JP2003049260A - Member for film deposition apparatus and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the peeling of a spray deposit and a stuck film by film deposition from a member for a film deposition apparatus and to particularly prolong the maintenance life of a member on which film deposition and detachment of a medium substrate are repeated, such as a member that fixes and conveys a magnetic disk. SOLUTION: A spray deposit of aluminum or aluminum alloy in which the ratio of the peak intensity of (200) face to that of (111) face by X-ray diffraction becomes <0.4 is formed on the surface of a member for a film deposition apparatus.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming apparatus for manufacturing a recording medium or a semiconductor, and more particularly to preventing dust from a member during film formation on a substrate. It is intended to provide a member suitable for a component which is fixed and conveyed.

[0002]

2. Description of the Related Art When a recording medium such as a magnetic disk or an optical disk or a semiconductor is manufactured, a film adhered to a member inside a film forming apparatus is peeled off as the film becomes thicker as the film is formed. Known to pollute. This problem greatly affects the quality and yield of film-forming substrates.

As a method for solving this problem, there has been conventionally used a method in which the surface of a member or the like is blasted to have a satin-finished surface to increase the film adhesion strength and to be used. Furthermore, Mo,
A method for preventing the peeling of the adhered film by forming a plasma sprayed film of W, Al, WC, etc. to disperse the internal stress and increase the adhesion area (see JP-A-60-120515), Method of spraying aluminum on the above member to prevent peeling of the adhered film (JP-A-4-26806).
(See Japanese Patent Laid-Open No. 5), a method of spraying aluminum on the deposition-inhibitory plate using a mask having an opening to control the surface shape of the aluminum layer to prevent peeling of the adhered film (JP-A-8-
176816) and the like have been proposed.

[0004]

As the metal to be sprayed on the surface, aluminum or aluminum alloy is suitable because it is easy to peel off the film at the time of reuse, but to the base material of the aluminum or aluminum alloy sprayed film. And the adhesion between particles (splats) forming the sprayed coating are not always sufficient. In particular, in an apparatus for forming films on both sides of a recording medium substrate while facing each other statically, as shown in FIG. 3, there is a part called a gripper that is fixed and conveyed by contacting the periphery of the recording medium substrate at three or more points. , The sprayed film on the gripper and the deposited film due to film formation are easily peeled off by repeating the film formation of the recording medium and the attachment / detachment of the medium substrate, and it is unavoidable to replace them at intervals shorter than the life of the sputtering target. .

An object of the present invention is to prevent peeling of a sprayed film and an adhered film due to film formation from a member for a film forming apparatus, and particularly to extend the maintenance life of a member such as a gripper that repeats film formation and detachment of a medium substrate. That is.

[0006]

The inventors of the present invention have made earnest studies in view of the above-mentioned situation, and as a result, by increasing the flatness of the splats of the sprayed film to be formed, the base material of the sprayed film is improved. And the adhesion between the splats increase,
The inventors have found that they are suitable for grippers and completed the present invention. That is, the present invention is a member existing in a film forming chamber of a film forming apparatus, wherein a film made of aluminum or an aluminum alloy is sprayed on at least a portion of a surface of the member to which a film forming component is attached. X-ray diffraction of aluminum or aluminum alloy sprayed coating (200)
The ratio of the peak intensity of the (111) plane to the peak intensity of the (111) plane is 0.
It is a member for a film forming apparatus, which is less than 4.

In the present invention, by increasing the flatness of the splats of the sprayed coating to be formed, the adhesion of the sprayed coating to the substrate and the adhesion between the splats are enhanced. Further, since the end face of the splat having high flatness is likely to be overhanged, a surface having a large fractal dimension with many overhangs, which becomes a catch of the adhered film, is obtained, and the adhesion of the adhered film is enhanced.

According to the results of studies by the present inventor, the ratio of the peak intensity of the (200) plane to the peak intensity of the (111) plane by X-ray diffraction is 0.
47, the orientation of the (111) plane increases as the flatness of the sprayed particles increases in the sprayed film, resulting in (200) / (1
11) The peak intensity ratio becomes small.

