JP2002335070A - Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same - Google Patents

Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same

Info

Publication number
JP2002335070A
JP2002335070A JP2001137026A JP2001137026A JP2002335070A JP 2002335070 A JP2002335070 A JP 2002335070A JP 2001137026 A JP2001137026 A JP 2001137026A JP 2001137026 A JP2001137026 A JP 2001137026A JP 2002335070 A JP2002335070 A JP 2002335070A
Authority
JP
Japan
Prior art keywords
resin film
conductive particles
wiring board
printed wiring
electrodeposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001137026A
Other languages
Japanese (ja)
Inventor
Toyoichi Yoshino
豊一 吉野
Koji Nakajima
晃治 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001137026A priority Critical patent/JP2002335070A/en
Publication of JP2002335070A publication Critical patent/JP2002335070A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a printed circuit board having a connecting means, which enables flip-chip mounting on a printed circuit board wiring terminal of a narrow pitch to be executed with high connecting reliability, and to provide a method for manufacturing the same and a method for connecting the electronic component using the same. SOLUTION: The method for connecting the electronic component comprises the steps of forming an electrodeposition resin film 6 on a wiring terminal 3 of the printed circuit board, and adhering conductive particles 7 to the surface of the film 6.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、各種の電子部品を
接続及び搭載するプリント配線板であり、特に携帯情報
端末や液晶ディスプレイ等の電子機器に組み込まれるL
SI、メモリー、DSP、ドライバーIC等の半導体チ
ップをフレキシブルプリント配線板に直接搭載するフリ
ップチップ実装に用いられるプリント配線板及びその製
造方法並びにそれを用いた電子部品の接続方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board for connecting and mounting various electronic components, and more particularly, to a printed wiring board incorporated in an electronic device such as a portable information terminal or a liquid crystal display.
The present invention relates to a printed wiring board used for flip-chip mounting in which a semiconductor chip such as an SI, a memory, a DSP, and a driver IC is directly mounted on a flexible printed wiring board, a method of manufacturing the same, and a method of connecting electronic components using the same.

【0002】[0002]

【従来の技術】従来、表面実装型電子部品である半導体
チップをプリント配線板に直接搭載するフリップチップ
実装が表面実装の一つの手段として用いられてきた。こ
のフリップチップ実装は、半導体チップを直接実装する
方法で、小型軽量化、薄型化が求められる製品用途にお
いては最適な実装方法である。また、リードフレームや
インターポーザーと呼ばれる中間材が介在しないので、
半導体チップの端子からの配線長を短くすることが可能
であり、電気的損失の低減、高周波領域においてのノイ
ズの低減等、電気的においても非常に優れた実装方法で
ある。
2. Description of the Related Art Heretofore, flip chip mounting in which a semiconductor chip, which is a surface mount type electronic component, is directly mounted on a printed wiring board has been used as one means of surface mounting. The flip-chip mounting is a method of directly mounting a semiconductor chip, and is an optimal mounting method for a product that requires a reduction in size, weight, and thickness. Also, since there is no intermediate material called lead frame or interposer,
It is possible to shorten the wiring length from the terminal of the semiconductor chip, and it is an extremely excellent electrical mounting method such as reduction of electrical loss and reduction of noise in a high frequency region.

【0003】近年、この様な特徴を持つフリップチップ
実装方式をフレキシブルプリント配線板に展開する動き
が、液晶ディスプレイ用途で活発になってきている。こ
のフレキシブルプリント配線板にフリップチップ実装す
る形態は特にチップ・オン・フィルム(以下COFと略
す)と呼ばれ、携帯電話の液晶ディスプレイ用途中心に
急激な普及が予想されている。このCOFの実装には、
異方性導電性フィルム(以下ACFと略す)が広く用い
られている。
[0003] In recent years, the trend of flip-chip mounting having such characteristics to be applied to flexible printed wiring boards has been active in liquid crystal display applications. This form of flip-chip mounting on a flexible printed wiring board is particularly called a chip-on-film (hereinafter abbreviated as COF), and is expected to rapidly spread mainly in liquid crystal display applications of mobile phones. The implementation of this COF includes:
Anisotropic conductive films (hereinafter abbreviated as ACF) are widely used.

