JP2003047230A - Drive apparatus employing linear motor and beam machining apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drive apparatus employing a moving coil type linear motor which can extend an operation life of a cooling pipe for cooling a coil, i.e., a mover, can move the mover at a high speed, and is small in size, low in cost, and light in weight and to provide a beam machining apparatus employing the drive apparatus. SOLUTION: A through-hole 14a in parallel with a moving direction of a Y-table 5Y is formed in a coil supporter 14 and a cooling pipe 18, through which cooling liquid cooling a coil 12Y is circulated, is inserted through the through-hole 14a so as to move relatively to the coil supporter 14. With such constitution, when a coil 12Y, i.e., a mover, is moved, the cooling pipe 18 is not moved following the movement of the coil 12Y and the cooling pipe 18 is not bent or straightened when the coil 12Y is moved, so that the operation life of the cooling pipe 18 can be extended. Further, as the cooling pipe 18 does not function as a load against the movement of the mover, the mover can be moved at a high speed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device and a beam processing device using a linear motor, and more specifically, between a permanent magnet as a stator and the mover by exciting a coil as the mover. A drive device using a linear motor using a moving coil type (moving coil type) linear motor that linearly moves a moving element such as a table for mounting a work or a stage by the generated thrust force, and the linear motor The present invention relates to a beam processing apparatus for processing a work of resin, ceramic, metal or the like by using a driving device using the above, and processing with a pulsed energy beam such as a pulse laser beam.

[0002]

2. Description of the Related Art Conventionally, as a driving device using this type of linear motor, Japanese Patent Laid-Open No. 8-290341, Japanese Patent Laid-Open No. 8-309641, Japanese Patent Laid-Open No. 9-140118, and Japanese Patent Laid-Open No. 2000-218443. Various other types have been proposed. As a linear motor used in this type of drive device, a moving coil type motor having the above-mentioned coil as a mover, as disclosed in the above-mentioned respective publications, and a linear motor as disclosed in JP-A-8-37772 are disclosed. There is a moving magnet type using the permanent magnet as a mover.

In the above-mentioned moving magnet type linear motor, it is necessary to use an expensive magnet having a large magnetic force in order to move the mover at a high speed by a high thrust, so that the mover becomes large, heavy and costly. There is a problem that causes. On the other hand, in the above moving coil type linear motor, since a relatively cheap and lightweight coil is used as the mover, it is possible to reduce the size and weight of the mover and reduce the cost, and it is relatively easy to obtain high thrust. There is an advantage that can be obtained.

[0004]

By the way, in the driving device using the linear motor of this type, the coil is heated by exciting the moving element to move it. If this heat generation becomes too large, the gap between the mover and the stator changes due to the thermal expansion of the base body and the coil support due to the heat generation, and the thrust becomes unstable and the coil burns. Therefore, in a drive device using this type of linear motor, in order to protect the coil and prevent a change in the gap between the mover and the stator due to thermal expansion of the base body or the moving element, A flow path for circulating the cooling liquid is formed in the side portion, and this flow path and the cooling liquid supply device are connected by a cooling pipe made of a hollow pipe to cool the coil. Here, in the case of the driving device using the moving magnet type linear motor, since the coil is the stator, it can be easily arranged by fixing the cooling pipe to the base body or the like.

However, in the case of the driving device using the moving coil type linear motor, since the coil is a mover, the cooling pipe is configured to be able to move following the movement of the mover. There is a need. Therefore, in a drive device using a moving coil type linear motor of this kind, conventionally, a flexible one such as a rubber hose is used as the cooling pipe, and the cooling pipe can be moved along with the coil. I was making up. Therefore, in the conventional driving device using such a moving coil type linear motor, the cooling pipe is bent and stretched each time the coil, which is the mover, moves, so that the life of the cooling pipe is significantly reduced. However, there is a problem that the cooling pipe must be replaced in about one year.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a small, inexpensive and lightweight structure which can prolong the life of a cooling pipe for cooling a coil as a mover. A drive device using a moving coil type linear motor having a structure capable of moving the mover at high speed,
And to provide a beam processing apparatus using the driving device.

