JP2003061379A - Frequency characteristic computing device for motor controller - Google Patents
Frequency characteristic computing device for motor controllerInfo
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- JP2003061379A JP2003061379A JP2001248435A JP2001248435A JP2003061379A JP 2003061379 A JP2003061379 A JP 2003061379A JP 2001248435 A JP2001248435 A JP 2001248435A JP 2001248435 A JP2001248435 A JP 2001248435A JP 2003061379 A JP2003061379 A JP 2003061379A
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- Prior art keywords
- motor
- rotation
- signal
- frequency characteristic
- sensor
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体製造装置や
工作機械、産業用ロボット等に用いられて位置決め制御
をするモータ制御装置に関するものであり、特にその調
整を最適なものとするために、制御対象を含む周波数特
性を正しく測定する周波数特性演算装置に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor control device used for semiconductor manufacturing equipment, machine tools, industrial robots, etc. for positioning control, and particularly to optimize its adjustment. The present invention relates to a frequency characteristic calculation device that correctly measures a frequency characteristic including a controlled object.
【０００２】[0002]
【従来の技術】従来、半導体製造装置やロボットなどの
サーボ系を有する機械装置は、その性能を向上するた
め、サーボ系のサーボ特性を向上させる努力が払われて
きた。その際、機械を含むサーボ系の周波数特性を知る
ことが重要であり、様々な方法で計測されている。特
に、２軸以上のサーボ系を有するモータ制御装置の場合
は、１軸毎の周波数特性を別々に計測し、その結果を総
合して全体の特性が把握されていた。また、周波数特性
の測定を正確なものとするため、サーボ系で用いるセン
サと別に固定台等に振動センサを設け、振動信号を測定
するということも行われていた。2. Description of the Related Art Conventionally, efforts have been made to improve the servo characteristics of a servo system in order to improve the performance of mechanical devices having a servo system such as semiconductor manufacturing equipment and robots. At that time, it is important to know the frequency characteristic of the servo system including the machine, and it is measured by various methods. In particular, in the case of a motor control device having a servo system with two or more axes, the frequency characteristics of each axis were measured separately, and the results were combined to grasp the overall characteristics. In addition, in order to measure the frequency characteristic accurately, a vibration sensor is provided on a fixed base or the like separately from the sensor used in the servo system to measure the vibration signal.
【０００３】[0003]
【発明が解決しようとする課題】ところが上記のような
従来技術では、全軸の周波数特性を計測するには長時間
を要するという問題があった。特に、軸間に干渉がある
場合は、軸間の組み合わせを考慮する必要があるため、
１軸の周波数特性を計測するよりも多くの時間と手間を
要し、計測した結果を処理するときにも多大の時間を要
すという問題があった。さらに、少数の振動センサを順
番に機械全体に配置するような場合は、１軸ごとに計測
を繰り返して機械の振動モードや振動の挙動が把握され
ており、莫大な時間と手間が必要であるという問題があ
った。本発明はこれらの問題に鑑みてなされたものであ
り、モータ制御系の周波数特性を容易に計測することが
できる周波数特性演算装置を提供することを目的とす
る。However, the above-mentioned conventional techniques have a problem that it takes a long time to measure the frequency characteristics of all axes. Especially when there is interference between axes, it is necessary to consider the combination between axes,
There is a problem that it takes more time and labor than measuring the frequency characteristic of one axis, and it takes much time to process the measurement result. Further, when a small number of vibration sensors are sequentially arranged on the entire machine, the measurement is repeated for each axis to grasp the vibration mode and vibration behavior of the machine, which requires enormous time and effort. There was a problem. The present invention has been made in view of these problems, and an object of the present invention is to provide a frequency characteristic calculation device capable of easily measuring the frequency characteristic of a motor control system.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明の周波数特性演算装置は、固定台に搭載され
て移動可能に支持された可動部と、モータと、そのモー
タの回転を伝えて前記可動部を移動させる伝達機構と、
前記モータの回転を検出して信号Ｘを出力する回転セン
サと、前記モータの回転指令Ｆと前記回転センサの信号
Ｘを受けて前記モータの回転を制御するサーボ装置とを
複数備えて複数のサーボ系をなすモータ制御装置におい
て、前記モータの回転指令Ｆを出力し、前記回転センサ
の信号Ｘを入力して所定の式に基づいて周波数特性を演
算することを特徴とするものである。In order to solve the above problems, a frequency characteristic calculation apparatus of the present invention transmits a movable portion mounted on a fixed base and movably supported, a motor, and rotation of the motor. And a transmission mechanism for moving the movable part,
A plurality of servos including a rotation sensor that detects rotation of the motor and outputs a signal X, and a servo device that receives a rotation command F of the motor and a signal X of the rotation sensor to control the rotation of the motor. In a motor control device forming a system, a rotation command F of the motor is output, a signal X of the rotation sensor is input, and a frequency characteristic is calculated based on a predetermined formula.