【0004】ここで一般的にACFとは、φ3〜5μm
の球状の導電性粒子を絶縁性の熱硬化性樹脂中に混入
し、フィルム状に成型したものである。使用方法として
は、プリント配線板の配線端子表面にACFを貼り付け
て、予めプリント配線板の配線端子と半導体チップ電極
上のバンプとの位置をアライメントした後に、半導体チ
ップを上部から圧着し、約10秒程度加熱硬化させて短
時間に実装を完了させる。この時、プリント配線板の配
線端子部と半導体チップ上のバンプに挟まれる形で導電
性粒子が捕捉されるため、配線端子とバンプ間の安定し
た導通が得られる。また、前記接合部は硬化した熱硬化
性樹脂によって保護されているので、非常に高い接続信
頼性が得られる。
Here, ACF generally means φ3 to 5 μm
Is mixed into an insulating thermosetting resin and molded into a film. As a method of use, the ACF is attached to the surface of the wiring terminal of the printed wiring board, the positions of the wiring terminals of the printed wiring board and the bumps on the semiconductor chip electrodes are aligned in advance, and then the semiconductor chip is crimped from the upper side. Heat curing for about 10 seconds to complete the mounting in a short time. At this time, the conductive particles are trapped between the wiring terminal portion of the printed wiring board and the bump on the semiconductor chip, so that stable conduction between the wiring terminal and the bump can be obtained. Further, since the joint is protected by the cured thermosetting resin, very high connection reliability can be obtained.

【0005】以上の様に、実装プロセスの簡便性と高接
続信頼性という特徴を持つACFであるが、プリント配
線板配線端子の狭ピッチ化に伴う接続信頼性の低下とい
う問題があった。これは、配線端子の線幅が狭くなるに
伴い、プリント配線板の配線端子部と半導体チップ上の
バンプに捕捉される導電性粒子の数も減少する結果とな
り、配線端子とバンプ間の接続抵抗値の増加や導通不良
等、プリント配線板と半導体チップの安定した接続が得
られない可能性があった。更に、ACFの構造上、絶縁
すべき隣接する配線端子間にも導電性粒子が存在し、通
常は孤立して存在するが、配線端子間のスペースが狭く
なるに伴い、これらの導電性粒子が短絡し、配線端子間
の絶縁性が保たれず電気的ショート不良が発生する可能
性もあった。この様に、ACFにおいて、プリント配線
板配線端子の狭ピッチ化に伴い、半導体との電気的接続
とプリント配線板配線端子間の絶縁性との両方を確保す
る事は非常に難しかった。
As described above, the ACF is characterized by the simplicity of the mounting process and the high connection reliability. However, there is a problem that the connection reliability is reduced due to the narrow pitch of the wiring terminals of the printed wiring board. This means that as the line width of the wiring terminal becomes narrower, the number of conductive particles caught in the wiring terminal portion of the printed wiring board and the bump on the semiconductor chip also decreases, and the connection resistance between the wiring terminal and the bump is reduced. There was a possibility that stable connection between the printed wiring board and the semiconductor chip could not be obtained due to an increase in the value or poor conduction. Furthermore, due to the structure of the ACF, conductive particles also exist between adjacent wiring terminals to be insulated and usually exist in isolation, but as the space between the wiring terminals becomes narrower, these conductive particles become There is also a possibility that a short circuit occurs, and insulation between the wiring terminals is not maintained, resulting in an electrical short circuit failure. As described above, in the ACF, it has been extremely difficult to secure both the electrical connection with the semiconductor and the insulation between the printed wiring board wiring terminals with the narrowing of the pitch of the printed wiring board wiring terminals.

【0006】[0006]

【発明が解決しようとする課題】以上のように、従来の
プリント配線板のフリップチップ実装においては、実装
プロセスの簡便性と高接続信頼性という利点のためAC
Fが広く用いられているが、プリント配線板配線端子の
狭ピッチ化に伴い、ACFにおいては、プリント配線板
と半導体チップの安定した接続が得られないという課題
と配線端子間の絶縁性を保持できないという二つの課題
があった。
As described above, in the conventional flip-chip mounting of a printed wiring board, AC flip-chip mounting is advantageous due to the advantages of simple mounting process and high connection reliability.
F is widely used, but as the pitch of the printed circuit board wiring terminals becomes narrower, the ACF has a problem that a stable connection between the printed circuit board and the semiconductor chip cannot be obtained and the insulation between the wiring terminals is maintained. There were two issues that could not be achieved.

