JP2003060339A - Method for mounting electronic component - Google Patents

Method for mounting electronic component

Info

Publication number
JP2003060339A
JP2003060339A JP2001243932A JP2001243932A JP2003060339A JP 2003060339 A JP2003060339 A JP 2003060339A JP 2001243932 A JP2001243932 A JP 2001243932A JP 2001243932 A JP2001243932 A JP 2001243932A JP 2003060339 A JP2003060339 A JP 2003060339A
Authority
JP
Japan
Prior art keywords
electronic component
circuit board
electrodes
bonding material
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001243932A
Other languages
Japanese (ja)
Inventor
Shunji Onobori
俊司 尾登
Satoshi Shida
智 仕田
Shozo Minamitani
昌三 南谷
Akira Yamada
山田  晃
Takaharu Mae
貴晴 前
Mikiya Nakada
幹也 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001243932A priority Critical patent/JP2003060339A/en
Publication of JP2003060339A publication Critical patent/JP2003060339A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/755Cooling means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75744Suction holding means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head

Landscapes

  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide the optimum mounting method of electronic components, while taking into consideration mounting environment requested of the respective electronic parts is considered in a case, when multiple types of electronic parts are mounted on a circuit board. SOLUTION: In the mounting method of the electronic components, two types of electronic components, the first electronic component and the second electronic component are mounted on the circuit board. The first electronic component is mounted on the circuit board by a collective reflow mounting method or a local reflow mounting method, and the second electronic component is mounted on the circuit board, by ultrasonic wave mounting method.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品を回路基
板に実装する方法に関するものであり、特に複数の種類
の電子部品を異なった実装方法により回路基板へ実装す
る方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for mounting electronic components on a circuit board, and more particularly to a method for mounting a plurality of types of electronic components on a circuit board by different mounting methods.

【0002】[0002]

【従来の技術】従来、電子部品の実装方法は種々の方法
が知られている。従来の電子部品の実装方法の例として
は、複数の電子部品を回路基板上に仮接合した後、一括
して半田をリフローして電子部品を実装する方法(以
降、一括リフロー実装方法と述べる)や、電子部品を回
路基板上に当接させながら加熱することにより、個別に
半田をリフローして電子部品を実装する方法(以降、ロ
ーカルリフロー実装方法と述べる)がある。
2. Description of the Related Art Conventionally, various methods for mounting electronic parts have been known. As an example of a conventional electronic component mounting method, after temporarily bonding a plurality of electronic components on a circuit board and then collectively reflowing solder to mount the electronic components (hereinafter, referred to as a collective reflow mounting method) Alternatively, there is a method (hereinafter referred to as a local reflow mounting method) in which the electronic components are mounted by individually reflowing the solder by heating the electronic components while abutting them on the circuit board.

【0003】まず、一括リフロー実装方法とは、電子部
品をヘッドツールで吸着保持した後、ヘッドツールを下
降させ、電子部品の複数の電極に形成された半田バンプ
を回路基板の複数の電極に加圧して仮接合を行い、複数
の電子部品が回路基板に実装される場合には、これらの
作業を繰り返して行い、各電子部品を回路基板に仮接合
した後、一括して仮接合された各電子部品の各半田バン
プを加熱して溶融させ、冷却して固化させることにより
本接合を行い、電子部品を回路基板に装着する電子部品
の実装方法である。
First of all, the collective reflow mounting method is a method in which an electronic component is sucked and held by a head tool and then the head tool is lowered to apply solder bumps formed on a plurality of electrodes of the electronic component to a plurality of electrodes of a circuit board. When a plurality of electronic components are mounted on the circuit board by pressing, electronic components are mounted repeatedly on the circuit board. This is a mounting method of an electronic component in which each solder bump of the electronic component is heated and melted, cooled and solidified to perform main bonding, and the electronic component is mounted on a circuit board.

【0004】なお、ここで仮接合とは、電子部品又は回
路基板に外力を加えることにより、電子部品及び回路基
板を破壊することなく、電子部品と回路基板の接合を解
除することが可能な接合を示し、本接合とは、上記仮接
合の状態にある電子部品と回路基板に熱を加え、半田を
溶融させて固化させることにより行う接合であり、かつ
電子部品又は回路基板に外力を加えることにより、その
接合状態を容易に解除することが困難な接合を示す。
The term "temporary joining" as used herein refers to joining in which the joining of the electronic component and the circuit board can be released without destroying the electronic component and the circuit board by applying an external force to the electronic component or the circuit board. The main joining is a joining performed by applying heat to the electronic component and the circuit board in the temporary joining state to melt and solidify the solder, and to apply an external force to the electronic component or the circuit board. Therefore, it is difficult to easily release the joined state.

【0005】このような一括リフロー実装方法において
は、多数の電子部品を仮接合した後、一括して半田を溶
融して各電子部品を回路基板に本接合して実装すること
ができ、電子部品の実装作業を効率的に行うことができ
るため、多数の電子部品を回路基板に実装するような場
合に、各電子部品の回路基板への実装コストを抑える電
子部品の実装方法を提供することができた。
In such a batch reflow mounting method, after a large number of electronic components are temporarily joined, the solder can be melted in a lump and the respective electronic components can be main joined and mounted on the circuit board. It is possible to provide an electronic component mounting method that suppresses the mounting cost of each electronic component on a circuit board when a large number of electronic components are mounted on the circuit board because the mounting work of can be efficiently performed. did it.

【0006】次に、ローカルリフロー実装方法とは、電
子部品をヘッドツールで吸着保持した後、ヘッドツール
を下降させ、電子部品の複数の電極形成された半田バン
プを回路基板の複数の電極に当接させながら、半田バン
プを加熱により溶融させ、冷却して固化させることによ
り、個別に電子部品を回路基板に装着する電子部品の実
装方法である。
Next, the local reflow mounting method is a method in which an electronic component is sucked and held by a head tool, and then the head tool is lowered to apply solder bumps having a plurality of electrodes of the electronic component to a plurality of electrodes of a circuit board. This is a mounting method of electronic components in which the solder bumps are melted by heating while being in contact with each other, and are cooled and solidified to individually mount the electronic components on the circuit board.

【0007】このようなローカルリフロー実装方法にお
いては、電子部品をヘッドツールにより吸着保持し、ヘ
ッドツールにより電子部品の各半田バンプを回路基板の
各電極に当接させながら加熱した後、半田の溶融状態の
間にヘッドツールによる電子部品への吸着保持を解除す
るため、溶融半田の表面張力によるセルフアライメント
効果が得られ、ヘッドツールによる電子部品の接合位置
精度がある程度悪くても、セルフアライメント効果によ
り、結果的に接合不良とならない接合位置精度を得るこ
とができる電子部品の実装方法を提供することができ
た。
In such a local reflow mounting method, an electronic component is attracted and held by a head tool, and each solder bump of the electronic component is heated by abutting the electrode on the circuit board by the head tool, and then the solder is melted. Since the suction and holding of the electronic components by the head tool is released during the state, the self-alignment effect due to the surface tension of the molten solder can be obtained. As a result, it is possible to provide a mounting method of an electronic component that can obtain a bonding position accuracy that does not result in defective bonding.

【0008】[0008]

【発明が解決しようとする課題】近年、技術開発により
多種の電子部品が開発されており、各電子部品は様々な
特性を持つようになることにより、これら各電子部品の
実装環境が制限されるようになってきている。例えば、
SAWフィルターのような電子部品は、熱の影響を受け
ることにより不良となりやすく、さらに、電子部品の高
性能化に伴い、より熱の影響の少ない環境においての実
装が望まれてきている。
In recent years, various kinds of electronic parts have been developed by technological development, and each electronic part has various characteristics, so that the mounting environment of each of these electronic parts is limited. Is starting to appear. For example,
An electronic component such as a SAW filter is likely to be defective due to the influence of heat, and further, as the performance of the electronic component is improved, mounting in an environment less affected by heat has been desired.

【0009】しかしながら、複数の電子部品の中にこの
ような熱の影響を受けることにより不良となるような電
子部品が含まれる場合には、その他の電子部品とともに
回路基板へ、上記のような一括リフロー実装方法やロー
カルリフロー実装方法により実装されると、半田リフロ
ーの際の熱の影響により、電子回路が不良となってしま
うため、1枚の回路基板に他の電子部品とともに実装す
ることができないという問題点があった。
However, when a plurality of electronic components include an electronic component that becomes defective due to the influence of such heat, the electronic components that are defective as described above are collectively packaged on the circuit board together with other electronic components. When mounted by the reflow mounting method or the local reflow mounting method, the electronic circuit becomes defective due to the influence of heat during solder reflow, and therefore cannot be mounted on one circuit board together with other electronic components. There was a problem.

【0010】一方、実装される電子部品に熱の影響を与
えないような電子部品の実装方法として、超音波実装方
法がある。これは、接合母材の表面、つまり電子部品の
各電極、回路基板の各電極、又は接合材等の各表面に超
音波振動を付与することによって、電子部品の各電極と
回路基板の各電極、又は上記各電極と接合材との接触面
に摩擦を起こさせ、その摩擦熱で接合する電子部品の実
装方法である。この実装方法は、ベアチップを基体に接
合し、接合されたベアチップを封止してCSP等のパッ
ケージ型電子部品を製造する際において、ベアチップを
基体に接合するような場合に用いられている。
On the other hand, there is an ultrasonic mounting method as a mounting method for electronic components that does not affect the mounted electronic components by heat. This is because each electrode of the electronic component and each electrode of the circuit board is subjected to ultrasonic vibration on the surface of the bonding base material, that is, each electrode of the electronic component, each electrode of the circuit board, or each surface of the bonding material. Alternatively, it is a method of mounting an electronic component in which friction is caused on a contact surface between each of the electrodes and the bonding material and the friction heat is used for bonding. This mounting method is used when a bare chip is joined to a base body and the joined bare chip is sealed to manufacture a packaged electronic component such as a CSP.

【0011】しかしながら、SAWフィルターのような
電子部品は、超音波実装方法により基体に接合された
後、その基体を回路基板上に一括リフロー実装方法やロ
ーカルリフロー実装方法により実装されていたため、回
路基板上に基体を介して実装されていることにより、形
成される電子回路の小型化及び軽量化に限界があり、こ
のような電子回路を内蔵する電子機器の小型化及び軽量
化に限界があるという問題点もあった。
However, an electronic component such as a SAW filter is bonded to a base body by an ultrasonic mounting method, and then the base body is mounted on the circuit board by a collective reflow mounting method or a local reflow mounting method. It is said that the electronic circuit to be formed has a limit in size reduction and weight reduction because it is mounted via the base body, and there is a limit in size reduction and weight reduction of an electronic device incorporating such an electronic circuit. There were also problems.

【0012】従って、本発明の目的は、上記問題を解決
することにあって、複数の種類の電子部品が回路基板に
実装される場合において、超音波実装方法及び一括リフ
ロー実装方法若しくはローカルリフロー実装方法を組み
合わせて行うことにより、各電子部品に要求される実装
環境を考慮しながら、最適な電子部品の実装方法を提供
することにある。
[0012] Therefore, an object of the present invention is to solve the above problems, and in the case where a plurality of types of electronic components are mounted on a circuit board, an ultrasonic mounting method, a collective reflow mounting method, or a local reflow mounting method. By performing the methods in combination, it is possible to provide an optimal electronic component mounting method while considering the mounting environment required for each electronic component.

【0013】[0013]

【課題を解決するための手段】上記目的を達成するため
に、本発明は以下のように構成する。
In order to achieve the above object, the present invention is configured as follows.

【0014】本発明の第1態様によれば、第1電子部品
の電極を回路基板の電極上に接合材を介在させて当接さ
せ、上記接合材を加熱溶融して上記第1電子部品の上記
電極を上記回路基板の上記電極上に上記接合材を介在さ
せて装着し、その後、上記第1電子部品が装着された上
記回路基板の電極に、第2電子部品の電極を接合材を介
在させて当接させ、上記接合材に超音波振動を付与して
上記第2電子部品の上記電極を上記回路基板の上記電極
上に上記接合材を介在させて装着することを特徴とする
電子部品の実装方法を提供する。
According to the first aspect of the present invention, the electrode of the first electronic component is brought into contact with the electrode of the circuit board with the bonding material interposed therebetween, and the bonding material is heated and melted to form the first electronic component. The electrode is mounted on the electrode of the circuit board with the bonding material interposed, and then the electrode of the second electronic component is bonded with the bonding material on the electrode of the circuit board on which the first electronic component is mounted. And contacting them, and applying ultrasonic vibration to the bonding material to mount the electrodes of the second electronic component on the electrodes of the circuit board with the bonding material interposed therebetween. Provide an implementation method of.

