WO2021176617A1 - Vibration isolation control device and vibration isolation control method - Google Patents

Vibration isolation control device and vibration isolation control method Download PDF

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Publication number
WO2021176617A1
WO2021176617A1 PCT/JP2020/009261 JP2020009261W WO2021176617A1 WO 2021176617 A1 WO2021176617 A1 WO 2021176617A1 JP 2020009261 W JP2020009261 W JP 2020009261W WO 2021176617 A1 WO2021176617 A1 WO 2021176617A1
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WO
WIPO (PCT)
Prior art keywords
command
vibration
vibration suppression
follow
gantry
Prior art date
Application number
PCT/JP2020/009261
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French (fr)
Japanese (ja)
Inventor
裕司 五十嵐
慎 東野
優一 木津
孝志 甲斐
裕幸 関口
英俊 池田
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to KR1020227028045A priority Critical patent/KR102523097B1/en
Priority to JP2020542357A priority patent/JP6786024B1/en
Priority to CN202080097330.0A priority patent/CN115151883B/en
Priority to PCT/JP2020/009261 priority patent/WO2021176617A1/en
Publication of WO2021176617A1 publication Critical patent/WO2021176617A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P5/00—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors
    • H02P5/46—Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors for speed regulation of two or more dynamo-electric motors in relation to one another

Definitions

  • the present disclosure relates to a seismic isolation control device and a seismic isolation control method that suppress vibration of the gantry that occurs during operation of a drive device that drives a movable part by a motor fixed to the gantry.
  • a drive device such as a positioning device that drives a movable part with a motor fixed to a gantry to carry an object to a specified position.
  • a speed of the drive device is increased, it is necessary to increase the rotation speed of the motor, so that the gantry vibrates and the operation accuracy of the drive device is lowered.
  • a technique for suppressing vibration generated in the gantry a method of modifying a tracking command for controlling a motor by using a filter based on the vibration frequency generated in the gantry is known.
  • the follow-up command is modified, the time until the operation of the drive device is completed increases.
  • Patent Document 1 includes a vibration isolation control motor different from that of the drive device, drives the vibration isolation control motor in the opposite direction to the drive device motor, and is generated in association with the operation of the drive device.
  • a vibration isolation control device that suppresses vibration of the gantry is disclosed.
  • the seismic isolation control motor drives a second movable portion different from the first movable portion driven by the motor of the drive device.
  • the movable range of the second movable portion by one positioning is required to be the same as that of the first movable portion, and it is required to further suppress the movable range.
  • the present disclosure has been made in view of the above, and is capable of suppressing vibration caused by the operation of a drive device and suppressing the movable range of a movable portion driven by a motor for seismic isolation control.
  • the purpose is to obtain a control device.
  • the vibration isolation control device is a second motor fixed to the gantry by driving the first movable part by the first motor fixed to the gantry.
  • the first control unit that controls the position or speed of the first motor so that the first movable unit follows the follow-up command in time series, and the gantry included in the follow-up command, with the drive device that drives the movable unit as the control target. It is characterized by including a second control unit that follows the position or speed of the second motor in proportion to the vibration suppression command, which is a command of the dimension of the position or speed corresponding to the vibration frequency component of the above.
  • the vibration isolation control device has the effect of suppressing vibration generated by the operation of the drive device and suppressing the movable range of the movable portion driven by the vibration isolation control motor.
  • the figure for demonstrating the 1st example of the vibration suppression calculation part shown in FIG. The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 1st example shown in FIG.
  • the figure for demonstrating the 2nd example of the vibration suppression calculation part shown in FIG. The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 2nd example shown in FIG.
  • the figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 3rd example shown in FIG. The figure for demonstrating the 4th example of the vibration suppression calculation part shown in FIG.
  • the figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 4th example shown in FIG. The figure for demonstrating the 5th example of the vibration suppression calculation part shown in FIG.
  • the figure which shows the follow-up command used by the positioning apparatus shown in FIG. The figure which shows the vibration suppression command used by the positioning apparatus shown in FIG.
  • FIG. 1 is a diagram showing a configuration of a positioning device 1 according to a first embodiment.
  • the positioning device 1 has a drive device 3 and a seismic isolation control device 4.
  • the drive device 3 includes a positioning drive unit 30 including a first motor 302 and a first movable unit 301 for positioning, and a seismic isolation drive unit 31 including a second motor 312 and a second movable unit 311 for seismic isolation control.
  • the first motor 302 and the second motor 312 are fixed to the gantry 2.
  • the first movable portion 301 is mechanically connected to the first motor 302.
  • the first motor 302 drives the first movable portion 301.
  • the second movable portion 311 is mechanically connected to the second motor 312.
  • the second motor 312 drives the second movable portion 311 and suppresses the vibration of the gantry 2 that occurs when the first motor 302 drives the first movable portion 301 by the reaction force thereof.
  • the first motor 302 drives the first movable unit 301 based on the command output by the seismic isolation control device 4, and the second motor 312 drives the second movable unit 311 based on the command output by the seismic isolation control device 4.
  • the seismic isolation control device 4 includes a first control unit 40 that controls the positioning drive unit 30, a second control unit 41 that controls the seismic isolation drive unit 31, a vibration suppression calculation unit 42, and a vibration characteristic setting unit 43.
  • the first control unit 40 supplies a current to the first motor 302 based on a time-series follow-up command 10 input from the outside to control the movement of the first movable unit 301.
  • the first control unit 40 controls the position or speed of the first motor 302 so that the first movable unit 301 follows the follow-up command 10.
  • the follow-up command 10 is a command in the dimension of position or velocity.
  • the second control unit 41 supplies a current to the second motor 312 to control the movement of the second movable unit 311 based on the vibration suppression command 11 calculated by the vibration suppression calculation unit 42 described later.
  • the vibration suppression command 11 is a command corresponding to the vibration frequency component of the gantry 2 included in the follow-up command 10.
  • the second control unit 41 controls the second motor 312 so that the position or speed of the second motor 312 is made to follow the position or speed of the second motor 312 in proportion to the vibration suppression command 11.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 for the second control unit 41 to control the seismic isolation drive unit 31 based on the follow-up command 10.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 corresponding to the vibration frequency component of the gantry 2 included in the follow-up command 10 in the dimension of position or speed.
  • the vibration characteristic setting unit 43 holds in advance the vibration frequency corresponding to the gantry 2.
  • the drive device 3 and the seismic isolation control device 4 are installed on the gantry 2, but a part or all of the seismic isolation control device 4 may be installed on a device different from the gantry 2.
  • the first control unit 40 and the first motor 302 and the second control unit 41 and the second motor 312 are connected by using a cable or the like.
  • the follow-up command 10 is a time-series position command or speed command sent from the outside to the seismic isolation control device 4.
  • FIG. 2 is a diagram showing an example of each command waveform of the drive device 3 generated from the follow-up command 10.
  • FIG. 2 includes waveforms of position command, velocity command, and thrust command, respectively.
  • the acquisition method and generation method of the follow-up command 10 are not particularly limited.
  • the follow-up command 10 may be a command having an arbitrary shape that can be executed by the drive device 3 and the seismic isolation control device 4.
  • the follow-up command 10 is a position command or speed command generated by a PLC (Programmable Logic Controller), an IPC (Industrial Personal Computer), or the like, and is acquired via an industrial network or an analog signal.
  • PLC Programmable Logic Controller
  • IPC Intelligent Personal Computer
  • the follow-up command 10 may be a command generated based on the drive distance of the drive device 3 or the like transmitted to the seismic isolation control device 4 via the communication path. However, from the viewpoint of positioning accuracy, it is desirable that the follow-up command 10 and the vibration suppression command 11 are synchronized.
  • the first control unit 40 drives the position or speed of the first motor 302 to follow the follow-up command 10 in proportion to the follow-up command 10 which is a position command or a speed command.
  • the second control unit 41 drives the position or speed of the second motor 312 to follow the vibration suppression command 11 proportionally in response to the vibration suppression command 11 which is a position command or a speed command.
  • this threshold value is a value that can be regarded as having the same force response generated by the first motor 302 and the second motor 312. Further, when the response speed of the first control unit 40 and the response speed of the second control unit 41 are made the same, the user of the positioning device 1 uses the set value of the first control unit 40 as it is and uses the second control unit 40 as it is. A set value such as a gain of the control unit 41 can be determined, and the set value can be easily determined.
  • the vibration suppression calculation unit 42 vibrates so that the sum of the vibration suppression command 11 and the follow-up command 10 has a frequency response that is minimized at the gantry vibration frequency set in advance in the vibration characteristic setting unit 43 according to the gantry 2.
  • the suppression command 11 is calculated.
  • the seismic isolation control device 4 is composed of, for example, a computer including a control circuit using a CPU (Central Processing Unit) 92 and a memory 93.
  • the CPU 92 is also called a processing circuit, an arithmetic unit, a processor, a microcomputer, a DSP (Digital Signal Processor), or the like.
  • the memory 93 is, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable ROM), EEPROM (registered trademark) (Electrically EPROM). Magnetic discs, flexible discs, optical discs, compact discs, mini discs, DVDs (Digital Versatile Disk), etc.
  • the CPU 92 reads and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40, the second control unit 41, the vibration suppression calculation unit 42, and the vibration characteristic setting unit 43. Realize the function.
  • the memory 93 is also used as a temporary memory in each process executed by the CPU 92.
  • the program executed by the CPU 92 may be provided via a communication path, or may be provided in a state of being recorded on a storage medium.
  • Dedicated hardware is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof. .. The same applies to the following embodiments.
  • FIG. 3 is a diagram for explaining a first example of the vibration suppression calculation unit 42 shown in FIG.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using an IIR (Infinite Impulse Response) filter.
  • IIR Infinite Impulse Response
  • the filter function of the IIR filter used in the first example is expressed by the following mathematical formula (1).
  • the values of the three constants a 1 , a 2 , and b included in the mathematical formula (1) are set based on the vibration characteristic information set in the vibration characteristic setting unit 43.
  • the vibration frequency of the gantry 2 is ⁇ [Hz]
  • the constant a 1 2 / 2 ⁇
  • the constant a 2 1 / (2 ⁇ ) 2
  • the constant b 0.3 / (2 ⁇ ) 2 If this is the case, the vibration of the gantry 2 can be suppressed.
  • the constant a 1 is proportional to the minus square of the vibration frequency ⁇ of the gantry 2
  • the constant a 2 and the constant b are proportional to the minus square of the vibration frequency ⁇ of the gantry 2.
  • the vibration suppression calculation unit 42 can efficiently suppress the vibration generated in the gantry 2 with a small amount of memory. Further, by expressing the filter continuously, it is possible to suppress the vibration with high accuracy.
  • FIG. 4 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the first example shown in FIG.
  • the horizontal axis of FIG. 4 is the frequency
  • the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11.
  • the frequency response has a minimum value.
  • FIG. 5 is a diagram for explaining a second example of the vibration suppression calculation unit 42 shown in FIG.
  • the vibration of the gantry 2 can be suppressed with a smaller number of operations.
  • FIG. 6 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the second example shown in FIG.
  • the horizontal axis of FIG. 6 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11.
  • the frequency response has a minimum value.
  • FIG. 7 is a diagram for explaining a third example of the vibration suppression calculation unit 42 shown in FIG.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using an FIR (Finite Impulse Response) filter.
  • the first discrete transfer function F 1 (z) of the FIR filter used in the third example is expressed by the following mathematical formula (2).
  • the vibration suppression calculation unit 42 By using the FIR filter shown in the third example by the vibration suppression calculation unit 42, it is possible to suppress the influence of calculation error when performing the calculation of the filter and suppress the vibration. Further, by using the FIR filter, it becomes possible to stabilize the vibration suppression command 11.
  • FIG. 8 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the third example shown in FIG. 7.
  • the horizontal axis of FIG. 8 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11.
  • the frequency response has a minimum value.
  • FIG. 9 is a diagram for explaining a fourth example of the vibration suppression calculation unit 42 shown in FIG.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using the moving average filter.
  • the number of stages of the moving average filter shown in FIG. 9 is N 2 .
  • the value of the constant N 2 indicating the number of stages is set according to the vibration characteristic information set in the vibration characteristic setting unit 43, similarly to the constant N 1 in the third example.
  • the second discrete transfer function F 2 (z) of the moving average filter used in the fourth example is expressed by the following mathematical formula (3).
  • the vibration suppression calculation unit 42 can calculate a stable vibration suppression command 11 even when there is noise in the input of the vibration suppression calculation unit 42.
  • FIG. 10 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the fourth example shown in FIG.
  • the horizontal axis of FIG. 10 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11.
  • the frequency response has a minimum value.
  • the vibration suppression calculation unit 42 the sum of the follow-up command 10 and the vibration suppression command 11 becomes the minimum at the vibration frequency ⁇ of the gantry 2. It suffices if the vibration suppression command 11 can be calculated so as to have a frequency response.
  • the above is an example, and the configuration of the vibration suppression calculation unit 42 is not limited to the described example.
  • the order of the filter may be changed according to the desired characteristics.
  • the vibration suppression calculation unit 42 can also be configured by combining a plurality of filters. Further, the constant of each filter used by the vibration suppression calculation unit 42 can be changed according to the frequency response. The user or designer of the positioning device 1 can select a suitable method according to the device configuration, usage conditions, and the like. Further, the vibration suppression calculation unit 42 may be configured so that the filters can be used properly according to the situation.
  • FIG. 11 is a diagram for explaining a fifth example of the vibration suppression calculation unit 42 shown in FIG.
  • the vibration suppression calculation unit 42 may calculate the vibration suppression command 11 based on the plurality of vibration frequencies ⁇ .
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the two vibration frequencies ⁇ 1 and ⁇ 2.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using two IIR filters.
  • the filter function of one IIR filter is represented by the above formula (1), and the filter function of the other IIR filter is represented by the following formula (4).
  • the vibration of the gantry 2 can be suppressed more accurately. can.
  • FIG. 12 and 13 are diagrams for explaining a first comparative example of the present embodiment.
  • FIG. 12 is a diagram showing a follow-up command 10 used in the first comparative example.
  • FIG. 13 is a diagram showing the result of simulating the acceleration generated in the gantry 2 in the first comparative example. Note that FIG. 13 shows a simulation result when the positioning drive unit 30 is driven independently by using the follow-up command 10 shown in FIG. 12 and the seismic isolation drive unit 31 is not driven.
  • the positioning drive unit 30 when the positioning drive unit 30 is driven without driving the seismic isolation drive unit 31, when the first movable unit 301 is driven according to the follow-up command 10, the gantry 2 vibrates and an error in the position occurs. Since it occurs, the positioning accuracy may decrease.
  • FIG. 14 and 15 are diagrams for explaining a second comparative example of the present embodiment.
  • FIG. 14 is a diagram showing the sum of the follow-up command 10 used in the second comparative example, the follow-up command 10, and the vibration suppression command 11.
  • FIG. 15 is a diagram showing the result of simulating the acceleration generated in the gantry 2 in the second comparative example.
  • the solid line in FIG. 14 shows the sum of the follow-up command 10 and the vibration suppression command 11, and the broken line in FIG. 14 shows the follow-up command 10 alone.
  • the solid line in FIG. 15 shows the simulation result of the acceleration generated in the gantry 2 when the positioning drive unit 30 is driven by using the sum of the follow-up command 10 and the vibration suppression command 11 shown by the solid line in FIG.
  • the broken line in FIG. 15 shows the simulation result of the acceleration generated in the gantry 2 when the positioning drive unit 30 is driven by using the tracking command 10 alone shown by the broken line in FIG.
  • the acceleration generated in the gantry 2 is significantly larger than that in the case where the follow-up command 10 alone drives the positioning drive unit 30. It is suppressed. However, when the vibration suppression command 11 is added to the follow-up command 10, the time until the positioning is completed is increased.
  • FIG. 16 is a diagram showing a follow-up command 10 used by the positioning device 1 shown in FIG.
  • FIG. 17 is a diagram showing a vibration suppression command 11 used by the positioning device 1 shown in FIG.
