JP2003050105A - Target sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a target sensor for positioning more quickly and accurately, in the installation of microparts that require high position accuracy. SOLUTION: A probe 14 bundling a plurality of light transmission/reception elements 32 is provided in a positioning part. The transmission/reception elements 32 irradiate on an object surface provide with a reflection target, having different reflectivity from the surroundings. A light detection part detects the intensity of reflection light of irradiation for every different region on the object surface. Based on the intensity of reflection light for every region, relative position or posture of the positioning part to the target on the object surface is detected, and positioning control is conducted by a controller. The irradiation region on the object surface is constituted relatively variablly positioning for the positioning part.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a target sensor for controlling the position or orientation of a position-aligned portion of an industrial robot such as a component mounting robot.

[0002]

2. Description of the Related Art IC to be Solved by the Invention
The mounting of minute components such as the above on a printed circuit board is performed by a component mounting robot provided with a drive mechanism for moving the position-adjusted portion to a desired position. Here, a conventional component mounting robot will be described with reference to FIG.

The component mounting robot 50 is provided with a robot arm 52 and a lifter 54 as movable parts, which are driven by an AC servomotor 56 as a driving mechanism, and a hand 60 holding a component 58 is mounted at a predetermined target position (mounting). Position). A CCD camera 62 for position alignment is installed on the hand 60. The component mounting robot 50 analyzes the image captured by the CCD camera 62 to calculate the deviation from the target position, controls the drive mechanism to correct the deviation, and directs the component 58 to the predetermined target position. To transport. At this time, in order to prevent the components 58 from vibrating, more precise control of the AC servo motor 56 may be desired so as to suppress the vibration of the robot arm 52 during the transportation.

Since high positioning accuracy is required for mounting components on a high-density mounting board or a high-frequency board, it is necessary to set the resolution higher when positioning is performed by the image of the CCD camera. . However, the higher the resolution is set, the longer it takes to process the image, and high responsiveness cannot be obtained.
This leads to a reduction in the throughput of component mounting and also makes it difficult to realize control for suppressing vibration of the robot arm.

[0005]

In view of the above problems, the inventors have invented a sensor suitable for mounting such components.
The target sensor according to the present invention includes a plurality of light-transmitting / receiving bodies each capable of irradiating light to a target area on a target surface having a reflective target at a position corresponding to the target and receiving reflected light from the target area. A transmission / reception switching unit that connects the transmission / reception body to one of a light emitting unit or a light detection unit to switch irradiation or reception of light in the transmission / reception unit, and at least one of the plurality of transmission / reception units is provided. It is characterized in that another light-transmitting / receiving body corresponding to the target area that partially illuminates the target area of the light-transmitting / receiving body receives the reflected light, and based on the detection result of the light detection unit, the target area for the target is detected. It is a target sensor for acquiring the position or orientation of the alignment unit.

Now, the principle of alignment by the target sensor according to the present invention will be described with reference to FIG. Of the multiple light-transmitting and receiving bodies that the target sensor has,
At least one light transmitter / receiver is selected as the light transmitter / receiver that emits light. The target area (that is, the irradiation area) P of the light transmitter / receiver is irradiated with light from the light emitting unit. further,
A plurality of target areas Q that partially overlap the target area P
The light-transmitting / receiving bodies corresponding to 1 and Q2 are selected as light-receiving / receiving bodies to receive light, and are connected to the photodetector. At this time, the plurality of target areas Q1 and Q2 correspond to the detection areas, but since the light is irradiated to the irradiation area P, the substantial detection areas are the above-mentioned overlapping portions S1 and S2 (upward-right hatching portions). ).

In order to make this target sensor function, a reflection target 30 having a light reflectance (for example, a high light reflectance) different from that of other regions on the target surface is provided at a position corresponding to the target on the detection target surface. To be When the reflective target 30 is captured by the target sensor, for example, when the reflectance of the reflective target 30 is set higher than the surroundings, the reflective target 30 is detected by the detection regions Q1 and Q2.
The larger the area (T1 or T2) included in (or the overlapping portions S1 and S2), the higher the intensity of the light reflected by the detection region. Utilizing such a phenomenon that occurs in the above configuration, the target sensor according to the present invention, based on the reflected light intensity from the plurality of detection regions,
The position of the reflective target with respect to the plurality of detection areas is detected. More specifically, when the reflectance of the reflective target P is set higher than the surroundings in the example of FIG. 11, the areas T1 and T2 of the two detection regions Q1 and Q2 that include the reflective target 30 are included. Since the reflected light intensity from the larger one (that is, Q2) becomes higher, the relative position of the reflective target 30 to these detection regions Q1 and Q2 is acquired based on the reflected light intensity from these two detection regions Q1 and Q2. can do. Furthermore, by considering the positional relationship between the alignment target and the reflective target and the positional relationship between the aligned portion and the target sensor, it becomes easy to align the aligned portion with the target. You can understand.

