JP2002359263A - Copying device and copying state holding method in the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To strongly and highly precisely lock a copying member with respect to a device substrate by moving an actuator to the locking position. SOLUTION: A rod 53 which can assume locking position, where the copying member 20 is pressed to a circular porous material 12 arranged in the device substrate 10 and is locked, so that it cannot be turned and a locking releasing position where locking is released without pressing on the member, is installed. The rod 53 moves between the two positions by a diaphragm cylinder 40.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying apparatus and a method of maintaining a copying state in the copying apparatus.

[0002]

2. Description of the Related Art Conventionally, a copying apparatus has an apparatus base having a concave hemisphere and an oscillating body as a copying member having a convex hemisphere. The concave hemisphere of the device base and the convex hemisphere of the oscillator have the same radius of curvature. The oscillating body is assembled to the device base so that the two hemispheres overlap with each other, and rotates along the concave hemisphere.

In this type of copying apparatus, when an abutment surface of an oscillator is brought into contact with an upper surface of a reference stage, the oscillator rotates along the upper surface of the reference stage, and the abutment surface is in contact with the upper surface of the reference stage. Be parallel. That is, the oscillating body follows the reference stage. Next, suction force by air is generated at the interface between the concave hemispherical surface of the device base and the convex hemispherical surface of the oscillator, and the oscillator is attracted to the device base. By locking the rocking body by this suction, the copying state is maintained. Then, while maintaining the state, the oscillator is temporarily separated from the reference stage. After the work is placed on the reference stage, the oscillating body in the imitated state is brought close to the work on the reference stage, and the work is held down by the oscillating body.

[0004]

However, in the conventional copying apparatus, there is a limit in the holding force for locking the swinging body in a state where the oscillating body is copied by suction by air. Specifically, the upper limit of the air pressure is about -100 kPa. Therefore, there is a possibility that the oscillating body may be displaced by an inertial force or an external force on the movement path after the copying apparatus is separated from the reference stage. In order to increase the lock holding force of the oscillator, it is conceivable to increase the outer dimensions of the oscillator and the base and to increase the areas of the convex hemisphere and the concave hemisphere. However, the size of the entire copying apparatus is increased, and it is difficult to secure the installation space.

The present invention has been made by paying attention to such problems existing in the prior art. The purpose is
An object of the present invention is to provide a copying apparatus capable of locking a copying member in a state where the copying member is copied by a strong lock holding force of an actuator.

[0006]

In order to solve the above-mentioned problems, according to the first aspect of the present invention, a concave member is provided on one of a copying member provided to face each other and an apparatus base supporting the copying member. A hemispherical surface is provided, and a convex hemispherical surface that engages with the concave hemispherical surface is provided on the other side, and the copying member is brought into contact with the object while rotating along the hemisphere, and the abutting surface is formed on the object surface. An actuator that can take a lock position for pressing the copying member against the device base so as to lock the copying member in a non-rotatable manner, and an unlocking position for unlocking without pressing the copying member. And a holding member for pressing the copying member against the apparatus base when the actuator is at the lock position.

According to a second aspect of the present invention, in the copying apparatus according to the first aspect, the actuator is displaceable by receiving a pressure of a fluid, and one end of the holding member is
While being fixed to one of the copying member and the actuator, the other end of the holding member can be separated from the other member when the actuator moves to the unlock position. Make a summary.

According to a third aspect of the present invention, in the copying apparatus according to the first or second aspect, when the actuator is at the lock position, the holding member and the other member are connected to one of them. The gist is that it can be engaged via a provided spherical bearing.

According to a fourth aspect of the present invention, in the copying apparatus according to the third aspect, the center of the spherical bearing exists on a surface including an engagement surface between the spherical bearing and the actuator or the copying member. The point is to do.

According to a fifth aspect of the present invention, the actuator includes a flexible member which is displaced by receiving a pressure of a fluid, and the actuator is moved in accordance with the displacement of the flexible member.

According to the present invention, a concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base supporting the same, and the other is engaged with the concave hemisphere. A copying apparatus that provides a convex hemispherical surface that contacts the target while rotating the copying member along the hemisphere, and copies the contact surface so as to be parallel to a specific surface of the target. In the above, a flexible member that deforms under the pressure of a fluid is drive-connected to the copying member via a connecting member, and the copying member is pressed against the apparatus base as the flexible member is deformed. And lock it so that it cannot rotate.

According to a seventh aspect of the present invention, in the copying apparatus according to the sixth aspect, the flexible member is a bellows that can expand and contract. In the invention according to claim 8, a concave hemisphere is provided on one of the copying member provided to face each other and a device base for supporting the same, and the convex member engaging with the concave hemisphere on the other. A copying apparatus provided with a hemispherical surface, wherein the copying member is rotated along the hemispherical surface to abut on an object, and the abutting surface is parallel to a specific surface of the object. After
In the copying state holding method in which the copying member is locked so as not to rotate, in a state where the copying member is copied to the object, the copying member is pressed against the apparatus base with a predetermined pressing force to temporarily lock the copying member. After that, the gist is that the copying member is fully locked with a pressing force stronger than the pressing force at the time of the temporary locking.

According to a ninth aspect of the present invention, in the copying state maintaining method for the copying apparatus according to the seventh aspect, a static pressure due to fluid pressure is generated at an interface between the apparatus base and the copying member, thereby providing an object. Copy the copying member to the object,
The gist is that the static pressure is gradually reduced when the copying member is temporarily locked.

The "action" of the present invention will be described below. According to the first aspect of the present invention, when the actuator moves to the unlock position, the copying member can rotate with respect to the apparatus base. Then, when the copying member abuts on the object, the abutment surface of the copying member follows the specific surface of the object so as to be parallel. In this state, when the actuator is moved to the lock position, the copying member is pressed against the apparatus base by the holding member, and the copying member is locked so as not to rotate. As a result, the copying member is strongly locked with its contact surface being parallel to the specific surface of the object.

According to the second aspect of the present invention, when the actuator moves from the lock position to the unlock position,
One end of the holding member is separated from the other member. That is, since the other end of the holding member is not in contact with the other member, the copying member rotates smoothly. As a result, the copying accuracy of the copying member is improved.

According to the third aspect of the invention, when the copying member follows the object, even if the center line of the holding member and the center line of the other member are shifted, the center line is shifted. The spherical bearing strikes the actuator or the other member in an inclined state. Therefore, there is no contact of the spherical bearing with the other member, and the copying member can be locked in a stable state.

According to the fourth aspect of the invention, the center of the spherical bearing exists on a surface including an engagement surface between the spherical bearing and the actuator or the copying member. For this reason, the one-side contact of the spherical bearing is reliably prevented, and the copying member can be held in a stable state.

According to the fifth aspect of the invention, when the flexible member is deformed by the pressure of the fluid, the deformation causes the actuator to move between the locked position and the unlocked position. Therefore, as compared with the case where the actuator is a rigid piston or the like, since the thickness is thin, the size of the actuator can be reduced. In addition, since the flexible member has no sliding portion with respect to the cylinder tube, the operation sound is quiet.