  • FIG. 18 is a diagram showing a result of simulating the acceleration generated in the gantry 2 in the first embodiment.
  • FIG. 18 shows a simulation result when the positioning drive unit 30 is driven by using the follow-up command 10 shown in FIG. 16 and the seismic isolation drive unit 31 is driven by using the vibration suppression command 11 shown in FIG.
  • the positioning drive unit 30 since the positioning drive unit 30 is controlled based on the follow-up command 10, vibration isolation drive is performed while suppressing an increase in positioning time as caused in the second comparative example.
  • the vibration suppression calculation unit 42 is first movable because it calculates the reaction force of the vibration of the gantry 2 at the time of driving the position command and the speed command instead of the thrust command and the acceleration command of the positioning drive unit 30. Vibration can be suppressed while suppressing the influence of friction applied to the portion 301.
  • the movable range of the second movable portion 311 applies the filter as shown in FIGS. 3, 5, 7, 9, and 11 to the position command, it is not necessary to consider the influence of friction and the like. It can be calculated easily.
  • the second movable unit 311 naturally returns to the starting position at the end of positioning. As a result, even when the follow-up command 10 continuously operates in the same direction, the movable range of the second movable portion 311 is equivalent to one follow-up command. Further, the second motor 312 is controlled so as to follow the vibration suppression command 11 corresponding to the vibration frequency component included in the follow-up command 10. Since the vibration frequency component is smaller than the original follow-up command, the movable range of the second movable portion 311 for one time is shortened with respect to the original follow-up command.
  • the position or speed of the first motor 302 is controlled in the first movable portion 301 so as to follow the follow-up command in the time series.
  • the position or speed of the second motor 312 is controlled so as to follow a proportional multiple of the vibration suppression command 11 corresponding to the vibration frequency component of the gantry 2. Therefore, it is possible to suppress the vibration generated by the operation of the drive device 3 to be controlled and to suppress the movable range of the second movable portion 311.
  • the difference between the response speed of the first control unit 40 and the response speed of the second control unit 41 is set to be equal to or less than the threshold value.
  • the responses of the forces generated by the first motor 302 and the second motor 312 can be made the same, and the vibration generated in the gantry 2 can be suppressed with high accuracy.
  • the user of the positioning device 1 uses the set value of the first control unit 40 as it is and uses the second control unit 40 as it is.
  • a set value such as a gain of the control unit 41 can be determined, and the set value can be easily determined.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 so that the sum with the follow-up command 10 has a frequency response that is minimized at a frequency based on the vibration frequency of the gantry 2.
  • the vibration suppression calculation unit 42 can calculate the vibration suppression command 11 by the method shown in the first to fifth examples above. By using the filter, it becomes possible to easily generate the vibration suppression command 11.
  • FIG. 19 is a diagram showing the configuration of the positioning device 1-1 according to the second embodiment. A part of the configuration of the positioning device 1-1 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described.
  • the positioning device 1-1 includes a drive device 3-1 and a seismic isolation control device 4-1.
  • the drive device 3-1 has a positioning drive unit 30-1 and a seismic isolation drive unit 31-1.
  • the positioning drive unit 30-1 includes a first movable unit 301, a first motor 302, and a first position detector 303.
  • the seismic isolation drive unit 31-1 includes a second movable unit 311, a second motor 312, and a second position detector 313.
  • the seismic isolation control device 4-1 includes a first control unit 40-1, a second control unit 41-1, a vibration suppression calculation unit 42, a vibration characteristic setting unit 43, an inertia ratio compensation unit 44, and an inertial characteristic. It has a setting unit 45.
  • the first position detector 303 measures the position of the first movable unit 301, and outputs the first position information 12 indicating the measured position to the first control unit 40-1.
  • the first position detector 303 is installed in the first movable portion 301, or is installed in the vicinity of the first movable portion 301.
  • the first position detector 303 is, for example, a linear scale, a proximity sensor, a laser displacement meter, a vision sensor, or the like.
  • the first position detector 303 is attached to the first movable portion 301, but the first position detector 303 may be an encoder, a resolver, or the like attached to the first motor 302. Alternatively, the first position detector 303 may be attached to both the first movable portion 301 and the first motor 302.
  • the second position detector 313 measures the position of the second movable unit 311 and outputs the second position information 13 indicating the measured position to the second control unit 41-1.
  • the second position detector 313 is installed in the second movable portion 311 or is installed in the vicinity of the second movable portion 311.
  • the second position detector 313 is, for example, a linear scale, a proximity sensor, a laser displacement meter, a vision sensor, or the like.
  • the second position detector 313 is attached to the second movable portion 311.
  • the second position detector 313 may be an encoder, a resolver, or the like attached to the second motor 312.
  • the second position detector 313 may be attached to both the second movable portion 311 and the second motor 312.
  • the first control unit 40-1 receives the first position information 12 indicating the position of the first movable unit 301 measured by the first position detector 303, and is based on the received first position information 12 and the follow-up command 10. This is a servo system that feedback-controls the first motor 302.
  • the second control unit 41-1 receives the second position information 13 indicating the position of the second movable unit 311 measured by the second position detector 313, and receives the second position information 13 and the vibration suppression command. It is a servo system that feedback-controls the second motor 312 based on 11.
  • the inertial ratio compensating unit 44 compensates for the influence of the inertial ratio on vibration with respect to the follow-up command 10 according to the inertial ratio set in advance in the inertial characteristic setting unit 45.
  • the inertia ratio is set in advance according to the inertia ratio of the first movable portion 301 and the first motor 302 and the second movable portion 311 and the second motor 312. For example, when the mass of the first movable portion 301 is M and the mass of the second movable portion 311 is m, the inertia ratio compensating unit 44 multiplies the follow-up command 10 by M / m to obtain the first movable portion 301 and the first movable portion 301. 2 It is possible to compensate for the influence of vibration of the gantry 2 due to the difference in mass from the movable portion 311.
  • the inertia ratio compensating unit 44 has the movable direction of the first movable portion 301 and the movable direction of the second movable portion 311.
  • the influence of the difference between the above and the vibration of the gantry 2 can be interpolated.
  • the inertia ratio compensating unit 44 multiplies the follow-up command 10 by M / mcos ⁇ . The vibration generated in the gantry 2 can be suppressed.
  • the inertial ratio set in the inertial characteristic setting unit 45 may be set in advance by the designer of the positioning device 1-1, or may be set by the user according to the device configuration.
  • the inertia ratio set in the inertial characteristic setting unit 45 is "1". Therefore, the seismic isolation control device 4-1 can have a configuration in which the inertial ratio compensation unit 44 and the inertial characteristic setting unit 45 are omitted.
  • the inertia ratio compensation unit 44 is provided after the vibration suppression calculation unit 42, but the processing order of the vibration suppression calculation unit 42 and the inertia ratio compensation unit 44 may be reversed.
  • the first control unit 40-1 can generate a thrust command for driving the first movable unit 301 based on the follow-up command 10 and the first position information 12, and control an external force applied to the first movable unit 301. ..
  • the second control unit 41-1 can generate a thrust command for driving the second movable unit 311 based on the vibration suppression command 11 and the second position information 13, and control the external force applied to the second movable unit 311. can.
  • the friction generated between the first movable portion 301 and its ground contact surface and the friction generated between the second movable portion 311 and its ground contact surface may be different.
  • the thrust is adjusted so that the external force applied to the first movable portion 301 and the external force applied to the second movable portion 311 can be made the same. Therefore, it is possible to accurately suppress the vibration of the gantry 2 generated when the drive device 3-1 is driven.
  • the seismic isolation control device 4-1 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93.
  • the CPU 92 reads and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40-1, the second control unit 41-1, the vibration suppression calculation unit 42, and the vibration characteristic setting.
  • the functions of the unit 43, the inertial ratio compensating unit 44, and the inertial characteristic setting unit 45 can be realized.
  • FIG. 20 is a diagram showing the configuration of the positioning device 1-2 according to the third embodiment. A part of the configuration of the positioning device 1-2 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described.
  • the positioning device 1-2 includes a drive device 3-2 and a seismic isolation control device 4-2.
  • the drive device 3-2 has a plurality of positioning drive units 30A and 30B and a seismic isolation drive unit 31.
  • the positioning drive unit 30A includes a first movable unit 301A and a first motor 302A.
  • the positioning drive unit 30B includes a first movable unit 301B and a first motor 302B.
  • the first movable portions 301A and 301B have the same functions as the first movable portion 301, and the first motors 302A and 302B have the same functions as the first motor 302.
  • the seismic isolation control device 4-2 includes a plurality of first control units 40A and 40B, a second control unit 41, a vibration suppression calculation unit 42, a vibration characteristic setting unit 43, and a plurality of inertial ratio compensation units 44A and 44B. And a plurality of inertial characteristic setting units 45A and 45B.
  • the first control unit 40A has the same function as the first control unit 40 except that it operates based on the first follow-up command 10A.
  • the first control unit 40B has the same function as the first control unit 40 except that it operates based on the second follow-up command 10B.
  • the first control unit 40A supplies a current to the first motor 302A based on the first follow-up command 10A, and first determines the position or speed of the first movable unit 301A mechanically connected to the first motor 302A.
  • the first control unit 40B supplies a current to the first motor 302B based on the second follow-up command 10B, and sets the position or speed of the first movable unit 301B mechanically connected to the first motor 302B to the second.
  • follow-up command 10B follows the follow-up command 10B.
  • the positioning device 1-2 cancels out the vibration of the gantry 2 generated by the two positioning drive units 30A and 30B by the reaction force generated by driving the seismic isolation drive unit 31. Therefore, the second control unit 41 controls the seismic isolation drive unit 31 based on the first follow-up command 10A and the second follow-up command 10B.
  • Each of the first follow-up command 10A and the second follow-up command 10B is compensated by the inertia ratio compensating units 44A and 44B for the influence of inertia, and then the first follow-up command 10A and the second follow-up command 10B after compensation are compensated.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the sum of the first follow-up command 10A and the second follow-up command 10B after compensation.
  • the inertia ratio compensating unit 44A sets the inertial characteristics in advance according to the inertia ratio of the first movable unit 301A and the first motor 302A and the second movable unit 311 and the second motor 312 with respect to the first follow-up command 10A.
  • the influence of the inertia ratio on the vibration of the gantry 2 is compensated by using the inertia ratio set to 45A.
  • the inertia ratio compensating unit 44B sets the inertial characteristics in advance according to the inertia ratio of the first movable unit 301B and the first motor 302B and the second movable unit 311 and the second motor 312 with respect to the second follow-up command 10B.
  • the influence of the inertia ratio on the vibration of the gantry 2 is compensated by using the inertia ratio set to 45B. Since the specific compensation method is the same as that of the first embodiment, the description thereof will be omitted.
  • the maximum thrust generated by the second motor 312 of the seismic isolation drive unit 31 is a value close to the sum of the maximum thrusts generated by the first motors 302A and 302B. Therefore, in the positioning device 1-2, it is desirable that the second motor 312 is a motor having a larger output than the first motors 302A and 302B, respectively.
  • the positioning device 1-2 having two positioning drive units 30A and 30B has been described, but the positioning device 1-2 may include three or more positioning drive units 30.
  • the vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the sum of the same number of follow-up commands 10 as the positioning drive unit 30.
  • the positioning device 1-2 according to the third embodiment can efficiently suppress the vibration of the gantry 2 generated by the plurality of positioning drive units 30A and 30B by using one seismic isolation drive unit 31. Therefore, the size of the entire positioning device 1-2 can be reduced as compared with the provision of the same number of seismic isolation drive units 31 as the number of the positioning drive units 30A and 30B.
  • the seismic isolation control device 4-2 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93.
  • the CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, so that the first control unit 40A and 40B, the second control unit 41, the vibration suppression calculation unit 42, and the vibration characteristic setting unit 43 ,
  • the functions of the inertial ratio compensating units 44A and 44B and the inertial characteristic setting units 45A and 45B can be realized.
  • FIG. 21 is a diagram showing a configuration of the positioning device 1-3 according to the fourth embodiment.
  • a part of the configuration of the positioning device 1-3 is common to the positioning device 1.
  • the positioning device 1-3 includes a drive device 3 and a seismic isolation control device 4-3.
  • the seismic isolation control device 4-3 has a first control unit 40-3, a second control unit 41-3, a first command table 46, and a second command table 47.
  • the first command table 46 stores the follow-up command 10 input in advance by the user.
  • the second command table 47 stores the vibration suppression command 11 input in advance by the user.
  • the first control unit 40-3 controls the positioning drive unit 30 based on the follow-up command 10 supplied from the first command table 46 instead of the follow-up command 10 supplied from the outside.
  • the second control unit 41-3 controls the seismic isolation drive unit 31 based on the vibration suppression command 11 supplied from the second command table 47 instead of the vibration suppression command 11 calculated by the vibration suppression calculation unit 42. ..
  • the first control unit 40-3 and the second control unit 41-3 synchronize the drive timing of the first motor 302 with the drive timing of the second motor 312 based on the synchronization signal 14.
  • the seismic isolation control device 4-3 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93.
  • the CPU 92 can realize the functions of the first control unit 40-3 and the second control unit 41-3 by reading and executing the computer program stored in the memory 93 corresponding to each process.
  • the first command table 46 and the second command table 47 are stored in the memory 93.
  • FIG. 22 is a diagram showing a configuration example of an engineering tool 51 that generates a follow-up command 10 and a vibration suppression command 11 used by the positioning device 1-3 shown in FIG. 21.
  • the engineering tool 51 includes a command input unit 52, a communication unit 53, a vibration suppression calculation unit 42, and a vibration characteristic setting unit 43.
  • the command input unit 52 receives an input of a follow-up command 10 that specifies the movement of the positioning drive unit 30 from the user.
  • the command input unit 52 outputs the received follow-up command 10 to the communication unit 53 and the vibration suppression calculation unit 42, respectively.
  • the communication unit 53 is connected to the positioning device 1-3 via a communication path.
  • the communication unit 53 stores the follow-up command 10 in the first command table 46.
  • Each of the vibration suppression calculation unit 42 and the vibration characteristic setting unit 43 has the same function as that of the first embodiment.
  • the vibration suppression calculation unit 42 generates a vibration suppression command 11 based on the follow-up command 10, and outputs the generated vibration suppression command 11 to the communication unit 53.
  • the communication unit 53 stores the vibration suppression command 11 in the second command table 47.
  • the engineering tool 51 shown in FIG. 22 stores the vibration suppression command 11 calculated by the vibration suppression calculation unit 42 in the second command table 47 by the same operation as in the first embodiment, but the user uses the vibration suppression command 11. May be calculated in advance and stored in the second command table 47.
  • the seismic isolation control device 4-3 shown in FIG. 21 has a configuration in which the vibration suppression calculation unit 42 is omitted, but the vibration isolation control device 4-3 has the vibration suppression calculation unit 42 and the vibration characteristic setting unit 43.
  • the vibration suppression command 11 may be generated based on the follow-up command 10 stored in the first command table 46.
  • the seismic isolation control device 4-3 since the seismic isolation control device 4-3 according to the fourth embodiment stores the follow-up command 10 in the first command table 46 in advance, the amount of communication with the external device can be reduced. Further, since the vibration isolation control device 4-3 stores the vibration suppression command 11 in the second command table 47 in advance and refers to the second command table 47 at the time of execution, the amount of calculation performed at the time of driving can be reduced. can.
  • FIG. 23 is a diagram showing the configuration of the positioning device 1-4 according to the fifth embodiment. A part of the configuration of the positioning device 1-4 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described.
  • the positioning device 1-4 includes a drive device 3 and a seismic isolation control device 4-4.
  • the seismic isolation control device 4-4 has a first control unit 40-4, a second control unit 41-4, and a vibration suppression calculation unit 42-4.
  • the seismic isolation control device 4-4 uses an analog voltage or current as a drive command.
  • the first control unit 40-4 receives the follow-up command 10-4 which is an analog signal, digitally converts the follow-up command 10-4, and uses it as a drive command. Further, the first control unit 40-4 supplies the follow-up command 10-4, which is an analog signal, to the vibration suppression calculation unit 42-4.