In the target sensor according to the present invention, C
Compared with the conventional configuration using a CD camera, since the image processing for a large number of pixels is not required, the responsiveness can be remarkably improved, so that it is possible to mount a minute component that requires high positional accuracy. However, the throughput can be improved, and the control can be performed while suppressing the vibration of the movable portion. Further, the target sensor according to the present invention can be said to be a sensor including an illumination mechanism. Therefore, light suitable for detection can be used as the irradiation light. For example, if the irradiation light is modulated (for example, phase modulation), the influence of ambient light (noise) can be eliminated and the detection accuracy can be improved.

Further, the target sensor according to the present invention is provided with a light-transmitting / light-receiving switching section, and any light-transmitting / light-receiving body of the plurality of light-transmitting / light-receiving bodies emits light (and light-transmitting / light-receiving which receives light). Body) can be selected as. For example, in the early stages of alignment, it is desirable to be able to capture the reflective target in a larger area on the target surface.
According to the above configuration, the irradiation area can be scanned in a wider area on the target surface without moving the target sensor itself (or the aligned portion itself to which the target sensor is attached). The reflective target can be captured more quickly and more accurately. This is because the reflective target is formed in a linear shape,
It is particularly effective when the reflective target is tracked along a line by the target sensor.

Further, in the present invention, it is preferable that a plurality of overlapping portions of the target areas on the same target surface have substantially the same area. By doing so, even when the irradiation area and the detection area are switched by switching the light transmission / reception switching unit, the same reference can be used for comparison,
The detection result can be easily handled.

Further, in the present invention, it is preferable that the combination of the light transmitting / receiving body that emits light and the light transmitting / receiving body that receives the reflected light is switched according to the detection result of the photodetector. By doing so, an irradiation region (and a detection region) more suitable for the detection result can be selected, so that the reflection target can be captured and aligned more quickly.

Further, according to the present invention, it is preferable that the combination of the light-transmitting / receiving body that emits light and the light-receiving / transmitting body that receives the reflected light is switched depending on the distance between the light-transmitting / receiving body and the target surface.
When the optical path width of the irradiation light from the light-transmitting / receiving body expands with the progress of the configuration of the optical system, the size and the positional relationship of the target area change depending on the distance between the light-transmitting / receiving body and the target surface. This is because in the situation where the distance between the target sensor and the detection target surface changes, such as when the aligned portion approaches from above the target (detection target surface), the area and positional relationship of the irradiation region and the detection region are Since it changes according to the distance, the method of the present invention that substantially detects the reflective target in the overlapping portion of the regions causes a problem in terms of detection accuracy and time until completion of detection. However, according to the above configuration, it is possible to select a suitable combination according to the distance even in such a case, so that it is possible to capture and align the reflective target more accurately and more quickly. .

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a component mounting robot 12 having a target sensor 10 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing the overall configuration of the component mounting robot 12, FIG. 2 is a perspective view showing the configuration of a probe 14 of a target sensor 10 and a target region (irradiation region and detection region), and FIG. 3 is an irradiation region and detection. FIG. 4 is a plan view showing a region, and FIG. 4 is a block diagram of the component mounting robot 12.

As shown in FIG. 1, the component mounting robot 12
Is a movable part such as a robot arm 16 and a lifter 1.
8 and a fine movement mechanism 19 and the like, which are driven by a drive mechanism (for example, an AC servomotor) 20
The hand 24 holding 2 is set to a predetermined target position (mounting position)
Transport to. That is, in the present embodiment, the hand 24 corresponds to the position alignment portion. The component mounting robot 12 according to this embodiment includes a fine movement mechanism 19 for moving the hand 24 with higher accuracy between the robot arm 16 and the hand 24. The fine movement mechanism 19 includes a first stage 19a that can be displaced in two directions by a piezoelectric element.
And a second stage 19b, which realizes more accurate alignment and suppression of microvibration than an AC servomotor or the like.

