JP2003005197A - Method and device for producing liquid crystal display element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display element which has cell gap uniformity in a liquid crystal cell. SOLUTION: A manufacturing method for obtaining an aligned substrate having a desired cell gap by aligning a substrate 14 which has image display parts 3A1 to 2An formed almost in matrix and a substrate 12 together is characterized by comprising the stages of applying a main sealant 15 to the circumference of an image display part formed on one substrate; applying an outer circumferential sealant 16 so that the outermost circumference of an area where the main sealants 15 are arranged is surrounded with the sealant 16; temporarily aligning the two substrates under a vacuum while pressing and holding them by upper and lower surface plates 27 and 28 and forming a sealed space between the two substrates with the outer circumferential sealant; forming the aligned substrate 31 by causing a leak from the vacuum atmosphere to the atmospheric pressure in the temporary aligning state and pressing the two substrates until the desired cell gasp is obtained; measuring the cell gap of the aligned substrate; and performing regular alignment by irradiating the aligned substrate with the desired cell gap with ultraviolet rays.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a projector,
The present invention relates to a liquid crystal display element which is a basic component of a projection TV or the like, and more particularly to a manufacturing apparatus and a manufacturing method of the liquid crystal display element in a laminating step that requires highly accurate cell gap uniformity.

[0002]

2. Description of the Related Art In recent years, a liquid crystal display device in which a silicon IC (wafer) substrate and a glass substrate are bonded together has been applied to a projector, a projection TV, a head mounted display, etc., and the production amount thereof is expanding more and more. . The applicant previously filed an application for a liquid crystal display device adapted to such a use, in Japanese Patent Application No. 2001-8643.
No. (filed on January 17, 2001, hereinafter referred to as the previous application). Hereinafter, the liquid crystal display element 10 will be outlined with reference to FIGS. 9 and 10.

Liquid crystal display device 10 described in the previous application
As shown in FIGS. 9 and 10, the glass substrate 2 having the transparent conductive film 1 on the surface and the silicon IC substrate 4 having the pixel electrode (display area) 3 on the surface are opposed to each other, and the gap (cell gap In order to determine the cell gap with the liquid crystal 5 which will be described later, it is fixed by a seal adhesive 7 composed of an adhesive and a spacer 6, and an antireflection film 8 is provided on the surface of the glass substrate 2 described above. . A liquid crystal injection port 9 serves as a sealing portion. As is clear from these figures, the liquid crystal display element 10 described in the previous application does not include a spacer for maintaining a gap in the two liquid crystal cells bonded together.

By the way, in a liquid crystal display device applied to high-definition display or the like, how to control the uniformity of the cell gap between the glass substrate 2 and the silicon IC substrate 4 is a display quality, especially a screen. Is important for brightness uniformity. It is no exaggeration to say that the uniformity of the cell gap is determined in the bonding step between the glass substrate 2 and the silicon IC substrate 4 described above.

More specifically, that point will be described.
In recent years, high-speed response is required for image display of liquid crystal display elements, and the cell gap of liquid crystal display elements has been reduced from 5 μm or more in the past to 3 μm, and even to 1 μm,
This is because the requirement for the uniformity of the cell gap has become stricter accordingly. This is because, as described above, there is a demand to reduce the uneven brightness and the uneven color of the display image.

On the other hand, conventionally, in the process of manufacturing an active matrix type liquid crystal display device in which a thin film transistor is formed on the surface of a substrate or a reflection type liquid crystal display device driven by a CMOS transistor, two substrates are bonded together to form a liquid crystal cell. , (1) method of pressing from both outer sides of the substrate with a surface plate, and (2) method of wrapping the two substrates with an air bag or a flexible sheet and depressurizing the inside. As a method of pressing at the atmospheric pressure from the outside of the airbag, and as a method of (3), the pressing is performed by using the pressure difference between the pressure inside the two substrates (the space closed by the sealant) and the atmospheric pressure. There are ways.

As the method (1), for example, Japanese Patent Laid-Open No.
-18829 and Japanese Patent Application Laid-Open No. 9-243982. As described in both of these publications,
In the pressing method using a rigid lower platen,
The flatness and parallelism of the upper and lower stools are important, and the results of substrate displacement and cell gap measurement are fed back to the press pressure or one of the slabs is measured so that the parallelism and flatness of the stool are not affected. The board is grooved so that the uniformity of the cell gap does not deteriorate even if foreign matter enters between the substrate and the surface plate.

The method (2) is disclosed in Japanese Patent Laid-Open No. 10-
There are those described in JP-A-115830, JP-A-11-337954 and the like. In the methods as described in both of these publications, two substrates are wrapped with a flexible airtight sheet so that the inside of the airtight sheet is depressurized, and the airtight sheets are bonded from the outside by atmospheric pressure.

Further, as the method (3), Japanese Patent Laid-Open No.
No. 34653, No. 8-201747, No. 11-194352, and No. 11-2819.
There is one described in Japanese Patent No. 88, etc. In the methods as described in these publications, the pressure in the space (corresponding to an empty cell) closed by the two substrates and the sealing agent applied to the inside of the substrates is reduced to obtain the difference from the atmospheric pressure outside the substrates. The whole substrate is press-molded by pressure.

By the way, the substrate press-molded by these methods is used for the liquid crystal injecting process in the next process as one liquid crystal display device, and in order to make a plurality of liquid crystal display devices, the pressed substrate is used. In some cases, it is sent to the liquid crystal injection step after being divided into a plurality of pieces. In recent years, the size of liquid crystal display elements has increased, and when a plurality of liquid crystal display elements are used, the substrates to be pressed are also increasing in size.

[0011]

[Problems to be Solved by the Invention] However, (1)
In the case of a large substrate, the size of the surface plate will inevitably become large, so in order to maintain good cell gap uniformity after pressing the substrate, the parallelism and flatness of the surface plate surface are in the micron order. However, it is difficult to achieve micron-order high precision with a large surface plate. When the area is further increased, the pressure applied to the entire substrate is insufficient with the press pressure of a normal air cylinder. To achieve this, an even larger pressurizing method is required, and the size of the apparatus is inevitably increased.

The method (2) can be said to be an improvement of (1),
Due to its structure, from the time when the airbag (flexible sheet) is in close contact with the substrate, the pressing pressure from the airbag to the substrate becomes non-uniform, which causes non-uniformity of the cell gap in the surface of the substrate. That is, depending on the shape of the sheet on the end face of the substrate, there is a drawback that tension is applied in the surface direction (sliding direction) of the substrate and uniform pressing is not generated in the substrate surface.

Further, in the case of (3), since the differential pressure between the substrate internal pressure and the atmospheric pressure is uniformly applied to the substrate surface, it is possible to favorably realize the uniformity of the cell gap. If there is variation in the flatness, it is difficult to control the internal pressure of the space formed by these two substrates, and reproducibility during production cannot be obtained.

