JP2003019750A - Method for manufacturing laminated metal strip with resin and manufacturing apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminated metal strip with a resin capable of continuously performing pressurization and thermosetting treatment and the winding feed of the laminated metal strip with the resin and drastically enhancing the adhesion reliability of an adhesion interface, and a manufacturing apparatus suitable therefor. SOLUTION: In the method for manufacturing the laminated metal strip with the resin by bonding a second metal strip to the surface on the resin layer side of a metal strip with the resin having a first metal layer and a thermosetting resin layer, the metal strip with the resin and the second metal strip are superposed one upon another to be mated with the outer periphery of a heating curved surface and bonded under pressure while continuously heated on the outer periphery of a heating curved surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a laminated metal strip with a resin and an apparatus for producing a laminated metal strip with a resin, which are used as a material for a wiring board of a semiconductor device, for example.

[0002]

2. Description of the Related Art As a material for a wiring board of a semiconductor package, a resin-coated metal composed of a conductive layer and an insulating layer forming a circuit is often used. In metal with resin, the conductive layer is generally made of metal and is formed by electrolytic copper foil, rolled copper foil, copper plating, or the like. In addition, the insulating layer is generally made of resin, and because it withstands heating processes such as wire bonding, die bonding, and mold included in the semiconductor package manufacturing process, thermosetting resin having heat resistance is often used instead of thermoplastic resin. There is. Specifically, an epoxy resin, a polyimide resin, a polyamideimide resin, or the like is used. These resin-coated metals can be manufactured by applying a liquid resin dissolved in a solvent onto the surface of the metal foil.

With the recent reduction in the thickness of semiconductor packages, metal with resin has been reduced in thickness. For example, the thickness of the metal layer that becomes the conductive layer is 12 to 35 μm, and the thickness of the resin layer that becomes the insulating layer is about 30 to 80 μm. As a result, the metal with resin has its own rigidity. It is becoming difficult to maintain the shape by itself. Therefore, in these resin-coated metals with a thin plate thickness, the carrier layer is 20 to 200 μm.
A material having a laminated structure of a conductor layer / resin layer (insulating layer) / carrier layer whose example is shown in FIG. 3B is used by separately bonding a metal having a certain thickness to the resin side. The metal with resin having the above is referred to as a laminated metal with resin). In the above-mentioned laminated metal with resin, the first metal layer to be the conductive layer and the second metal layer of the plate material to be the carrier layer are not necessarily the same material, and for example, copper or copper alloy is used as the first metal. Is mainly used, and as the second metal, copper, copper alloy, stainless steel, iron-nickel alloy or the like is used.

In this laminated metal with resin, the resin layer, which is an insulating layer, also serves as a joining layer for joining the conductor layer and the carrier layer. As described above, a thermosetting resin is used for the resin layer, but since the thermosetting resin develops an adhesive force with a thermosetting reaction, in order to obtain sufficient adhesive strength,
It is necessary to press the band material to be bonded in a closely contacted state and heat it for about 30 to 120 s for a long time (thermosetting treatment) as compared with the thermoplastic resin. Therefore, conventionally, for example, a plate material having a size pressurizable by the heating press 16 shown in FIG. 5 is supplied, and pressurization and thermosetting treatment are performed. Here, as the thermosetting treatment, in addition to the method of performing the bonding at the same time with the device shown in FIG. 5, temporary bonding is performed by the same device for a short time of pressurization and heating (5 s to), and then it is again heated in a separate heating furnace. There is also a method in which heating and holding are performed and a thermosetting reaction is promoted to complete the adhesion.