【0007】従って、プリント配線板のフリップチップ
実装において、ACFの利点である実装プロセスの簡便
性を踏襲しつつ、狭ピッチのプリント配線板配線端子に
おける半導体との電気的接続とプリント配線板配線端子
間の絶縁性との両立を可能とする高接続信頼性を持つ実
装方法が要求されていた。
Therefore, in flip-chip mounting of a printed wiring board, the electrical connection with the semiconductor and the printed wiring board wiring terminals in the printed wiring board wiring terminals of a narrow pitch are performed while following the simplicity of the mounting process which is an advantage of the ACF. There has been a demand for a mounting method with high connection reliability that enables compatibility with inter-insulation properties.

【0008】上記の問題に鑑み、本発明は、実装プロセ
スの簡便性を損なうこと無く、狭ピッチのプリント配線
板配線端子へのフリップチップ実装を高接続信頼性で可
能とする接続手段を有するプリント配線板及びその製造
方法並びにそれを用いた電子部品の接続方法を提供する
ことを目的とする。
In view of the above-mentioned problems, the present invention provides a printed circuit having connection means that enables flip-chip mounting to a narrow-pitch printed wiring board wiring terminal with high connection reliability without impairing the simplicity of the mounting process. An object of the present invention is to provide a wiring board, a method of manufacturing the same, and a method of connecting electronic components using the same.

【0009】[0009]

【課題を解決するための手段】上記課題を解決するため
に本発明のプリント配線板は、配線端子上に電着樹脂膜
を形成し、前記電着樹脂膜表面に導電性粒子を付着させ
た構成よりなる。
In order to solve the above problems, a printed wiring board according to the present invention has an electrodeposited resin film formed on a wiring terminal and conductive particles adhered to the surface of the electrodeposited resin film. Consists of a configuration.

【0010】この構成により、電着樹脂膜を接着層とし
てプリント配線板の配線端子上のみに導電性粒子を付着
させ、隣接する配線端子間には導電性粒子が存在しない
ため、実装時において確実に半導体との電気的接続が可
能であり、かつ配線端子間の絶縁性も保持され、狭ピッ
チのプリント配線板端子へのフリップチップ実装におい
て高接続信頼性が可能となる。
According to this structure, the conductive particles are adhered only to the wiring terminals of the printed wiring board using the electrodeposition resin film as an adhesive layer, and no conductive particles exist between the adjacent wiring terminals. In addition, electrical connection with a semiconductor is possible, and insulation between the wiring terminals is maintained, so that high connection reliability is possible in flip-chip mounting on narrow-pitch printed wiring board terminals.

【0011】また、上記課題を解決するために本発明の
プリント配線板の製造方法は、電着法により配線端子上
に電着樹脂膜を直接形成し、前記電着樹脂膜表面に導電
性粒子を付着させる構成よりなる。
According to another aspect of the present invention, there is provided a method of manufacturing a printed wiring board, comprising: forming an electrodeposited resin film directly on a wiring terminal by an electrodeposition method; Is attached.

【0012】この構成により、電着法における通電部の
み選択的に電着樹脂膜を形成できるという利点を応用
し、非常に高い位置精度で電着樹脂膜を配線端子上に形
成可能であるため、狭ピッチのプリント配線板の配線端
子においても対応可能な製造方法である。
With this configuration, the advantage that the electrodeposited resin film can be selectively formed only in the energized portion in the electrodeposition method is applied, and the electrodeposited resin film can be formed on the wiring terminals with extremely high positional accuracy. This is a manufacturing method that can be applied to wiring terminals of a printed wiring board having a narrow pitch.

【0013】また、上記課題を解決するために本発明の
プリント配線板の製造方法は、電着基板上に所定形状の
電着樹脂膜を形成し、前記電着樹脂膜を配線端子上に転
写し、前記電着樹脂膜表面に導電性粒子を付着させる構
成よりなる。
According to another aspect of the present invention, there is provided a method of manufacturing a printed wiring board, comprising forming an electrodeposited resin film of a predetermined shape on an electrodeposited substrate, and transferring the electrodeposited resin film onto a wiring terminal. Then, the conductive particles are attached to the surface of the electrodeposited resin film.

