JP2002355752A - Simultaneous double surface polishing method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a double surface polishing device not causing a defect such as a crack to a workpiece when an upper surface table comes in contact with the workpiece. SOLUTION: The upper surface table 7 is brought close to the workpiece W, and immediately before contact, a stopper 21 projected from the upper surface table 7 abuts on an inner gear 6 to perform attitude control parallel with a lower surface table 2. While rotating the upper and lower surface tables 7, 2 and a carrier 4 respectively, the inner gear 6 is lowered downward at very low speed. While eliminating dust between the upper surface table 7 and the workpiece W, the upper surface table 7 and the workpiece W are brought into contact, keeping parallelism to start polishing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for simultaneous double-sided surface polishing such as a double-sided simultaneous processing flat lapping machine and a double-sided simultaneous processing flat polishing machine for simultaneously processing both sides of a flat work.

[0002]

2. Description of the Related Art In a conventional two-sided simultaneous polishing machine, a lower platen 2 fixed to a hollow lower platen rotary shaft 1 is attached to a lower platen rotary shaft 1 as shown in FIGS. It is rotationally driven at a low speed by a board driving gear 3, is placed on the lower surface plate 2, and has a plurality of workpiece mounting through holes 4 a,
The outer teeth of a plurality of carriers 4, 4 with workpieces W, 4 W mounted on 4 a mesh with a sun gear 5 and an inner gear 6, and the carriers 4, 4 rotate by the respective rotations of the sun gear 5 and the inner gear 6. While rotating around the sun gear 5, the upper stool 7 sandwiches the workpieces W and W between the lower stool 2 and rotates concentrically with the lower stool 2, but at a different rotation speed. The lower surface plate 2 and the upper surface plate 7 are usually made of cast iron.

The rotation of the lower platen 2, the carriers 4, 4 and the upper platen 7 causes the polishing liquid to flow between the work W and the upper and lower platens 2, 7.
And both sides are polished at the same time.

When the carrier 4 and the work W are attached and detached, it is necessary to move the upper platen 7 upward. In the example shown in the figure, a fork-shaped upper platen lift 8 is attached to the upper platen 7, and the upper platen lift 8 is connected to the piston rod 11 of the pneumatic cylinder 10 via the universal joint 9. I have. The upper platen 7 is moved up and down by the operation of the pneumatic cylinder 10.

When the upper platen 7 descends, the claws 12 provided on the upper platen lifting / lowering tool 8 engage with serrations 14 fixed to the upper platen rotating shaft 13, and when the upper platen rises, the serrations 14 break away. And nail 12 and serration 14
While the is engaged, the upper stool 7 rotates with the serrations 14.

In the universal joint 9, the upper stool 7 whose structure is not parallelized with the lower stool 2 is parallel to the lower stool 2. The purpose is to make the entire surface contact with uniform pressure.

When starting machining, the carrier 4 and the work W are placed on the lower platen 2, and the upper platen 7 is moved down at a low speed by the operation of the pneumatic cylinder 10 to contact the work W. , The work W is sandwiched between the lower platen 2 and
The lower platen 2, the carriers 4, 4 and the upper platen 7 are rotated to start polishing.

However, as described above, since the upper stool 7 is suspended by the universal joint 9, the parallelism and concentricity with the lower stool 2 are poor, and the work piece as shown in FIG. It does not hit the workpiece W in parallel, and contacts the workpiece W while being slightly inclined as shown in FIG. For this reason, the lower surface of the lower surface plate 2 does not hit the entire surface of the work W at the start of the contact, but first comes into local contact, a large force is applied to the local contact portion of the work W, and defects such as cracks and breaks are likely to occur. There was a problem.

When fine dust or solidified abrasive grains are present between the workpiece W and the upper and lower stools 2 and 7 or on the upper stool 7, when the polishing is started, these spills and the like are entrained. There is also a problem that defects such as cracks, cracks, and cracks are generated in the work W.

[0010]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and provides a method and an apparatus for simultaneous double-sided surface polishing in which no defects such as cracks, cracks, splinters, etc. are generated in the workpiece at the start of descent. Things.