According to the sixth aspect of the invention, when the flexible member is deformed by the pressure of the fluid, the copying member is pressed against the apparatus base. As a result, the copying member is locked so as not to rotate. In this locking, even if the center line of the connecting member is displaced from the center line of the copying member, the flexible member is deformed by the deviation of the center line, thereby locking the copying member in a stable state. It is possible to do.

According to the present invention, the flexible member is a bellows, and the copying member is locked or unlocked by the expansion and contraction operation. For example, compared to the case where the flexible member is a non-flexible piston or the like, there is almost no leakage of the fluid supplied into the bellows and there is no sliding portion, so that the operation sound is quiet.

According to the invention described in claim 8, when the copying member abuts on the object, the abutment surface follows the specified surface of the object so as to be parallel to the specific surface. In this copying state, the copying member is pressed against the apparatus base with a weak pressing force, and the copying member is temporarily locked so that it cannot be rotated. Thereafter, the copying member is fully locked with a pressing force stronger than the pressing force at the time of the temporary locking. By adopting such a method, the copying member is not suddenly locked, so that the copying member in the copying state can be reliably locked without being displaced. As a result, highly accurate copying can be realized.

According to the ninth aspect of the present invention, the frictional force of the copying member with respect to the apparatus base is extremely low due to the static pressure at the interface between the apparatus base and the copying member. Imitate against. Thereafter, when the copying member is temporarily locked, if the static pressure is gradually reduced, the copying member slowly approaches the apparatus base. Therefore, the copying member is provisionally locked with almost no displacement.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. The vertical direction of the copying apparatus F is defined as a Z-axis direction, and directions orthogonal to the Z-axis direction and orthogonal to each other on the same horizontal plane are defined as an X-axis direction and a Y-axis direction.

As shown in FIGS. 1 to 3, the copying apparatus F includes:
An apparatus base 10 is provided. The device base 10 includes a fixed block 11 and a concave hemisphere 12 provided on the lower surface thereof.
and an annular porous material 12 having a. The copying apparatus F can be reciprocated along the Z-axis direction by a transport mechanism (not shown).

As a material for forming the annular porous material 12, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, and the like, sintered carbon, sintered ceramics, and the like can be used.

An annular air supply / discharge groove 14 opened on the back surface of the annular porous material 12 is provided on the lower surface of the fixed block 11.
Are formed. The air supply / discharge groove 14 is provided in the air passage 1.
The air supply / discharge port B (see FIG. 1) provided on the fixed block 11 is communicated with the control block 5 through the air supply port 5. When pressurized air as a pressurized fluid is supplied to the air supply / discharge port B from a pressure supply source (not shown), the pressurized air is ejected from the entire concave semispherical surface 12 a of the annular porous material 12 through the air supply / discharge groove 14. You.
Conversely, when the air is sucked from the air supply / discharge port B, the air is sucked from the entire concave semi-spherical surface 12a of the annular porous material 12.

The air jetted from the concave hemispherical surface 12a of the annular porous material 12 is discharged from the outer peripheral edge and the center of the annular porous material 12. In particular, the air discharged from the central portion of the annular porous material 12 is not easily discharged to the outside of the fixed block 11. For smooth air discharge,
The fixed block 11 has an exhaust port E communicating therewith.
Are provided via an air exhaust passage 16. Therefore,
Air discharged from the central portion of the annular porous material 12 is discharged to the outside from an exhaust port E provided in the fixed block 11 through an air exhaust passage 16.

In the annular porous material 12, the concave hemisphere 12
a is located at the outer peripheral edge of the annular air suction groove 17.
Are formed. The air suction groove 17 is provided in the air suction passage 1.
It communicates with the evacuation port V (see FIG. 1) provided in the fixed block 11 via 7a. When air is sucked from the vacuum port V by a suction pump (not shown), the air is sucked from the opening of the air suction groove 17.

A metal rocking body 20 is provided on the device base 10 at a position facing the concave hemispherical surface 12a of the annular porous material 12. A convex hemisphere 20a is formed on the upper surface of the oscillating body 20, and the radius of curvature of the convex hemisphere 20a is the same as the radius of curvature of the concave hemisphere 12a. Therefore, the convex hemisphere 20a of the oscillator 20 is engaged so as to overlap the concave hemisphere 12a of the annular porous material 12, and the oscillator 20 rotates along the concave hemisphere 12a.

A tool 21 for projecting on the upper surface (specific surface) of the reference stage S, which is an object, is protruded from the lower surface of the central portion of the oscillating body 20. In the present embodiment, the oscillator 2
0 and the tool 21 constitute a copying member.

The symbol r shown in FIG. 3 indicates the radius of curvature of the convex hemispherical surface 20a and the concave hemispherical surface 12a, and the center of curvature is at the tip end surface 21a of the tool 21. In the present embodiment, the rotation center C of the oscillating body 20 exists on the tip end surface (contact surface) 21 a of the tool 21. Incidentally, the maximum angle (maximum scanning angle) θ at which the oscillator 20 swings around the X axis or the Y axis is ± 0 when the normal state of balance shown in FIGS. 5A and 5B is 0 °. .5 設定. Here, the balanced state refers to a rod 53 as a holding member.
This means that the center line L1 of the oscillator 20 coincides with the center line L2 of the (or annular porous material 12). Therefore,
The center line L2 of the rocking body 20 with respect to the center line L2 of the rod 53
The angle θ at which 1 is shifted is the scanning angle.

At the center of the fixed block 11, a screw 24
A holder 23 is attached to the lower end of the holder 23, and a magnet 22 as a means for preventing the swinging body 20 from falling is attached to the holder 23. The magnet 22 plays a role in preventing the metal oscillator 20 from being slightly displaced by its magnetic force. Therefore, even if the oscillating body 20 operates by receiving an extremely small load, it is possible to surely hold the oscillating body 20 in the imitated state.

As shown in FIG. 3, a diaphragm cylinder 40 is provided above the fixed block 11.
The diaphragm cylinder 40 includes a cylinder tube 41 having an open lower surface, and the cylinder tube 41 is attached to the upper surface of the fixed block 11 so as to close the lower opening. In the internal space of the cylinder tube 41, a diaphragm 43 as a flexible member sandwiched between the fixed block 11 and the cylinder tube 41 is accommodated. The diaphragm 43 is
It is formed in a circular shape, is made of rubber, and has flexibility. The material for forming the diaphragm 43 can be changed to a synthetic resin or a metal such as stainless steel.

Due to the presence of the diaphragm 43, the internal space of the cylinder tube 41 is divided into two pressure action chambers 44 and 45.
Is divided into Air is supplied to and discharged from the upper pressure action chamber 44 via an upper air supply / discharge port N shown in FIG. On the other hand, air is supplied to and discharged from the lower pressure action chamber 45 through a lower air supply / discharge port R shown in FIG.