[0005]

In recent years, in order to improve the productivity of semiconductor packages, there is a demand for a resin-coated laminated metal of a band material that can be continuously processed, that is, a resin-laminated metal band (exemplified in FIG. 3). Has been done. Here, the band member refers to a plate member having a length that is longer than its width and that can be wound in a coil shape. In the case of producing a laminated metal strip with resin by the apparatus shown in FIG. 5, the laminated metal strip is wound (FIG. 5 (b) after being partially pressed by the heating press 16 and heat-cured (FIG. 5 (a)). )), The adjacent portions of the heat-cured portion are sequentially pressed and heat-cured in the same manner. In the case of this method, the thermosetting treatment becomes discontinuous at the end of the heating press 16 and the boundary 17 is unavoidable. As a result, there arises a problem of fluctuations in adhesive strength and generation of press marks at the boundary portion 17, and there is a concern that the material yield may be reduced during the production of semiconductor packages using the resin-coated laminated metal strip. In addition, in the apparatus shown in FIG.
Therefore, it is necessary to temporarily stop the winding of the material during the heat curing treatment or the temporary adhesion, which causes a problem that the productivity is lowered.

To solve the above-mentioned problem of productivity, a device generally used as a laminator, for example, the upper and lower crimping rolls 8 in the horizontal direction shown in FIG. 6 is provided, which is different from the crimping roll or the crimping roll. It is also possible to apply a device for heating both or one of the metal band with resin and the second metal band by using the heating device for the body, and continuously joining the two through the resin layer by the above-mentioned pressure-bonding roll. Conceivable. However, in such an apparatus, the time when the resin-coated metal strip and the second metal strip are pressed through the resin is the moment when they pass between the upper and lower pressure bonding rolls, which is sufficient for curing the thermosetting resin. It is very difficult to secure a long heat curing treatment time. As a result, a fatal problem of insufficient adhesive strength of the thermosetting resin occurs, and even when the purpose is temporary adhesion, the temporary adhesive strength is such that it can be handled until it is heated and held again after temporary adhesion. It is difficult to obtain and causes a serious problem such as peeling at the time of handling such as winding and thermosetting.

In the present invention, it is possible to continuously carry out pressure and thermosetting treatment and winding of the resin-coated laminated metal strip, and it is also possible to secure the temporary adhesive force of the thermosetting resin described above. (EN) Provided are a method for manufacturing a laminated metal band with a resin, in which the bonding reliability of a bonding interface is dramatically improved, and a manufacturing apparatus suitable for the method.

[0008]

Means for Solving the Problems The present inventors have found that the above problems can be solved by pressing the resin-coated laminated metal strip while continuously heating it along the outer peripheral surface of the heating curved surface. Was conceived.

That is, the method for producing a laminated metal band with resin according to the present invention is such that the second metal is formed on the resin layer side surface of the metal band with resin having two layers of the first metal layer and the thermosetting resin layer. In the method for manufacturing a laminated metal band with resin for joining bands, the metal band with resin and a second metal band are superposed on each other along the outer peripheral surface of the heating curved surface, and the resin is attached on the outer peripheral surface of the heating curved surface. This is a manufacturing method in which the metal strip and the second metal strip are continuously heated and pressed together.

In the above invention, the resin-coated metal strip is preheated immediately before the resin-coated metal strip is placed along the outer peripheral surface of the heating curved surface, and further, immediately before the resin-coated metal strip is placed along the outer peripheral surface of the heated curved surface. Preferably, it is characterized by passing through a guide roll provided in parallel with the heating curved surface, and further preheating the metal band with resin by the guide roll.

Another method of manufacturing a laminated metal band with a resin according to the present invention is a method for manufacturing a laminated metal band with a resin in which a first metal band and a second metal band are joined via a thermosetting resin band. In the method, the first metal strip, the resin strip, and the second metal strip are superposed on each other along the outer circumferential surface of the heating curved surface, and the first metal strip, the resin strip, and the second strip are formed on the outer circumferential surface of the heating curved surface. In this method, the second metal strip and the second metal strip are continuously heated and pressed together.

In the above invention, in addition, it is preferable that the joining is performed in a vacuum chamber.