[0011]

Means for Solving the Problems To solve the above-mentioned problems, a double-sided simultaneous surface polishing apparatus according to the present invention comprises a plurality of flat work pieces arranged between an upper surface plate and a lower surface plate.
A two-sided simultaneous planar polishing apparatus that simultaneously polishes by the relative rotational motion of the upper stool and the lower stool, elevating means for vertically driving the upper stool, and the upper stool lowered by the elevating means. Before coming into contact with the workpiece, an upper and lower surface plate parallelizing means for providing a parallelism between the upper surface plate and the lower surface plate is provided.

In the above two-sided simultaneous polishing machine, the upper and lower platen parallelizing means includes an upper surface of an inner gear that meshes with an outer periphery of a carrier holding the work by internal teeth and transmits rotation to the work, and It is provided with a stopper provided on the board and parallel to the upper surface processing surface, and further,
The stopper may be provided with a roller facing the inner gear, or the upper and lower platen parallelizing means may be a clamp means for clamping a universal joint connecting the upper platen and the elevating means. I did it.

[0013] The double-sided simultaneous surface polishing apparatus according to the present invention is characterized in that both surfaces of a plurality of flat workpieces disposed between an upper surface plate and a lower surface plate are rotated relative to the upper surface plate and the lower surface plate. A simultaneous double-sided planar polishing apparatus, wherein the upper platen is moved up and down by the raising and lowering means, and the upper platen lowered by the raising and lowering means is brought into contact with the workpiece before the upper platen is lowered. Micro feed means for controlling the speed to an extremely low speed.

In the above-mentioned two-sided simultaneous polishing apparatus, the microfeed means engages with an outer periphery of a carrier holding the work by internal teeth and lowers an inner gear for transmitting rotation to the work at an extremely low speed. It was a means.

In the method for simultaneously polishing both surfaces of the present invention, an upper platen approaching process for lowering an upper platen toward a work mounted on a carrier and mounted on a lower platen, Before contacting, reduce the lowering speed of the upper platen and switch to micro feed, and while maintaining the upper platen parallel to the lower platen, generate a relative slip between the upper platen and the work, The soft interposed solids removal process, in which the interposed solids such as dirt between the upper surface plate and the work are softly removed by weak contact and the upper surface plate and the work are brought into contact after the intervening solids are removed, A polishing step of starting simultaneous double-sided surface polishing after the contact, or, further, in the intervening solid soft elimination step, removing the intervening solids on both surfaces of the work while rotating the upper platen, the lower platen and the carrier. To do

According to the present invention, the upper platen does not locally hit the work placed on the lower platen, but gently hits the flat surface, and softly removes the intervening solid matter adhered to the work surface of the work.

[0017]

Embodiments of the present invention will be described below.
This will be described with reference to FIGS.

[First Embodiment] FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention, and FIG. 2 is a plan view showing the upper platen and rollers of FIG. 1, the same parts as those in FIG. 7 are denoted by the same reference numerals, and description thereof will be omitted.

A lower platen drive gear 3 is fixed to the lower end of the lower platen rotary shaft 1. When the lower platen drive gear 3 is driven to rotate by a lower platen transmission gear (not shown) meshing with the lower platen drive gear 3, the lower platen 2 is driven. , And rotates about the platen axis C.

Carrier gears 4b and 4b (see FIG. 8) are provided on the outer periphery of the plurality of carriers 4 and 4 mounted on the lower surface plate 2, respectively. The outer gear meshes with the inner teeth 6 a of the inner gear 6.

The sun gear 5 is formed integrally with a sun gear rotating shaft 15 rotatably inserted into a hollow hole of the lower platen rotating shaft 1, and a sun gear driving gear fixed to a lower end of the sun gear rotating shaft 15. 16 is driven to rotate by a sun gear transmission gear (not shown) that meshes with this,
The sun gear 5 is configured to rotate about a surface plate axis C.

The inner gear 6 has an inner cup rotating shaft 17 with an upward cup-shaped mounting portion 17 on its lower surface.
a fixed cylindrical frame 1 fixed to the upper surface, and the inner gear rotating shaft 17 rotatably holding the lower platen rotating shaft 1
The inner gear rotating shaft 17 is rotatably held on the outer circumference of the inner gear 8 and is driven by an inner gear transmission gear (not shown). As a result, the inner gear 6 rotates about the platen axis C.

