Critical patent/JP2003066478A/en
Pending legal-status Critical Current

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  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To surely stick an ACF onto a glass substrate without peeling of the ACF even if an ambient temperature rises in an ACF sticking step. SOLUTION: The ACF tape formed by pasting the anisotropic conductive film (ACF) on a base tape is supplied to the substrate side in the ACF sticking step of supplying the tape pasted with the anisotropic conductive film to the substrate and sticking the anisotropic conductive film to this substrate by thermocompression bonding. At this time, the anisotropic conductive film pasted to this tape is cooled. As a result, even if the ambient temperature rises, the thermal deterioration of the ACF can be prevented. The ACF can be stuck onto the substrate without peeling of the ACF.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示装置等の
製造工程の1つであるアウターリードボンディング(O
LB)工程においてテープキァリアーパッケージ(TC
P)等の電子部品を異方性導電膜(ACF)を介して液
晶表示装置のガラス基板等の基板に実装する際に、用い
て好適な基板にACFを貼付ける異方性導電膜貼付装置
(ACF貼付装置)及び異方性導電膜貼付方法(ACF
貼付方法)に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to outer lead bonding (O) which is one of the manufacturing processes of liquid crystal display devices and the like.
LB) tape carrier package (TC
Anisotropic conductive film sticking device for sticking ACF on a substrate suitable for use when mounting an electronic component such as P) on a substrate such as a glass substrate of a liquid crystal display device through an anisotropic conductive film (ACF) (ACF sticking device) and anisotropic conductive film sticking method (ACF sticking device)
Pasting method).

【0002】[0002]

【従来の技術】従来、例えば、液晶表示装置の製造工程
の1つであるアウターリードボンディング(OLB)工
程では、液晶表示装置のガラス基板の端子部を清掃した
後、この端子部にACF(異方性導電膜)を貼付けるA
CF貼付工程がある。その後、このACFを介してTC
P(テープキャリアーパッケージ)をガラス基板に仮圧
着するTCP仮圧着工程と、このTCP仮圧着工程でガ
ラス基板に仮圧着されたTCPを加熱してガラス基板に
完全に圧着するTCP本圧着工程に進む。
2. Description of the Related Art Conventionally, for example, in an outer lead bonding (OLB) process which is one of the manufacturing processes of liquid crystal display devices, after cleaning a terminal portion of a glass substrate of a liquid crystal display device, an ACF (different A is attached.
There is a CF attachment process. Then, through this ACF, TC
Proceed to the TCP temporary pressure bonding step of temporarily bonding P (tape carrier package) to the glass substrate and the TCP main pressure bonding step of heating the TCP temporarily pressure bonded to the glass substrate in this TCP temporary pressure bonding step to completely pressure bond the glass substrate. .

【0003】従来のACF貼付工程で用いられるACF
貼付装置では、図4に示すように、供給リール1からA
CFテープ10(ACFをベーステープに貼着して構成
される)がガラス基板20側に供給され、ツール3によ
り上からACFテープ10を加圧することにより、ベー
ステープに貼着しているACFをガラス基板20の端子
部に貼付ける。このツール3にヒータが内蔵されてい
て、ACFテープ10を加熱しながら前記端子部にAC
F(図示せず)を熱圧着する。ACFをガラス基板20
に熱圧着してACFが剥離したベーステープ11は巻取
リール2により巻き取られる。
ACF used in the conventional ACF sticking process
In the pasting device, as shown in FIG.
The CF tape 10 (which is formed by adhering the ACF to the base tape) is supplied to the glass substrate 20 side, and the tool 3 presses the ACF tape 10 from above to remove the ACF attached to the base tape. It is attached to the terminal portion of the glass substrate 20. The tool 3 has a built-in heater, and while heating the ACF tape 10, AC is applied to the terminal portion.
F (not shown) is thermocompression bonded. ACF on glass substrate 20
The base tape 11 from which the ACF has been peeled off by thermocompression bonding is wound on the winding reel 2.