Next, the apparatus for producing a laminated metal band with resin according to the present invention comprises an unwinding means for unwinding a resin-coated metal band consisting of two layers of a first metal layer and a thermosetting resin layer, and a second In the state where the unwinding means for unwinding the metal strip and the heating curved surface capable of heating the outer peripheral surface are provided, and the metal strip with resin and the second metal strip are overlapped on the outer peripheral surface of the heating curved surface. It is a moving device.

In the above-mentioned manufacturing apparatus, it is preferable that a guide roll is provided in parallel with the heating curved surface, and the guide roll is provided with a heating device for preheating the metal band with resin before supplying to the heating curved surface.

Another embodiment of the apparatus for producing a laminated metal strip with resin according to the present invention is: unwinding means for unwinding the first metal strip, unwinding means for unwinding the thermosetting resin strip, and second metal. The unwinding means for unwinding the strip and the heating curved surface capable of heating the outer peripheral surface are provided, and the first metal strip, the thermosetting resin strip, and the second metal strip are provided on the outer peripheral surface of the heating curved surface. It is a manufacturing device that moves in a state of being overlapped with each other.

In the above manufacturing apparatus, it is preferable that at least the heating curved surface is arranged in a vacuum chamber.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION As described above, an important feature of the method for producing a laminated metal strip with resin and the production apparatus of the present invention is that the metal strip with resin and the second metal strip are brought into planar contact with each other. The reason is that the time required for bonding is secured by winding it along the outer peripheral surface of the heating curved surface in this state. In the present invention, the heating curved surface may be, for example, a cylindrical heating roll. Also, if the time required for bonding can be secured in the state of surface contact, it is not limited to the heating roll,
A thing like a heating belt can also be adopted. Specifically, for example, the apparatus shown in FIG. 1 which is an embodiment of the present invention can be used.

In FIG. 1, the resin-coated metal strip 1 unwound from the unwinder 12a and the second metal strip 3 unwound from the unwinder 12b are on the outer peripheral surface of the rotating heating roll 6. , The pressure contact and heating start positions 14 are laminated via the resin layer. After that, pressure is applied along the outer peripheral surface of the heating roll 6, and is pressed and heated while moving according to the rotation of the heating roll. When the pressure contact and heating end position 15 is reached, the laminated metal strip with resin 5 separates from the heating roll, the temperature decreases along the cooling roll, and then the winding machine 1
It is wound up by 3. In the method of the present invention, since the laminated metal strip with resin is along the heating roll, the heating roll not only performs the function of heating from the pressure contact and heating start position 14 to the pressure contact and heating end position 15, but also the resin-coated metal band 1 It also has a function of applying a pressure contact force for pressing the resin-coated metal strip 1 against the second metal strip 3 in cooperation with the tension applied to the.

In the conventional laminator shown in FIG. 6, the pressure contact and heating start / end positions are almost the same, and
While the heating time is extremely short, as described above, according to the method of the present invention, the pressure contact / heating state can be maintained from the pressure contact / heating start position 14 to the pressure contact / heating end position 15. It is possible to secure a sufficient adhesive strength for adhesion, and further a thermosetting treatment time until reaching an adhesive strength that does not require reheating after temporary adhesion. As a result, in the method and apparatus of the present invention, a thermosetting resin such as an epoxy resin, a polyimide resin, a polyamide-imide resin, a silicone resin, an acrylic resin, a polyester resin, or a polyurethane resin is used as the resin for the resin layer, if necessary. You can choose.

The heating time in the method and apparatus of the present invention depends on the time during which the resin-coated metal strip and the second metal strip are in contact with each other on the heating roll, but by adjusting the rotation speed of the heating roll. The heating time can be adjusted.
Therefore, the heating time can be adjusted continuously from short-time heating for the purpose of temporary adhesion to long-time heating for completing the thermosetting treatment.