The flatness of the sprayed particles can be directly evaluated by observing the surface with an SEM, observing the surface with a laser microscope, and measuring. When such an evaluation is performed, the present invention is a member existing in the film forming chamber of the film forming apparatus, and at least a portion of the surface of the member to which the film forming component adheres is made of aluminum or an aluminum alloy. The film is sprayed, and in the splats, which are particles forming the aluminum or aluminum alloy sprayed film, the proportion of flat particles accounts for 95% or more of the area ratio of the sprayed film. It is a member for a membrane device.

The film thickness of the aluminum or aluminum alloy sprayed film is preferably 50 μm or more and 500 μm or less, more preferably 100 μm or more and 400 μm or less. If it is less than 50 μm, the effect of preventing the peeling of the deposited film of the sprayed film is not sufficient, and if it exceeds 500 μm, the stress of the sprayed film itself becomes a problem and the dimensional accuracy of the member becomes poor.

The center line average surface roughness (Ra) of the aluminum or aluminum alloy sprayed film is 10 μm.
It is preferably m or more and 50 μm or less. If it is less than 10 μm, the effect of preventing the adhesion film peeling off of the sprayed film is not sufficient.
If it exceeds μm, the proportion of non-flat spray particles increases.

The present invention can be applied to a member of a film forming apparatus in manufacturing a recording medium or a semiconductor. As a film forming apparatus to be applied, for example, a sputtering apparatus or a CVD (Che
A medical vapor deposition device and the like can be mentioned. The member existing in the film forming chamber of the film forming apparatus is not particularly limited as long as the film forming component may adhere to the surface of the film forming apparatus. Examples include plates, substrate holders, shutters, and the like. These may be fixed or removable. Further, the present invention can be applied to the inner surface of a film forming chamber of a film forming apparatus that cannot be attached and detached.

When the film forming apparatus member of the present invention is applied to a process involving CVD by raising the temperature, the alkaline earth metal is often volatilized from the member by the CVD gas to form a foreign substance. Therefore, the amount of alkaline earth metal contained in the aluminum or aluminum alloy sprayed coating is 0.02 for any of the corresponding elements.
It is preferably not more than wt%.

The member formed with the sprayed film of the present invention has high adhesion of the sprayed film to the substrate and adhesion between the splats,
When the base material as shown in FIG. 1 is made of stainless steel and applied to a gripper member for fixing and transporting a disk-shaped substrate such as a magnetic disk, the substrate is repeatedly attached and detached a very large number of times, which is particularly effective.

The aluminum or aluminum alloy sprayed film on the portion of the gripper member that fixes and conveys the disc-shaped substrate and contacts the disc-shaped substrate is ground as shown in FIG. 2 to expose the stainless steel base material. It is preferable.

By doing this, the disk-shaped substrate and the surface of the soft aluminum or aluminum alloy sprayed film do not come into contact with each other, and the possibility that the sprayed film will peel off due to desorption of the substrate is reduced. In this case, since the portion in contact with the magnetic disk is a shadowed portion, film adhesion due to film formation occurs only slightly.

The aluminum or aluminum alloy sprayed film can be formed by an arc spraying method, a plasma spraying method, a rocaide spraying method, a flame spraying method, or the like. According to this, it is particularly preferably produced.

[0018]

EXAMPLES The present invention will be described in more detail based on examples, but the present invention is not limited to these examples.

(Example 1) A gripper member for fixing and transporting a magnetic disk was manufactured by using a base material made of stainless steel as schematically shown in FIG. Attach the clip part 11 to the arm part 12 with the screw 13, wash with a solvent, and after blasting with the blasting agent of WA # 60, 99.7%
A surface roughness (Ra) of 25 μm and a film thickness of 200 by a rokaide spraying method in which an aluminum wire is fed and melted by an oxyacetylene flame, and the droplets are accelerated and injected with compressed air.
A sprayed film of μm was formed. After the sprayed film was formed, the sprayed film 23 of the portion 24 in contact with the magnetic disk at the tip of the clip component 21 was ground to match the sill of the stainless base material as shown in FIG. After grinding, the resulting gripper member was ultrasonically cleaned with a cleaning agent, rinsed with ultrapure water, and dried with warm air of clean air.