[0007]

In order to achieve the above object, the invention of claim 1 is to arrange a permanent magnet as a stator on a base body, and to arrange a coil facing the permanent magnet on a linear guide on the base body. A movable coil type linear motor that is arranged as a mover on a moving element that moves along the axis, and linearly moves the moving element by a thrust force generated between the stator and the mover by exciting the coil. In a drive device using the above-mentioned moving element, a through hole parallel to the moving direction of the moving element is formed in the moving element, and a cooling pipe for circulating a cooling liquid for cooling the coil can be moved relative to the moving element. It is characterized in that it is disposed by being inserted into the through hole.

In the driving device using this linear motor, a cooling pipe for circulating a cooling liquid for cooling the coil is inserted into a through hole formed in the moving element so as to be movable relative to the moving element. ing. As a result, when the coil that is the mover moves, the moving element relatively moves with respect to the cooling pipe, and the cooling pipe does not follow the coil. Therefore, in the drive device using this linear motor, the cooling pipe does not bend or expand when the coil moves, so that the life of the cooling pipe can be extended. Also,
By forming a through hole for inserting the cooling pipe in the moving element, the moving element is reduced in weight. Further, unlike the conventional moving device, since it is not necessary to crawl the cooling pipe around the coil so as to be bendable, the moving space of the mover can be reduced, and the device body can be made compact and inexpensive. become able to. Further, since the cooling pipe does not act as a load when the mover moves, the mover can be moved at high speed.

According to a second aspect of the present invention, in the drive device using the linear motor according to the first aspect, the linear motor includes two motor units composed of the permanent magnet and the coil, and each of the motor units includes Each of the permanent magnets and each of the coils is arranged in a plane-symmetrical portion of the space formed in the base body.

In the drive device using this linear motor, since the permanent magnets and the coils of the motor units are arranged in the space formed in the base body so as to be plane-symmetrical to each other, each motor unit is arranged. By the magnetic field generated between the stator and the mover due to the excitation of the coil of
The magnetic attraction forces of the respective motor units that attract the moving body and the base body (or the magnetic repulsive forces that separate the moving body and the base body) cancel each other out. Therefore, in the drive device using this linear motor, in addition to the effect of claim 1, the pressing load on the sliding portion of the linear guide due to the magnetic attraction force or magnetic repulsion force is reduced, and It is possible to configure the moving element with a low rigidity.
As a result, the weight of the movable portion can be reduced, a large thrust can be obtained by the small motor unit, and the movable portion can be moved at a higher speed.

According to a third aspect of the present invention, in the drive device using the linear motor according to the second aspect, the magnetic force due to the magnetic pole arrangement of the permanent magnets affects the distance between the permanent magnets of the two motor units. The feature is that the distance is not set.

In the drive device using this linear motor, the influence of the magnetic force of the permanent magnets, which are the stators of the motor units, can be eliminated. As a result, the magnetic poles of the permanent magnets do not have to be arranged such that the magnetic forces of the permanent magnets cancel each other out, and the permanent magnets can be configured simply and at low cost.

The invention of claim 4 is the invention of claim 1, 2 or 3.
In the driving device using the linear motor, the cooling pipe is made of stainless steel.

In the drive device using this linear motor, the corrosion resistance of the cooling pipe to the cooling liquid is improved, so that the life of the cooling pipe can be further extended.

According to a fifth aspect of the present invention, in the drive unit using the linear motor according to the first aspect, the cooling pipe is supported by a ball bush provided in the through hole. It is a thing.

In the drive device using the linear motor, the ball bushing can surely avoid the contact between the cooling pipe and the through hole of the moving element, thereby ensuring smooth movement of the mover. To be able to
The mover can be moved at high speed.

According to a sixth aspect of the present invention, a beam source that repeatedly emits a pulsed energy beam, a beam irradiation means that guides and irradiates an energy beam emitted from the beam source to an object to be processed, and the object to be processed. A beam processing apparatus comprising: a relative moving unit that relatively moves an object and an irradiation point of the energy beam with respect to the processing target; and a control unit that controls the beam source and the relative moving unit based on processing control data. The driving device using the linear motor according to claim 1, 2, 34 or 5 is used as the relative moving means.

In this beam processing apparatus, since the moving coil type linear motor having a small size, light weight and inexpensive structure is used as the relative moving means, a beam processing apparatus capable of moving the object to be processed at high speed is provided. You will be able to.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the present invention is applied to an ITO thin film forming apparatus as a beam processing apparatus using the moving coil type linear motor will be described below. This ITO thin film processing device is a device for beam processing of a transparent conductive film which forms a transparent electrode by removing a part of the transparent conductive film formed on an insulating transparent substrate of a hybrid type touch panel in a slit shape. is there.