A stopper 50 is provided on the upper surface of the central portion of the diaphragm 43 to prevent the diaphragm 43 from being deformed more than necessary. A rod mounting protrusion 50a protruding from the lower surface of the stopper 50 is penetrated by the diaphragm 43, and a washer 49 is fitted into the rod mounting protrusion 50a. Thus, the stopper 50 and the washer 49 are fixed to the center of the diaphragm 43. In the present embodiment, an actuator is constituted by the diaphragm 43, the washer 49, and the stopper 50.

The upper end (base end) of the rod 53 is screwed and attached to the rod attachment projection 50a formed on the stopper 50. That is, the upper end of the rod 53 is connected to the diaphragm 43 via the stopper 50 and the washer 49.
It is fixed to. And each pressure action chamber 4
4 and 45 by the pressure of the air supplied to the diaphragm 4.
The rod 53 moves along the Z-axis direction with the deformation of the rod 3. Specifically, as shown in FIG. 4, when air is supplied to the upper pressure action chamber 44, the diaphragm 43 is bent downward, and the rod 53 moves down to the unlock position shown in FIG. I do. On the other hand, when air is supplied to the lower pressure action chamber 45, the diaphragm 43 is bent upward, and the rod 53 moves up to the lock position shown in FIG. Incidentally, the stroke of the rod 53 is set to about 1 mm.

On the outer periphery of the upper end of the rod 53, a compression spring 51 as an elastic force applying member is provided in a spring accommodating recess 23a formed in the holder 23. A plurality of compression springs 51 are provided, and they are arranged at equal intervals on the same circumference. The upper end of the compression spring 51 is in contact with the lower surface of the washer 49, and the rod 53 is constantly pressed upward by the elastic force of the compression spring 51.

The rod 53 is slidably supported by the holder 23 via a bearing 54. Rod 53
Of the holder 23 protrudes from the lower end surface of the holder 23, and a through-hole 56 formed in the center of the oscillator 20.
Has been inserted into the play. The diameter of the through hole 56 increases stepwise (three steps) from the upper end toward the lower end.

The lower end of the rod 53 is provided with a spherical bearing 570 that moves freely in three-dimensional directions. The spherical bearing 570 includes a ball 55 fixed to the lower end of the rod 53 and having a hemispherical outer peripheral surface, a swing ring 57 slidable along the outer peripheral surface of the ball 55, and a swing ring 57. And an engagement block 58 provided integrally with the main body. Due to the role of the spherical bearing 570, the engagement block 58 is shifted 360 degrees from the center of the ball 55.
It can be tilted in the direction of ゜. Then, the spherical bearing 570 moves integrally with the vertical movement of the rod 53.

At the lower part of the outer peripheral surface of the engagement block 58, an annular projecting portion 58a is projected. And rod 5
As a result, the upper surface of the outer peripheral edge of the overhang portion 58a is pressed against a counterbore surface 56a formed on the inner periphery of the through hole 56 in the oscillator 20. When the upper surface of the outer peripheral edge of the overhang portion 58a is pressed against the counterbore surface 56a, the rocking body 20 is pressed against the concave hemispherical surface 12a of the annular porous material 12, and is locked so as not to rotate. On the other hand, when the rod 53 descends, the engagement surface 58b of the engagement block 58 separates from the counterbore surface 56a. Therefore, when the upper surface of the outer peripheral edge of the overhang portion 58a is separated from the counterbore surface 56a, the rocking body 20 is unlocked.

As described above, in this embodiment, the upper surface of the outer peripheral edge of the overhang portion 58a is
b. Therefore, in the following description, the upper surface of the outer peripheral edge of the protruding portion 58a of the engagement block 58 is simply referred to as the engagement surface 58b. The engagement surface 58b of the engagement block 58
The engagement block 58 exists on a plane including the tilt center.

Next, the copying apparatus F configured as described above
Fig. 6 shows the operation of pressing the workpiece W against the reference stage S by using
The description will be made based on the explanatory diagrams shown in (a) to (d) and the time chart shown in FIG.

As shown in FIG. 6A, before starting the copying, the copying apparatus F is arranged above the reference stage S, and the upper surface of the reference stage S and the tip end surface 21 of the tool 21 are arranged.
a is not contacted. In this state, the rod 5
Numeral 3 is arranged at the lock position by the elastic force of the compression spring 51, and the rocking body 20 is supported by the projecting portion 58 a of the engagement block 58. When the copying apparatus F approaches the reference stage S, pressurized air is supplied to the air supply / discharge port B at a timing T1, and the annular porous material 12
From the entire concave hemisphere 12a of the convex hemisphere 2 of the oscillator 20.
Pressurized air is jetted toward 0a. As a result, a static pressure is generated at the interface between the oscillator 20 and the annular porous material 12, and the oscillator 20 is slightly separated from the annular porous material 12. Incidentally, the distance between the annular porous material 12 and the oscillator 20 is only a few μm.

When the pressurized air is supplied to the upper air supply / discharge port N at the timing T1, the pressurized air is supplied into the upper pressure action chamber 44 of the diaphragm cylinder 40. Then, the diaphragm 43 is bent downward, and the rod 53 moves to the unlock position shown in FIG. At this time, the oscillator 20 is in a non-contact state due to the balance between the magnetic force and the static pressure.

As shown in FIG. 6B, when the copying apparatus F approaches the reference stage S, the tip surface 21a of the tool 21
Abuts on the upper surface of the reference stage S. Then, at timing T2, a predetermined load (f1) is applied to the copying apparatus F, and the top surface 21 of the tool 21 is placed on the upper surface of the reference stage S.
a is pressed. This pressing force is such that the static pressure generated between the annular porous material 12 and the oscillator 20 does not disappear. Therefore, at the timing T2, the convex hemisphere 20a of the oscillator 20 and the concave hemisphere 12a of the annular porous material 12 are formed.
a is maintained in a non-contact state.

Therefore, the oscillating body 20 rotates in accordance with the inclination of the upper surface of the reference stage S. This allows the tool 21
Of the reference stage S is parallel to the upper surface of the reference stage S. Specifically, if the upper surface of the reference stage S is inclined along the Y-axis direction, the oscillator 20 turns around the X-axis and follows. On the other hand, if the reference stage S is inclined along the X-axis direction, the oscillator 20
Rotate around the axis to imitate. The inclination angles of the upper surface of the reference stage S shown in FIGS. 6A to 6D are exaggerated for easy understanding.

After the copying is completed, at timing T3, the pressure of the pressurized air supplied to the air supply / discharge port B is gradually reduced to finally zero. The time to complete the decompression is several seconds. Then, when the supply of the pressurized air is stopped at the timing T4, the pressurized air is no longer ejected from the surface of the annular porous material 12, and the concave hemisphere 12a of the annular porous material 12 The hemisphere 20a comes into contact. The reason for gradually reducing the pressure of the pressurized air supplied to the air supply / discharge port B is as follows.
This is because if the static pressure between the two suddenly disappears, the oscillator 20 may suddenly approach the annular porous material 12 and become displaced.