【０００５】また本発明は、固定台に搭載されて移動可
能に支持された可動部と、モータと、そのモータの回転
を伝えて前記可動部を移動させる伝達機構と、前記モー
タの回転を検出して信号Ｘを出力する回転センサと、前
記モータの回転指令Ｆと前記回転センサの信号Ｘを受け
て前記モータの回転を制御するサーボ装置とを複数備え
て複数のサーボ系をなすモータ制御装置において、前記
サーボ系とは別に１つ以上の振動センサを前記可動部も
しくは前記固定台に設け、前記モータの回転指令Ｆを出
力して前記振動センサの信号Ｘを入力し、所定の式に基
づいて周波数特性を演算することを特徴とするものであ
る。このようになっているので、容易にモータ制御系の
周波数特性を計測することができるのである。Further, according to the present invention, a movable portion mounted on a fixed base and movably supported, a motor, a transmission mechanism for transmitting the rotation of the motor to move the movable portion, and a rotation of the motor are detected. And a signal output from the rotation sensor and a servo device that receives the rotation command F of the motor and the signal X from the rotation sensor to control the rotation of the motor, thereby forming a plurality of servo systems. In addition to the servo system, one or more vibration sensors are provided on the movable part or the fixed base, a rotation command F of the motor is output, and a signal X of the vibration sensor is input, based on a predetermined formula. It is characterized in that the frequency characteristic is calculated according to the above. With this configuration, the frequency characteristic of the motor control system can be easily measured.
【０００６】[0006]
【発明の実施の形態】以下、本発明の実施の形態を図に
もとづいて説明する。図１は本発明の請求項１に記載の
発明に係わる実施例を示す構成図である。図において、
１は演算装置であり、２は第１軸のサーボ装置、３は第
２軸のサーボ装置、４は第１軸のセンサ、５は第２軸の
センサ、６は第１軸のモータ、７は第２軸のモータ、８
は第１軸の伝達機構、９は第２軸の伝達機構、１０は第
１軸の可動部、１１は第２軸の可動部、１２は固定台で
あり、センサ４、５はモータ６、７の回転と振動を検出
する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is a block diagram showing an embodiment according to the invention described in claim 1 of the present invention. In the figure,
1 is a computing device, 2 is a servo device for the first axis, 3 is a servo device for the second axis, 4 is a sensor for the first axis, 5 is a sensor for the second axis, 6 is a motor for the first axis, 7 Is the second axis motor, 8
Is a first shaft transmission mechanism, 9 is a second shaft transmission mechanism, 10 is a first shaft movable part, 11 is a second shaft movable part, 12 is a fixed base, and sensors 4, 5 are motors 6, Rotation and vibration of 7 are detected.