FIG. 1 is a schematic configuration diagram of an ITO thin film processing apparatus according to the present invention. This ITO thin film processing apparatus includes a YAG laser device 1 as a beam source that repeatedly emits pulsed laser light as a pulsed energy beam,
The beam irradiation means 2 for guiding and irradiating the pulsed laser light emitted from the YAG laser device 1 to the object to be processed, which is a workpiece, and the object to be processed and the irradiation point of the energy beam to the object to be processed are moved relative to each other. An XY table 5 as a relative moving means and a control system 6 as a control means for controlling the YAG laser device 1 and the XY table 5 based on the processing control data are provided.

The YAG laser transmission device 1 includes a laser head 101 having a YAG rod 101a and a Q switch 101b built therein, a Q switch drive section 102 for driving the Q switch 101b, and a laser oscillation at the YAG rod 101a in the laser head 101. And a laser power supply 103 for supplying a driving current for the laser. The Q switch driver 1
02 is a Q switch 10 in the laser head 101 based on the laser control signal sent from the control system 6.
Drive 1b. When the Q switch 101b is turned on, near-infrared light (wavelength λ = 1064n
m) is emitted. The repetition frequency of the pulsed laser control signal input to the Q switch driver 102 is 20 Hz to 20 kHz (cycle = 50).
msec to 0.05 msec), and the pulse width of the laser control signal is 80 to
It can be changed within the range of 500 nsec. By driving the Q switch 101b in the laser head 101 with this Q switch driving unit 102, pulse laser light can be emitted from the laser head 101 within the repetition frequency range of 500 Hz to 5 kHz.

The YAG rod 101a in the laser head 101 is a YAG (yttrium, aluminum, garnet) crystal doped with a rare earth element Nd (neodymium) and is excited by an excitation source (not shown) such as a flash lamp or a semiconductor laser. It This YAG rod 10
Reference numeral 1a is a YAG (yttrium, aluminum, garnet) crystal doped with a rare earth element Nb (neodymium), and a driving current Id is supplied from a laser power source 103 to an excitation source (not shown) such as a flash lamp or a semiconductor laser. Driven by. This laser power source 103
The driving current Id supplied from the YAG rod 101a to the excitation source of the YAG rod 101a can be changed based on a control command sent from the control system 6 to the laser power source 103. The pulsed laser light output can be changed.

The beam irradiation means 2 is a step index type optical fiber 20 for guiding a pulsed laser beam.
1 and a laser irradiation head 202 that condenses the pulsed laser light guided by the optical fiber 201 and irradiates the object to be processed.

The transparent insulating substrate 3 made of transparent glass or transparent plastic material (for example, PET or polycarbonate) on the surface of which a transparent conductive film 4 made of ITO (indium tin oxide) is formed is an XY table 5. It is fixed on the mounting table 501 driven by the linear motor 502 by a suction and mechanical clamp mechanism (not shown). By controlling the linear motor 502 that drives the mounting table 501 to which the transparent insulating substrate 3 is fixed by the control system 6, the transparent insulating substrate 3 on which the transparent conductive film 4 is formed is irradiated with the pulse laser light. It is possible to two-dimensionally move in an X direction and a Y direction (directions perpendicular to the paper surface in the drawing) orthogonal to each other in a virtual plane perpendicular to the irradiation direction.

Further, the processing speed, the acceleration of the XY table,
In order to further improve the processing accuracy, for the XY table 5, titanium foam, magnesium, alumina oxide,
It is preferable to use an ultra-light aluminum alloy material.

Further, a through hole may be formed inside the mounting table 501 to reduce the weight. The through hole can also serve as an air flow path for a vacuum chuck when the insulating transparent substrate 3 and the transparent conductive film 4 are in the form of a sheet. Regarding the mounting table 501, a concave portion is formed at least under the portion of the insulating transparent substrate 3 where the pulse laser light is irradiated, and the distance between the lower surface of the insulating transparent substrate 3 and the upper surface of the mounting table 501 is set as much as possible. It is preferable to make it longer. With this configuration, it is possible to prevent the reflected laser that has passed through the insulating transparent substrate 3 and reflected on the surface of the mounting table 501 from hitting the transparent conductive film 4 and adversely affecting the processing.