Thereafter, at a timing T5, air is sucked from the air supply / discharge port B and also air is sucked from the vacuuming port V. Then, a suction force by air acts on the surface of the concave semi-spherical surface 12a of the annular porous material 12. That is, a force acts to pull the oscillator 20 toward the annular porous material 12. Thereby, the rod 53 is moved to the lock position shown in FIG. 4, and the rocking body 20 cannot rotate with respect to the apparatus base 10 and is temporarily locked. Therefore, the tool 21 is temporarily held in a state following the upper surface of the reference stage S by the frictional force generated between the oscillator 20 and the annular porous material 12. Incidentally, at this time, the force of adsorbing the oscillating body 20 to the annular porous material 12 by the air pressure is equal to 0.1.
08 N / mm ² (8 N / cm ² ).

When the tentative locking of the oscillating body 20 is completed, at timing T6, the pressure of the pressurized air supplied to the upper air supply / discharge port N is gradually reduced to zero finally. The time to complete the decompression is several seconds. Then, the overhang portion 58a of the engagement block 58 comes into contact with the counterbore surface 56a of the through hole 56 formed in the rocking body 20. The reason for gradually reducing the pressure of the pressurized air supplied to the air supply / discharge port N is that if the pressure of the pressurized air is rapidly reduced, the engagement block 58 vigorously hits the rocking body 20. Is likely to be displaced.

When the pressurized air is supplied to the lower air supply / discharge port R at the timing T6, the diaphragm 4
As the rod 3 is bent upward, a force for pressing the rod 53 already at the locked position upward by air pressure is further applied. Thus, the engagement block 58 already in contact with the oscillator 20 is pressed against the oscillator 20 and is fully locked. As a result, the rocking body 20 is
Is strongly locked. Incidentally, the force with which the rocking body 20 is pressed against the annular porous material 12 by the engagement block 58 pressing the rocking body 20 is 0.24 N / mm ^2.
(24 N / cm ² ).

Therefore, due to the frictional resistance generated between the oscillating body 20 and the annular porous material 12, the oscillating body 20 is fully locked in a state following the upper surface of the reference stage S without displacement.

At a timing T7, the oscillating body 20 is kept in the imitated state, and the copying apparatus F is raised. Then, the copying apparatus F is put on standby at a position where the tip end surface 21a of the tool 21 is separated from the upper surface of the reference stage S. continue,
As shown in FIG. 6C, the work W is placed on the reference stage S. Thereafter, as shown in FIG. 6D, the copying apparatus F is lowered again, and the tip end surface 21a of the tool 21 is pressed against the upper surface of the workpiece W with a predetermined load (f2). When pressing, the tool 21 is strongly pressed downward, and the rocking body 20 is pressed.
The oscillating body 20 does not deviate even if an external force is applied intensively. This is because the rocking body 20 is strongly locked. Tip surface 21a of tool 21 and reference stage S
Are parallel to each other, so that a pressing force can be evenly applied to the entire work W. Therefore, if, for example, a flexible printed circuit board (FPC) is used as the work W, the copying apparatus F is used for bonding them. Of course, the present invention can be applied to other fields other than the bonding of the flexible printed circuit board.

In the process after timing T7, the power supply of the copying apparatus F is suddenly shut off for some reason while the oscillator 20 is locked, and the air supply / discharge port B
Suppose that the suction of air to the evacuation port V or the pressurization of air to the lower air supply / discharge port R is stopped.
In this case, the magnetic force of the magnet 22 and the compression spring 51
It is possible to lock the rocking body 20 in a state where the rocking body 20 is imitated by the elastic force.

When the workpiece 21 is pressed by the tool 21 and the external force f shown in FIG. 8A is applied to the rocking body 20 while the rocking body 20 is fully locked, the rocking body 20 becomes convex hemispherical surface 20a. , The position of the oscillator 20 is likely to shift. Here, the holding force that holds the rocking body 20 so that the rocking body 20 does not shift means that the position of the rocking body 20 does not shift due to the external force f, that is, the maximum value of the external force f (maximum external force f). An eccentric distance a between the holding force (= maximum external force f) and the external force f acting from the rotation center C of the oscillator 20
Can be represented by a holding force curve as shown in FIG. The lower side of the holding force curve of the oscillating body 20 as a boundary is a region where the oscillating body 20 is not displaced (hatched portion), and the upper side is an area where the oscillating body 20 is displaced (portion other than the hatched portion). That is, at the position where the eccentric distance a is equal to or less than “a1” shown in FIG. 8B, it can be said that the holding force of the oscillator 20 can be reliably secured without being affected by the external force f. Further, that the oscillator 20 does not deviate means that the displacement fluctuation in the Z-axis direction at the point A before and after the load f shown in FIG. 8A is 0.02 μm or less.

The frictional force F generated at the interface between the convex hemispherical surface 20a of the oscillator 20 and the concave hemispherical surface 12a of the annular porous material 12.
Is F = μf cos (sin ⁻¹ a / r). This friction force F
And the external force f satisfy the relationship shown in Expression (2) derived from the following Expression (1), the oscillating body 20 does not shift in the scanning direction (around the X axis and around the Y axis).

Af <rF (1) f <(a / r) · F (2) At the time of temporary locking, the frictional force generated between the oscillator 20 and the annular porous material 12 is represented by F1. N is the force with which the oscillator 20 is pressed against the annular porous material 12 by the external force f, and N1 is the force with which the oscillator 20 is vacuum-adsorbed to the annular porous material 12.
The friction coefficient between the oscillator 20 and the annular porous material 12 is represented by μ. These relationships are expressed by the following equation (3).

F1 = μ (N + N1) (3) Accordingly, since the frictional force F1 is larger than the frictional force F shown in the equation (1), the holding force f1 of the oscillator 20 is also increased.

In this lock, the frictional force generated between the oscillator 20 and the annular porous member 12 is F2, and the force with which the oscillator 20 is pressed against the annular porous member 12 by the diaphragm cylinder 40 is N2. I do. These relationships are expressed by the following equation (4).

F2 = μ (N + N1 + N2) (4) Accordingly, the frictional force F2 is calculated by the frictional force F1 shown in the above equation (2).
Therefore, the holding force f2 of the oscillating body 20 also increases. As a result, as shown in FIG. 8B, the holding force f2 at the time of the main lock is larger than the holding force f1 at the time of the temporary lock. Note that, as the holding force increases, the holding force that restricts the swinging body 20 from rotating around the Z axis also increases.

Therefore, the present embodiment has the following features. (1) By moving the rod 53 to the lock position by the diaphragm cylinder 40, the rocking body 20 can be strongly locked to the annular porous material 12 provided on the apparatus base 10. For this reason, after the rocking body 20 is made to follow the upper surface of the reference stage S, it is possible to reliably prevent the rocking body 20 from being displaced.

(2) It is not necessary to increase the area of the annular porous material 12 to increase the lock holding force of the oscillator 20.
As a result, the copying apparatus F can be prevented from increasing in size in the horizontal direction, and the copying apparatus F can be arranged even in a place where the installation area is small.

(3) When the rod 53 is located at the lock release position, that is, when copying is performed, the engagement block 58 is separated from the rocking body 20. for that reason,
The rocking body 20 can be smoothly rotated, and the copying accuracy can be improved.