  • the first control unit 40-4 may supply the follow-up command 10-4, which is an analog signal, to the vibration suppression calculation unit 42-4 as it is, or offset, command limit, etc. to the follow-up command 10-4.
  • the corrected one may be supplied to the vibration suppression calculation unit 42-4.
  • the vibration suppression calculation unit 42-4 calculates the vibration suppression command 11-4, which is an analog signal, using an analog filter.
  • the analog filter used by the vibration suppression calculation unit 42-4 is designed in advance based on the vibration frequency ⁇ of the gantry 2 so that the sum of the input command and the output command has a minimum frequency response.
  • the vibration suppression calculation unit 42-4 outputs the calculated vibration suppression command 11-4 to the second control unit 41-4.
  • the second control unit 41-4 converts the vibration suppression command 11-4, which is an analog signal output by the vibration suppression calculation unit 42-4, into a digital signal and uses it as a drive command.
  • the seismic isolation control device 4-4 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93.
  • the CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40-4, the second control unit 41-4, and the vibration suppression calculation unit 42-4. Functions can be realized.
  • the seismic isolation control device 4-4 controls the drive device 3 by using the follow-up command 10 and the vibration suppression command 11 which are analog signals.
  • the vibration suppression calculation unit 42-4 calculates the vibration suppression command 11-4 using an analog filter.
  • FIG. 24 is a diagram showing the configuration of the positioning device 1-5 according to the sixth embodiment.
  • a part of the configuration of the positioning device 1-5 is common to the positioning device 1.
  • the positioning device 1-5 includes a drive device 3-5 and a seismic isolation control device 4-5.
  • the drive device 3-5 has a positioning drive unit 30-5 and a seismic isolation drive unit 31-1.
  • the positioning drive unit 30-5 includes a first movable unit 301, a first motor 302, and a first position detector 303-5.
  • the first position detector 303-5 is the first described in the second embodiment except that the detected first position information 12 is output to each of the first control unit 40-1 and the vibration suppression calculation unit 42-5. It has the same function as the position detector 303.
  • the seismic isolation drive unit 31-1 includes a second movable unit 311, a second motor 312, and a second position detector 313.
  • the seismic isolation control device 4-5 has a first control unit 40-1, a second control unit 41-1, a vibration suppression calculation unit 42-5, and a vibration characteristic setting unit 43.
  • the vibration suppression calculation unit 42-5 has a frequency response in which the sum of the first position information 12 output by the first position detector 303-5 and the vibration suppression command 11 is minimized at the vibration frequency ⁇ of the gantry 2.
  • the vibration suppression command 11 is calculated.
  • the vibration suppression calculation unit 42-5 outputs the calculated vibration suppression command 11 to the second control unit 41-1.
  • the seismic isolation control device 4-5 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93.
  • the CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, thereby performing the first control unit 40-1, the second control unit 41-1, the vibration suppression calculation unit 42-5, and the vibration suppression calculation unit 42-5.
  • the function of the vibration characteristic setting unit 43 can be realized.
  • the vibration suppression command 11 is calculated based on the first position information 12 indicating the position of the first movable portion 301. Having such a configuration makes it possible to efficiently suppress the vibration of the gantry 2 by a simple method.
  • the configuration shown in the above embodiments is an example, and can be combined with another known technique, can be combined with each other, and does not deviate from the gist. It is also possible to omit or change a part of the configuration.

Abstract

A vibration isolation control device (4) is characterized by controlling a drive device (3) which drives a first movable part (301) by means of a first motor (302) fixed to a mount (2), and which also drives a second movable part (311) by means of a second motor (312) fixed to the mount (2), and is further characterized by comprising: a first control unit (40) which controls the position or speed of the first motor (302) such that the first movable part (301) follows a time-series follow command (10); and a second control unit (41) which controls the position or speed of the second motor (312) to be proportional to a vibration suppression command (11), which is a position or speed dimension command corresponding to a vibration frequency component of the mount (2), said vibration frequency component being included in the follow command (10).

Description

免振制御装置および免振制御方法Seismic isolation control device and seismic isolation control method
　本開示は、架台に固定されたモータで可動部を駆動する駆動装置の運転中に生じる架台の振動を抑制する免振制御装置および免振制御方法に関する。 The present disclosure relates to a seismic isolation control device and a seismic isolation control method that suppress vibration of the gantry that occurs during operation of a drive device that drives a movable part by a motor fixed to the gantry.
　架台に固定されたモータで可動部を駆動して指定の位置に物を運ぶ位置決め装置のような駆動装置において、高速化および高精度化が求められている。しかしながら、駆動装置を高速化するとモータの回転数を上げる必要があるため架台に振動が生じ、駆動装置の動作精度が低下してしまう。架台に生じる振動を抑制する技術としては、架台に生じる振動周波数に基づいたフィルタを用いて、モータを制御する追従指令を修正する方法が知られている。しかしながら、追従指令を修正する場合、駆動装置の動作完了までの時間が増加してしまう。 High speed and high accuracy are required in a drive device such as a positioning device that drives a movable part with a motor fixed to a gantry to carry an object to a specified position. However, when the speed of the drive device is increased, it is necessary to increase the rotation speed of the motor, so that the gantry vibrates and the operation accuracy of the drive device is lowered. As a technique for suppressing vibration generated in the gantry, a method of modifying a tracking command for controlling a motor by using a filter based on the vibration frequency generated in the gantry is known. However, when the follow-up command is modified, the time until the operation of the drive device is completed increases.
　特許文献１には、駆動装置のモータとは異なる免振制御用のモータを備え、免振制御用のモータを駆動装置のモータと逆向きに駆動して、駆動装置の動作に伴って発生する架台の振動を抑制する免振制御装置が開示されている。免振制御用のモータは、駆動装置のモータが駆動する第１の可動部と異なる第２の可動部を駆動する。免振制御用のモータを備えることで、駆動装置のモータに与える追従指令を修正する必要がないため、駆動装置の動作完了までの時間を維持することが可能である。また、特許文献１に開示された技術では、位置速度制御による推力指令から架台の振動成分を除去した推力指令を生成し、免振制御用のカウンタ推力指令に追加している。これにより、免振制御用のモータが駆動する第２の可動部は、駆動装置を動作させた後に初期位置に戻るため、連続で同一方向への駆動を繰り返す場合であっても第２の可動部の可動範囲を抑制することができる。 Patent Document 1 includes a vibration isolation control motor different from that of the drive device, drives the vibration isolation control motor in the opposite direction to the drive device motor, and is generated in association with the operation of the drive device. A vibration isolation control device that suppresses vibration of the gantry is disclosed. The seismic isolation control motor drives a second movable portion different from the first movable portion driven by the motor of the drive device. By providing the motor for seismic isolation control, it is not necessary to modify the follow-up command given to the motor of the drive device, so that it is possible to maintain the time until the operation of the drive device is completed. Further, in the technique disclosed in Patent Document 1, a thrust command obtained by removing the vibration component of the gantry from the thrust command by position / speed control is generated and added to the counter thrust command for vibration isolation control. As a result, the second movable portion driven by the seismic isolation control motor returns to the initial position after operating the drive device, so that the second movable portion can be moved even when continuously driving in the same direction. The movable range of the part can be suppressed.
特開２０１２－５２６６６号公報Japanese Unexamined Patent Publication No. 2012-52666
　しかしながら、上記従来の技術によれば１回の位置決めによる第２の可動部の可動範囲は、第１の可動部と同じ程度必要であり、さらに可動範囲を抑制することが求められていた。 However, according to the above-mentioned conventional technique, the movable range of the second movable portion by one positioning is required to be the same as that of the first movable portion, and it is required to further suppress the movable range.
　本開示は、上記に鑑みてなされたものであって、駆動装置の動作により生じる振動を抑制するとともに、免振制御用のモータが駆動する可動部の可動範囲を抑制することが可能な免振制御装置を得ることを目的とする。 The present disclosure has been made in view of the above, and is capable of suppressing vibration caused by the operation of a drive device and suppressing the movable range of a movable portion driven by a motor for seismic isolation control. The purpose is to obtain a control device.
　上述した課題を解決し、目的を達成するために、本開示にかかる免振制御装置は、架台に固定された第１モータで第１可動部を駆動し架台に固定された第２モータで第２可動部を駆動する駆動装置を制御対象とし、時系列の追従指令に第１可動部が追従するように第１モータの位置または速度を制御する第１制御部と、追従指令に含まれる架台の振動周波数成分に相当する位置または速度の次元の指令である振動抑制指令の比例倍に第２モータの位置または速度を追従させる第２制御部と、を備えることを特徴とする。 In order to solve the above-mentioned problems and achieve the object, the vibration isolation control device according to the present disclosure is a second motor fixed to the gantry by driving the first movable part by the first motor fixed to the gantry. 2 The first control unit that controls the position or speed of the first motor so that the first movable unit follows the follow-up command in time series, and the gantry included in the follow-up command, with the drive device that drives the movable unit as the control target. It is characterized by including a second control unit that follows the position or speed of the second motor in proportion to the vibration suppression command, which is a command of the dimension of the position or speed corresponding to the vibration frequency component of the above.
　本発明にかかる免振制御装置は、駆動装置の動作により生じる振動を抑制するとともに、免振制御用のモータが駆動する可動部の可動範囲を抑制することが可能であるという効果を奏する。 The vibration isolation control device according to the present invention has the effect of suppressing vibration generated by the operation of the drive device and suppressing the movable range of the movable portion driven by the vibration isolation control motor.
実施の形態１にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 1. 追従指令から生成される駆動装置の各指令波形の一例を示す図The figure which shows an example of each command waveform of the drive device generated from a follow-up command. 図１に示す振動抑制演算部の第１の例を説明するための図The figure for demonstrating the 1st example of the vibration suppression calculation part shown in FIG. 図３に示す第１の例における追従指令および振動抑制指令の和を周波数解析した結果を示す図The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 1st example shown in FIG. 図１に示す振動抑制演算部の第２の例を説明するための図The figure for demonstrating the 2nd example of the vibration suppression calculation part shown in FIG. 図５に示す第２の例における追従指令および振動抑制指令の和を周波数解析した結果を示す図The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 2nd example shown in FIG. 図１に示す振動抑制演算部の第３の例を説明するための図The figure for demonstrating the 3rd example of the vibration suppression calculation part shown in FIG. 図７に示す第３の例における追従指令および振動抑制指令の和を周波数解析した結果を示す図The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 3rd example shown in FIG. 図１に示す振動抑制演算部の第４の例を説明するための図The figure for demonstrating the 4th example of the vibration suppression calculation part shown in FIG. 図９に示す第４の例における追従指令および振動抑制指令の和を周波数解析した結果を示す図The figure which shows the result of frequency analysis of the sum of the follow-up command and the vibration suppression command in the 4th example shown in FIG. 図１に示す振動抑制演算部の第５の例を説明するための図The figure for demonstrating the 5th example of the vibration suppression calculation part shown in FIG. 第１の比較例で使用する追従指令を示す図The figure which shows the follow-up command used in the 1st comparative example. 第１の比較例において架台に発生する加速度をシミュレーションした結果を示す図The figure which shows the result of simulating the acceleration generated in the gantry in the 1st comparative example. 第２の比較例で使用する追従指令と、追従指令および振動抑制指令の和とを示す図The figure which shows the follow-up command used in the 2nd comparative example, and the sum of a follow-up command and a vibration suppression command. 第２の比較例において架台に発生する加速度をシミュレーションした結果を示す図The figure which shows the result of simulating the acceleration generated in the gantry in the 2nd comparative example. 図１に示す位置決め装置が使用する追従指令を示す図The figure which shows the follow-up command used by the positioning apparatus shown in FIG. 図１に示す位置決め装置が使用する振動抑制指令を示す図The figure which shows the vibration suppression command used by the positioning apparatus shown in FIG. 実施の形態１において架台に発生する加速度をシミュレーションした結果を示す図The figure which shows the result of simulating the acceleration generated in the gantry in Embodiment 1. 実施の形態２にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 2. 実施の形態３にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 3. 実施の形態４にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 4. 図２１に示す位置決め装置が用いる追従指令および振動抑制指令を生成するエンジニアリングツールの構成例を示す図A diagram showing a configuration example of an engineering tool that generates a follow-up command and a vibration suppression command used by the positioning device shown in FIG. 21. 実施の形態５にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 5. 実施の形態６にかかる位置決め装置の構成を示す図The figure which shows the structure of the positioning apparatus which concerns on Embodiment 6.
　以下に、本開示の実施の形態にかかる免振制御装置および免振制御方法を図面に基づいて詳細に説明する。 The vibration isolation control device and the vibration isolation control method according to the embodiment of the present disclosure will be described in detail below with reference to the drawings.
実施の形態１．
　図１は、実施の形態１にかかる位置決め装置１の構成を示す図である。位置決め装置１は、駆動装置３と免振制御装置４とを有する。 Embodiment 1.
FIG. 1 is a diagram showing a configuration of a positioning device 1 according to a first embodiment. The positioning device 1 has a drive device 3 and a seismic isolation control device 4.
　駆動装置３は、位置決め用の第１モータ３０２および第１可動部３０１を備える位置決め駆動部３０と、免振制御用の第２モータ３１２および第２可動部３１１を備える免振駆動部３１とを有する。第１モータ３０２および第２モータ３１２は、架台２に固定されている。第１可動部３０１は、第１モータ３０２に機械的に接続されている。第１モータ３０２は、第１可動部３０１を駆動する。第２可動部３１１は、第２モータ３１２に機械的に接続されている。第２モータ３１２は、第２可動部３１１を駆動し、その反力をもって、第１モータ３０２が第１可動部３０１を駆動したときに生じる架台２の振動を抑制する。第１モータ３０２は、免振制御装置４が出力する指令に基づいて第１可動部３０１を駆動し、第２モータ３１２は、免振制御装置４が出力する指令に基づいて第２可動部３１１を駆動する。 The drive device 3 includes a positioning drive unit 30 including a first motor 302 and a first movable unit 301 for positioning, and a seismic isolation drive unit 31 including a second motor 312 and a second movable unit 311 for seismic isolation control. Have. The first motor 302 and the second motor 312 are fixed to the gantry 2. The first movable portion 301 is mechanically connected to the first motor 302. The first motor 302 drives the first movable portion 301. The second movable portion 311 is mechanically connected to the second motor 312. The second motor 312 drives the second movable portion 311 and suppresses the vibration of the gantry 2 that occurs when the first motor 302 drives the first movable portion 301 by the reaction force thereof. The first motor 302 drives the first movable unit 301 based on the command output by the seismic isolation control device 4, and the second motor 312 drives the second movable unit 311 based on the command output by the seismic isolation control device 4. To drive.
　免振制御装置４は、位置決め駆動部３０を制御する第１制御部４０と、免振駆動部３１を制御する第２制御部４１と、振動抑制演算部４２と、振動特性設定部４３とを有する。第１制御部４０は、外部から入力される時系列の追従指令１０に基づいて、第１モータ３０２に電流を供給して第１可動部３０１の動きを制御する。具体的には、第１制御部４０は、第１可動部３０１が追従指令１０に追従するように第１モータ３０２の位置または速度を制御する。追従指令１０は、位置または速度の次元の指令である。第２制御部４１は、後述する振動抑制演算部４２が演算する振動抑制指令１１に基づいて、第２モータ３１２に電流を供給して第２可動部３１１の動きを制御する。振動抑制指令１１は、追従指令１０に含まれる架台２の振動周波数成分に相当する指令である。具体的には、第２制御部４１は、振動抑制指令１１の比例倍に第２モータ３１２の位置または速度を追従させるように第２モータ３１２を制御する。 The seismic isolation control device 4 includes a first control unit 40 that controls the positioning drive unit 30, a second control unit 41 that controls the seismic isolation drive unit 31, a vibration suppression calculation unit 42, and a vibration characteristic setting unit 43. Have. The first control unit 40 supplies a current to the first motor 302 based on a time-series follow-up command 10 input from the outside to control the movement of the first movable unit 301. Specifically, the first control unit 40 controls the position or speed of the first motor 302 so that the first movable unit 301 follows the follow-up command 10. The follow-up command 10 is a command in the dimension of position or velocity. The second control unit 41 supplies a current to the second motor 312 to control the movement of the second movable unit 311 based on the vibration suppression command 11 calculated by the vibration suppression calculation unit 42 described later. The vibration suppression command 11 is a command corresponding to the vibration frequency component of the gantry 2 included in the follow-up command 10. Specifically, the second control unit 41 controls the second motor 312 so that the position or speed of the second motor 312 is made to follow the position or speed of the second motor 312 in proportion to the vibration suppression command 11.