Here, in order to develop the adhesive force of the thermosetting resin, at least a heating time of 1 s or more is required. In addition, when the heating is performed for more than 10 minutes, the thermosetting resin may be cross-linked to cure along the heating roll, resulting in a warped shape in the length direction after bonding.
Therefore, when manufacturing a resin-coated laminated metal strip using the method and apparatus of the present invention, after performing temporary bonding with a heating time of 1 s or more and 10 min or less, a thermosetting process is separately performed using a heating device, and bonding is performed. Is preferably completed. As a heating device separately performed, a continuous heating furnace capable of transporting the strip material can be used. Also, the laminated metal band with resin after temporary adhesion is heated in the state of a coil wound around a core having a diameter of 300 mm or more, and subjected to thermosetting treatment, and if necessary, shape correction using a leveler or the like. By doing so, it is possible to manufacture a laminated metal strip with resin.

As described above, the pressure for bringing them into close contact with each other is generated by the tension applied to the resin-coated metal strip by unwinding the resin-coated metal strip and winding the resin-coated laminated metal strip. In order to secure the pressure for further contact, it is also effective to install a pressure roll 8 after the pressure contact and heating start position 14 as shown in FIG. 1 and press both of them with the pressure roll 8 and the heating roll 6. It is preferable to use a soft material such as heat resistant rubber for the pressure-bonding roll in order to uniformly press the metal surface of the resin-coated metal strip without damaging the metal surface.

As the roll material of the heating roll used in the present invention, a heating roll made of copper can be used in consideration of thermal conductivity. However, the copper roll is soft and easily scratched, and, for example, when it is necessary to raise the roll temperature to 200 ° C. or more in the atmosphere, the roll surface becomes rough due to the oxidation of the surface, and the supplied strip material may be damaged. is there. Therefore, for the heating roll, it is more preferable to use stainless steel which has hardness, is not easily scratched, and has oxidation resistance. Here, stainless steel is an iron-based alloy containing 10% or more chromium by mass.

As already mentioned, a very thin copper foil, resin, etc. are used for the resin-coated metal strip, and the first metal strip layer and the resin layer constituting the resin-coated metal strip are thermally expanded. The coefficient is different. For these reasons, the metal band with resin may cause wrinkles due to thermal expansion during heating depending on the thickness of the first metal layer and the resin layer and the heating temperature of the heating roll. If temporary bonding is performed using a pressure roll with wrinkles generated, the wrinkled portions become unbonded portions and bubbles remain. Air bubbles cause swelling due to thermosetting treatment after temporary adhesion or heating in the semiconductor packaging process, separation of the first metal layer and carrier layer, and the like, which are serious product defects. The occurrence of such wrinkles can be reduced by preheating the resin-coated metal strip immediately before winding it on the outer peripheral surface of the heating roll.

By preheating, the first metal layer and the resin layer are thermally expanded before being wound around the outer peripheral surface of the heating roll.
The metal band with resin which has been preheated and thermally expanded causes wrinkles, but the wrinkles are stretched by the tension applied to the metal band with resin before the pressure contact and the heating start position on the outer peripheral surface of the heating roll. By supplying to the heating roll in this state, when being bonded to the second metal strip by the heating roll, it is possible to stack and contact both without wrinkles,
As a result, it is possible to reduce the factors that leave defects at the adhesive interface.

In the above, in order to more effectively spread the wrinkles of the preheated metal band with resin, a guide roll may be installed in parallel with the heating roll, and after passing through the guide roll, it may be supplied to the heating roll. preferable. Due to the effect of the tension applied to the resin-coated metal strip, most of the wrinkles caused by thermal expansion can be removed at the time of contact with the guide roll, and the factor that leaves a defect at the adhesive interface can be further reduced.

In order to effectively reduce defects by using the guide roll, the distance between the heating roll and the guide roll is important. The metal band with resin after passing through the guide roll keeps the shape in which wrinkles are stretched for a certain length, but wrinkles are apt to occur as the distance increases. Therefore, it is preferable that the distance from the metal strip with resin leaving the guide roll to the contact with the second metal strip on the heating roll is as short as possible. Specifically, on the common tangent line of the guide roll and the heating roll,
The distance between the common tangent and the contact points of the guide roll and the heating roll is preferably more than 0 mm and less than 30 mm. At 0 mm, the guide roll and the heating roll may come into contact with each other, and the first metal surface of the resin-coated metal strip may be damaged.
In addition, the rolls may come into contact with each other due to the thermal expansion of the rolls, and the material may be rolled down. If it is separated by 30 mm or more, the stretched shape cannot be maintained, wrinkles may occur intermittently, and there is a concern that the preheated temperature may decrease.
More preferably, it is 5 mm or more and 25 mm or less.