Therefore, as described above, the sun gear 5 and the inner gear 6 rotate,
When the sun gear 5 rotates while the gears are stopped, the plurality of carriers 4, 4 rotate while rotating the sun gear 5.
Orbit around.

The serration 14 is disposed above the sun gear 5 and is fixed to an upper platen rotating shaft 13 rotatably inserted into a hollow hole of the sun gear rotating shaft 15, and a lower end of the upper platen rotating shaft 13. Upper platen drive gear 19 fixed to
The serrations 14 are configured to rotate about the platen axis C when driven by a platen transmission gear (not shown) meshing therewith. Spline-shaped teeth 14 a are formed on the outer periphery of the serrations 14.

The upper platen lifting and lowering tool 8 has a plurality of forks 8
A mounting ring 8b is fixed at the end of a, and the mounting ring 8b is fixed to the upper surface plate 7 on its lower surface. Upper surface plate 7
Is in a state facing the lower surface plate 2 by this.

The mounting ring 8b of the upper platen lifting and lowering tool has a claw 12
Is provided. The claw 12 is attached to the attachment ring 8b by a pin 20, and can swing about the pin 20 as a support shaft. The claw 12 is urged by a spring (not shown) in a direction in which the claw 12 engages with the serration teeth 14a.
When they fit into and engage with each other and collide with the teeth 14a, the spring is deformed to swing and retreat, thereby avoiding interference with the teeth 14a.

The center of the upper platen lift 8 is connected to the output side of a universal joint 9, and the input side of the universal joint 9 is connected to a pneumatic cylinder (lifting means) 10.
Is connected to the piston rod 11.

At a plurality of locations on the outer peripheral side of the upper surface plate 7, stoppers 21, 21 having rollers 21 a are provided so as to protrude on the outer periphery, and the rollers 21 a, 21 a face the inner gear 6. The planes in contact with the lower surfaces of the rollers 21a, 21a are adjusted so as to be parallel to the processing surface (lower surface) of the upper surface plate 7, and the parallel upper surface of the inner gear 6 is adjusted to the processing surface (lower surface) of the lower surface plate 2. (Upper surface).

When the upper platen 7 descends, the rollers 21a, 21a hit the upper plane of the inner gear 6, and
The upper surface plate 7, which is free from the posture while being suspended by the universal joint 9, has its posture and position corrected by the contact between the rollers 21a, 21a and the inner gear 6,
The upper and lower stools 2, 7 are parallel to each other. Accordingly, the workpiece W between the upper and lower stools 2 and 7 and the processing surface of the upper stool 7 are also parallel to each other.

As described above, in this embodiment, the upper and lower platen parallelizing means are provided with the upper surface of the inner gear 6 parallel to the lower platen processing surface and the stopper provided on the upper platen 7 and parallel to the upper platen processing surface. 21.

When the rollers 21a, 21a are in contact with the upper plane of the inner gear 6, the upper platen 7 and the workpiece W are not in contact. Therefore, the microfeed means lowers the inner gear 6 at an extremely low speed. Next, the configuration of the microfeed means will be described.

In this embodiment, the microfeed means is an inner gear elevating means. The inner gear raising / lowering means moves up and down while the inner gear 6 follows the slide of the swash plate cam 22 that slides.

That is, a roller 17b is attached to the lower portion of the inner gear rotating shaft 17, and the roller 17b
b is a cam follower of the swash plate cam 22. The swash plate cam 22 includes a sliding guide 24 provided on a fixed frame 23.
, And slide by rotation of the micro screw 25. A worm wheel 26 is attached to the micro screw 25. A worm (not shown) meshes with the worm wheel 26, and the rotation of the worm causes the swash plate cam 22 to slide gently. It goes up and down.

As described above, the inner gear 6 is moved up and down by the inner gear elevating means, and is rotated by the inner gear transmission gear. In addition, from the fixed frame 23, the fixed cylindrical frame 18 described above is erected.

The operation of the first embodiment configured as described above will be described below.

The swash plate cam 22 is slid in advance so that the inner gear 6 is slightly raised from the height at the time of machining.

Workpieces W, carriers 4 with W mounted thereon, 4
Is placed on the lower stool 2 and the upper stool 7 is lowered by the elevating means 10 toward the workpieces W, W to approach the workpieces W, W (upper stool approaching process). During this time, the posture of the upper stool 7 is free.