(4) Since the engaging block 58 is tiltably attached to the rod 53, the engaging surface 58b can always be made parallel in accordance with the inclination of the counterbore surface 56a. Therefore, when the oscillator 20 follows the reference stage S, the center line L1 of the oscillator 20 and the center line L2 of the rod 53
The engagement block 58 has the center line L
1 and L2 are tilted by an amount corresponding to the deviation and hit the rocking body 20 in parallel. Therefore, the engagement block 5 with respect to the rocking body 20
8, the rocking body 20 can be locked in a stable state.

(5) Since the engagement block 58 can be tilted, the surfaces 56a and 58b where the rocking body 20 and the engagement block 58 contact each other can be made flat. This has an advantage that the copying apparatus F can be easily manufactured, for example, as compared with a case where the two surfaces 56a and 58b are not tiltable but are formed in a hemispherical shape so as to overlap each other, and further suppress an increase in manufacturing cost. Can be.

(6) At the time of the main lock, the spherical bearing 570 is lifted, and the engagement surface 58 of the engagement block 58 is lifted.
b comes into contact with the counterbore surface 56a of the rocking body 20, and the scanning angle θ
When tilted only, the engagement block 58 slips. Due to the frictional force generated at the time of the sliding, the larger the displacement amount of the engagement block 58 is, the more the oscillator 20 is displaced in the following direction. That is, when the leading end surface 21a of the tool 21 following the reference stage S is fully locked, the position is shifted.

In this embodiment, the center of tilt of the engagement block 58 is located on the same plane as the engagement surface 58b.
As shown in FIG. 9, even if the oscillating body 20 and the engaging block are tilted in a state where the engagement block 58 is tilted at the scanning angle θ, the displacement x1 with respect to the center of the oscillating body 20 is
Almost nothing. Therefore, for the above-described reason, in the present embodiment shown in FIG. 9, the tip surface 21 a of the tool 21 can be parallelized to the reference stage S with high accuracy, and the oscillator 20 can be held with higher accuracy. it can.

On the other hand, when the tilting center of the engagement block 58 is not on the same plane as the engagement surface 58b, the following is performed. That is, as shown in FIG. 10, if the engagement block 58 is tilted at the scanning angle θ, the displacement x2 with respect to the center of the oscillator 20 becomes the displacement x1.
Much larger than. The larger the amount of displacement, the more easily the oscillator 20 is displaced when the engagement block 58 is lifted by the diaphragm cylinder 40. Therefore, in the comparative example shown in FIG. 10, the rocking body 20 cannot be held with high accuracy, and the parallelism of the tip end surface 21 a of the tool 21 with respect to the reference stage S is out of order.

(7) For example, assuming a structure without the spherical bearing 570, that is, a structure in which the rod 53 and the engaging block 58 are simply connected, or even if the spherical bearing 570 is present, the engaging block 58 Engagement surface 58
If the engagement block 58 does not slide when b is tilted by the scanning angle θ, the engagement surface 58b is in a state of one-sided contact with the counterbore surface 56a. That is, an eccentric load is applied to the apparatus base 10 and a compressive strain (extremely small elastic deformation) is generated, so that the tip surface 21a of the tool 21 is not parallel to the reference stage S. In this embodiment,
Since the spherical bearing 570 exists at a position where an eccentric load is applied, the engaging surface 58b does not come into a state of one-sided contact with the counterbore surface 56a. That is, since the eccentric load is not applied to the device base 10 to cause the compressive strain, the tip surface 21a of the tool 21 can be parallelized to the reference stage S with high accuracy. Incidentally, if the diameter φ of the tip end surface 21a of the tool 21 is 100 mm, the deviation of the parallelism can be made 0.3 μm or less.

(8) By deforming the diaphragm 43 accommodated in the cylinder tube 41, the rod 53 is moved to the lock position or the lock release position. Since the diaphragm 43 is thin, the diaphragm cylinder 40 has a feature that its dimension in the Z-axis direction can be shortened. Therefore, compared with the case where an air cylinder provided with a piston is used, the Z of the copying apparatus F
The axial dimension can be reduced.

(9) Since the diaphragm 43 has no portion that slides on the inner peripheral surface of the cylinder tube 41, the operating noise can be reduced. Further, since the diaphragm 43 has no sliding resistance, it is not necessary to use a lubricant for reducing the sliding resistance. Therefore, the copying apparatus F can be used in an environment with high hygiene management.

(10) The diaphragm 43 provided on the diaphragm cylinder 40 is made of rubber and has flexibility. The outer peripheral edge of the diaphragm 43 is held between the fixed block 11 and the cylinder tube 41. Therefore, air does not leak from between the fixed block 11 and the cylinder tube 41. Therefore, the response of the rod 53 can be improved. At the same time, the rocking body 20 can be unlocked instantaneously. Further, the rod 53 can be moved to the lock position with a slight pressure, and the impact when the movement to the lock position is completed can be reduced.

(11) The holder 23 is provided with a plurality of compression springs 51, and the ends of the compression springs 51 are in contact with the washers 49 for gripping the diaphragm 43. Therefore, when the oscillating body 20 is pressed against the annular porous material 12, the oscillating body 20 oscillates on the apparatus base 10 not only by the pressure of the air supplied into the lower pressure action chamber 45 of the cylinder tube 41 but also by the elastic force of the compression spring 51. The moving body 20 is pressed. Therefore, the rocking body 20 can be locked with a stronger force.

(12) The convex hemispherical surface 20a of the oscillating body 20 is attracted to the concave hemispherical surface 12a of the annular porous material 12 by the suction force of air, and the oscillating body 20 is temporarily locked. afterwards,
The rod 53 is moved to the lock position by the diaphragm cylinder 40, and the convex hemisphere 20a of the oscillator 20 is strongly pressed against the concave hemisphere 12a of the annular porous material 12, and the oscillator 20 is fully locked. Therefore, after the rocking body 20 is temporarily locked with a weak pressing force at first, the rocking body 20 is fully locked with a strong pressing force. Thereby, the oscillator 20
And there is almost no displacement, and extremely high copying accuracy can be secured.

(13) After the copying of the tool 21 is completed, the pressure of the pressurized air supplied to the air supply / discharge port B is gradually reduced. Therefore, the static pressure between the annular porous member 12 and the oscillator 20 gradually decreases, and the oscillator 20 does not suddenly come into contact with the annular porous member 12. As a result, it is possible to reliably prevent the rocking body 20 from being displaced during the temporary lock.

(13) The pressurized air supplied to the upper air supply / discharge port N is gradually reduced after the oscillating body 20 is temporarily locked. Therefore, the engagement block 58 softly hits the rocking body 20, so that the impact on the rocking body 20 can be reduced. Therefore, it is possible to reliably prevent the rocking body 20 from being displaced.

(Second Embodiment) Next, a second embodiment of the present invention will be described focusing on parts different from the first embodiment.