【0014】この構成により、転写法におけるプリント
配線板の構造上最も凸である配線端子上面部に選択的に
電着樹脂膜を形成するという利点を応用し、電着基板の
粗い位置合わせだけで非常に高い位置精度で電着樹脂膜
を配線端子上面部に形成することができる。さらに、配
線端子のパターンの制約上、また工法の制約上、配線端
子に直接通電できず、前述の様な電着法では対応できな
い場合においても、転写法により電着樹脂膜を配線端子
上面部に形成することができる。以上のことから、多種
多様な狭ピッチのプリント配線板の配線端子においても
形成可能な製造方法となっている。
With this configuration, the advantage of selectively forming an electrodeposited resin film on the upper surface of the wiring terminal that is the most convex in the structure of the printed wiring board in the transfer method is applied, and only rough positioning of the electrodeposited substrate is required. The electrodeposition resin film can be formed on the upper surface of the wiring terminal with extremely high positional accuracy. Furthermore, even if the wiring terminals cannot be directly energized due to the restrictions of the wiring terminal pattern and the method of construction, and the electrodeposition method as described above cannot be used, the electrodeposition resin film is transferred by the transfer method to the upper surface of the wiring terminals. Can be formed. From the above, it is a manufacturing method that can be formed even on a wide variety of wiring terminals of a printed wiring board having a narrow pitch.

【0015】上記課題を解決するために本発明のプリン
ト配線板を用いた電子部品の接続方法は、配線端子上に
電着樹脂膜を形成し、前記電着樹脂膜表面に導電性粒子
を付着させたプリント配線板を用いて、前記導電性粒子
を絶縁性樹脂で被覆した後、電子部品に形成されたバン
プと前記プリント配線板の配線端子を前記導電性粒子を
介して導通させた状態で前記絶縁性樹脂にて電子部品を
固定接合する構成よりなる。
In order to solve the above-mentioned problems, a method for connecting an electronic component using a printed wiring board according to the present invention comprises forming an electrodeposited resin film on a wiring terminal and attaching conductive particles to the surface of the electrodeposited resin film. Using the printed wiring board, after covering the conductive particles with an insulating resin, in a state where the bumps formed on the electronic components and the wiring terminals of the printed wiring board are conducted through the conductive particles. The electronic component is fixedly joined with the insulating resin.

【0016】この構成により、予め、配線端子上に電着
樹脂膜を介して導電性粒子が付着させているという高接
続信頼性の構造を持つプリント配線板を用意し、絶縁性
樹脂を塗布し、電子部品を搭載するという、簡単な工程
で実装を完了するため、実装プロセスが簡略化でき、か
つ狭ピッチのプリント配線板の配線端子において高接続
信頼性を有する接続が可能な接続方法である。
According to this configuration, a printed wiring board having a highly reliable connection structure in which conductive particles are attached to wiring terminals via an electrodeposition resin film in advance is prepared, and an insulating resin is applied. This is a connection method capable of simplifying the mounting process because the mounting is completed in a simple process of mounting the electronic components, and having high connection reliability in the wiring terminals of the narrow pitch printed wiring board. .

【0017】[0017]

【発明の実施の形態】本発明の請求項1に記載のプリン
ト配線板は、配線端子上に電着樹脂膜を形成し、電着樹
脂膜表面に導電性粒子を付着させたこと、を備えた構成
よりなる。この構成により、電着樹脂膜を接着層として
プリント配線板の配線端子上のみに導電性粒子が付着さ
れているため、実装時において確実に半導体との電気的
接続が可能である。また、この構成により、隣接する配
線端子間には導電性粒子が存在しないため、配線端子間
の絶縁性が保持できるという作用を有する。
A printed wiring board according to a first aspect of the present invention includes an electrodeposition resin film formed on a wiring terminal, and conductive particles adhered to the surface of the electrodeposition resin film. It consists of a configuration. According to this configuration, since the conductive particles are attached only to the wiring terminals of the printed wiring board using the electrodeposition resin film as an adhesive layer, the electrical connection with the semiconductor can be reliably performed at the time of mounting. Further, according to this configuration, since there is no conductive particle between the adjacent wiring terminals, there is an effect that insulation between the wiring terminals can be maintained.