At the tip of the movable part (positioned part; second stage 19b or hand 24 in this embodiment),
The probe 1 of the target sensor 10 according to the present embodiment
4 is fixed. On the target surface 28, a reflective target 30 having a light reflectance different from that of the surrounding surface (for example, high) is provided. The probe 14 emits light toward the target surface 28,
The reflected light from the target surface 28 is received.

As shown in FIG. 2, the probe 14 is constructed by bundling a plurality of rod-shaped light-transmitting / receiving bodies 32 (32a to 32g). More specifically, for example, the probe 14 is configured to include a plurality of light-transmitting / receiving bodies 32 formed of optical fibers having the same specifications (shape and performance).
Six transmitters / receivers 32b to 32 are arranged at intervals of 60 ° around a.
g are evenly distributed. In this probe 14, three arbitrary light-transmitting / receiving bodies 32 are arranged at the positions of the vertices of an equilateral triangle. Further, in the present embodiment, the light-transmitting / receiving bodies 32 are arranged such that the light-transmitting / receiving surfaces at the tip end portions thereof have the same height.

As shown in FIG. 3, a plurality of light-transmitting / receiving bodies 32 are provided.
Are irradiation areas A (= target areas;
Light is irradiated toward Aa to Ag). This irradiation area A
Is a range where light is radiated on the target surface 28 of light, and the boundary line shows a line which is almost the minimum limit intensity of light that can be detected by a light detection unit (described later). Further, each of the light-transmitting / receiving bodies 32 can receive the reflected light from the detection area A with the irradiation area A as the detection area A. In the present embodiment, the irradiation areas A are all formed in a circular shape having the same shape and area, and the distances between the adjacent irradiation areas A are all equal. Irradiation areas A adjacent to each other partially overlap each other. Therefore, all overlapping portions have the same shape and area.

Here, the setting of the sizes of the reflection target 30 and the irradiation area A will be described. Now, light is emitted from the light transmitting / receiving body 32a located at the center, and the light transmitting / receiving body 3 around the light emitting / receiving body 32a is surrounded.
It is assumed that the reflected light is received from 2b to 32g. In this case, the area Aa becomes the irradiation area, and the areas Ab to Ag become the detection areas. The detection areas Ab to Ag detect the reflected light from the circular areas Ab to Ag, respectively, but since the irradiation light that is the source of the reflected light is irradiated only to the irradiation area Aa, each of the detection areas Ab is eventually detected. It is possible to detect the light intensity only in a portion (hereinafter, referred to as a region B) where ~ Ag and the irradiation region Aa overlap each other. Therefore, for each region B that is a portion where the irradiation region Aa and the detection regions Ab to Ag overlap, each part (for example, the specifications of the light-transmitting / receiving body 32, or the target) so that the reflection target 30 is included in a part thereof. It is necessary to set the distance between the surface 28 and the light-transmitting / receiving body 32). Because area B
If the reflective target 30 is not included in the area B, the reflected light from the reflective target 30 cannot be detected in the area B, and conversely, if the entire area B is included in the reflective target 30, Even if the reflection target 30 moves relative to this area B, this movement is
This is because it cannot be grasped as a change in the intensity of the reflected light at. Therefore, in the example of FIG. 3 (and FIG. 2), the diameter of the reflection target 30 is set to be smaller than the diameter of the irradiation area Aa and larger than the diameter of the inscribed circle C of the inspection areas Ab to Ag. There is. By doing so, the deviation in each direction can be detected as a difference in the intensity of the reflected light with respect to each of the inspection areas Ab to Ag. Then, in this case, the position-aligned portion is provided with each of the inspection areas Ab to A
This means that the portion of g is shifted in the direction of the inspection area A where the reflected light intensity is low. By comparing the reflected light intensities of the inspection areas Ab to Ag, it is possible to calculate the shift amount or the correction amount for alignment.