【０００７】次に動作について図３のフローチャートに
沿って説明する。まず、（Ｓ１）演算装置１が相関関係
のない第１軸の動作指令信号Ｆ１と第２軸の動作指令信
号Ｆ２を生成して、（Ｓ２）それぞれ第１軸のサーボ装
置２と第２軸のサーボ装置３に送ると、（Ｓ３）各サー
ボ装置２、３が入力した各動作指令信号と等価な制御信
号Ｓ１、Ｓ２を生成して、それぞれ第１軸のモータ６と
第２軸のモータ７に出力し、モータ６、７を回転させ
る。その回転は第１軸の伝達機構８と第２軸の伝達機構
９を介して、それぞれ第１軸の可動部１０と第２軸の可
動部１１に伝えられて動作し、固定台１２を含む機械系
全体に振動が発生する。（Ｓ４）そしてセンサ４、５が
それぞれモータ６、７の回転と振動を検出し、（Ｓ５）
検出された信号Ｘ１、Ｘ２がサーボ装置２とサーボ装置
３を介して演算装置１に入力される。すると（Ｓ６）演
算装置１は２つの指令Ｓ１、Ｓ２と２つの入力信号Ｘ
１、Ｘ２を周波数分析し、請求項１に記載の式（１）に
基づいて周波数特性を計算する。Next, the operation will be described with reference to the flowchart of FIG. First, (S1) the arithmetic unit 1 generates the operation command signal F1 of the first axis and the operation command signal F2 of the second axis which are not correlated, and (S2) the servo device 2 and the second axis of the first axis, respectively. To the servo device 3 of (S3), the control signals S1 and S2 equivalent to the operation command signals input by the servo devices 2 and 3 are generated to generate the motor 6 for the first axis and the motor for the second axis, respectively. 7 to rotate the motors 6 and 7. The rotation is transmitted to the movable portion 10 of the first shaft and the movable portion 11 of the second shaft through the transmission mechanism 8 of the first shaft and the transmission mechanism 9 of the second shaft to operate, and includes the fixed base 12. Vibration occurs in the entire mechanical system. (S4) Then, the sensors 4 and 5 detect the rotation and vibration of the motors 6 and 7, respectively (S5).
The detected signals X1 and X2 are input to the arithmetic unit 1 via the servo device 2 and the servo device 3. Then (S6), the arithmetic unit 1 receives the two commands S1 and S2 and the two input signals X.
1, X2 is subjected to frequency analysis, and the frequency characteristic is calculated based on the equation (1) described in claim 1.
【０００８】センサ出力Ｘ１の周波数分析結果Ｘ1とセ
ンサ出力Ｘ２の周波数分析結果Ｘ2には、双方とも指令
Ｓ１の周波数分析結果ＦAと指令Ｓ２の周波数分析結果
ＦBで加振され、各周波数特性となる伝達要素を経由し
た結果が含まれる。例えば、センサ出力Ｘ１の周波数分
析結果Ｘ1は、指令Ｓ１とセンサ出力Ｘ１間の周波数特
性Ｈ1Aに、指令Ｓ１の周波数分析結果ＦAが掛け合わさ
れた成分と、指令Ｓ２とセンサ出力Ｘ１間の周波数特性
Ｈ1Bに、指令Ｓ２の周波数分析結果ＦBが掛け合わされ
た成分が足し合わされているため、式（３）のように表
すことができる。[0008] Frequency analysis X 2 frequency analysis results X 1 and the sensor output X2 of the sensor output X1 is vibrated in both the frequency analysis result of the frequency analysis result F A and instruction S2 command S1 F B, each The result via the transfer element having the frequency characteristic is included. For example, the frequency analysis result X 1 of the sensor output X1 is a component obtained by multiplying the frequency characteristic H 1A between the command S1 and the sensor output X1 by the frequency analysis result F A of the command S1, and between the command S2 and the sensor output X1. Since the component obtained by multiplying the frequency characteristic H 1B by the frequency analysis result F B of the command S2 is added, it can be expressed as in Expression (3).
【０００９】[0009]
【数３】
ここで、Ｈは周波数特性、Ｘはセンサ信号、Ｆは演算装
置１の動作指令信号、センサ信号Ｘの添字１、２は第１
軸と第２軸の何れであるかを示し、動作指令信号Ｆの添
字Ａ、Ｂは第１軸と第２軸の何れであるかを示してい
る。[Equation 3] Here, H is a frequency characteristic, X is a sensor signal, F is an operation command signal of the arithmetic unit 1, and subscripts 1 and 2 of the sensor signal X are the first.