As shown in FIG. 11, the copying apparatus F of this embodiment has basically the same configuration as that of the first embodiment.
A different configuration is that an air cylinder 65 is used. That is, in the cylinder tube 41 of the air cylinder 65, a piston 66 is provided as an actuator that partitions the internal space into two pressure action chambers 44 and 45.

An annular packing 68 is mounted in a packing mounting groove 67 formed on the outer peripheral surface of the piston 66. The packing 68 allows the piston 66
Between the outer peripheral surface of the cylinder tube 41 and the inner peripheral surface of the cylinder tube 41. Then, air is supplied into the upper pressure action chamber 44 from the upper air supply / discharge port N,
The rod 53 moves to the unlock position. On the other hand, when air is supplied from the lower air supply / discharge port R into the lower pressure action chamber 45, the rod 53 moves to the lock position. The vertical stroke of the rod 53 is the same as in the first embodiment. Therefore, in the second embodiment, substantially the same effects as in the first embodiment can be exerted.

(Third Embodiment) As shown in FIGS. 12 and 13, the cylinder tube 41 described in the above embodiment is integrated with the fixed block 11. Therefore, in the present embodiment, the fixed block 11 serves as a cylinder tube. Of the ports B, N, R, V, and E formed in the fixed block 11, only the air supply / discharge port B is provided on the surface opposite to the surface on which the other ports N, R, V, and E are provided. Are located.

A lid 70 is attached and fixed to the upper opening of the fixed block 11 by a C-ring 71 so as to close it. The piston 66 is reciprocally accommodated in a piston accommodating space formed inside the device base 10. The compression springs 51 are respectively housed in the plurality of spring housing recesses 72 formed on the upper end surface of the piston 66. The upper end of the compression spring 51 is in contact with the inner end surface of the lid 70, and the piston 66 is pressed in a direction away from the engagement block 58 by the elastic force of the compression spring 51. A wear ring 75 that is in sliding contact with the inner peripheral surface of the fixed block 11 is provided on the outer peripheral surface of the piston 66.

A fitting projection 23b is formed at the center of the upper surface of the holder 23 holding the magnet 22, and the fitting projection 23b is formed in the through hole 7 formed at the center of the piston 66.
3 is fitted through a packing 74. The fitting projection 23b formed on the holder 23 by the packing 74
Is prevented from leaking from between the outer peripheral surface of the piston 66 and the inner peripheral surface of the through hole 73 formed in the piston 66.

The rod 5 loosely inserted into the center of the holder 23
Upper and lower end portions 3 are projected outside the holder 23, respectively. The lower end of the rod 53, which is the lower protruding part, is fastened and fixed to the oscillator 20 by a nut 76. On the other hand, the rod 53,
Is located in the through hole 73 of the piston 66. A spherical bearing 57 is provided on the upper end of the rod 53.
0 is provided.

Then, as shown in FIG.
When 6 moves to the lower stroke end, the rod 53 moves to the unlocked position. Then, the engagement block 58
Is separated from the counterbore surface 73a of the through hole 73, and the rocking body 20 is unlocked.

On the other hand, as shown in FIG. 13, when the piston 66 moves to the upper stroke end, the rod 53 moves to the lock position. By this movement, the overhang portion 58a formed on the peripheral edge of the engagement block 58 is pressed against a counterbore surface 73a formed on the inner periphery of the through hole 73 of the piston 66. When the outer peripheral edge lower surface of the overhang portion 58a is pressed against the counterbore surface 73a, the rocking body 20 is pressed against the surface of the annular porous material 12, and is permanently locked so as not to rotate. Therefore, the copying apparatus F according to the present embodiment also has the same effect as the above embodiment.

As shown in FIG. 14, when the rocking body 20 is fully locked, the force given to the rod 53 by the fluid pressure from the piston 66 is W1. Here, the oscillator 20
Is temporarily locked by vacuum suction by the annular porous material 12 in a state of being inclined by the scanning angle θ. In this state, the above-described force W1 is applied at the position of the eccentric distance a2 by the movement of the piston 66. At this time, the eccentric distance a2 is equal to the eccentric distance a which is not affected by the external force f when pressing the work W.
It is set to be smaller than 1. for that reason,
The displacement of the rocking body 20 is prevented.

Further, the frictional force F2 at the time of the main lock is larger than the frictional force F1 of the rocking body 20 at the time of the temporary lock. From this, as shown in FIG.
For the lock holding force of 0, the allowable external force f at the time of final locking is larger than the allowable external force f1 at the time of temporary locking at the eccentric distance a3.
2 can be made larger. At the same time, the lock holding force of the rocking body 20 around the Z axis also increases.

(Fourth Embodiment) As shown in FIGS. 16 and 17, a bellows storage chamber 81 whose upper opening is closed by a lid 80 is formed in the fixed block 11.
The bellows accommodating chamber 81 is provided with a bellows 82 as a flexible member (extendable member) that can be extended and contracted.
The lower end is fixed to the bottom surface of the bellows storage chamber 81. The bellows 82 is formed in a bellows shape by metal, and can be flexibly bent as a whole.

The rod 53 whose lower end is fixed to the top of the rocking body 20 is inserted into an insertion hole 83 formed in the fixed block 11.
Through the bellows 82. The upper end of the rod 53 is fixed to the upper end of the bellows 82 via a connecting block 84. The upper end opening of the bellows 82 is closed by a connection block 84. The air supplied to the air pressurizing port P formed on the surface of the fixed block 11 opposite to the air supply / discharge port B is supplied into the bellows 82 via the air passage 85. In the present embodiment, a connecting member is configured by the connecting rod 531 and the connecting block 84.

In the copying apparatus F of this embodiment, the tool 21
When the air supply / discharge port B
Air is supplied only from the annular porous material 12 and the oscillator 20.
And a static pressure is generated. At the same time, air is sucked from the evacuation port V, and the oscillator 20 is
Attract to two sides. The balance between the attractive force and the static pressure allows the rocking body 20 to rotate in a non-contact state. Then, the tool 21 is placed on the upper surface of the reference stage S.
The front end surface 21a of this is brought into contact with and imitated. Thereafter, when only the air supplied to the air supply / discharge port B is stopped, the suction force of the air sucked from the evacuation port V causes
The oscillating body 20 is adsorbed to the annular porous material 12 and temporarily locked. Thereafter, when air is supplied to the air pressurizing port P, the bellows 82 expands, and the oscillator 2 is connected via the connecting rod 531.
0 is pressed against the annular porous material 12 and is permanently locked.

Therefore, in the present embodiment, substantially the same effects as in the first embodiment can be exerted. In particular, the bellows 8 is used to lock and hold the oscillator 20.
2 is used. For this reason, unlike the above-described first to third embodiments, it is not necessary to provide the spherical bearing 570 at the end of the connecting rod 531, so that the structure can be simplified. As a result, the number of assembling steps and the number of parts can be reduced, so that cost reduction can be achieved. Further, the bellows 82 serves as a detent for preventing the rocking body 20 from rotating around the Z axis in the copying state.

