JP2002356332A - Quarts glass burner, method for producing the same and caliper jig used therefor - Google Patents
Quarts glass burner, method for producing the same and caliper jig used thereforInfo
- Publication number
- JP2002356332A JP2002356332A JP2001165107A JP2001165107A JP2002356332A JP 2002356332 A JP2002356332 A JP 2002356332A JP 2001165107 A JP2001165107 A JP 2001165107A JP 2001165107 A JP2001165107 A JP 2001165107A JP 2002356332 A JP2002356332 A JP 2002356332A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- inner diameter
- tube
- burner
- oxygen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/12—Nozzle or orifice plates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、外管内に多数の細
管を有する多分岐管型のノズルを収容してなる石英ガラ
ス製バーナ、その製造方法及びそれに用いる内径測定治
具に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burner made of quartz glass containing a multi-branch type nozzle having a large number of thin tubes in an outer tube, a method of manufacturing the burner, and an inner diameter measuring jig used for the burner.
【０００２】[0002]
【従来の技術】この石英ガラス製バーナは、外管から噴
出する水素ガスがノズルから噴出する酸素ガスと外部で
混合して燃焼発熱することを用いて火炎加工に使用され
たり、又は外管から噴出する水素ガスがノズルから噴出
する酸素ガスと外部で混合して燃焼発熱することを用
い、ノズルの任意の細管から噴出する原料ガス（ＳｉＣ
ｌ 4 等）を加水分解して合成石英ガラスの合成に使用さ
れるものである。2. Description of the Related Art A quartz glass burner is sprayed from an outer tube.
The hydrogen gas that is emitted is mixed with the oxygen gas
It is used for flame processing by mixing and generating heat.
Gas or hydrogen gas spouting from the outer tube
To generate heat by mixing with oxygen gas
Source gas (SiC)
l Four Is used to synthesize synthetic quartz glass
It is what is done.
【０００３】従来、この種の石英ガラス製バーナは、多
分岐管型のノズルにおける酸素ガスを噴出する各細管の
先端の内径の差が約１００μｍのものである。上記石英
ガラス製バーナは、酸素ガスを噴出する各細管として、
熱加工により管引きされた石英ガラス管からなり、勾配
が１／２０、最小目盛が０．１mm（１００μｍ）の棒ゲ
ージを用いて予め先端の内径を測定し、先端の内径の差
が一目盛以内のものを使用して製造されている。Conventionally, a quartz glass burner of this type has a multi-branch tube type nozzle in which the difference in the inner diameter at the tip of each of the thin tubes for ejecting oxygen gas is about 100 μm. The above-mentioned quartz glass burner is used as each thin tube for ejecting oxygen gas.
It consists of a quartz glass tube drawn by thermal processing. The inner diameter of the tip is measured in advance using a bar gauge with a 1/20 gradient and a minimum scale of 0.1 mm (100 μm). Manufactured using within.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来の石英ガ
ラス製バーナでは、多分岐管型のノズルにおける酸素ガ
スを噴出する各細管の先端の内径の差が約１００μｍも
あるので、酸素ガス流の横断面における酸素ガスの分布
が不均一となって、バーナの加熱領域の横断面において
温度むらを生じ、ひいては火炎加工に際し、作業効率が
低下し、又、合成石英ガラスの合成に際し、歩留まりが
低下したりする不具合がある。However, in a conventional quartz glass burner, the difference in inner diameter at the tip of each of the narrow tubes for jetting oxygen gas in a multi-branch tube type nozzle is about 100 μm. The distribution of oxygen gas in the cross section becomes non-uniform, causing temperature unevenness in the cross section of the heating area of the burner, which in turn reduces the work efficiency during flame processing and decreases the yield when synthesizing synthetic quartz glass. There is a malfunction to do.
【０００５】そこで、本発明は、火炎加工の作業効率又
は合成石英ガラスインゴットの歩留まりを向上し得る石
英ガラス製バーナの提供を主目的とする。Accordingly, an object of the present invention is to provide a quartz glass burner which can improve the working efficiency of flame processing or the yield of synthetic quartz glass ingots.