(Comparative Example 1) A voltage was applied to two 99% aluminum wires to generate an arc, and the energy was used to melt the wires, atomize the particles with compressed air, accelerate and spray to obtain Ra of 30 μm, film. 220 μm thickness
A gripper member was produced by the same steps as in Example 1 except that the sprayed film of No. 1 was formed.

(Comparative Example 2) An inert gas was flown into the gap between the nozzle and the electrode, and 99% aluminum powder was introduced into the thermal plasma generated by the arc by energization and melt injection was performed to obtain Ra 28 μm and film thickness 180 μm. A gripper member was produced in the same process as in Example 1 except that the sprayed film was formed.

In each of Example 1 and Comparative Examples 1 and 2, the 20 mm square stainless steel plate was simultaneously treated in the same manner as the gripper member except for grinding.

The results of observing the surface of each member of Example 1 and Comparative Examples 1 and 2 using SEM are shown in FIGS.
6 shows.

The sprayed film formed by the rocaide wire spraying method of Example 1 shown in FIG. 4 is well dispersed in a size range of about 20 to 300 μm, and is composed of stacked flat particles (splats).

The sprayed film by the arc spraying method of Comparative Example 1 in FIG. 5 has a large flat splat having a size of about 300 μm, but the periphery of the splat is twisted so that the tip has a shape like a grip of a bat and is flat. The part not done is 15
It can be seen around%.

The sprayed film by the plasma spraying method of Comparative Example 2 in FIG. 6 is well dispersed in the size range of about 10 to 300 μm, but the periphery of the splat is twisted and the tip is shaped like a butt grip. About 10% of the non-flat parts are seen.

FIG. 7 is a graph of Example 1 and FIG. 8 is a graph of Comparative Example 1 20.
It is an X-ray diffraction pattern of a sample of a square mm. (200) /
The (111) peak intensity ratio was 0.32 in Example 1, 0.48 in Comparative Example 1, and 0.44 in Comparative Example 2 although not shown. As described above, since the random orientation such as powder is 0.47, the random orientation is in Comparative Example 1, and the orientation of the (111) plane is increased in Example 1. Therefore, it was shown that the orientation of the (111) plane in the aluminum sprayed film increases as the flatness of the sprayed particles increases.

The gripper members of Example 1 and Comparative Examples 1 and 2 were mounted in a required number of film forming apparatuses, and a film forming test of magnetic disks was conducted. In Example 1, it was possible to form a film without increasing glide defects until the target exchange life, but in Comparative Example 1, 1/3 of the target exchange life and in Comparative Example 2 gradually changed from 1/2 of the target exchange life. The number of defects has increased.

Further, the same gripper members as in Example 1 and Comparative Examples 1 and 2 were manufactured by omitting the grinding of the sprayed film at the tip of the clip part 12, and the number of defects increased in about half of the above life. I started, but the order of longevity did not change.

When the compositions of the sprayed coatings of Example 1 and Comparative Examples 1 and 2 were analyzed by the fluorescent X-ray method, the amount of alkaline earth was below the detection limit of 0.01 wt% in all cases. In these members, no medium defect due to the generation of alkaline earth metal particles was observed even in the carbon film formation by the ion beam CVD method. Aluminum wire JI
When the SAl-Mg alloy 5052 material was used, defects due to Mg were found in the carbon film formation by the ion beam CVD method.

The member of the present invention has been described above with reference to an example of a gripper for manufacturing a magnetic disk, but as described above, the present invention can be applied to a member of a film forming apparatus in manufacturing a recording medium or a semiconductor. As a film forming apparatus to be applied, for example, a sputtering apparatus or a CVD (Chemical Vap) is used.
or Deposition) device and the like.
The member existing in the film forming chamber of the film forming apparatus is not particularly limited as long as the film forming component may adhere to the surface of the member, and a sputtering apparatus is taken as an example.
Examples thereof include a deposition preventive plate, a substrate holder, and a shutter. These may be fixed or removable.
Further, the present invention can be applied to the inner surface of a film forming chamber of a film forming apparatus that cannot be attached and detached.

