JP2003042900A - Inspecting apparatus and inspecting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To individually adjust a different optical timing every panel to automate the panel sorting after inspection, thereby reducing the inspecting time. SOLUTION: A conveyer 82 carries display panels to inspecting sections. An ID reader 84 detects an ID of the panel, an image processor 85 takes in an image, and an optical driving timing setting unit 86 detects and sets an optimum timing. A management controller 91 holds these inspection results to be used for following inspections. A measuring system inspection unit 87 inspects a measuring system, and a point defect inspection unit 88 and a plane defect inspection unit 89 conduct a point defect inspection and a plane defect inspection, respectively. For these inspections, the inspection results stored in the controller 91 are usable to inspect the display panels at the optical timing, using the taken images, and manage them every ID. A printer 90 prints indications based on the inspection results, and an ejector 83 sorts the panels by ranks and sheds them on trays, thereby improving the inspection accuracy, reducing the inspecting time and automating the sorting.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection device and an inspection method for performing a measuring system inspection and a count inspection of a liquid crystal panel.

[0002]

2. Description of the Related Art A liquid crystal device such as a liquid crystal light valve is constructed by enclosing a liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, for example, a thin film transistor (hereinafter, referred to as T
By arranging active elements such as FT) in a matrix, and arranging a counter electrode on the other substrate, and changing the optical characteristics of the liquid crystal layer sealed between both substrates according to an image signal,
Enables image display.

The TFT substrate on which the TFTs are arranged and the counter substrate opposed to the TFT substrate are manufactured separately.
After both substrates are bonded with high precision in the panel assembly process, liquid crystal is sealed.

In the panel assembling process, first, an alignment film is formed on the facing surfaces of the TFT substrate and the counter substrate manufactured in each substrate process, that is, on the surfaces of the counter substrate and the liquid crystal layer of the TFT substrate in contact with each other. Then, a rubbing process is performed. Next, a seal portion serving as an adhesive is formed on the edge of one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. An injection port is provided in part of the seal part,
Liquid crystal is filled through this inlet.

Generally, from the viewpoint of productivity and yield, a plurality of TFT substrates are simultaneously formed on a mother glass substrate until the bonding step. Opposing substrates are attached to the respective TFT substrates formed on the mother glass substrate, and liquid crystal is sealed therein to form cells. In the scribing step, a notch is made in each cell of the mother glass substrate, and the notches are utilized to divide each cell to obtain a liquid crystal panel chip.

After a flat cable such as an FPC is crimped to an external connection terminal of a liquid crystal panel chip, a case made of resin or the like is adhered to protect the panel chip to obtain a liquid crystal panel.

For the liquid crystal panel thus completed,
Panel display characteristic inspection is performed. The panel display characteristic inspection includes, for example, a measurement system inspection such as a transmittance contrast measurement, and a visual display characteristic inspection such as a count inspection of point defects and a sensory inspection such as surface unevenness. Generally, each inspection process is independently performed as a separate process.

The following problems are involved in such a panel display characteristic inspection.

(1) Since each inspection process is divided, the quality of the entire inspection lot can be known, but the quality of each individual cannot be grasped.

(2) Work-in-process products between each inspection process are accumulated as inventory.

(3) If the driving timing of the panel such as the sample and hold timing shifts due to manufacturing variations, the displayed image shifts and a ghost or the like occurs. Strictly speaking, the optimum drive timing of the panel varies from panel to panel, but individual timing adjustment is impossible and the inspection becomes inaccurate.

(4) Since the projection inspection is a visual inspection, it requires a high level of skill in the inspection, and there is a risk of ambiguity or oversight of the determination.

(5) In order to identify and display the determination result of each inspection on the panel, an additional work such as printing is necessary even though it is an inspection process.

Therefore, in order to solve these problems,
In recent years, automatic inspection devices have been put to practical use. In the automatic inspection device, measurement system inspection such as transmittance contrast measurement and visual display characteristic inspection such as point defect and surface unevenness are performed.

By automating these inspections,
There are advantages such as not requiring skill for inspection.

[0016]

However, even if the automatic inspection device is adopted, it is not possible to solve all the problems (1) to (5) described above. That is, even in the inspection by the automatic inspection device, the optimum timing different for each panel cannot be individually adjusted like the visual inspection, and the optimum inspection cannot be performed. Further, it is necessary to manually classify the panels according to the installation method and the judgment ranks of the panels, and the number of steps is not reduced even if the inspection is automated. Further, in the inspection using an image, it is necessary to execute an image capturing process for each inspection and perform each step up to the determination using the captured image, which causes a problem that the inspection requires a long time. .

The present invention has been made in view of the above problems, and an object thereof is to provide an inspection apparatus and an inspection method capable of individually adjusting different optimum timings for each panel. To do.

Another object of the present invention is to provide an inspection apparatus and inspection method capable of automating a panel installation method and panel classification for each determination rank.

Another object of the present invention is to provide an inspection apparatus and an inspection method which can shorten the time required for inspection by utilizing the image in a plurality of inspections by one image capturing process. .