【０００６】[0006]
【課題を解決するための手段】前記課題を解決するた
め、本発明の石英ガラス製バーナは、外管内に多数の細
管を有する多分岐管型のノズルを収容してなる石英ガラ
ス製バーナであって、前記ノズルにおける酸素ガスを噴
出する各細管の先端の内径の差を１０μｍ以下にしたこ
とを特徴とする。In order to solve the above-mentioned problems, a quartz glass burner of the present invention is a quartz glass burner in which a multi-branch tube type nozzle having a large number of narrow tubes is accommodated in an outer tube. The difference in the inner diameter of the tip of each of the thin tubes from which oxygen gas is ejected at the nozzle is set to 10 μm or less.
【０００７】又、石英ガラス製バーナの製造方法は、外
管内に多数の細管を有する多分岐管型のノズルを収容し
てなる石英ガラス製バーナを製造するに際し、前記ノズ
ルにおける酸素ガスを噴出する各細管として、予め先端
の内径を、前記細管の先端に小径端部が挿入可能な横断
面円形を呈し、勾配が１／１０００〜１／１００の石英
ガラス製のテーパロッドを有する内径測定治具を用いて
測定した石英ガラス管を用いて前記ノズルを形成するこ
とを特徴とする。In a method of manufacturing a quartz glass burner, an oxygen gas is ejected from the nozzle when manufacturing a quartz glass burner in which a multi-branch tube type nozzle having a large number of small tubes in an outer tube is housed. As each thin tube, an inner diameter measuring jig having a tapered rod made of quartz glass having an inner diameter of a tip in advance, a circular cross section in which a small-diameter end can be inserted into the tip of the thin tube, and a gradient of 1/1000 to 1/100. The nozzle is formed using a quartz glass tube measured by using the nozzle.
【０００８】更に、内径測定治具は、熱加工により管引
きされた石英ガラス管の先端の内径を測定する内径測定
治具であって、前記石英ガラス管の先端に小径端部が挿
入可能な横断面円形を呈し、勾配が１／１０００〜１／
１００の石英ガラス製のテーパロッドからなることを特
徴とする。Further, the inner diameter measuring jig is an inner diameter measuring jig for measuring the inner diameter of the front end of a quartz glass tube drawn by thermal processing, wherein a small diameter end can be inserted into the front end of the quartz glass tube. Presents a circular cross section with a gradient of 1/1000 to 1 /
It is characterized by being made of 100 quartz glass tapered rods.
【０００９】[0009]
【作用】上述した外管内に多数の細管を有する多分岐型
のノズルを収容してなる石英ガラス製のバーナであっ
て、前記ノズルにおける酸素ガスを噴出する各細管の先
端の内径の差を１０μｍ以下にした石英ガラス製バーナ
によって、ノズルからの酸素ガス流の横断面における酸
素ガスの分布が均一となり、バーナの加熱領域の横断面
における温度分布が均一となる。酸素ガスを噴出する各
細管の先端の内径の差が、１０μｍを超えると、上述し
た作用が得られない。酸素ガスを噴出する各細管の先端
の内径の差は、５μｍ以下がより好ましい。A quartz glass burner containing a multi-branch type nozzle having a large number of thin tubes in the outer tube described above, wherein the difference between the inner diameters of the tips of the narrow tubes for ejecting oxygen gas at the nozzles is 10 μm. With the quartz glass burner described below, the distribution of oxygen gas in the cross section of the oxygen gas flow from the nozzle becomes uniform, and the temperature distribution in the cross section of the heating region of the burner becomes uniform. If the difference between the inner diameters of the tips of the thin tubes from which oxygen gas is ejected exceeds 10 μm, the above-described effects cannot be obtained. The difference between the inner diameters of the tips of the thin tubes from which oxygen gas is ejected is more preferably 5 μm or less.