[0032]

According to the present invention, by increasing the flatness of the splats of the sprayed film formed on the surface of the member for film forming apparatus, the adhesion of the sprayed film to the substrate, the adhesion between the splats,
The adhesion of the adhered film is enhanced. Therefore, peeling of the sprayed film and the adhered film due to film formation can be prevented, and in particular, the maintenance life of a film forming apparatus member such as a gripper that repeats film formation and attachment / detachment of the medium substrate can be increased.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of a (gripper) member that fixes and conveys a magnetic disk according to the present invention.

FIG. 2 is a diagram showing an example of a coating state of a sprayed film on a (gripper) member for fixing and transporting a magnetic disk and a processing method after thermal spraying of a portion of a tip of the member in contact with the magnetic disk according to the present invention.

[Fig. 3] Fixing and transporting a magnetic disk (gripper)
It is a figure which shows the condition which fixes the magnetic disk of a member.

FIG. 4 SE of the aluminum sprayed film of Example 1 of the present invention
It is an M photograph.

5 is an SEM photograph of an aluminum sprayed film of Comparative Example 1. FIG.

6 is an SEM photograph of an aluminum sprayed film of Comparative Example 2. FIG.

FIG. 7 is an X-ray diffraction pattern of the aluminum sprayed film of Example 1 of the present invention.

FIG. 8 is an X-ray diffraction pattern of the aluminum sprayed film of Comparative Example 1.

[Explanation of symbols]

11, 21 Clip parts 12, 22 Arm parts 13 Screws 23 Sprayed film 24 Cutting surface (portion in contact with magnetic disk) 31 Magnetic disk substrate 32 Member for fixing and conveying magnetic disk (gripper) member

─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. ⁷ Identification Code FI Theme Coat (Reference) C23C 16/44 C23C 16/44 J G11B 5/851 G11B 5/851 H01L 21/68 H01L 21/68 U

Claims (8)

[Claims] 1. A member existing in a film forming chamber of a film forming apparatus, wherein a film made of aluminum or an aluminum alloy is sprayed on at least a portion of a surface of the member to which a film forming component adheres. A member for a film forming apparatus, wherein the ratio of the peak intensity of the (200) plane to the peak intensity of the (111) plane by X-ray diffraction of the aluminum or aluminum alloy sprayed film is less than 0.4. 2. A member existing in a film forming chamber of a film forming apparatus, wherein a film made of aluminum or an aluminum alloy is sprayed on at least a portion of a surface of the member to which a film forming component adheres. A member for a film forming apparatus, wherein flat splats account for 95% or more of the area ratio of the sprayed film among the splats that are particles constituting the aluminum or aluminum alloy sprayed film. 3. The amount of alkaline earth metal contained in the aluminum or aluminum alloy sprayed coating is 0.02 wt% or less for any of the applicable elements, according to claim 1 or 2. Member for film forming apparatus. 4. The film forming apparatus member according to claim 1, wherein the film thickness of the aluminum or aluminum alloy sprayed film is 50 μm or more and 500 μm or less. 5. The film forming apparatus according to claim 1, wherein the center line average surface roughness (Ra) of the aluminum or aluminum alloy sprayed film is 10 μm or more and 50 μm or less. Parts. 6. The film forming apparatus member according to claim 1, wherein a base material of the film forming apparatus member is made of stainless steel, and is a member for fixing and transporting the disk-shaped substrate. Member for membrane device. 7. The stainless steel base material is exposed by grinding the aluminum or aluminum alloy sprayed film on the portion of the member for fixing and carrying the disk-shaped substrate that comes into contact with the disk-shaped substrate. The member for a film forming apparatus according to claim 6. 8. The film according to any one of claims 1 to 7, wherein the aluminum or aluminum alloy sprayed film is produced by a rokaide spraying method using a wire of aluminum or aluminum alloy. A method for manufacturing a device member.