【0004】[0004]

【発明が解決しようとする課題】上記した従来のACF
貼付装置では、ガラス基板20にACFを貼付ける時に
熱圧着する必要から、この熱圧着の熱源となる上記ツー
ル3内のヒータからの放熱によって装置内温度が上昇
(30℃以上)する。一方、ACFテープ10は、品種
によってばらつきがあるが一般に28℃以上になると、
熱による劣化が促進される特性がある。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
In the pasting device, since it is necessary to perform thermocompression bonding when adhering the ACF to the glass substrate 20, the temperature inside the device rises (30 ° C. or higher) due to heat radiated from the heater in the tool 3 which is a heat source of the thermocompression bonding. On the other hand, the ACF tape 10 varies depending on the type, but generally when the temperature is 28 ° C. or higher,
It has the property of promoting deterioration due to heat.

【0005】このため、上記のように装置内温度が上昇
すると、その影響でACFテープ10が加熱され、AC
Fテープ10は供給リール1に巻き回された状態で熱劣
化し、ACFの粘着性が悪くなる。このような熱劣化し
たACFテープ10のACFをガラス基板20の端子部
に貼付けても、その端部などでめくれが起こり、このめ
くれのあるACFにTCPを本圧着した場合、TCPが
ガラス基板に圧着しない部分が生じる。
Therefore, when the temperature inside the apparatus rises as described above, the ACF tape 10 is heated due to the influence of the temperature, and the AC
The F tape 10 is thermally deteriorated while being wound around the supply reel 1, and the adhesiveness of the ACF is deteriorated. Even if the ACF of the ACF tape 10 which has been thermally deteriorated is attached to the terminal portion of the glass substrate 20, the end portion of the ACF tape is turned over. When TCP is permanently pressure-bonded to the turned-up ACF, the TCP is attached to the glass substrate. Some parts are not crimped.

【0006】そこで、上述したACFのめくれが起きる
と、センサなどでこれを検出し、ACFのめくれが生じ
たガラス基板をエラーとして取り出し、再度、ACFの
貼付けを行うことがなされるが、これでは生産効率が悪
化するという不具合があった。
Therefore, when the above-mentioned ACF curl occurs, a sensor or the like detects this, the glass substrate in which the ACF curl has occurred is taken out as an error, and the ACF is pasted again. There was a problem that production efficiency deteriorated.

【0007】本発明は、上述の如き従来の課題を解決す
るためになされたもので、その目的は、ヒータからの放
熱による周囲温度の上昇に起因する異方性導電膜のめく
れを防止して異方性導電膜を基板に確実に貼付けること
ができる異方性導電膜貼付装置及び異方性導電膜貼付方
法を提供することである。
The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to prevent the anisotropic conductive film from being turned over due to an increase in ambient temperature due to heat radiation from a heater. An anisotropic conductive film sticking device and an anisotropic conductive film sticking method capable of surely sticking an anisotropic conductive film to a substrate.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明の第1の特徴は、ベーステープに異方性導電
膜を貼着して成るACFテープを基板側に供給し、前記
基板に前記ACFテープの異方性導電膜を熱圧着して貼
付ける異方性導電膜貼付装置において、前記ACFテー
プを冷却する冷却手段を具備することである。
In order to achieve the above-mentioned object, the first feature of the present invention is to supply an ACF tape formed by sticking an anisotropic conductive film to a base tape to the substrate side, An anisotropic conductive film sticking device for sticking the anisotropic conductive film of the ACF tape to a substrate by thermocompression bonding is provided with a cooling means for cooling the ACF tape.

【0009】本発明の第2の特徴は、ベーステープに異
方性導電膜を貼着して成るACFテープを基板側に供給
し、前記基板に前記ACFテープの異方性導電膜を熱圧
着して貼付ける異方性導電膜貼付方法において、基板側
に供給される前記ACFテープを冷却することである。
A second feature of the present invention is that an ACF tape formed by sticking an anisotropic conductive film to a base tape is supplied to the substrate side, and the anisotropic conductive film of the ACF tape is thermocompression bonded to the substrate. In the method of sticking an anisotropic conductive film, the ACF tape supplied to the substrate side is cooled.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態を図面
に基づいて説明する。図1は、本発明の異方性導電膜貼
付装置の一実施形態に係る構成を示した図である。但
し、従来例に対応する部分は同一符号を付して説明す
る。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration according to an embodiment of the anisotropic conductive film sticking apparatus of the present invention. However, the portions corresponding to the conventional example will be described with the same reference numerals.