【００１０】又、外管内に多数の細管を有する多分岐管
型のノズルを収容してなる石英ガラス製バーナを製造す
るに際し、前記ノズルにおける酸素ガスを噴出する各細
管として、予め先端の内径を、前記細管の先端に小径端
部が挿入可能な横断面円形を呈し、勾配が１／１０００
〜１／１００の石英ガラス製のテーパロッドを有する内
径測定治具を用いて測定した石英ガラス管を用いて前記
ノズルを形成する石英ガラス製バーナの製造方法によっ
て、上記石英ガラス製バーナを確実にかつ高精度に製造
することができる。In manufacturing a quartz glass burner in which a multi-branched tube type nozzle having a large number of small tubes in the outer tube is manufactured, each of the small tubes for ejecting oxygen gas from the nozzle has an inner diameter at the tip in advance. Has a circular cross-section in which a small-diameter end can be inserted into the tip of the thin tube, and has a gradient of 1/1000
The above-mentioned quartz glass burner is surely and reliably manufactured by a quartz glass burner manufacturing method in which the nozzle is formed using a quartz glass tube measured using an inner diameter measuring jig having a taper rod made of quartz glass having a diameter of about 1/100. It can be manufactured with high precision.
【００１１】更に、熱加工により管引きされた石英ガラ
ス管の先端の内径を測定する内径測定治具であって、前
記石英ガラス管の先端に小径端部が挿入可能な横断面円
形を呈し、勾配が１／１０００〜１／１００の石英ガラ
ス製のテーパロッドからなる内径測定治具によって、最
小目盛を０．５〜５μｍとすることができる。勾配が１
／１０００未満であると、０．５μｍより小さい単位で
測定可能であるが、石英ガラス管の真円度はこのような
精度になっていなくて、又、これまでの精度の石英ガラ
ス管も要求されない一方、測定操作においてこの精度で
は測定不可能である上に、治具そのものを作製すること
も非常に難しい。一方、勾配が１／１００を超えると、
５μｍよりも大きい単位で測定することとなり、目的と
する差１０μｍ以下にすることに反することになる。勾
配は、１／８００〜１／３００がより好ましく、１／５
００が１μｍの単位で測定するのに最も好ましい。Further, there is provided an inner diameter measuring jig for measuring an inner diameter of a tip of a quartz glass tube drawn by thermal processing, wherein the jig has a circular cross section in which a small-diameter end can be inserted into a tip of the quartz glass tube. The minimum scale can be set to 0.5 to 5 μm by an inner diameter measuring jig including a taper rod made of quartz glass having a gradient of 1/1000 to 1/100. Gradient 1
If it is less than / 1000, it is possible to measure in a unit smaller than 0.5 μm, but the roundness of the quartz glass tube does not have such accuracy, and a quartz glass tube of the past accuracy is also required. On the other hand, measurement is not possible with this precision in the measurement operation, and it is also very difficult to manufacture the jig itself. On the other hand, when the gradient exceeds 1/100,
The measurement is performed in a unit larger than 5 μm, which is contrary to the target difference of 10 μm or less. The gradient is more preferably 1/800 to 1/300, and 1/5
00 is most preferred for measurement in units of 1 μm.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。図１は本発明に係る石英ガ
ラス製バーナの実施の形態の一例を示す縦断面図であ
る。この石英ガラス製バーナは、合成石英ガラスの合成
に使用するもので、外管１内に多分岐管型のノズル２を
収容して概略構成されている。すなわち、開口端部が漸
次縮径したほぼ有底円筒状の外管１には、水素ガスを導
入する水素ガス導管３が接続されている一方、外管１内
には、ノズル２の一部を構成する截頭円錐筒状のノズル
台４が、その大径端部を外管１の開口端部に向けて同軸
的に収容されている。ノズル台４の小径端部には、酸素
ガスを導入する酸素ガス導管５が接続されており、この
酸素ガス導管５は、外管１の底部中央を気密に貫通して
外管１の外部へ導出されている。一方、ノズル台４の大
径端部は、円板状の端板６によって気密に閉塞されてお
り、この端板６には、ＳｉＣｌ4 等の原料ガスを通す貫
通孔７が中心部に設けられていると共に、上記貫通孔７
より適宜小径で酸素ガスを通す多数の貫通孔８が、端板
６の中心を中心とする３つの同心円上においてそれぞれ
周方向へ等間隔をなすようにして設けられている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing an example of an embodiment of a quartz glass burner according to the present invention. This quartz glass burner is used for synthesizing synthetic quartz glass, and has a general configuration in which a multi-branch tube type nozzle 2 is accommodated in an outer tube 1. That is, a hydrogen gas conduit 3 for introducing a hydrogen gas is connected to a substantially bottomed cylindrical outer tube 1 whose opening end is gradually reduced in diameter, while a part of the nozzle 2 is provided in the outer tube 1. Is housed coaxially with its large-diameter end facing the open end of the outer tube 1. An oxygen gas conduit 5 for introducing oxygen gas is connected to the small-diameter end of the nozzle base 4, and the oxygen gas conduit 5 passes through the bottom center of the outer tube 1 in an airtight manner to the outside of the outer tube 1. Derived. On the other hand, the large-diameter end of the nozzle base 4 is hermetically closed by a disk-shaped end plate 6, and a through hole 7 for passing a source gas such as SiCl 4 is provided in the center of the end plate 6. And through holes 7
Numerous through holes 8 having a smaller diameter and through which oxygen gas is passed are provided at equal intervals in the circumferential direction on three concentric circles centered on the center of the end plate 6.