Further, in this embodiment, a linear scale 503 as a moving distance detection pulse signal generating means is attached to the XY table 5. The linear scale 503 is provided in each of the two directions of the X direction and the Y direction, and the moving distance is detected every time the mounting table 501 on which the transparent insulating substrate 3 is mounted is moved by a constant distance in the X direction and the Y direction. Generate a pulse signal. By counting the moving distance detection pulse signal, the moving distance of the mounting table 501 on which the transparent insulating substrate 3 is mounted can be known.
In the present embodiment, the irradiation timing of each pulse laser beam is controlled in synchronization with the moving distance of the mounting table 501 on which the transparent insulating substrate 3 is mounted, based on the moving distance detection pulse signal.

In the present embodiment, the linear scale 50 described above is used.
As for No. 3, by combining the scale and the scanning plate, which have graduation gratings formed on each other, in a non-contact opposed relationship,
A device capable of obtaining a resolution of about 5 μm to 1.0 μm (for example, an open type length measuring system manufactured by HEIDENHAIN CORPORATION: trade name) is used. Here, for example, when the resolution of the linear scale 503 is 1 μm, one pulse is output every 1 μm. Therefore, when the moving speed of the mounting table 501 on which the transparent insulating substrate 3 is mounted is 1 m / sec, 1 MHz. The moving distance detection pulse signal is output at the frequency (cycle = 1 μsec). The linear scale 503 is appropriately selected and used according to conditions such as machining accuracy and machining speed. Further, the moving distance detection pulse signal generating means outputs a moving distance detection pulse signal for each fixed distance movement of the mounting table 501 on which the transparent insulating substrate 3 is mounted in each of the X direction and the Y direction. It may be generated as long as it is generated, and is not limited to the above specific linear scale.

The control system 6 monitors the entire beam processing apparatus and CAM as processing control data.
(Computer Aided Manufacturing) Using a host computer device 601 including a personal computer that issues a control command to each unit based on data, a table drive control device (sequencer) 602, and a control circuit board 603 for synchronous interlocking type operation It is configured.

The CAM data is CAD (Computer A
It is generated in consideration of the device parameters of the beam processing device based on the data of the ided design), and for example, for each processing element of the line segment shape, the pitch of the irradiation point, the coordinates of the processing start point, and the coordinates of the processing end point are one The data structure is as follows.

The host computer device 601 has a processing speed input means for the user to input data of the processing speed Vo, and a driving condition of the mounting table 501 of the XY table 5 based on the processing speed Vo data inputted by the user. It is also used as a processing condition setting means for setting the irradiation condition of the pulsed laser light. The above-mentioned C is added to the host computer 601.
A recording medium such as an FD in which AM data is stored is set and CAM data is read. Along with the reading of the CAM data, the processing speed data desired by the user is input to the host computer 601. Regarding the processing speed, which is the maximum movement speed of the mounting table 501, the upper limit value Vmax is set based on the data obtained in advance by experiments, and the value of the processing speed Vo input by the user is the upper limit value. If it exceeds Vmax, a warning message indicating that the input value exceeds the upper limit value Vmax and a message prompting re-input of the machining speed data are displayed on the display of the host computer 601.

In the host computer 601, the mounting table 5 of the XY table 5 is prepared for each machining element based on the CAM data and the machining speed Vo input by the user.
01 movement start point and movement end point coordinates, mounting table 50
The positive acceleration α in the acceleration region 1 and the negative acceleration β in the deceleration region, the maximum moving speed (= processing speed) of the mounting table 501, and the drive current Id supplied from the laser power source 103 as the irradiation condition of the pulsed laser light. Data such as, is calculated and stored in a predetermined storage area. For the calculation of these data, a data table including an optimum range obtained in advance by experiments or the like is used.

The table drive control device 602 controls the drive of the linear motor 502 based on the control command sent from the host computer device 601. The table drive control unit 602 is configured using, for example, a servo controller when the linear motor 502 is a servo motor and a pulse controller when the linear motor 502 is a pulse motor.