【0015】本発明の第2態様によれば、第1電子部品
と第2電子部品の2つの種類の電子部品を回路基板へ実
装する電子部品の実装方法において、上記第1電子部品
は接合材を加熱溶融させることにより上記回路基板上に
実装される電子部品であり、上記第2電子部品は接合材
に超音波振動を付与することにより上記回路基板上に実
装される電子部品であって、上記第1電子部品を部品保
持部材で吸着保持し、上記第1電子部品の複数の電極と
上記回路基板の複数の電極とを上記接合材を介在させて
当接可能なように位置合わせし、上記第1電子部品を吸
着保持したまま上記部品保持部材を下降させ、上記第1
電子部品の上記各電極と上記回路基板の上記各電極を上
記接合材を介在させて当接させながら、上記接合材を加
熱により溶融させて、固化させることにより、上記第1
電子部品の上記各電極と上記回路基板の上記各電極を上
記接合材を介在させて装着し、その後、上記第2電子部
品を部品保持部材で吸着保持し、上記第2電子部品の複
数の電極と上記回路基板の複数の電極とを上記接合材を
介在させて当接可能なように位置合わせし、上記第2電
子部品を吸着保持したまま上記部品保持部材を下降さ
せ、上記第2電子部品の上記各電極と上記回路基板の上
記各電極を上記接合材を介在させて当接させた後、上記
接合材に超音波振動を付与することにより、上記第2電
子部品の上記各電極と上記回路基板の上記各電極を上記
接合材を介在させて装着することを特徴とする電子部品
の実装方法を提供する。
According to a second aspect of the present invention, in the electronic component mounting method for mounting two types of electronic components, a first electronic component and a second electronic component, on a circuit board, the first electronic component is a bonding material. Is an electronic component mounted on the circuit board by heating and melting the second electronic component is an electronic component mounted on the circuit board by applying ultrasonic vibration to the bonding material, The first electronic component is sucked and held by a component holding member, and the plurality of electrodes of the first electronic component and the plurality of electrodes of the circuit board are aligned so that they can be brought into contact with each other with the bonding material interposed therebetween, The component holding member is moved down while the first electronic component is suction-held,
While the electrodes of the electronic component and the electrodes of the circuit board are brought into contact with each other with the bonding material interposed therebetween, the bonding material is melted by heating and solidified, whereby the first
The electrodes of the electronic component and the electrodes of the circuit board are mounted with the bonding material interposed, and then the second electronic component is sucked and held by a component holding member, and the plurality of electrodes of the second electronic component are attached. And a plurality of electrodes of the circuit board are aligned so as to be able to come in contact with each other with the bonding material interposed, and the component holding member is lowered while sucking and holding the second electronic component, and the second electronic component After contacting each of the electrodes with each of the electrodes of the circuit board with the bonding material interposed therebetween, ultrasonic vibration is applied to the bonding material, whereby each electrode of the second electronic component and Provided is a method for mounting an electronic component, which comprises mounting the electrodes on a circuit board with the bonding material interposed.

【0016】本発明の第3態様によれば、第2電子部品
の電極を回路基板の電極上に接合材を介在させて当接さ
せ、上記接合材に超音波振動を付与して上記第2電子部
品の上記電極を上記回路基板の上記電極上に上記接合材
を介在させて装着し、その後、上記第2電子部品が装着
された上記回路基板の電極に、第1電子部品の電極を接
合材を介在させて当接させ、上記接合材を加熱溶融して
上記第1電子部品の上記電極を上記回路基板の上記電極
上に上記接合材を介在させて装着することを特徴とする
電子部品の実装方法を提供する。
According to the third aspect of the present invention, the electrode of the second electronic component is brought into contact with the electrode of the circuit board with the bonding material interposed therebetween, and ultrasonic vibration is applied to the bonding material to apply the second vibration. The electrode of the electronic component is mounted on the electrode of the circuit board with the bonding material interposed, and then the electrode of the first electronic component is bonded to the electrode of the circuit board on which the second electronic component is mounted. An electronic component, characterized in that the material is brought into contact with each other, the bonding material is heated and melted, and the electrode of the first electronic component is mounted on the electrode of the circuit board with the bonding material interposed. Provide an implementation method of.

【0017】本発明の第4態様によれば、第1電子部品
と第2電子部品の2つの種類の電子部品を回路基板へ実
装する電子部品の実装方法において、上記第1電子部品
は接合材を加熱溶融させることにより上記回路基板上に
実装される電子部品であり、上記第2電子部品は接合材
に超音波振動を付与することにより上記回路基板上に実
装される電子部品であって、上記第2電子部品を部品保
持部材で吸着保持し、上記第2電子部品の複数の電極と
上記回路基板の複数の電極とを上記接合材を介在させて
当接可能なように位置合わせし、上記第2電子部品を吸
着保持したまま上記部品保持部材を下降させ、上記第2
電子部品の上記各電極と上記回路基板の上記各電極を上
記接合材を介在させて当接させた後、上記接合材に超音
波振動を付与することにより、上記第2電子部品の上記
各電極と上記回路基板の上記各電極を上記接合材を介在
させて装着し、その後、上記第1電子部品を部品保持部
材で吸着保持し、上記第1電子部品の複数の電極と上記
回路基板の複数の電極とを上記接合材を介在させて当接
可能なように位置合わせし、上記第1電子部品を吸着保
持したまま上記部品保持部材を下降させ、上記第1電子
部品の上記各電極と上記回路基板の上記各電極を上記接
合材を介在させて当接させながら、上記接合材を加熱に
より溶融させて、固化させることにより、上記第1電子
部品の上記各電極と上記回路基板の上記各電極を上記接
合材を介在させて装着することを特徴とする電子部品の
実装方法を提供する。
According to a fourth aspect of the present invention, in the electronic component mounting method for mounting two types of electronic components, a first electronic component and a second electronic component, on a circuit board, the first electronic component is a bonding material. Is an electronic component mounted on the circuit board by heating and melting the second electronic component is an electronic component mounted on the circuit board by applying ultrasonic vibration to the bonding material, The second electronic component is sucked and held by a component holding member, and the plurality of electrodes of the second electronic component and the plurality of electrodes of the circuit board are aligned so that they can be brought into contact with each other with the bonding material interposed therebetween. The component holding member is lowered while the second electronic component is sucked and held,
After each electrode of the electronic component and each electrode of the circuit board are brought into contact with each other with the bonding material interposed therebetween, ultrasonic vibration is applied to the bonding material to thereby each electrode of the second electronic component. And the electrodes of the circuit board are mounted with the bonding material interposed, and then the first electronic component is suction-held by a component holding member, and the plurality of electrodes of the first electronic component and the plurality of circuit boards are attached. And the electrodes of the first electronic component are brought into contact with each other via the bonding material, and the component holding member is lowered while the first electronic component is suction-held, and the electrodes of the first electronic component and the While the electrodes of the circuit board are brought into contact with each other with the bonding material interposed therebetween, the bonding material is melted and solidified by heating, so that the electrodes of the first electronic component and the respective electrodes of the circuit board. The electrode with the bonding material Provides a method of mounting an electronic component, characterized by wear.

【0018】本発明の第5態様によれば、第1電子部品
と第2電子部品の2つの種類の電子部品を回路基板へ実
装する電子部品の実装方法において、上記第1電子部品
は接合材を加熱溶融させることにより上記回路基板上に
実装される電子部品であり、上記第2電子部品は接合材
に超音波振動を付与することにより上記回路基板上に実
装される電子部品であって、上記第1電子部品を部品保
持部材で吸着保持し、上記第1電子部品の複数の電極と
上記回路基板の複数の電極とを上記接合材を介在させて
接合可能なように位置合わせし、上記第1電子部品を吸
着保持したまま上記部品保持部材を下降させ、上記第1
電子部品の上記各電極と上記回路基板の上記各電極を上
記接合材を介在させて加圧して仮接合を行った後、上記
仮接合された上記第1電子部品の上記各電極と上記回路
基板の上記各電極との間の上記各接合材を加熱して溶融
し、冷却して固化させることにより本接合を行い、上記
第1電子部品の上記各電極と上記回路基板の上記各電極
を上記接合材を介在させて装着し、その後、上記第2電
子部品を部品保持部材で吸着保持し、上記第2電子部品
の複数の電極と上記回路基板の複数の電極とを上記接合
材を介在させて当接可能なように位置合わせし、上記第
2電子部品を吸着保持したまま上記部品保持部材を下降
させ、上記第2電子部品の上記各電極と上記回路基板の
上記各電極を上記接合材を介在させて当接させた後、上
記接合材に超音波振動を付与することにより、上記第2
電子部品の上記各電極と上記回路基板の上記各電極に上
記接合材を介在させて装着することを特徴とする電子部
品の実装方法を提供する。
According to a fifth aspect of the present invention, in a method of mounting an electronic component, wherein two types of electronic components, a first electronic component and a second electronic component, are mounted on a circuit board, the first electronic component is a bonding material. Is an electronic component mounted on the circuit board by heating and melting the second electronic component is an electronic component mounted on the circuit board by applying ultrasonic vibration to the bonding material, The first electronic component is sucked and held by a component holding member, and the plurality of electrodes of the first electronic component and the plurality of electrodes of the circuit board are aligned so that they can be joined with the joining material interposed therebetween, While holding the first electronic component by suction, the component holding member is moved down to
The electrodes of the electronic component and the electrodes of the circuit board are pressed together by interposing the bonding material to perform temporary bonding, and then the electrodes of the first electronic component that are temporarily bonded and the circuit board. Of each of the above-mentioned bonding materials between each of the electrodes is heated and melted, cooled and solidified to perform main bonding, and each of the electrodes of the first electronic component and each of the electrodes of the circuit board are connected to each other. The second electronic component is attached by suction with a component holding member, and the plurality of electrodes of the second electronic component and the plurality of electrodes of the circuit board are interposed with the joining material interposed. Position so that they can come into contact with each other, and the component holding member is lowered with the second electronic component adsorbed and held, and the electrodes of the second electronic component and the electrodes of the circuit board are joined with the bonding material. After abutting with the interposition of By applying a dynamic, the second
Provided is a method for mounting an electronic component, which comprises mounting the electrodes of the electronic component and the electrodes of the circuit board with the bonding material interposed therebetween.

【0019】本発明の第6態様によれば、介在させるこ
とにより上記第1電子部品の上記各電極を上記回路基板
の上記各電極に装着する上記接合材は、上記第1電子部
品の上記各電極上、又は上記回路基板の上記各電極上の
少なくともいずれか一方に予め供給されており、介在さ
せることにより上記第2電子部品の上記各電極を上記回
路基板の上記各電極に装着する上記接合材は、上記第2
電子部品の上記各電極上、又は上記回路基板の上記各電
極上の少なくともいずれか一方に予め供給されている第
1態様から第5態様のいずれか1つに記載の電子部品の
実装方法を提供する。
According to a sixth aspect of the present invention, the bonding material for mounting the electrodes of the first electronic component to the electrodes of the circuit board by interposing the bonding material is the same as that of the first electronic component. The bonding is pre-supplied on at least one of the electrodes or the electrodes of the circuit board, and the electrodes of the second electronic component are mounted on the electrodes of the circuit board by interposing the bonding. The material is the second
A method for mounting an electronic component according to any one of the first to fifth aspects, which is previously supplied to at least one of the electrodes of the electronic component or the electrodes of the circuit board. To do.

【0020】本発明の第7態様によれば、上記接合材が
半田である第1態様から第6態様のいずれか1つに記載
の電子部品の実装方法を提供する。
According to a seventh aspect of the present invention, there is provided a method for mounting an electronic component according to any one of the first to sixth aspects, wherein the joining material is solder.

【0021】本発明の第8態様によれば、上記第1電子
部品の上記各電極上、又は上記回路基板の上記各電極
上、又は上記接合材に予めフラックスが供給されている
第1態様から第7態様のいずれか1つに記載の電子部品
の実装方法を提供する。
According to an eighth aspect of the present invention, the flux is previously supplied to the electrodes of the first electronic component, the electrodes of the circuit board, or the bonding material. A method for mounting an electronic component according to any one of the seventh aspects is provided.

【0022】本発明の第9態様によれば、介在させるこ
とにより上記第1電子部品の上記各電極を上記回路基板
の上記各電極に装着する上記接合材が、上記第1電子部
品の上記各電極に形成された半田バンプ、又は、上記第
1電子部品の上記各電極に形成された半田バンプ及び上
記回路基板の上記各電極に形成された半田部であり、介
在させることにより上記第2電子部品の上記各電極を上
記回路基板の上記各電極に装着する上記接合材が、上記
第2電子部品の上記各電極に形成されたAuバンプであ
る第1態様から第6態様のいずれか1つ又は第8態様に
記載の電子部品の実装方法を提供する。
According to the ninth aspect of the present invention, the joining material for mounting the electrodes of the first electronic component to the electrodes of the circuit board by interposing the bonding material is the adhesive material of the first electronic component. The solder bumps formed on the electrodes, or the solder bumps formed on the electrodes of the first electronic component and the electrodes of the circuit board, and the solder bumps formed on the electrodes of the circuit board. Any one of the first to sixth aspects, wherein the bonding material for mounting the electrodes of the component to the electrodes of the circuit board is an Au bump formed on the electrodes of the second electronic component. Alternatively, a method of mounting the electronic component according to the eighth aspect is provided.

【0023】本発明の第10態様によれば、上記第2電
子部品はICチップ部品であり、上記第1電子部品は上
記ICチップ部品以外の電子部品である第1態様から第
9態様のいずれか1つに記載の電子部品の実装方法を提
供する。
According to a tenth aspect of the present invention, the second electronic component is an IC chip component, and the first electronic component is an electronic component other than the IC chip component. A method for mounting an electronic component according to any one of the above is provided.

【0024】[0024]

【発明の実施の形態】以下に、本発明にかかる実施の形
態を図面に基づいて詳細に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings.

【0025】本発明の第1の実施形態にかかる電子部品
の実装方法について、図面を用いて詳細に説明する。
A method of mounting electronic components according to the first embodiment of the present invention will be described in detail with reference to the drawings.