(Fifth Embodiment) As shown in FIG. 18, the copying apparatus F of the present embodiment has basically the same configuration as that of the fourth embodiment. As a different configuration, the bellows 82 as a flexible member (deformable member) is used instead of the bellows 82.
8 is used. That is, in the bellow flam accommodating space 89 formed in the fixed block 11,
A bellows flam 88 is provided for partitioning the chamber into two pressure action chambers 44 and 45. A connection block 84 is fixed to the center of the bellows flam 88. The bellows flam 88 around the connection block 84 is formed with a curved portion 88a that is bent toward the upper surface side. Curved part 8
8a is formed annularly around the center line L2 of the connecting rod 531. Due to the presence of the curved portion 88a, the entire bellows flam 88 is flexibly deformed as the connecting rod 531 tilts. From this, the connecting rod 53
The swinging body 20 can be rotated without giving a large resistance to the swinging member 1.

In the copying apparatus F according to the present embodiment,
After the tool 21 is made to follow the reference stage S, the oscillating body 20 is temporarily locked in the same manner as in the fourth embodiment. Thereafter, when air is supplied to the air pressurizing port P, the bellows flam 8
8 is bent upward, and the rocking body 20 is pressed against the annular porous material 12 via the connecting rod 531 to be fully locked.

The embodiment of the present invention may be modified as follows. In the above embodiment, the oscillating body 20 has a convex hemispherical surface 20a.
Are formed, and a concave hemispherical surface 12 a is formed in the annular porous material 12. Alternatively, the relationship between the convex hemisphere 20a and the concave hemisphere 12a may be reversed. That is, a concave hemisphere may be formed on the oscillator 20 and a convex hemisphere may be formed on the annular porous material 12.

In the above-described embodiment, the provisional locking of the oscillating body 20 and the main locking are separated, but the locking is not necessary. That is, when the rocking body 20 is locked, the pressing force against the annular porous material 12 may be gradually increased over time to the same pressing force as the main locking.

In the above embodiment, the diaphragm cylinder 40, the air cylinder 65 and the like are used as actuators to lock the rotation of the rocking body 20. In addition, a hydraulic cylinder or an electric actuator such as an electric motor or a solenoid may be used.

In the first, second and third embodiments, the engaging surface 58b of the engaging block 58 or the through hole 56
At least one of the counterbore surfaces 56a may be roughened. With this configuration, both surfaces 56a, 58
b, the friction coefficient of the engagement surface 5 can be increased.
8b is pressed against the counterbore surface 56a.
6a and 58b can be reliably prevented from being displaced.

In the first to third embodiments, the rod 5
Although the engagement block 58 is provided at the end of the third through a swing ring 57, the swing ring 57 may be omitted.
That is, the rod 53 and the engagement block 58 are integrally formed. However, in this case, a convex hemisphere is formed on the engagement surface 58b of the engagement block 58. At the same time, a concave hemisphere engaging with the convex hemisphere is formed on the counterbore surface 56a of the through hole 56. Each hemisphere has the same radius of curvature, and the center of the radius of curvature is the center of the oscillator 20.
Of the convex hemisphere 20a or the concave hemisphere 12a.

In the first embodiment, the diaphragm 4
Although the forming material of No. 3 is rubber, it may be changed to a metal such as stainless steel. In the above-described fourth embodiment, the material for forming the bellows 82 is a metal, but another material such as a synthetic resin may be used.

Although the bellows diaphragm 88 is used in the fifth embodiment, the diaphragm 43 shown in the first embodiment may be used instead. As another example of the second embodiment, the air cylinder 65 and the engagement block 58 may be connected via a linear member such as a wire. The wire can be made of any material,
It is preferable to use a metal for durability. Then, the length of the wire is set so that the wire is tensioned when the piston 66 is positioned at the upper stroke end, and loosened when the piston 66 is positioned at the lower stroke end. With this configuration, the rod 53 and the spherical bearing 5
Since the step 70 can be omitted, the structure can be simplified, the weight can be reduced, and the cost can be reduced, and the manufacturing cost can be reduced. Further, as the linear member, in addition to the wire, it is also allowed to change to a cable release or the like in which the wire is housed in a flexible tube. Furthermore, it is also permitted to use a linear member instead of the connecting rod 531 and the engaging block 58 shown in the first, fourth and fifth embodiments.

The oscillating body 20 and the annular porous material 12 may be slidably contacted so that no static pressure is applied between the oscillating body 20 and the annular porous material 12. However, when adopting this configuration, it is preferable to select the material of the oscillator 20 and the annular porous material 12 with low friction.

In the above embodiment, the annular porous material 12
The oscillating body 20 is temporarily locked non-rotatably by applying a suction force by air to the surface of the concave hemispherical surface 12a. Alternatively, the lock may be temporarily locked by the rod 53 instead of temporarily locked by the suction force of the air.
That is, if the flow rate of the air supplied into the cylinder tube 41 is reduced and the distance by which the rod 53 is lifted is made smaller than when the main lock is performed, the oscillator 20 can be formed into a ring-shaped porous body with a smaller pressing force than when the main lock is performed. It becomes possible to press against the material 12.

In the second embodiment, the spherical bearing 570 is provided at the lower end of the rod 53. On the other hand, as shown in FIG. 19, a spherical bearing 570 may be provided in the through hole 56 formed at the center of the rocking body 20. And
When the rod 53 moves to the lock position, the flange formed at the distal end of the rod 53 has a spherical bearing 57.
0 may be engaged. As another example of the third embodiment, although not shown, a spherical bearing 570 is provided in a through hole 73 formed at the center of the piston 66, and when the rod 53 moves to the lock position, the rod 53
May engage with the spherical bearing 570.

As another example of the first embodiment, a spherical bearing 570 shown in FIG. 20 may be used. That is, a hemisphere 551 is integrally formed at the lower end of the rod 53, and the engagement block 58 is rotatably supported by the hemisphere 551. or,
Although not shown, a spherical ball instead of the hemisphere 551 may be used.

Next, in addition to the technical idea described in the claims, the technical idea grasped by the above-described embodiment will be described below. (1) In the copying apparatus according to any one of claims 2 to 4, the actuator is a piston that partitions the inside of the cylinder tube into two spaces, and the piston is at least one of the two spaces. A copying apparatus characterized by moving by the pressure of a fluid supplied to a space.

(2) The copying apparatus according to any one of claims 1 to 6, wherein a porous material capable of blowing out fluid from the entire surface is provided at an interface between the apparatus base and the copying member. With this configuration, by blowing out the fluid from the porous material, a static pressure can be generated at the interface between the apparatus base and the copying member. Therefore, the friction of the copying member with respect to the apparatus base can be reduced to zero, and highly accurate copying can be performed.

(3) In any one of the first to sixth aspects, an elastic force applying member for applying an elastic force in a direction in which the actuator moves to the lock position is provided.
With this configuration, the lock holding force of the copying member can be increased.

(4) A concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base for supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. A copying apparatus that contacts the object while rotating the copying member along a hemispherical surface, and copies the contact surface so as to be parallel to a specific surface of the object. A copying apparatus, comprising: an actuator for pressing against a device base; and an operative connection between the copying member and the actuator via a linear member.
With this configuration, the structure of the copying apparatus can be simplified, and the manufacturing cost can be reduced.