In the present invention, the resin-coated metal strip is preheated by heating the resin-coated metal strip directly with warm air, by directly heating with radiant heat from an infrared lamp heater, or by heating the guide roll itself. You can do it. In the former two heating methods, the metal band with resin is thin and has a small heat capacity and is easily affected by the outside air, so that temperature control may be difficult. Therefore, preferably, the guide roll is used for preheating.

By preheating the metal strip with resin by the guide roll and supplying it to the heating roll in the state where the wrinkles are extended, it is possible to most effectively perform the bonding with the defects suppressed. Since the guide roll and the heating roll are arranged close to each other as described above, the temperature drop during the movement can be minimized. As a method for heating the guide roll, heating from outside the guide roll can be performed, but it is preferable to incorporate a heating source in the guide roll. Examples of the heating source include a heat wire, an induction heating coil, and movement of a heat transfer medium inside the guide roll.

The preheating temperature is preferably controlled within ± 50 ° C. with reference to the temperature of the heating roll. When it is lower than 50 ° C, when it comes into contact with a heating roll, further thermal expansion occurs and wrinkles occur. If higher than 50 ℃,
On the contrary, contraction may occur and wrinkles may occur. More preferably, at the time of contact with the heating roll, the temperature of the metal band with resin is adjusted to be substantially the same as that of the heating roll.

In addition to the above, in order to effectively suppress the generation of wrinkles and reduce defects, it is preferable to cool the resin-coated laminated metal strip separated from the pressure welding and heating end position. By cooling the laminated metal band with resin to the glass transition temperature (Tg) or lower of the resin layer, the fluidity of the resin layer can be remarkably reduced, and wrinkles are generated after the press contact and the heating end position. Can be suppressed. The resin-coated laminated metal strip can be cooled by using a cooling roll or by cooling means other than the roll, for example, by blowing cooling air.

Specifically, it can be carried out by the apparatus shown in FIG. 1 which is an embodiment of the apparatus of the present invention. The manufacturing apparatus according to the present invention includes a guide roll 7a in parallel with the heating roll 6. The metal strip 1 with resin is the unwinder 12
It is unwound from a, passes through the guide roll 7a, and then is supplied to the heating roll 6. At this time, the metal strip 1 with resin is preheated by the guide roll 7a before being supplied to the heating roll 5. The laminated metal strip with resin 1 is pressed and heated on the outer circumference of the heating roll, and after being separated from the position where the pressing and heating are finished, the glass roll temperature (T
g) Cooled below.

The guide roll 7a shown by a broken line in FIG. 1 may be added to adjust the heating on the heating roll, and it may function as a pressure roll. Further, the second metal strip 3 is unwound from the unwinder 12b and supplied to the heating roll 6, but the guide roll 7b may be arranged if necessary.

In addition to the above-mentioned manufacturing method, it is very effective to reduce the defects by performing the bonding in a vacuum chamber. It is possible to prevent defects due to accidental entrainment of the atmosphere, and in addition, it is possible to crush the bubbles with the pressure bonding roll 8. The application of the vacuum chamber also has the effect of reducing atmospheric oxidation of the resin-coated metal strip and the second metal strip due to heating. In addition, by bonding in a closed space, the risk of entraining foreign matter such as dust and dust is greatly reduced. The degree of vacuum in the vacuum layer for pressure contact and heating is preferably 10 ² Pa or more and 10 ⁵ Pa or less. 10 ² P
The reason why it is set to a or more is that if the pressure is reduced to less than that, there is concern that foaming of residual volatile components in the resin and progress of thermal decomposition may occur due to heating. More preferably, it is 10 ³ Pa or more and 10 ⁴ Pa or less.