【0026】図1に示すように、電子部品実装装置10
1において、ローカルリフロー実装方法により電子部品
の実装を行う部品保持部材の一例であるヘッドツール3
と、超音波実装方法により電子部品の実装を行う部品保
持部材の一例である超音波ツール33は、X方向移動機
構22のナット部に固定されており、X方向移動機構2
2はモータによりボールねじ軸を回転させることによ
り、ボールねじ軸に螺合したナット部にそれぞれ固定さ
れたヘッドツール3及び超音波ツール33を図示X方向
右向きのX1方向又は左向きのX2方向に移動させる。
また、電子部品実装装置101は、ヘッドツール3を下
降又は上昇させる昇降機構の一例である昇降部21と、
超音波ツール33を下降又は上昇させる昇降機構の一例
である昇降部51を備えて構成されている。さらに、ヘ
ッドツール3はその先端部に電子部品を吸着保持させる
吸着保持機構の一例である吸着ノズル11と、この吸着
ノズル11を加熱させて吸着ノズル11に吸着保持され
た電子部品を加熱する加熱機構の一例であるセラミック
ヒータ12、及び、セラミックヒータ12により加熱さ
れた電子部品を冷却する冷却機構の一例である冷却ブロ
ーノズル19を備えている。また、超音波ツール22は
その先端部に電子部品を吸着保持させる吸着保持機構の
一例である吸着ノズル41、及びこの吸着ノズル41に
吸着保持された電子部品に超音波振動を付与する超音波
振動部42を備えている。ここで、上記加熱機構は、一
例として、ヘッドツール3に備えられたセラミックヒー
タ12である場合としたが、セラミックヒータ12に代
えて、回路基板を配置する架台部が備える加熱部、又
は、電子部品及び回路基板に熱風を吹き付けることによ
り加熱を行うような加熱部を電子部品実装装置が備える
場合であってもよい。
As shown in FIG. 1, the electronic component mounting apparatus 10
1, a head tool 3 which is an example of a component holding member for mounting electronic components by a local reflow mounting method.
The ultrasonic tool 33, which is an example of a component holding member that mounts electronic components by the ultrasonic mounting method, is fixed to the nut portion of the X-direction moving mechanism 22.
A head tool 3 and an ultrasonic tool 33, which are respectively fixed to nuts screwed onto the ball screw shaft, are moved to the X1 direction to the right in the X direction or the X2 direction to the left by rotating the ball screw shaft by a motor. Let
Further, the electronic component mounting apparatus 101 includes an elevating unit 21 that is an example of an elevating mechanism that lowers or raises the head tool 3,
The ultrasonic tool 33 is configured to include an elevating unit 51 which is an example of an elevating mechanism for lowering or raising the ultrasonic tool 33. Further, the head tool 3 has a suction nozzle 11 that is an example of a suction holding mechanism that sucks and holds an electronic component at its tip, and a heating that heats the suction nozzle 11 to heat the electronic component suction-held by the suction nozzle 11. A ceramic heater 12 that is an example of a mechanism and a cooling blow nozzle 19 that is an example of a cooling mechanism that cools an electronic component heated by the ceramic heater 12 are provided. Further, the ultrasonic tool 22 has a suction nozzle 41 which is an example of a suction holding mechanism for sucking and holding an electronic component at its tip, and an ultrasonic vibration for applying ultrasonic vibration to the electronic component sucked and held by the suction nozzle 41. A section 42 is provided. Here, as an example, the heating mechanism is the ceramic heater 12 provided in the head tool 3. However, instead of the ceramic heater 12, a heating unit provided in a pedestal section on which a circuit board is arranged, or an electronic unit The electronic component mounting apparatus may include a heating unit that heats the components and the circuit board by blowing hot air.

【0027】図1において、スライドベース6はY方向
移動機構23のナット部に固定されており、Y方向移動
機構23はモータによりボールねじ軸を回転させること
により、ボールねじ軸に螺合したナット部に固定された
スライドベース6を図示Y方向右向きのY1方向又は左
向きのY2方向に移動させる。また、スライドベース3
6はY方向移動機構53のナット部に固定されており、
Y方向移動機構53はモータによりボールねじ軸を回転
させることにより、ボールねじ軸に螺合したナット部に
固定されたスライドベース36を図示Y1方向又はY2
方向に移動させる。なお、図1におけるX方向とY方向
は直交している。
In FIG. 1, the slide base 6 is fixed to a nut portion of a Y-direction moving mechanism 23, and the Y-direction moving mechanism 23 rotates a ball screw shaft by a motor, so that the nut screwed on the ball screw shaft. The slide base 6 fixed to the section is moved in the Y direction shown in the Y direction to the right or the Y2 direction to the left. Also, slide base 3
6 is fixed to the nut portion of the Y-direction moving mechanism 53,
The Y-direction moving mechanism 53 rotates the ball screw shaft by a motor to move the slide base 36 fixed to the nut portion screwed to the ball screw shaft in the Y1 direction or Y2 direction in the drawing.
Move in the direction. The X direction and the Y direction in FIG. 1 are orthogonal to each other.

【0028】また、接合材を加熱溶融されることにより
電子部品の電極と回路基板の電極を接合材を介在させて
実装される第1電子部品の一例であるチップ部品等の複
数の汎用電子部品1がスライドベース6上に固定された
パーツトレー5に収納されて供給可能に配置されてお
り、回路基板4はスライドベース6上に固定された架台
部の一例であるステージ7に位置決めされて固定されて
いる。また、接合材に超音波振動を付与することにより
電子部品の電極と回路基板の電極を接合材を介在させて
実装される第2電子部品の一例であるICチップ部品等
の複数のICチップ31が、ウェハに格子状に形成され
てICチップ供給部35に供給可能に配置されており、
ICチップ供給部35は、スライドベース36上に固定
されている。
A plurality of general-purpose electronic components such as a chip component, which is an example of the first electronic component, in which the electrodes of the electronic component and the electrodes of the circuit board are mounted by interposing the bonding component by heating and melting the bonding component. 1 is housed in a parts tray 5 fixed on a slide base 6 and arranged so as to be supplied, and a circuit board 4 is positioned and fixed on a stage 7 which is an example of a pedestal part fixed on the slide base 6. Has been done. Further, a plurality of IC chips 31 such as an IC chip component, which is an example of a second electronic component, in which the electrodes of the electronic component and the electrodes of the circuit board are mounted with the bonding material interposed by applying ultrasonic vibration to the bonding material. Are formed in a lattice on the wafer and are arranged so that they can be supplied to the IC chip supply unit 35.
The IC chip supply unit 35 is fixed on the slide base 36.

【0029】また、電子部品1、及びICチップ31が
実装される複数の回路基板4が回路基板供給部26に収
納されて供給可能となっており、回路基板4の吸着保持
による移動動作を行うローダー27によりこの回路基板
供給部26からの回路基板4の取出し及びステージ7へ
の回路基板4の供給が可能となっており、さらに、各電
子部品が実装された回路基板4のステージ7からの取出
し及び回路基板排出部28への回路基板4の排出も可能
となっている。
Further, a plurality of circuit boards 4 on which the electronic component 1 and the IC chip 31 are mounted are housed in the circuit board supply section 26 so that they can be supplied, and a moving operation is performed by suction holding the circuit board 4. The loader 27 makes it possible to take out the circuit board 4 from the circuit board supply unit 26 and supply the circuit board 4 to the stage 7, and further, to remove the circuit board 4 from the stage 7 of the circuit board 4 on which each electronic component is mounted. It is also possible to take out and eject the circuit board 4 to the circuit board ejecting section 28.

【0030】また、ICチップ供給部35に配置されて
いるICチップ31は、各電極を有する面を上面に配置
されており、吸着反転部25により各電極を有する面が
吸着保持され、ICチップ31を吸着保持したままの状
態で吸着反転部25のモータにより吸着反転部25を回
転させ、ICチップ31の各電極を有さない面である背
面を上面とすることにより、このICチップ31の背面
をヘッドツール33により吸着保持可能となる。
Further, the IC chip 31 arranged in the IC chip supply section 35 is arranged such that the surface having the respective electrodes is arranged on the upper surface, and the surface having the respective electrodes is adsorbed and held by the adsorption reversing section 25, and the IC chip The suction reversing unit 25 is rotated by the motor of the suction reversing unit 25 while the suction holding unit 31 is held, and the back surface of the IC chip 31, which is a surface without electrodes, is set as the upper surface. The back surface can be held by suction by the head tool 33.

【0031】さらに、電子部品実装装置101は、電子
部品実装装置101における各構成部の制御を行う制御
部である制御部9を備えており、昇降部21及び昇降部
51の移動動作、X方向移動機構22の移動動作、Y方
向移動機構23及びY方向移動機構53の移動動作、ヘ
ッドツール3の吸着ノズル11及び超音波ツール33の
吸着ノズル41の吸着保持動作、吸着反転部25の吸着
保持動作及び移動動作、ヘッドツール3のセラミックヒ
ータ12の加熱動作、ヘッドツール3の冷却ブローノズ
ル19の冷却動作、超音波ツール33の超音波振動部4
2の振動動作及びローダー27の移動動作は、制御部9
により動作制御される。
Further, the electronic component mounting apparatus 101 is provided with a control section 9 which is a control section for controlling each component of the electronic component mounting apparatus 101, and the moving operation of the elevating section 21 and the elevating section 51 in the X direction. Moving operation of moving mechanism 22, moving operation of Y direction moving mechanism 23 and Y direction moving mechanism 53, suction holding operation of suction nozzle 11 of head tool 3 and suction nozzle 41 of ultrasonic tool 33, suction holding of suction reversing section 25 Operation and moving operation, heating operation of the ceramic heater 12 of the head tool 3, cooling operation of the cooling blow nozzle 19 of the head tool 3, ultrasonic vibration part 4 of the ultrasonic tool 33
The vibration operation 2 and the movement operation of the loader 27 are performed by the control unit 9
Is controlled by.

【0032】次に、このような構成の電子部品実装装置
101において、ローカルリフロー実装方法により回路
基板4へ汎用電子部品1の実装を行った後、汎用電子部
品1が実装された回路基板4へ、超音波実装方法により
ICチップ31の実装を行う上記第1の実施形態にかか
る電子部品の実装方法について、詳細に説明する。
Next, in the electronic component mounting apparatus 101 having such a configuration, after mounting the general-purpose electronic component 1 on the circuit board 4 by the local reflow mounting method, the general-purpose electronic component 1 is mounted on the circuit board 4. The electronic component mounting method according to the first embodiment in which the IC chip 31 is mounted by the ultrasonic mounting method will be described in detail.

【0033】図2及び図3は、上記第1の実施形態にお
ける電子部品の実装方法について模式的に示す汎用電子
部品1、ICチップ31、及び回路基板4の断面図であ
る。図2(b)に示すように、四角形プレート状の汎用
電子部品1は接合面に多数の電極1aを有しており、そ
の各電極1aには接合材の一例である半田バンプ1bが
予め形成されている。また、図3(e)に示すように、
四角形プレート状のICチップ31は接合面に多数の電
極31aを有しており、その各電極31aには接合材の
一例であるAuバンプ31bが予め形成されている。ま
た、図2(a)に示すように、四角形プレート状の回路
基板4は上面に複数の電極であるパッド4a及び4bを
有しており、各パッド4aは汎用電子部品1の各電極1
aに当接可能なように、汎用電子部品1の各電極1aに
対応した位置に回路基板4の各パッド4aが配置され、
各パッド4bはICチップ31の各電極31aに当接可
能なように、ICチップ31の各電極31aに対応した
位置に回路基板4の各パッド4bが配置されている。
2 and 3 are cross-sectional views of the general-purpose electronic component 1, the IC chip 31, and the circuit board 4 schematically showing the mounting method of the electronic component in the first embodiment. As shown in FIG. 2B, the quadrangular plate-shaped general-purpose electronic component 1 has a large number of electrodes 1a on the bonding surface, and solder bumps 1b, which are an example of a bonding material, are previously formed on each electrode 1a. Has been done. In addition, as shown in FIG.
The rectangular plate-shaped IC chip 31 has a large number of electrodes 31a on the bonding surface, and Au bumps 31b, which are an example of a bonding material, are formed in advance on each of the electrodes 31a. Further, as shown in FIG. 2A, the rectangular plate-shaped circuit board 4 has pads 4a and 4b, which are a plurality of electrodes, on the upper surface, and each pad 4a is an electrode 1 of the general-purpose electronic component 1.
Each pad 4a of the circuit board 4 is arranged at a position corresponding to each electrode 1a of the general-purpose electronic component 1 so as to be able to contact a.
Each pad 4b of the circuit board 4 is arranged at a position corresponding to each electrode 31a of the IC chip 31 so that each pad 4b can come into contact with each electrode 31a of the IC chip 31.

【0034】次に、電子部品実装装置101を用いて汎
用電子部品1及びICチップ31を回路基板4上に実装
する方法について説明する。
Next, a method of mounting the general-purpose electronic component 1 and the IC chip 31 on the circuit board 4 using the electronic component mounting apparatus 101 will be described.

【0035】まず、図1において、ローダー27を複数
の回路基板4が供給可能に収納されている回路基板供給
部26の上方へ移動させ、ローダー27により1枚の回
路基板4を吸着保持して回路基板供給部26より取り出
し、ローダー27をステージ7の上方へ移動させ、回路
基板4をステージ7へ供給し、ローダー27による回路
基板4への吸着保持を解除して、ステージ7へ回路基板
4を固定する。
First, in FIG. 1, the loader 27 is moved above the circuit board supply unit 26 in which a plurality of circuit boards 4 can be supplied, and the loader 27 sucks and holds one circuit board 4. The circuit board 4 is taken out from the circuit board supply unit 26, the loader 27 is moved above the stage 7, the circuit board 4 is supplied to the stage 7, and the adsorption and holding of the circuit board 4 by the loader 27 is released to the stage 7. To fix.