【００１３】端板６の内面には、原料ガスを導入する原
料ガス導管９が中心部の貫通孔７と連通させて気密に接
続されており、この原料ガス導管９は、ノズル台９及び
酸素ガス導管５の軸心部を通り、外管１の外部において
酸素ガス導管５を気密に貫通して酸素ガス導管５の外部
へ導出されている。一方、端板６の外面には、原料ガス
を噴出する原料ガス細管１０が、中心部の貫通孔７と連
通させると共に、その軸線をノズル台４の軸線の延長線
と一致させて気密に接続されており、又、酸素ガスを噴
出する多数の酸素ガス細管１１が、周辺部の各貫通孔８
と連通させると共に、その軸線の延長線を原料ガス細管
１０の軸線の延長線上の任意の点で交差させて気密に接
続されている。そして、酸素ガスを噴出する各酸素ガス
細管１１は、先端の内径の差が１０μｍ以下にされてい
る。A source gas conduit 9 for introducing a source gas is air-tightly connected to the inner surface of the end plate 6 so as to communicate with a through hole 7 at the center. The gas passes through the oxygen gas conduit 5 in a gas-tight manner outside the outer tube 1 through the axis of the gas conduit 5, and is led out of the oxygen gas conduit 5. On the other hand, on the outer surface of the end plate 6, a raw material gas tubing 10 for ejecting a raw material gas is communicated with the through hole 7 at the center, and the axis thereof coincides with the extension of the axis of the nozzle table 4 to be airtightly connected. Also, a large number of oxygen gas thin tubes 11 for ejecting oxygen gas are provided in each through hole 8 in the peripheral portion.
The gas is connected in an air-tight manner, with the extension of the axis intersecting at any point on the extension of the axis of the raw material gas thin tube 10. Each oxygen gas thin tube 11 for ejecting oxygen gas has a difference in inner diameter at the tip of 10 μm or less.
【００１４】上記構成の石英ガラス製バーナの製造に際
しては、ノズル２における酸素ガスを噴出する各酸素ガ
ス細管１１として、熱加工により管引きされた石英ガラ
ス管からなり、後述する内径測定治具を用いて予め先端
の内径を測定し、各石英ガラス管の先端の内径の差が１
０μｍ以下のものを使用し、これらの酸素ガス細管１
１、原料ガス細管１０、端板６、ノズル台４及び外管１
等を酸水素炎により図１に示すように溶着接合して石英
ガラス製バーナとするものである。In manufacturing the quartz glass burner having the above-described structure, each oxygen gas thin tube 11 for ejecting oxygen gas from the nozzle 2 is made of a quartz glass tube drawn by thermal processing. The inner diameter of the tip of each quartz glass tube was measured beforehand, and the difference in the inner diameter of the tip of each quartz glass tube was 1
Oxygen gas tubing 1
1, raw material gas thin tube 10, end plate 6, nozzle base 4, and outer tube 1
And the like are welded and joined by an oxyhydrogen flame as shown in FIG. 1 to obtain a quartz glass burner.
