JP2003014633A - So3 densitometer - Google Patents
So3 densitometerInfo
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- JP2003014633A JP2003014633A JP2001196479A JP2001196479A JP2003014633A JP 2003014633 A JP2003014633 A JP 2003014633A JP 2001196479 A JP2001196479 A JP 2001196479A JP 2001196479 A JP2001196479 A JP 2001196479A JP 2003014633 A JP2003014633 A JP 2003014633A
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、燃焼排ガス中のＳ
Ｏ3 のガス濃度を紫外線吸収分析により計測するＳＯ3
濃度計に関するものである。TECHNICAL FIELD The present invention relates to S in combustion exhaust gas.
SO 3 for measuring the gas concentration of O 3 by ultraviolet absorption analysis
It concerns a densitometer.
【０００２】[0002]
【従来の技術】一般に、紫外線吸収分析でのガス中の濃
度の検出は、既知濃度の紫外線吸収スペクトルをとり、
吸光度を濃度毎にプロットした検量線を作成した後で、
未知濃度の吸光度と対比することで、ガスの濃度を求め
ている。2. Description of the Related Art In general, the detection of the concentration in a gas by ultraviolet absorption analysis takes an ultraviolet absorption spectrum of known concentration,
After creating a calibration curve that plots the absorbance for each concentration,
The gas concentration is determined by comparing the absorbance with the unknown concentration.
【０００３】検量線による濃度の測定は、ランベルトベ
ールの法則により作成した検量線が、直線になるので、
その直線の式を求めれば、吸光度の代入で濃度が求めら
れるという原理による。Since the calibration curve prepared by Lambert-Beer's law becomes a straight line in the measurement of the concentration by the calibration curve,
This is based on the principle that the concentration can be obtained by substituting the absorbance if the straight line equation is obtained.
【０００４】この検量線に基づくボイラの排煙中のＳＯ
2 等のガス濃度を紫外線吸収分析により測定する場合、
煙道中の排ガスをポンプの吸引力でガスセル内に導入
し、そのガスセルに紫外線を透過して吸収スペクトルを
求めて計測することが行われている。SO in the smoke emitted from the boiler based on this calibration curve
When measuring the gas concentration of 2 etc. by ultraviolet absorption analysis,
Exhaust gas in a flue gas is introduced into a gas cell by a suction force of a pump, ultraviolet rays are transmitted through the gas cell, and an absorption spectrum is obtained and measured.
【０００５】この際、排煙中には、ＳＯ2 の他にＳＯ3
が含まれ、両者の吸収スペクトル帯が同じために、これ
らを個々に計測することが困難であったが、本出願人が
先に出願した特願平１１−３７４１０６号（発明の名
称：煙道中のＳＯ3 ガスの濃度算出方法）により、ＳＯ
2 とＳＯ3 の濃度を検出することが可能となった。この
濃度算出方法は、ＳＯ3 の濃度を検出する際に妨害ガス
となるＳＯ2 を混入したガスで、ＳＯ3 の組成比を変え
ながら吸光度スペクトルをとり、その吸光度スペクトル
データを基に、ＰＬＳ（Partial Least Squares)等によ
る多変量解析により、ＳＯ2 とＳＯ3 検量線を作成し、
その検量線を基に、煙道中の排ガスを紫外線吸収分析し
て排ガス中の、未知濃度のＳＯ2 とＳＯ3 を計測できる
ようにしたものである。At this time, during flue gas, in addition to SO 2 , SO 3
However, it was difficult to measure these individually because the absorption spectrum bands of both are the same. However, Japanese Patent Application No. 11-374106 filed earlier by the present applicant (the title of the invention: SO 3 gas concentration calculation method)
It became possible to detect the concentrations of 2 and SO 3 . This concentration calculation method is a gas mixed with SO 2 which becomes an interfering gas when the concentration of SO 3 is detected, and an absorbance spectrum is taken while changing the composition ratio of SO 3 , and PLS ( Partial Least Squares) and other multivariate analysis to create SO 2 and SO 3 calibration curves,
Based on the calibration curve, the exhaust gas in the flue gas is subjected to ultraviolet absorption analysis so that unknown concentrations of SO 2 and SO 3 in the exhaust gas can be measured.