[0020]

An inspection apparatus according to the present invention comprises an image capturing means for capturing an image on a display panel, a weighing system inspecting means for inspecting the weighing system of the display panel, and an image capturing means. A count inspection means for performing a count inspection of the display panel by using the captured image, and a conveying means for conveying the display panel to the image capturing means, the measurement system inspection means, and the count inspection means are provided. Characterize.

According to this structure, the image on the display panel is captured by the image capturing means. The measurement system inspection means performs a measurement system inspection of the display panel. The counting inspection means performs the counting inspection of the display panel. In this case, the counting inspection means uses the image captured by the image capturing means. Therefore, it is not necessary to capture an image for each measurement system inspection, and the inspection time can be shortened.

The inspection apparatus according to the present invention comprises an optimum timing inspection means for detecting the optimum drive timing of the display panel, a measurement system inspection means for inspecting the measurement system of the display panel, and an optimum timing detected by the optimum timing inspection means. An image capturing means for capturing an image of the display panel and a count inspection means for performing a count inspection of the display panel by using drive timing, the optimum timing inspection means, the image capture means, a weighing system inspection means, and the count. The inspecting means includes a conveying means for conveying the display panel.

With such a structure, the optimum drive timing of the display panel is detected by the optimum timing inspection means. The measurement system inspection means performs the measurement system inspection of the display panel, and the counting inspection means performs the counting inspection of the display panel. At the time of the count inspection, the optimum drive timing detected by the optimum timing inspection means is used. As a result, the accuracy of each inspection can be improved.

The inspection apparatus according to the present invention is the display panel I
ID reading means for detecting D, image capturing means for taking in an image of the display panel, weighing system inspecting means for inspecting the weighing system of the display panel, and counting inspecting means for performing the counting inspection of the display panel, Conveying means for conveying the display panel to the image capturing means, the measuring system inspecting means and the counting inspecting means, and the measuring system inspecting means and the counting inspection for each display panel by the ID detected by the ID reading means. And a determination means for obtaining the inspection result of the means.

According to this structure, the ID of the display panel is detected by the ID reading means. The measurement system inspection means performs the measurement system inspection of the display panel, and the counting inspection means performs the counting inspection of the display panel. The ID read by the ID reading means is used during the measurement system inspection and the count inspection, and each inspection result is managed and controlled for each display panel.

The inspection device according to the present invention comprises an image capturing means for capturing an image of the display panel, a weighing system inspecting means for inspecting the weighing system of the display panel, and a counting inspecting means for performing the counting inspection of the display panel. A transporting means for transporting the display panel to the image capturing means, the weighing system inspecting means, and the counting inspecting means, and the display panels are classified based on the inspection results of the weighing system inspecting means and the counting inspecting means. It is characterized by comprising a judging means and a printing means for printing a display showing the classification of the inspection result on the display panel after the inspection based on the judgment result of the judging means.

According to this structure, the measuring system inspecting means performs the measuring system inspection of the display panel, and the counting inspecting means performs the counting inspection of the display panel. The determination means classifies the display panel based on each inspection result. The printing means prints a display indicating the classification of the inspection result on the display panel according to this classification. Thus, the inspector can grasp the classification according to the inspection result by the printed display.

The inspection apparatus according to the present invention includes an image capturing means for capturing an image of the display panel, a weighing system inspecting means for inspecting the weighing system of the display panel, and a counting inspecting means for performing a counting inspection of the display panel. A transporting means for transporting the display panel to the image capturing means, the weighing system inspecting means, and the counting inspecting means, and the display panels are classified based on the inspection results of the weighing system inspecting means and the counting inspecting means. Determination means, a tray determination means for determining a tray for storing the display panel after the inspection based on the determination result of the determination means, and according to the determination of the tray determination means,
And a material removing means for moving the display panel after the inspection to a tray according to the classification.

According to this structure, the measuring system inspecting means performs the measuring system inspection of the display panel, and the counting inspecting means performs the counting inspection of the display panel. The determination means classifies the display panel based on each inspection result. The tray determining means determines a tray for storing the display panel after inspection according to this classification. According to this determination, the material removing means moves the display panel after the inspection to the tray according to the classification. As a result, classification and storage according to the inspection result are automatically performed.

It is characterized in that the material removing means moves the display panel after the inspection to a plurality of trays stacked one above the other and stores them.

According to this structure, the area of the place where a plurality of trays are arranged may be small.

When a new classification is generated as a result of the display panel determination, the tray determining means determines the empty tray located at the top of the plurality of trays stacked above and below for the new classification. It is characterized in that it is determined as the tray of.

With such a configuration, when the inspection result of the display panel is a new classification, the tray located at the top among the trays for which the classification is not determined is determined as the tray for the new classification. To be done. That is, the classification of the trays is not determined in advance, and it is possible to prevent the trays from being wastefully used as in the case where the classifications are small.

The counting inspection means includes at least one of a point defect inspection means for inspecting a point defect in the image and a surface defect means for inspecting a surface defect in the image.

According to this structure, when inspecting the point defect and the surface defect of the image, the already captured image can be used, so that the processing time of these can be shortened.

The counting inspection means includes a plurality of inspections after the image capturing by the image capturing means, the optimum driving timing detection by the optimum timing inspection means, and the ID detection by the ID reading means. In some cases, these multiple tests are processed in parallel.