　振動抑制演算部４２は、追従指令１０に基づいて、第２制御部４１が免振駆動部３１を制御するための振動抑制指令１１を演算する。振動抑制演算部４２は、追従指令１０に含まれる架台２の振動周波数成分に相当する振動抑制指令１１を位置または速度の次元で演算する。振動特性設定部４３は、架台２に応じた振動周波数を予め保持する。 The vibration suppression calculation unit 42 calculates the vibration suppression command 11 for the second control unit 41 to control the seismic isolation drive unit 31 based on the follow-up command 10. The vibration suppression calculation unit 42 calculates the vibration suppression command 11 corresponding to the vibration frequency component of the gantry 2 included in the follow-up command 10 in the dimension of position or speed. The vibration characteristic setting unit 43 holds in advance the vibration frequency corresponding to the gantry 2.
　図１において、駆動装置３および免振制御装置４は架台２上に設置されているが、免振制御装置４の一部または全部を架台２とは別の機器に設置してもよい。この場合、第１制御部４０と第１モータ３０２との間および第２制御部４１と第２モータ３１２との間は、ケーブル等を用いて接続される。 In FIG. 1, the drive device 3 and the seismic isolation control device 4 are installed on the gantry 2, but a part or all of the seismic isolation control device 4 may be installed on a device different from the gantry 2. In this case, the first control unit 40 and the first motor 302 and the second control unit 41 and the second motor 312 are connected by using a cable or the like.
　追従指令１０は、外部から免振制御装置４に送られる時系列の位置指令または速度指令である。図２は、追従指令１０から生成される駆動装置３の各指令波形の一例を示す図である。図２は、位置指令、速度指令、および、推力指令のそれぞれの波形を含む。なお、追従指令１０の取得方法および生成方法は、特に制限されない。追従指令１０は、駆動装置３および免振制御装置４が実行可能な任意の形状の指令であってよい。例えば、追従指令１０は、ＰＬＣ（Programmable　Logic　Controller）、ＩＰＣ（Industrial　Personal　Computer）などで生成した位置指令または速度指令であって、産業用ネットワークまたはアナログ信号などを介して取得されたものである。また、追従指令１０は、駆動装置３の駆動距離などに基づいて生成した指令を通信路を介して免振制御装置４に送信したものであってもよい。ただし、位置決め精度の観点から追従指令１０および振動抑制指令１１は同期されていることが望ましい。 The follow-up command 10 is a time-series position command or speed command sent from the outside to the seismic isolation control device 4. FIG. 2 is a diagram showing an example of each command waveform of the drive device 3 generated from the follow-up command 10. FIG. 2 includes waveforms of position command, velocity command, and thrust command, respectively. The acquisition method and generation method of the follow-up command 10 are not particularly limited. The follow-up command 10 may be a command having an arbitrary shape that can be executed by the drive device 3 and the seismic isolation control device 4. For example, the follow-up command 10 is a position command or speed command generated by a PLC (Programmable Logic Controller), an IPC (Industrial Personal Computer), or the like, and is acquired via an industrial network or an analog signal. Further, the follow-up command 10 may be a command generated based on the drive distance of the drive device 3 or the like transmitted to the seismic isolation control device 4 via the communication path. However, from the viewpoint of positioning accuracy, it is desirable that the follow-up command 10 and the vibration suppression command 11 are synchronized.
　第１制御部４０は、位置指令または速度指令である追従指令１０に応じて、第１モータ３０２の位置または速度を追従指令１０の比例倍に追従させるように駆動する。第２制御部４１は、位置指令または速度指令である振動抑制指令１１に応じて、第２モータ３１２の位置または速度を振動抑制指令１１の比例倍に追従させるように駆動する。このとき、第２制御部４１の応答速度を第１制御部４０の応答速度と同一に設定することによって、第１モータ３０２および第２モータ３１２で発生させる力の応答を同一とすることができ、架台２に発生する振動を精度よく抑制することが可能になる。なお、第１制御部４０の応答速度と第２制御部４１の応答速度との差が閾値以下である場合、第１制御部４０の応答速度と第２制御部４１の応答速度とは同一であるとみなすことができる。この閾値は、第１モータ３０２および第２モータ３１２で発生させる力の応答が同一であるとみなせる程度の値とすることが望ましい。また、第１制御部４０の応答速度と第２制御部４１の応答速度とを同一にした場合、位置決め装置１の使用者は、第１制御部４０の設定値をそのまま流用して、第２制御部４１のゲインなどの設定値を決定することができ、設定値の決定を容易に行うことが可能になる。 The first control unit 40 drives the position or speed of the first motor 302 to follow the follow-up command 10 in proportion to the follow-up command 10 which is a position command or a speed command. The second control unit 41 drives the position or speed of the second motor 312 to follow the vibration suppression command 11 proportionally in response to the vibration suppression command 11 which is a position command or a speed command. At this time, by setting the response speed of the second control unit 41 to be the same as the response speed of the first control unit 40, the response of the forces generated by the first motor 302 and the second motor 312 can be made the same. , It becomes possible to accurately suppress the vibration generated in the gantry 2. When the difference between the response speed of the first control unit 40 and the response speed of the second control unit 41 is equal to or less than the threshold value, the response speed of the first control unit 40 and the response speed of the second control unit 41 are the same. Can be considered to be. It is desirable that this threshold value is a value that can be regarded as having the same force response generated by the first motor 302 and the second motor 312. Further, when the response speed of the first control unit 40 and the response speed of the second control unit 41 are made the same, the user of the positioning device 1 uses the set value of the first control unit 40 as it is and uses the second control unit 40 as it is. A set value such as a gain of the control unit 41 can be determined, and the set value can be easily determined.
　振動抑制演算部４２は、振動抑制指令１１と追従指令１０との和が、架台２に応じて予め振動特性設定部４３に設定された架台振動周波数において極小となる周波数応答を持つように、振動抑制指令１１を演算する。 The vibration suppression calculation unit 42 vibrates so that the sum of the vibration suppression command 11 and the follow-up command 10 has a frequency response that is minimized at the gantry vibration frequency set in advance in the vibration characteristic setting unit 43 according to the gantry 2. The suppression command 11 is calculated.
　なお、免振制御装置４は、例えばＣＰＵ（Central　Processing　Unit）９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、処理回路、演算装置、プロセッサ、マイクロコンピュータ、ＤＳＰ（Digital　Signal　Processor）などとも呼ばれる。メモリ９３は、例えば、ＲＡＭ（Random　Access　Memory）、ＲＯＭ（Read　Only　Memory）、フラッシュメモリ、ＥＰＲＯＭ（Erasable　Programmable　ＲＯＭ）、ＥＥＰＲＯＭ（登録商標）（Electrically　ＥＰＲＯＭ）などの不揮発性または揮発性の半導体メモリ、磁気ディスク、フレキシブルディスク、光ディスク、コンパクトディスク、ミニディスク、ＤＶＤ（Digital　Versatile　Disk）などである。 The seismic isolation control device 4 is composed of, for example, a computer including a control circuit using a CPU (Central Processing Unit) 92 and a memory 93. The CPU 92 is also called a processing circuit, an arithmetic unit, a processor, a microcomputer, a DSP (Digital Signal Processor), or the like. The memory 93 is, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable ROM), EEPROM (registered trademark) (Electrically EPROM). Magnetic discs, flexible discs, optical discs, compact discs, mini discs, DVDs (Digital Versatile Disk), etc.
　ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０、第２制御部４１、振動抑制演算部４２、および振動特性設定部４３の機能を実現する。メモリ９３は、ＣＰＵ９２が実行する各処理における一時メモリとしても使用される。ＣＰＵ９２が実行するプログラムは、通信路を介して提供されてもよいし、記憶媒体に記録された状態で提供されてもよい。 The CPU 92 reads and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40, the second control unit 41, the vibration suppression calculation unit 42, and the vibration characteristic setting unit 43. Realize the function. The memory 93 is also used as a temporary memory in each process executed by the CPU 92. The program executed by the CPU 92 may be provided via a communication path, or may be provided in a state of being recorded on a storage medium.
　なお、上記ではＣＰＵ９２およびメモリ９３を用いた例について示したが、免振制御装置４の少なくとも一部の機能は、専用のハードウェアにより実現されてもよい。専用のハードウェアは、例えば、単一回路、複合回路、プログラム化したプロセッサ、並列プログラム化したプロセッサ、ＡＳＩＣ（Application　Specific　Integrated　Circuit）、ＦＰＧＡ（Field　Programmable　Gate　Array）、またはこれらを組み合わせたものである。以下の実施の形態についても同様である。 Although the example using the CPU 92 and the memory 93 has been shown above, at least a part of the functions of the seismic isolation control device 4 may be realized by dedicated hardware. Dedicated hardware is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof. .. The same applies to the following embodiments.
　図３は、図１に示す振動抑制演算部４２の第１の例を説明するための図である。第１の例では、振動抑制演算部４２は、ＩＩＲ（Infinite　Impulse　Response：無限インパルス応答）フィルタを用いて、振動抑制指令１１を演算する。第１の例で用いられるＩＩＲフィルタのフィルタ関数は、以下の数式（１）で表される。 FIG. 3 is a diagram for explaining a first example of the vibration suppression calculation unit 42 shown in FIG. In the first example, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using an IIR (Infinite Impulse Response) filter. The filter function of the IIR filter used in the first example is expressed by the following mathematical formula (1).
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004
　ここで数式（１）に含まれる３つの定数ａ１，ａ２，ｂのそれぞれの値は、振動特性設定部４３に設定された振動特性の情報に基づいて設定される。例えば、架台２の振動周波数がω［Ｈｚ］であるとき、定数ａ１＝２／２πωであり、定数ａ２＝１／（２πω）２であり、定数ｂ＝０．３／（２πω）２である場合、架台２の振動を抑制することができる。定数ａ１は、架台２の振動周波数ωのマイナス１乗に比例し、定数ａ２および定数ｂは、架台２の振動周波数ωのマイナス２乗に比例する。 Here, the values of the three constants a 1 , a 2 , and b included in the mathematical formula (1) are set based on the vibration characteristic information set in the vibration characteristic setting unit 43. For example, when the vibration frequency of the gantry 2 is ω [Hz], the constant a 1 = 2 / 2πω, the constant a 2 = 1 / (2πω) 2 , and the constant b = 0.3 / (2πω) 2 If this is the case, the vibration of the gantry 2 can be suppressed. The constant a 1 is proportional to the minus square of the vibration frequency ω of the gantry 2, and the constant a 2 and the constant b are proportional to the minus square of the vibration frequency ω of the gantry 2.
　振動抑制演算部４２が第１の例のＩＩＲフィルタを用いることで、少ないメモリで効率的に架台２に発生する振動を抑制することができる。また、フィルタを連続の表現とすることで、精度よく振動を抑制することが可能になる。 By using the IIR filter of the first example, the vibration suppression calculation unit 42 can efficiently suppress the vibration generated in the gantry 2 with a small amount of memory. Further, by expressing the filter continuously, it is possible to suppress the vibration with high accuracy.
　図４は、図３に示す第１の例における追従指令１０および振動抑制指令１１の和を周波数解析した結果を示す図である。図４の横軸は周波数であり、縦軸は追従指令１０および振動抑制指令１１の和である。架台２の振動周波数ωにおいて、周波数応答は極小値をとっている。 FIG. 4 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the first example shown in FIG. The horizontal axis of FIG. 4 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11. At the vibration frequency ω of the gantry 2, the frequency response has a minimum value.
　図５は、図１に示す振動抑制演算部４２の第２の例を説明するための図である。第２の例は、第１の例におけるＩＩＲフィルタを離散で実装し、さらにａ２＝ｂとした例である。ＩＩＲフィルタを離散で実装することにより、さらに少ない演算で架台２の振動を抑制することができる。また、ａ２＝ｂとすることで、伝達関数の分子の２次の係数が０となる。このため、演算量をより少なくすることができる。 FIG. 5 is a diagram for explaining a second example of the vibration suppression calculation unit 42 shown in FIG. The second example is an example in which the IIR filter in the first example is discretely implemented and a 2 = b. By mounting the IIR filter discretely, the vibration of the gantry 2 can be suppressed with a smaller number of operations. In addition, by setting a 2 = b, 2-order coefficients of the numerator of the transfer function is zero. Therefore, the amount of calculation can be reduced.
　図６は、図５に示す第２の例における追従指令１０および振動抑制指令１１の和を周波数解析した結果を示す図である。図６の横軸は周波数であり、縦軸は追従指令１０および振動抑制指令１１の和である。架台２の振動周波数ωにおいて、周波数応答は極小値をとっている。 FIG. 6 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the second example shown in FIG. The horizontal axis of FIG. 6 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11. At the vibration frequency ω of the gantry 2, the frequency response has a minimum value.
　図７は、図１に示す振動抑制演算部４２の第３の例を説明するための図である。第３の例では、振動抑制演算部４２は、ＦＩＲ（Finite　Impulse　Response：有限インパルス応答）フィルタを用いて、振動抑制指令１１を演算する。第３の例で用いられるＦＩＲフィルタの第１の離散系伝達関数Ｆ１（ｚ）は、以下の数式（２）で表される。 FIG. 7 is a diagram for explaining a third example of the vibration suppression calculation unit 42 shown in FIG. In the third example, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using an FIR (Finite Impulse Response) filter. The first discrete transfer function F 1 (z) of the FIR filter used in the third example is expressed by the following mathematical formula (2).
Figure JPOXMLDOC01-appb-M000005
Figure JPOXMLDOC01-appb-M000005
　定数Ｎ１の値は、振動特性設定部４３に設定された振動特性の情報に応じて設定される。例えば、架台２の振動周波数ω、振動抑制演算部４２の処理周期ｔとした場合、Ｎ１＝１／ωｔとすることで、架台２の振動を抑制することができる。 The value of the constant N 1 is set according to the vibration characteristic information set in the vibration characteristic setting unit 43. For example, when the vibration frequency ω of the gantry 2 and the processing cycle t of the vibration suppression calculation unit 42 are set, the vibration of the gantry 2 can be suppressed by setting N 1 = 1 / ωt.
　振動抑制演算部４２が第３の例に示すＦＩＲフィルタを用いることで、フィルタの演算を行うときの演算誤差の影響を抑制して、振動を抑制することができる。また、ＦＩＲフィルタを用いることで、振動抑制指令１１を安定させることが可能になる。 By using the FIR filter shown in the third example by the vibration suppression calculation unit 42, it is possible to suppress the influence of calculation error when performing the calculation of the filter and suppress the vibration. Further, by using the FIR filter, it becomes possible to stabilize the vibration suppression command 11.
　図８は、図７に示す第３の例における追従指令１０および振動抑制指令１１の和を周波数解析した結果を示す図である。図８の横軸は周波数であり、縦軸は追従指令１０および振動抑制指令１１の和である。架台２の振動周波数ωにおいて、周波数応答は極小値をとっている。 FIG. 8 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the third example shown in FIG. 7. The horizontal axis of FIG. 8 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11. At the vibration frequency ω of the gantry 2, the frequency response has a minimum value.
