JP2002346904A - Method and device for polishing planar member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To further simplify structure by polishing a planar member by a polishing tape extending from reels to reels. SOLUTION: This device comprises a holding base 4 capable of holding a planar member W, a reciprocating mechanism 2 for reciprocating the holding base 4, a tape transfer mechanism 7 which is arranged oppositely to the holding base 4 and transfers the polishing tape T extending from reels 15, 16 to reels 15, 16 in the reciprocating direction of the holding base 4, a pressure receiving member 20 capable of bringing the polishing tape T extending from the reels 15, 16 to the reels 15, 16 in pressure contact with the planar member W, a moving mechanism 8 for moving the tape transfer mechanism 7 in a direction opposite to the holding base 4, a feed control part 30 capable of controlling the reciprocating operation of the holding base 4 by the reciprocating mechanism 2, and a tape transfer control part 31 capable of controlling the transfer of the polishing tape T by synchronizing with the reciprocating operation of the holding base 4 by the reciprocating mechanism 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to, for example, TAB (Ta
The present invention relates to a method for polishing a plate-like member used for polishing a surface of a tape for pe-automated bonding, a multilayer printed wiring board, and the like, and an apparatus therefor.

[0002]

2. Description of the Related Art As a method and an apparatus for polishing a plate-like member such as a TAB tape or a multilayer printed wiring board of this type, there are T.T.
2. Description of the Related Art There is known a structure in which an insulating resin layer or a plating layer, which is present on the surface of a plate-like member such as an AB tape and the like, which overflows due to bleeding, is removed and polished in a rotation mode using a grindstone.

[0003]

However, in the case of the structure using the above-mentioned rotation mode, it is said that chipping of the grindstone easily occurs, the smoothing of the surface may be impaired, and it is very difficult to find optimum polishing conditions. Has inconvenience.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem. Among the present invention, a method according to the first aspect of the present invention provides a method for polishing a plate-like member with a polishing tape. The plate-shaped member is reciprocated and the polishing tape transferred from the reel to the reel is pressed against the plate-shaped member, the reciprocating movement of the plate-shaped member and the transfer of the polishing tape are synchronously controlled, and the reel is transferred from the reel to the reel. A plate member polishing method characterized in that the plate member is polished with a polishing tape.

According to a second aspect of the present invention, there is provided a method for reciprocating the plate-like member and pressing the polishing tape, which is transported back and forth from reel to reel, against the plate-like member, thereby reciprocating the plate-like member. 4. The method according to claim 3, wherein the moving operation and the back-and-forth transfer of the polishing tape are synchronously controlled. Is characterized by swinging motion in the width direction.

According to a fourth aspect of the present invention, there is provided a holding table capable of holding a plate-like member, a reciprocating mechanism for reciprocating the holding table, and disposed opposite to the holding table, and a reel to reel. A tape transfer mechanism for transferring the polishing tape to the holding table in a reciprocating direction of the holding table, a pressure receiving member capable of pressing the polishing tape from the reel to the reel against the plate-like member, and a tape transfer mechanism for moving the polishing tape in a direction facing the holding table. A moving mechanism for moving;
A feed control unit capable of controlling the reciprocating movement of the holding table by the reciprocating mechanism, and a tape transfer control unit capable of controlling the transfer of the polishing tape in synchronization with the reciprocating movement of the holding table by the reciprocating mechanism. And a plate-like member polishing apparatus characterized by comprising:

According to a fifth aspect of the present invention, there is provided a tape line return transfer capable of controlling the tape transfer control unit to return and transfer the polishing tape in synchronization with the reciprocating movement of the holding table by the reciprocating mechanism. An apparatus according to a sixth aspect of the present invention is characterized by comprising a control unit, wherein the polishing tape is oscillated in a width direction of the polishing tape which intersects with a direction of transport of the polishing tape. And a tape swinging mechanism for causing the tape to swing.

[0008]

1 to 6 show an embodiment of the present invention, wherein 1 is a machine base and 2 is a reciprocating mechanism. A holding table 4 is provided so as to be movable in the direction of the axis, and the holding table 4 is provided so as to be reciprocally movable by a reciprocating motor 5 and a ball screw mechanism 6. An unillustrated suction-fixing mechanism capable of fixing and mounting the W in a positioned state is provided.

Reference numeral 7 denotes a tape transfer mechanism, and 8 denotes a moving mechanism. In this case, a supporting body 9 is erected on the side of the machine base 1, and a vertical moving base 10 is moved up and down by the sliding portion 11 on the supporting machine 9. A vertically movable motor 12 and a ball screw mechanism 13 for operably moving the vertically movable table 10 up and down are provided. A tape body 14a is mounted on the vertically movable table 14, and a polyester film, metal, cloth, etc. is provided on the left and right sides of the tape body 14a. The reel 15 on which the polishing tape T formed by coating or bonding abrasive particles of a predetermined particle size such as aluminum oxide, chromium oxide, silicon carbide, and diamond on the base material, and the polishing tape T unwound from the reel 15 are wound. The reel 16 is mounted on the shaft, and control motors 17 and 18 for controlling and rotating the reel 15 and the reel 16 are provided. Guided from the reel 16 roll 19
a, 19b, 19c, a roll-shaped pressure-receiving member 20, and a guide roll 21a, 21b, 21c.