According to such a configuration, the counting inspection is processed in parallel, so that the time required for the processing can be shortened.

According to the inspection method of the present invention, the I
ID reading procedure for detecting D, optimum timing inspection procedure for detecting optimum driving timing of the display panel, image capturing procedure for capturing an image on the display panel, and I
D, the optimum drive timing and the captured image are used to perform a measurement system inspection of the display panel and a measurement system inspection and a count inspection procedure for performing a count inspection of the display panel.

With such a configuration, the ID of the display panel is detected in the ID reading procedure, the optimum drive timing is detected in the optimum timing inspection procedure, and the image of the display panel is captured in the image capturing procedure. The ID system, the optimum drive timing, and the captured image are used to perform the measurement system inspection of the display panel and the counting inspection of the display panel. Therefore, at the time of the measurement system inspection and the count inspection, the inspection is performed at the optimum driving timing to improve the inspection accuracy, the already captured image is used, the inspection time is shortened, and each inspection result is obtained by using the ID. The judgment can be held for each display panel.

[0040]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows the first of the present invention.
2 is a block diagram showing an inspection device according to the embodiment of FIG.
FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device. Figure 3 shows a TFT
FIG. 4 is a plan view of an element substrate such as a substrate together with the components formed on the element substrate as viewed from the counter substrate side, and FIG. 4 is a view showing a liquid crystal after the assembly process for sealing the liquid crystal by bonding the element substrate and the counter substrate to each other. FIG. 4 is a cross-sectional view showing the device cut at a position of line HH ′ in FIG. 3. FIG. 5 is a sectional view showing the liquid crystal device in detail.

First, the structure of the liquid crystal panel to be inspected will be described with reference to FIGS.

As shown in FIGS. 3 and 4, the liquid crystal panel is constructed by enclosing the liquid crystal 50 between the element substrate 10 such as a TFT substrate and the counter substrate 20. Pixel electrodes that form pixels are arranged in a matrix on the element substrate 10. FIG. 2 shows an equivalent circuit of the elements on the element substrate 10 which form the pixels.

As shown in FIG. 2, in the pixel area,
The plurality of scanning lines 3a and the plurality of data lines 6a are arranged so as to intersect with each other, and the pixel electrodes 9a are arranged in a matrix in a region partitioned by the scanning lines 3a and the data lines 6a. A TFT 30 is provided corresponding to each intersection of the scanning line 3a and the data line 6a, and the pixel electrode 9a is connected to this TFT 30.

The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. This pixel electrode 9
A voltage between a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. Further, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 enables the voltage of the pixel electrode 9a to be retained for a time that is, for example, three digits longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.

FIG. 5 is a schematic sectional view of a liquid crystal panel focusing on one pixel.

The element substrate 10 made of glass or quartz is provided with an LD.
A TFT 30 having a D structure is provided. TFT30
Is provided with a scanning line 3a forming a gate electrode via an insulating film 2 in a semiconductor layer in which a channel region 1a, a source region 1d and a drain region 1e are formed. A data line 6a is laminated on the TFT 30 via the first interlayer insulating film 4,
The data line 6a is electrically connected to the source region 1d through the contact hole 5. A pixel electrode 9a is stacked on the data line 6a via a second interlayer insulating film 7, and the pixel electrode 9a is electrically connected to the drain region 1e via a contact hole 8.

When the ON signal is supplied to the scanning line 3a (gate electrode), the channel region 1a becomes conductive,
The source region 1d and the drain region 1e are connected to each other, and the image signal supplied to the data line 6a is applied to the pixel electrode 9a.

A storage capacitor electrode 1f extending from the drain region 1e is formed in the semiconductor layer. The storage capacitance electrode 1f is connected to the capacitance line 3b via the insulating film 2 which is a dielectric film.
Are arranged so as to face each other, and thereby a storage capacitor 70 is formed. An alignment film 16 made of a polyimide-based polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction.

On the other hand, the counter substrate 20 is provided with a first light-shielding film 23 in a region facing the data line 6a, the scanning line 3a and the TFT 30 forming region of the TFT array substrate, that is, in the non-display region of each pixel. . Due to the first light-shielding film 23, incident light from the counter substrate 20 side allows the channel region 1a, the source region 1d and the drain region 1e of the TFT 30 to be incident.
Is prevented from entering. A counter electrode (common electrode) 21 is formed on the first light-shielding film 23 over the entire surface of the substrate 20. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21 and rubbed in a predetermined direction.

Liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. The TFT 30 writes the image signal supplied from the data line 6a in the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode 21, the orientation or order of the molecular assembly of the liquid crystal 50 is changed to modulate light and enable gradation display.

As shown in FIGS. 3 and 4, the counter substrate 20
A second light-shielding film 42 is provided as a frame for partitioning the display area. The second light shielding film 42 is, for example, the first light shielding film 2
It is made of the same or different light-shielding material as 3.

A sealing material 41 for enclosing the liquid crystal in a region outside the second light-shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and fixes the element substrate 10 and the counter substrate 20 to each other. The sealing material 41 is the element substrate 1
A part of one side of 0 is missing, and the liquid crystal 5 is provided in a gap between the bonded element substrate 10 and counter substrate 20.
A liquid crystal injection port 78 for injecting 0 is formed. After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.