【０００６】[0006]
【発明が解決しようとする課題】ところで、ＳＯ3 は、
腐食性ガスであり、しかも３５０℃以下では、排ガス中
の水蒸気と結合して硫酸となるため、３５０℃以上に加
熱しなければ、紫外線吸収法での吸収スペクトル分析が
できない。By the way, SO 3 is
It is a corrosive gas, and at 350 ° C. or lower, it combines with water vapor in exhaust gas to form sulfuric acid. Therefore, unless it is heated to 350 ° C. or higher, the absorption spectrum analysis by the ultraviolet absorption method cannot be performed.
【０００７】また、煙道ダクト中の圧力変化、またガス
セル内に導入する排ガスからダストを除去するためのフ
ィルターの目詰まり程度、ポンプの吸引力の変化等種々
の要因により、ガスセル内圧力が変化する。ガスセル内
のガス圧が変わると吸光度の計測値も変化してしまうた
め、計測には、ガスセル内の圧力を一定に保つ必要があ
る。Further, the pressure in the gas cell changes due to various factors such as the pressure change in the flue duct, the degree of clogging of the filter for removing dust from the exhaust gas introduced into the gas cell, and the change in the suction force of the pump. To do. When the gas pressure in the gas cell changes, the measured value of the absorbance also changes, so it is necessary to keep the pressure in the gas cell constant for measurement.
【０００８】しかしながら、ガスセル圧力を一定に保つ
には、一次圧（煙道側）が不安定なことや、一次圧と２
次圧側の圧力差があまりないことにより、ガスセル内圧
力を一定に保つのは困難である。However, in order to keep the gas cell pressure constant, the primary pressure (flue side) is unstable, and the primary pressure and 2
Since there is not much pressure difference on the secondary pressure side, it is difficult to keep the gas cell internal pressure constant.
【０００９】このため、ガスセルに濃度補正用の圧力モ
ニターを設置することが考えられるが、高温に耐え、し
かも腐食に強い圧力モニターは、現状ではなく、作ると
しても非常に高価なものとなると共に劣悪な環境では、
応答性がよく、しかも長期間安定したモニターができな
い問題がある。For this reason, it is conceivable to install a pressure monitor for concentration correction in the gas cell, but a pressure monitor that withstands high temperatures and is resistant to corrosion is not currently available, and is very expensive to make. In a poor environment,
There is a problem that the response is good and stable monitoring cannot be performed for a long time.
【００１０】そこで、本発明の目的は、上記課題を解決
し、高温の排ガスを導入し、そのガスセル内圧力をモニ
ターしてＳＯ3 濃度を的確に測定できるＳＯ3 濃度計を
提供することにある。An object of the present invention is to solve the above problems, by introducing a high-temperature exhaust gas is to provide a SO 3 concentration meter the SO 3 concentration by monitoring the gas cell pressure can be accurately measured .
【００１１】[0011]
【課題を解決するための手段】上記目的を達成するため
に、請求項１の発明は、ガスセル内に導入した排ガス中
のＳＯ3 の濃度を紫外線吸収分析により計測するＳＯ3
濃度計において、ガスセルのガス排出側に排ガスを冷却
するクーラー付きトラップを接続し、そのトラップの排
気側にガスセル内圧力を検出する圧力モニターを接続し
たＳＯ3 濃度計である。In order to achieve the above object, the invention of claim 1 is an SO 3 system for measuring the concentration of SO 3 in exhaust gas introduced into a gas cell by ultraviolet absorption analysis.
In the densitometer, this is a SO 3 densitometer in which a trap with a cooler for cooling the exhaust gas is connected to the gas discharge side of the gas cell, and a pressure monitor for detecting the pressure inside the gas cell is connected to the exhaust side of the trap.