It indicates which of the first axis and the second axis, and the subscripts A and B of the operation command signal F indicate which of the first axis and the second axis.
【００１０】式（３）に動作指令信号Ｆ１の周波数分析
結果ＦAと動作指令信号Ｆ２の周波数分析結果ＦBの複素
共役の転置行列を右から掛けた上、動作指令信号Ｆ１の
周波数分析結果ＦAと動作指令信号Ｆ２の周波数分析結
果ＦBの動作指令信号の要素のみからなる行列の逆行列
を右から掛けると、式（１）と等価となり、動作指令信
号Ｆ１とセンサ信号Ｘ１間の周波数特性Ｈ1Aと、動作指
令信号Ｆ２とセンサ信号Ｘ２間の周波数特性Ｈ2Bと、動
作指令信号Ｆ１とセンサ信号Ｘ２間の周波数特性Ｈ
2Aと、動作指令信号Ｆ２とセンサ信号Ｘ１間の周波数特
性Ｈ1Bを一度に求めることができる。なお、以上の実施
例で示したモータ制御装置では、軸数とセンサの数が何
れも２で一致していたが、本発明の趣旨に従えば、これ
らは一致していなくても良い。The equation (3) is multiplied by the complex conjugate transpose matrix of the frequency analysis result F A of the operation command signal F1 and the frequency analysis result F B of the operation command signal F2 from the right, and the frequency analysis result of the operation command signal F1 is obtained. When the inverse matrix of the matrix consisting only of the elements of the operation command signal of the frequency analysis result F B of F A and the operation command signal F 2 is multiplied from the right, it becomes equivalent to the equation (1), and between the operation command signal F 1 and the sensor signal X 1. Frequency characteristic H 1A , frequency characteristic H 2B between operation command signal F2 and sensor signal X2, frequency characteristic H between operation command signal F1 and sensor signal X2
2A and the frequency characteristic H 1B between the operation command signal F2 and the sensor signal X1 can be obtained at one time. In the motor control device shown in the above embodiment, both the number of axes and the number of sensors are equal to each other, but they may not be equal to each other according to the gist of the present invention.
【００１１】次に本発明の第２の実施例を図にもとづい
て説明する。図２は請求項２の発明に係わる実施例を示
す構成図であり、図１と異なるのは、可動部１０、１１
に振動センサ１３、１４を取り付けた点である。この振
動センサ１３、１４により可動部１０、１１の振動が検
出されて、その信号が演算装置１に入力される。図２の
場合は振動センサ１３の信号のみが演算装置１に入力さ
れている。振動センサ以外については、第１実施例の場
合と同様の動作をするので説明を省略する。この実施例
の場合は、各軸を同時に動作させ、第１軸と第２軸の動
作指令信号Ｆ１、Ｆ２と、振動センサ１、２の検出信号
Ｘ１、Ｘ２間の周波数特性を分離して求められる。Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 2 is a configuration diagram showing an embodiment according to the invention of claim 2 and is different from FIG. 1 in that the movable parts 10 and 11 are different.