【0018】本発明の請求項2に記載のプリント配線板
の製造方法は、電着法により配線端子上に電着樹脂膜を
直接形成し、電着樹脂膜表面に導電性粒子を付着させる
こと、を備えたものである。この構成により、電着法に
おける通電部のみ選択的に電着樹脂膜を形成できるとい
う利点を応用し、非常に高い位置精度で電着樹脂膜を配
線端子上に形成できるという作用を有する。
According to a second aspect of the present invention, there is provided a method of manufacturing a printed wiring board, comprising: forming an electrodeposited resin film directly on a wiring terminal by an electrodeposition method; and attaching conductive particles to the surface of the electrodeposited resin film. , Is provided. With this configuration, the advantage that the electrodeposited resin film can be selectively formed only in the energized portion in the electrodeposition method is applied, and the electrodeposited resin film can be formed on the wiring terminals with extremely high positional accuracy.

【0019】本発明の請求項3に記載のプリント配線板
の製造方法は、電着基板上に所定形状の電着樹脂膜を形
成し、電着樹脂膜を配線端子上に転写し、電着樹脂膜表
面に導電性粒子を付着させること、を備えたものであ
る。この構成により、電着樹脂膜が形成された電着基板
と配線端子部を接触させるという転写機構を用いること
で、プリント配線板の構造上最も凸である配線端子上面
部に選択的に電着樹脂膜を形成することができ、電着基
板の粗い位置合わせだけで非常に高い位置精度で電着樹
脂膜を配線端子上面部に形成することができる。さら
に、配線端子のパターンの制約上、また工法の制約上、
配線端子に直接通電できない場合においても、転写法に
より電着樹脂膜を配線端子上面部に形成することができ
るという作用を有する。
According to a third aspect of the present invention, there is provided a method for manufacturing a printed wiring board, comprising: forming an electrodeposited resin film having a predetermined shape on an electrodeposited substrate; transferring the electrodeposited resin film onto a wiring terminal; Attaching conductive particles to the surface of the resin film. With this configuration, by using a transfer mechanism of bringing the electrodeposited substrate on which the electrodeposited resin film is formed into contact with the wiring terminal portion, the electrodeposited substrate is selectively electrodeposited on the wiring terminal upper surface portion which is the most convex in the structure of the printed wiring board. The resin film can be formed, and the electrodeposited resin film can be formed on the upper surface of the wiring terminal with very high positional accuracy only by rough alignment of the electrodeposited substrate. In addition, due to restrictions on wiring terminal patterns and construction methods,
Even when the electric current cannot be directly supplied to the wiring terminal, the electrodeposition resin film can be formed on the upper surface of the wiring terminal by the transfer method.

【0020】本発明の請求項4に記載のプリント配線板
の製造方法は、請求項2,3に記載の発明において、導
電性粒子を付着させる方法として、メッキ原版上にパタ
ーンメッキにて所定形状の導電性粒子を形成し、導電性
粒子を電着樹脂膜表面に転写すること、を備えたもので
ある。この構成により、導電性粒子を電着樹脂膜表面に
転写し形成することで、配線端子上面部のみに導電性粒
子を選択的に形成することができ、メッキ原版の粗い位
置合わせだけで非常に高い位置精度で電着樹脂膜を配線
端子上面部に形成することができるという作用を有す
る。
According to a fourth aspect of the present invention, there is provided a method of manufacturing a printed wiring board according to the second or third aspect of the invention, wherein the conductive particles are adhered on the original plate by pattern plating in a predetermined shape. And transferring the conductive particles to the surface of the electrodeposited resin film. With this configuration, the conductive particles can be selectively formed only on the upper surface of the wiring terminal by transferring and forming the conductive particles on the surface of the electrodeposited resin film. This has the effect that the electrodeposition resin film can be formed on the upper surface of the wiring terminal with high positional accuracy.