As described above, according to the ITO thin film forming apparatus, the driving conditions of the XY table 5 and the repetition frequency Fr of the pulsed laser light are set based on the processing speed input by the user, and the YAG laser apparatus 1 is also used. Since the drive current Id is set to the optimum range, uniform slit processing can be performed without excess or deficiency. Also, XY table 5
Since the irradiation timing of the pulsed laser light is controlled so as to be synchronized with the moving distance of the mounting table 501,
Even if the moving speed of 1 changes for some reason,
Since the pitch of the irradiation spot of the pulsed laser light with which the transparent conductive film 4 on the transparent insulating substrate 3 is irradiated does not change, uniform slit processing with a constant processing width is possible.

Further, since the irradiation timing of the pulsed laser light is controlled so as to be synchronized with the movement distance of the mounting table 501 of the XY table 5, the uniform slit processing can be performed even in the acceleration region and the deceleration region of the mounting table 501. It will be possible. For example, in the conventional processing device, before and after the slit processing of 500 mm, the acceleration table and the deceleration area for moving the mounting table by 100 mm without processing are required.
Since the slit processing can be started from the middle of the acceleration area and continued to the middle of the deceleration area, the mounting table 5
The total movement amount of 01 can be reduced to about 600 mm. As a result, it is possible to perform slit processing at a processing speed equal to or higher than conventional etching processing while achieving uniform slit processing of the transparent conductive film 4.

Further, when forming the lattice-shaped slits in the transparent conductive film 4 on the transparent insulating substrate 3, the transparent insulating substrate 3 is moved in the X-axis direction and irradiated with pulsed laser light, A plurality of slits 4a (X) having a predetermined length in the X-axis direction are formed. After that, the transparent insulating substrate 3 is moved in the Y-axis direction and irradiated with the pulsed laser light. The irradiation spots of the pulsed laser light with which the transparent conductive film 4 is irradiated are arranged at a constant pitch in the Y-axis direction. As a result, the transparent conductive film 4 is removed in a slit shape with a uniform processing width in the Y-axis direction, and X
It is possible to form a lattice-shaped slit in which the slits in the axial direction and the slits in the Y-axis direction intersect.

Next, the structure of the linear motor 502 for driving the XY table 5 will be described. This linear motor 502, as shown in FIG.
An upper linear motor Mx that reciprocates the mounting table 501 as a table in the X direction, and a lower linear motor My that reciprocates the Y table 5y as the moving element that is the base of the upper linear motor Mx in the Y direction. Has been done. The upper linear motor Mx generates a thrust force by excitation between a magnet rail 11x laid on the Y table 5y and a coil 12x arranged below the mounting table 501 so as to face the magnet rail 11x. The mounting table 501 is reciprocated in the X direction along two guide rails 13x parallel to the magnet rails 11x on the Y table 5y.

On the other hand, the lower linear motor My is shown in FIG.
As shown in FIG. 3 and FIG. 3, a magnet rail 11y as a permanent magnet that constitutes the stator is configured by arranging a plurality of S-pole and N-pole magnets in a straight line alternately at a predetermined interval, and It has two motor units M1 and M2, which are arranged to face the magnet rail 11y with a predetermined gap g between them and a coil 12y that generates a thrust force between the magnet rail 11y and the magnet rail 11y. The motor units M1 and M2 each have a Y table 5 as the moving element that supports the coil 12y.
It is arranged in a plane-symmetrical portion with the coil support body 14 substantially integrated with y interposed therebetween.

That is, the Y table 5y is reciprocally mounted on the pair of left and right bases 15 via the four guide rails 13y which are linear guides parallel to the Y direction. The coil support 14 is arranged at the central portion of the pair of bases 15. This coil support 14
Is fixed to the lower surface of the Y table 5y. Each of the motor units M is attached to both side surfaces of the coil support body 14 (the surface facing the respective bases 15) via the coil mounting plate 16.
Each coil 12y of 1 and M2 is attached. The magnet rails 11y of the motor units M1 and M2 are attached to the bases 15 via the magnet attachment plates 17 so as to face the coils 12y.

By the way, such a motor unit M
As described above, each of the coils 1 and M2 12y needs to be cooled in order to eliminate the adverse effect of the heat generation.
Therefore, in the linear motor 5 according to the present embodiment,
As shown in FIG. 3 and FIG. 4, the coil support 14
Through hole 14 parallel to the moving direction of the Y table 5y.
a is formed. Then, a cooling pipe 18 for circulating a cooling liquid for cooling each of the coils 12y is provided in the through hole 14
The coil support 14 is inserted in a so as to be movable relative to the coil support 14.