As shown in FIG. 4, the target sensor 10
Is a plurality of light-transmitting / receiving bodies 32 capable of irradiating the target surface with light and receiving reflected light from the target surface;
2, a light emitting portion (for example, a light emitting diode) 34 that generates light to be emitted from 2, a plurality of light detecting portions (for example, photodiodes) 36 that detect the light received by the light transmitting / receiving body 32, and a light emitting portion for the light transmitting / receiving body 32. 34 or a light detection unit 36, and a light transmission / reception switching unit 38 that switches irradiation or reception of light in the light transmission / reception body 32.

The voltage signal corresponding to the intensity of the detection light output from the photodetection section 36 is amplified by the amplification circuit 40, and the A / D
After being converted from an analog signal to a digital signal by the conversion unit 42, it is input to the control unit (eg CPU) 44. The control unit 44 detects a deviation of the position-adjusted portion from the target position or the target posture based on the detection results of the plurality of light detection units 36, and a drive mechanism (for example, the AC servo motor 20 [FIG. 1] to correct the deviation. ] Or the piezoelectric element of the fine movement mechanism) is controlled. Further, the control unit 44 controls the drive circuit 48 of the light emitting unit 34 via the D / A conversion unit 46,
The light emission from the light emitting unit 34 is controlled. The control unit 44
Through the switching unit 49, the A / D conversion unit 42 or the D / A
It is selectively connected to either one of the conversion units 46.

Here, switching of irradiation / reception of the light transmitting / receiving body 32 by the light transmitting / receiving switching unit 38 will be further described with reference to FIGS. 5 and 6. FIG. 5 is a diagram showing the movement of the target sensor 10 along the linear reflection target 30. FIG. 6 is an explanatory diagram showing an example of switching between the irradiation area and the detection area.

As shown in FIG. 5A, the reflective target 3
When 0 is linear, it is preferable that the central light-transmitting / receiving body 32a is for irradiation and the other light-transmitting / receiving bodies 32b to 32g are for receiving. That is, the area Aa (upper right hatching portion) corresponding to the light transmitting / receiving body 32a is the irradiation area, and the areas Ab to Ag around the area are the detection areas. In this case, the substantial detection area is the area D (upper left hatching portion). The control unit 44 compares the amount of light received from the detection regions Af and Ag with the amount of light received from the detection regions Ac and Ad to determine the direction perpendicular to the tracking direction (that is, the direction in which the reflection target 30 on the line extends). The deviation can be detected with higher precision, and the reflection target 30 can be tracked by the aligned portion while correcting the deviation.

When the reflection target 30 reaches a bent point from a linearly extending area (FIG. 5 (b)), the amount of light received from the detection area (area Ab in the case of FIG. 5) on the side opposite to the bending direction. Is reduced. When the amount of received light drops below a predetermined value, the control unit 44 controls the drive mechanism 20 and the fine movement mechanism 19 to stop the operation of the aligned portion, and the target sensor 10 remains stationary with respect to the target surface 28. The irradiation area (and detection area) is switched as shown in FIG. 6 (that is, sequentially from (1) to (7)), and the bending direction of the reflective target 30 is detected. That is, the control unit 44 controls the combination of the light transmitting / receiving body 32 that emits light by controlling the light transmitting / receiving switching unit 38 and the light transmitting / receiving body 32 that receives reflected light based on the detection result of the light detection unit 36. Thus, the areas (Ab to Ag) arranged on the outer periphery are sequentially set as the irradiation area, and the area adjacent to the irradiation area is set as the detection area. This switching control corresponds to variable control of the position of the irradiation area relative to the position-aligned portion. When the irradiation areas are switched in this way, the substantial detection area is the area E in FIG. As is clear from FIGS. 5 and 6, the region E (FIG. 6) is located outside the region D (shaded portion in FIG. 5), and the reflection target 30 can be detected over a wider area. I understand. That is, by doing so, the alignment can be performed with higher accuracy and more quickly. In addition, in the case of FIG. 5B, with respect to the regions Ab, Ac, and Ag on the forward side in the traveling direction, the amount of received light is largest when the region Ac is the irradiation region, and then the region Ab.
And Ag in that order. From this result, the control unit 44
It can be recognized that the reflective target 30 is bent toward the area Ac. That is, the area (Ab to A
The direction in which the reflective target 30 extends can be estimated based on the amount of received light from g) (for example, based on the ratio of each amount of received light). Then, the control unit 44 controls the drive mechanism 20 and the fine movement mechanism 19 so that the aligned portion moves in that direction. In this way, the tracking of the reflection target 30 by the aligned portion is realized.
During this movement, the irradiation area is again the central area A.
Only a is set, and the detection area is set to surrounding areas Ab to Ag.