　図９は、図１に示す振動抑制演算部４２の第４の例を説明するための図である。第４の例では、振動抑制演算部４２は、移動平均フィルタを用いて、振動抑制指令１１を演算する。図９に示す移動平均フィルタの段数はＮ２である。段数を示す定数Ｎ２の値は、第３の例における定数Ｎ１と同様に、振動特性設定部４３に設定された振動特性の情報に応じて設定される。第４の例で用いられる移動平均フィルタの第２の離散系伝達関数Ｆ２（ｚ）は、以下の数式（３）で表される。 FIG. 9 is a diagram for explaining a fourth example of the vibration suppression calculation unit 42 shown in FIG. In the fourth example, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using the moving average filter. The number of stages of the moving average filter shown in FIG. 9 is N 2 . The value of the constant N 2 indicating the number of stages is set according to the vibration characteristic information set in the vibration characteristic setting unit 43, similarly to the constant N 1 in the third example. The second discrete transfer function F 2 (z) of the moving average filter used in the fourth example is expressed by the following mathematical formula (3).
Figure JPOXMLDOC01-appb-M000006
Figure JPOXMLDOC01-appb-M000006
　振動抑制演算部４２が図９に示す移動平均フィルタを用いることで、振動抑制演算部４２の入力にノイズがある場合であっても、安定した振動抑制指令１１を演算することができる。 By using the moving average filter shown in FIG. 9, the vibration suppression calculation unit 42 can calculate a stable vibration suppression command 11 even when there is noise in the input of the vibration suppression calculation unit 42.
　図１０は、図９に示す第４の例における追従指令１０および振動抑制指令１１の和を周波数解析した結果を示す図である。図１０の横軸は周波数であり、縦軸は追従指令１０および振動抑制指令１１の和である。架台２の振動周波数ωにおいて、周波数応答は極小値をとっている。 FIG. 10 is a diagram showing the result of frequency analysis of the sum of the follow-up command 10 and the vibration suppression command 11 in the fourth example shown in FIG. The horizontal axis of FIG. 10 is the frequency, and the vertical axis is the sum of the follow-up command 10 and the vibration suppression command 11. At the vibration frequency ω of the gantry 2, the frequency response has a minimum value.
　以上、振動抑制演算部４２の第１～第４の例について説明したが、振動抑制演算部４２は、追従指令１０と振動抑制指令１１との和が、架台２の振動周波数ωにおいて極小となる周波数応答を持つように振動抑制指令１１を演算することができればよい。上記は一例であって、振動抑制演算部４２の構成は、説明した例に限定されない。 Although the first to fourth examples of the vibration suppression calculation unit 42 have been described above, in the vibration suppression calculation unit 42, the sum of the follow-up command 10 and the vibration suppression command 11 becomes the minimum at the vibration frequency ω of the gantry 2. It suffices if the vibration suppression command 11 can be calculated so as to have a frequency response. The above is an example, and the configuration of the vibration suppression calculation unit 42 is not limited to the described example.
　例えば、望まれる特性に応じて、フィルタの次数が変更されてよい。また、振動抑制演算部４２は、複数のフィルタを組み合わせて構成することもできる。また、振動抑制演算部４２が用いる各フィルタの定数を、周波数応答に応じて変更することもできる。位置決め装置１の使用者または設計者は、装置構成、使用状況などに応じて、適した手法を選択することができる。また、状況に応じて、フィルタの使い分けができるように振動抑制演算部４２を構成してもよい。 For example, the order of the filter may be changed according to the desired characteristics. Further, the vibration suppression calculation unit 42 can also be configured by combining a plurality of filters. Further, the constant of each filter used by the vibration suppression calculation unit 42 can be changed according to the frequency response. The user or designer of the positioning device 1 can select a suitable method according to the device configuration, usage conditions, and the like. Further, the vibration suppression calculation unit 42 may be configured so that the filters can be used properly according to the situation.
　図１１は、図１に示す振動抑制演算部４２の第５の例を説明するための図である。振動抑制演算部４２は、複数の振動周波数ωに基づいて、振動抑制指令１１を演算してもよい。第５の例において、振動抑制演算部４２は、２つの振動周波数ω１，ω２に基づいて、振動抑制指令１１を演算する。例えば、振動抑制演算部４２は２つのＩＩＲフィルタを用いて、振動抑制指令１１を演算する。一方のＩＩＲフィルタのフィルタ関数は、上記の数式（１）で表され、他方のＩＩＲフィルタのフィルタ関数は、以下の数式（４）で表される。 FIG. 11 is a diagram for explaining a fifth example of the vibration suppression calculation unit 42 shown in FIG. The vibration suppression calculation unit 42 may calculate the vibration suppression command 11 based on the plurality of vibration frequencies ω. In the fifth example, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the two vibration frequencies ω 1 and ω 2. For example, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 using two IIR filters. The filter function of one IIR filter is represented by the above formula (1), and the filter function of the other IIR filter is represented by the following formula (4).
Figure JPOXMLDOC01-appb-M000007
Figure JPOXMLDOC01-appb-M000007
　第５の例では、数式（１）に含まれる定数ａ１＝２／２πω１であり、定数ａ２＝１／（２πω１）２であり、定数ｂ＝０．３／（２πω１）２であり、数式（４）に含まれるａ３＝２／２πω２であり、定数ａ２＝１／（２πω２）２であり、定数ｂ＝０．３／（２πω２）２である場合、架台２の振動を抑制することができる。 In the fifth example, the constant a 1 = 2 / 2πω 1 included in the mathematical formula (1), the constant a 2 = 1 / (2πω 1 ) 2 , and the constant b = 0.3 / (2πω 1 ) 2 If a3 = 2 / 2πω 2 included in the mathematical formula (4), a constant a 2 = 1 / (2πω 2 ) 2 , and a constant b = 0.3 / (2πω 2 ) 2 , then the gantry The vibration of 2 can be suppressed.
　第５の例では、追従指令１０と振動抑制指令１１との和が、それぞれの振動周波数ω１，ω２で極小となる周波数応答を有するため、より精度よく架台２の振動を抑制することができる。 In the fifth example, since the sum of the follow-up command 10 and the vibration suppression command 11 has a frequency response that is minimized at the respective vibration frequencies ω 1 and ω 2 , the vibration of the gantry 2 can be suppressed more accurately. can.
　続いて、図１に示す位置決め装置１の奏する効果について説明する。図１２および図１３は、本実施の形態の第１の比較例を説明するための図である。図１２は、第１の比較例で使用する追従指令１０を示す図である。図１３は、第１の比較例において架台２に発生する加速度をシミュレーションした結果を示す図である。なお、図１３は、図１２に示す追従指令１０を用いて位置決め駆動部３０を単独で駆動し、免振駆動部３１を駆動しない場合のシミュレーション結果を示している。 Next, the effect of the positioning device 1 shown in FIG. 1 will be described. 12 and 13 are diagrams for explaining a first comparative example of the present embodiment. FIG. 12 is a diagram showing a follow-up command 10 used in the first comparative example. FIG. 13 is a diagram showing the result of simulating the acceleration generated in the gantry 2 in the first comparative example. Note that FIG. 13 shows a simulation result when the positioning drive unit 30 is driven independently by using the follow-up command 10 shown in FIG. 12 and the seismic isolation drive unit 31 is not driven.
　図１３に示すように、免振駆動部３１を駆動させずに、位置決め駆動部３０を駆動した場合、第１可動部３０１が追従指令１０に従って駆動すると、架台２が振動して位置に誤差が発生するため、位置決め精度が低下してしまうことがある。 As shown in FIG. 13, when the positioning drive unit 30 is driven without driving the seismic isolation drive unit 31, when the first movable unit 301 is driven according to the follow-up command 10, the gantry 2 vibrates and an error in the position occurs. Since it occurs, the positioning accuracy may decrease.
　図１４および図１５は、本実施の形態の第２の比較例を説明するための図である。図１４は、第２の比較例で使用する追従指令１０と、追従指令１０および振動抑制指令１１の和とを示す図である。図１５は、第２の比較例において架台２に発生する加速度をシミュレーションした結果を示す図である。図１４の実線は、追従指令１０および振動抑制指令１１の和を示しており、図１４の破線は、追従指令１０単体を示している。図１５の実線は、図１４の実線で示される追従指令１０および振動抑制指令１１の和を使用して、位置決め駆動部３０を駆動した場合に架台２に発生する加速度のシミュレーション結果を示しており、図１５の破線は、図１４の破線で示される追従指令１０単体を使用して、位置決め駆動部３０を駆動した場合に架台２に発生する加速度のシミュレーション結果を示している。 14 and 15 are diagrams for explaining a second comparative example of the present embodiment. FIG. 14 is a diagram showing the sum of the follow-up command 10 used in the second comparative example, the follow-up command 10, and the vibration suppression command 11. FIG. 15 is a diagram showing the result of simulating the acceleration generated in the gantry 2 in the second comparative example. The solid line in FIG. 14 shows the sum of the follow-up command 10 and the vibration suppression command 11, and the broken line in FIG. 14 shows the follow-up command 10 alone. The solid line in FIG. 15 shows the simulation result of the acceleration generated in the gantry 2 when the positioning drive unit 30 is driven by using the sum of the follow-up command 10 and the vibration suppression command 11 shown by the solid line in FIG. The broken line in FIG. 15 shows the simulation result of the acceleration generated in the gantry 2 when the positioning drive unit 30 is driven by using the tracking command 10 alone shown by the broken line in FIG.
　図１５の実線と破線とを比較すると、追従指令１０に振動抑制指令１１を追加することで、架台２に発生する加速度は、追従指令１０単体で位置決め駆動部３０を駆動した場合よりも大幅に抑制されている。しかしながら、追従指令１０に振動抑制指令１１を追加した場合、位置決めが完了するまでの時間が増加している。 Comparing the solid line and the broken line in FIG. 15, by adding the vibration suppression command 11 to the follow-up command 10, the acceleration generated in the gantry 2 is significantly larger than that in the case where the follow-up command 10 alone drives the positioning drive unit 30. It is suppressed. However, when the vibration suppression command 11 is added to the follow-up command 10, the time until the positioning is completed is increased.
　図１６は、図１に示す位置決め装置１が使用する追従指令１０を示す図である。図１７は、図１に示す位置決め装置１が使用する振動抑制指令１１を示す図である。図１８は、実施の形態１において架台２に発生する加速度をシミュレーションした結果を示す図である。図１８は、図１６に示す追従指令１０を用いて位置決め駆動部３０を駆動し、図１７に示す振動抑制指令１１を用いて免振駆動部３１を駆動した場合のシミュレーション結果を示している。 FIG. 16 is a diagram showing a follow-up command 10 used by the positioning device 1 shown in FIG. FIG. 17 is a diagram showing a vibration suppression command 11 used by the positioning device 1 shown in FIG. FIG. 18 is a diagram showing a result of simulating the acceleration generated in the gantry 2 in the first embodiment. FIG. 18 shows a simulation result when the positioning drive unit 30 is driven by using the follow-up command 10 shown in FIG. 16 and the seismic isolation drive unit 31 is driven by using the vibration suppression command 11 shown in FIG.
　本実施の形態にかかる位置決め装置１では、位置決め駆動部３０は、追従指令１０に基づいて制御されるため、第２の比較例で生じたような位置決め時間の増加を抑制しつつ、免振駆動部３１を振動抑制指令１１に基づいて制御することで、架台２の振動を抑制することができる。このとき振動抑制演算部４２は、位置決め駆動部３０の推力指令、加速度指令ではなく、位置指令および速度指令に対して、その駆動時の架台２の振動の反力を演算するため、第１可動部３０１にかかる摩擦の影響を抑えつつ、振動を抑制することができる。 In the positioning device 1 according to the present embodiment, since the positioning drive unit 30 is controlled based on the follow-up command 10, vibration isolation drive is performed while suppressing an increase in positioning time as caused in the second comparative example. By controlling the unit 31 based on the vibration suppression command 11, the vibration of the gantry 2 can be suppressed. At this time, the vibration suppression calculation unit 42 is first movable because it calculates the reaction force of the vibration of the gantry 2 at the time of driving the position command and the speed command instead of the thrust command and the acceleration command of the positioning drive unit 30. Vibration can be suppressed while suppressing the influence of friction applied to the portion 301.
　ここで、第２可動部３１１の可動範囲は、位置指令に図３，５，７，９，１１に示したようなフィルタを適用したものであるため、摩擦などの影響を考慮する必要なく、容易に計算することができる。 Here, since the movable range of the second movable portion 311 applies the filter as shown in FIGS. 3, 5, 7, 9, and 11 to the position command, it is not necessary to consider the influence of friction and the like. It can be calculated easily.
　また、振動抑制演算部４２が使用するフィルタの性質によって、第２可動部３１１は、位置決め終了時に自然に始動位置に戻る。これにより、追従指令１０が同一方向に連続で動作するような場合であっても、第２可動部３１１の可動範囲は、追従指令１回分と同等となる。さらに、第２モータ３１２は、追従指令１０に含まれる振動周波数成分に相当する振動抑制指令１１の比例倍に追従するように制御される。振動周波数成分は、元の追従指令と比較して小さいため、第２可動部３１１の１回分の可動範囲は、元の追従指令に対して短縮される。 Further, due to the nature of the filter used by the vibration suppression calculation unit 42, the second movable unit 311 naturally returns to the starting position at the end of positioning. As a result, even when the follow-up command 10 continuously operates in the same direction, the movable range of the second movable portion 311 is equivalent to one follow-up command. Further, the second motor 312 is controlled so as to follow the vibration suppression command 11 corresponding to the vibration frequency component included in the follow-up command 10. Since the vibration frequency component is smaller than the original follow-up command, the movable range of the second movable portion 311 for one time is shortened with respect to the original follow-up command.
　以上説明したように、実施の形態１にかかる免振制御装置４によれば、第１可動部３０１は、時系列の追従指令に追従するように第１モータ３０２の位置または速度が制御され、第２モータ３１２の位置または速度は、架台２の振動周波数成分に相当する振動抑制指令１１の比例倍に追従するように制御される。このため、制御対象である駆動装置３の動作により生じる振動を抑制するとともに、第２可動部３１１の可動範囲を抑制することが可能になる。 As described above, according to the vibration isolation control device 4 according to the first embodiment, the position or speed of the first motor 302 is controlled in the first movable portion 301 so as to follow the follow-up command in the time series. The position or speed of the second motor 312 is controlled so as to follow a proportional multiple of the vibration suppression command 11 corresponding to the vibration frequency component of the gantry 2. Therefore, it is possible to suppress the vibration generated by the operation of the drive device 3 to be controlled and to suppress the movable range of the second movable portion 311.
　また、第１制御部４０の応答速度と第２制御部４１の応答速度との差は閾値以下に設定される。これにより、第１モータ３０２および第２モータ３１２で発生させる力の応答を同一とすることができ、架台２に発生する振動を精度よく抑制することが可能になる。また、第１制御部４０の応答速度と第２制御部４１の応答速度とを同一にした場合、位置決め装置１の使用者は、第１制御部４０の設定値をそのまま流用して、第２制御部４１のゲインなどの設定値を決定することができ、設定値の決定を容易に行うことが可能になる。 Further, the difference between the response speed of the first control unit 40 and the response speed of the second control unit 41 is set to be equal to or less than the threshold value. As a result, the responses of the forces generated by the first motor 302 and the second motor 312 can be made the same, and the vibration generated in the gantry 2 can be suppressed with high accuracy. Further, when the response speed of the first control unit 40 and the response speed of the second control unit 41 are made the same, the user of the positioning device 1 uses the set value of the first control unit 40 as it is and uses the second control unit 40 as it is. A set value such as a gain of the control unit 41 can be determined, and the set value can be easily determined.
　なお、振動抑制演算部４２は、追従指令１０との和が、架台２の振動周波数に基づいた周波数で極小となる周波数応答を持つように振動抑制指令１１を演算することで、振動抑制指令１１を、追従指令１０に含まれる架台２の振動周波数成分に相当する指令とすることができる。つまり、振動抑制指令１１は、架台２の振動が小さくなる周波数応答をもつ指令と、追従指令１０との差をとることで計算される。このため、簡易な演算で架台２の振動を抑制することが可能になる。 The vibration suppression calculation unit 42 calculates the vibration suppression command 11 so that the sum with the follow-up command 10 has a frequency response that is minimized at a frequency based on the vibration frequency of the gantry 2. Can be a command corresponding to the vibration frequency component of the gantry 2 included in the follow-up command 10. That is, the vibration suppression command 11 is calculated by taking the difference between the command having a frequency response that reduces the vibration of the gantry 2 and the follow-up command 10. Therefore, it is possible to suppress the vibration of the gantry 2 by a simple calculation.