Therefore, there is also a method of changing the coating width and viscosity of the sealing agent to control the internal pressure and leaking to the atmospheric pressure after a certain period of time. However, productivity (tact time and material control) and quality reproduction Sexual issues remain. In particular, when this technique is used for a liquid crystal display element having no spacer between cell gaps, as in the present invention described later, highly accurate internal pressure control is necessary, and in the method disclosed in the above publication,
It is difficult to obtain reproducibility during production.

Considering the problems as described above, in order to obtain the highly accurate uniformity of the cell gap as described above, it is important to control the cell gap in the liquid crystal cell manufacturing stage, particularly in the laminating step. Therefore, if the change in the cell gap that changes with the passage of time is accurately monitored in the manufacturing process, the gap of the liquid crystal cell after the final process is
The knowledge that it should have been obtained within the required range will be born.

Therefore, as a result of diligent study by the present inventors,
A liquid crystal display capable of obtaining a highly accurate cell gap uniformity by precisely controlling the internal pressure of a sealed space formed by two substrates forming a liquid crystal display element and a sealant during a laminating process. The present invention has devised a device manufacturing apparatus and a liquid crystal display device manufacturing method, and an object of the present invention is to provide such a liquid crystal display device manufacturing apparatus and a liquid crystal display device manufacturing method.

[0017]

The present invention has been made in order to achieve the above object, and in the invention according to claim 1, the image display portions 3A _{1 to} 3A _n are formed in a substantially matrix shape. A method for manufacturing a liquid crystal display device for producing a bonded substrate 31 in which a desired cell gap is formed by bonding one substrate 14 and the other substrate 12 to each other. The main sealant 15 is applied to the periphery of the image display portions 3A _{1 to} 3A _n formed in a substantially matrix shape, and the outer peripheral sealant 16 is provided so as to surround the outermost periphery of the region where the main sealant 15 is lined up.
And a step of applying the two substrates 12 and 14 in a vacuum atmosphere by temporarily holding the upper and lower surface plates 27 and 28 under pressure so that the outer sealing agent 16 can apply the two sheets. And forming a hermetically sealed space between the substrates 12 and 14 by pressing the two substrates 12 and 14 to a desired cell gap by leaking the vacuum atmosphere from the temporary bonding state to the atmospheric pressure. A step of forming a bonded substrate 31; a step of measuring a cell gap of the bonded substrate 31; and a step of irradiating the bonded substrate 31 having the desired cell gap with ultraviolet rays to perform a main bonding. It is characterized in that

According to the second aspect of the present invention, the main sealant 15 is applied to the periphery of the image display portions 3A _{1 to} 3A _n formed in a substantially matrix shape, and the main sealant 15 is also applied.
A liquid crystal for producing a bonded substrate 31 in which a desired cell gap is formed by bonding one substrate 14 coated with the outer peripheral sealant 16 in a state of enclosing the outermost periphery of the region where A display device manufacturing apparatus 20 comprising: an upper and lower surface plate for pressurizing and holding the two substrates 12 and 14 in a vacuum atmosphere to form a closed space between the two substrates 12 and 14. 27 and 28, the vacuum chamber 21 provided with the upper and lower surface plates 27 and 28, and the two substrates 12 and 14, and the two substrates 12 by controlling the degree of vacuum in the vacuum chamber 21. , 14 to a desired cell gap to form a bonded substrate 31, and control systems 24, 36, 37 for measuring the cell gap of the bonded substrate 31.
3, 33, and 34, and an ultraviolet irradiation system 25 for irradiating the bonded substrate 31 having the desired cell gap with ultraviolet rays.

According to the third aspect of the present invention, the one substrate 14 on which the image display portions 3A _{1 to} 3A _n are formed in a substantially matrix shape.
A method for manufacturing a liquid crystal display element for manufacturing a bonded substrate having a desired cell gap formed by bonding a and the other substrate 12 together, wherein at least one substrate 14a is formed into a substantially matrix shape. The main sealant 15 is applied around the formed image display portions 3A _{1 to} 3A _n , and a part of the outer peripheral sealant 16 is provided with a ventilation hole 17 so as to surround the outermost periphery of the region where the main sealant 15 is lined up. And applying the two substrates 12 and 14a under atmospheric pressure by temporarily holding the upper and lower platens 27 and 28 under pressure to perform temporary bonding, and the two substrates subjected to the temporary bonding. The step of depressurizing the atmosphere of the substrates 12 and 14a to a predetermined vacuum atmosphere, and the vent hole 17 being sealed so that the two substrates 1
2, 14a and the step of forming a closed space by the outer peripheral sealing agent 16, and leaking a predetermined vacuum atmosphere to the atmospheric pressure in the state of the temporary bonding to generate a non-uniform cell gap during the temporary bonding. And a step of forming a bonded substrate by uniformly correcting, and performing a main bonding by irradiating the bonded substrate having the uniform cell gap with ultraviolet rays.

In the invention according to claim 4, the main sealant 15 is applied to the periphery of the image display portions 3A _{1 to} 3A _n formed in a substantially matrix shape, and the main sealant 15 is also applied.
Bonding in which a desired cell gap is formed by bonding one substrate 14a to which the outer peripheral sealant 16 is partially provided with a ventilation hole 17 and the other substrate 12 so as to surround the outermost periphery of the region A manufacturing apparatus 20A of a liquid crystal display element for manufacturing a substrate, comprising the two substrates 12,
14a is pressurized and held under atmospheric pressure, and the two substrates 1
Upper and lower surface plate 2 for forming a closed space between 2 and 14a
7, 28, the vacuum chamber 21 provided with the upper and lower surface plates 27, 28 and the two substrates 12, 14a, and by controlling the degree of vacuum in the vacuum chamber 21,
Control mechanism 2 for pressing the two substrates 12, 14a to a desired cell gap to form a bonded substrate
4, 36, 37, a measurement system 23, 33, 34 for measuring the cell gap of the bonded substrate, and a coating for applying a sealant to the vent hole 17 of the one substrate 14a constituting the bonded substrate. And a mechanism 26.

The invention according to claim 5 is the method for manufacturing a liquid crystal display element according to claim 1, wherein the two substrates 12,
The upper and lower stools 27 and 28 for forming a closed space between the two substrates 12 and 14 by temporarily bonding 14 in a vacuum atmosphere have concave portions on the surfaces facing each other.
Convex portion 27a~27c, 27 ₁ ~27 _4, 28a~28
c, 28 _{1 to} 28 ₄ are formed, and concave and convex portions 27 a to 27 c, 27 _{1 to} 27 ₄ , 28 a to 28 c, respectively, are formed.
28 _{1 to} 28 ₄ are arranged so as to face each other with the substrates 12 and 14 interposed therebetween, and at the time of pressurization, the at least one convex surface portion 2
8 _{1 to} 28 ₄ are the image display portions 3A _{1 to} 3A _{n of the} substrate 14.
It is characterized in that the other parts are pressurized.