【００１２】請求項２の発明は、ガスセルにセル内温度
を３５０〜４５０℃に保持するヒータを設けた請求項１
記載のＳＯ3 濃度計である。According to the second aspect of the present invention, the gas cell is provided with a heater for keeping the temperature inside the cell at 350 to 450 ° C.
It is the described SO 3 concentration meter.
【００１３】[0013]
【発明の実施の形態】以下、本発明の好適一実施の形態
を添付図面に基づいて詳述する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
【００１４】先ず、図１により、本発明における煙道中
の排ガスの紫外線吸収分析装置を説明する。First, the ultraviolet absorption analyzer for exhaust gas in a flue according to the present invention will be described with reference to FIG.
【００１５】図１において、１０は、ボイラからの排ガ
スが流れる煙道で、その煙道１０にガス吸込管１１を介
してガスセル１２が接続される。ガス吸込管１１には、
排ガス中のダストを除去するフィルター１３が接続され
る。In FIG. 1, 10 is a flue channel through which exhaust gas from a boiler flows, and a gas cell 12 is connected to the flue channel 10 via a gas suction pipe 11. In the gas suction pipe 11,
A filter 13 for removing dust in the exhaust gas is connected.
【００１６】ガスセル１２は、出口管１４を介してトラ
ップ１５が接続される。トラップ１５は、導入した排ガ
スを冷却するクーラー１６が設けられている。A trap 15 is connected to the gas cell 12 via an outlet pipe 14. The trap 15 is provided with a cooler 16 that cools the introduced exhaust gas.
【００１７】トラップ１５からの排気管１７には、半導
体圧力センサからなる圧力モニター１８が接続されると
共に煙道１０からの排ガスをガスセル１２を通して吸引
排気するためのポンプ２０が接続される。An exhaust pipe 17 from the trap 15 is connected to a pressure monitor 18 composed of a semiconductor pressure sensor and a pump 20 for sucking and exhausting the exhaust gas from the flue gas 10 through the gas cell 12.
【００１８】排気管１７の下流側は図示していないが、
排ガスを煙道１０に戻すようにしても或いは他の排気処
理系に供給するようにしてもよい。Although the downstream side of the exhaust pipe 17 is not shown,
The exhaust gas may be returned to the flue 10 or may be supplied to another exhaust treatment system.
【００１９】ガスセル１２には導入した排ガスを３５０
〜４５０℃に保つためのヒータ１９が設けられる。The exhaust gas introduced into the gas cell 12 is 350
A heater 19 is provided to keep the temperature at 450 ° C.
【００２０】ガスセル１２の一方には、ガスセル１２に
紫外線を透過するためのＸｅランプ等の光源２１が設け
られると共に分光器及び光検出器２２が設けられ、その
検出信号２５がデータ処理装置２４に入力される。On one side of the gas cell 12, a light source 21 such as a Xe lamp for transmitting ultraviolet rays to the gas cell 12 is provided, and a spectroscope and a photodetector 22 are provided, and a detection signal 25 thereof is sent to a data processing device 24. Is entered.
【００２１】この光源２１と分光器及び光検出器２２
は、図では、光源２１からの紫外線ＵＶをガスセル１２
を１回透過させ、その吸光度を分光器及び光検出器２２
で検出する例を示しているが、反射ミラーを用いてガス
セル１２内を複数回反射させて光路長を長くして吸光度
を計測するようにする。The light source 21, the spectroscope and the photodetector 22
In the figure, the ultraviolet light UV from the light source 21 is shown in the gas cell 12
Is transmitted once, and the absorbance is measured by the spectroscope and the photodetector 22.
Although an example of detection is shown, the reflection mirror is used to reflect the gas cell 12 a plurality of times to increase the optical path length and measure the absorbance.
【００２２】分光器及び光検出器２２は、紫外線（領域
０〜４００ｎｍ）中の２００〜３５０ｎｍの範囲の波長
を分光し、それを検出素子に入射し、その検出素子で検
出された吸光度データがデータ処理装置２４に入力され
て演算される。The spectroscope and the photodetector 22 disperse the wavelength in the range of 200 to 350 nm in the ultraviolet ray (range 0 to 400 nm), enter it into the detecting element, and the absorbance data detected by the detecting element is obtained. It is input to the data processing device 24 and calculated.