This is the point where the vibration sensors 13 and 14 are attached. The vibrations of the movable parts 10 and 11 are detected by the vibration sensors 13 and 14, and the signal is input to the arithmetic unit 1. In the case of FIG. 2, only the signal of the vibration sensor 13 is input to the arithmetic unit 1. Except for the vibration sensor, the same operation as that of the first embodiment is performed, and thus the description thereof is omitted. In the case of this embodiment, each axis is operated simultaneously, and the frequency characteristics between the operation command signals F1 and F2 of the first and second axes and the detection signals X1 and X2 of the vibration sensors 1 and 2 are obtained separately. To be
【００１２】演算装置１が動作指令信号Ｆ１、Ｆ２を出
力するとサーボ装置２、３がモータ６、７を駆動し、そ
れぞれ伝達機構８、９を介して、可動部１０、１１が同
時に動作する。そして固定台１２を含む機械系全体に振
動が発生し、振動センサ１３、１４が振動を検出して検
出信号Ｘ３、Ｘ４を演算装置１に出力する。演算装置１
は、動作指令信号Ｆ１、Ｆ２と振動センサ１３、１４の
信号Ｘ３、Ｘ４を周波数分析し、請求項２に記載の式
（２）に基づいて周波数特性を求める。請求項１に記載
の式（１）と異なっているのは、Ｘが振動センサの信号
であり、その添字１、２は振動センサの番号を表してい
る。この構成によると、動作指令信号Ｆ１と振動センサ
１３の信号Ｘ３間の周波数特性Ｈ1Aと、動作指令信号Ｆ
２と振動センサ１４の信号Ｘ４間の周波数特性Ｈ2Bと、
動作指令信号Ｆ１と振動センサ１４の信号Ｘ４間の周波
数特性Ｈ2Aと、動作指令信号Ｆ１と振動センサ１３の信
号Ｘ３間の周波数特性Ｈ1Bを一度に求めることができ
る。When the computing device 1 outputs the operation command signals F1 and F2, the servo devices 2 and 3 drive the motors 6 and 7, and the movable parts 10 and 11 simultaneously operate via the transmission mechanisms 8 and 9, respectively. Then, vibration is generated in the entire mechanical system including the fixed base 12, the vibration sensors 13 and 14 detect the vibration, and output detection signals X3 and X4 to the arithmetic unit 1. Arithmetic unit 1
Performs frequency analysis of the operation command signals F1 and F2 and the signals X3 and X4 of the vibration sensors 13 and 14, and obtains frequency characteristics based on the equation (2) described in claim 2. The difference from the formula (1) described in claim 1 is that X is a signal of the vibration sensor, and the subscripts 1 and 2 thereof represent the number of the vibration sensor. According to this configuration, the frequency characteristic H 1A between the operation command signal F1 and the signal X3 of the vibration sensor 13 and the operation command signal F
2 and the frequency characteristic H 2B between the signal X4 of the vibration sensor 14,
The frequency characteristic H 2A between the operation command signal F1 and the signal X4 of the vibration sensor 14 and the frequency characteristic H 1B between the operation command signal F1 and the signal X3 of the vibration sensor 13 can be obtained at one time.
【００１３】なお、第２実施例のモータ制御装置では、
振動センサ１３、１４を２つとした例を示したが、振動
センサは２つ以上でも２つ以下でもよく、軸数と振動セ
ンサの数が一致していなくても良い。また、第２実施例
のモータ制御装置では、振動センサ１３、１４は可動部
１０、１１の振動を検出するとしたが、請求項２に記述
したように、振動センサ１３、１４は位置や方向を変え
て固定台１２の振動を検出してもよく、さらに、振動セ
ンサ１３、１４を可動部１０もしくは１１と固定台１２
に別けて配置して振動を検出してもよい。また、上記２
つの実施例では、モータの回転を検出するセンサを用い
る例と振動センサを用いる例を分けて記述したが、これ
ら２種類のセンサを混合して使用しても良い。In the motor controller of the second embodiment,
Although the example in which the number of the vibration sensors 13 and 14 is two is shown, the number of the vibration sensors may be two or more or two or less, and the number of axes and the number of the vibration sensors may not be the same. Further, in the motor control device of the second embodiment, the vibration sensors 13 and 14 detect the vibration of the movable parts 10 and 11. However, as described in claim 2, the vibration sensors 13 and 14 indicate the position and direction. Alternatively, the vibration of the fixed base 12 may be detected.
The vibration may be detected by disposing it separately. Also, the above 2
In one embodiment, an example using a sensor for detecting the rotation of a motor and an example using a vibration sensor are described separately, but these two types of sensors may be mixed and used.