　なお、振動抑制演算部４２は、上記の第１～第５の例に示す方法で、振動抑制指令１１を演算することができる。フィルタを用いることで、容易に振動抑制指令１１を生成することが可能になる。 The vibration suppression calculation unit 42 can calculate the vibration suppression command 11 by the method shown in the first to fifth examples above. By using the filter, it becomes possible to easily generate the vibration suppression command 11.
実施の形態２．
　図１９は、実施の形態２にかかる位置決め装置１－１の構成を示す図である。位置決め装置１－１の構成の一部は、位置決め装置１と共通である。以下、位置決め装置１と共通する部分については、同じ符号を用いることで、詳細な説明を省略し、位置決め装置１と異なる部分について主に説明する。位置決め装置１－１は、駆動装置３－１と、免振制御装置４－１とを有する。 Embodiment 2.
FIG. 19 is a diagram showing the configuration of the positioning device 1-1 according to the second embodiment. A part of the configuration of the positioning device 1-1 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described. The positioning device 1-1 includes a drive device 3-1 and a seismic isolation control device 4-1.
　駆動装置３－１は、位置決め駆動部３０－１と、免振駆動部３１－１とを有する。位置決め駆動部３０－１は、第１可動部３０１と、第１モータ３０２と、第１位置検出器３０３とを有する。免振駆動部３１－１は、第２可動部３１１と、第２モータ３１２と、第２位置検出器３１３とを有する。 The drive device 3-1 has a positioning drive unit 30-1 and a seismic isolation drive unit 31-1. The positioning drive unit 30-1 includes a first movable unit 301, a first motor 302, and a first position detector 303. The seismic isolation drive unit 31-1 includes a second movable unit 311, a second motor 312, and a second position detector 313.
　免振制御装置４－１は、第１制御部４０－１と、第２制御部４１－１と、振動抑制演算部４２と、振動特性設定部４３と、慣性比補償部４４と、慣性特性設定部４５とを有する。 The seismic isolation control device 4-1 includes a first control unit 40-1, a second control unit 41-1, a vibration suppression calculation unit 42, a vibration characteristic setting unit 43, an inertia ratio compensation unit 44, and an inertial characteristic. It has a setting unit 45.
　第１位置検出器３０３は、第１可動部３０１の位置を測定し、測定した位置を示す第１位置情報１２を第１制御部４０－１に出力する。第１位置検出器３０３は、第１可動部３０１に設置、または第１可動部３０１に近接して設置される。第１位置検出器３０３は、例えば、リニアスケール、近接センサ、レーザ変位計、ビジョンセンサなどである。なお、図１９では、第１位置検出器３０３は、第１可動部３０１に取り付けられているが、第１位置検出器３０３は、第１モータ３０２に取り付けられたエンコーダ、レゾルバなどであってもよいし、第１位置検出器３０３は、第１可動部３０１および第１モータ３０２の両方に取り付けられてもよい。 The first position detector 303 measures the position of the first movable unit 301, and outputs the first position information 12 indicating the measured position to the first control unit 40-1. The first position detector 303 is installed in the first movable portion 301, or is installed in the vicinity of the first movable portion 301. The first position detector 303 is, for example, a linear scale, a proximity sensor, a laser displacement meter, a vision sensor, or the like. In FIG. 19, the first position detector 303 is attached to the first movable portion 301, but the first position detector 303 may be an encoder, a resolver, or the like attached to the first motor 302. Alternatively, the first position detector 303 may be attached to both the first movable portion 301 and the first motor 302.
　第２位置検出器３１３は、第２可動部３１１の位置を測定し、測定した位置を示す第２位置情報１３を第２制御部４１－１に出力する。第２位置検出器３１３は、第２可動部３１１に設置、または第２可動部３１１に近接して設置される。第２位置検出器３１３は、例えば、リニアスケール、近接センサ、レーザ変位計、ビジョンセンサなどである。なお、図１９では、第２位置検出器３１３は、第２可動部３１１に取り付けられているが、第２位置検出器３１３は、第２モータ３１２に取り付けられたエンコーダ、レゾルバなどであってもよいし、第２位置検出器３１３は、第２可動部３１１および第２モータ３１２の両方に取り付けられてもよい。 The second position detector 313 measures the position of the second movable unit 311 and outputs the second position information 13 indicating the measured position to the second control unit 41-1. The second position detector 313 is installed in the second movable portion 311 or is installed in the vicinity of the second movable portion 311. The second position detector 313 is, for example, a linear scale, a proximity sensor, a laser displacement meter, a vision sensor, or the like. In FIG. 19, the second position detector 313 is attached to the second movable portion 311. However, the second position detector 313 may be an encoder, a resolver, or the like attached to the second motor 312. Alternatively, the second position detector 313 may be attached to both the second movable portion 311 and the second motor 312.
　第１制御部４０－１は、第１位置検出器３０３が測定した第１可動部３０１の位置を示す第１位置情報１２を受信し、受信した第１位置情報１２と追従指令１０とに基づいて第１モータ３０２をフィードバック制御するサーボシステムである。同様に、第２制御部４１－１は、第２位置検出器３１３が測定した第２可動部３１１の位置を示す第２位置情報１３を受信し、受信した第２位置情報１３と振動抑制指令１１とに基づいて第２モータ３１２をフィードバック制御するサーボシステムである。 The first control unit 40-1 receives the first position information 12 indicating the position of the first movable unit 301 measured by the first position detector 303, and is based on the received first position information 12 and the follow-up command 10. This is a servo system that feedback-controls the first motor 302. Similarly, the second control unit 41-1 receives the second position information 13 indicating the position of the second movable unit 311 measured by the second position detector 313, and receives the second position information 13 and the vibration suppression command. It is a servo system that feedback-controls the second motor 312 based on 11.
　慣性比補償部４４は、予め慣性特性設定部４５に設定された慣性比に応じて、追従指令１０に対して、慣性比による振動への影響を補償する。ここで、慣性比は、第１可動部３０１および第１モータ３０２と、第２可動部３１１および第２モータ３１２との慣性比に応じて予め設定される。例えば、第１可動部３０１の質量がＭ、第２可動部３１１の質量がｍの場合、慣性比補償部４４は、追従指令１０にＭ／ｍを乗ずることによって、第１可動部３０１と第２可動部３１１との質量差による架台２の振動の影響を補うことができる。 The inertial ratio compensating unit 44 compensates for the influence of the inertial ratio on vibration with respect to the follow-up command 10 according to the inertial ratio set in advance in the inertial characteristic setting unit 45. Here, the inertia ratio is set in advance according to the inertia ratio of the first movable portion 301 and the first motor 302 and the second movable portion 311 and the second motor 312. For example, when the mass of the first movable portion 301 is M and the mass of the second movable portion 311 is m, the inertia ratio compensating unit 44 multiplies the follow-up command 10 by M / m to obtain the first movable portion 301 and the first movable portion 301. 2 It is possible to compensate for the influence of vibration of the gantry 2 due to the difference in mass from the movable portion 311.
　また、第１可動部３０１の可動方向と第２可動部３１１の可動方向とが並行でない場合、慣性比補償部４４は、第１可動部３０１の可動方向と、第２可動部３１１の可動方向との差による架台２の振動への影響を補間することができる。例えば、第１可動部３０１の可動方向と、第２可動部３１１の可動方向とが角度θ［ｒａｄ］で交わる場合、慣性比補償部４４は、追従指令１０にＭ／ｍｃｏｓθを乗ずることで、架台２に発生する振動を抑制することができる。 Further, when the movable direction of the first movable portion 301 and the movable direction of the second movable portion 311 are not parallel, the inertia ratio compensating unit 44 has the movable direction of the first movable portion 301 and the movable direction of the second movable portion 311. The influence of the difference between the above and the vibration of the gantry 2 can be interpolated. For example, when the movable direction of the first movable portion 301 and the movable direction of the second movable portion 311 intersect at an angle θ [rad], the inertia ratio compensating unit 44 multiplies the follow-up command 10 by M / mcos θ. The vibration generated in the gantry 2 can be suppressed.
　慣性特性設定部４５に設定される慣性比は、位置決め装置１－１の設計者が予め設定してもよいし、装置構成に応じて、使用者が設定してもよい。特に、第１可動部３０１の構成と第２可動部３１１の構成とが同一であって、その駆動方向が同一である場合、慣性特性設定部４５に設定される慣性比は「１」となることから、免振制御装置４－１は、慣性比補償部４４および慣性特性設定部４５を省略した構成とすることができる。また、図１９では、慣性比補償部４４は、振動抑制演算部４２の後段に設けられているが、振動抑制演算部４２および慣性比補償部４４の処理順は逆であってもよい。 The inertial ratio set in the inertial characteristic setting unit 45 may be set in advance by the designer of the positioning device 1-1, or may be set by the user according to the device configuration. In particular, when the configuration of the first movable portion 301 and the configuration of the second movable portion 311 are the same and the driving directions thereof are the same, the inertia ratio set in the inertial characteristic setting unit 45 is "1". Therefore, the seismic isolation control device 4-1 can have a configuration in which the inertial ratio compensation unit 44 and the inertial characteristic setting unit 45 are omitted. Further, in FIG. 19, the inertia ratio compensation unit 44 is provided after the vibration suppression calculation unit 42, but the processing order of the vibration suppression calculation unit 42 and the inertia ratio compensation unit 44 may be reversed.
　第１制御部４０－１は、追従指令１０および第１位置情報１２に基づいて、第１可動部３０１を駆動させる推力指令を生成し、第１可動部３０１に加わる外力を制御することができる。第２制御部４１－１は、振動抑制指令１１および第２位置情報１３に基づいて、第２可動部３１１を駆動させる推力指令を生成し、第２可動部３１１に加わる外力を制御することができる。このような構成を有することによって、第１可動部３０１とその接地面との間に発生する摩擦と、第２可動部３１１とその接地面との間に発生する摩擦とが異なる場合であっても、推力が調整され、第１可動部３０１に加わる外力と第２可動部３１１に加わる外力とを同一にすることができる。したがって、駆動装置３－１の駆動時に発生する架台２の振動を精度よく抑制することが可能になる。 The first control unit 40-1 can generate a thrust command for driving the first movable unit 301 based on the follow-up command 10 and the first position information 12, and control an external force applied to the first movable unit 301. .. The second control unit 41-1 can generate a thrust command for driving the second movable unit 311 based on the vibration suppression command 11 and the second position information 13, and control the external force applied to the second movable unit 311. can. By having such a configuration, the friction generated between the first movable portion 301 and its ground contact surface and the friction generated between the second movable portion 311 and its ground contact surface may be different. Also, the thrust is adjusted so that the external force applied to the first movable portion 301 and the external force applied to the second movable portion 311 can be made the same. Therefore, it is possible to accurately suppress the vibration of the gantry 2 generated when the drive device 3-1 is driven.
　なお、免振制御装置４－１は、例えばＣＰＵ９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０－１、第２制御部４１－１、振動抑制演算部４２、振動特性設定部４３、慣性比補償部４４、および、慣性特性設定部４５の機能を実現することができる。 The seismic isolation control device 4-1 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93. The CPU 92 reads and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40-1, the second control unit 41-1, the vibration suppression calculation unit 42, and the vibration characteristic setting. The functions of the unit 43, the inertial ratio compensating unit 44, and the inertial characteristic setting unit 45 can be realized.
実施の形態３．
　図２０は、実施の形態３にかかる位置決め装置１－２の構成を示す図である。位置決め装置１－２の構成の一部は、位置決め装置１と共通である。以下、位置決め装置１と共通する部分については、同じ符号を用いることで、詳細な説明を省略し、位置決め装置１と異なる部分について主に説明する。位置決め装置１－２は、駆動装置３－２と、免振制御装置４－２とを有する。 Embodiment 3.
FIG. 20 is a diagram showing the configuration of the positioning device 1-2 according to the third embodiment. A part of the configuration of the positioning device 1-2 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described. The positioning device 1-2 includes a drive device 3-2 and a seismic isolation control device 4-2.
　駆動装置３－２は、複数の位置決め駆動部３０Ａ，３０Ｂと、免振駆動部３１とを有する。位置決め駆動部３０Ａは、第１可動部３０１Ａと、第１モータ３０２Ａとを有する。位置決め駆動部３０Ｂは、第１可動部３０１Ｂと、第１モータ３０２Ｂとを有する。なお、第１可動部３０１Ａ，３０１Ｂは、第１可動部３０１と同様の機能を有し、第１モータ３０２Ａ，３０２Ｂは、第１モータ３０２と同様の機能を有する。 The drive device 3-2 has a plurality of positioning drive units 30A and 30B and a seismic isolation drive unit 31. The positioning drive unit 30A includes a first movable unit 301A and a first motor 302A. The positioning drive unit 30B includes a first movable unit 301B and a first motor 302B. The first movable portions 301A and 301B have the same functions as the first movable portion 301, and the first motors 302A and 302B have the same functions as the first motor 302.
　免振制御装置４－２は、複数の第１制御部４０Ａ，４０Ｂと、第２制御部４１と、振動抑制演算部４２と、振動特性設定部４３と、複数の慣性比補償部４４Ａ，４４Ｂと、複数の慣性特性設定部４５Ａ，４５Ｂとを有する。 The seismic isolation control device 4-2 includes a plurality of first control units 40A and 40B, a second control unit 41, a vibration suppression calculation unit 42, a vibration characteristic setting unit 43, and a plurality of inertial ratio compensation units 44A and 44B. And a plurality of inertial characteristic setting units 45A and 45B.
　第１制御部４０Ａは、第１の追従指令１０Ａに基づいて動作する以外は、第１制御部４０と同様の機能を有する。第１制御部４０Ｂは、第２の追従指令１０Ｂに基づいて動作する以外は、第１制御部４０と同様の機能を有する。第１制御部４０Ａは、第１の追従指令１０Ａに基づいて第１モータ３０２Ａに電流を供給し、第１モータ３０２Ａに機械的に接続された第１可動部３０１Ａの位置または速度を第１の追従指令１０Ａに追従させる。第１制御部４０Ｂは、第２の追従指令１０Ｂに基づいて第１モータ３０２Ｂに電流を供給し、第１モータ３０２Ｂに機械的に接続された第１可動部３０１Ｂの位置または速度を第２の追従指令１０Ｂに追従させる。 The first control unit 40A has the same function as the first control unit 40 except that it operates based on the first follow-up command 10A. The first control unit 40B has the same function as the first control unit 40 except that it operates based on the second follow-up command 10B. The first control unit 40A supplies a current to the first motor 302A based on the first follow-up command 10A, and first determines the position or speed of the first movable unit 301A mechanically connected to the first motor 302A. Follow the follow-up command 10A. The first control unit 40B supplies a current to the first motor 302B based on the second follow-up command 10B, and sets the position or speed of the first movable unit 301B mechanically connected to the first motor 302B to the second. Follow the follow-up command 10B.
　位置決め装置１－２は、２つの位置決め駆動部３０Ａ，３０Ｂがそれぞれ発生させる架台２の振動を、免振駆動部３１を駆動させることによる反力をもって相殺する。このため、第２制御部４１は、第１の追従指令１０Ａおよび第２の追従指令１０Ｂに基づいて、免振駆動部３１を制御することになる。第１の追従指令１０Ａおよび第２の追従指令１０Ｂのそれぞれは、慣性比補償部４４Ａ，４４Ｂで慣性による影響を補償された後、補償後の第１の追従指令１０Ａおよび第２の追従指令１０Ｂの和が振動抑制演算部４２に出力される。振動抑制演算部４２は、補償後の第１の追従指令１０Ａおよび第２の追従指令１０Ｂの和に基づいて、振動抑制指令１１を演算する。 The positioning device 1-2 cancels out the vibration of the gantry 2 generated by the two positioning drive units 30A and 30B by the reaction force generated by driving the seismic isolation drive unit 31. Therefore, the second control unit 41 controls the seismic isolation drive unit 31 based on the first follow-up command 10A and the second follow-up command 10B. Each of the first follow-up command 10A and the second follow-up command 10B is compensated by the inertia ratio compensating units 44A and 44B for the influence of inertia, and then the first follow-up command 10A and the second follow-up command 10B after compensation are compensated. Is output to the vibration suppression calculation unit 42. The vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the sum of the first follow-up command 10A and the second follow-up command 10B after compensation.