【００１５】一方、熱加工により管引きされた石英ガラ
ス管の先端の内径を測定する内径測定治具１２は、図
２、図３に示すように、石英ガラス管の先端に小径端部
が挿入可能な横断面円形を呈し、勾配（両端の半径の差
／長さ）が１／１０００〜１／１００の石英ガラス製の
テーパロッドからなるものであり、その外周面に最小目
盛０．５〜１mmのスケールを長手方向に刻設してあるこ
とが好ましい。従って、例えば先端の内径２mm程度の石
英ガラス管に対する内径測定治具は、小径端の直径０．
８mm、大径端の直径２．６mm、長さ３６０mmとすると、
先端の内径２μｍに対し、スケールの最小目盛０．５mm
が対応することとなり、先端の内径を１μｍの単位で測
定可能となる。On the other hand, as shown in FIGS. 2 and 3, the inner diameter measuring jig 12 for measuring the inner diameter of the tip of the quartz glass tube drawn by thermal processing has a small-diameter end inserted into the tip of the quartz glass tube. It is made of a quartz glass tapered rod having a possible cross-section circular shape and a gradient (difference / length of radius at both ends) of 1/1000 to 1/100, and a minimum scale of 0.5 to 1 mm on its outer peripheral surface. Is preferably engraved in the longitudinal direction. Therefore, for example, a jig for measuring the inner diameter of a quartz glass tube having an inner diameter of about 2 mm at the tip end has a diameter of 0.1 mm at the small-diameter end.
8mm, the diameter of the large diameter end is 2.6mm, and the length is 360mm,
For the inner diameter of the tip 2μm, the minimum scale of the scale 0.5mm
And the inner diameter of the tip can be measured in units of 1 μm.
【００１６】ここで、前述した内径測定治具を用いて熱
加工により管引きされた石英ガラス管の先端の内径を測
定し、各石英ガラス管の先端の内径の差が５μｍ以下の
多数の石英ガラス管を酸素ガス細管として使用して図１
に示すような石英ガラス製バーナを製造したところ、そ
の良品率は、従来のもののそれが５０％であったの対
し、９０％となり、格段に向上した。又、上述したよう
にして製造した石英ガラスバーナを用いて合成石英ガラ
スインゴットを製造したところ、そのインゴットの歩留
まりは、従来のものによるそれが５８％であったの対
し、６３％となり、大幅に向上した。Here, the inner diameters of the distal ends of the quartz glass tubes drawn by thermal processing are measured using the above-described inner diameter measuring jig, and a number of quartz tubes whose inner diameters at the distal ends of the respective quartz glass tubes have a difference of 5 μm or less are measured. Fig. 1 using a glass tube as an oxygen gas tube
When a quartz glass burner as shown in (1) was manufactured, its non-defective rate was 90%, compared with 50% of that of the conventional one, and was significantly improved. In addition, when a synthetic quartz glass ingot was manufactured using the quartz glass burner manufactured as described above, the yield of the ingot was 63%, compared with 58% of the conventional ingot, and was greatly increased. Improved.
【００１７】なお、上述した実施の形態においては、多
数の酸素ガス細管の軸線の延長線が、原料ガス細管の軸
線の延長線上の任意の点で交差する、いわゆる加熱領域
に焦点を有するようにする多分岐管型のノズルを有する
石英ガラス製バーナについて説明したが、これに限定さ
れるものではなく、多数の酸素ガス細管の軸線と原料ガ
ス細管の軸線とが平行となるようにする多分岐管型のノ
ズルを有するものとしてもよいのは勿論である。又、石
英ガラス製バーナは、合成石英ガラスの合成に用いるも
のとする場合に限らず、酸水素炎による火炎加工に用い
るものとしてもよいのは自明である。In the above-described embodiment, the extension of the axes of the many oxygen gas thin tubes is focused on a so-called heating region where the extension of the axes of the source gas thin tubes intersects at an arbitrary point on the extension of the axes of the source gas thin tubes. A quartz glass burner having a multi-branched tube type nozzle has been described. However, the present invention is not limited to this, and a multi-branched tube in which the axes of a large number of oxygen gas thin tubes and the raw gas narrow tubes are parallel to each other. Needless to say, it may have a tubular nozzle. Further, it is obvious that the quartz glass burner may be used not only for synthesizing synthetic quartz glass but also for flame processing using an oxyhydrogen flame.