【００１４】また、上記２つの実施例では、各軸の影響
を除去した周波数特性を求めたが、各軸の影響を含めた
周波数特性を求める場合には、請求項１の式（１）の演
算途中結果、例えば 第１軸の動作指令信号１３と第２
軸の動作指令信号１４の各々のオートパワースペクトル
ＦA・ＦA *、ＦB・ＦB *やクロススペクトルＦB・ＦA *な
どを別途記録しておけば、式（４）を用いて後で演算処
理して求めることができる。Further, in the above two embodiments, the frequency characteristic in which the influence of each axis is removed is obtained. However, when the frequency characteristic in which the influence of each axis is included is obtained, the expression (1) of claim 1 is used. In the middle of calculation, for example, the operation command signal 13 of the first axis and the second
If the respective auto power spectra F A · F A * , F B · F B * , cross spectrum F B · F A *, etc. of the axis operation command signal 14 are recorded separately, the formula (4) is used. It can be calculated and calculated later.
【００１５】[0015]
【数４】 （４）[Equation 4] (4)
【００１６】[0016]
【発明の効果】以上述べたように、本発明によれば、請
求項１または請求項２に記載の構成としたため、多軸構
成のモータを同時に動作させ、各軸の加振の影響を分離
した周波数特性と、これまで簡単に得られなかった各軸
間の周波数特性を計測できる周波数特性演算装置を提供
できるという効果がある。As described above, according to the present invention, since the constitution described in claim 1 or 2 is adopted, the motors of the multi-axis constitution are simultaneously operated to separate the influence of the vibration of each axis. There is an effect that it is possible to provide a frequency characteristic calculating device capable of measuring the frequency characteristic and the frequency characteristic between the axes which has not been easily obtained so far.
【図１】請求項１記載の発明を用いたモータ制御装置の
構成図FIG. 1 is a configuration diagram of a motor control device using the invention according to claim 1.
【図２】請求項２記載の発明を用いたモータ制御装置の
構成図FIG. 2 is a configuration diagram of a motor control device using the invention according to claim 2;
【図３】周波数特性を求める手順を示すフローチャートFIG. 3 is a flowchart showing a procedure for obtaining frequency characteristics.
１：演算装置 ２、３：サーボ装置 ４、５：センサ ６、７：モータ ８、９：伝達機構 １０、１１：可動部 １２：固定台 １３、１４：振動センサ 1: arithmetic unit 2, 3: Servo device 4, 5: Sensor 6, 7: Motor 8, 9: Transmission mechanism 10, 11: Moving part 12: Fixed stand 13, 14: Vibration sensor
Claims (2)
可動部と、モータと、そのモータの回転を伝えて前記可
動部を移動させる伝達機構と、前記モータの回転を検出
して信号Ｘを出力する回転センサと、前記モータの回転
指令Ｆと前記回転センサの信号Ｘを受けて前記モータの
回転を制御するサーボ装置とを複数備えて複数のサーボ
系をなすモータ制御装置において、 前記モータの回転指令Ｆを出力し、前記回転センサの信
号Ｘを入力して次式に基づいて周波数特性を演算するこ
とを特徴とするモータ制御装置の周波数特性演算装置。 【数１】 （１） ここで、Ｈは周波数特性、Ｘは回転センサの信号、Ｆは
モータの回転指令であり、＊は複素共役、−１は逆行
列、添字１〜ｎは回転センサにつけた番号、添字Ａ〜Ｍ
は各サーボ系に入力するモータの回転指令につけた番号
である。1. A movable part mounted on a fixed base and movably supported, a motor, a transmission mechanism for transmitting the rotation of the motor to move the movable part, and a signal for detecting the rotation of the motor. A motor control device that includes a plurality of rotation sensors that output X and a servo device that receives the rotation command F of the motor and a signal X of the rotation sensor to control the rotation of the motor, and that forms a plurality of servo systems. A frequency characteristic calculating device for a motor control device, which outputs a rotation command F of a motor, inputs a signal X of the rotation sensor, and calculates a frequency characteristic based on the following equation. [Equation 1] (1) where H is the frequency characteristic, X is the signal of the rotation sensor, F is the rotation command of the motor, * is the complex conjugate, -1 is the inverse matrix, and subscripts 1 to n are the numbers given to the rotation sensor and the subscripts. AM
Is the number given to the motor rotation command input to each servo system.