【0021】本発明の請求項5に記載のプリント配線板
の製造方法は、請求項2,3に記載の発明において、導
電性粒子を付着させる方法として、金属箔をパターンエ
ッチングして所定形状の導電性粒子を形成し、導電性粒
子を電着樹脂膜表面に転写すること、を備えたものであ
る。この構成により、導電性粒子を電着樹脂膜表面に転
写し形成することで、配線端子上面部のみに導電性粒子
を選択的に形成することができ、転写用原版の粗い位置
合わせだけで非常に高い位置精度で電着樹脂膜を配線端
子上面部に形成することができるという作用を有する。
According to a fifth aspect of the present invention, there is provided a method for manufacturing a printed wiring board according to the second or third aspect, wherein the conductive foil is adhered by pattern etching a metal foil to a predetermined shape. Forming conductive particles and transferring the conductive particles to the surface of the electrodeposited resin film. With this configuration, the conductive particles can be selectively formed only on the upper surface of the wiring terminal by transferring and forming the conductive particles on the surface of the electrodeposited resin film. The electrodeposition resin film can be formed on the upper surface of the wiring terminal with high positional accuracy.

【0022】本発明の請求項6に記載の半導体の実装方
法は、配線端子上に電着樹脂膜を形成し、電着樹脂膜表
面に導電性粒子を付着させたプリント配線板を用いて、
導電性粒子を絶縁性樹脂で被覆した後、電子部品に形成
されたバンプとプリント配線板の配線端子を導電性粒子
を介して導通させた状態で絶縁性樹脂にて電子部品を固
定接合すること、を備えたものである。この構成によ
り、この構成により、予め、配線端子上に電着樹脂膜を
介して導電性粒子が付着させているという高接続信頼性
の構造を持つプリント配線板を用意し、絶縁性樹脂を塗
布し、電子部品を搭載するという、簡単な工程で実装を
完了するため、実装プロセスのタクトが短縮できるとい
う作用を有する。
According to a sixth aspect of the present invention, there is provided a method of mounting a semiconductor device, comprising: forming an electrodeposited resin film on a wiring terminal; and using a printed wiring board having conductive particles adhered to the surface of the electrodeposited resin film.
After covering the conductive particles with the insulating resin, the electronic component is fixedly joined with the insulating resin in a state where the bumps formed on the electronic component and the wiring terminals of the printed wiring board are conducted through the conductive particles. , Is provided. According to this configuration, a printed wiring board having a high connection reliability structure in which conductive particles are previously attached to the wiring terminals via an electrodeposition resin film is prepared, and an insulating resin is applied. In addition, since mounting is completed in a simple process of mounting electronic components, the tact of the mounting process can be shortened.

【0023】本発明の請求項7に記載の電子部品の接続
方法は、配線端子上に電着樹脂膜を形成し、電着樹脂膜
表面に導電性粒子を付着させたプリント配線板を用い
て、導電性粒子を絶縁性樹脂で被覆した後、電子部品に
形成された配線端子とプリント配線板の配線端子を導電
性粒子を介して導通させた状態で絶縁性樹脂にて電子部
品を固定接合すること、を備えたものである。この構成
により、この構成により、予め、配線端子上に電着樹脂
膜を介して導電性粒子が付着させているという高接続信
頼性の構造を持つプリント配線板を用意し、絶縁性樹脂
を塗布し、電子部品を搭載するという、簡単な工程で実
装を完了するため、実装プロセスのタクトが短縮できる
という作用を有する。
According to a seventh aspect of the present invention, there is provided a method for connecting an electronic component using a printed wiring board having an electrodeposited resin film formed on a wiring terminal and conductive particles adhered to the surface of the electrodeposited resin film. After covering the conductive particles with the insulating resin, the electronic component is fixedly joined with the insulating resin in a state where the wiring terminals formed on the electronic component and the wiring terminals of the printed wiring board are conducted through the conductive particles. To do. According to this configuration, a printed wiring board having a high connection reliability structure in which conductive particles are previously attached to the wiring terminals via an electrodeposition resin film is prepared, and an insulating resin is applied. In addition, since mounting is completed in a simple process of mounting electronic components, the tact of the mounting process can be shortened.