【００１８】[0018]
【発明の効果】以上説明したように、本発明の石英ガラ
ス製バーナによれば、ノズルからの酸素ガス流の横断面
における酸素ガスの分布が均一となり、バーナの加熱領
域の横断面における温度分布が均一となるので、火炎加
工の作業効率又は合成石英ガラスインゴットの歩留まり
を格段に向上することができる。又、石英ガラス製バー
ナの製造方法によれば、上記石英ガラス製バーナを確実
にかつ高精度に製造することができる。更に、内径測定
治具によれば、最小目盛が０．５〜５μｍとなるので、
従来に比べて一層微細な寸法の測定を行うことができ
る。As described above, according to the quartz glass burner of the present invention, the distribution of oxygen gas in the cross section of the oxygen gas flow from the nozzle becomes uniform, and the temperature distribution in the cross section of the heating region of the burner becomes uniform. Becomes uniform, so that the working efficiency of the flame processing or the yield of the synthetic quartz glass ingot can be remarkably improved. According to the method for manufacturing a quartz glass burner, the quartz glass burner can be manufactured reliably and with high precision. Further, according to the inner diameter measuring jig, since the minimum scale is 0.5 to 5 μm,
It is possible to measure a finer dimension than before.
【図１】本発明に係る石英ガラス製バーナの実施の形態
の一例を示す縦断面図である。FIG. 1 is a longitudinal sectional view showing one example of an embodiment of a quartz glass burner according to the present invention.
【図２】本発明に係る内径測定治具の側面図である。FIG. 2 is a side view of an inner diameter measuring jig according to the present invention.
【図３】図２における III−III 線矢視断面図である。FIG. 3 is a sectional view taken along line III-III in FIG. 2;
１ 外管 ２ ノズル ４ ノズル台 ６ 端板 ７ 貫通孔 ８ 貫通孔 １０ 原料ガス細管 １１ 酸素ガス細管 １２ 内径測定治具 DESCRIPTION OF SYMBOLS 1 Outer tube 2 Nozzle 4 Nozzle stand 6 End plate 7 Through hole 8 Through hole 10 Raw material gas thin tube 11 Oxygen gas thin tube 12 Inner diameter measuring jig
Claims (3)
のノズルを収容してなる石英ガラス製バーナであって、
前記ノズルにおける酸素ガスを噴出する各細管の先端の
内径の差を１０μｍ以下にしたことを特徴とする石英ガ
ラス製バーナ。1. A quartz glass burner comprising a multi-branch tube type nozzle having a large number of thin tubes in an outer tube,
A quartz glass burner characterized in that the difference in the inner diameter of the tip of each of the thin tubes from which oxygen gas is ejected in the nozzle is 10 μm or less.
のノズルを収容してなる石英ガラス製バーナを製造する
に際し、前記ノズルにおける酸素ガスを噴出する各細管
として、予め先端の内径を、前記細管の先端に小径端部
が挿入可能な横断面円形を呈し、勾配が１／１０００〜
１／１００の石英ガラス製のテーパロッドを有する内径
測定治具を用いて測定した石英ガラス管を用いて前記ノ
ズルを形成することを特徴とする石英ガラス製バーナの
製造方法。2. When manufacturing a quartz glass burner in which a multi-branch tube type nozzle having a large number of thin tubes in an outer tube is manufactured, each of the thin tubes for jetting oxygen gas at the nozzle has an inner diameter at a tip in advance. Has a circular cross-section in which a small-diameter end can be inserted into the tip of the thin tube, and has a gradient of 1/1000 to 1000
A method for manufacturing a quartz glass burner, wherein the nozzle is formed using a quartz glass tube measured using an inner diameter measuring jig having a taper rod made of 1/100 quartz glass.