　慣性比補償部４４Ａは、第１の追従指令１０Ａに対して、第１可動部３０１Ａおよび第１モータ３０２Ａと第２可動部３１１および第２モータ３１２との慣性比に応じて予め慣性特性設定部４５Ａに設定された慣性比を用いて、慣性比による架台２の振動への影響を補償する。慣性比補償部４４Ｂは、第２の追従指令１０Ｂに対して、第１可動部３０１Ｂおよび第１モータ３０２Ｂと第２可動部３１１および第２モータ３１２との慣性比に応じて予め慣性特性設定部４５Ｂに設定された慣性比を用いて、慣性比による架台２の振動への影響を補償する。具体的な補償方法は、実施の形態１と同様であるため説明を省略する。 The inertia ratio compensating unit 44A sets the inertial characteristics in advance according to the inertia ratio of the first movable unit 301A and the first motor 302A and the second movable unit 311 and the second motor 312 with respect to the first follow-up command 10A. The influence of the inertia ratio on the vibration of the gantry 2 is compensated by using the inertia ratio set to 45A. The inertia ratio compensating unit 44B sets the inertial characteristics in advance according to the inertia ratio of the first movable unit 301B and the first motor 302B and the second movable unit 311 and the second motor 312 with respect to the second follow-up command 10B. The influence of the inertia ratio on the vibration of the gantry 2 is compensated by using the inertia ratio set to 45B. Since the specific compensation method is the same as that of the first embodiment, the description thereof will be omitted.
　一般的に、免振駆動部３１の第２モータ３１２に発生させる最大推力は、第１モータ３０２Ａ，３０２Ｂの発生させる最大推力の和に近い値となる。このため、位置決め装置１－２では、第２モータ３１２は、第１モータ３０２Ａ，３０２Ｂのそれぞれよりも出力の大きいモータであることが望ましい。 Generally, the maximum thrust generated by the second motor 312 of the seismic isolation drive unit 31 is a value close to the sum of the maximum thrusts generated by the first motors 302A and 302B. Therefore, in the positioning device 1-2, it is desirable that the second motor 312 is a motor having a larger output than the first motors 302A and 302B, respectively.
　また、図２０では、２つの位置決め駆動部３０Ａ，３０Ｂを有する位置決め装置１－２について説明したが、位置決め装置１－２は、３つ以上の位置決め駆動部３０を備えてもよい。この場合、振動抑制演算部４２は、位置決め駆動部３０と同数の追従指令１０の和に基づいて、振動抑制指令１１を演算する。 Further, in FIG. 20, the positioning device 1-2 having two positioning drive units 30A and 30B has been described, but the positioning device 1-2 may include three or more positioning drive units 30. In this case, the vibration suppression calculation unit 42 calculates the vibration suppression command 11 based on the sum of the same number of follow-up commands 10 as the positioning drive unit 30.
　実施の形態３にかかる位置決め装置１－２は、複数の位置決め駆動部３０Ａ，３０Ｂにより発生する架台２の振動を１つの免振駆動部３１を用いて効率的に抑制することができる。このため、位置決め駆動部３０Ａ，３０Ｂの数と同数の免振駆動部３１を設けるよりも、位置決め装置１－２全体の大きさを低減することが可能になる。 The positioning device 1-2 according to the third embodiment can efficiently suppress the vibration of the gantry 2 generated by the plurality of positioning drive units 30A and 30B by using one seismic isolation drive unit 31. Therefore, the size of the entire positioning device 1-2 can be reduced as compared with the provision of the same number of seismic isolation drive units 31 as the number of the positioning drive units 30A and 30B.
　なお、免振制御装置４－２は、例えばＣＰＵ９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０Ａ，４０Ｂ、第２制御部４１、振動抑制演算部４２、振動特性設定部４３、慣性比補償部４４Ａ，４４Ｂ、および、慣性特性設定部４５Ａ，４５Ｂの機能を実現することができる。 The seismic isolation control device 4-2 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93. The CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, so that the first control unit 40A and 40B, the second control unit 41, the vibration suppression calculation unit 42, and the vibration characteristic setting unit 43 , The functions of the inertial ratio compensating units 44A and 44B and the inertial characteristic setting units 45A and 45B can be realized.
実施の形態４．
　図２１は、実施の形態４にかかる位置決め装置１－３の構成を示す図である。位置決め装置１－３の構成の一部は、位置決め装置１と共通である。以下、位置決め装置１と共通する部分については、同じ符号を用いることで、詳細な説明を省略し、位置決め装置１と異なる部分について主に説明する。位置決め装置１－３は、駆動装置３と、免振制御装置４－３とを有する。 Embodiment 4.
FIG. 21 is a diagram showing a configuration of the positioning device 1-3 according to the fourth embodiment. A part of the configuration of the positioning device 1-3 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described. The positioning device 1-3 includes a drive device 3 and a seismic isolation control device 4-3.
　免振制御装置４－３は、第１制御部４０－３と、第２制御部４１－３と、第１指令テーブル４６と、第２指令テーブル４７とを有する。第１指令テーブル４６は、予め使用者が入力した追従指令１０を記憶する。第２指令テーブル４７は、予め使用者が入力した振動抑制指令１１を記憶する。 The seismic isolation control device 4-3 has a first control unit 40-3, a second control unit 41-3, a first command table 46, and a second command table 47. The first command table 46 stores the follow-up command 10 input in advance by the user. The second command table 47 stores the vibration suppression command 11 input in advance by the user.
　第１制御部４０－３は、外部から供給される追従指令１０の代わりに、第１指令テーブル４６から供給される追従指令１０に基づいて、位置決め駆動部３０を制御する。第２制御部４１－３は、振動抑制演算部４２が演算した振動抑制指令１１の代わりに、第２指令テーブル４７から供給される振動抑制指令１１に基づいて、免振駆動部３１を制御する。 The first control unit 40-3 controls the positioning drive unit 30 based on the follow-up command 10 supplied from the first command table 46 instead of the follow-up command 10 supplied from the outside. The second control unit 41-3 controls the seismic isolation drive unit 31 based on the vibration suppression command 11 supplied from the second command table 47 instead of the vibration suppression command 11 calculated by the vibration suppression calculation unit 42. ..
　架台２の振動を抑制するために、位置決め駆動部３０と免振駆動部３１とは、同期して駆動されることが望ましい。このため、第１制御部４０－３および第２制御部４１－３は、同期信号１４に基づいて、第１モータ３０２の駆動タイミングと第２モータ３１２の駆動タイミングとを同期させる。 In order to suppress the vibration of the gantry 2, it is desirable that the positioning drive unit 30 and the seismic isolation drive unit 31 are driven in synchronization. Therefore, the first control unit 40-3 and the second control unit 41-3 synchronize the drive timing of the first motor 302 with the drive timing of the second motor 312 based on the synchronization signal 14.
　なお、免振制御装置４－３は、例えばＣＰＵ９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０－３および第２制御部４１－３の機能を実現することができる。メモリ９３には、第１指令テーブル４６および第２指令テーブル４７が記憶されている。 The seismic isolation control device 4-3 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93. The CPU 92 can realize the functions of the first control unit 40-3 and the second control unit 41-3 by reading and executing the computer program stored in the memory 93 corresponding to each process. The first command table 46 and the second command table 47 are stored in the memory 93.
　図２２は、図２１に示す位置決め装置１－３が用いる追従指令１０および振動抑制指令１１を生成するエンジニアリングツール５１の構成例を示す図である。エンジニアリングツール５１は、指令入力部５２と、通信部５３と、振動抑制演算部４２と、振動特性設定部４３とを有する。 FIG. 22 is a diagram showing a configuration example of an engineering tool 51 that generates a follow-up command 10 and a vibration suppression command 11 used by the positioning device 1-3 shown in FIG. 21. The engineering tool 51 includes a command input unit 52, a communication unit 53, a vibration suppression calculation unit 42, and a vibration characteristic setting unit 43.
　指令入力部５２は、使用者から、位置決め駆動部３０の動きを指定する追従指令１０の入力を受け付ける。指令入力部５２は、受け付けた追従指令１０を通信部５３および振動抑制演算部４２のそれぞれに出力する。通信部５３は、位置決め装置１－３と通信路を介して接続されている。通信部５３は、追従指令１０を第１指令テーブル４６に記憶させる。振動抑制演算部４２および振動特性設定部４３のそれぞれは、実施の形態１と同様の機能を有する。振動抑制演算部４２は、追従指令１０に基づいて、振動抑制指令１１を生成し、生成した振動抑制指令１１を通信部５３に出力する。通信部５３は、振動抑制指令１１を第２指令テーブル４７に記憶させる。 The command input unit 52 receives an input of a follow-up command 10 that specifies the movement of the positioning drive unit 30 from the user. The command input unit 52 outputs the received follow-up command 10 to the communication unit 53 and the vibration suppression calculation unit 42, respectively. The communication unit 53 is connected to the positioning device 1-3 via a communication path. The communication unit 53 stores the follow-up command 10 in the first command table 46. Each of the vibration suppression calculation unit 42 and the vibration characteristic setting unit 43 has the same function as that of the first embodiment. The vibration suppression calculation unit 42 generates a vibration suppression command 11 based on the follow-up command 10, and outputs the generated vibration suppression command 11 to the communication unit 53. The communication unit 53 stores the vibration suppression command 11 in the second command table 47.
　なお、図２２に示すエンジニアリングツール５１は、実施の形態１と同様の動作により振動抑制演算部４２が演算した振動抑制指令１１を第２指令テーブル４７に記憶させるが、使用者が振動抑制指令１１を予め算出して、第２指令テーブル４７に記憶させてもよい。また、図２１に示す免振制御装置４－３は、振動抑制演算部４２を省略した構成となっているが、免振制御装置４－３は、振動抑制演算部４２および振動特性設定部４３を有し、第１指令テーブル４６に記憶された追従指令１０に基づいて、振動抑制指令１１を生成してもよい。 The engineering tool 51 shown in FIG. 22 stores the vibration suppression command 11 calculated by the vibration suppression calculation unit 42 in the second command table 47 by the same operation as in the first embodiment, but the user uses the vibration suppression command 11. May be calculated in advance and stored in the second command table 47. Further, the seismic isolation control device 4-3 shown in FIG. 21 has a configuration in which the vibration suppression calculation unit 42 is omitted, but the vibration isolation control device 4-3 has the vibration suppression calculation unit 42 and the vibration characteristic setting unit 43. The vibration suppression command 11 may be generated based on the follow-up command 10 stored in the first command table 46.
　実施の形態４にかかる免振制御装置４－３は、追従指令１０を予め第１指令テーブル４６に記憶しているため、外部装置との間の通信量を低減することができる。また、免振制御装置４－３は、振動抑制指令１１を予め第２指令テーブル４７に記憶しており、実行時には第２指令テーブル４７を参照するため、駆動時に行う演算量を削減することができる。 Since the seismic isolation control device 4-3 according to the fourth embodiment stores the follow-up command 10 in the first command table 46 in advance, the amount of communication with the external device can be reduced. Further, since the vibration isolation control device 4-3 stores the vibration suppression command 11 in the second command table 47 in advance and refers to the second command table 47 at the time of execution, the amount of calculation performed at the time of driving can be reduced. can.
実施の形態５．
　図２３は、実施の形態５にかかる位置決め装置１－４の構成を示す図である。位置決め装置１－４の構成の一部は、位置決め装置１と共通である。以下、位置決め装置１と共通する部分については、同じ符号を用いることで、詳細な説明を省略し、位置決め装置１と異なる部分について主に説明する。位置決め装置１－４は、駆動装置３と、免振制御装置４－４とを有する。 Embodiment 5.
FIG. 23 is a diagram showing the configuration of the positioning device 1-4 according to the fifth embodiment. A part of the configuration of the positioning device 1-4 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described. The positioning device 1-4 includes a drive device 3 and a seismic isolation control device 4-4.
　免振制御装置４－４は、第１制御部４０－４と、第２制御部４１－４と、振動抑制演算部４２－４とを有する。免振制御装置４－４は、アナログの電圧または電流を駆動指令として使用する。第１制御部４０－４は、アナログ信号である追従指令１０－４を受け付け、追従指令１０－４をデジタル変換して駆動指令として用いる。また、第１制御部４０－４は、アナログ信号である追従指令１０－４を振動抑制演算部４２－４に供給する。このとき、第１制御部４０－４は、アナログ信号である追従指令１０－４をそのまま振動抑制演算部４２－４に供給してもよいし、追従指令１０－４にオフセット、指令制限などの補正を加えたものを振動抑制演算部４２－４に供給してもよい。 The seismic isolation control device 4-4 has a first control unit 40-4, a second control unit 41-4, and a vibration suppression calculation unit 42-4. The seismic isolation control device 4-4 uses an analog voltage or current as a drive command. The first control unit 40-4 receives the follow-up command 10-4 which is an analog signal, digitally converts the follow-up command 10-4, and uses it as a drive command. Further, the first control unit 40-4 supplies the follow-up command 10-4, which is an analog signal, to the vibration suppression calculation unit 42-4. At this time, the first control unit 40-4 may supply the follow-up command 10-4, which is an analog signal, to the vibration suppression calculation unit 42-4 as it is, or offset, command limit, etc. to the follow-up command 10-4. The corrected one may be supplied to the vibration suppression calculation unit 42-4.
　振動抑制演算部４２－４は、アナログフィルタを用いてアナログ信号である振動抑制指令１１－４を演算する。振動抑制演算部４２－４が用いるアナログフィルタは、架台２の振動周波数ωに基づいて、入力指令と出力指令との和が、極小となる周波数応答をもつように予め設計されている。振動抑制演算部４２－４は、演算した振動抑制指令１１－４を第２制御部４１－４に出力する。 The vibration suppression calculation unit 42-4 calculates the vibration suppression command 11-4, which is an analog signal, using an analog filter. The analog filter used by the vibration suppression calculation unit 42-4 is designed in advance based on the vibration frequency ω of the gantry 2 so that the sum of the input command and the output command has a minimum frequency response. The vibration suppression calculation unit 42-4 outputs the calculated vibration suppression command 11-4 to the second control unit 41-4.
　第２制御部４１－４は、振動抑制演算部４２－４が出力するアナログ信号である振動抑制指令１１－４をデジタル信号に変換して、駆動指令として用いる。 The second control unit 41-4 converts the vibration suppression command 11-4, which is an analog signal output by the vibration suppression calculation unit 42-4, into a digital signal and uses it as a drive command.
　なお、免振制御装置４－４は、例えばＣＰＵ９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０－４、第２制御部４１－４、および、振動抑制演算部４２－４の機能を実現することができる。 The seismic isolation control device 4-4 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93. The CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, thereby causing the first control unit 40-4, the second control unit 41-4, and the vibration suppression calculation unit 42-4. Functions can be realized.
　以上説明したように、実施の形態５にかかる免振制御装置４－４は、アナログ信号である追従指令１０および振動抑制指令１１を用いて、駆動装置３を制御する。振動抑制演算部４２－４は、アナログフィルタを用いて、振動抑制指令１１－４を演算する。このような構成を有することで、第２制御部４１－４は、演算量の多いフィルタ処理を行う必要がないため、第２制御部４１－４の処理量を削減することができる。 As described above, the seismic isolation control device 4-4 according to the fifth embodiment controls the drive device 3 by using the follow-up command 10 and the vibration suppression command 11 which are analog signals. The vibration suppression calculation unit 42-4 calculates the vibration suppression command 11-4 using an analog filter. By having such a configuration, since the second control unit 41-4 does not need to perform the filter processing with a large amount of calculation, the processing amount of the second control unit 41-4 can be reduced.