【0024】以下本発明の一実施の形態について図1か
ら図5を用いて説明する。なお、これらの図面において
同一の部材には同一の符号を付しており、重複した説明
は省略させている。また、実施の形態において示されて
いる数値は種々選択し得る中の一例であり、これに限定
されるものではない。
An embodiment of the present invention will be described below with reference to FIGS. In these drawings, the same members are denoted by the same reference numerals, and redundant description is omitted. Further, the numerical values shown in the embodiments are examples of various types that can be selected, and the present invention is not limited to these.

【0025】(実施の形態)以下に本発明の一実施の形
態のプリント配線板について説明する。
(Embodiment) A printed wiring board according to an embodiment of the present invention will be described below.

【0026】まず、本発明のプリント配線板について図
1で説明する。図1(a)は本発明の一実施の形態にお
けるプリント配線板の斜視断面図、図1(b)は本発明
の一実施の形態におけるプリント配線板の要部断面図で
ある。
First, the printed wiring board of the present invention will be described with reference to FIG. FIG. 1A is a perspective sectional view of a printed wiring board according to an embodiment of the present invention, and FIG. 1B is a sectional view of a main part of the printed wiring board according to the embodiment of the present invention.

【0027】図1(a)、図1(b)において、1はポ
リイミド材のベースフィルム、2はベースフィルム1表
面に銅配線5を貼り付けるための接着層、3は銅配線5
表面上に電着樹脂膜6を介して導電性粒子7が付着され
ている構造からなる配線端子であり、配線端子3の上面
部のみに導電性粒子7が付着されている。さらに、4は
配線端子3の保護を行うためのポリイミド材のカバーフ
ィルムであり、この開口部分に半導体等の電子部品が実
装される。
1 (a) and 1 (b), reference numeral 1 denotes a polyimide base film, 2 denotes an adhesive layer for attaching a copper wiring 5 to the surface of the base film 1, and 3 denotes a copper wiring 5.
This is a wiring terminal having a structure in which conductive particles 7 are attached on the surface via an electrodeposition resin film 6, and the conductive particles 7 are attached only to the upper surface of the wiring terminal 3. Further, reference numeral 4 denotes a cover film made of a polyimide material for protecting the wiring terminals 3, and electronic parts such as semiconductors are mounted in the openings.

【0028】図1(b)に示すように、電着樹脂膜6を
接着層として配線端子3の上面部のみに導電性粒子7を
付着させているため、後述する半導体のフリップチップ
実装において確実に半導体との電気的接続が可能であ
り、配線端子とバンプ間の接続抵抗値の増加や導通不良
を回避できる。さらに、隣接する配線端子間には導電性
粒子7が存在しない構造であるため、配線端子間の絶縁
性が保持され、半導体のフリップチップ実装において配
線端子間での電気的ショート不良を回避できる。従っ
て、狭ピッチのプリント配線板端子へのフリップチップ
実装においても高接続信頼性が可能となる。
As shown in FIG. 1B, the conductive particles 7 are adhered only to the upper surface of the wiring terminal 3 using the electrodeposition resin film 6 as an adhesive layer, so that it is ensured in flip chip mounting of a semiconductor described later. Electrical connection with the semiconductor is possible, and an increase in the connection resistance value between the wiring terminal and the bump and poor conduction can be avoided. Furthermore, since the structure is such that the conductive particles 7 do not exist between adjacent wiring terminals, insulation between the wiring terminals is maintained, and an electrical short failure between the wiring terminals in flip-chip mounting of a semiconductor can be avoided. Therefore, high connection reliability can be achieved even in flip-chip mounting on a narrow-pitch printed wiring board terminal.

【0029】次に、この様なプリント配線板の製造方法
について図2、図3及び図4を用いて更に詳しく説明す
る。尚、図1と同じ符号のものは図2、図3及び図4に
おいても基本的に同一であるためここでは説明を省略す
る。
Next, a method of manufacturing such a printed wiring board will be described in more detail with reference to FIGS. 2, 3 and 4. The same reference numerals as those in FIG. 1 are basically the same in FIG. 2, FIG. 3, and FIG.