【0011】この異方性導電膜(ACF)貼付装置は、
ACFテープ10(ACFをベーステープに貼着して構
成される)を供給する供給リール1、ベーステープ11
を巻き取る巻取リール2、ACFテープ10をガラス基
板20に熱圧着するツール3、供給リール1を冷却する
ための冷却ノズル4、ACFテープ10を冷却するため
の冷却ノズル5を有している。
This anisotropic conductive film (ACF) sticking device is
Supply reel 1, base tape 11 for supplying ACF tape 10 (which is constructed by adhering ACF to a base tape)
It has a take-up reel 2 for winding the ACF tape 10, a tool 3 for thermocompression bonding the ACF tape 10 to the glass substrate 20, a cooling nozzle 4 for cooling the supply reel 1, and a cooling nozzle 5 for cooling the ACF tape 10. ..

【0012】図2は供給リール1の正面図である。図2
に示す様に、供給リール1の側面側に冷却風50の吹き
出し口が向くように冷却ノズル4が配置され、供給リー
ル1から繰り出されるACFテープ10に直接冷却風5
0が当たるように冷却ノズル5が配置されている。
FIG. 2 is a front view of the supply reel 1. Figure 2
As shown in FIG. 3, the cooling nozzle 4 is arranged on the side surface side of the supply reel 1 so that the outlet of the cooling air 50 faces, and the cooling air 5 is directly supplied to the ACF tape 10 fed from the supply reel 1.
The cooling nozzle 5 is arranged so that 0 hits.

【0013】図3は冷却ノズル4、5を有する冷却装置
の構成例を示した図である。
FIG. 3 is a diagram showing a configuration example of a cooling device having cooling nozzles 4 and 5.

【0014】図3に示した冷却装置において、圧縮空気
源14からエアが正圧供給される配管6は、途中、電磁
弁7、流量調整弁8、ミストセパレータ9、冷却器12
を介して冷却ノズル4に接続され、また、同配管6は分
岐し、イオナイザ13を介して冷却ノズル5に接続され
ている。
In the cooling device shown in FIG. 3, the pipe 6 to which the positive pressure air is supplied from the compressed air source 14 has a solenoid valve 7, a flow rate adjusting valve 8, a mist separator 9 and a cooler 12 in the middle thereof.
Is connected to the cooling nozzle 4, and the pipe 6 is branched and connected to the cooling nozzle 5 via the ionizer 13.

【0015】次に本実施形態の動作について説明する。
ACFテープ10は供給リール1からガラス基板20側
に供給され、ツール3により上からACFテープ10を
加圧してガラス基板20の端子部にACF(異方性導電
膜)を貼付ける。ツール3にはヒータが内蔵されている
ため、ツール3はACFテープ10を加熱しながら前記
端子部にACFを熱圧着する。ACFがガラス基板20
に貼付けられた後の残りのベーステープ11は巻取リー
ル2により巻き取られる。
Next, the operation of this embodiment will be described.
The ACF tape 10 is supplied from the supply reel 1 to the glass substrate 20 side, and the tool 3 presses the ACF tape 10 from above to attach an ACF (anisotropic conductive film) to the terminal portion of the glass substrate 20. Since the tool 3 has a built-in heater, the tool 3 heats the ACF tape 10 and thermocompression-bonds the ACF to the terminal portion. ACF is glass substrate 20
The remaining base tape 11 after being attached to is wound on the winding reel 2.

【0016】この際、供給リール1はノズル4から吹き
出された冷却風50により冷却され、ACFテープ10
はノズル5から吹き出された冷却風50により冷却され
る。これにより、ツール3に内蔵されているヒータより
放射される熱により装置内部の温度が上がっていても、
供給リール1及びACFテープ10が冷却風50で冷却
されているため、ACFテープ10のACFは熱劣化が
抑制された状態で、ガラス基板20側へ送られる。それ
故、ACFはツール3によりガラス基板20の端子部に
めくれ等の不具合を生じることなく熱圧着される。
At this time, the supply reel 1 is cooled by the cooling air 50 blown from the nozzle 4, and the ACF tape 10 is cooled.
Is cooled by the cooling air 50 blown from the nozzle 5. As a result, even if the temperature inside the device is increased by the heat radiated from the heater built in the tool 3,
Since the supply reel 1 and the ACF tape 10 are cooled by the cooling air 50, the ACF of the ACF tape 10 is sent to the glass substrate 20 side in a state where thermal deterioration is suppressed. Therefore, the ACF is thermocompression-bonded by the tool 3 to the terminal portion of the glass substrate 20 without causing any trouble such as turning over.