の先端の内径を測定する内径測定治具であって、前記石
英ガラス管の先端に小径端部が挿入可能な横断面円形を
呈し、勾配が１／１０００〜１／１００の石英ガラス製
のテーパロッドからなることを特徴とする内径測定治
具。3. An inner diameter measuring jig for measuring an inner diameter of a front end of a quartz glass tube drawn by thermal processing, wherein the jig has a circular cross section in which a small diameter end can be inserted into the front end of the quartz glass tube, An inner diameter measuring jig comprising a quartz glass taper rod having a gradient of 1/1000 to 1/100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001165107A JP2002356332A (en) | 2001-05-31 | 2001-05-31 | Quarts glass burner, method for producing the same and caliper jig used therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001165107A JP2002356332A (en) | 2001-05-31 | 2001-05-31 | Quarts glass burner, method for producing the same and caliper jig used therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002356332A true JP2002356332A (en) | 2002-12-13 |
Family
ID=19007820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001165107A Withdrawn JP2002356332A (en) | 2001-05-31 | 2001-05-31 | Quarts glass burner, method for producing the same and caliper jig used therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002356332A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007100019A1 (en) * | 2006-02-28 | 2007-09-07 | Shin-Etsu Chemical Co., Ltd. | Quartz glass made burner |
| EP2223899A1 (en) * | 2009-02-27 | 2010-09-01 | Shin-Etsu Chemical Co., Ltd. | Burner for producing glass fine particles and method for manufacturing porous glass base material using the same |
| CN102442772A (en) * | 2010-09-24 | 2012-05-09 | 信越化学工业株式会社 | Quartz glass burner |
| CN105627311A (en) * | 2014-11-06 | 2016-06-01 | 佛山高富中石油燃料沥青有限责任公司 | Natural gas burner |
| KR20160119409A (en) * | 2015-04-03 | 2016-10-13 | (주) 디에스테크노 | Multi burner for manufacturing quartz glass ingot |
| JP2021102530A (en) * | 2019-12-25 | 2021-07-15 | クアーズテック徳山株式会社 | Silica glass synthesis burner and apparatus for manufacturing synthetic silica glass using the same |
-
2001
- 2001-05-31 JP JP2001165107A patent/JP2002356332A/en not_active Withdrawn
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007230813A (en) * | 2006-02-28 | 2007-09-13 | Shin Etsu Chem Co Ltd | Burner made of quartz glass |
| EP2006256A1 (en) * | 2006-02-28 | 2008-12-24 | Shin-Etsu Chemical Company, Ltd. | Quartz glass made burner |
| WO2007100019A1 (en) * | 2006-02-28 | 2007-09-07 | Shin-Etsu Chemical Co., Ltd. | Quartz glass made burner |
| EP2006256A4 (en) * | 2006-02-28 | 2012-07-11 | Shinetsu Chemical Co | Quartz glass made burner |
| US8312744B2 (en) | 2009-02-27 | 2012-11-20 | Shin-Etsu Chemical Co., Ltd. | Burner for producing glass fine particles and method for manufacturing porous glass base material using the same |
| EP2223899A1 (en) * | 2009-02-27 | 2010-09-01 | Shin-Etsu Chemical Co., Ltd. | Burner for producing glass fine particles and method for manufacturing porous glass base material using the same |
| JP2010195667A (en) * | 2009-02-27 | 2010-09-09 | Shin-Etsu Chemical Co Ltd | Burner for producing glass fine particle and method for manufacturing porous glass preform using the same |
| EP2434217A3 (en) * | 2010-09-24 | 2013-02-20 | Shin-Etsu Chemical Co., Ltd. | Quartz glass burner |
| CN102442772A (en) * | 2010-09-24 | 2012-05-09 | 信越化学工业株式会社 | Quartz glass burner |
| US8695380B2 (en) | 2010-09-24 | 2014-04-15 | Shin-Etsu Chemical Co., Ltd. | Quartz glass burner |
| EP2860448A1 (en) * | 2010-09-24 | 2015-04-15 | Shin-Etsu Chemical Co., Ltd. | Quartz glass burner |
| CN105627311A (en) * | 2014-11-06 | 2016-06-01 | 佛山高富中石油燃料沥青有限责任公司 | Natural gas burner |
| KR20160119409A (en) * | 2015-04-03 | 2016-10-13 | (주) 디에스테크노 | Multi burner for manufacturing quartz glass ingot |
| KR101718915B1 (en) | 2015-04-03 | 2017-03-24 | (주) 디에스테크노 | Multi burner for manufacturing quartz glass ingot |
| JP2021102530A (en) * | 2019-12-25 | 2021-07-15 | クアーズテック徳山株式会社 | Silica glass synthesis burner and apparatus for manufacturing synthetic silica glass using the same |
| JP7128172B2 (en) | 2019-12-25 | 2022-08-30 | クアーズテック徳山株式会社 | Burner for synthesizing silica glass and apparatus for manufacturing synthetic silica glass using this burner |
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