Reference numeral 22 denotes a tape swinging mechanism. In this case, a swinging table 23 is supported on the tape body 14a by a sliding portion 24 so as to freely swing in the width direction of the polishing tape T, and the tape body 14a is mounted on the tape body 14a. The oscillating motor 25 is attached, the eccentric cam 26 is attached to the main shaft of the oscillating motor 25, and a U-shaped sliding contact fitting portion 27 is formed on the side of the oscillating table 23 so as to slidably engage the eccentric cam 25. Then, the cradle 28 is attached to the shaking table 23 by the sliding portion 28.
a, the pressure contact cylinder 29 is installed vertically on the shaking table 23, the rod 29a of the pressure contact cylinder 29 is connected to the receiving table 28, and the roll-shaped pressure receiving member 20 is mounted on the receiving table 28. The shaft is rotatably supported, and the shaking table 23 is oscillated by the shaking motor 25, and the pressure receiving member 20 is pressed down and pressed by the pressing cylinder 29 to move the polishing tape T in the transport direction D of the polishing tape T. Is made to oscillate in the width direction of the polishing tape T that intersects. Note that a fixed pressure receiving member may be used.

Reference numeral 30 denotes a feed control unit, which is constituted by a microcomputer or the like, and is electrically connected to the reciprocating motor 5 of the reciprocating mechanism 2, as shown in FIGS.
The reciprocating movement of the movement G to the right in the drawing and the movement F of the holding base 4 to the left in the drawing, for example, the moving speed, the reciprocating stroke, and the number of reciprocating movements of the holding base 4 are controlled. I have.

Reference numeral 31 denotes a tape transfer control unit. In this case, a tape rewind transfer control unit 32 is incorporated and is constituted by a microcomputer or the like.
· Holder 4 electrically connected to 18 and reciprocating mechanism 2
4 and 5, in synchronization with the reciprocating movement of the polishing tape T, the control of both of the forward transfer Q of the polishing tape T in the left direction in the figure and the return transfer R of the right direction in the figure, and the return transfer R The system is configured to control only the outgoing transfer Q that is not to be performed, control the transfer including stopping, control the tape transfer speed, the number of back and forth movements, and the like.

Since this embodiment has the above configuration,
The plate member W to be polished is held on the holding table 4, the holding table 4 is reciprocated by the reciprocating mechanism 2, and the tape transfer mechanism 7 transfers the reel 15 to the reel 16 or the reel 16.
The polishing tape T is transferred from the polishing tape T to the reel 15, and the transferred polishing tape T is pressed against the plate-shaped member W by the moving mechanism 8 and the pressure receiving member 20.
The plate-like member W is polished by controlling the reciprocating movement of the holding table 4 and controlling the transfer of the polishing tape T by the tape transfer control unit 31 in synchronization with the reciprocating movement of the holding table 4. Since the polishing is performed by the tape T, the surface can be easily smoothed and the surface roughness can be easily increased, the structure can be simplified, and the reel 15 to the reel 16 or the reel 16 to the reel 1
By polishing with the polishing tape T until reaching 5,
The structure can be made simpler, and the feed controller 3
0 controls the reciprocating movement of the holding table 4 and the tape transfer control unit 3 in synchronization with the reciprocating movement of the holding table 4.
Since the transfer of the polishing tape T is controlled by the method 1, optimum polishing conditions can be easily found, and good polishing can be performed.

In this case, the tape transfer control unit 31
A tape rewinding transfer control unit 32 capable of controlling the back and forth movement of the polishing tape T in synchronization with the reciprocating movement of the holding table 4 by the reciprocating mechanism 2 to reciprocate the plate-shaped member W and to move the reel 15 from the reel 15 16 or the polishing tape T transported back and forth from the reel 16 to the reel 15 is pressed against the plate-shaped member W, and the reciprocating movement of the plate-shaped member W and the back-and-forth transport of the polishing tape T are synchronously controlled. As shown in FIG.
5, the polishing tape T can be returned and transported R, and the holding table 4 can be moved to the left F, as shown in FIG. 5, for polishing. The efficiency can be improved, the workability of the polishing can be improved, and the polishing accuracy can be improved. In addition, the return transfer R of the polishing tape T can save the polishing tape T, thereby increasing the economy. Further, in this case, the polishing tape T can be oscillated by the tape oscillating mechanism 22 in the width direction of the polishing tape T crossing the transport direction of the polishing tape T, and Polishing can be performed more favorably.

The present invention is not limited to the above-described embodiment, but includes a reciprocating mechanism 4, a holding table 4, a tape transfer mechanism 7, a movement mechanism 8, a pressure receiving member 20, and a tape swing mechanism 2.
2 and the circuit configurations of the feed mechanism 30, the tape transfer control unit 31, and the tape line return transfer control unit 32 are designed by appropriately changing.