【0036】次に、図1において、複数の汎用電子部品
1が配置されているパーツトレー5が固定されているス
ライドベース6をY方向移動機構23により、Y1又は
Y2方向に移動させるとともに、X方向移動機構22に
より、ヘッドツール3をX1又はX2方向に移動させ、
パーツトレイ5の中に配置されている1つの汎用電子部
品1が、ヘッドツール3の先端部の吸着ノズル11によ
り吸着保持可能なように、ヘッドツール3をその汎用電
子部品1に対して位置合わせを行う。その後、昇降部2
1によりヘッドツール3を下降させ、ヘッドツール3の
吸着ノズル11により汎用電子部品1の各電極を有さな
い面である背面を吸着保持し、昇降部21によりヘッド
ツール3を上昇させ、パーツトレイ5より汎用電子部品
1を取り出す。ここで、汎用電子部品1はパーツトレー
5に背面を上にして配置されている場合について説明し
たが、汎用電子部品1が背面を下にして配置されている
場合であっても、汎用電子部品1のヘッドツール3の吸
着ノズル11への吸着保持の前に、汎用電子部品1を反
転させるような反転機構を設けることにより、吸着ノズ
ル11による汎用電子部品1の背面の吸着保持は可能で
ある。
Next, in FIG. 1, the slide base 6 to which the parts tray 5 on which a plurality of general-purpose electronic components 1 are arranged is fixed is moved in the Y1 or Y2 direction by the Y-direction moving mechanism 23, and X By the direction moving mechanism 22, the head tool 3 is moved in the X1 or X2 direction,
The head tool 3 is aligned with the general-purpose electronic component 1 so that the single general-purpose electronic component 1 arranged in the parts tray 5 can be sucked and held by the suction nozzle 11 at the tip of the head tool 3. I do. After that, the lifting unit 2
1, the head tool 3 is lowered, the suction nozzle 11 of the head tool 3 sucks and holds the back surface of the general-purpose electronic component 1 which is a surface without each electrode, and the elevating part 21 raises the head tool 3 to raise the parts tray. The general-purpose electronic component 1 is taken out from 5. Here, the case where the general-purpose electronic component 1 is arranged on the parts tray 5 with the back surface facing upward has been described. However, even when the general-purpose electronic component 1 is arranged with the back surface facing downward, the general-purpose electronic component 1 is arranged. By providing a reversing mechanism for reversing the general-purpose electronic component 1 before the suction-holding of the head tool 3 of No. 1 by the suction nozzle 11, the suction-holding of the back surface of the general-purpose electronic component 1 by the suction nozzle 11 is possible. .

【0037】次に、図1において、回路基板4が固定さ
れているステージ7を固定しているスライドベース6
を、Y方向移動機構23によりY1又はY2方向に移動
させるとともに、汎用電子部品1を吸着保持しているヘ
ッドツール3をX方向移動機構22によりX1又はX2
方向に移動させ、図2(b)に示すように、汎用電子部
品1の各電極1aに形成されている各半田バンプ1bが
回路基板4の各パッド4aに当接可能なように、汎用電
子部品1と回路基板4の位置合わせを行う。
Next, referring to FIG. 1, the slide base 6 fixing the stage 7 to which the circuit board 4 is fixed.
Is moved in the Y1 or Y2 direction by the Y-direction moving mechanism 23, and the head tool 3 holding the general-purpose electronic component 1 by suction is moved by the X-direction moving mechanism 22 in the X1 or X2 direction.
2B, so that the solder bumps 1b formed on the electrodes 1a of the general-purpose electronic component 1 can contact the pads 4a of the circuit board 4 as shown in FIG. The component 1 and the circuit board 4 are aligned.

【0038】その後、ヘッドツール3を昇降部21によ
り下降させ、吸着ノズル11に吸着保持されている汎用
電子部品1の各半田バンプ1bを、ステージ7に固定さ
れている回路基板4の各パッド4aに、ヘッドツール3
のセラミックヒータ12により吸着ノズル11への加熱
を行いながら、当接させる。これにより、吸着ノズル1
1に吸着保持されている汎用電子部品1の各半田バンプ
1bが加熱される。さらに、セラミックヒータ12によ
る吸着ノズル11への加熱温度が、各半田バンプ1bを
形成している半田の融点以上の温度に昇温され、各半田
バンプ1bが溶融される。その後、図2(c)に示すよ
うに、セラミックヒータ12による加熱を停止した後、
溶融状態の半田に冷却ブローノズル19からのブローに
よる冷却を施す。なお、溶融状態の半田への冷却ブロー
ノズル19による強制的な冷却に代えて、溶融された半
田を自然冷却することにより半田を固化させてもよい。
After that, the head tool 3 is lowered by the elevating part 21, and the solder bumps 1b of the general-purpose electronic component 1 sucked and held by the suction nozzle 11 are connected to the pads 4a of the circuit board 4 fixed to the stage 7. Head tool 3
While contacting the adsorption nozzle 11 with the ceramic heater 12 of FIG. As a result, the suction nozzle 1
Each of the solder bumps 1b of the general-purpose electronic component 1 that is adsorbed and held by 1 is heated. Further, the heating temperature of the suction nozzle 11 by the ceramic heater 12 is raised to a temperature equal to or higher than the melting point of the solder forming each solder bump 1b, and each solder bump 1b is melted. After that, as shown in FIG. 2C, after the heating by the ceramic heater 12 is stopped,
The molten solder is cooled by blowing from the cooling blow nozzle 19. Instead of forcibly cooling the molten solder by the cooling blow nozzle 19, the molten solder may be naturally cooled to solidify the solder.

【0039】この溶融状態の半田が冷却により固化する
前に、ヘッドツール3の吸着ノズル11による汎用電子
部品1への吸着保持を解除し、ヘッドツール3を昇降部
21により上昇させる。その後、図2(d)に示すよう
に、半田が固化され、汎用電子部品1の各電極1aと回
路基板4の各パッド4aが半田を介在させて装着され
る。なお、複数の汎用電子部品1を回路基板4に実装す
る場合には、各汎用電子部品1毎にこれらの作業を繰り
返して行い、各汎用電子部品1を回路基板4に個別に実
装を行う。
Before the molten solder is solidified by cooling, the suction holding of the head tool 3 to the general-purpose electronic component 1 by the suction nozzle 11 is released, and the head tool 3 is raised by the elevating part 21. After that, as shown in FIG. 2D, the solder is solidified, and the electrodes 1a of the general-purpose electronic component 1 and the pads 4a of the circuit board 4 are mounted with the solder interposed. When a plurality of general-purpose electronic components 1 are mounted on the circuit board 4, these operations are repeated for each general-purpose electronic component 1 and each general-purpose electronic component 1 is individually mounted on the circuit board 4.

【0040】なお、上記においては、接合材が汎用電子
部品1の各電極1aに予め形成された各半田バンプ1b
である場合について説明したが、接合材が汎用電子部品
1の各電極1aに予め形成された各半田バンプ1b、及
び回路基板4の各パッド4a上に予め形成された各半田
部である場合であってもよい。
In the above, the solder bumps 1b each having the bonding material previously formed on each electrode 1a of the general-purpose electronic component 1 are formed.
In the case where the bonding material is each solder bump 1b formed in advance on each electrode 1a of the general-purpose electronic component 1 and each solder portion formed in advance on each pad 4a of the circuit board 4, It may be.

【0041】さらに、汎用電子部品1の各電極1a上、
又は回路基板4の各パッド4a上、又は接合材である各
半田バンプ1b若しくは上記各半田部に、各接合部分に
おける表面の酸化膜を除去し、溶融半田の濡れ性を良好
とさせることができるフラックスを予め塗布により、供
給してもよい。なお、塗布供給されたフラックスの種類
により、汎用電子部品1を回路基板4に実装後、塗布供
給されたフラックスを洗浄による除去を行う場合もあ
る。
Furthermore, on each electrode 1a of the general-purpose electronic component 1,
Alternatively, the wettability of the molten solder can be improved by removing the oxide film on the surface of each bonding portion on each pad 4a of the circuit board 4, each solder bump 1b as a bonding material, or each solder portion described above. The flux may be supplied by coating in advance. Depending on the type of flux applied and supplied, the general-purpose electronic component 1 may be mounted on the circuit board 4 and then the flux supplied and applied may be removed by cleaning.

【0042】次に、図1において、複数のICチップ3
1が配置されているICチップ供給部35が固定されて
いるスライドベース36をY方向移動機構53により、
Y1又はY2方向に移動させるとともに、吸着反転部2
5をX1又はX2方向に移動させ、ICチップ供給部3
5の中の1つのICチップ31が、吸着反転部25の先
端部により吸着保持可能なように、吸着反転部25をそ
のICチップ31に対し位置合わせを行う。その後、吸
着反転部25を下降させ、吸着反転部25の先端部によ
りICチップ31の各電極31aを有する面を吸着保持
した後、吸着反転部25を上昇させて、ICチップ供給
部35よりICチップ31を取り出す。
Next, referring to FIG. 1, a plurality of IC chips 3
The slide base 36 to which the IC chip supply unit 35 in which 1 is arranged is fixed is moved by the Y-direction moving mechanism 53.
While moving in the Y1 or Y2 direction, the suction reversing unit 2
5 in the X1 or X2 direction to move the IC chip supply unit 3
The suction reversal unit 25 is aligned with the IC chip 31 so that one IC chip 31 in 5 can be suction-held by the tip of the suction reversal unit 25. After that, the suction reversal unit 25 is lowered, and the tip of the suction reversal unit 25 suction-holds the surface of the IC chip 31 having each electrode 31a, and then the suction reversal unit 25 is lifted and the IC chip supply unit 35 causes the IC The chip 31 is taken out.

【0043】その後、吸着反転部25のモータにより吸
着反転部25を回転させ反転させることにより、吸着反
転部25により吸着保持されているICチップ31の各
電極31aを有さない面である背面を上面とさせる。そ
れとともに、超音波ツール33をX方向移動機構22に
よりX1又はX2方向に移動させ、吸着反転部25によ
り吸着保持されているICチップ31の背面を超音波ツ
ール33の吸着ノズル41により吸着保持可能なよう
に、位置合わせを行う。その後、超音波ツール33を昇
降部51により下降させ、吸着ノズル41によりICチ
ップ31を吸着保持するとともに、吸着反転部25によ
るICチップ31への吸着保持を解除し、ICチップ3
1の吸着反転部25から超音波ツール33への受け渡し
を行う。
After that, the suction reversing unit 25 is rotated by the motor of the suction reversing unit 25 to invert it so that the back surface of the IC chip 31 that is adsorbed and held by the suction reversing unit 25, which is a surface having no electrodes 31a, is removed. Make it the top surface. At the same time, the ultrasonic tool 33 is moved in the X1 or X2 direction by the X-direction moving mechanism 22, and the back surface of the IC chip 31 suction-held by the suction reversing unit 25 can be suction-held by the suction nozzle 41 of the ultrasonic tool 33. Align as you would. After that, the ultrasonic tool 33 is lowered by the elevating part 51, the IC chip 31 is suction-held by the suction nozzle 41, and the suction-holding to the IC chip 31 by the suction reversing part 25 is released.
Transfer from the suction reversal unit 25 of No. 1 to the ultrasonic tool 33.

【0044】次に、図1において、汎用電子部品1が実
装された回路基板4が固定されているステージ7を固定
しているスライドベース6を、Y方向移動機構23によ
りY1又はY2方向に移動させるとともに、ICチップ
31を吸着保持している超音波ツール33をX方向移動
機構22によりX1又はX2方向に移動させ、図3
(e)に示すように、ICチップ31の各電極31aに
形成されている各Auバンプ31bが回路基板4の各パ
ッド4bに当接可能なように、ICチップ31と回路基
板4の位置合わせを行う。
Next, in FIG. 1, the slide base 6 which fixes the stage 7 to which the circuit board 4 on which the general-purpose electronic component 1 is mounted is fixed is moved in the Y1 or Y2 direction by the Y-direction moving mechanism 23. At the same time, the ultrasonic tool 33 holding the IC chip 31 by suction is moved in the X1 or X2 direction by the X-direction moving mechanism 22,
As shown in (e), the IC chip 31 and the circuit board 4 are aligned so that the Au bumps 31b formed on the electrodes 31a of the IC chip 31 can contact the pads 4b of the circuit board 4. I do.

【0045】その後、図3(f)に示すように、超音波
ツール33を昇降部51により下降させ、吸着ノズル4
1に吸着保持されているICチップ31の各Auバンプ
31bを、ステージ7に固定されている回路基板4の各
パッド4bに当接させながら、互いに当接状態となって
いるICチップ31の各Auバンプ31bの表面と回路
基板4の各パッド4bの表面に、超音波ツール33の超
音波振動部42により、超音波振動を付与し、これらの
各当接表面に摩擦を起こさせる。この摩擦により発生す
る摩擦熱により、ICチップ31の各Auバンプ31b
と回路基板4の各パッド4bが接合される。
After that, as shown in FIG. 3 (f), the ultrasonic tool 33 is lowered by the elevating part 51, and the suction nozzle 4
Each of the Au bumps 31b of the IC chip 31 suction-held on 1 is brought into contact with each pad 4b of the circuit board 4 fixed to the stage 7, and each of the IC chips 31 in contact with each other. Ultrasonic vibration is applied to the surface of the Au bump 31b and the surface of each pad 4b of the circuit board 4 by the ultrasonic vibrating section 42 of the ultrasonic tool 33 to cause friction on each of these contact surfaces. Due to the frictional heat generated by this friction, each Au bump 31b of the IC chip 31 is
And the pads 4b of the circuit board 4 are joined.

【0046】その後、図3(g)に示すように、超音波
ツール33の超音波振動部42による超音波振動の付与
を停止させ、吸着ノズル41によるICチップ31への
吸着保持を解除し、昇降部51により超音波ツール33
を上昇させ、ICチップ31が回路基板4に装着され
る。
After that, as shown in FIG. 3G, the application of ultrasonic vibration by the ultrasonic vibrating section 42 of the ultrasonic tool 33 is stopped, and the suction holding of the IC chip 31 by the suction nozzle 41 is released. The ultrasonic tool 33 is operated by the elevating part 51.
And the IC chip 31 is mounted on the circuit board 4.

【0047】以上のような電子部品の実装方法により、
汎用電子部品1とICチップ31は、回路基板4に実装
されることとなる。
By the mounting method of electronic parts as described above,
The general-purpose electronic component 1 and the IC chip 31 will be mounted on the circuit board 4.