【0017】ここで、ノズル4、5には図3に示すよう
な冷却装置により冷却されたエアが供給される。即ち、
電磁弁7がオンすると、圧縮空気源14よりのエアが電
磁弁7を通って流量調整弁8に供給され、ここで所定の
流量に調整されたエアがミストセパレータ9によりゴミ
を取り除かれて冷却器12に送られる。冷却器12によ
り10℃〜20℃に冷却されたエアは冷却ノズル4に送
られて、その吹き出し口から供給リール1の側面側に吹
き出る。
Here, the nozzles 4 and 5 are supplied with air cooled by a cooling device as shown in FIG. That is,
When the electromagnetic valve 7 is turned on, the air from the compressed air source 14 is supplied to the flow rate adjusting valve 8 through the electromagnetic valve 7, and the air adjusted to a predetermined flow rate is cooled by removing dust by the mist separator 9. Sent to the container 12. The air cooled to 10 ° C. to 20 ° C. by the cooler 12 is sent to the cooling nozzle 4 and blown out to the side surface side of the supply reel 1 from the blowout port.

【0018】他方、冷却器12により冷却されたエアは
イオナイザ13によりイオン化され、このイオン化され
た冷却風が冷却ノズル5に送られて、その吹き出し口か
らACFテープ10に吹き出る。尚、流量調整弁8でエ
アの流量を調整することにより、ACFテープ10が冷
却風でうねったりしてACFテープ10の送りに支障が
出ないように冷却ノズル4、5から吹き出る冷却風50
の強さ(風力)が調整される。
On the other hand, the air cooled by the cooler 12 is ionized by the ionizer 13, and the ionized cooling air is sent to the cooling nozzle 5 and blown out to the ACF tape 10 from its outlet. By adjusting the flow rate of the air with the flow rate adjusting valve 8, the cooling air 50 blown out from the cooling nozzles 4 and 5 does not interfere with the feeding of the ACF tape 10 due to the cooling air blowing on the ACF tape 10.
Strength (wind force) is adjusted.

【0019】ACFテープ10は供給リール1から繰り
出される時、静電気が発生して帯電するため、ACFテ
ープ10をガラス基板20のところに持ってくると、こ
のままでは、ACFテープ10が静電気によりガラス基
板20等にかってに貼りついてしまい、旨くACFをガ
ラス基板20に熱圧着することができなくなることがあ
る。それ故、冷却ノズル5から吹き出るイオン化された
冷却風50をACFテープ10に吹き付けることによ
り、ACFテープ10を除電し、確実な位置での熱圧着
を達成する。
When the ACF tape 10 is taken out from the supply reel 1, static electricity is generated and charged. Therefore, if the ACF tape 10 is brought to the glass substrate 20, the ACF tape 10 is left as it is and the ACF tape 10 is pulled by the glass substrate. There is a case where the ACF is stuck on the glass substrate 20 and the like, and the ACF cannot be properly thermocompression bonded to the glass substrate 20. Therefore, the ionized cooling air 50 blown out from the cooling nozzle 5 is blown onto the ACF tape 10 to eliminate the charge on the ACF tape 10 and achieve thermocompression bonding at a reliable position.

【0020】本実施形態によれば、ACFテープ10及
びその供給リール1を冷却風50で冷却するため、AC
Fの熱圧着のためのヒータにより装置内の温度が上昇す
ることにより、ACFテープ10の周囲温度が上昇して
いても、ACFテープ10は冷却されてその温度上昇が
防止されるため、熱劣化が抑制された状態でACFをガ
ラス基板20に熱圧着できる。それ故、この熱圧着時に
ACFのめくれが生じにくくなり、貼付エラーを削減し
て、生産効率を向上させることができる。
According to this embodiment, the ACF tape 10 and its supply reel 1 are cooled by the cooling air 50, so that the AC
Even if the ambient temperature of the ACF tape 10 rises because the temperature inside the apparatus rises due to the heater for thermocompression bonding of F, the ACF tape 10 is cooled and its temperature rise is prevented, so that heat deterioration is caused. The ACF can be thermocompression-bonded to the glass substrate 20 in a state where the above is suppressed. Therefore, the ACF is less likely to be turned over during the thermocompression bonding, and it is possible to reduce the sticking error and improve the production efficiency.