Next, a target sensor according to a second embodiment of the present invention will be described with reference to the drawings. Figure 7
Is the probe 74 of the target sensor according to the present embodiment.
FIG.

As shown in FIG. 7, the probe 74 includes a light-transmitting / receiving body 72 made of an optical fiber having the same specifications (shape and performance) so that any three light-transmitting / receiving bodies 72 are located at the vertices of an equilateral triangle. , And 19 pieces are bundled so that the outer circumference is substantially hexagonal. Six transmitters / receivers 7 are provided at intervals of 60 ° around the transmitter / receiver 72 (A) located at the center.
2 (B to G) are evenly arranged, and 1 is further placed outside thereof.
Two light transmitting / receiving bodies 72 (H, J to T) are arranged.
Also in this embodiment, the light-transmitting / receiving surfaces at the tip end are all aligned so as to have the same height. The probe 74 has the same components as those in the first embodiment, that is, a light-transmitting / receiving-light switching unit, a light emitting unit, a light detecting unit, a drive circuit, an amplifier circuit, and a D / D unit.
An A conversion unit, an A / D conversion unit, a switching unit, and a control unit (none of which are shown) are connected to perform the same operation as that of the probe 14 according to the first embodiment described above. Due to the large number, the number of each component is different from that of the first embodiment.

Here, the probe 74 according to the present embodiment.
The switching of light transmission / reception will be described. First, FIG.
Also, an example of switching between light transmission and reception according to the distance between the light transmission and reception body 72 and the target surface will be described with reference to FIG. Figure 8
FIG. 9 is a diagram showing an example of setting the light-transmitting / receiving body 72 according to the distances da and dc between the probe 74 and the target surface, and FIG. 9 shows the case where the light-receiving / transmitting body 72 is set as shown in FIG. 8 ((a) and ( (c) only) target areas (irradiation areas Ya and Yc, detection area X1)
(a, X1c, X2a, X2c) and a reflection target 30 are perspective views showing a positional relationship. In these figures,
(A) is a case where the distance (da) is short, (c) is a case where the distance (dc) is long, and (b) is a case where the distance is an intermediate distance between (a) and (c). It is an application example for. Note that FIG. 9 shows a line (L, C, A,) including the central light-transmitting / receiving body A among the light-transmitting / receiving bodies 72 of the probe 74 of FIG.
Only F, R) are shown. In each case shown in FIGS. 8 and 9, the central light-transmitting / receiving body A is set for irradiation.

When the light-transmitting / receiving body 72 is close to the target surface (a)
In this case, six light-transmitting / receiving bodies (B to G) adjacent to the light-transmitting / receiving body A for irradiation are used for receiving. Irradiation area X1, in this case
As described in the first embodiment, the X2, the detection region Y, and the reflection target 30 have a layout and area suitable for target detection.

When the light transmitter / receiver 72 is far from the target surface (c)
In addition, the six light-transmitting / receiving bodies (J, L, N, P,
R, T) are accepted. As shown in FIG. 9, when the optical path width increases as the light emitted from the light-transmitting / receiving body 72 progresses, the longer the distance dc between the light-receiving / receiving body 72 and the target surface is, the target regions (X1c, X2c, Yc). ) Area becomes large. At this time, the receiving and transmitting / receiving body 72 is (a)
If the same (B to G) as in the above case is used, the substantial detection area as the overlapping portion of the irradiation area and the detection area becomes large, and the reflection target is completely included inside the overlapping portion. However, the arrangement and area suitable for detecting the reflection target cannot be secured. This problem is caused by, for example, as shown in FIG. 9C, a light-transmitting / receiving body located at a position distant from the light-transmitting / receiving body A for irradiation (see FIG.
Then, L and R) can be eliminated by using a light-receiving / receiving body for reception. That is, since the light-transmitting / receiving body A for irradiation and the light-receiving / receiving bodies L, R for reception are separated from each other in the direction parallel to the target surface, the light-transmitting / receiving body A for irradiation and the light-receiving / receiving bodies L, R for reception are provided. Even when the distance dc is long, for example, the area of the overlapping portion as a substantial detection region can be reduced as compared with the case where the distance is close.
It is possible to secure the arrangement and area of the irradiation region and the detection region suitable for detecting the reflection target 30.