The invention according to claim 6 is the manufacturing apparatus 20 for a liquid crystal display element according to claim 2, wherein the two substrates 1
By temporarily bonding 2 and 14 in a vacuum atmosphere,
The top to form a sealed space between the two substrates 12 and 14, lower platen 27 and 28, concave opposing surfaces, respectively, convex portions 27a~27c, 27 ₁ ~27 _4, 28a~2
8c, 28 _{1 to} 28 ₄ are formed,
Convex portion 27a~27c, 27 ₁ ~27 _4, 28a~28
c, 28 _{1 to} 28 ₄ are arranged so as to face each other with the substrates 12 and 14 interposed therebetween, and at the time of pressurization, the at least one convex surface portion 28 _{1 to} 28 ₄ has the image display portion 3A ₁ to
It is characterized by being configured to pressurize other than 3A _n .

The invention according to claim 7 is the method for manufacturing a liquid crystal display element according to claim 3, wherein the two substrates 12,
By temporarily bonding 14a under atmospheric pressure, the
The upper and lower stools 27 and 28 for forming a closed space between the substrates 12 and 14a each have a concave surface,
Convex portion 27a~27c, 27 ₁ ~27 _4, 28a~28
c, 28 _{1 to} 28 ₄ are formed, and concave and convex portions 27 a to 27 c, 27 _{1 to} 27 ₄ , 28 a to 28 c, respectively, are formed.
28 _{1 to} 28 ₄ are arranged so as to face each other via the substrates 12 and 14 a, and at the time of pressurization, the at least one convex surface portion 28 _{1 to} 28 ₄ has the image display unit 3 A ₁ to the substrate 14 a.
It is characterized in that a pressure other than 3A _n is applied.

The invention according to claim 8 is the manufacturing apparatus 20A for a liquid crystal display element according to claim 4, wherein the two substrates 12 and 14a are pressurized and held under atmospheric pressure, and the two substrates The upper and lower stools 27 and 28 for forming a closed space between the substrates 12 and 14a have concave and convex portions 2 on the surfaces facing each other.
_{7a~27c, 27 1 ~27 4, 28a~28c} , 28 1
To 28 ₄ to form a respective concave convex portion 27
_{a~27c, 27 1 ~27 4, 28a~28c} , 28 1 ~
28 ₄ are arranged so as to face each other with the substrates 12 and 14a interposed therebetween, and at the time of pressurization, the at least one convex surface portion 28 ₁
To 28 _4, the image display unit 3A ₁ to 3 A _n of the substrate 14a
It is characterized in that it is configured to pressurize other parts.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. In addition, since the examples described below are preferable specific examples of the present invention, various technically preferable limitations are given, but the scope of the present invention particularly limits the present invention in the following description. Unless stated otherwise, the present invention is not limited to these embodiments.

FIG. 1 is an explanatory view of a preferred embodiment of the liquid crystal display element manufacturing apparatus according to the present invention, and FIG. 2 is an explanatory view of another embodiment of the liquid crystal display element manufacturing apparatus according to the present invention. Three
Is a perspective view of an upper substrate and a lower substrate constituting a liquid crystal display element,
FIG. 4 is a perspective view showing another example of an upper substrate and a lower substrate which form a liquid crystal display element, FIG. 5 is a perspective view of a transparent substrate and a silicon IC substrate which form a liquid crystal display element, and FIG. FIG. 7 is a perspective view showing another example of a transparent substrate and a silicon IC substrate that form an element, and FIG. 7 is a side view showing a related configuration of an upper surface plate and a substrate used in a manufacturing apparatus for a liquid crystal display element according to this embodiment. FIG. 8 and FIG. 8 are explanatory diagrams showing the results of the bonding process (cell gap measurement results). The same parts as those described above are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 1 is an explanatory view of a preferred embodiment of a liquid crystal display element manufacturing apparatus 20 according to this embodiment. In FIG. 1, reference numeral 21 is a vacuum chamber, 22 is a main bonding chamber, and these chambers 21 and 22 roughly constitute a liquid crystal display device manufacturing apparatus 20 according to the present embodiment. Reference numeral 35 is a partition door provided between the vacuum chamber 21 and the main bonding chamber 22. Less than,
Specific configurations of the vacuum chamber 21 and the main bonding chamber 22 will be described.

In the vacuum chamber 21, a cell gap measuring system 23 and an exhaust control system 24 are connected to the upper surface plate 27, which will be described later, via an optical fiber 33, and in the latter, a pressure measuring gauge 36, a regulating valve 37, etc. Each of them is connected to the inside 21a of the chamber.
Incidentally, 34 is the tip of the above-mentioned optical fiber 33 inserted into the upper surface plate 27.

In the vacuum chamber 21, the above-mentioned upper surface plate 27, the lower surface plate 28 arranged so as to face the upper surface plate 27, and the air cylinder 29 connected to the lower surface plate 28 are arranged. In addition, the lower substrate 14 provided with sealing agents 15 and 16 described later is placed on the lower surface plate 28. The upper substrate 12 is arranged between the upper surface plate 27 and the lower surface plate 28 so as to be held by the substrate holding portion 32.

On the other hand, in the main bonding chamber 22 described above, an ultraviolet irradiation system 25 and a table 30 for mounting a bonded substrate 31 bonded in a process described later are arranged. For convenience of explanation, the bonded substrate 31 is shown as a diagram arranged on the table 30.

FIG. 2 is an explanatory view of another embodiment of the liquid crystal display device manufacturing apparatus 20A according to the present invention. The same parts as those in FIG. 1 described above are designated by the same reference numerals, and detailed description thereof will be omitted. 2 is different from that shown in FIG. 1 in that the ultraviolet irradiation system 25a for sealing the vent 17 described later is directly connected to the inside of the vacuum chamber 21a via the cable 38, and the sealant dispensing system is used. 26 is directly connected to the inside of the vacuum chamber 21a via the tube 39.

The apparatus 20A for manufacturing a liquid crystal display element according to the present invention has the same bonding chamber 22 as in FIG.
Of course, it is good to connect.

Next, the upper substrate 1 to be bonded
2, the configuration of the lower substrate 14 and the like will be described with reference to FIG. FIG. 3 is a perspective view of the upper substrate 12 and the lower substrate 14 which constitute the liquid crystal display element. In FIG. 3, image display portions (areas) are formed in a matrix on the lower substrate 14.
3A _{1 to} 3A _n are provided, and the main sealant 15 is applied in advance around the respective image areas 3A _{1 to} 3A _n .

Further, in a state where the outermost periphery of the region where the main sealant 15 is lined up on the lower substrate 14 is surrounded, the outer peripheral sealant 1
6 is applied. Then, spacers (not shown) for previously determining the cell gap are mixed in the main and outer peripheral sealing agents 15 and 16. In the present embodiment, the image areas 3A _{1 to} 3A _n are arranged in a matrix, as an example.
As described above, the present invention is not limited to this embodiment.

FIG. 4 shows an upper substrate 1 which constitutes a liquid crystal display element.
It is a perspective view showing other examples of 2 and lower substrate 14a. In FIG. 4, the portion different from FIG. 3 described above is such that the outer peripheral sealant 16 is applied so as to partially provide the vent hole portion 17 in a state of enclosing the outermost periphery of the region where the main sealant 15 is lined up. Is. And, as described above, spacers (not shown) for determining the cell gap are mixed in these main and outer peripheral sealing agents 15 and 16.