A data line driving circuit 61 and a mounting terminal 62 are provided along the one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side. , A scanning line drive circuit 63 is provided. A plurality of wirings 64 for connecting the scanning line drive circuits 63 provided on both sides of the screen display area are provided on the remaining side of the element substrate 10. The element substrate 1 is provided at least at one corner of the counter substrate 20.
A conductive material 65 is provided to electrically connect 0 and the counter substrate 20.

In FIG. 1, the liquid supply panel 81 is provided with the liquid crystal panel shown in FIGS. The material supplying section 81 supplies the liquid crystal panel to the conveying section 82. The material supply unit 81 has stacked trays (not shown). A plurality of liquid crystal panels are arranged on each plastic molded tray. The material supply section 81 has a material supply tray section (not shown) in which trays are stacked and installed. On each tray, 20 liquid crystal panels to be inspected (hereinafter referred to as "inspection module") are arranged in, for example, 5 columns x 4 rows. The material supplying section 81 supplies the inspection module on the tray to the conveying section 82.

The transport section 82 automatically transports the liquid crystal panel to each inspection section. The transport unit 82 transports the liquid crystal panel between the inspection units by a pallet transport system (not shown) that moves in a loop. In addition, the transport unit 8
In No. 2, the liquid crystal panel that has undergone all the inspections is conveyed to the material removing unit 83.

Panel setting from the pallets to the trays or the inspection units by the transport unit 82 is performed by vacuum suction using an XY robot or a SCARA robot.

The material removing unit 83 removes the liquid crystal panel after the inspection from the inspection device. In the present embodiment, the material removing unit 83 is configured to classify the liquid crystal panels, which have been judged to be good or bad or rank by inspection, and place them on each tray.

The inspection section includes an ID reading section 84, an image processing section 85, an optimum drive timing setting section 86, a weighing system inspection section 87, a point defect inspection section 88, a surface defect inspection section 89 and a printing section 90. These inspection units are managed and controlled by the management control unit 91.

The ID reading section 84 reads the identification number of the liquid crystal panel which is the inspection module. A panel identification symbol is printed in advance on an FPC (flexible printed board) of a liquid crystal panel or the like in a previous step. ID
The reading unit 84 is disposed on the transport path of the transport unit 82,
For example, a bar code reader or the like reads the identification mark on the panel.

In this case, it is preferable to use a two-dimensional bar code in order to minimize the printing area. If the identification mark cannot be printed on the panel, the ID reading unit 84 is not used, and an identification display such as an IC tag is attached to the pallet of the transport system on which the individual panels are mounted, and the pallet of the transportation system is attached in the apparatus. It may be used for identification of.

By recognizing the ID of the inspection module,
It becomes possible to individually manage the panel inspection data in each inspection unit.

The image processing section 85 is adapted to digitize and capture the projection screen of the panel for each inspection process that requires an image. FIG. 6 is an explanatory diagram showing a specific configuration of the image processing unit 85 in FIG.

The liquid crystal panel 100, which is an inspection module, is moved to a predetermined inspection position of the image processing section 85 by the transport section 82.
Are arranged. At the inspection position, a projection mechanism using the same optical system as the actual machine is provided.
That is, light is incident from the light source 103 using a high-pressure mercury lamp or the like through the incident optical system 106 to the liquid crystal panel 100 sandwiched between the incident polarizing plate 107 and the emitting polarizing plate 108, and then from the projection optical system 109 to the screen 101. Liquid crystal panel 10
Project 0 display screen. At this time, the wavelength of the light used may be white light, but green light, red light, and blue light may be used separately in order to detect a defect having different detection sensitivity depending on the wavelength.

An LCD driver 104 is arranged near the liquid crystal panel 100.

The LCD driver 104 has a probe mechanism (not shown) for transmitting an electric signal to the liquid crystal panel 100, and can drive the liquid crystal panel 100 according to an image signal from an image input board (not shown). It is like this. As a result, the image is projected on the screen 101.

The camera 102 such as CCD is provided on the screen 1
The display screen of 01 is taken in and digitized.

The projection mechanism enables the positioning with high accuracy by installing the panel horizontally like the panel transport system. Further, although the screen 101 is arranged in the upper direction of the liquid crystal panel 100 and the image projection direction is the vertical direction in FIG. 6, it is also possible to change the direction by 90 degrees using a reflection mirror and project the image in the horizontal direction. That is clear.

As the CCD camera 102, depending on the number of pixels of the panel, for example, horizontal 1300 × vertical 10
A 00 pixel black and white camera is used. Further, it is desirable that the number of gradations to be processed in order to detect a defect having a brightness slightly higher than that of the surroundings in the halftone display is 1024 gradations (10 bits or more). In the three-plate liquid crystal projector, one panel is black and white, so the CCD camera used for panel inspection as a device does not need to be color.

The camera output from the camera 102 is supplied to the image processing personal computer 105. Image processing personal computer 105
Is equipped with a memory (not shown), which performs predetermined image signal processing on the camera output and stores and holds the processed image as display screen data corresponding to the ID of the liquid crystal panel for use in various inspections. There is.