Further, FIG. 8B shows the setting of the light-transmitting / receiving body 72 when the distance between the light-transmitting / receiving body 72 and the target surface is longer than in the case of (a) and shorter than in the case of (c). is there. In this case, as the receiving light-transmitting / receiving body 72, the light-transmitting / receiving bodies (H, K, M, O, Q, S) whose distance from the central light-transmitting / receiving body A is longer than (a) and shorter than (b). By selecting), the distance between the light transmitting / receiving body A for irradiation and the light transmitting / receiving body 72 can be made longer than in the case of (a) and shorter than that in the case of (c). Accordingly, it is possible to secure the arrangement and area of the irradiation region and the detection region suitable for detecting the reflective target 30.

The irradiation / reception switching of the light transmitter / receiver 72 according to the present embodiment is performed by the light transmitter / receiver switching unit controlled by the control unit, as in the first embodiment. At this time, the control unit obtains the distance between the light-transmitting / receiving body 72 and the target surface from, for example, a signal for the drive mechanism of the component mounting robot or an output signal of a separately provided distance sensor, and sends the distance according to this distance. Controls the light receiving switching unit. At this time, a storage unit that stores information indicating the setting of the light-transmitting / receiving body 72 (or the switching state of the light-receiving / switching unit) according to the distance is provided, and the control unit refers to the information in the storage unit and responds to the distance. It may be configured to perform control.

Next, another example of switching between light transmission and reception will be described with reference to FIG. In FIG. 10, six light-transmitting / receiving bodies (B to G) adjacent to the central light-transmitting / receiving body A are sequentially selected as the light-transmitting / receiving bodies for irradiation, and accordingly, the respective light-transmitting / receiving bodies for irradiation (B to G) are selected. It is a figure which shows the case where the light-transmitting / receiving bodies adjacent to the periphery of G) are sequentially selected as the light-receiving / receiving bodies for reception. The change of the irradiation area is the same as that of FIG. 6, but since the detection area is set over the entire circumference of the irradiation area, the reflection target can be captured in a wider area.

In the probe 74 according to this embodiment, the shapes of the overlapping portions of the adjacent target areas are all the same. In such a configuration, for example, a plurality of light-transmitting / receiving bodies 72 having the same specifications and having the same optically characteristics have the same irradiation / reception direction, the light-transmitting / receiving surfaces are on the same plane, and further on the plane. This is achieved by arranging any three light-transmitting / receiving bodies 72 so as to form the vertices of an equilateral triangle. By doing so, as shown in FIG. 8 or FIG. 10, no matter which transmission / reception body 72 is selected as the irradiation / reception transmission / reception body 72, the substantially overlapping portions as the detection regions become the same. As a result, the processing relating to position detection can be performed more easily and more quickly. In addition, a plurality of cylindrical light-transmitting / receiving bodies 72
In this case, the probes 74 can be arranged most densely by arranging them on the vertices of the equilateral triangle.

The present invention is not limited to the above embodiment. The number, shape, size, arrangement, etc. of the light-transmitting / receiving bodies are not limited to those in the above embodiment. Further, the plurality of light-transmitting / receiving bodies may have different shapes. Also, the light-transmitting and receiving bodies may be arranged in a double, triple or more layers,
Instead of arranging in a ring shape, for example, it may be arranged in a spiral shape. Further, the switching of the light-transmitting / receiving body (irradiation region) is not limited to the above-described embodiment. For example, in the case of (b) of FIG. 5, only the regions Ab, Ac, Ag in which the amount of received light is reduced are to be switched. As an alternative, the irradiation areas may be sequentially switched within these areas. Also, the order of switching is not limited to the illustrated order. Further, in the above embodiment,
Although the processing of the amount of light received by the target sensor is all performed as digital processing, it goes without saying that this can be appropriately performed as analog processing.

[0034]

As described above, according to the present invention,
Since the responsiveness can be made significantly higher than in the past, it is possible to improve the throughput even when mounting a minute component that requires high positional accuracy.
Further, it is possible to perform control accompanied by vibration suppression of the movable part. Further, the position of the irradiation region is variable relative to the position-adjusted portion, so that the position can be adjusted more quickly and with higher accuracy.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of a component mounting robot according to an embodiment of the present invention.