FIG. 5 is a specific example of the above-mentioned upper substrate 12 and lower substrate 14 which constitute the liquid crystal display element.
2 is a transparent substrate 2 and the lower substrate 14 is a silicon IC substrate 4, respectively, and FIG. In FIG. 5, 3 _{1 to} 3 _n are a plurality of image areas as described above.

Similar to FIG. 5 described above, FIG. 6 also embodies the above-mentioned upper substrate 12 and lower substrate 14 constituting the liquid crystal display element. The upper substrate 12 is the transparent substrate 2 and the lower substrate 14 is the silicon IC. It is explanatory drawing which shows the other example of what was each materialized in the board | substrate 4a, and the part different from FIG. 5 mentioned above in this FIG. 6 is the outer peripheral seal in the state which surrounds the outermost periphery of the area | region where the said main sealant 15 is located in a line. That is, the agent 16 is applied so as to partially provide the vent hole portion 17.

FIG. 7 shows upper and lower surface plates 27 and 28 used in the manufacturing apparatus 20 or 20A of the liquid crystal display device according to this embodiment.
3 is a side view showing a configuration related to the upper and lower substrates 12 and 14. FIG. For convenience of description, the substrate holding portion 32 for holding the upper substrate 12 is omitted.

The upper surface plate 27 has convex surface portions 27 _{1 to} 27 ₄ on the lower surface side, that is, the side facing the lower surface plate 28 through the upper and lower substrates 12 and 14, and the convex surface portions 27 ₁ and 2
7 ₂ (for the sake of convenience of explanation, only one place will be described as an example, but the same applies to other convex surface portions).
a is provided. The amount of depression of the concave portion 27a varies depending on the size of the foreign matter at the time of bonding, but as a result of various experiments, it is considered to be good if it is set to 100 μm or more.

On the other hand, the lower surface plate 28 has convex surface portions 28 _{1 to} 28 ₄ on the upper surface side thereof, that is, on the side facing the upper surface plate 27 via the upper and lower substrates 12 and 14, and the convex surface portion 2
A concave surface portion 28a is provided between 8 ₁ and 28 ₂ (for the sake of convenience of description, only one place is illustrated and described, but the other convex surface portions are also the same). In addition, this concave portion 28a
As with the upper surface plate 27 described above, it is considered to be good if the depression amount is set to 100 μm or more.

The image display portions 3A _{1 to} 3A _n are formed between the main sealants 15 and 15 formed on the upper surface of the lower substrate 14 (on the upper substrate 12 side).

As shown in FIG. 7, in addition to the specific structure,
The lower surface plates 27 and 28 are provided with convex portions 27 _{1 to} 27 ₄ and 28 ₁ thereof.
To 28 ₄ and between concave portions 27a~27c, 28a~28
c are opposed to each other (opposed to each other), and the upper and lower surface plates 27,
The upper and lower substrates 12 and 14 are arranged between the two 28, which are shown in FIG.
In the vacuum chamber 21 as shown in FIG. 2, the upper and lower surface plates 2
7 and 28, even if foreign matter, dust, and the like are mixed between the upper surface plate 27 and the upper substrate 12, they are accommodated in the concave portions 27a to 27c, so that the local cell gap is prevented. Is less likely to occur.

It should be noted that foreign matter between the lower surface plate 28 and the lower substrate 14,
Similarly, when dust or the like is mixed, the dust and the like are settled in the concave portions 28a to 28c, so that local nonuniformity of the cell gap hardly occurs.

Incidentally, for example, the convex surface portion 28 _{1 of the} lower surface plate 28
To 28 ₄ to the configuration of the contact portion of the lower substrate 14, the substrate 14 side, the main (structure of FIG. 7) the peripheral sealing material 15, 16 to a back side (upper substrate 12 side) it is desirably to apply. However, the shape is not limited to that shown in this embodiment, as described above.

Here, a method of attaching the upper substrates 12 and 2 and the lower substrates 14 and 4 having the configurations as shown in FIGS. 3 and 5 by using the liquid crystal display device manufacturing apparatus 20 of FIG. 1 will be mainly described. This will be described with reference to FIG. For convenience of explanation, FIG. 3 will be described as an example, but in FIG. 5 as well, the upper substrate 12 and the lower substrate 14 are embodied as the transparent substrate 2 and the silicon IC substrate 4, respectively, and the other configurations are exactly the same. Although the description is not made here intentionally, the same effect is naturally obtained.

First, the main sealant 15 is applied around the image areas 3A _{1 to} 3A _n formed in a matrix on the upper surface of the lower substrate 14, and the outermost periphery of the area where the main sealant 15 is lined up. The outer peripheral sealant 16 is continuously applied in a state of enclosing.

Next, on the lower surface plate 28 which is provided in the vacuum chamber 21 has the image area 3A ₁ to 3 A _n formed in a substantially matrix shape with the respective image area 3A ₁ to 3 A _n The main sealant 15 and the outer sealant 15 are applied to the lower substrate 14 coated with the outer sealant 16 so as to surround the outermost periphery of the main sealant 15 and the region where the main sealant 15 is lined up. The upper substrate 12, which is the other substrate to be bonded, is placed (set) in a state of being on the board 27 side, and the substrate holding unit 3
Set (place) on 2. After that, the inside of the vacuum chamber 21 is evacuated by controlling the adjusting valve 37 by the exhaust control system 24.

The exhaust pressure P here is configured to be controllable from atmospheric pressure to -95 kPa, although it depends on a desired differential pressure which will be described later. It is needless to say that this control is performed using the pressure measuring gauge 36 described above. Further, as described above, spacers for determining the cell gap are mixed in advance in the main and outer peripheral sealing agents 15 and 16.

Thereafter, the air cylinder 29 is actuated to move the lower platen 28 on which the lower substrate 14 connected thereto is moved upward, so that the upper substrate 12 set in the substrate holding portion 32 is moved to the upper substrate 12. The outer peripheral sealing agent 16 forms a sealed space by pressing the upper surface plate 27 while being placed on the lower substrate 14 and temporarily bonding (primary bonding) the upper and lower substrates 12 and 14 together. To be done.

By this temporary bonding, the upper and lower substrates 12,
Even if there is a warp or a swell in 14, the upper and lower substrates 12 and 14 will be bonded together in a corrected state.

As described above, during the process of bonding the upper and lower substrates 12 and 14 in a state where the warps and undulations are corrected to form a sealed space, a cell gap between the upper and lower substrates 12 and 14 is formed. Is measured by the following method by the cell gap measuring system 23 described above.

That is, as described above, the cell gap measuring system 23 is connected to the inside of the upper surface plate 27 by the optical fiber 33, and the tip portion 34 of the upper substrate 27 is not shown, but the temporary bonding is completed, and the lower substrate. It is configured to be inserted into the inside of 12, 12.

Therefore, during the temporary bonding, by operating the cell gap measuring system 23, for example, laser light is emitted from the tip portion 34 of the optical fiber 33, which passes through the inside of the upper substrate 12 and the lower substrate 14. The cell gap measuring system 23, which is reflected by the surface and is used as return light
Will return to inside. In the cell gap measurement system 23, the cell gap value D is obtained by taking out this return light (interference light).