【0021】また、冷却ノズル5から吹き出る冷却風5
0は、イオナイザ13によりイオン化されて、ACFテ
ープ10の除電を行うことができるため、別途、除電手
段を設ける必要がなくなり、その分、省スペースとする
ことができる。
Further, the cooling air 5 blown out from the cooling nozzle 5
Since 0 is ionized by the ionizer 13 and the ACF tape 10 can be destaticized, it is not necessary to separately provide a destaticizing means, and the space can be saved accordingly.

【0022】尚、本発明は上記実施形態に限定されるこ
となく、その要旨を逸脱しない範囲において、具体的な
構成、機能、作用、効果において、他の種々の形態によ
っても実施することができる。例えば、冷却ノズル4で
供給リール1を冷却する目的は、供給リール1に巻き回
されている内部のACFテープ10を冷却するためであ
り、要するに、ACFテープ10が冷却されれば、冷却
ノズルの配置や数は上記実施形態に限ることはない。
The present invention is not limited to the above-described embodiments, and can be implemented in various other modes in specific configurations, functions, actions, and effects without departing from the scope of the invention. . For example, the purpose of cooling the supply reel 1 with the cooling nozzle 4 is to cool the internal ACF tape 10 wound around the supply reel 1. In short, if the ACF tape 10 is cooled, the cooling nozzle The arrangement and number are not limited to those in the above embodiment.

【0023】また、液晶表示装置のガラス基板に異方性
導電膜を貼付する例で説明したが、他の基板、例えば、
プラズマディスプレイパネルのガラス基板に異方性導電
膜を貼付する装置に適用することも可能である。
Further, although the example in which the anisotropic conductive film is attached to the glass substrate of the liquid crystal display device has been described, another substrate, for example,
It can also be applied to a device for sticking an anisotropic conductive film on a glass substrate of a plasma display panel.

【0024】[0024]

【発明の効果】以上詳細に説明したように、本発明によ
れば、ヒータからの放熱による周囲温度の上昇に起因す
る異方性導電膜のめくれを防止して異方性導電膜を基板
に確実に貼付けることができる。
As described in detail above, according to the present invention, the anisotropic conductive film is prevented from being turned over by preventing the anisotropic conductive film from being curled up due to the rise in ambient temperature due to heat radiation from the heater. It can be reliably attached.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の異方性導電膜貼付装置の一実施形態に
係る構成を示した図である。
FIG. 1 is a diagram showing a configuration according to an embodiment of an anisotropic conductive film sticking apparatus of the present invention.

【図2】図1に示した供給リールの正面図である。FIG. 2 is a front view of the supply reel shown in FIG.

【図3】図1に示した冷却ノズルを有する冷却装置の構
成例を示した図である。
FIG. 3 is a diagram showing a configuration example of a cooling device having the cooling nozzle shown in FIG.

【図4】従来の異方性導電膜貼付装置の概略構成例を示
した図である。
FIG. 4 is a diagram showing a schematic configuration example of a conventional anisotropic conductive film sticking apparatus.

【符号の説明】 1 供給リール 2 巻取リール 3 ツール 4、5 冷却ノズル 10 ACFテープ 11 ベーステープ 13 イオナイザ[Explanation of symbols] 1 supply reel 2 take-up reel 3 tools 4, 5 cooling nozzle 10 ACF tape 11 base tape 13 Ionizer