【００２３】この図１において、ポンプ２０の吸引によ
りセル１２内には、煙道１０内の排ガスがフィルター１
３で除塵されて導入される。この排ガス中には、ＳＯ3
とＳＯ2 が含まれるが、上述した先願の発明に基づくＳ
Ｏ3 とＳＯ2 の検量線を基にＳＯ3 とＳＯ2 の濃度を求
めることができる。In FIG. 1, the exhaust gas in the flue 10 is introduced into the cell 12 by the suction of the pump 20 into the cell 12.
Dust is removed in 3 and introduced. In this exhaust gas, SO 3
And SO 2 are included, but S based on the invention of the above-mentioned prior application is included.
The concentrations of SO 3 and SO 2 can be determined based on the calibration curve of O 3 and SO 2 .
【００２４】この場合、ガスセル１２内温度が３５０℃
以下となると、排ガス中のＳＯ3 とＨ2 Ｏとが結合して
硫酸となり、 ＳＯ3 の紫外線吸収が無くなるため、ヒ
ータ１９によりガスセル内温度を３５０〜４５０℃に保
つようにする。また、ガスセル１２内の圧力が変動する
と、吸光度の計測値も変化する。そこで、ガスセル１２
内のガス圧と検量線の関係を調べたところ、ガス圧と検
量線の傾きは比例しており、ガス圧が判れば濃度の補正
が可能なことが判った。しかし、ガスセル１２内は、約
３００〜４００℃あり、現状では高温使用で且つ応答速
度の速い圧力モニターはないため、ガスセル１２内の排
ガスを出口管１４からトラップ１５に排出し、そこで排
ガスの温度を１００℃以下まで、クーラー１６で冷却
し、その冷却後の排ガスを排気管１７に接続した半導体
圧力センサ等からなる圧力モニター１８で圧力を検出
し、その圧力信号２６をデータ処理装置２４に入力す
る。In this case, the temperature inside the gas cell 12 is 350 ° C.
In the following cases, SO 3 and H 2 O in the exhaust gas are combined to form sulfuric acid and SO 3 does not absorb UV light. Therefore, the heater 19 keeps the temperature inside the gas cell at 350 to 450 ° C. Moreover, when the pressure in the gas cell 12 changes, the measured value of the absorbance also changes. Therefore, the gas cell 12
When the relationship between the gas pressure inside and the calibration curve was examined, it was found that the gas pressure was proportional to the slope of the calibration curve, and the concentration could be corrected if the gas pressure was known. However, since the inside of the gas cell 12 is about 300 to 400 ° C., and there is currently no pressure monitor that is used at high temperature and has a fast response speed, the exhaust gas in the gas cell 12 is discharged from the outlet pipe 14 to the trap 15, where the temperature of the exhaust gas is changed. Is cooled by a cooler 16 to 100 ° C. or lower, the exhaust gas after cooling is detected by a pressure monitor 18 including a semiconductor pressure sensor connected to an exhaust pipe 17, and the pressure signal 26 is input to a data processing device 24. To do.
【００２５】この際、排ガス中のＳＯ3 は、トラップ１
５内での冷却で、硫酸になるか或いは排ガス中にアンモ
ニアが含まれていた場合には、酸性硫安又は硫安となっ
て捕集され、排気管１７に、ＳＯ3 が流れないため、圧
力モニター１８及びポンプ２０の腐食からの保護が可能
となる。また圧力モニター１８を排気管１７に接続し、
この検出圧力をガスセル１２内の圧力とするが、圧力の
伝搬は瞬時であり、ガスセル１２から離れていても実質
的にガスセル１２の圧力を検出していることと等価であ
り、圧力モニター１８を、高温と腐食環境から保護でき
る。At this time, SO 3 in the exhaust gas is trapped by the trap 1.