By the way, based on the relationship between the cell gap value D thus measured and the area S of the closed space formed by the outer peripheral sealant 16, the volume of the closed space is V = S ×
It is determined to be D.

The concept of volume determination here is as follows. That is, when the cell gap (design value) finally obtained is D ₀ and the area formed by the outer peripheral sealant 16 is S, the volume V ₀ obtained there is V ₀ = S × D
It is ₀ . Finally, since the vacuum chamber 21 is leaked to the atmospheric pressure, unless the pressure in the sealed space (V ₀ ) formed by the outer peripheral sealant 16 becomes equal to the atmospheric pressure, the two bonded substrates It is not possible to maintain a uniform cell gap. That is, if the atmospheric pressure is P _A , P _A ×
Since V ₀ is constant, assuming that the vacuum exhaust pressure in the vacuum chamber 21 is P, the relationship of P _A × V ₀ = P × V holds.

That is, the vacuum exhaust in the vacuum chamber 21
If the air pressure is P, the desired Ser
Up is naturally determined as D = V / S. Servant
The cell gap value is D
Vacuum chamber by applying pressing force to
When 21 leaks to atmospheric pressure, the desired cell gap D ₀
Is obtained.

In the present embodiment, based on such knowledge, the cell gap measuring system 23, the air cylinder 29, and the exhaust control system 24 are connected by a feedback loop (not shown) to control them.
It is configured to be possible.

Next, the bonded substrate stack 31 whose entire surface is pressed to the desired cell gap is transferred to the main bonding chamber 22 and the bonded substrate stack 3 is then transferred.
After 1 is placed on the table 30 in the main bonding chamber 22, the ultraviolet irradiation system 25 provided on the table 30 irradiates the bonded substrate 31 with ultraviolet light. As a result, the bonded substrate 31 that is evenly bonded in the vacuum chamber 21 is completely fixed and the bonding is completed. Then, the substrate on which the bonding is completed is sent to a cutting process which is a post process.

Next, a method of bonding the upper substrates 12 and 2 and the lower substrates 14a and 4a having the configurations as shown in FIGS. 4 and 6 by using the liquid crystal display device manufacturing apparatus 20A shown in FIG.
A description will be given mainly with reference to FIG. Although FIG. 4 is taken as an example for convenience of explanation, in FIG. 6 as well, the upper substrate 12 and the lower substrate 14a are the transparent substrate 2 and the silicon IC substrate 4a.
However, since the other configurations are the same, the explanation is omitted here.
As a matter of course, it has the same effect.

First, the main sealant 15 is applied around the substantially matrix-shaped image areas 3A _{1 to} 3A _n formed on the upper surface of the lower substrate 14a, and the outermost periphery of the area where the main sealant 15 is lined up is surrounded. The peripheral sealing agent 16 applied in this state is applied continuously so that a part of the vent hole 17 is provided.

Next, on the lower surface plate 28 provided in the vacuum chamber 21, the above-mentioned substantially matrix-shaped image areas 3A _{1 to} 3A _n are provided, and the respective image areas 3A are formed.
_The main sealant 15 and the outer peripheral sealant 16 applied so as to surround the outermost periphery of the region where the main sealant 15 is lined up around _{1 to} 3A _n are continuously provided so that a part of the vent hole 17 is provided. The coated lower substrate 14a is placed (set) in a state where the main and outer peripheral sealing agents 15 and 16 are on the upper surface plate 27 side, and the upper substrate 12 that is the other substrate to be bonded is the substrate. It is set (placed) on the holding part 32.

Thereafter, when the air cylinder 29 is operated, the lower platen 28 on which the lower substrate 14a connected to the air cylinder 29 is placed is moved upward, and the upper substrate 12 set in the substrate holding portion 32 is moved to the upper substrate 12. While being placed on the lower substrate 14a, the upper substrate 27 is pressed against the upper and lower substrates 12, 1
By performing temporary bonding (primary bonding) of 4a,
The outer peripheral sealant 16 forms a space for controlling the internal pressure.

By this temporary bonding, the upper and lower substrates 12,
Even if the 14a has a warp or a swell, the upper and lower substrates 12 and 14a are bonded together in a corrected state.

As described above, the upper and lower substrates 12 and 14a are laminated in a state in which the warp, undulation and the like are corrected, and a space for controlling the internal pressure is formed on them.
The cell gap between the lower substrates 12 and 14a is measured by the cell gap measuring system 23 described above by the following method.

That is, as described above, the cell gap measuring system 23 is connected to the inside of the upper surface plate 27 by the optical fiber 33, and the tip 34 of the cell gap measuring system 23 is not shown in the drawing, but after the temporary bonding is completed, the lower substrate is formed. It is configured to be inserted into the inside of 12, 14a.

Therefore, after the temporary bonding, by operating the cell gap measuring system 23, for example, laser light is emitted from the tip portion 34 of the optical fiber 33, which passes through the inside of the upper substrate 12 and the lower substrate 14a. The cell gap measuring system 23, which is reflected by the surface and returns as a return light
Will return to inside. In the cell gap measuring system 23, the cell gap value obtained by extracting this return light (interference light) is within a predetermined range (1.1 μm to 2).
0 μm) can be determined.

The point will be described in detail below. After the cell gap (value) is formed by the method as described above, the temporary bonding (primary bonding) of the lower substrates 12 and 14a is completed. As described above, the volume of this space is determined by the relationship between the cell gap (value) and the space formed by the outer peripheral sealant 16.

In this embodiment, as described above, since the outer peripheral sealant 16 is applied so that the ventilation holes 17 are partially provided, unlike the above embodiment, a cell gap (value) is formed. When the temporary bonding (primary bonding) of the lower substrates 12 and 14a is completed, the exhaust control system 2
4, inside the space volume, that is, inside the vacuum chamber 21a
Further control the pressure of P to obtain a desired value, P (P × V = P
_A × V ₀ ).

Then, with the pressure in the vacuum chamber 21a set to a desired value, the side surface of the ventilation hole 17 provided in the lower substrate 14a for which the temporary bonding has been completed is sealed via a tube 39. The ultraviolet-curable sealant is applied by the agent dispensing system 26, and then the ultraviolet-irradiation system 25a irradiates ultraviolet rays through the cable 38 to cure the above-mentioned sealant. The part is completely sealed. If the sealing agent has a high viscosity and can sufficiently seal and hold the vent hole 17 portion, the ultraviolet irradiation by the ultraviolet irradiation system 25a is not necessary.

In this way, when the vent hole 17 provided in the lower substrate 14a is completely sealed, the exhaust control system 24 controls the adjusting valve 37, for example, in the vacuum chamber 21a. Leak to atmospheric pressure. Then, due to the pressure difference between the pressure at the time of leak and the atmospheric pressure, a pressing force is uniformly applied to the entire surface of the bonded substrate up to the cell gap formed by the spacer in the sealant.
That is, due to the pressure difference between the initial vacuum degree and the atmospheric pressure, the entire bonded substrate surface has a desired cell gap (1 μm to 5 μm).
A bonded substrate (not shown) that has been pressed up to 1 is obtained. Then, the substrate on which the bonding is completed is sent to a cutting process which is a post process.