In FIG. 1, the optimum drive timing setting unit 8
6 detects the optimum drive timing when driving the panel,
The detection result is applied to subsequent inspections.

In a TFT liquid crystal panel having a built-in horizontal drive circuit, the transistor characteristics may be different due to the difference in manufacturing process, and the drive timing of the horizontal sample holder may be different for each model or individual. In this case, a shadow called a ghost phenomenon occurs in the pattern switching portion of the display screen. Therefore, the optimum drive timing setting unit 86 automatically shifts the drive timing while
The optimum timing is obtained by obtaining the timing that minimizes the ghost phenomenon.

For example, the optimum drive timing setting unit 86
Displays a pattern in which a ghost is easily visible in a state where the liquid crystal panel is arranged on a backlight such as a fluorescent tube (not shown). As a pattern for detecting a ghost, there is a window pattern screen in which the inside is black and the background is halftone.
The optimum drive timing setting unit 86 captures an image displayed on the liquid crystal panel with a CCD camera and calculates a ghost value from the captured image. The ghost value can be expressed by the following equation (1) using the brightness A of the background portion (ghost generation portion) adjacent to the window pattern and the brightness B of the background at a distant place.

Ghost value = (A−B) / B × 100 (%) (1) The measurement system inspection unit 87 executes the measurement system inspection of the liquid crystal panel. For example, the measurement system inspection unit 87 measures the transmittance, the contrast ratio, the TV characteristic, and the like. The measurement system inspection unit 87
It is equipped with an optical system (not shown) close to the actual machine, and illuminates incident light close to the actual machine to the liquid crystal panel on the inspection table to measure the transmitted light. If an illuminometer or a luminance meter is used as a transmitted light measuring device, highly accurate measurement can be performed.

Also, in an actual projector (actual machine), the angle distribution of incident light by the optical system differs depending on the panel size used. Therefore, in order to obtain incident light close to that of an actual machine, the optical system of the measurement system inspection unit 87 is provided with a mechanism in which the maximum incident angle is variable according to the panel size, so that the angle distribution of the incident light can be obtained regardless of the panel size. It can be approximated to a real machine.

The measuring system inspection section 87 acquires the difference in illuminance depending on the presence or absence of the panel as the transmittance, and acquires the difference between the white display and the black display as the contrast ratio data. In addition, the measurement system inspection unit 87 measures the illuminance when the video voltage is gradually changed to obtain the voltage transmittance characteristic (TV curve).
To get.

The point defect inspection section 88 performs image processing on the display screen data converted into position and gradation information by a CCD camera or the like, and carries out a point defect inspection. In the present embodiment, the point defect inspection unit 88 receives the display screen data of the processed image stored in the image processing personal computer 105 of the image processing unit 85 from the management control unit 91 described later to perform the point defect processing. Ready to run. Therefore, in the present embodiment, the point defect inspecting unit 88 does not require an image capturing device, and the point defect processing does not require an image capturing process.

Similar to the point defect inspection unit 88, the surface defect inspection unit 89 performs image processing of image data stored in advance in the image processing personal computer 105 to detect and determine a surface defect. .

The printing section 90 is provided with information (judgment information) on the inspection judgment results of various inspections, and prints a display based on the judgment information on a liquid crystal panel or the like. For example,
Based on the determination information, the printing unit 90 prints a determination result or a display of a symbol, a bar code, or the like similar to the determination result using an inkjet printer or the like on the portion of the inspection module.
When the printing color is black, it is preferable to print on the transparent FPC portion because it is easy to visually recognize.

The management control unit 91 manages and controls each inspection unit and the like, collects information from each inspection unit, and performs a predetermined process for obtaining the determination information of the inspection determination result. . In this embodiment, the management control unit 91
Is the image processing unit 85 during the point defect processing and the surface defect processing.
The display screen data stored and stored by is used.

Next, the operation of the embodiment thus configured will be described with reference to the flowcharts of FIGS. 7 to 18. 7 to 9 are for explaining the transportation of the liquid crystal panel as the inspection object, and FIGS.
Is for explaining the inspection process.

When the inspection process is started, the liquid crystal panel as the inspection module is placed on the pallet by handwork or the like in step S11 of FIG. Next, in step S12, the tray is set on the material supply unit 81.

Next, in step S13, material supply is started. FIG. 8 is for explaining the material supply in the material supply section in step S13. In step S21 of FIG. 8, a panel is sucked and held by a robot or the like from the uppermost tray of the material supply tray portion of the material supply portion 81 (step S2
2) Move to a predetermined place (step S23). In addition,
When all the liquid crystal panels on one tray have been moved and emptied, the panels are subsequently taken out from the next tray.

The liquid crystal panel on the tray supplied by the material supply section 81 is conveyed to each inspection section by the conveyance section 82. Each inspection is performed according to the flowchart of FIG. First, in step S13 of FIG.
The tray is conveyed to the ID reading unit 84. As shown in step S41 of FIG. 10, the liquid crystal panel is taken out from the material supply tray, and the identification ID of the panel is ID in step S42.
It is read by the reading unit 84.