If the sulfuric acid is cooled or the exhaust gas contains ammonia in the cooling in 5, the ammonium sulfate or ammonium sulfate is collected and SO 3 does not flow into the exhaust pipe 17, so the pressure monitor Protection of 18 and pump 20 from corrosion is possible. Also, connect the pressure monitor 18 to the exhaust pipe 17,
This detected pressure is taken as the pressure in the gas cell 12, but the propagation of the pressure is instantaneous, and it is equivalent to detecting the pressure of the gas cell 12 substantially even if it is separated from the gas cell 12, and the pressure monitor 18 is used. Can protect from high temperature and corrosive environment.
【００２６】次に、ガスセル１２内のガス圧力と検量線
の関係を説明する。Next, the relationship between the gas pressure in the gas cell 12 and the calibration curve will be described.
【００２７】（１）試験方法
圧力依存性の確認試験パラメータを表１の条件で、紫外
線吸収スペクトルを採取し、検量線を作成した。(1) Test Method Confirmation of Pressure Dependence Under the test parameters shown in Table 1, an ultraviolet absorption spectrum was sampled and a calibration curve was prepared.
【００２８】[0028]
【表１】 [Table 1]
【００２９】この確認試験は、ＳＯ2 濃度が０，１００
０，１５００ｐｐｍのサンプルにそれぞれＳＯ3 濃度を
０，１０，２０，３０と変えて合計１２のガスサンプル
に対して、設定圧力（任意）を０ＭＰａとし、その圧力
に対して−０．０１ＭＰａ、−０．０１５ＭＰａにセル
圧力を保って紫外線吸収スペクトルを採取し、上述した
先願発明の手法に則ってＳＯ2 とＳＯ3 の検量線を求め
た。In this confirmation test, the SO 2 concentration was 0,100.
The set pressure (arbitrary) was set to 0 MPa for a total of 12 gas samples by changing the SO 3 concentration to 0, 10, 20, and 30, respectively, for the 0, 1500 ppm sample, and -0.01 MPa,- An ultraviolet absorption spectrum was collected while maintaining the cell pressure at 0.015 MPa, and the calibration curves for SO 2 and SO 3 were obtained according to the method of the above-mentioned prior invention.
【００３０】（２）試験結果 先ず、ＳＯ2 の計測結果を図２と表２に示す。(2) Test Results First, the results of SO 2 measurement are shown in FIG. 2 and Table 2.
【００３１】[0031]
【表２】 [Table 2]
【００３２】図２は、２６０ｎｍのＳＯ2 吸光度を濃度
ごとにプロットしたもので、計測圧力ごとに示したもの
である。FIG. 2 is a plot of the SO 2 absorbance at 260 nm for each concentration, which is shown for each measurement pressure.
【００３３】図２は、圧力ごとに検量線が異なっている
ことを示している。しかし、各圧力の比は略同じであ
り、吸光度の大きさはセル中の分子数に依存していると
考えられる。FIG. 2 shows that the calibration curve is different for each pressure. However, the ratio of each pressure is almost the same, and it is considered that the magnitude of the absorbance depends on the number of molecules in the cell.
【００３４】図３は圧力による分子数を補正してプロッ
トしたものである。各プロットは分子数から、下式
（１）により、１気圧の濃度に換算してプロットした。FIG. 3 is a plot obtained by correcting the number of molecules due to pressure. Each plot was converted from the number of molecules into a concentration of 1 atm by the following formula (1) and plotted.
【００３５】
換算濃度＝ 濃度 × ０．１（ＭＰａ）／［０．１（ＭＰａ）＋
セルゲージ圧（ＭＰａ）］ …（１）
圧力で補正すると、図３に示すように、異なっていた検
量線の傾き（ｙ＝０．００１６ｘ＋０．００２２２）が
一つにまとめられた。Converted concentration = concentration × 0.1 (MPa) / [0.1 (MPa) + cell gauge pressure (MPa)] (1) When corrected with pressure, as shown in FIG. 3, different calibration curves were obtained. (Y = 0.016x + 0.00222) were combined.
【００３６】なお、Ｒは相関係数であり、Ｒ2 が０．９
９８３と、Ｒがより１に近いことが分かる。R is a correlation coefficient and R 2 is 0.9
At 983, it can be seen that R is closer to 1.