In each of the embodiments, the upper and lower substrates 12 and 14 shown in FIGS.
When the upper and lower surface plates 27 and 28 are attached in one,
Even if foreign matter or dust is mixed between the upper and lower surface plates 27 and 28 and the upper and lower substrates 12 and 14, the image area 3 ₁
The lower surface plates 27 and 28 are used in addition to the structure shown in FIG. 7 so as not to damage 3 to 3 _n or deteriorate the cell gap uniformity after bonding.
It should be noted that the upper and lower surface plates 27, 28 and the contact portions with the lower substrates 12, 14 and the like are preferably, for example, the back side of the lower substrate 14 on which the main and outer peripheral sealing agents 15, 16 are applied. The shape and the like are not limited at all.

Next, the operation of the preferred embodiment of the present invention will be described with reference to FIGS. 1 to 7 and, if necessary, FIGS. 9 and 10. In the vacuum chamber 21 shown in FIG.
As described above, the lower surface plate 28 and the upper surface plate 27 that are vertically moved by the air cylinder 29 are provided. On the lower surface plate 28 and the upper surface plate 27, for example, the silicon wafer substrate 4 and the transparent glass substrate 2 shown in FIG. 5 are installed.

The silicon wafer substrate 4 is formed in a substantially matrix shape so as to have a plurality of image areas 3 ₁ each having a size of about 1 inch. On the surface of the silicon wafer substrate 4, an alignment film (not shown) for aligning the liquid crystal 5 is applied, and then a main sealant 15 is applied around the respective image areas 3 _{1 to} 3 _n .

As the main sealant 15, for example, an adhesive WR series manufactured by Kyoritsu Chemical Industry Co., Ltd. is used. In this adhesive, for example, S manufactured by Yakushi Kasei Co., Ltd.
W series spacer balls are mixed. Further, the same peripheral sealant 16 as the main sealant 15 was used and was applied. These main and perimeter sealant 1
The coating thickness of 5 and 16 was about 20 μm.

The glass substrate 2 used as a transparent substrate was a Corning Model No. 1737 glass 0.7 mm thick. The glass substrate 2 is provided with an antireflection film on one side, a transparent electrode film on the other side, and an alignment film on the transparent electrode film.

The silicon wafer substrate 4 is set on the lower surface plate 28, the glass substrate 2 is set on the substrate holding portion 32, the inside of the vacuum chamber 21 is evacuated to -70 kPa, and then the glass substrate 2 is set by the air cylinder 29. Was placed on the silicon wafer substrate 4 and pressed against the upper surface plate 27. The pressing pressure at that time was about 0.2 kPa.

From this state, the exhaust control system 2
At 4, the pressure was gradually increased to atmospheric pressure (pressure release).
After the pressure is increased (released) to the atmospheric pressure, the bonded substrate having the entire substrate surface pressed to a desired cell gap is transferred to the main bonding chamber 22, and the bonded substrate is bonded to the main bonded chamber. After being placed on the table 30 in the chamber 22, an ultraviolet irradiation system 25 provided on the table 30 irradiates ultraviolet rays of 3000 mJ or more to the main and peripheral sealing agents 15 and 16 parts of the above-mentioned bonded substrate. The sealing agent was cured and fixed.

Image areas 3 ₁ to 20 having 20 or more locations in the silicon wafer substrate 4 on the substrates that have been bonded to each other.
Of 3 _n , cell gap measurement after bonding was performed at 7 points. The result is shown in FIG.

As is clear from the results shown in FIG. 8, the cell gap uniformity between the central portion and the average value of the four peripheral portions in one image area is 0.11 μm to 0.38 μm. In shape, this level of uniformity is very good,
Sufficient corrections can be made in the subsequent process of dividing individual liquid crystal display cells, liquid crystal injection process, and injection port sealing process, and the final cell gap uniformity of the liquid crystal display device can be suppressed to 0.05 μm or less. It is a thing.

[0080]

The invention according to claim 1 provides a bonded substrate having a desired cell gap formed by bonding one substrate having an image display portion formed in a substantially matrix shape and the other substrate. A method for manufacturing a liquid crystal display element for manufacturing, comprising applying a main sealant around at least one of the substrates around an image display part formed in a substantially matrix shape, and at the The step of applying the outer peripheral sealant in a state of enclosing the outer periphery, and the two substrates are temporarily bonded by holding the upper and lower platens under pressure in a vacuum atmosphere, so that the two outer peripheral sealants are bonded together. And forming a sealed space between the substrates, and by leaking the vacuum atmosphere from the temporary bonding state to the atmospheric pressure, pressurizing the two substrates to a desired cell gap to bond the two substrates. It comprises a step of forming a substrate, a step of measuring a cell gap of the bonded substrate, and a step of irradiating an ultraviolet ray to the bonded substrate having the desired cell gap to perform the main bonding. Therefore, the cell gap of the liquid crystal display element and its uniformity can be controlled with high accuracy. Therefore, the projector and the projection T
Since it is possible to obtain the highly accurate uniformity of the cell gap required for a V liquid crystal display element, when this is used as a basic component of a projector or a projection TV, the uneven brightness and color unevenness of the image are very small. It is possible to provide high quality images.

According to the second aspect of the present invention, the main sealant is applied to the periphery of the image display portion formed in a substantially matrix shape, and the outer peripheral sealant is applied so as to surround the outermost periphery of the region where the main sealant is lined up. A liquid crystal display device manufacturing apparatus for producing a bonded substrate in which a desired cell gap is formed by bonding the coated one substrate and the other substrate together in a vacuum atmosphere. And pressurizing and holding to form a closed space between the two substrates, a lower stool, a vacuum chamber in which the upper and lower stools and the two substrates are provided, and the inside of the vacuum chamber. By controlling the vacuum degree, the two substrates are pressed to a desired cell gap to form a bonded substrate, and a measurement system for measuring the cell gap of the bonded substrate. System and an ultraviolet irradiation system for irradiating the bonded substrate on which the desired cell gap is formed with ultraviolet rays, the cell gap of the liquid crystal display element and its uniformity can be accurately controlled, and therefore, Since it is possible to obtain the highly accurate cell gap uniformity required for a liquid crystal display element of a projector or a projection TV, when this is used as a basic component of a projector or a projection TV, uneven brightness and color of an image may occur. It can provide very few high quality images.