As the lowering of the upper platen 7 proceeds, the height of the claw 12 at which the claw 12 engages with the serration 14 is reached. Serration 14
Starts rotating at appropriate timings before and after this, the claws 12 and the teeth 14a of the serrations 14 can be meshed firmly, and the upper platen 7 starts rotating at a low speed.

The sun gear 5, the inner gear 6, and the lower platen 2 also start to rotate at the respective rotational speeds set in advance for eliminating the intervening solids, and the carrier 4 also starts revolving. The supply of the polishing liquid to the work W is also started.

Before the upper platen 7 comes into contact with the workpieces W, W,
The roller 21a of the stopper 21 hits the upper surface of the inner gear 6, and the lowering of the upper stool 7 by the elevating means 10 is prevented. Due to the contact between the roller 21a and the inner gear 6, the processing surface of the upper stool 7 becomes parallel to the upper surface of the work.

Next, the swash plate cam 22 is slid in the reverse direction to
The inner gear 6 is lowered at a very low speed, and the stopper 21 and the upper stool 7 are lowered accordingly. In other words, the lowering speed of the upper stool 7 is reduced to switch to micro feed. During this time, the processing surface of the upper stool 7 is maintained parallel to the workpiece W and the upper surface of the W. Therefore, the upper surface plate 7 does not tilt, hit the work W, and does not cause the work W to be cracked, cracked, cracked or the like.

When the machined surface of the upper surface plate 7 approaches the workpieces W and W and comes into weak contact with solids such as dust on the surface of the workpieces W and W, the workpieces W and W and the upper surface plate 7 By rotating the lower platen 2, the intervening solids are softly removed from the upper and lower surfaces of the work (intermediate solids soft removing process). Therefore, the work W is not cracked, cracked, or flawed by the intervening solid matter.

After the removal of the intervening solids, the upper stool 7 further descends, and the upper stool 7 comes into contact with the work W to start simultaneous double-sided planar polishing (polishing step). At this time, the inner gear 6 is lowered to a height slightly away from the stopper 21, and the upper stool 7 is released from the restraint of the posture, and freely rotates following the work.

In this embodiment, the upper surface plate 7, the lower surface plate 2, the sun gear 5,
Although the inner gear 6 is rotating, if any of the inner gears 6 is rotated to cause relative sliding between the upper and lower platens 2 and 7 and the workpiece W, an intervening solid matter removing action appears. But,
Rotating all elements quickly eliminated the intervening solids.

When the inner gear lifting / lowering means is used as the micro feed means as in this embodiment,
Since the meshing position with the carrier gear in the tooth width direction shifts as the inner gear moves up and down, wear of the teeth of the inner gear is uniformed without being concentrated at one place, and the life of the inner gear is extended.

The roller 21a of the stopper 21 is necessary for rotating the upper stool 7 and rotating relative to the lower stool 2 in the interposed solid soft elimination process, and stops the upper stool 7 and the inner gear 6. By rotating the sun gear 5 while keeping the surface plate and the work relatively slipping, or by rotating the upper surface plate 7 and the inner gear 6 in the same direction at a constant speed,
The relative rotation between the upper stool 7 and the inner gear 6 is eliminated, and it is not necessary to use the roller 21a.

Further, for example, when it is important to remove solid matter between the upper surface of the work and the processed surface of the upper surface plate, and there is no possibility that dust or the like enters between the lower surface of the work and the processed surface of the lower surface plate. The purpose of eliminating the intervening solids can be achieved by rotating the upper platen 7 alone.

[Second Embodiment] FIGS. 3 to 5 show a second embodiment of the present invention. FIG. 3 is a longitudinal sectional view, FIG.
Is an enlarged longitudinal sectional view showing a clamp mechanism of the universal joint, and FIG. 5 is a sectional view taken along line VV of FIG. In the drawings showing the second embodiment, the same portions as those in FIG. 1 are denoted by the same reference numerals, and detailed description will be omitted.

In the second embodiment, upper and lower platen parallelizing means for providing parallelism between the upper platen and the lower platen, and the lowering speed of the upper platen before the upper platen contacts the work. The micro feed means for controlling at an extremely low speed is different from that of the first embodiment.