【0048】さらに、その後、ローダー27をステージ
7の上方へ移動させ、汎用電子部品1及びICチップ3
1が実装された回路基板4を、ローダー27により吸着
保持することにより、回路基板4をステージ7より取り
出し、ローダー27を回路基板排出部28の上方へ移動
させ、ローダー27による回路基板4への吸着保持を解
除して、回路基板4を回路基板排出部28へ排出する。
After that, the loader 27 is moved to above the stage 7, and the general-purpose electronic component 1 and the IC chip 3 are moved.
The circuit board 4 on which No. 1 is mounted is sucked and held by the loader 27, so that the circuit board 4 is taken out from the stage 7, the loader 27 is moved above the circuit board discharge unit 28, and the loader 27 moves the circuit board 4 to the circuit board 4. The suction holding is released, and the circuit board 4 is discharged to the circuit board discharge portion 28.

【0049】複数の回路基板4に対して、各回路基板4
毎に、これら上記の作業を繰り返して行い、各回路基板
4上に、汎用電子部品1及びICチップ31が実装され
る。
For each of the plurality of circuit boards 4, each circuit board 4
The above-described work is repeated every time, and the general-purpose electronic component 1 and the IC chip 31 are mounted on each circuit board 4.

【0050】なお、上記においては、接合材がICチッ
プ31の各電極31aに予め形成された各Auバンプ3
1bである場合について説明したが、接合材が半田も含
めた他の金属材料である場合であってもよい。
In the above, the bonding material is each Au bump 3 formed in advance on each electrode 31a of the IC chip 31.
Although the case of 1b has been described, the bonding material may be another metal material including solder.

【0051】また、上記においては回路基板4はプレー
ト状の基板である場合について説明したが、プレート状
の基板に代えて、回路基板4がシート状のフィルム基板
であり、そのフィルム基板がロール状のフィルム基板又
は個片に切断された短冊状のフィルム基板である場合で
あってもよい。また、以降に説明する本発明の各実施形
態についても同様である。
Although the circuit board 4 is a plate-shaped board in the above description, the circuit board 4 is a sheet-shaped film board instead of the plate-shaped board, and the film board is a roll-shaped board. The film substrate or the strip-shaped film substrate cut into individual pieces may be used. The same applies to each embodiment of the present invention described below.

【0052】上記第1の実施形態によれば、電子部品実
装装置101がローカルリフロー実装方法を実施可能な
ヘッドツール3と、超音波実装方法を実施可能な超音波
ツール33を備えていることにより、ローカルリフロー
実装方法により回路基板4上に汎用電子部品1の実装を
行った後、超音波実装方法によりICチップ31の実装
を行うことができるため、例えば、ICチップ31が熱
による影響を防止することが要求されるような電子部
品、例えば、SAWフィルターのような電子部品である
場合に、汎用電子部品1の実装時における半田溶融加熱
による熱の影響をICチップ31に対して与えることが
ないため、熱による影響を受けることなくICチップ3
1を回路基板4に実装することができる。
According to the first embodiment, the electronic component mounting apparatus 101 is provided with the head tool 3 capable of carrying out the local reflow mounting method and the ultrasonic tool 33 capable of carrying out the ultrasonic mounting method. Since the general-purpose electronic component 1 is mounted on the circuit board 4 by the local reflow mounting method and then the IC chip 31 can be mounted by the ultrasonic mounting method, for example, the IC chip 31 is prevented from being affected by heat. In the case of an electronic component that is required to be processed, for example, an electronic component such as a SAW filter, the influence of heat due to solder melting heating during mounting of the general-purpose electronic component 1 can be given to the IC chip 31. IC chip 3 without being affected by heat
1 can be mounted on the circuit board 4.

【0053】さらに、例えば、汎用電子部品1の各半田
バンプ1b上、又は回路基板4の各パッド4a上に、フ
ラックスを供給する場合であり、かつそのフラックスを
汎用電子部品1の実装後に除去する必要がある場合は、
上記ローカルリフロー実装方法により回路基板4上に汎
用電子部品1の実装を行った後、フラックス洗浄により
供給されたフラックスを除去し、その後、超音波実装方
法によりICチップ31の実装を行うことができるた
め、フラックス洗浄時において、超音波実装方法により
実装されるICチップ31に対するフラックス洗浄液に
よる影響、又はフラックス洗浄時に洗い落とされる微細
な破片等のICチップ31への再付着等による影響を考
慮する必要をなくすことができる。
Further, for example, in the case where flux is supplied to each solder bump 1b of the general-purpose electronic component 1 or each pad 4a of the circuit board 4, and the flux is removed after the general-purpose electronic component 1 is mounted. If you need
After mounting the general-purpose electronic component 1 on the circuit board 4 by the above-mentioned local reflow mounting method, the supplied flux is removed by flux cleaning, and then the IC chip 31 can be mounted by the ultrasonic mounting method. Therefore, during flux cleaning, it is necessary to consider the effect of the flux cleaning liquid on the IC chip 31 mounted by the ultrasonic mounting method, or the effect of reattachment of fine chips or the like washed off during the flux cleaning to the IC chip 31. Can be eliminated.

【0054】従って、電子部品の実装時において、上記
のような影響の考慮を行う必要があるICチップ31、
例えば、その実装時に防熱環境又は防水環境等が要求さ
れるような電子部品を超音波実装方法により、半田の加
熱溶融により実装される汎用電子部品とともに、回路基
板へ混載して実装することが可能となる。
Therefore, when mounting electronic parts, it is necessary to consider the above influences on the IC chip 31,
For example, an electronic component that requires a heat-proof environment or waterproof environment at the time of mounting can be mixedly mounted on a circuit board together with general-purpose electronic components that are mounted by heating and melting solder by the ultrasonic mounting method. Becomes

【0055】なお、本発明は上記実施形態に限定される
ものではなく、その他種々の態様で実施できる。例え
ば、本発明の第2の実施形態にかかる電子部品の実装方
法は、上記第1の実施形態の電子部品実装装置101を
用いて、超音波実装方法によりICチップ31の実装を
行った後、ICチップ31が実装された回路基板4へ、
ローカルリフロー実装方法により汎用電子部品1の実装
を行う。つまり、上記第1の実施形態にかかる電子部品
の実装方法に対して、各実装方法を逆の順序とさせたも
のである。なお、超音波実装方法によるICチップ31
の実装手順、ローカルリフロー実装方法による汎用電子
部品1の実装手順、及び回路基板4のステージ7への供
給及び排出手順における各詳細手順は、上記第1の実施
形態における電子部品の実装方法と同様であるので説明
を省略する。
The present invention is not limited to the above embodiment, but can be implemented in various other modes. For example, in the electronic component mounting method according to the second embodiment of the present invention, after mounting the IC chip 31 by the ultrasonic mounting method using the electronic component mounting apparatus 101 of the first embodiment, To the circuit board 4 on which the IC chip 31 is mounted,
The general-purpose electronic component 1 is mounted by the local reflow mounting method. In other words, the mounting method is the reverse of the mounting method of the electronic component according to the first embodiment. The IC chip 31 manufactured by the ultrasonic mounting method is used.
And the detailed procedure of the mounting procedure of the general-purpose electronic component 1 by the local reflow mounting method and the supply and discharge procedure of the circuit board 4 to the stage 7 are the same as the mounting method of the electronic component in the first embodiment. Therefore, the description is omitted.

【0056】上記第2の実施形態によれば、超音波実装
方法により回路基板4上へICチップ31の実装を行っ
た後に、ICチップ31が実装された回路基板4上へ、
ローカルリフロー実装方法により汎用電子部品1の実装
を行なうため、超音波実装時に発生する超音波振動によ
る汎用電子部品1と回路基板4との接合部分に対する影
響を考慮する必要をなくすことができる。従って、汎用
電子部品が、振動に対する影響、例えば、超音波振動に
より上記接合部分を破壊させてしまう、又は上記接合部
分の接合強度を低下させてしまうといった影響を考慮す
る必要があるような電子部品である場合に、超音波実装
方法により実装される電子部品とともに、混載して回路
基板への実装を行なうことが可能となる。
According to the second embodiment, after the IC chip 31 is mounted on the circuit board 4 by the ultrasonic mounting method, the IC chip 31 is mounted on the circuit board 4.
Since the general-purpose electronic component 1 is mounted by the local reflow mounting method, it is possible to eliminate the need to consider the influence of the ultrasonic vibration generated during ultrasonic mounting on the joint between the general-purpose electronic component 1 and the circuit board 4. Therefore, it is necessary to consider the influence of the general-purpose electronic component on vibration, for example, the influence of destroying the joint portion by ultrasonic vibration or reducing the joint strength of the joint portion. In this case, it is possible to mix and mount together with the electronic component mounted by the ultrasonic mounting method on the circuit board.

【0057】次に、本発明の第3の実施形態にかかる電
子部品の実装方法は、まず、一括リフロー実装方法によ
り回路基板4へ汎用電子部品1の実装を行なった後、汎
用電子部品1が実装された回路基板4へ、超音波実装方
法によりICチップ31の実装を行なうものである。上
記第3の実施形態にかかる電子部品の実装方法について
詳細に説明する。
Next, in the mounting method for electronic components according to the third embodiment of the present invention, first, the general-purpose electronic component 1 is mounted on the circuit board 4 by the collective reflow mounting method, and then the general-purpose electronic component 1 is mounted. The IC chip 31 is mounted on the mounted circuit board 4 by the ultrasonic mounting method. The mounting method of the electronic component according to the third embodiment will be described in detail.

【0058】図4及び図5は、上記第3の実施形態にお
ける電子部品の実装方法について模式的に示す汎用電子
部品1、ICチップ31、及び回路基板64の断面図で
ある。なお、汎用電子部品1及びICチップ31は上記
第1の実施形態の電子部品の実装方法における汎用電子
部品1及びICチップ31と同様である。また、図4
(a)に示すように、四角形プレート状の回路基板64
は上面に複数の電極であるパッド64a及び64bを有
しており、各パッド64aは汎用電子部品1の各電極1
aに接合可能なように、汎用電子部品1の各電極1aに
対応した位置に回路基板64の各パッド64aが配置さ
れ、各パッド64bはICチップ31の各電極31aに
接合可能なように、ICチップ31の各電極31aに対
応した位置に回路基板64の各パッド64bが配置され
ている。
FIG. 4 and FIG. 5 are cross-sectional views of the general-purpose electronic component 1, the IC chip 31, and the circuit board 64, which schematically show the mounting method of the electronic component in the third embodiment. The general-purpose electronic component 1 and the IC chip 31 are the same as the general-purpose electronic component 1 and the IC chip 31 in the electronic component mounting method of the first embodiment. Also, FIG.
As shown in (a), a rectangular plate-shaped circuit board 64
Has a plurality of pads 64a and 64b as electrodes on the upper surface, and each pad 64a is an electrode 1 of the general-purpose electronic component 1.
Each pad 64a of the circuit board 64 is arranged at a position corresponding to each electrode 1a of the general-purpose electronic component 1 so that it can be bonded to a, and each pad 64b can be bonded to each electrode 31a of the IC chip 31. The pads 64b of the circuit board 64 are arranged at positions corresponding to the electrodes 31a of the IC chip 31.

【0059】まず、汎用電子部品1の各電極1aを有さ
ない面である背面を、ヘッドツール63の先端部の吸着
ノズル71により吸着保持し、汎用電子部品1の各半田
バンプ1bを回路基板64の各パッド64aに接合可能
なように、汎用電子部品1を回路基板64に対して位置
合わせする。
First, the back surface of the general-purpose electronic component 1 which is the surface without the electrodes 1a is adsorbed and held by the adsorption nozzle 71 at the tip of the head tool 63, and the solder bumps 1b of the general-purpose electronic component 1 are connected to the circuit board. The general-purpose electronic component 1 is aligned with the circuit board 64 so that it can be bonded to each pad 64a of 64.

【0060】その後、図4(b)に示すように、汎用電
子部品1を吸着保持しているヘッドツール63を下降さ
せ、汎用電子部品1の各半田バンプ1bを回路基板64
の各パッド64aに押圧して仮接合を行う。回路基板6
4に複数の汎用電子部品1を実装する場合は、各汎用電
子部品1に対して、各汎用電子部品1毎に上記の作業を
繰り返して行い、各汎用電子部品1を回路基板64に仮
接合する。
After that, as shown in FIG. 4B, the head tool 63 holding the general-purpose electronic component 1 by suction is lowered, and the solder bumps 1b of the general-purpose electronic component 1 are connected to the circuit board 64.
The pads 64a are pressed to temporarily bond them. Circuit board 6
When mounting a plurality of general-purpose electronic components 1 on 4, the above-described work is repeated for each general-purpose electronic component 1, and each general-purpose electronic component 1 is temporarily joined to the circuit board 64. To do.

【0061】次に、図4(c)に示すように、各汎用電
子部品1が仮接合された回路基板64を、半田リフロー
作業部に搬送し、半田リフロー作業部において、各汎用
電子部品1及び回路基板64が熱源により加熱され、各
汎用電子部品1の各半田バンプ1bが溶融される。その
後、加熱された各汎用電子部品1及び回路基板4が冷却
され、溶融された各汎用電子部品1の各半田バンプ1b
が固化し、図4(d)に示すように、汎用電子部品1の
各電極1aを回路基板64の各パッド64aに各半田バ
ンプ1bを介して本接合され、装着される。
Next, as shown in FIG. 4C, the circuit board 64 to which each general-purpose electronic component 1 is temporarily joined is conveyed to the solder reflow working unit, and in the solder reflow working unit, each general-purpose electronic component 1 is transferred. The circuit board 64 is heated by the heat source, and the solder bumps 1b of the general-purpose electronic component 1 are melted. Thereafter, the heated general-purpose electronic components 1 and the circuit board 4 are cooled, and the solder bumps 1b of the melted general-purpose electronic components 1 are obtained.
Is solidified, and as shown in FIG. 4D, the electrodes 1a of the general-purpose electronic component 1 are permanently joined to the pads 64a of the circuit board 64 via the solder bumps 1b and mounted.