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 ベーステープに異方性導電膜を貼着して
成るACFテープを基板側に供給し、前記基板に前記A
CFテープの異方性導電膜を熱圧着して貼付ける異方性
導電膜貼付装置において、前記ACFテープを冷却する
冷却手段を、 具備することを特徴とする異方性導電膜貼付装置。
1. An ACF tape formed by sticking an anisotropic conductive film to a base tape is supplied to a substrate side, and the ACF tape is attached to the substrate.
An anisotropic conductive film sticking device for bonding an anisotropic conductive film of a CF tape by thermocompression bonding, comprising cooling means for cooling the ACF tape.
【請求項2】 前記冷却手段は、冷却風を前記ACFテ
ープに吹き付けて異方性導電膜を冷却すると共に、前記
ACFテープを巻回した供給リールにも冷却風を吹き付
けて供給リールも冷却する構成となっていることを特徴
とする請求項1に記載の異方性導電膜貼付装置。
2. The cooling means blows cooling air to the ACF tape to cool the anisotropic conductive film, and also blows cooling air to the supply reel around which the ACF tape is wound to cool the supply reel. It has a structure, The anisotropic conductive film sticking apparatus of Claim 1 characterized by the above-mentioned.
【請求項3】 前記冷却手段は、前記冷却風をイオン化
するイオン化手段を備え、このイオン化手段によりイオ
ン化された冷却風を前記ACFテープに当てて、前記A
CFテープの除電を行うことを特徴とする請求項1又は
2に記載の異方性導電膜貼付装置。
3. The cooling means comprises ionizing means for ionizing the cooling air, and the cooling air ionized by the ionizing means is applied to the ACF tape to cause the A
The anisotropic conductive film sticking device according to claim 1 or 2, wherein the CF tape is discharged.
【請求項4】 前記冷却手段は、前記冷却風の風力を調
整する調整手段を具備することを特徴とする請求項2又
は3に記載の異方性導電膜貼付装置。
4. The anisotropic conductive film sticking apparatus according to claim 2, wherein the cooling unit includes an adjusting unit that adjusts the wind force of the cooling wind.
【請求項5】 ベーステープに異方性導電膜を貼着して
成るACFテープを基板側に供給し、前記基板に前記A
CFテープの異方性導電膜を熱圧着して貼付ける異方性
導電膜貼付方法において、 基板側に供給される前記ACFテープを冷却することを
特徴とする異方性導電膜貼付方法。
5. An ACF tape formed by sticking an anisotropic conductive film to a base tape is supplied to the substrate side, and the ACF tape is attached to the substrate.
An anisotropic conductive film sticking method in which an anisotropic conductive film of a CF tape is bonded by thermocompression bonding, wherein the ACF tape supplied to the substrate side is cooled.
JP2001254680A 2001-08-24 2001-08-24 Anisotropic conductive film sticking device and anisotropic conductive film sticking method Pending JP2003066478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001254680A JP2003066478A (en) 2001-08-24 2001-08-24 Anisotropic conductive film sticking device and anisotropic conductive film sticking method

Publications (1)

Publication Number Publication Date
JP2003066478A true JP2003066478A (en) 2003-03-05

Family

ID=19082807

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP2003066478A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006038385A1 (en) * 2004-09-30 2006-04-13 Shibaura Mechatronics Corporation Adhesive film tape storing cassette replacing device, adhesive film tape storing cassette and adhesive film adhering device
KR100729246B1 (en) * 2007-05-21 2007-06-15 주식회사 나래나노텍 A device for providing anisotropic conductive film continuously and collecting used anisotropic conductive film and a bonding apparatus having the same
KR100746324B1 (en) 2006-02-17 2007-08-03 주식회사 나래나노텍 A two-tier device for providing and recovering anisotropic conductive film continuously and a bonding apparatus having the same
CN101602444B (en) * 2004-09-30 2011-04-20 芝浦机械电子装置股份有限公司 Cassette for adhesion film tape storage

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006038385A1 (en) * 2004-09-30 2006-04-13 Shibaura Mechatronics Corporation Adhesive film tape storing cassette replacing device, adhesive film tape storing cassette and adhesive film adhering device
KR100899419B1 (en) 2004-09-30 2009-05-26 시바우라 메카트로닉스 가부시키가이샤 Adhesive film tape storing cassette replacing device, adhesive film tape storing cassette and adhesive film adhering device
CN101602444B (en) * 2004-09-30 2011-04-20 芝浦机械电子装置股份有限公司 Cassette for adhesion film tape storage
KR100746324B1 (en) 2006-02-17 2007-08-03 주식회사 나래나노텍 A two-tier device for providing and recovering anisotropic conductive film continuously and a bonding apparatus having the same
KR100729246B1 (en) * 2007-05-21 2007-06-15 주식회사 나래나노텍 A device for providing anisotropic conductive film continuously and collecting used anisotropic conductive film and a bonding apparatus having the same

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