FIG. 11 shows the ID reading process.
In step S51 of FIG. 11, when the start signal is given from the management control section 91, the ID reading section 84 moves the barcode reader downward (step S52), and then in step S52.
Read the identification at 53. Next, in step S54, the ID reading section 84 reads the I of each liquid crystal panel.
D is output to the management control unit 91. After that, the ID is read and the information is sequentially transferred to the transported liquid crystal panel.

Next, in step S14 of FIG. 7, the transfer section 82 transfers the inspection module to the weighing system inspection section 87. In step S43 of FIG. 10, the measurement system inspection unit 87
Conducts various inspections of the weighing system. FIG. 12 shows the measuring system inspection process.

In step S61 of FIG. 12, when a start signal is given from the management control unit 91, the measurement system inspection unit 87.
Performs the illuminance measurement without the panel (step S62), arranges the panel on the inspection table in step S63, and measures the illuminance of the all-white image (step S63). Next, the measurement system inspection unit 87 measures the illuminance of the all-black image in step S65, and measures the illuminance when the voltage is changed in step S66. The measurement system inspection unit 87 performs step S67.
At, the measurement result is output to the management control unit 91.

The management control unit 91 calculates the transmittance, the contrast ratio and the TV characteristic based on the measurement result of the measurement system inspection unit 87.

Next, in step S15 of FIG. 7, the carrying section 82 carries the inspection module to the optimum drive timing setting section 86. In step S44 of FIG. 10, the optimum drive timing setting unit 86 detects the optimum timing. FIG. 13 shows the optimum timing detection process.

In step S71 of FIG. 13, when the start signal is given from the management control section 91, the optimum drive timing setting section 86 drives the liquid crystal panel at a predetermined timing in step S72. Next, in this state, the drive timing setting unit 86 causes the liquid crystal panel to display a window pattern with a medium black background and a halftone background (step S7).
3). Next, in step S74, the image is captured by the CCD camera and the brightness difference (ghost) around the window
Is calculated (step S75). Drive timing setting unit 8
6 is step S76, based on the ghost calculation result.
In S79, the timing is changed. The drive timing setting unit 86 repeats the processing of steps S73 to S76 until the setting timing. In step S77, the drive timing setting unit 86 detects the timing when the ghost becomes the minimum value as the optimum timing. The optimum drive timing setting unit 86 outputs the measurement result to the management control unit 91 in step S78.

Next, in step S16 of FIG. 7, the carrying section 82 supplies the inspection module to the image processing section 85. In step S45 of FIG. 10, the image processing unit 85 takes in a plurality of projected images. FIG. 14 shows the image capturing process.

In step S81 of FIG. 14, when a start signal is given from the management controller 91, the image processor 85
In step S82, the image is displayed on the liquid crystal panel and the image is picked up by the CCD camera 102 (step S83). The captured image is stored and held in the image processing personal computer 105 in step S84. next,
The image processing unit 85 changes the pattern displayed on the liquid crystal panel (step S86) and repeats the same processing.

Next, in step S17 of FIG. 7, the carrying section 82 carries the inspection module to the defect inspection sections 88 and 89. In step S46 of FIG. 10, first, the point defect inspection unit 88 detects a point defect. FIG. 15 shows a point defect inspection process.

In step S91 of FIG. 15, when a start signal is given from the management control unit 91, the point defect inspection unit 88
In step S92, the screen data read by the image processing unit 85 is read. Image processing personal computer 10
The screen data from No. 5 is supplied to the point defect inspection unit 89 via the management control unit 91.

The point defect inspecting unit 88 is, for example, as follows (A
Point defect processing is performed by the algorithms shown in 1) to (C1).

(A1) The original screen is averaged in units of 5 × 5 pixels or the like, and the difference from the original screen is calculated to correct the uneven brightness.

(B1) The original screen is binarized according to the judgment standard,
The white level is used as the bright spot candidate.

(C1) The luminance value and area of each bright spot candidate are examined, and a bright spot having a standard luminance or more and a standard area or more is determined as a bright spot.

In the case of a black point, the same processing is carried out for the one which becomes a black level when binarizing (B1).

That is, the point defect inspection unit 88 determines in step S93.
In step S94, the original screen is binarized with the set threshold value.
The black part is masked with and the white part is extracted from the original screen. In step S95, the extracted part is compared with the judgment standard, and in step S95.
At 96, bright spots are detected and judged. Furthermore, the point defect inspection unit 88
In step S97, the original screen is binarized with the set threshold, the white part is masked in step S98, the black part is extracted from the original screen, the extracted part is compared with the judgment standard in step S99, and the black dot part is extracted in step S100. Detect and judge. Next, in step S101, the point defect inspection unit 88 selects another file, returns the process to step S92, and repeats the same process until the final screen file. Point defect inspection unit 88
Manages the measurement results in step S102
Output to.

Next, in step S47 of FIG. 10, the surface defect inspection section 89 detects a surface defect. FIG. 16 shows the surface defect inspection process.

In step S111 in FIG. 16, when the start signal is given from the management control unit 91, the surface defect inspection unit 8
In step S112, the CPU 9 reads the screen data that has been captured by the image processing unit 85. The screen data from the image processing personal computer 105 is supplied to the surface defect inspection unit 89 via the management control unit 91.