First, the upper and lower platen parallelizing means will be described.
In FIG. 3, the pneumatic cylinder 10 includes a fixed frame 23.
Is fixed to the upper frame 30 attached thereto, and the center line thereof is aligned with the platen axis C, or is installed parallel to the platen axis C even if it is slightly shifted.

Universal joint 9 (see FIG. 4)
The output side is connected to a rod 8 c extending above the upper stool elevating tool 8, and the periphery thereof is surrounded by an upper stool shaft regulating cover 31. As shown in FIGS. 4 and 5, the regulation cover 31 has an upper portion fixed to the piston rod 11 and a lower portion provided with a predetermined gap from the outer periphery of the rod 8c of the upper stool. In the lower part, the guide holes 32, 3
2 are drilled, and each guide hole 32 has a clamp shoe 3
A third rod portion 33a is slidably inserted therethrough. The shoe portion 33b of the clamp shoe 33 is
1 and the rod 8c of the upper platen lift, the rod 8c of the upper platen does not restrain the outer peripheral surface of the rod 8c in the unclamped state. Therefore, the rod 8c
Is clamp shoe 3 by universal joint 9
In a state surrounded by 3 and 33, the upper platen lifting / lowering tool 8 is freely movable in the radial direction, and is freely suspended from the universal joint 9.

The rod portion 33a of the clamp shoe 33 is
The restricting cover 31 is pushed from the outer peripheral side to the rod 8c side by a pusher (not shown). The pushing amount is set so that all the clamp shoes 33 are even. Thereby, the shoe portion 3 of the clamp shoe 33
3b restrains the outer peripheral surface of the rod 8c of the upper stool elevating tool, and the center axis of the upper stool elevating tool 8 coincides with or becomes parallel to the stool axis C, and the upper stool 7 attached to the lower side thereof. Is maintained parallel to the processing surface of the lower surface plate 2.

Next, the micro feed means will be described.
The air pressure supplied to the pneumatic cylinder 10 is controlled by a pneumatic control device (not shown) to control the elevating speed of the piston rod 11, and to change or stop the speed during elevating. be able to. Although not shown in the figure, any of the upper surface plate 7 to be raised and lowered, the upper surface plate lifting / lowering device 8, the piston rod 11 and the upper surface plate shaft regulating cover 31 is provided with a position sensor for detecting its vertical displacement. is set up. The position sensor is adjusted so as to detect a state in which the processing surface of the upper stool 7 is slightly in front of the workpiece W.

The configuration is the same as that of the first embodiment except for the above-mentioned upper and lower platen parallelizing means and micro feed means. The inner gear 6 does not move up and down.

The operation of the second embodiment configured as described above will be described below.

Workpieces W, carriers 4 with W mounted thereon, 4
Is placed on the lower surface plate 2 and the upper surface plate 7 is moved toward the workpieces W and W by the lifting / lowering means 10 controlled by the pneumatic controller.
To approach the workpieces W and W (upper platen approaching process). During this time, the posture of the upper stool 7 is free.

As the upper platen 7 descends, it reaches the height at which the claws 12 engage with the serrations 14. Serration 14
Starts rotating at appropriate timings before and after this, the claws 12 and the teeth 14a of the serrations 14 can be meshed firmly, and the upper platen 7 starts rotating at a low speed.

The sun gear 5, the inner gear 6, and the lower platen 2 also start to rotate at the respective rotational speeds set in advance for eliminating intervening solids, and the carrier 4 also starts to revolve. The supply of the polishing liquid to the work W is also started.

Before the upper surface plate 7 contacts the workpieces W, W,
The position sensor detects the approach between the upper platen processing surface and the work W, and upon receiving the detection signal, the pneumatic control device switches the lowering speed of the piston rod 11 to a very low speed.

Around this time, the clamp shoe 33 is operated to clamp the upper platen lifting / lowering tool 8, and the processing surface of the upper platen 7 is parallel to the upper surface of the work.

When the lowering speed of the piston rod 11 is switched at a very low speed, the lowering speed of the upper stool 7 is reduced to switch to micro feed. During this time, the processing surface of the upper stool 7 is maintained parallel to the workpiece W and the upper surface of the W. Therefore, the upper surface plate 7 does not tilt, hit the work W, and does not cause the work W to be cracked, cracked, cracked or the like.