FIG. 2 is a perspective view of a target sensor according to the first embodiment of the present invention.

FIG. 3 is a diagram showing an irradiation area and a detection area of the target sensor according to the first embodiment of the present invention.

FIG. 4 is a block diagram of a component mounting robot according to an exemplary embodiment of the present invention.

FIG. 5 is a diagram showing changes in an irradiation area and a detection area when a linear reflection target is traced in the component mounting robot according to the first embodiment of the present invention.

FIG. 6 is a diagram showing switching between an irradiation area and a detection area of the target sensor according to the first embodiment of the present invention.

FIG. 7 is a perspective view showing a schematic configuration of a probe of a target sensor according to a second embodiment of the present invention.

FIG. 8 is a diagram showing an example of irradiation / reception switching of a light-transmitting / receiving body of a target sensor according to a second embodiment of the present invention.

9 is a diagram showing an irradiation region and a detection region in the example of FIG.

FIG. 10 is a diagram showing another example of switching between irradiation / reception of the light-transmitting / receiving bodies of the target sensor according to the second embodiment of the present invention.

FIG. 11 is a diagram showing a principle of detecting a relative position between a target sensor and a reflective target according to the present invention.

FIG. 12 is an overall configuration diagram of a conventional component mounting robot.

[Explanation of symbols]

10 target sensors, 12 component mounting robots, 1
4,74 probe, 16 robot arm, 18 lifter, 19 fine movement mechanism, 20 drive mechanism, 22 parts, 2
4 hands, 28 target surface, 30 reflective target, 3
2, 72 transmitter / receiver, 34 light emitting unit, 36 light detecting unit,
38 transmission / reception switching unit, 44 control unit.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Makoto Kajitani             2-8-1-304 Tsurumakikita, Hadano City, Kanagawa Prefecture (72) Inventor Shozo Tabe             5-1-1 Shimorenjaku, Mitaka City, Tokyo Japan             Wireless Co., Ltd. (72) Inventor Norio Kurane             5-1-1 Shimorenjaku, Mitaka City, Tokyo Japan             Wireless Co., Ltd. F term (reference) 2F065 AA03 AA07 BB01 BB27 CC01                       CC28 FF44 GG07 GG13 HH02                       HH13 JJ01 JJ05 JJ09 JJ15                       JJ18 LL03 MM12 MM13 MM23                 3C007 AS08 BS15 KS03 KV13 KW06                       KX07 MT02 MT04 NS17

Claims (6)

[Claims] 1. A plurality of light-transmitting / receiving bodies each capable of irradiating a target area on a target surface with light and receiving reflected light from the target area, each having a reflective target at a position corresponding to a target, A light-transmitting / receiving switching unit that connects the light-receiving body to either the light-emitting unit or the light-detecting unit and switches irradiation or reception of light in the light-receiving unit, and at least one of the plurality of light-receiving units emits light. However, the plurality of light-transmitting and light-receiving bodies respectively corresponding to the plurality of target areas that partially overlap the target area of the light-transmitting and light-receiving bodies receive the reflected light, and based on the detection result of the light detecting section, Target sensor for obtaining position or orientation. 2. The target sensor according to claim 1, wherein a plurality of overlapping portions of the target regions on the same target surface have substantially the same area. 3. The target according to claim 1, wherein the combination of the light-transmitting / receiving body that emits light and the light-receiving / transmitting body that receives reflected light is switched according to the detection result of the light detection unit. Sensor. 4. The combination of the light-transmitting / receiving body that emits light and the light-receiving / transmitting body that receives reflected light is switched according to the distance between the light-transmitting / receiving body and the target surface.
The target sensor according to any one of 1. 5. A robot control device for controlling a robot provided with a drive mechanism for moving a position-adjusted part, wherein the detection result of the light detection part of the target sensor according to any one of claims 1 to 4. A robot controller including a drive mechanism control unit that controls the drive mechanism based on the above. 6. A robot having a drive mechanism for moving a position-adjusted portion, wherein the light-transmitting / receiving body of the target sensor according to claim 1 is associated with the position-adjusted portion. A robot provided, wherein a drive mechanism is controlled based on a detection result of the light detection unit.