The surface defect inspecting section 89 is, for example, as follows (A
2) Through (E2), the surface defect processing is performed. The following algorithm shows an algorithm for a luminance change of a relatively small area called a spot or a spot among defects.

(A2) The uneven brightness of the original screen is corrected.

(B2) The screen is averaged into a core size such as 5 × 5 pixels to form a block.

(C2) A block having a large difference from the surrounding blocks is set as a candidate for unevenness (D2), and the kernel size is 7
Set to several types such as × 7, 9 × 9, and (B2), (C
Perform 2).

(E2) The result image is multiplied by an appropriate coefficient and added to obtain the final result.

(F2) In the resulting image, the unevenness is determined based on the peak value and the area of the portion which is above the determination standard.

That is, the surface defect inspection section 89 determines in step S11.
In 3, the original screen is averaged in units of the set number of pixels, the difference with the adjacent area (block) is calculated in step S114, the result is compared with the determination standard in step S115, and the uneven portion is detected in step S116. .
Next, in steps S117 and S122, the surface defect inspection unit 89 changes the set number of pixels, returns the processing to step S113, and repeats the same processing until the maximum setting. Next, the surface defect inspection unit 89 adds up the detection results for each set pixel number in step S118, and determines the uneven portion in step S119. Next, the surface defect inspection unit 89 determines the steps S120 and S12.
In step 3, another file is selected and the process is performed in step S11.
Return to 2 and repeat the same process until the final screen file.
The surface defect inspection unit 89 outputs the measurement result to the management control unit 91 in step S121.

The step S48 in FIG.
7 shows the determination process in FIG. FIG. 17 is a flowchart showing the result determination process.

In the flowchart of FIG. 10, it is described that it is performed after the completion of all the inspections, but the determination process may be performed after each inspection. FIG. 17 shows that the determination process is performed each time each inspection result is received.

In step S131 of FIG. 17, the management control unit 91 starts the determination process based on the inspection result. The management control unit 91 receives the reception result of each inspection unit in step S132, and makes a determination respectively. The management controller 91
Based on the determination result, each liquid crystal panel is classified into ranks (step S133), and rank data is held for each liquid crystal panel (step S134).

Next, in step S18 of FIG. 7, the carrying section 82 carries the inspection module to the printing section 90. In step S49 of FIG. 10, the printing unit 90 prints based on the determination result. FIG. 18 shows the result printing process.

In step S142 of FIG. 18, when the printing unit 90 receives the determination result from the management control unit 91, the printing unit 90 moves the liquid crystal panel as the inspection module to the printing device such as the ink jet printer in step S143, and based on the determination result. Is printed to indicate the rank (step S
144).

Next, in step S19 of FIG. 7, the carrying section 82 carries the inspection module to the material removing section 83 (step S50 of FIG. 10). The material removing unit 83 removes the conveyed inspection module. FIG. 9 shows the material removal process.

After the inspection is completed, the material removing section 83 starts the material removal. The material removing unit 83 receives the rank of the liquid crystal panel to be removed from the management control unit 91 (step S32). Material removal section 83
The tray is set for each determination rank, and the tray is moved so that the inspected liquid crystal panel can be placed on the tray corresponding to the rank (step S33). Material removal section 8
In step S34, the liquid crystal panel 3 sets the liquid crystal panel in the tray corresponding to the rank. The material removing unit 83 uses step S35.
At, the information on the position of the set liquid crystal panel in the tray and the information such as the tray number are output to the management control unit 91.

Although the material removing section 83 has described an example in which trays are created in advance for each rank, even if the uppermost empty tray is determined for that rank when a new rank is generated. Good. In this case, the required number of trays may be small even if the distribution of the determination result cannot be predicted.

Further, in FIG. 10, it has been described that the respective inspections are sequentially performed. However, it is clear that the ID recognition, the image capture, and the inspections after the optimum timing inspection can be performed by parallel processing.
Even in this case, other inspections can be performed by utilizing the inspection results of the ID recognition, the image capture, and the optimum timing. The inspection time can be significantly shortened by parallel processing.

As described above, in the present embodiment, the optimum timing information different for each panel can be used in each inspection section, so that the inspection can be optimized. Further, since the management control unit collectively processes the information obtained by each inspection unit, the sorting work between the inspection units becomes unnecessary. In addition, since the defect information of each panel can be collectively processed, it becomes easy to feed back the quality information to the previous process. The captured image is used in a plurality of inspections that require an image, and it is not necessary to capture an image for each inspection, so the total inspection time can be shortened. Further, the metrology system inspection, the point defect inspection and the surface defect inspection can be divided and processed, and the inspection time can be shortened. Further, the individual can be identified and the rank can be printed for each individual, and incidental work such as classification can be automated.

[0119]

As described above, according to the present invention, it is possible to individually adjust different optimum timings for each panel, and the panel installation method and panel classification for each judgment rank can be performed. It can be automated, and further, by using the image in a plurality of inspections by one image capturing process, it is possible to shorten the time required for the inspection.

[Brief description of drawings]

FIG. 1 is a block diagram showing an inspection device according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device.

FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon.