The above-described present invention can be specifically implemented by, for example, the apparatus shown in FIG. 2 which is an embodiment of the apparatus of the present invention. The above-mentioned heating roll 6 and guide roll 7
The a and 7 b and the pressure bonding roll 8 are arranged in the vacuum chamber 10. The unwinders 12a and 12b and the winder 13 may be arranged inside or outside the vacuum tank 10. However, when they are arranged inside, it is necessary to open the vacuum tank 10 when setting and taking out materials. Therefore, it is preferable that the unwinder and the winder are installed outside the vacuum chamber because the workability is deteriorated. In this case, the sub-chamber 11 is constantly evacuated.
By providing a and 11b and carrying the strip material through the sub-chamber, the depressurized atmosphere of the vacuum chamber 10 can be always maintained.

In the manufacturing method and the manufacturing apparatus described above, the resin-bonded metal strip 1 which has been bonded in advance is used. However, the resin layer is separately manufactured as the resin strip, and the first metal strip 2 and the resin layer (resin strip) are manufactured. It is also possible to manufacture the laminated metal strip 5 with resin in an integrated continuous line by supplying 4) from different unwinders and combining with the second metal strip 3 supplied from another reel. .

The above method can be carried out by the apparatus shown in FIG. 4, for example. In FIG. 4, the unwinding machine 12a
The first metal band 2 unwound from the second metal band 3, the second metal band 3 unwound from the unwinder 12b, and the resin band 4 unwound from the unwinder 12c are the outer peripheral surface of the rotating heating roll 6. At the upper pressure contact and heating start position 14, the resin layers are laminated.
After that, it is the same as the method and apparatus of the present invention described above,
The preferred form is also the same.

FIGS. 1 and 2 showing an example of an embodiment of the present invention.
In FIG. 4, the metal strip and the metal strip with resin are superposed on the outer peripheral surface of the heating curved surface (heating roll), but it is not always necessary to superimpose them on the outer peripheral surface of the heating curved surface in any manufacturing method and manufacturing apparatus. Alternatively, a metal band, a metal band with resin, etc. may be superposed before reaching the heating curved surface, and then heated and pressed on the heating curved surface.

[0039]

EXAMPLES The resin-coated metal strip shown in Table 1 and the second metal strip shown in FIG.
m) under the conditions shown in Table 2, length 5m, width 60mm
A laminated metal strip with resin was manufactured. A total of 5 pieces of 10 × 100 mm samples were cut out from the laminated metal band with resin after joining at an interval of 1 m in the lengthwise direction, and the adhesive strength was measured by the 180 ° direction peeling method defined in JIS C5016. For comparison, resin-laminated metal strips were manufactured under the conditions shown in Table 2 using the apparatus shown in FIGS. 5 and 6, and the adhesive strength was measured in the same manner.
The appearance was observed. Table 2 also shows the average value of the adhesive strength and the result of the appearance observation.

In Examples 1 and 2 of the present invention and Comparative Example 1, sufficient adhesive strength for temporary adhesion was obtained, but in Comparative Example 2 using the apparatus of FIG. 6, it was 0.1 kN / m or less. In Comparative Example 2, 1 compared to others
The strength was / 5 or less, and the adhesive strength required for temporary adhesion could not be obtained. The appearance after adhesion is the same as Example 1 of the present invention in which preheating is not performed
On the other hand, although a slight streak-like pattern was partially observed, no bubbles were observed at the joint surface. In Example 2 of the present invention in which the preheating by the guide roll was applied, no generation of streak-like patterns was observed, and the bonding surface was in close contact with the entire surface to form the resin-laminated metal strip having a smooth surface.
On the other hand, in Comparative Examples 1 and 2, the generation of press marks and wrinkle-like blisters containing bubbles were observed.