【００３７】同様に、図４に、ＰＬＳ回帰分析により圧
力補正によるＳＯ2 の検量線の計算結果を示した。ＰＬ
Ｓ回帰分析においても圧力補正すればよいことが分かっ
た。図５は、ＳＯ2 を０、１０００、１５００ｐｐｍ、
また圧力を０、−０．０１、−０．０１５ＭＰａと変化
させたときのＳＯ3 の濃度算出結果を示したものであ
る。Similarly, FIG. 4 shows the calculation results of the calibration curve of SO 2 by pressure correction by PLS regression analysis. PL
It was found that pressure correction should be performed also in S regression analysis. FIG. 5 shows that SO 2 is 0, 1000, 1500 ppm,
Further, the results of calculating the SO 3 concentration when the pressure is changed to 0, −0.01, and −0.015 MPa are shown.
【００３８】図５において、横軸に示す濃度は圧力補正
を行った調整濃度（標準ガスを決められた組成比で調整
した濃度）であり、縦軸に示す濃度は採集して求めたス
ペクトルからＰＬＳ回帰計算を実施して計算した出力濃
度であり、検量線の傾き（ｙ＝０．９９５２ｘ＋５．５
８５８）、相関係数Ｒ2 は０．９９９７であった。In FIG. 5, the concentration on the abscissa is the adjusted concentration after pressure correction (concentration of the standard gas adjusted by the determined composition ratio), and the concentration on the ordinate is from the spectrum obtained by collection. This is the output concentration calculated by performing PLS regression calculation, and is the slope of the calibration curve (y = 0.952x + 5.5).
858), and the correlation coefficient R 2 was 0.9997.
【００３９】なお、上記（１）式を一般的に記述すると
以下のようになる。The above equation (1) is generally described as follows.
【００４０】 検量線作成時； 濃度 ＝ 調整濃度 × 基準とする圧力（絶対圧）／計測時の圧力（絶対圧 ） …（２） サンプル計測時； 濃度 ＝ 計測濃度 × 検量線作成時に基準とした圧力（絶対圧）／計測時 の圧力（絶対圧） …（３） 次に計測時のフローを説明する。[0040] When creating a calibration curve; Concentration = Adjusted concentration x Reference pressure (absolute pressure) / measurement pressure (absolute pressure) ) … (2) When measuring samples; Concentration = Measured concentration x Pressure (absolute pressure) used as a reference when creating a calibration curve / During measurement Pressure (absolute pressure) (3) Next, the flow of measurement will be described.
【００４１】先ず検量線作成時のフローチャートを図６
により説明する。First, FIG. 6 is a flow chart for creating a calibration curve.
Will be described.
【００４２】図６に示すように、計測時、基準となるガ
ス圧を決定（通常１気圧）する（Ｓ１０）。次にガス圧
力モニターしながら、ガス組成を変えて吸収スペクトル
を採取する（Ｓ１１）。As shown in FIG. 6, during measurement, a reference gas pressure is determined (usually 1 atm) (S10). Next, while monitoring the gas pressure, the gas composition is changed and the absorption spectrum is sampled (S11).
【００４３】採取した吸収スペクトルから求めた濃度を
上記（２）式により計測時ガス圧で補正する（Ｓ１
３）。The concentration obtained from the collected absorption spectrum is corrected by the gas pressure during measurement according to the above equation (2) (S1).
3).
【００４４】補正した濃度と吸光度で検量線を作成し
（Ｓ１４）、検量線作成のフローを終了する（Ｓ１
５）。A calibration curve is created with the corrected concentration and absorbance (S14), and the flow for creating the calibration curve ends (S1).
5).
【００４５】サンプル計測時のフローチャートを図７に
より説明する。A flow chart for sample measurement will be described with reference to FIG.
【００４６】図７に示すように、ガス圧力をモニターし
ながら、サンプルスペクトルを採取する（Ｓ２０）。As shown in FIG. 7, a sample spectrum is collected while monitoring the gas pressure (S20).