【0062】なお、上記第1の実施形態にて説明したよ
うに、接合材が汎用電子部品1の各電極1aに予め形成
された各半田バンプ1b、及び回路基板4の各パッド4
a上に予め形成された各半田部である場合であってもよ
い。
As described in the first embodiment, the solder bumps 1b in which the bonding material is formed in advance on the electrodes 1a of the general-purpose electronic component 1 and the pads 4 on the circuit board 4 are used.
It may be a case where each solder portion is formed in advance on a.

【0063】さらに、汎用電子部品1の各電極1a上、
又は回路基板4の各パッド4a上、又は接合材である各
半田バンプ1b若しくは上記各半田部に、各接合部分に
おける表面の酸化膜を除去し、溶融半田の濡れ性を良好
とさせることができるフラックスを予め塗布により、供
給してもよい。なお、塗布供給されたフラックスの種類
により、汎用電子部品1を回路基板64に実装後、塗布
供給されたフラックスを洗浄による除去を行う場合もあ
る。
Furthermore, on each electrode 1a of the general-purpose electronic component 1,
Alternatively, the wettability of the molten solder can be improved by removing the oxide film on the surface of each bonding portion on each pad 4a of the circuit board 4, each solder bump 1b as a bonding material, or each solder portion described above. The flux may be supplied by coating in advance. Depending on the type of flux supplied and applied, the general-purpose electronic component 1 may be mounted on the circuit board 64 and then the flux supplied and supplied may be removed by cleaning.

【0064】次に、図5(e)に示すように、ICチッ
プ31の各電極31aを有さない面である背面を超音波
ツール33の吸着ノズル41にて吸着保持した後、IC
チップ31の各電極31aに形成されている各Auバン
プ31bが、汎用電子部品1が実装された回路基板64
の各パッド64bに当接可能なように、ICチップ31
と回路基板64の位置合わせを行う。
Next, as shown in FIG. 5E, the back surface of the IC chip 31, which is a surface not having the electrodes 31a, is sucked and held by the suction nozzle 41 of the ultrasonic tool 33, and then the IC
Each Au bump 31b formed on each electrode 31a of the chip 31 has a circuit board 64 on which the general-purpose electronic component 1 is mounted.
Of the IC chip 31 so that the pads 64b of the
The circuit board 64 is aligned.

【0065】その後、図5(f)に示すように、超音波
ツール33を下降させ、吸着ノズル41に吸着保持され
ているICチップ31の各Auバンプ31bを、回路基
板64の各パッド64bに当接させながら、互いに当接
状態となっているICチップ31の各Auバンプ31b
の表面と回路基板64の各パッド64bの表面に、超音
波ツール33の超音波振動部42により、超音波振動を
付与し、これらの各当接表面に摩擦を起こさせる。この
摩擦により発生する摩擦熱により、ICチップ31の各
Auバンプ31bと回路基板64の各パッド64bが接
合される。
After that, as shown in FIG. 5F, the ultrasonic tool 33 is lowered so that the Au bumps 31b of the IC chip 31 suction-held by the suction nozzle 41 are brought into contact with the pads 64b of the circuit board 64. The Au bumps 31b of the IC chip 31 that are in contact with each other while contacting each other
Ultrasonic vibrations are applied to the surface of each of the pads and the surface of each pad 64b of the circuit board 64 by the ultrasonic vibration part 42 of the ultrasonic tool 33 to cause friction on each of these contact surfaces. The frictional heat generated by this friction bonds the Au bumps 31b of the IC chip 31 to the pads 64b of the circuit board 64.

【0066】その後、図5(g)に示すように、超音波
ツール33の超音波振動部42による超音波振動の付与
を停止させ、吸着ノズル41によるICチップ31への
吸着保持を解除し、超音波ツール33を上昇させ、IC
チップ31が回路基板64に装着される。
Thereafter, as shown in FIG. 5G, the application of ultrasonic vibration by the ultrasonic vibrating portion 42 of the ultrasonic tool 33 is stopped, and the suction holding of the IC chip 31 by the suction nozzle 41 is released. Raise the ultrasonic tool 33, and
The chip 31 is mounted on the circuit board 64.

【0067】以上のような電子部品の実装方法により、
汎用電子部品1とICチップ31は、回路基板64に実
装されることとなる。
According to the electronic component mounting method as described above,
The general-purpose electronic component 1 and the IC chip 31 will be mounted on the circuit board 64.

【0068】上記第3の実施形態によれば、上記第1の
実施形態による効果に付け加えて、さらに、1枚の回路
基板64に実装される汎用電子部品1が多数あるような
場合において、一括リフロー実装方法により、多数の汎
用電子部品1を回路基板64に仮接合した後、一括して
半田を溶融して各汎用電子部品1を回路基板64に本接
合して実装することができるため、各汎用電子部品1の
回路基板64への実装コストを抑えることができる。従
って、上記第1の実施形態による効果と併せて、半田の
加熱溶融により実装される汎用電子部品の実装コストを
抑えながら、例えば、その実装時に防熱環境又は防水環
境等が要求されるような電子部品を超音波実装方法によ
り、上記汎用電子部品とともに、回路基板へ混載して実
装することが可能となる。
According to the third embodiment, in addition to the effects of the first embodiment, when there are a large number of general-purpose electronic components 1 mounted on one circuit board 64, they can be collectively packaged. Since a large number of general-purpose electronic components 1 are temporarily joined to the circuit board 64 by the reflow mounting method, the solder can be melted in a lump so that the general-purpose electronic components 1 can be main-joined and mounted on the circuit board 64. The mounting cost of each general-purpose electronic component 1 on the circuit board 64 can be suppressed. Therefore, in addition to the effect of the first embodiment, while suppressing the mounting cost of the general-purpose electronic component mounted by heating and melting the solder, for example, an electronic device that requires a heatproof environment or a waterproof environment at the time of mounting By the ultrasonic mounting method, it becomes possible to mount the parts together with the general-purpose electronic parts on the circuit board.

【0069】なお、上記様々な実施形態のうちの任意の
実施形態を適宜組み合わせることにより、それぞれの有
する効果を奏するようにすることができる。
By properly combining the arbitrary embodiments of the aforementioned various embodiments, the effects possessed by them can be produced.

【0070】[0070]

【発明の効果】本発明の上記第1態様又は第2態様によ
れば、第1電子部品と第2電子部品の2つの種類の電子
部品を回路基板へ実装する電子部品の実装方法におい
て、上記第1電子部品の複数の電極と上記回路基板の複
数の電極を接合材を介在させて当接させながら加熱によ
り溶融させて、固化させることにより、上記第1電子部
品の上記各電極と上記回路基板の上記各電極を上記接合
材を介在させて装着した後、つまり、ローカルリフロー
実装方法により実装した後、上記第2電子部品の複数の
電極と上記回路基板の複数の電極とを接合材を介在させ
て当接させ、上記接合材に超音波振動を付与することに
より、上記第2電子部品の上記各電極と上記回路基板の
上記各電極を上記接合材を介在させて装着する、つま
り、超音波実装方法により実装することにより、例え
ば、上記第2電子部品が実装の際に熱による影響を防止
することが要求されるような電子部品、例えば、SAW
フィルターのような電子部品である場合に、上記ローカ
ルリフロー実装方法による第1電子部品の実装時におけ
る半田溶融加熱による熱の影響を上記第2電子部品に対
して与えることがないため、熱による影響を受けること
なく上記第2電子部品を上記回路基板に実装することが
可能となる。
According to the first or second aspect of the present invention, there is provided an electronic component mounting method for mounting two types of electronic components, a first electronic component and a second electronic component, on a circuit board. The plurality of electrodes of the first electronic component and the plurality of electrodes of the circuit board are melted by heating while being in contact with each other with a bonding material interposed therebetween to be solidified, whereby the respective electrodes of the first electronic component and the circuit. After mounting the electrodes on the substrate with the bonding material interposed, that is, after mounting by the local reflow mounting method, the bonding materials are bonded to the plurality of electrodes of the second electronic component and the plurality of electrodes of the circuit board. By interposing and abutting and applying ultrasonic vibration to the bonding material, the electrodes of the second electronic component and the electrodes of the circuit board are mounted with the bonding material interposed, that is, For ultrasonic mounting method By implementing Ri, for example, electronic components, such as the second electronic component can be prevented the influence of heat is required during the mounting, for example, SAW
In the case of an electronic component such as a filter, the influence of the heat due to the solder melting heating at the time of mounting the first electronic component by the local reflow mounting method does not affect the second electronic component, and thus the influence of the heat is exerted. It is possible to mount the second electronic component on the circuit board without receiving it.

【0071】さらに、例えば、第1電子部品の上記各電
極上、又は上記回路基板の上記各電極上、又は上記接合
材に予めフラックスが供給されている場合であり、かつ
そのフラックスを上記第1電子部品の実装後に除去する
必要がある場合は、上記ローカルリフロー実装方法によ
り回路基板上に第1電子部品の実装を行った後、フラッ
クス洗浄により供給されたフラックスを除去し、その
後、上記超音波実装方法により上記第2電子部品の実装
を行うことができるため、フラックス洗浄時において、
上記超音波実装方法により実装される上記第2電子部品
に対するフラックス洗浄液による影響、又はフラックス
洗浄時に洗い落とされる微細な破片等の上記第2電子部
品への再付着等による影響を考慮する必要をなくすこと
が可能となる。
Further, for example, in the case where the flux is previously supplied to the electrodes of the first electronic component, the electrodes of the circuit board, or the bonding material, and the flux is supplied to the first electronic component. When the electronic component needs to be removed after mounting, the first electronic component is mounted on the circuit board by the above-mentioned local reflow mounting method, and then the supplied flux is removed by flux cleaning, and then the ultrasonic wave is removed. Since the second electronic component can be mounted by the mounting method, when cleaning the flux,
Eliminating the need to consider the effect of the flux cleaning liquid on the second electronic component mounted by the ultrasonic mounting method, or the effect of reattachment of fine debris or the like washed off during flux cleaning to the second electronic component. It becomes possible.

【0072】従って、複数の種類の電子部品が回路基板
に実装される場合において、上記のような影響の考慮を
行う必要がある第2電子部品、例えば、その実装時に防
熱環境又は防水環境等が要求されるような電子部品を超
音波実装方法により、半田の加熱溶融により実装される
第1電子部品とともに、回路基板へ混載して実装するこ
とが可能となる。
Therefore, when a plurality of types of electronic components are mounted on the circuit board, there is a need to consider the above influences on the second electronic component, such as a heatproof environment or a waterproof environment at the time of mounting. By the ultrasonic mounting method, it is possible to mount the required electronic component together with the first electronic component mounted by heating and melting the solder on the circuit board.

【0073】本発明の上記第3態様又は第4態様によれ
ば、第1電子部品と第2電子部品の2つの種類の電子部
品を回路基板へ実装する電子部品の実装方法において、
上記第2電子部品を上記第1態様による効果に記載の上
記超音波実装方法により上記回路基板に実装した後、上
記第1電子部品を上記第1態様による効果に記載の上記
ローカルリフロー実装方法により上記回路基板に実装す
ることにより、上記超音波実装方法実施時には、まだ上
記回路基板上には他の電子部品が実装されていないた
め、上記超音波実装実施時に発生する超音波振動による
上記第1電子部品と上記回路基板との接合部分に対する
影響の考慮の必要をなくすことが可能となる。従って、
上記第1電子部品が、振動に対する影響、例えば、超音
波振動により上記接合部分が破壊されてしまう、又は上
記接合部分の接合強度が低下してしまうといった影響を
考慮する必要があるような電子部品である場合に、超音
波実装方法により実装される第2電子部品とともに、混
載して回路基板への実装を行なうことが可能となる。
According to the third or fourth aspect of the present invention, in the electronic component mounting method for mounting two types of electronic components, a first electronic component and a second electronic component, on a circuit board,
After mounting the second electronic component on the circuit board by the ultrasonic mounting method described in the effect of the first aspect, the first electronic component is mounted by the local reflow mounting method in the effect of the first aspect. By mounting on the circuit board, when the ultrasonic mounting method is performed, other electronic components are not yet mounted on the circuit board. Therefore, the first vibration caused by the ultrasonic vibration generated during the ultrasonic mounting is performed. It is possible to eliminate the need to consider the influence on the joint portion between the electronic component and the circuit board. Therefore,
An electronic component in which the first electronic component needs to consider an influence on vibration, for example, an influence that the bonding portion is destroyed by ultrasonic vibration or the bonding strength of the bonding portion is reduced. In this case, the second electronic component mounted by the ultrasonic mounting method can be mixed and mounted on the circuit board.

【0074】本発明の上記第5態様によれば、第1電子
部品と第2電子部品の2つの種類の電子部品を回路基板
へ実装する電子部品の実装方法において、上記第1態様
又は第2態様による効果に付け加えて、さらに、1枚の
回路基板に実装される第1電子部品が多数あるような場
合において、上記各第1電子部品を上記回路基板に仮接
合した後、一括して加熱することにより、接合材を溶融
させて、上記各第1電子部品を上記回路基板上に本接合
して装着することにより、各第1電子部品の上記回路基
板への実装コストを抑えることが可能となり、これによ
り、上記第1態様による効果と併せて、半田の加熱溶融
により実装される第1電子部品の実装コストを抑えなが
ら、例えば、その実装時に防熱環境又は防水環境等が要
求されるような第2電子部品を上記超音波実装方法によ
り、上記第1電子部品とともに回路基板へ混載して実装
することが可能となる。
According to the fifth aspect of the present invention, there is provided an electronic component mounting method for mounting two types of electronic components, a first electronic component and a second electronic component, on a circuit board. In addition to the effect of the aspect, when there are a large number of first electronic components mounted on one circuit board, the first electronic components are temporarily joined to the circuit board and then collectively heated. By melting the bonding material and permanently bonding and mounting the first electronic components on the circuit board, it is possible to suppress the mounting cost of the first electronic components on the circuit board. Therefore, in addition to the effect of the first aspect, while suppressing the mounting cost of the first electronic component mounted by heating and melting the solder, for example, a heatproof environment or a waterproof environment is required at the time of mounting. Na first Electronic components by the ultrasonic mounting process, it is possible to mount and mixed to the circuit board with the first electronic component.