実施の形態６．
　図２４は、実施の形態６にかかる位置決め装置１－５の構成を示す図である。位置決め装置１－５の構成の一部は、位置決め装置１と共通である。以下、位置決め装置１と共通する部分については、同じ符号を用いることで、詳細な説明を省略し、位置決め装置１と異なる部分について主に説明する。位置決め装置１－５は、駆動装置３－５と、免振制御装置４－５とを有する。 Embodiment 6.
FIG. 24 is a diagram showing the configuration of the positioning device 1-5 according to the sixth embodiment. A part of the configuration of the positioning device 1-5 is common to the positioning device 1. Hereinafter, the parts common to the positioning device 1 will be described in detail by using the same reference numerals, and the parts different from the positioning device 1 will be mainly described. The positioning device 1-5 includes a drive device 3-5 and a seismic isolation control device 4-5.
　駆動装置３－５は、位置決め駆動部３０－５と、免振駆動部３１－１とを有する。位置決め駆動部３０－５は、第１可動部３０１と、第１モータ３０２と、第１位置検出器３０３－５とを有する。第１位置検出器３０３－５は、検出した第１位置情報１２を第１制御部４０－１および振動抑制演算部４２－５のそれぞれに出力する以外は、実施の形態２で説明した第１位置検出器３０３と同様の機能を有する。免振駆動部３１－１は、第２可動部３１１と、第２モータ３１２と、第２位置検出器３１３とを有する。 The drive device 3-5 has a positioning drive unit 30-5 and a seismic isolation drive unit 31-1. The positioning drive unit 30-5 includes a first movable unit 301, a first motor 302, and a first position detector 303-5. The first position detector 303-5 is the first described in the second embodiment except that the detected first position information 12 is output to each of the first control unit 40-1 and the vibration suppression calculation unit 42-5. It has the same function as the position detector 303. The seismic isolation drive unit 31-1 includes a second movable unit 311, a second motor 312, and a second position detector 313.
　免振制御装置４－５は、第１制御部４０－１と、第２制御部４１－１と、振動抑制演算部４２－５と、振動特性設定部４３とを有する。振動抑制演算部４２－５は、第１位置検出器３０３－５が出力する第１位置情報１２と、振動抑制指令１１との和が架台２の振動周波数ωにおいて極小となる周波数応答を持つように、振動抑制指令１１を演算する。振動抑制演算部４２－５は、演算した振動抑制指令１１を第２制御部４１－１に出力する。 The seismic isolation control device 4-5 has a first control unit 40-1, a second control unit 41-1, a vibration suppression calculation unit 42-5, and a vibration characteristic setting unit 43. The vibration suppression calculation unit 42-5 has a frequency response in which the sum of the first position information 12 output by the first position detector 303-5 and the vibration suppression command 11 is minimized at the vibration frequency ω of the gantry 2. The vibration suppression command 11 is calculated. The vibration suppression calculation unit 42-5 outputs the calculated vibration suppression command 11 to the second control unit 41-1.
　なお、免振制御装置４－５は、例えばＣＰＵ９２およびメモリ９３を用いた制御回路を備えるコンピュータによって構成される。ＣＰＵ９２は、メモリ９３に記憶された、各処理に対応するコンピュータプログラムを読み出して実行することによって、第１制御部４０－１、第２制御部４１－１、振動抑制演算部４２－５、および、振動特性設定部４３の機能を実現することができる。 The seismic isolation control device 4-5 is composed of, for example, a computer including a control circuit using a CPU 92 and a memory 93. The CPU 92 reads out and executes a computer program stored in the memory 93 corresponding to each process, thereby performing the first control unit 40-1, the second control unit 41-1, the vibration suppression calculation unit 42-5, and the vibration suppression calculation unit 42-5. , The function of the vibration characteristic setting unit 43 can be realized.
　以上説明したように、実施の形態６にかかる位置決め装置１－５は、第１可動部３０１の位置を示す第１位置情報１２に基づいて、振動抑制指令１１が演算される。このような構成を有することで、架台２の振動を簡便な方法で効率的に抑制することが可能になる。 As described above, in the positioning device 1-5 according to the sixth embodiment, the vibration suppression command 11 is calculated based on the first position information 12 indicating the position of the first movable portion 301. Having such a configuration makes it possible to efficiently suppress the vibration of the gantry 2 by a simple method.
　以上の実施の形態に示した構成は、一例を示すものであり、別の公知の技術と組み合わせることも可能であるし、実施の形態同士を組み合わせることも可能であるし、要旨を逸脱しない範囲で、構成の一部を省略、変更することも可能である。 The configuration shown in the above embodiments is an example, and can be combined with another known technique, can be combined with each other, and does not deviate from the gist. It is also possible to omit or change a part of the configuration.
　１，１－１，１－２，１－３，１－４，１－５　位置決め装置、２　架台、３，３－１，３－２，３－５　駆動装置、４，４－１，４－２，４－３，４－４，４－５　免振制御装置、１０，１０－４　追従指令、１０Ａ　第１の追従指令、１０Ｂ　第２の追従指令、１１，１１－４　振動抑制指令、１２　第１位置情報、１３　第２位置情報、１４　同期信号、３０，３０Ａ，３０Ｂ，３０－１，３０－５　位置決め駆動部、３１，３１－１　免振駆動部、４０，４０Ａ，４０Ｂ，４０－１，４０－３，４０－４　第１制御部、４１，４１－１，４１－３，４１－４　第２制御部、４２，４２－４，４２－５　振動抑制演算部、４３　振動特性設定部、４４，４４Ａ，４４Ｂ　慣性比補償部、４５，４５Ａ，４５Ｂ　慣性特性設定部、４６　第１指令テーブル、４７　第２指令テーブル、５１　エンジニアリングツール、５２　指令入力部、５３　通信部、９２　ＣＰＵ、９３　メモリ、３０１，３０１Ａ，３０１Ｂ　第１可動部、３０２，３０２Ａ，３０２Ｂ　第１モータ、３０３，３０３－５　第１位置検出器、３１１　第２可動部、３１２　第２モータ、３１３　第２位置検出器。 1,1-1,1-2,1-3, 1-4,1-5 Positioning device, 2 Stand, 3,3-1,3-2,3-5 Drive device, 4,4-1,4 -2, 4-3, 4-4, 4-5 Seismic isolation control device, 10, 10-4 Follow-up command, 10A 1st follow-up command, 10B 2nd follow-up command, 11, 11-4 Vibration suppression command, 12 1st position information, 13 2nd position information, 14 Synchronous signal, 30, 30A, 30B, 30-1, 30-5 Positioning drive unit, 31, 31-1 Vibration isolation drive unit, 40, 40A, 40B, 40 -1,40-3,40-4 1st control unit, 41,41-1,41-3,41-4 2nd control unit, 42,42-4,42-5 vibration suppression calculation unit, 43 vibration characteristics Setting unit, 44, 44A, 44B inertial ratio compensation unit, 45, 45A, 45B inertial characteristic setting unit, 46 first command table, 47 second command table, 51 engineering tool, 52 command input unit, 53 communication unit, 92 CPU , 93 Memory, 301, 301A, 301B 1st movable part, 302, 302A, 302B 1st motor, 303, 303-5 1st position detector, 311 2nd movable part, 312 2nd motor, 313 2nd position detection vessel.

Claims (14)

  1. 　架台に固定された第１モータで第１可動部を駆動し前記架台に固定された第２モータで第２可動部を駆動する駆動装置を制御対象とする免振制御装置であって、
    　時系列の追従指令に前記第１可動部が追従するように前記第１モータの位置または速度を制御する第１制御部と、
    　前記追従指令に含まれる前記架台の振動周波数成分に相当する位置または速度の次元の指令である振動抑制指令の比例倍に前記第２モータの位置または速度を追従させる第２制御部と、
    　を備えることを特徴とする免振制御装置。     A seismic isolation control device for controlling a drive device in which a first motor fixed to a gantry drives a first movable portion and a second motor fixed to the gantry drives a second movable portion.
    A first control unit that controls the position or speed of the first motor so that the first movable unit follows a time-series follow-up command.
    A second control unit that follows the position or speed of the second motor in proportion to the vibration suppression command, which is a command of the dimension of the position or speed corresponding to the vibration frequency component of the gantry included in the follow-up command.
    A seismic isolation control device characterized by being equipped with.
  2. 　前記第１制御部は、前記第１可動部の位置情報を取得し、前記第１可動部の位置情報と前記追従指令とに基づいて前記第１モータを制御するサーボシステムであり、
    　前記第２制御部は、前記第２可動部の位置情報を取得し、前記第２可動部の位置情報と前記振動抑制指令とに基づいて前記第２モータを制御するサーボシステムであることを特徴とする請求項１に記載の免振制御装置。     The first control unit is a servo system that acquires the position information of the first movable part and controls the first motor based on the position information of the first movable part and the follow-up command.
    The second control unit is a servo system that acquires the position information of the second movable part and controls the second motor based on the position information of the second movable part and the vibration suppression command. The vibration isolation control device according to claim 1.
  3. 　前記第１制御部の応答速度と前記第２制御部の応答速度との差が閾値以下であることを特徴とする請求項１または２に記載の免振制御装置。 The vibration isolation control device according to claim 1 or 2, wherein the difference between the response speed of the first control unit and the response speed of the second control unit is equal to or less than a threshold value.
  4. 　前記追従指令および前記振動抑制指令の和は、前記架台の振動周波数に基づいた周波数で極小となる周波数応答を持つことを特徴とする請求項１から３のいずれか１項に記載の免振制御装置。 The vibration isolation control according to any one of claims 1 to 3, wherein the sum of the follow-up command and the vibration suppression command has a frequency response that is minimized at a frequency based on the vibration frequency of the gantry. Device.
  5. 　前記第１可動部の位置情報および前記振動抑制指令の和は、前記架台の振動周波数に基づいた周波数で極小となる周波数応答を持つことを特徴とする請求項１から３のいずれか１項に記載の免振制御装置。 According to any one of claims 1 to 3, the sum of the position information of the first movable portion and the vibration suppression command has a frequency response that is minimized at a frequency based on the vibration frequency of the gantry. The described vibration isolation control device.
  6. 　前記振動抑制指令を演算する振動抑制演算部をさらに備えることを特徴とする請求項１から５のいずれか１項に記載の免振制御装置。 The vibration isolation control device according to any one of claims 1 to 5, further comprising a vibration suppression calculation unit that calculates the vibration suppression command.
  7. 　前記振動抑制演算部は、前記追従指令の２階微分と前記架台の振動周波数のマイナス２乗に基づく係数とを乗算した値に基づいて、前記振動抑制指令を演算することを特徴とする請求項６に記載の免振制御装置。 The claim is characterized in that the vibration suppression calculation unit calculates the vibration suppression command based on a value obtained by multiplying the second-order differential of the follow-up command by a coefficient based on the minus square of the vibration frequency of the gantry. The vibration isolation control device according to 6.
  8. 　前記振動抑制演算部は、無限インパルス応答フィルタを用いて、前記振動抑制指令を演算し、前記無限インパルス応答フィルタの伝達関数は、前記架台の振動周波数のマイナス２乗に基づく定数ｂと、予め定められた定数ａ１，ａ２とを用いて、以下の数式（１）で表される演算を含むことを特徴とする請求項６または７に記載の免振制御装置。
    Figure JPOXMLDOC01-appb-M000001
         The vibration suppression calculation unit calculates the vibration suppression command using the infinite impulse response filter, and the transmission function of the infinite impulse response filter is predetermined to be a constant b based on the minus square of the vibration frequency of the gantry. The vibration isolation control device according to claim 6 or 7, wherein the operation represented by the following mathematical formula (1) is included using the obtained constants a 1 and a 2.
    Figure JPOXMLDOC01-appb-M000001
  9. 　定数ａ２は、定数ｂと等しいことを特徴とする請求項８に記載の免振制御装置。 The vibration isolation control device according to claim 8, wherein the constant a 2 is equal to the constant b.
  10. 　振動抑制演算部は、有限インパルス応答フィルタを用いて、前記振動抑制指令を演算し、前記有限インパルス応答フィルタの伝達関数は、前記架台の振動周波数に基づいて定められた整数である定数Ｎ１を用いて以下の数式（２）で表される第１の離散系伝達関数Ｆ１（ｚ）、または、前記架台の振動周波数に基づいて定められた整数である定数Ｎ２を用いて以下の数式（３）で表される第２の離散系伝達関数Ｆ２（ｚ）を含むことを特徴とする請求項６から９のいずれか１項に記載の免振制御装置。
    Figure JPOXMLDOC01-appb-M000002
    Figure JPOXMLDOC01-appb-M000003
         The vibration suppression calculation unit calculates the vibration suppression command using the finite impulse response filter, and the transfer function of the finite impulse response filter is a constant N 1 which is an integer determined based on the vibration frequency of the gantry. Using the first discrete system transfer function F 1 (z) represented by the following mathematical formula (2) , or the constant N 2 which is an integer determined based on the vibration frequency of the gantry, the following mathematical formula The vibration isolation control device according to any one of claims 6 to 9, further comprising a second discrete system transfer function F2 (z) represented by (3).
    Figure JPOXMLDOC01-appb-M000002
    Figure JPOXMLDOC01-appb-M000003
  11. 　前記第２制御部は、前記第１可動部の並進慣性と前記第１可動部の可動方向に換算した前記第２可動部の並進慣性との比を含む慣性比を前記振動抑制指令に乗じた信号に前記第２可動部が追従するように制御することを特徴とする請求項１から１０のいずれか１項に記載の免振制御装置。 The second control unit multiplied the vibration suppression command by an inertial ratio including the ratio of the translational inertia of the first movable portion to the translational inertia of the second movable portion converted into the movable direction of the first movable portion. The vibration isolation control device according to any one of claims 1 to 10, wherein the second movable portion is controlled to follow the signal.
  12. 　前記第１制御部に前記追従指令を供給する第１指令テーブルと、
    　前記第２制御部に前記振動抑制指令を供給する第２指令テーブルと、
    　をさらに備え、
    　前記第１制御部および前記第２制御部は、同期信号に基づいて、前記第１モータの駆動タイミングと前記第２モータの駆動タイミングとを同期させることを特徴とする請求項１から５のいずれか１項に記載の免振制御装置。     A first command table that supplies the follow-up command to the first control unit,
    A second command table that supplies the vibration suppression command to the second control unit,
    With more
    Any of claims 1 to 5, wherein the first control unit and the second control unit synchronize the drive timing of the first motor with the drive timing of the second motor based on a synchronization signal. The seismic isolation control device according to item 1.
  13. 　前記追従指令および前記振動抑制指令は、アナログ信号であり、
    　前記振動抑制演算部は、アナログフィルタを用いて、前記振動抑制指令を演算することを特徴とする請求項６に記載の免振制御装置。     The follow-up command and the vibration suppression command are analog signals, and are
    The vibration isolation control device according to claim 6, wherein the vibration suppression calculation unit calculates the vibration suppression command by using an analog filter.
  14. 　架台に固定された第１モータで第１可動部を駆動し前記架台に固定された第２モータで第２可動部を駆動する駆動装置を制御対象とする免振制御方法であって、
    　免振制御装置が、時系列の追従指令に前記第１可動部が追従するように前記第１モータの位置または速度を制御するステップと、
    　前記免振制御装置が、前記追従指令に含まれる前記架台の振動周波数成分に相当する位置または速度の次元の指令である振動抑制指令の比例倍に前記第２モータの位置または速度を追従させるステップと、
    　を含むことを特徴とする免振制御方法。     This is a seismic isolation control method for controlling a drive device in which a first motor fixed to a gantry drives a first movable portion and a second motor fixed to the gantry drives a second movable portion.
    A step in which the seismic isolation control device controls the position or speed of the first motor so that the first movable portion follows a time-series follow-up command.
    The step in which the vibration isolation control device follows the position or speed of the second motor in proportion to the vibration suppression command, which is a command of the dimension of the position or speed corresponding to the vibration frequency component of the gantry included in the tracking command. When,
    A seismic isolation control method characterized by including.
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