[0041]

[Table 1]

[0042]

[Table 2]

[0043]

Industrial Applicability According to the present invention, it is possible to efficiently manufacture a resin-coated laminated metal strip in which the adhesive strength of a thermosetting resin is secured and the adhesive reliability is improved, which is of great industrial value.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an example of the present invention.

FIG. 2 is a configuration diagram showing an example of the present invention.

FIG. 3 is a cross-sectional view of a laminated metal band with resin according to the present invention.

FIG. 4 is a configuration diagram showing an example of the present invention.

FIG. 5 is a configuration diagram showing an example of a conventional device.

FIG. 6 is a configuration diagram showing an example of a conventional device.

[Explanation of symbols]

1 metal band with resin, 2 first metal band (first metal layer), 3 second metal band, 4 resin layer (resin band), 5
Laminated metal strip with resin, 6 heating rolls, 7a, 7b guide rolls, 8 pressure bonding rolls, 9 cooling rolls, 10
Vacuum chamber, 11a, 11b sub chambers, 12a, 12
b, 12c unwinder, 13 winder, 14 pressure contact and heating start position, 15 pressure contact and heating end position, 1
6 heating presses, 17 boundaries

Claims (10)

[Claims] 1. A method for producing a laminated metal band with resin, in which a second metal band is bonded to the resin layer side surface of a resin-coated metal band having two layers of a first metal layer and a thermosetting resin layer. In the above, the resin-coated metal strip and the second metal strip are superposed on each other along the outer peripheral surface of the heating curved surface, and the resin-coated metal strip and the second metal strip are continuously formed on the outer peripheral surface of the heating curved surface. A method for producing a laminated metal band with a resin, which comprises press-contacting while heating. 2. The method for producing a laminated metal band with resin according to claim 1, wherein the metal band with resin is preheated immediately before the metal band with resin is placed along the outer peripheral surface of the heating curved surface. 3. The laminated metal with resin according to claim 2, wherein a guide roll provided in parallel with the heating curved surface is passed through immediately before the metal strip with resin is laid along the outer peripheral surface of the heating curved surface. Method of manufacturing obi. 4. The method for producing a laminated metal band with resin according to claim 3, wherein the metal band with resin is preheated by the guide roll. 5. A method for producing a laminated metal band with resin, which comprises bonding a first metal band and a second metal band via a thermosetting resin band, wherein the first metal band, the resin band, and the second metal band And the metal strips of the above are overlapped with each other along the outer peripheral surface of the heating curved surface, and the first metal strip, the resin strip, and the second metal strip are pressed while being continuously heated on the outer peripheral surface of the heating curved surface. A method for producing a laminated metal strip with a resin, comprising: 6. The method for producing a laminated metal strip with resin according to claim 1, wherein the joining is performed in a vacuum chamber. 7. An unwinding means for unwinding a resin-coated metal strip composed of two layers of a first metal layer and a thermosetting resin layer, an unwinding means for unwinding a second metal strip, and an outer peripheral surface. And a heating curved surface capable of heating, wherein the metal band with resin and the second metal band move in a state of overlapping along the outer peripheral surface of the heating curved surface of a laminated metal band with resin. Manufacturing equipment. 8. A guide roll is provided in parallel with the heating curved surface, and the guide roll is provided with a heating device for preheating the metal strip with resin before being supplied to the heating curved surface. An apparatus for producing a laminated metal strip with a resin according to 1. 9. An unwinding means for unwinding a first metal band, an unwinding means for unwinding a thermosetting resin band, an unwinding means for unwinding a second metal band, and an outer peripheral surface of which can be heated. A heat-curing curved surface, wherein the first metal strip, the thermosetting resin strip, and the second metal strip move in a state of overlapping along the outer peripheral surface of the heating curved surface. Device for manufacturing laminated metal strips. 10. The apparatus for manufacturing a laminated metal strip with resin according to claim 7, wherein at least the heating curved surface is arranged in a vacuum chamber.