JP2003066067A5 - - Google Patents
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- Publication number
- JP2003066067A5 JP2003066067A5 JP2001254844A JP2001254844A JP2003066067A5 JP 2003066067 A5 JP2003066067 A5 JP 2003066067A5 JP 2001254844 A JP2001254844 A JP 2001254844A JP 2001254844 A JP2001254844 A JP 2001254844A JP 2003066067 A5 JP2003066067 A5 JP 2003066067A5
- Authority
- JP
- Japan
- Prior art keywords
- probe
- substrate
- conductor
- elastic member
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000523 sample Substances 0.000 claims 20
- 239000000758 substrate Substances 0.000 claims 16
- 239000004020 conductor Substances 0.000 claims 15
- 238000007689 inspection Methods 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 2
- 238000003825 pressing Methods 0.000 claims 2
- 230000005611 electricity Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001254844A JP2003066067A (ja) | 2001-08-24 | 2001-08-24 | プローブユニット、検査装置、電気光学パネル基板の検査方法および電気光学装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001254844A JP2003066067A (ja) | 2001-08-24 | 2001-08-24 | プローブユニット、検査装置、電気光学パネル基板の検査方法および電気光学装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003066067A JP2003066067A (ja) | 2003-03-05 |
| JP2003066067A5 true JP2003066067A5 (https=) | 2005-02-24 |
Family
ID=19082940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001254844A Withdrawn JP2003066067A (ja) | 2001-08-24 | 2001-08-24 | プローブユニット、検査装置、電気光学パネル基板の検査方法および電気光学装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003066067A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4513674B2 (ja) * | 2005-07-05 | 2010-07-28 | エプソンイメージングデバイス株式会社 | 電気光学装置、及び電子機器 |
| KR100766296B1 (ko) * | 2006-02-23 | 2007-10-11 | 주식회사 파이컴 | 프로브 블록 및 그것을 갖는 프로브 어셈블리 |
| JP2009192419A (ja) * | 2008-02-15 | 2009-08-27 | Micronics Japan Co Ltd | プローブユニット及び検査装置 |
-
2001
- 2001-08-24 JP JP2001254844A patent/JP2003066067A/ja not_active Withdrawn
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