According to a third aspect of the present invention, a bonded substrate having a desired cell gap is produced by bonding one substrate having an image display portion formed in a substantially matrix shape and the other substrate. A method for manufacturing a liquid crystal display element for applying a main sealant to at least the periphery of an image display portion formed in a matrix on one of the substrates and at the outermost periphery of a region where the main sealant is lined up. A step of partially applying an outer peripheral sealant in a surrounding state by providing a ventilation port; a step of temporarily bonding the two substrates by holding pressure on upper and lower surface plates under atmospheric pressure; Depressurizing the atmosphere of the combined two substrates to a predetermined vacuum atmosphere, sealing the vent hole to form a sealed space by the two substrates and the outer peripheral sealant, Temporary bonding A step of forming a bonded substrate by leaking a predetermined vacuum atmosphere under a barred state to atmospheric pressure and uniformly correcting the non-uniform cell gap during the temporary bonding, and the uniform cell gap is The step of irradiating the formed bonded substrate with ultraviolet rays to perform the main bonding allows the cell gap of the liquid crystal display element and its uniformity to be accurately controlled, and therefore the liquid crystal of the projector or projection TV. Since it is possible to obtain the highly accurate cell gap uniformity required for a display element, when this is used as a basic component of a projector or a projection TV, there is very little unevenness in brightness and color of an image and high quality. It can provide video.

In the invention according to claim 4, the main sealant is applied to the periphery of the image display portion formed in a substantially matrix shape, and the outer peripheral sealant is applied in a state of enclosing the outermost periphery of the region where the main sealant is lined up. A manufacturing apparatus of a liquid crystal display element for manufacturing a bonded substrate in which a desired cell gap is formed by bonding one substrate coated with a partial ventilation hole and the other substrate to each other. An upper and lower platen for forming a closed space between the two substrates by pressurizing and holding the two substrates under atmospheric pressure, and a vacuum chamber provided with the upper and lower platens and the two substrates. And controlling the degree of vacuum in the vacuum chamber to pressurize the two substrates to a desired cell gap to form a bonded substrate and a cell gap of the bonded substrate. Measure Since the measurement system and the coating mechanism for coating the sealant on the ventilation hole of the one of the substrates constituting the bonded substrate are provided, the cell gap of the liquid crystal display element and its uniformity can be accurately controlled. Therefore, it is possible to obtain the highly accurate cell gap uniformity required for a liquid crystal display element of a projector or a projection TV. Therefore, when this is used as a basic component of a projector or a projection TV, uneven brightness of an image can be obtained. It is possible to provide high quality images with very little color unevenness.

The invention according to claim 5 is the method of manufacturing a liquid crystal display element according to claim 1, wherein the two substrates are temporarily bonded together in a vacuum atmosphere, and the two substrates are bonded together. The upper and lower stools for forming a closed space are formed with concave and convex parts on the opposite surfaces, and the concave and convex parts are arranged so as to oppose each other through the substrate, and the pressure is applied. At this time, since the at least one convex surface portion presses other than the image display portion of the substrate, even if there is a warp or a swell in the substrate at the time of temporary bonding, it is corrected in the initial stage of bonding. Therefore, a uniform press can be realized.

Further, since the concave surface portion is formed as described above, even if foreign matter, dust or the like is mixed between the upper and lower surface plates and the two substrates, they are accommodated in the concave surface portion, so that the local cell No gap non-uniformity occurs. Further, when the pressure is applied, the convex surface portion presses the portions other than the image display portion of the substrate, so that the image display portion is not adversely affected.

The invention according to claim 6 is the apparatus for manufacturing a liquid crystal display element according to claim 2, wherein the two substrates are pressure-held in a vacuum atmosphere and hermetically sealed between the two substrates. The upper and lower stools for forming a space are provided with concave and convex surface portions on their respective surfaces facing each other, and the concave and convex surface portions are arranged so as to face each other via the substrate. Since the convex surface portion is configured to press the portion other than the image display portion of the substrate, even if there is a warp or undulation in the substrate at the time of temporary bonding, it can be corrected in the initial stage of bonding, and thus, uniform The press can be realized.

Further, since the concave surface portion is formed as described above, even if foreign matter, dust or the like is mixed between the upper and lower surface plates and the two substrates, they are accommodated in the concave surface portion, so that the local cell No gap non-uniformity occurs. Further, when the pressure is applied, the convex surface portion presses the portions other than the image display portion of the substrate, so that the image display portion is not adversely affected.

The invention according to claim 7 is the method for manufacturing a liquid crystal display element according to claim 3, wherein the two substrates are temporarily bonded together under atmospheric pressure, and the two substrates are bonded together. The upper and lower stools for forming a closed space are formed with concave and convex parts on the opposite surfaces, and the concave and convex parts are arranged so as to oppose each other through the substrate, and the pressure is applied. At this time, since the at least one convex surface portion presses other than the image display portion of the substrate, even if there is a warp or a swell in the substrate at the time of temporary bonding, it is corrected in the initial stage of bonding. Therefore, a uniform press can be realized.

Further, since the concave surface portion is formed as described above, even if foreign matter, dust or the like is mixed between the upper and lower surface plates and the two substrates, they are accommodated in the concave surface portion, so that the local cell No gap non-uniformity occurs. Further, when the pressure is applied, the convex surface portion presses the portions other than the image display portion of the substrate, so that the image display portion is not adversely affected.

The invention according to claim 8 is the apparatus for manufacturing a liquid crystal display element according to claim 4, wherein the two substrates are pressure-held under atmospheric pressure and sealed between the two substrates. The upper and lower stools for forming a space are formed such that concave and convex portions are formed on the respective surfaces facing each other, and the concave and convex portions are arranged so as to face each other via the substrate, and when pressure is applied, Since the at least one convex surface portion is configured to press a portion other than the image display portion of the substrate, even when there is a warp or undulation in the substrate during temporary bonding, it can be corrected in the initial bonding stage, Therefore, a uniform press can be realized.

Further, since the concave portion is formed as described above, even if foreign matter, dust or the like is mixed between the upper and lower surface plates and the two substrates, they are accommodated in the concave portion, so that the local cell No gap non-uniformity occurs. Further, when the pressure is applied, the convex surface portion presses the portions other than the image display portion of the substrate, so that the image display portion is not adversely affected.

[Brief description of drawings]

FIG. 1 is an explanatory view of a preferred embodiment of a liquid crystal display device manufacturing apparatus according to the present invention.

FIG. 2 is an explanatory view of another embodiment of the liquid crystal display device manufacturing apparatus according to the present invention.

FIG. 3 is a perspective view of an upper substrate and a lower substrate that form a liquid crystal display element.

FIG. 4 is a perspective view showing another example of an upper substrate and a lower substrate which form a liquid crystal display element.

FIG. 5: Transparent substrate and silicon I that constitute a liquid crystal display element
It is a perspective view of a C board.

FIG. 6 is a transparent substrate and silicon I constituting a liquid crystal display device.
It is a perspective view which shows the other example of C board | substrate.

FIG. 7 is a side view showing a related configuration of an upper surface plate and a substrate used in the liquid crystal display device manufacturing apparatus according to the present invention.

FIG. 8 is an explanatory diagram showing a result of performing a bonding step.

FIG. 9 is a perspective view showing a structure of a liquid crystal display element.

FIG. 10 is a cross-sectional view showing a structure of a liquid crystal display element.