By thus inserting the cooling pipe 18 into the through hole 14a formed in the coil support 14, the cooling pipe 1 is moved when each coil 11y, which is a mover, is moved.
8 and the coil support 14 move relative to each other, and the cooling pipe 1
8 does not move following the coil support 14. Therefore, in this linear motor 5, each coil 12y
Since the cooling pipe 18 does not bend or expand when moving, unlike the conventional one, the life of the cooling pipe 18 can be extended. Further, since the cooling pipe 18 does not act as a load when the mover moves, the mover can be moved at high speed.

Further, since the through hole 14a for inserting the cooling pipe 18 into the coil support 14 is formed,
The weight of the coil support body 14, that is, the moving element can be reduced. In the illustrated example, three through holes 14a are formed to reduce the weight and each coil 12y is formed by the three cooling pipes 18.
It is configured to increase the cooling efficiency of. Further, unlike the conventional cooling pipe, the cooling pipe 18 does not have to be bent around the coils 12y so as to be bendable, so that the moving space of each coil 12y, which is a mover, can be reduced, and each motor 12 can be driven. The units M1 and M2 can be made compact and inexpensive.

Further, each of the motor units M1 and M2
Is disposed in a plane-symmetrical portion with the coil support 14 interposed therebetween, so that the magnetic attraction force generated between the stator and the mover by exciting the coils 12y of the motor units M1 and M2. (Or magnetic repulsion) cancel each other out. Therefore, in the motor units M1 and M2, the load applied to the sliding portion of the guide rail 13y of the linear guide based on the magnetic attraction force or magnetic repulsion force is reduced. As a result, a large thrust can be obtained even with a small configuration, and the mover can be moved at a higher speed.

Here, the two motor units M1 and
The distance between the magnet rails 11y of M2 is preferably set to a distance such that the magnetic forces due to the magnetic pole arrangement of the magnet rails 11y do not influence each other. With this setting, the influence of the magnetic force between the magnet rails 11y, which are the stators of the motor units M1 and M2, can be eliminated, and the magnetic pole arrangement of the magnets of the magnet rails 11y is such that the mutual magnetic force is offset. Therefore, each magnet rail 11y can be configured simply and inexpensively.

The cooling pipe 18 is preferably made of stainless steel. Thereby, the corrosion resistance of the cooling pipe 18 against the cooling liquid is improved, and the life of the cooling pipe 18 can be further extended.

Further, as shown in FIGS. 5 and 6, it is desirable that the cooling pipe 18 is supported by a ball bush (a type of ball bearing) 19 provided in the through hole 14a of the coil support 14. With such a configuration, the ball bush 19 makes it possible to reliably avoid contact between the cooling pipe 18 and the through hole 14a of the coil support body 14 through which the cooling pipe 18 is inserted, and thus the mover can be smoothly moved. You will be able to secure movement. In addition, the coil support 14 and the cooling pipe 18
It is also possible to avoid damage to the cooling pipe 18 due to contact with the cooling pipe 18.

Further, as described above, by configuring the lower linear motor My with the two motor units M1 and M2, each of the motor units can be supplied with less power than the power supplied to the coil when driven by one motor unit. By exciting each coil 12y of the motor units M1 and M2, an equivalent thrust can be obtained. Thus, the diameter of the power supply cable that supplies power to the coils 12y of the motor units M1 and M2 can be reduced so that the diameter of the power supply cable to the coils when driven by one motor unit can be reduced. Become. Specifically, in the case of driving with one motor unit, the diameter of the power supply cable to the coil was 10 mm in the past, and the two motor units M1 and
It was possible to make it 3 mm by constructing with M2. Therefore, in this lower linear motor My, the pole radius of the power supply cable can be made small, so that it is not necessary to take a large space for crawling the power supply cable, and further miniaturization can be achieved. become. Further, since the diameter of the power supply cable is reduced, each coil 1 generated when the power supply cable is bent
Since the load on 2y is reduced, the mover can be moved smoothly and at high speed.

In the lower linear motor My, the power supply cables are arranged in an overhead line, and a pantograph that moves in contact with the overhead power supply cable is used to
You may comprise so that electric power may be supplied to each coil 12y of each motor unit M1 and M2. As a result, the space for crawling the power feeding cable can be further reduced, and the Y table 5y can be moved at a higher speed.