【００４７】次に、採取した吸収スペクトルから求めた
濃度を上記（３）式により計測時ガス圧力で補正する
（Ｓ２１）。Next, the concentration obtained from the collected absorption spectrum is corrected by the gas pressure during measurement according to the above equation (3) (S21).
【００４８】補正した濃度と図６で求めた検量線よりサ
ンプル濃度を求め（Ｓ２２）、計測フローを終了する
（Ｓ２３）。The sample concentration is obtained from the corrected concentration and the calibration curve obtained in FIG. 6 (S22), and the measurement flow ends (S23).
【００４９】このように、ガスセル１２内の圧力とガス
の分子数が比例し、同じ濃度でも紫外線吸収法で計測さ
れる濃度は、セル圧力と比例して変化することに着目
し、計測時のセル圧力を計測し、そのセル圧力で補正す
ることで、正確な濃度測定が行える。As described above, paying attention to the fact that the pressure in the gas cell 12 is proportional to the number of gas molecules, and the concentration measured by the ultraviolet absorption method changes even in the same concentration in proportion to the cell pressure. Accurate concentration measurement can be performed by measuring the cell pressure and correcting with the cell pressure.
【００５０】この際、ガスセル１２内の排ガスをヒータ
ー１９で３５０〜４５０℃の範囲に保ち、そのガスを排
出する際に、クーラー１６付きトラップ１５で冷却する
ことで、排ガス中のＳＯ3 が硫酸としてトラップ１５内
に捕集できるため、排気管１７には、低温で腐食ガスを
含まないガスが流れるため圧力モニター１８は、一般的
な圧力モニターで十分計測可能であり、圧力モニターの
寿命を延ばすことができる。At this time, the exhaust gas in the gas cell 12 is kept in the range of 350 to 450 ° C. by the heater 19, and when the gas is discharged, it is cooled by the trap 15 with the cooler 16 so that SO 3 in the exhaust gas is sulfuric acid. Since it can be trapped in the trap 15 as a gas, a gas that does not contain corrosive gas at a low temperature flows through the exhaust pipe 17, so that the pressure monitor 18 can be sufficiently measured by a general pressure monitor, and the life of the pressure monitor is extended. be able to.
【００５１】[0051]
【発明の効果】以上要するに本発明によれば、紫外線吸
収分析によるＳＯ3 濃度を補正する際のガスセルの圧力
を、排ガスを冷却し排ガス中のＳＯ3 を除去した後のガ
ス圧を計測することで圧力モニターの寿命を延ばすこと
ができるとともに、正確なＳＯ 3 の濃度計測が行える。In summary, according to the present invention, the ultraviolet absorption is
SO by income analysis3 Pressure of gas cell when correcting concentration
The SO in the exhaust gas by cooling the exhaust gas3 After removing the
To extend the life of the pressure monitor by measuring the pressure
Accurate SO 3 The concentration of can be measured.
【図１】本発明にＳＯ3 濃度計の概要を説明する図であ
る。FIG. 1 is a diagram illustrating an outline of an SO 3 concentration meter according to the present invention.
【図２】本発明おいて、各圧力ごとのＳＯ2 検量線を示
す図である。FIG. 2 is a diagram showing an SO 2 calibration curve for each pressure in the present invention.
【図３】本発明において、圧力で補正したＳＯ2 検量線
を示す図である。FIG. 3 is a diagram showing a pressure-corrected SO 2 calibration curve in the present invention.
【図４】本発明において、ＰＬＳ回帰分析での圧力補正
によるＳＯ2 検量線を示す図である。FIG. 4 is a diagram showing an SO 2 calibration curve by pressure correction in PLS regression analysis in the present invention.
【図５】本発明において、圧力を補正したときのＳＯ3
検量線を示す図である。FIG. 5 is a graph showing SO 3 when pressure is corrected in the present invention.
It is a figure which shows a calibration curve.
【図６】本発明において、検量線作成時のフローチャー
トを示す図である。FIG. 6 is a diagram showing a flow chart when creating a calibration curve in the present invention.