(5) In the above technical idea (4),
The copying apparatus according to claim 1, wherein the linear member is a wire that is tensed when the copying member is locked and loosens when the copying member is unlocked.

(6) A concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base for supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. A copying apparatus provided, wherein the copying member is brought into contact with an object while rotating the copying member along a hemisphere, and after the contact surface is made to be parallel to a specific surface of the object, In the scanning state holding method in which the scanning member is locked so as not to be rotatable, the scanning member is gradually pressed against the apparatus base with time with a strong pressing force against the apparatus base in a state where the scanning member is caused to follow the object. A method for maintaining a copying state in a copying apparatus to be locked.

(7) A concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base for supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. A copying apparatus that contacts the object while rotating the copying member along a hemispherical surface, and copies the contact surface so as to be parallel to a specific surface of the object. A temporary locking means (annular porous material 12) for temporarily locking the copying member by pressing the copying member against the apparatus base with a predetermined pressing force in a state where the copying member is copied, and stronger than the pressing force at the time of the temporary locking. An copying apparatus in a copying apparatus, comprising: an actuator that fully locks a copying member with a pressing force.

[0111]

As described in detail above, according to the present invention,
By moving the actuator to the lock position,
The copying member can be strongly and accurately locked.

[Brief description of the drawings]

FIG. 1 is a front view of a copying apparatus according to a first embodiment.

FIG. 2 is a bottom view of the copying apparatus.

FIG. 3 is a cross-sectional view of the copying apparatus showing a state in which the rocking body is fully locked at a copying angle of 0.5 °.

FIG. 4 is a cross-sectional view of the copying apparatus showing a state where an oscillating body is made to follow an object at a copying angle of 0.5 °.

5A is a cross-sectional view of the copying apparatus showing a state in which the swinging body is fully locked at a copying angle of 0 °, and FIG. 5B is a cross-sectional view showing a state of copying the copying body at a copying angle of 0 °.

FIGS. 6A to 6D are operation explanatory diagrams showing a process of pressing a workpiece using a copying apparatus.

FIG. 7 is a time chart of air and the like supplied to each port.

FIG. 8A is an explanatory diagram for explaining parameters required to prevent the oscillating body from being displaced; FIG.

FIG. 9 is a schematic explanatory view showing a case where the center of the spherical bearing is on a surface including an engagement surface between the spherical bearing and the rocking body.

FIG. 10 is a schematic explanatory view showing a case where the center of the spherical bearing is not on a surface including an engagement surface between the spherical bearing and the rocking body.

FIG. 11 is a sectional view of a copying apparatus according to a second embodiment.

FIG. 12 is a cross-sectional view of the copying apparatus showing an unlocked state in the third embodiment.

FIG. 13 is a sectional view of the copying apparatus showing a locked state.

FIG. 14 is an explanatory diagram for explaining parameters necessary for preventing the oscillating body from being displaced.

FIG. 15 is a diagram showing a relationship between an external force applied to the oscillator 20 and an eccentric distance of the external force.

FIG. 16 is a cross-sectional view of a copying apparatus using a bellows in a fourth embodiment.

FIG. 17 is a bottom view of the copying apparatus.

FIG. 18 is a cross-sectional view of a copying apparatus using a bellows flam in the fifth embodiment.

FIG. 19 is a cross-sectional view of the copying apparatus having a configuration different from that of the second embodiment.

FIG. 20 is a cross-sectional view of the copying apparatus having a configuration different from that of the first embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Device base, 12a ... Concave hemisphere, 20 ... Oscillating body (copying member), 20a ... Convex hemisphere, 21 ... Tool (copying member), 21a ... Tip surface of a tool (contact surface of a copying member) 43, diaphragm (actuator), 49 ...
Washer (actuator), 50: Stopper (actuator), 53: Rod (holding member), 570: Spherical bearing, 531: Connection rod (connection member), 66: Piston (actuator), 82: Bellows (flexible member) , 84: connecting block (connecting member), 88: bellow flam (flexible member), S: reference stage (object),
F: Copying device.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Koji Uchida, Inventor, Kojimaki-shi, Aichi 2-250, Oki 2-chome F-term (reference) 5F044 PP04

Claims (9)

[Claims] 1. A concave hemisphere is provided on one of a copying member provided to face each other and an apparatus base supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. A copying apparatus that contacts the target while rotating the copying member along a hemisphere, and copies the contact surface so as to be parallel to a specific surface of the target; An actuator which can take a lock position for pressing the copying member so that it cannot rotate and a lock release position for unlocking without pressing, and for pressing the copying member against the apparatus base when the actuator is at the lock position. And a holding member. 2. The actuator according to claim 1, wherein the actuator is displaceable by receiving a pressure of a fluid, and one end of the holding member is fixed to one of the copying member and the actuator. 2. The copying apparatus according to claim 1, wherein the other end of the copying apparatus can be separated from the other member when the actuator moves to the unlock position. 3. 3. When the actuator is in the locked position, the holding member and the other member can be engaged via a spherical bearing provided on any one of them. Item 3. The copying apparatus according to item 1 or 2. 4. The copying apparatus according to claim 3, wherein the center of the spherical bearing is on a surface including an engagement surface between the spherical bearing and the actuator or the copying member. 5. The copying apparatus according to claim 1, wherein the actuator includes a flexible member that is displaced by receiving a pressure of a fluid, and the actuator moves with the displacement of the flexible member. 6. A concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. In a copying apparatus that contacts the target while rotating the copying member along a hemispherical surface and copies the contact surface so as to be parallel to a specific surface of the target object, the copying member includes: A flexible member that deforms under the pressure of the fluid is drivingly connected via a connecting member, and the deformation member is pressed against the apparatus base as the flexible member is deformed, so that the copying member is locked non-rotatably. A copying apparatus characterized in that: 7. The copying apparatus according to claim 6, wherein the flexible member is a stretchable bellows. 8. A concave hemisphere is provided on one of the copying member provided to face each other and an apparatus base supporting the same, and a convex hemisphere engaging with the concave hemisphere is provided on the other. A copying apparatus, wherein the copying member is brought into contact with an object while rotating the copying member along a hemisphere, and after the contact surface is made to be parallel to a specific surface of the object, In the copying state holding method in which the copying member is locked so as not to rotate, the copying member is temporarily locked by pressing the copying member against the object base with a predetermined pressing force in a state where the copying member is copied to the object. ,
Thereafter, the copying member is fully locked with a pressing force stronger than the pressing force at the time of the temporary locking, and the copying state holding method in the copying apparatus is characterized in that the copying member is fully locked. 9. A static pressure due to a fluid pressure is generated at an interface between the apparatus base and the copying member, so that the copying member is copied to an object, and the static pressure is applied when the copying member is temporarily locked. 8. The method according to claim 7, wherein
6. A copying state holding method in the copying apparatus according to [1].