[0049]

According to the present invention, the cooling pipe for circulating the cooling liquid for cooling the coil of the linear motor can be moved relative to the moving element through the through hole formed in the moving element. Since it is inserted through the cooling pipe, the cooling pipe does not follow and bend when the coil, which is the mover, moves, and the life of the cooling pipe can be extended. Further, since the through hole is formed in the moving element, the moving element is reduced in weight. Further, since it is not necessary to bend the cooling pipe around the coil so as to be bendable, the moving space of the mover can be reduced, and the apparatus main body can be made compact and inexpensive. Further, since the cooling pipe does not act as a load when the mover moves, there is an excellent effect that the mover can be moved at high speed.

According to the sixth aspect of the invention, since the moving coil type linear motor of small size, light weight and inexpensive structure is used as the relative moving means, the beam processing apparatus capable of moving the object to be processed at high speed. There is an excellent effect that can be provided.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing a configuration of an ITO thin film processing apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view showing the configuration of an XY table moving device driven by a linear motor of the ITO thin film processing apparatus.

FIG. 3 is a schematic front view showing a configuration of a moving device that drives a table below the XY table.

4 is a cross-sectional view taken along the line AA of the moving device shown in FIG.

FIG. 5 is a cross-sectional view of a main part showing a support structure in which a cooling pipe inserted into a through hole of a coil support that supports a coil that is a mover of the moving device is supported by a ball bush.

6 is a cross-sectional view taken along line BB of the ball bush shown in FIG.

[Explanation of symbols]

1 YAG laser device 2 beam irradiation means 3 Transparent insulating substrate 4 Transparent conductive film 5 XY table 5y Y table 6 control system 11x, 11y magnet rail 12x, 12y coils 13x, 13y guide rails 14 Coil support 14a through hole 15 Base 16 Coil mounting plate 17 Magnet mounting plate 18 Cooling pipe 19 ball bush 101 laser head 101a YAG rod 101b Q switch 102 Q switch driver 102 103 Laser power supply 201 optical fiber 202 laser irradiation head 501 mounting table 502 linear motor 503 linear scale 601 Host computer device 602 Table drive control device 603 control circuit board Mx upper linear motor My lower linear motor

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3C048 BB11 CC04 DD01 EE02                 4E068 CB05 CE04 CE09                 5H641 BB06 BB15 BB16 BB18 GG03                       GG12 GG15 GG26 HH02 HH05                       JA03 JA09 JB05 JB09 JB10

Claims (6)

[Claims] 1. A permanent magnet is provided as a stator on a base, and a coil facing the permanent magnet is provided as a mover on a moving element that moves along a linear guide on the base, and the coil is excited. In a drive device using a moving coil type linear motor that linearly moves the moving element by a thrust force generated between the stator and the mover, the moving element includes a moving direction of the moving element and a moving direction of the moving element. A linear motor, characterized in that parallel through holes are formed, and a cooling pipe for circulating a cooling liquid for cooling the coil is inserted through the through holes so as to be movable relative to the moving element. Drive device used. 2. A drive device using a linear motor according to claim 1, wherein the linear motor includes two motor units each including the permanent magnet and the coil, and each permanent magnet and each permanent magnet of each motor unit. A driving device using a linear motor, characterized in that the coil and the coil are arranged in the space formed in the base body so as to be plane-symmetrical to each other. 3. A drive device using a linear motor according to claim 2, wherein the separation distance between the permanent magnets of the two motor units is
A drive device using a linear motor, characterized in that the magnetic force due to the magnetic pole arrangement of each permanent magnet is set to a distance that does not affect each other. 4. A drive device using a linear motor according to claim 1, 2 or 3, wherein the cooling pipe is formed of stainless steel. 5. A driving device using a linear motor according to claim 1, 2, 3 or 4, wherein the cooling pipe is supported by a ball bush provided in the through hole. Drive. 6. A beam source for repeatedly emitting a pulsed energy beam, a beam irradiation means for guiding and irradiating an energy beam emitted from the beam source to an object to be processed, the object to be processed and the object to be processed. A beam processing apparatus comprising: a relative moving unit that relatively moves an irradiation point of the energy beam with respect to an object; and a control unit that controls the beam source and the relative moving unit based on processing control data. A beam processing apparatus, characterized in that a drive device using the linear motor according to claim 1, 2, 3, 4 or 5 is used.