【0075】本発明の上記第6態様から第9態様によれ
ば、従来の電子部品の実装方法において用いられている
接合材の供給方法、接合材の構成材料、又はフラックス
の供給方法を適用することができ、汎用性のある電子部
品の実装方法を提供することが可能となる。
According to the sixth to ninth aspects of the present invention, the joining material supply method, the joining material constituent material, or the flux supply method used in the conventional electronic component mounting method is applied. Therefore, it is possible to provide a mounting method of electronic components having general versatility.

【0076】本発明の上記第10態様によれば、上記第
2電子部品がICチップ部品であり、上記第1電子部品
が上記ICチップ部品以外の電子部品であるような場合
に、これら各電子部品を回路基板へ上記各態様により実
装する場合において、上記各態様による効果を得ること
が可能となる。
According to the tenth aspect of the present invention, when the second electronic component is an IC chip component and the first electronic component is an electronic component other than the IC chip component, each of these electronic components is used. When the component is mounted on the circuit board according to each of the above aspects, the effects of each of the above aspects can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第1の実施形態にかかる電子部品の
実装方法を行う電子部品実装装置の全体斜視図である。
FIG. 1 is an overall perspective view of an electronic component mounting apparatus that carries out an electronic component mounting method according to a first embodiment of the present invention.

【図2】 上記第1の実施形態にかかる電子部品の実装
方法を示す図であり、(a)は回路基板の断面図、
(b)は汎用電子部品を回路基板に位置合わせした状態
における汎用電子部品と回路基板の断面図、(c)は溶
融された半田を冷却している状態における汎用電子部品
と回路基板の断面図、(d)は汎用電子部品が実装され
た状態における回路基板の断面図である。
FIG. 2 is a diagram showing a method of mounting the electronic component according to the first embodiment, in which (a) is a cross-sectional view of a circuit board;
(B) is a sectional view of the general-purpose electronic component and the circuit board in a state where the general-purpose electronic component is aligned with the circuit board, and (c) is a sectional view of the general-purpose electronic component and the circuit board in a state in which the melted solder is being cooled. , (D) are cross-sectional views of the circuit board in the state where general-purpose electronic components are mounted.

【図3】 上記第1の実施形態にかかる電子部品の実装
方法を示す図であり、(e)はICチップを回路基板に
位置合わせした状態における汎用電子部品、ICチップ
及び回路基板の断面図、(f)は超音波振動付与時にお
ける汎用電子部品、ICチップ及び回路基板の断面図、
(g)はICチップが実装された状態における汎用電子
部品、ICチップ及び回路基板の断面図である。
FIG. 3 is a diagram showing a mounting method of an electronic component according to the first embodiment, and FIG. 3 (e) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit substrate in a state where an IC chip is aligned with a circuit substrate. , (F) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit board when ultrasonic vibration is applied,
(G) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit board in a state where an IC chip is mounted.

【図4】 本発明の第3の実施形態にかかる電子部品の
実装方法を示す図であり、(a)は回路基板の断面図、
(b)は汎用電子部品を回路基板に仮接合した場合にお
ける汎用電子部品と回路基板の断面図、(c)は一括リ
フロー時における汎用電子部品と回路基板の断面図、
(d)は汎用電子部品が実装された状態における回路基
板の断面図である。
FIG. 4 is a diagram showing a method of mounting an electronic component according to a third embodiment of the present invention, in which (a) is a cross-sectional view of a circuit board;
(B) is a cross-sectional view of the general-purpose electronic component and the circuit board when the general-purpose electronic component is temporarily joined to the circuit board, (c) is a cross-sectional view of the general-purpose electronic component and the circuit board during collective reflow,
(D) is sectional drawing of the circuit board in the state by which the general purpose electronic component was mounted.

【図5】 上記第3の実施形態にかかる電子部品の実装
方法を示す図であり、(e)はICチップを回路基板に
位置合わせした状態における汎用電子部品、ICチップ
及び回路基板の断面図、(f)は超音波振動付与時にお
ける汎用電子部品、ICチップ及び回路基板の断面図、
(g)はICチップが実装された状態における汎用電子
部品、ICチップ及び回路基板の断面図である。
FIG. 5 is a diagram showing a mounting method of an electronic component according to the third embodiment, and FIG. 5 (e) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit substrate in a state where an IC chip is aligned with a circuit substrate. , (F) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit board when ultrasonic vibration is applied,
(G) is a cross-sectional view of a general-purpose electronic component, an IC chip and a circuit board in a state where an IC chip is mounted.

【符号の説明】[Explanation of symbols]

1…汎用電子部品、1a…電極、1b…半田バンプ、3
…ヘッドツール、4…回路基板、4a…パッド、4b…
パッド、5…パーツトレー、6…スライドベース、7…
ステージ、9…制御部、11…吸着ノズル、12…セラ
ミックヒータ、19…冷却ブローノズル、21…昇降
部、22…X方向移動機構、23…Y方向移動機構、2
5…吸着反転部、26…回路基板供給部、27…ローダ
ー、28…回路基板排出部、31…ICチップ、31a
…パッド、31b…Auバンプ、33…超音波ツール、
35…ICチップ供給部、36…スライドベース、41
…吸着ノズル、42…超音波振動部、51…昇降部、5
3…Y方向移動機構、63…ヘッドツール、64…回路
基板、64a…パッド、64b…パッド、71…吸着ノ
ズル、101…電子部品実装装置。
1 ... General-purpose electronic component, 1a ... Electrode, 1b ... Solder bump, 3
... head tool, 4 ... circuit board, 4a ... pad, 4b ...
Pads, 5 ... Parts tray, 6 ... Slide base, 7 ...
Stage, 9 ... Control unit, 11 ... Adsorption nozzle, 12 ... Ceramic heater, 19 ... Cooling blow nozzle, 21 ... Lifting unit, 22 ... X-direction moving mechanism, 23 ... Y-direction moving mechanism, 2
5 ... adsorption reversal unit, 26 ... circuit board supply unit, 27 ... loader, 28 ... circuit board discharge unit, 31 ... IC chip, 31a
… Pads, 31b… Au bumps, 33… Ultrasonic tools,
35 ... IC chip supply unit, 36 ... Slide base, 41
... Suction nozzle, 42 ... Ultrasonic vibrating section, 51 ... Elevating section, 5
3 ... Y-direction moving mechanism, 63 ... Head tool, 64 ... Circuit board, 64a ... Pad, 64b ... Pad, 71 ... Suction nozzle, 101 ... Electronic component mounting apparatus.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 南谷 昌三 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 山田 晃 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 前 貴晴 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 中田 幹也 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 5E319 AA03 AB05 BB04 CC11 CC33 CC47 CC49 GG11 5F044 LL01 LL15 PP15    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shozo Minatani             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Akira Yamada             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Takaharu Mae             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Mikiya Nakata             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5E319 AA03 AB05 BB04 CC11 CC33                       CC47 CC49 GG11                 5F044 LL01 LL15 PP15