When the processing surface of the upper stool 7 comes close to the workpieces W and W and comes into weak contact with intervening solids such as dust on the surface of the workpieces W and W, the workpieces W and W and the upper stool 7 are contacted. By rotating the lower platen 2, the intervening solids are softly removed from the upper and lower surfaces of the work (intermediate solids soft removing process). Therefore, the work W is not cracked, cracked, or flawed by the intervening solid matter.

After the removal of the intervening solids, the upper stool 7 further descends, and the upper stool 7 comes into contact with the work W to start simultaneous double-sided planar polishing (polishing step). At this time, clamp shoe 3
Reference numeral 3 denotes a rod 8c of the upper platen lifting / lowering tool which is released, and the upper platen 7 is released from the restraint of the posture, and freely rotates following the work.

FIG. 6 is a longitudinal sectional view of another clamping mechanism of the universal joint according to the second embodiment, that is, the upper and lower platen parallelizing means. In this upper / lower platen parallelizing means, the upper platen shaft regulating cover 31 is fixed to the piston rod 11 above the universal joint 9, and the clamp shoe 33 is a ring 8 d fixed to the upper part of the upper platen lift 8. Is clamped on the outer periphery of the rim.
Other points are the same as those in FIGS. Since the diameter of the ring 8d is easily made larger than the diameter of the rod 8c,
The posture constraint of the upper surface plate 7 by the clamp is more stable.

The upper and lower platen parallelizing means and the microfeed means in the present invention are not limited to the above-described embodiments, and various mechanisms and control devices can be applied.

[0066]

As described in detail above, in the present invention, before the descending upper platen comes into contact with the workpiece,
The upper platen and the lower platen are made parallel to each other, so that the upper platen hits the work parallel to the work, and solid matter such as dust can be eliminated. In addition, it is possible to prevent the work from being broken, caught, flawed, claw-cracked, cracked or the like due to the inclusion of intervening solid matter.

Further, as means for parallelizing the upper and lower platens,
By using the upper surface of the inner gear that meshes with the outer periphery of the carrier that holds the work with the internal teeth and transmits rotation to the work, and the stopper that is provided on the upper surface plate and that is parallel to the upper surface processing surface, the outermost periphery of the device can be used. In this case, the inner gear is parallelized on the upper surface of the inner gear having a large diameter, the parallel accuracy is improved, and there is no need to use a separate position sensor. If the stopper is brought into contact with the upper surface of the inner gear by a roller,
Since the roller rotates due to the difference between the rotation speeds of the inner gear and the upper platen, wear of the contact surface can be prevented.

Further, in order to obtain the parallelism between the upper stool and the lower stool, the universal joint is clamped, and the lowering speed of the elevating means for raising and lowering the upper stool is controlled to a very low speed at a predetermined position. It is only necessary to provide clamping means.

Further, in the present invention, before the descending upper surface plate comes into contact with the work, the lower surface speed of the upper surface plate is controlled to an extremely low speed so that the surface plate and the work are caused to slide relative to each other. Intermediate solids such as dust can be softly removed, preventing the work from breaking, catching, flaws, claw cracks, cracks, etc. due to local pressing between the upper platen and the work, or entrainment of the intervening solids. can do.

When the inner gear raising / lowering means is used for the switching to the extremely low speed descent, the lower surface plate comes into contact with the inner gear and is prevented from descending. There is no need for the means to switch to an extremely low speed at a delicate height immediately before contact with the workpiece, and the control is simplified.

Further, in the present invention, before the descending upper surface plate comes into contact with the work, the parallelism between the upper surface plate and the lower surface plate is determined, and the lowering speed of the upper surface plate is controlled to an extremely low speed. While the surface plate and the work caused a relative slip,
The upper platen hits the workpiece in parallel, and solid matter such as dust can be softly removed. The occurrence of flaws, cloak cracks, cracks and the like can be prevented.

Furthermore, in the process of softly removing the interposed solids, if the interposed solids on both surfaces of the work are removed while rotating the upper platen, the lower platen and the carrier, revolving of the carrier is added. The intervening solids can be quickly removed, and the intervening solids between the lower platen and the work can be effectively removed.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an upper surface plate and rollers of FIG. 1;

FIG. 3 is a longitudinal sectional view showing another embodiment of the present invention.