可動部と、モータと、そのモータの回転を伝えて前記可
動部を移動させる伝達機構と、前記モータの回転を検出
して信号を出力する回転センサと、前記モータの回転指
令Ｆと前記回転センサの信号を受けて前記モータの回転
を制御するサーボ装置とを複数備えて複数のサーボ系を
なすモータ制御装置において、 前記サーボ系とは別に１つ以上の振動センサを前記可動
部もしくは前記固定台に設け、前記モータの回転指令Ｆ
を出力して前記振動センサの信号Ｘを入力し、次式に基
づいて周波数特性を演算することを特徴とするモータ制
御装置の周波数特性演算装置。 【数２】 （２） ここで、Ｈは周波数特性、Ｘは振動センサの信号、Ｆは
モータの回転指令であり、＊は複素共役、−１は逆行
列、添字１〜ｎは振動センサにつけた番号、添字Ａ〜M
は各サーボ系に入力するモータの回転指令につけた番号
である。2. A movable part mounted on a fixed base and movably supported, a motor, a transmission mechanism for transmitting the rotation of the motor to move the movable part, and a signal for detecting the rotation of the motor. In a motor control device that forms a plurality of servo systems by including a plurality of rotation sensors for outputting the rotation command, and a servo device that controls the rotation of the motor by receiving a rotation command F of the motor and a signal of the rotation sensor. Separately from the above, one or more vibration sensors are provided on the movable part or the fixed base, and the rotation command F of the motor is generated.
Is output and the signal X of the vibration sensor is input, and the frequency characteristic is calculated based on the following equation. [Equation 2] (2) where H is the frequency characteristic, X is the vibration sensor signal, F is the motor rotation command, * is the complex conjugate, -1 is the inverse matrix, and subscripts 1 to n are the numbers attached to the vibration sensor and subscripts. AM
Is the number given to the motor rotation command input to each servo system.
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|---|---|---|---|
| JP2001248435A JP4683255B2 (en) | 2001-08-20 | 2001-08-20 | Frequency characteristic calculation device for motor control device |
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|---|---|---|---|
| JP2001248435A JP4683255B2 (en) | 2001-08-20 | 2001-08-20 | Frequency characteristic calculation device for motor control device |
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| Publication Number | Publication Date |
|---|---|
| JP2003061379A true JP2003061379A (en) | 2003-02-28 |
| JP4683255B2 JP4683255B2 (en) | 2011-05-18 |
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|---|---|---|---|---|
| JP2010206930A (en) * | 2009-03-03 | 2010-09-16 | Yaskawa Electric Corp | Electric motor control device, calculation method of mutual one-round open loop transmission function of device, and calculation method of multi-shaft transmission function |
| JP2014233147A (en) * | 2013-05-29 | 2014-12-11 | 三菱電機株式会社 | Motor control system and motor control method |
| JP5996148B1 (en) * | 2015-04-23 | 2016-09-21 | 三菱電機株式会社 | Multi-axis control system setting adjustment support device |
| CN106687792A (en) * | 2014-09-10 | 2017-05-17 | 三菱电机株式会社 | Vibration mode measurement device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010206930A (en) * | 2009-03-03 | 2010-09-16 | Yaskawa Electric Corp | Electric motor control device, calculation method of mutual one-round open loop transmission function of device, and calculation method of multi-shaft transmission function |
| JP2014233147A (en) * | 2013-05-29 | 2014-12-11 | 三菱電機株式会社 | Motor control system and motor control method |
| CN106687792A (en) * | 2014-09-10 | 2017-05-17 | 三菱电机株式会社 | Vibration mode measurement device |
| US20170176244A1 (en) * | 2014-09-10 | 2017-06-22 | Mitsubishi Electric Corporation | Vibration mode determining apparatus |
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| WO2016170661A1 (en) * | 2015-04-23 | 2016-10-27 | 三菱電機株式会社 | Multi-axis control system setting adjustment support device |
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|---|---|
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