JP2003039328A - メタルボンドホイール及びその製造方法 - Google Patents
メタルボンドホイール及びその製造方法Info
- Publication number
- JP2003039328A JP2003039328A JP2001232412A JP2001232412A JP2003039328A JP 2003039328 A JP2003039328 A JP 2003039328A JP 2001232412 A JP2001232412 A JP 2001232412A JP 2001232412 A JP2001232412 A JP 2001232412A JP 2003039328 A JP2003039328 A JP 2003039328A
- Authority
- JP
- Japan
- Prior art keywords
- metal bond
- wheel
- mass
- bond wheel
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 88
- 239000002184 metal Substances 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000006061 abrasive grain Substances 0.000 claims abstract description 36
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 21
- 239000010432 diamond Substances 0.000 claims abstract description 21
- 239000011230 binding agent Substances 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims abstract description 10
- 229910020646 Co-Sn Inorganic materials 0.000 claims abstract description 5
- 229910020709 Co—Sn Inorganic materials 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 12
- 238000005245 sintering Methods 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000945 filler Substances 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 5
- 239000011707 mineral Substances 0.000 claims description 5
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052582 BN Inorganic materials 0.000 claims description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 37
- 239000010949 copper Substances 0.000 abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052802 copper Inorganic materials 0.000 abstract description 15
- 229910052742 iron Inorganic materials 0.000 abstract description 5
- 229910052718 tin Inorganic materials 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 43
- 230000000704 physical effect Effects 0.000 description 14
- 238000012360 testing method Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000011109 contamination Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000227 grinding Methods 0.000 description 5
- 238000013001 point bending Methods 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000007688 edging Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229910020810 Sn-Co Inorganic materials 0.000 description 1
- 229910018757 Sn—Co Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001232412A JP2003039328A (ja) | 2001-07-31 | 2001-07-31 | メタルボンドホイール及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001232412A JP2003039328A (ja) | 2001-07-31 | 2001-07-31 | メタルボンドホイール及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003039328A true JP2003039328A (ja) | 2003-02-13 |
| JP2003039328A5 JP2003039328A5 (https=) | 2005-07-07 |
Family
ID=19064341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001232412A Pending JP2003039328A (ja) | 2001-07-31 | 2001-07-31 | メタルボンドホイール及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003039328A (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005177889A (ja) * | 2003-12-17 | 2005-07-07 | Kurenooton Kk | メタルボンドホイールの製造方法及びそれに使用される金型 |
| JP2008229794A (ja) * | 2007-03-22 | 2008-10-02 | Mizuho:Kk | 超砥粒メタルボンド砥石 |
| US9102038B2 (en) | 2011-08-24 | 2015-08-11 | Nippon Steel & Sumikin Materials Co., Ltd. | Beveling grindstone |
| US11383350B2 (en) | 2017-02-28 | 2022-07-12 | 3M Innovative Properties Company | Metal bond abrasive articles and methods of making metal bond abrasive articles |
-
2001
- 2001-07-31 JP JP2001232412A patent/JP2003039328A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005177889A (ja) * | 2003-12-17 | 2005-07-07 | Kurenooton Kk | メタルボンドホイールの製造方法及びそれに使用される金型 |
| JP2008229794A (ja) * | 2007-03-22 | 2008-10-02 | Mizuho:Kk | 超砥粒メタルボンド砥石 |
| US9102038B2 (en) | 2011-08-24 | 2015-08-11 | Nippon Steel & Sumikin Materials Co., Ltd. | Beveling grindstone |
| US11383350B2 (en) | 2017-02-28 | 2022-07-12 | 3M Innovative Properties Company | Metal bond abrasive articles and methods of making metal bond abrasive articles |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041105 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041105 |
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| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070409 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070612 |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080108 |