【図７】本発明において、計測時のフローチャートを示
す図である。FIG. 7 is a diagram showing a flowchart at the time of measurement in the present invention.
１０ 煙道 １２ ガスセル １５ トラップ １６ クーラー １８ 圧力モニター ２１ 光源 ２２ 分光器及び光検出器 ２４ データ処理装置 10 flue 12 gas cells 15 traps 16 cooler 18 Pressure monitor 21 light source 22 Spectrometer and photodetector 24 Data processing equipment
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小林 健 東京都江東区豊洲三丁目１番15号 石川島 播磨重工業株式会社東京エンジニアリング センター内 (72)発明者 八木 武人 東京都江東区豊洲三丁目１番15号 石川島 播磨重工業株式会社東京エンジニアリング センター内 (72)発明者 小原 正孝 東京都江東区豊洲三丁目２番16号 石川島 播磨重工業株式会社東京エンジニアリング センター技術開発本部内 Ｆターム(参考） 2G042 AA01 BB12 CA01 CB01 2G052 AA02 AB08 AC25 AD02 AD22 AD42 BA03 BA14 CA04 CA12 EA03 EB11 EB13 GA11 HA18 HB07 HC02 HC08 HC09 JA10 2G059 AA01 BB01 CC06 DD02 DD12 DD13 DD17 EE01 HH03 HH06 JJ01 MM01 MM12 NN04 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Ken Kobayashi 3-15 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Tokyo Engineering Co., Ltd. In the center (72) Inventor Takehito Yagi 3-15 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Tokyo Engineering Co., Ltd. In the center (72) Inventor Masataka Ohara 3-2-16 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Tokyo Engineering Co., Ltd. Center Technology Development Division F term (reference) 2G042 AA01 BB12 CA01 CB01 2G052 AA02 AB08 AC25 AD02 AD22 AD42 BA03 BA14 CA04 CA12 EA03 EB11 EB13 GA11 HA18 HB07 HC02 HC08 HC09 JA10 2G059 AA01 BB01 CC06 DD02 DD12 DD13 DD17 EE01 HH03 HH06 JJ01 MM01 MM12 NN04
Claims (2)
の濃度を紫外線吸収分析により計測するＳＯ3 濃度計に
おいて、ガスセルのガス排出側に排ガスを冷却するクー
ラー付きトラップを接続し、そのトラップの排気側にガ
スセル内圧力を検出する圧力モニターを接続したことを
特徴とするＳＯ3 濃度計。1. SO 3 in exhaust gas introduced into a gas cell
In the SO 3 concentration meter that measures the concentration of the gas by ultraviolet absorption analysis, a trap with a cooler for cooling the exhaust gas was connected to the gas discharge side of the gas cell, and a pressure monitor for detecting the pressure inside the gas cell was connected to the exhaust side of the trap. SO 3 concentration meter characterized by:
℃に保持するヒータを設けた請求項１記載のＳＯ3 濃度
計。2. The temperature inside the cell is set to 350 to 450 in the gas cell.
The SO 3 concentration meter according to claim 1, further comprising a heater for maintaining the temperature at ℃.
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| JP2001196479A JP4674417B2 (en) | 2001-06-28 | 2001-06-28 | SO3 densitometer |
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Cited By (3)
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| JP2013231551A (en) * | 2012-04-27 | 2013-11-14 | Panasonic Corp | Absorption refrigerating machine |
| JP2016191616A (en) * | 2015-03-31 | 2016-11-10 | 日本電信電話株式会社 | Analyzer and method for analyzing so3 |
| KR20180128848A (en) * | 2017-05-24 | 2018-12-04 | 가부시키가이샤 호리바 세이샤쿠쇼 | Probe device, analysis apparatus for exhaust gas and correction method |
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| KR102600381B1 (en) * | 2017-05-24 | 2023-11-10 | 가부시키가이샤 호리바 세이샤쿠쇼 | Probe device, analysis apparatus for exhaust gas and correction method |
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| JP4674417B2 (en) | 2011-04-20 |
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