[Explanation of symbols]

1 transparent conductive film 2 glass substrate 3 pixel electrode (display area) 3 _{1 to} 3 _n image area 3A _{1 to} 3A _n image area 4 silicon IC substrate 5 liquid crystal 6 spacer 7 seal adhesive 8 antireflection film 9 liquid crystal injection port (sealing) Stop part 10 Liquid crystal display element 12 Upper substrate 14 Lower substrate 14a Lower substrate 15 Main sealant 16 Peripheral sealant 16 _{1 to} 16 ₃ Image display section 17 Vent 20 Liquid crystal display element manufacturing device 21 Vacuum chamber 21a 22 inside chamber Lamination chamber 23 Cell gap measuring system 24 Exhaust control system 25 Ultraviolet irradiation system 25a Ultraviolet irradiation system 26 Sealant dispensing system 27 Upper surface plate 27 _{1 to} 27 ₄ Convex surface portion 27a to 27c Concave surface portion 28 Lower surface plate 28 _{1 to} 28 ₄ Convex part 28a-28c Concave part 29 Air cylinder 30 Table 31 Lamination Was the substrate 32 substrate holder 33 optical fibers 34 fiber tip 35 partition door 36 pressure measuring gauge 37 gate valve 38 cable 39 Tube

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Makoto Onizuka             3-12 Moriya-cho, Kanagawa-ku, Yokohama-shi, Kanagawa             Local Victor Company of Japan, Ltd. (72) Inventor Hiroshi Onodera             3-12 Moriya-cho, Kanagawa-ku, Yokohama-shi, Kanagawa             Local Victor Company of Japan, Ltd. F term (reference) 2H088 EA10 EA12 FA03 FA05 FA16                       FA30 HA01 MA17                 2H089 LA01 LA24 LA41 NA22 QA14                       TA01 UA05

Claims (8)

[Claims] 1. A liquid crystal display device for producing a bonded substrate having a desired cell gap by bonding one substrate having an image display portion formed in a substantially matrix shape to the other substrate. A method of manufacturing, wherein at least one of the substrates is coated with a main sealant around an image display part formed in a substantially matrix shape, and the outer peripheral sealant is surrounded by the outermost periphery of a region where the main sealants are arranged. And a step of applying the two substrates in a vacuum atmosphere by temporarily holding the upper and lower platens under pressure to form a sealed space between the two substrates by the peripheral sealing agent. And a step of forming a bonded substrate by pressurizing the two substrates to a desired cell gap by leaking a vacuum atmosphere from the temporarily bonded state to atmospheric pressure. Manufacturing a liquid crystal display device, comprising: a step of measuring a cell gap of the bonded substrate; and a step of irradiating the bonded substrate on which the desired cell gap is formed with ultraviolet rays to perform a main bonding. Method. 2. A substrate on which a main sealant is applied to the periphery of an image display portion formed in a substantially matrix shape, and one outer peripheral sealant is applied so as to surround the outermost periphery of the region where the main sealant is lined up. A device for manufacturing a liquid crystal display element for producing a bonded substrate having a desired cell gap formed by bonding the other substrate, wherein the two substrates are pressurized and held in a vacuum atmosphere. , The above 2
By forming a closed space between the two substrates, a lower platen, a vacuum chamber in which the upper and lower platens and the two substrates are provided, and by controlling the degree of vacuum in the vacuum chamber,
A control mechanism for pressurizing the two substrates to a desired cell gap to form a bonded substrate, a measurement system for measuring the cell gap of the bonded substrate, and a desired cell gap formed. An apparatus for manufacturing a liquid crystal display element, comprising: an ultraviolet irradiation system for irradiating the bonded substrate thus bonded with ultraviolet rays. 3. A liquid crystal display element for producing a bonded substrate having a desired cell gap by bonding one substrate having an image display portion formed in a substantially matrix shape and the other substrate. A method of manufacturing, wherein at least one of the substrates is coated with a main sealant around an image display part formed in a substantially matrix shape, and the outer peripheral sealant is surrounded by the outermost periphery of a region where the main sealant is lined up. A part of the substrate is provided with a vent, and the two substrates are temporarily bonded by holding pressure on upper and lower platens under atmospheric pressure; The step of depressurizing the atmosphere of the substrate to a predetermined vacuum atmosphere, the step of sealing the vent hole to form a closed space by the two substrates and the outer peripheral sealant, and the temporary bonding state. Prescribed in A step of forming a bonded substrate by leaking a vacuum atmosphere to atmospheric pressure and uniformly correcting the non-uniform cell gap at the time of the temporary bonding, and a bonded substrate on which the uniform cell gap is formed. A method of manufacturing a liquid crystal display element, which comprises the step of irradiating with ultraviolet rays to perform the main bonding. 4. A main sealant is applied to the periphery of an image display portion formed in a substantially matrix shape, and a part of the outer peripheral sealant is provided with ventilation holes so as to surround the outermost periphery of the area where the main sealant is lined up. A liquid crystal display device manufacturing apparatus for manufacturing a bonded substrate in which a desired cell gap is formed by bonding one substrate coated by applying An upper and lower stool for pressurizing and holding below to form a closed space between the two substrates, a vacuum chamber in which the upper and lower stools and the two substrates are provided, and the inside of the vacuum chamber By controlling the vacuum degree of
A control mechanism for pressurizing the two substrates to a desired cell gap to form a bonded substrate, a measurement system for measuring the cell gap of the bonded substrate, and one of the ones constituting the bonded substrate. An apparatus for manufacturing a liquid crystal display device, comprising: a coating mechanism that coats a sealing agent on a ventilation hole of a substrate. 5. The upper and lower platens for forming a closed space between the two substrates by temporarily bonding the two substrates in a vacuum atmosphere, and the upper and lower stools are recessed on opposite surfaces, respectively. ， While forming the convex part,
The concave and convex portions are arranged so as to face each other with the substrate interposed therebetween, and at the time of pressurization, the at least one convex surface portion presses a portion other than the image display portion of the substrate. Item 2. A method for manufacturing a liquid crystal display element according to item 1. 6. The upper and lower surface plates for holding the two substrates under pressure in a vacuum atmosphere to form a closed space between the two substrates are concave and convex on opposite surfaces, respectively. Forming a part,
The concave and convex portions are arranged so as to face each other through the substrate, and at the time of pressurization, the at least one convex portion is configured to press a portion other than the image display portion of the substrate. Item 2. A liquid crystal display device manufacturing apparatus according to item 2. 7. The upper and lower surface plates for forming a closed space between the two substrates by temporarily bonding the two substrates under atmospheric pressure, and the upper and lower stools have concave portions on opposite surfaces, respectively. ， While forming the convex part,
The concave and convex portions are arranged so as to face each other with the substrate interposed therebetween, and at the time of pressurization, the at least one convex surface portion presses a portion other than the image display portion of the substrate. Item 4. A method for manufacturing a liquid crystal display element according to item 3. 8. A method for pressurizing and holding the two substrates under atmospheric pressure to form a closed space between the two substrates,
The lower platen has concave and convex parts on the opposite surfaces,
The concave and convex portions are arranged so as to face each other through the substrate, and at the time of pressurization, the at least one convex portion is configured to press a portion other than the image display portion of the substrate. Item 4. An apparatus for manufacturing a liquid crystal display element according to item 4.