FIG. 4 is a cross-sectional view showing the liquid crystal device after the assembly process in which the element substrate and the counter substrate are attached to each other and the liquid crystal is sealed, taken along line HH ′ in FIG.

FIG. 5 is a cross-sectional view showing a liquid crystal device in detail.

6 is an explanatory diagram showing a specific configuration of an image processing unit 85 in FIG.

FIG. 7 is a flowchart for explaining the operation of the embodiment.

FIG. 8 is a flowchart for explaining the operation of the embodiment.

FIG. 9 is a flowchart for explaining the operation of the embodiment.

FIG. 10 is a flowchart for explaining the operation of the embodiment.

FIG. 11 is a flowchart for explaining the operation of the embodiment.

FIG. 12 is a flowchart for explaining the operation of the embodiment.

FIG. 13 is a flowchart for explaining the operation of the embodiment.

FIG. 14 is a flowchart for explaining the operation of the embodiment.

FIG. 15 is a flowchart for explaining the operation of the embodiment.

FIG. 16 is a flowchart for explaining the operation of the embodiment.

FIG. 17 is a flowchart for explaining the operation of the embodiment.

FIG. 18 is a flowchart for explaining the operation of the embodiment.

[Explanation of symbols]

81 ... Material supply department 82 ... Transport unit 83 ... Material removal section 84 ... ID reading unit 85 ... Image processing unit 86 ... Optimal drive timing setting unit 87 ... Measuring system inspection section 88 ... Point defect inspection section 89 ... Surface defect inspection section 90 ... Printing section 91 ... Management control unit

Claims (10)

[Claims] 1. An image capturing means for capturing an image of a display panel, a weighing system inspecting means for inspecting a weighing system of the display panel, and an image captured by the image capturing means for utilizing the image of the display panel. An inspection apparatus comprising: a count inspection unit that performs a count inspection; and an image capturing unit, a weighing system inspection unit, and a conveyance unit that conveys the display panel to the count inspection unit. 2. An optimum timing inspection means for detecting an optimum drive timing of a display panel, a measurement system inspection means for inspecting a measurement system of the display panel, and an optimum drive timing detected by the optimum timing inspection means are used. An image capturing means for capturing an image of the display panel and a counting inspection means for performing a counting inspection of the display panel; the optimum timing inspection means, the image capturing means, a weighing system inspection means and the counting inspection means; An inspection apparatus comprising: a conveying unit that conveys 3. An ID reading unit for detecting an ID of a display panel, an image capturing unit for capturing an image of the display panel, a weighing system inspecting unit for inspecting the weighing system of the display panel, and a counting of the display panel. Counting inspecting means for inspecting, transporting means for transporting the display panel to the image capturing means, the weighing system inspecting means, and the counting inspecting means, and the ID detected by the ID reading means for each display panel An inspection apparatus comprising: a measurement system inspection means and a determination means for obtaining an inspection result of the counting inspection means. 4. An image capturing means for capturing an image of a display panel, a weighing system inspecting means for inspecting the display panel in a weighing system, a counting inspecting means for performing a count inspection of the display panel, the image capturing means, Conveying means for conveying the display panel to the measuring system inspecting means and the counting inspecting means, judging means for classifying the display panel based on inspection results of the measuring system inspecting means and the counting inspecting means, and the judging means An inspection apparatus comprising: a printing unit that prints a display indicating the classification of the inspection result on the display panel after the inspection based on the determination result of 1. 5. An image capturing means for capturing an image of the display panel, a weighing system inspecting means for inspecting the display panel in a weighing system, a counting inspection means for performing a counting inspection of the display panel, and the image capturing means. Transporting means for transporting the display panel to the measuring system inspecting means and the counting inspecting means; determining means for classifying the display panel based on inspection results of the measuring system inspecting means and the counting inspecting means; Tray determining means for determining a tray for storing the display panel after inspection based on the determination result of the means, and removing material for moving the display panel after inspection to the tray according to the classification according to the determination of the tray determining means. An inspection apparatus comprising: 6. The inspection apparatus according to claim 5, wherein the material removing unit moves the display panel after inspection to a plurality of trays stacked one above the other and stores the tray. 7. The tray determining means determines, when a new classification is generated as a result of the determination of the display panel, the empty tray located at the top of the plurality of trays stacked above and below the new tray. The inspection device according to claim 6, wherein the inspection device is determined as a classification tray. 8. The counting inspection means includes at least one of a point defect inspection means for inspecting a point defect of an image and a surface defect means for inspecting a surface defect of an image. The inspection device according to any one of claims. 9. The counting inspection means includes a plurality of inspections in the counting inspection after the image capturing by the image capturing means, the detection of the optimum driving timing by the optimum timing inspection means and the detection of the ID by the ID reading means. The inspection apparatus according to any one of claims 1 to 5, wherein when included, the plurality of inspections are processed in parallel. 10. An ID reading procedure for detecting an ID of a display panel, an optimal timing inspection procedure for detecting an optimal drive timing of the display panel, an image capturing procedure for capturing an image of the display panel, the ID, the optimal An inspection method comprising: a measurement system inspection and a count inspection procedure for performing a measurement inspection of the display panel and a count inspection of the display panel by using a drive timing and a captured image.