Further, the present invention is not limited to the above embodiment, and for example, in the above embodiment,
Although it has a dry polishing structure, there may be a so-called wet polishing structure for supplying a processing liquid or lubricant containing free abrasive grains or chemical agents of various materials between the plate-shaped member W and the polishing tape T, It is selected and designed depending on the type of the plate member W and the polishing conditions.

[0017]

As described above, according to the present invention, the plate member to be polished is held on the holding table, the holding table is reciprocated by the reciprocating mechanism, and the tape is moved. The polishing tape is transferred from reel to reel by the transfer mechanism, the transferred polishing tape is pressed against the plate-like member by the moving mechanism and the pressure receiving member, and the reciprocating movement of the holding table is controlled by the feed control unit and the holding is performed. By controlling the transfer of the polishing tape by the tape transfer control unit in synchronization with the reciprocating movement of the table, the plate-like member is polished. Therefore, since the polishing is performed by the polishing tape, the surface is smoothed and the surface is roughened. And the structure can be simplified, and by polishing with a polishing tape from reel to reel,
Since the structure can be made simpler and the reciprocating movement of the holding table is controlled by the feed control unit, and the transfer of the polishing tape is controlled by the tape transfer control unit in synchronization with the reciprocating movement of the holding table. Optimum polishing conditions can be easily found, and good polishing can be performed.

According to the second or fifth aspect of the present invention, the polishing tape can be moved back and forth by the tape transfer controller in synchronization with the reciprocating movement of the holding table by the reciprocating mechanism. A transfer control unit is provided to reciprocate the plate-like member and press the polishing tape that is transported back and forth from reel to reel against the plate-like member, synchronizing the reciprocating movement of the plate-like member and the back-and-forth transfer of the polishing tape. Since control is performed, polishing efficiency can be increased by reciprocating polishing, polishing workability can be improved, and polishing accuracy can be increased. Further, polishing tape can be saved by returning and transferring the polishing tape. According to the third or sixth aspect of the present invention, the polishing tape can be polished by a tape swinging mechanism so as to intersect the polishing tape in the direction in which the polishing tape is transported. In the width direction of the-loop can be Yurafu movement, it is possible to perform polishing of the plate-shaped member more satisfactorily.

As described above, the intended purpose can be sufficiently achieved.

[Brief description of the drawings]

FIG. 1 is an overall front view of an embodiment of the present invention.

FIG. 2 is a partial front sectional view of the embodiment of the present invention.

FIG. 3 is a partial side sectional view of an embodiment of the present invention.

FIG. 4 is an explanatory partial front view of the embodiment of the present invention.

FIG. 5 is an explanatory partial front view of the embodiment of the present invention.

FIG. 6 is a configuration system diagram of an embodiment of the present invention.

[Explanation of symbols]

 W Filter substrate T Polishing tape 4 Reciprocating movement mechanism 7 Tape transfer mechanism 8 Moving mechanism 20 Pressure receiving member 22 Tape swing mechanism 30 Feed mechanism 30 31 Tape transfer control unit 32 Tape line return transfer control unit

Claims (6)

[Claims] When polishing a plate-like member with a polishing tape, the plate-like member is reciprocated and a polishing tape transferred from a reel to a reel is pressed against the plate-like member,
A polishing method for a plate-shaped member, comprising synchronously controlling the reciprocating movement of the plate-shaped member and the transfer of the polishing tape, and polishing the plate-shaped member with the polishing tape from the reel to the reel. 2. The reciprocating movement of the plate member and the pressing of the polishing tape back and forth from reel to reel to the plate member, and the reciprocating movement of the plate member and the back and forth transfer of the polishing tape. 2. The method for polishing a plate-like member according to claim 1, wherein synchronous control is performed. 3. The method for polishing a plate-like member according to claim 1, wherein the polishing tape is oscillated in a width direction of the polishing tape which intersects with a direction in which the polishing tape is transported. 4. A holding table capable of holding a plate-like member, a reciprocating mechanism for reciprocating the holding table, and a reciprocating direction of the holding table which is disposed to face the holding table and moves polishing tape from a reel to a reel. Transfer mechanism for transferring the polishing tape from the reel to the reel, a pressure receiving member capable of pressing the polishing tape against the plate-like member, a moving mechanism for moving the tape transfer mechanism in a direction facing the holding table, and the reciprocating mechanism And a tape transfer controller capable of controlling the transfer of the polishing tape in synchronization with the reciprocating movement of the holder by the reciprocating mechanism. A plate-like member polishing apparatus characterized by the above-mentioned. 5. The tape transfer control unit further comprises a tape rewinding transfer control unit capable of controlling the back and forth transfer of the polishing tape in synchronization with the reciprocating movement of the holding table by the reciprocating mechanism. The plate-like member polishing apparatus according to claim 4, wherein 6. A polishing apparatus according to claim 4, further comprising a tape oscillating mechanism for oscillating the polishing tape in a width direction of the polishing tape which intersects a direction in which the polishing tape is transported.
Or a plate-like member polishing apparatus according to 5.