FIG. 4 is an enlarged longitudinal sectional view showing a clamp mechanism of the universal joint of FIG. 3;

FIG. 5 is a sectional view taken along line VV of FIG. 4;

FIG. 6 is a longitudinal sectional view showing another clamping mechanism of the universal joint.

FIG. 7 is a vertical sectional view showing a conventional double-sided simultaneous plane polishing apparatus.

FIG. 8 is a plan view showing a lower platen and a carrier of FIG. 7;

FIG. 9 is a cross-sectional view showing a state in which a work is sandwiched between a lower surface plate and an upper surface plate in a conventional simultaneous double-sided surface polishing apparatus, and FIG.
Shows the state immediately before the pinching, and FIG.

[Explanation of symbols]

 Reference Signs List 2 Lower surface plate 4 Carrier 4a Work mounting through hole 4b Carrier gear 5 Sun gear 6 Inner gear 7 Upper surface plate 8 Upper surface plate elevating tool 9 Universal joint 10 Elevating means 12 Claw 13 Upper surface plate rotating shaft 14 Serration 21 Stopper 22 Swash plate Cam 31 Upper surface plate axis regulating cover 33 Clamp shoe C Surface plate axis W Work

Continued on the front page (72) Inventor Katsuhei Ito 1-8-8 Nakase, Mihama-ku, Chiba-shi, Chiba F-term (reference) in Seiko Instruments Inc. 3C058 AA07 AA13 CB02 DA06 DA18

Claims (8)

[Claims] 1. A double-sided simultaneous surface polishing apparatus for simultaneously polishing both surfaces of a plurality of flat workpieces disposed between an upper surface plate and a lower surface plate by a relative rotational motion between the upper surface plate and the lower surface plate. Lifting means for driving the upper platen up and down; and an upper / lower platen which provides a parallelism between the upper platen and the lower platen before the upper platen lowered by the lifting / lowering means comes into contact with the work. A double-sided simultaneous plane polishing apparatus, comprising: a board parallelizing means. 2. An apparatus according to claim 1, wherein said upper and lower platen parallelizing means meshes with an outer periphery of a carrier holding said work and internal teeth to transmit rotation to said work. Characterized in that it comprises an upper surface of the upper surface plate and a stopper provided on the upper surface plate and parallel to a processing surface of the upper surface plate. 3. The simultaneous double-sided surface polishing apparatus according to claim 2, wherein the stopper is provided with a roller facing the inner gear. 4. The apparatus according to claim 1, wherein said upper and lower platen parallelizing means is a clamp means for clamping a universal joint connecting said upper platen and said elevating means. Characteristic double-side polishing machine. 5. A double-sided simultaneous surface polishing apparatus for simultaneously polishing both surfaces of a plurality of flat workpieces disposed between an upper surface plate and a lower surface plate by a relative rotational movement between the upper surface plate and the lower surface plate. And elevating means for driving the upper surface plate up and down; and microfeed means for controlling the lowering speed of the upper surface plate to an extremely low speed before the upper surface plate lowered by the elevating means comes into contact with the work. And a simultaneous double-sided plane polishing apparatus comprising: 6. The two-sided simultaneous plane polishing apparatus according to claim 5, wherein the micro-feeding means lowers an inner gear which meshes with an outer periphery of a carrier holding the work by internal teeth and transmits rotation to the work. A double-sided simultaneous plane polishing apparatus, which is an inner gear raising / lowering means for lowering at a speed. 7. An upper platen approaching process for lowering the upper platen toward a work mounted on the carrier and placed on the lower platen, and the upper platen approaching before the upper platen comes into contact with the work. While reducing the descending speed and switching to micro feed, while maintaining the upper surface plate parallel to the lower surface plate, a relative slip occurs between the upper surface plate and the work, and the Soft removal of solids such as dust by soft contact, and contact between the upper platen and the work after removing the solids. And a simultaneous double-sided surface polishing method. 8. The double-sided simultaneous planar polishing method according to claim 7, wherein in the soft interposed solid removing step, the interposed solid on both surfaces of the work is removed while rotating the upper platen, the lower platen and the carrier.