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 第1電子部品(1)の電極(1a)を回
路基板(4)の電極(4a)上に接合材(1b)を介在
させて当接させ、 上記接合材(1b)を加熱溶融して上記第1電子部品
(1)の上記電極(1a)を上記回路基板(4)の上記
電極(4a)上に上記接合材(1b)を介在させて装着
し、 その後、上記第1電子部品(1)が装着された上記回路
基板(4)の電極(4b)に、第2電子部品(31)の
電極(31a)を接合材(31b)を介在させて当接さ
せ、 上記接合材(31b)に超音波振動を付与して上記第2
電子部品(31)の上記電極(31a)を上記回路基板
(4)の上記電極(4b)上に上記接合材(31b)を
介在させて装着することを特徴とする電子部品の実装方
法。
1. An electrode (1a) of a first electronic component (1) is brought into contact with an electrode (4a) of a circuit board (4) with a bonding material (1b) interposed therebetween, and the bonding material (1b) is attached. After heating and melting, the electrode (1a) of the first electronic component (1) is mounted on the electrode (4a) of the circuit board (4) with the bonding material (1b) interposed, and then the The electrode (4a) of the circuit board (4) on which the first electronic component (1) is mounted is brought into contact with the electrode (31a) of the second electronic component (31) with the bonding material (31b) interposed therebetween. By applying ultrasonic vibration to the bonding material (31b), the second
A method of mounting an electronic component, comprising mounting the electrode (31a) of the electronic component (31) on the electrode (4b) of the circuit board (4) with the bonding material (31b) interposed.
【請求項2】 第1電子部品(1)と第2電子部品(3
1)の2つの種類の電子部品を回路基板(4)へ実装す
る電子部品の実装方法において、上記第1電子部品
(1)は接合材(1b)を加熱溶融させることにより上
記回路基板(4)上に実装される電子部品であり、上記
第2電子部品(31)は接合材(31b)に超音波振動
を付与することにより上記回路基板(4)上に実装され
る電子部品であって、 上記第1電子部品(1)を部品保持部材(3)で吸着保
持し、 上記第1電子部品(1)の複数の電極(1a)と上記回
路基板(4)の複数の電極(4a)とを上記接合材(1
b)を介在させて当接可能なように位置合わせし、 上記第1電子部品(1)を吸着保持したまま上記部品保
持部材(3)を下降させ、上記第1電子部品(1)の上
記各電極(1a)と上記回路基板(4)の上記各電極
(4a)を上記接合材(1b)を介在させて当接させな
がら、上記接合材(1b)を加熱により溶融させて、固
化させることにより、上記第1電子部品(1)の上記各
電極(1a)と上記回路基板(4)の上記各電極(4
a)を上記接合材(1b)を介在させて装着し、 その後、上記第2電子部品(31)を部品保持部材(3
3)で吸着保持し、 上記第2電子部品(31)の複数の電極(31a)と上
記回路基板(4)の複数の電極(4b)とを上記接合材
(31b)を介在させて当接可能なように位置合わせ
し、 上記第2電子部品(31)を吸着保持したまま上記部品
保持部材(33)を下降させ、 上記第2電子部品(31)の上記各電極(31a)と上
記回路基板(4)の上記各電極(4b)を上記接合材
(31b)を介在させて当接させた後、 上記接合材(31b)に超音波振動を付与することによ
り、上記第2電子部品(31)の上記各電極(31a)
と上記回路基板(4)の上記各電極(4b)を上記接合
材(31b)を介在させて装着することを特徴とする電
子部品の実装方法。
2. A first electronic component (1) and a second electronic component (3)
1) In the electronic component mounting method of mounting two types of electronic components on a circuit board (4), the first electronic component (1) heats and melts a bonding material (1b) to form the circuit board (4). ), The second electronic component (31) is an electronic component mounted on the circuit board (4) by applying ultrasonic vibration to the bonding material (31b). And a plurality of electrodes (1a) of the first electronic component (1) and a plurality of electrodes (4a) of the circuit board (4) that hold the first electronic component (1) by a component holding member (3). And the above bonding material (1
b) is interposed so that the first electronic component (1) can be contacted with the first electronic component (1), and the component holding member (3) is lowered while the first electronic component (1) is suction-held. While the electrodes (1a) and the electrodes (4a) of the circuit board (4) are in contact with each other with the bonding material (1b) interposed therebetween, the bonding material (1b) is melted by heating and solidified. As a result, the electrodes (1a) of the first electronic component (1) and the electrodes (4) of the circuit board (4) are
a) is mounted with the joining material (1b) interposed, and then the second electronic component (31) is attached to the component holding member (3).
3) Adsorbing and holding, and contacting the plurality of electrodes (31a) of the second electronic component (31) and the plurality of electrodes (4b) of the circuit board (4) with the bonding material (31b) interposed. The components are aligned as much as possible, the component holding member (33) is lowered while the second electronic component (31) is suction-held, and the electrodes (31a) and the circuit of the second electronic component (31) are arranged. The electrodes (4b) of the substrate (4) are brought into contact with each other with the bonding material (31b) interposed therebetween, and then ultrasonic vibration is applied to the bonding material (31b), whereby the second electronic component ( 31) Each of the electrodes (31a)
And a method for mounting an electronic component, wherein the electrodes (4b) of the circuit board (4) are mounted with the bonding material (31b) interposed therebetween.
【請求項3】 第2電子部品(31)の電極(31a)
を回路基板(4)の電極(4b)上に接合材(31b)
を介在させて当接させ、 上記接合材(31b)に超音波振動を付与して上記第2
電子部品(31)の上記電極(31a)を上記回路基板
(4)の上記電極(4b)上に上記接合材(31b)を
介在させて装着し、 その後、上記第2電子部品(31)が装着された上記回
路基板(4)の電極(4a)に、第1電子部品(1)の
電極(1a)を接合材(1b)を介在させて当接させ、 上記接合材(1b)を加熱溶融して上記第1電子部品
(1)の上記電極(1a)を上記回路基板(4)の上記
電極(4a)上に上記接合材(1b)を介在させて装着
することを特徴とする電子部品の実装方法。
3. The electrode (31a) of the second electronic component (31)
The bonding material (31b) on the electrode (4b) of the circuit board (4)
And abutting them, and applying ultrasonic vibrations to the bonding material (31b),
The electrode (31a) of the electronic component (31) is mounted on the electrode (4b) of the circuit board (4) with the bonding material (31b) interposed, and then the second electronic component (31) is attached. The electrode (4a) of the mounted circuit board (4) is brought into contact with the electrode (1a) of the first electronic component (1) with the bonding material (1b) interposed therebetween, and the bonding material (1b) is heated. An electron characterized by melting and mounting the electrode (1a) of the first electronic component (1) on the electrode (4a) of the circuit board (4) with the bonding material (1b) interposed. How to mount parts.
【請求項4】 第1電子部品(1)と第2電子部品(3
1)の2つの種類の電子部品を回路基板(4)へ実装す
る電子部品の実装方法において、上記第1電子部品
(1)は接合材(1b)を加熱溶融させることにより上
記回路基板(4)上に実装される電子部品であり、上記
第2電子部品(31)は接合材(31b)に超音波振動
を付与することにより上記回路基板(4)上に実装され
る電子部品であって、 上記第2電子部品(31)を部品保持部材(33)で吸
着保持し、 上記第2電子部品(31)の複数の電極(31a)と上
記回路基板(4)の複数の電極(4b)とを上記接合材
(31b)を介在させて当接可能なように位置合わせ
し、 上記第2電子部品(31)を吸着保持したまま上記部品
保持部材(33)を下降させ、 上記第2電子部品(31)の上記各電極(31a)と上
記回路基板(4)の上記各電極(4b)を上記接合材
(31b)を介在させて当接させた後、 上記接合材(31b)に超音波振動を付与することによ
り、上記第2電子部品(31)の上記各電極(31a)
と上記回路基板(4)の上記各電極(4b)を上記接合
材(31b)を介在させて装着し、 その後、上記第1電子部品(1)を部品保持部材(3)
で吸着保持し、 上記第1電子部品(1)の複数の電極(1a)と上記回
路基板(4)の複数の電極(4a)とを上記接合材(1
b)を介在させて当接可能なように位置合わせし、 上記第1電子部品(1)を吸着保持したまま上記部品保
持部材(3)を下降させ、上記第1電子部品(1)の上
記各電極(1a)と上記回路基板(4)の上記各電極
(4a)を上記接合材(1b)を介在させて当接させな
がら、上記接合材(1b)を加熱により溶融させて、固
化させることにより、上記第1電子部品(1)の上記各
電極(1a)と上記回路基板(4)の上記各電極(4
a)を上記接合材(1b)を介在させて装着することを
特徴とする電子部品の実装方法。
4. A first electronic component (1) and a second electronic component (3)
1) In the electronic component mounting method of mounting two types of electronic components on a circuit board (4), the first electronic component (1) heats and melts a bonding material (1b) to form the circuit board (4). ), The second electronic component (31) is an electronic component mounted on the circuit board (4) by applying ultrasonic vibration to the bonding material (31b). The second electronic component (31) is suction-held by a component holding member (33), and the plurality of electrodes (31a) of the second electronic component (31) and the plurality of electrodes (4b) of the circuit board (4). Are aligned so that they can come into contact with each other with the bonding material (31b) interposed therebetween, and the component holding member (33) is lowered while the second electronic component (31) is suction-held, and the second electronic component The electrodes (31a) of the component (31) and the circuit board The electrodes (4b) of the plate (4) are brought into contact with each other with the bonding material (31b) interposed therebetween, and then ultrasonic vibration is applied to the bonding material (31b), whereby the second electronic component ( 31) Each of the electrodes (31a)
And the electrodes (4b) of the circuit board (4) are mounted with the bonding material (31b) interposed therebetween, and then the first electronic component (1) is attached to the component holding member (3).
The plurality of electrodes (1a) of the first electronic component (1) and the plurality of electrodes (4a) of the circuit board (4) are adsorbed and held by the bonding material (1).
b) is interposed so that the first electronic component (1) can be contacted with the first electronic component (1), and the component holding member (3) is lowered while the first electronic component (1) is suction-held. While the electrodes (1a) and the electrodes (4a) of the circuit board (4) are in contact with each other with the bonding material (1b) interposed therebetween, the bonding material (1b) is melted by heating and solidified. As a result, the electrodes (1a) of the first electronic component (1) and the electrodes (4) of the circuit board (4) are
A method of mounting an electronic component, characterized in that (a) is mounted with the bonding material (1b) interposed therebetween.
【請求項5】 第1電子部品(1)と第2電子部品(3
1)の2つの種類の電子部品を回路基板(64)へ実装
する電子部品の実装方法において、上記第1電子部品
(1)は接合材(1b)を加熱溶融させることにより上
記回路基板(64)上に実装される電子部品であり、上
記第2電子部品(31)は接合材(31b)に超音波振
動を付与することにより上記回路基板(64)上に実装
される電子部品であって、 上記第1電子部品(1)を部品保持部材(63)で吸着
保持し、 上記第1電子部品(1)の複数の電極(1a)と上記回
路基板(64)の複数の電極(64a)とを上記接合材
(1b)を介在させて接合可能なように位置合わせし、 上記第1電子部品(1)を吸着保持したまま上記部品保
持部材(63)を下降させ、上記第1電子部品(1)の
上記各電極(1a)と上記回路基板(64)の上記各電
極(64a)を上記接合材(1b)を介在させて加圧し
て仮接合を行った後、 上記仮接合された上記第1電子部品(1)の上記各電極
(1a)と上記回路基板(64)の上記各電極(64
a)との間の上記各接合材(1b)を加熱して溶融し、
冷却して固化させることにより本接合を行い、上記第1
電子部品(1)の上記各電極(1a)と上記回路基板
(64)の上記各電極(64a)を上記接合材(1b)
を介在させて装着し、 その後、上記第2電子部品(31)を部品保持部材(3
3)で吸着保持し、 上記第2電子部品(31)の複数の電極(31a)と上
記回路基板(64)の複数の電極(64b)とを上記接
合材(31b)を介在させて当接可能なように位置合わ
せし、 上記第2電子部品(31)を吸着保持したまま上記部品
保持部材(33)を下降させ、 上記第2電子部品(31)の上記各電極(31a)と上
記回路基板(64)の上記各電極(64b)を上記接合
材(31b)を介在させて当接させた後、 上記接合材(31b)に超音波振動を付与することによ
り、上記第2電子部品(31)の上記各電極(31a)
と上記回路基板(64)の上記各電極(64b)に上記
接合材(31b)を介在させて装着することを特徴とす
る電子部品の実装方法。
5. A first electronic component (1) and a second electronic component (3)
1) In the electronic component mounting method for mounting two types of electronic components on a circuit board (64), the first electronic component (1) heats and melts the bonding material (1b) to form the circuit board (64). ), The second electronic component (31) is an electronic component mounted on the circuit board (64) by applying ultrasonic vibration to the bonding material (31b). A plurality of electrodes (1a) of the first electronic component (1) and a plurality of electrodes (64a) of the circuit board (64), the first electronic component (1) being sucked and held by a component holding member (63). Are aligned so that they can be joined with the joining material (1b) interposed, and the component holding member (63) is lowered while the first electronic component (1) is suction-held, and the first electronic component is (1) Each of the electrodes (1a) and the circuit board ( After each electrode (64a) of 4) is pressure-bonded by interposing the bonding material (1b) to perform temporary bonding, each electrode (1a) of the temporarily bonded first electronic component (1). And the electrodes (64) of the circuit board (64).
Each of the above-mentioned joining materials (1b) between a) is heated and melted,
By carrying out the main joining by cooling and solidifying,
The electrodes (1a) of the electronic component (1) and the electrodes (64a) of the circuit board (64) are connected to each other by the bonding material (1b).
Then, the second electronic component (31) is mounted on the component holding member (3).
3) Adsorbed and held by the second electronic component (31) and contacted with the plurality of electrodes (31a) of the second electronic component (31) and the plurality of electrodes (64b) of the circuit board (64) with the bonding material (31b) interposed therebetween. The components are aligned as much as possible, the component holding member (33) is lowered while the second electronic component (31) is suction-held, and the electrodes (31a) and the circuit of the second electronic component (31) are arranged. The electrodes (64b) of the substrate (64) are brought into contact with each other with the bonding material (31b) interposed therebetween, and then ultrasonic vibration is applied to the bonding material (31b), whereby the second electronic component ( 31) Each of the electrodes (31a)
And a method for mounting an electronic component, wherein the circuit board (64) is mounted on the electrodes (64b) of the circuit board (64) with the bonding material (31b) interposed therebetween.
【請求項6】 介在させることにより上記第1電子部品
(1)の上記各電極(1a)を上記回路基板(4、6
4)の上記各電極(4a、64a)に装着する上記接合
材(1b)は、上記第1電子部品(1)の上記各電極
(1a)上、又は上記回路基板(4、64)の上記各電
極(4a、64a)上の少なくともいずれか一方に予め
供給されており、 介在させることにより上記第2電子部品(31)の上記
各電極(31a)を上記回路基板(4、64)の上記各
電極(4b、64b)に装着する上記接合材(31b)
は、上記第2電子部品(31)の上記各電極(31a)
上、又は上記回路基板(4、64)の上記各電極(4
b、64b)上の少なくともいずれか一方に予め供給さ
れている請求項1から5のいずれか1つに記載の電子部
品の実装方法。
6. The electrodes (1a) of the first electronic component (1) are connected to each other by interposing the circuit board (4, 6).
The bonding material (1b) attached to the electrodes (4a, 64a) of 4) is provided on the electrodes (1a) of the first electronic component (1) or on the circuit board (4, 64). The electrode (31a) of the second electronic component (31) is supplied to at least one of the electrodes (4a, 64a) in advance, and the electrodes (31a) of the second electronic component (31) are connected to the circuit board (4, 64). The bonding material (31b) attached to each electrode (4b, 64b)
Are the electrodes (31a) of the second electronic component (31).
The electrodes (4) above or on the circuit board (4, 64)
b, 64b), the electronic component mounting method according to any one of claims 1 to 5, which is previously supplied to at least one of them.
【請求項7】 上記接合材(1b、31b)が半田であ
る請求項1から6のいずれか1つに記載の電子部品の実
装方法。
7. The mounting method for an electronic component according to claim 1, wherein the joining material (1b, 31b) is solder.
【請求項8】 上記第1電子部品(1)の上記各電極
(1a)上、又は上記回路基板(4、64)の上記各電
極(4a、64a)上、又は上記接合材(1b)に予め
フラックスが供給されている請求項1から7のいずれか
1つに記載の電子部品の実装方法。
8. The electrode (1a) of the first electronic component (1), the electrode (4a, 64a) of the circuit board (4, 64), or the bonding material (1b). The electronic component mounting method according to claim 1, wherein the flux is supplied in advance.
【請求項9】 介在させることにより上記第1電子部品
(1)の上記各電極(1a)を上記回路基板(4、6
4)の上記各電極(4a、64a)に装着する上記接合
材(1b)が、上記第1電子部品(1)の上記各電極
(1a)に形成された半田バンプ(1b)、又は、上記
第1電子部品(1)の上記各電極(1a)に形成された
半田バンプ(1b)及び上記回路基板(4、64)の上
記各電極(4a、64a)に形成された半田部であり、 介在させることにより上記第2電子部品(31)の上記
各電極(31a)を上記回路基板(4、64)の上記各
電極(4b、64b)に装着する上記接合材(31b)
が、上記第2電子部品(31)の上記各電極(31a)
に形成されたAuバンプ(31b)である請求項1から
6のいずれか1つ又は請求項8に記載の電子部品の実装
方法。
9. The circuit board (4, 6) is provided with the electrodes (1a) of the first electronic component (1) by interposing them.
4) The bonding material (1b) to be attached to the electrodes (4a, 64a) of the solder bumps (1b) formed on the electrodes (1a) of the first electronic component (1), or Solder bumps (1b) formed on the electrodes (1a) of the first electronic component (1) and solder portions formed on the electrodes (4a, 64a) of the circuit board (4, 64), The bonding material (31b) for mounting the electrodes (31a) of the second electronic component (31) to the electrodes (4b, 64b) of the circuit board (4, 64) by interposing them.
Is the electrodes (31a) of the second electronic component (31)
9. The electronic component mounting method according to claim 1, wherein the electronic bump is an Au bump (31b) formed on the substrate.
【請求項10】 上記第2電子部品(31)はICチッ
プ部品であり、上記第1電子部品(1)は上記ICチッ
プ部品以外の電子部品である請求項1から9のいずれか
1つに記載の電子部品の実装方法。
10. The electronic device according to claim 1, wherein the second electronic component (31) is an IC chip component, and the first electronic component (1) is an electronic component other than the IC chip component. How to mount the described electronic components.
JP2001243932A 2001-08-10 2001-08-10 Method for mounting electronic component Pending JP2003060339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
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Family

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006303357A (en) * 2005-04-25 2006-11-02 Ricoh Microelectronics Co Ltd Packaging method of electronic component
US7921551B2 (en) 2005-03-24 2011-04-12 Panasonic Corporation Electronic component mounting method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04275490A (en) * 1991-03-04 1992-10-01 Matsushita Electric Ind Co Ltd Method for connecting electronic component
JPH05235531A (en) * 1992-02-24 1993-09-10 Matsushita Electric Ind Co Ltd Mounting method of electronic parts and mounting equipment
JP2000311923A (en) * 1999-02-22 2000-11-07 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
JP2001168510A (en) * 1999-12-06 2001-06-22 Matsushita Electric Ind Co Ltd Method of mounting electronic parts

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04275490A (en) * 1991-03-04 1992-10-01 Matsushita Electric Ind Co Ltd Method for connecting electronic component
JPH05235531A (en) * 1992-02-24 1993-09-10 Matsushita Electric Ind Co Ltd Mounting method of electronic parts and mounting equipment
JP2000311923A (en) * 1999-02-22 2000-11-07 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
JP2001168510A (en) * 1999-12-06 2001-06-22 Matsushita Electric Ind Co Ltd Method of mounting electronic parts

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7921551B2 (en) 2005-03-24 2011-04-12 Panasonic Corporation Electronic component mounting method
JP2006303357A (en) * 2005-04-25 2006-11-02 Ricoh Microelectronics Co Ltd Packaging method of electronic component

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