【0030】最初に、電着樹脂膜を配線端子上に形成す
る工程について図2を用いて説明する。図2(a)は本
発明の一実施の形態における電着樹脂膜を形成前のプリ
ント配線板の要部断面図、図2(b)は本発明の一実施
の形態における電着樹脂膜を形成する要部断面図、図2
(c)は本発明の一実施の形態における電着樹脂膜が形
成されたプリント配線板の要部断面図である。
First, a step of forming an electrodeposited resin film on a wiring terminal will be described with reference to FIG. FIG. 2A is a cross-sectional view of a main part of a printed wiring board before an electrodeposition resin film according to an embodiment of the present invention is formed, and FIG. 2B is a sectional view of the electrodeposition resin film according to the embodiment of the present invention. Sectional view of main part to be formed, FIG. 2
FIG. 3C is a cross-sectional view of a principal part of the printed wiring board on which the electrodeposition resin film according to the embodiment of the present invention is formed.

【0031】図2において、8は電着液であり、本実施
の形態においては陽極上に析出するアクリル系アニオン
型電着樹脂液を例示している。尚、好適に応じ、アニオ
ン型電着樹脂液以外にカチオン型電着樹脂液を使用して
も良く、電着樹脂液の主成分としては、アクリル系樹脂
あるいは、エポキシ系樹脂あるいは、ポリイミド系樹脂
等がある。また、電着樹脂液の中に顔料あるいは、セラ
ミック粉あるいは、金属粉などを混入し、形成される電
着樹脂膜の透過率、熱膨張率、誘電率、絶縁耐圧等の各
種特性を調整することも可能である。
In FIG. 2, reference numeral 8 denotes an electrodeposition solution, and in this embodiment, an acrylic anion-type electrodeposition resin solution deposited on an anode is exemplified. In addition, suitably, a cationic electrodeposition resin liquid may be used in addition to the anion electrodeposition resin liquid, and the main component of the electrodeposition resin liquid is an acrylic resin, an epoxy resin, or a polyimide resin. Etc. In addition, a pigment, ceramic powder, metal powder, or the like is mixed into the electrodeposition resin liquid to adjust various characteristics of the formed electrodeposition resin film, such as transmittance, thermal expansion coefficient, dielectric constant, and dielectric strength. It is also possible.

【0032】まず、図2(a)に示すように、ベースフ
ィルム1表面に接着層2を介してカバーフィルム4と銅
配線5が形成されたプリント配線板を準備する。尚、こ
のプリント配線板については、接着層2が無い屈曲性の
優れた無接着剤タイプのプリント配線板でも良い。ま
た、銅配線5表面の酸化を防ぐため、銅配線5表面に金
属メッキ処理や防錆剤塗布が施されていても何ら問題は
無く、種々様々な構造のプリント配線板にも適応可能で
ある。
First, as shown in FIG. 2A, a printed wiring board having a cover film 4 and a copper wiring 5 formed on the surface of a base film 1 with an adhesive layer 2 interposed therebetween is prepared. The printed wiring board may be a non-adhesive type printed wiring board having no adhesive layer 2 and excellent flexibility. Further, in order to prevent the surface of the copper wiring 5 from being oxidized, there is no problem even if the surface of the copper wiring 5 is subjected to a metal plating treatment or a rust preventive agent application, and it is applicable to printed wiring boards having various structures. .

【0033】次に、図2(b)に示すように、電着液8
中にて未硬化状態の電着樹脂膜6を銅配線5表面に直接
形成する。この電着樹脂からなる電着樹脂膜6は、アク
リル系アニオン型電着樹脂を電着して得られたもので、
その厚みは1μmである。ここで、電着樹脂6は未硬化
状態であるので、加熱することにより後述する導電性粒
子を付着させる際の接着層として使用することが可能と
なる。
Next, as shown in FIG.
An uncured electrodeposited resin film 6 is formed directly on the surface of the copper wiring 5 in the inside. The electrodeposition resin film 6 made of the electrodeposition resin is obtained by electrodeposition of an acrylic anion-type electrodeposition resin.
Its thickness is 1 μm. Here, since the electrodeposited resin 6 is in an uncured state, it can be used as an adhesive layer when conductive particles described later are adhered by heating.

【0034】最後に、余分な電着液を水洗することで、
図2(c)に示すように、銅配線5表面に電着樹脂膜6
が形成されたプリント配線板が得られる。
Finally, by washing the excess electrodeposition solution with water,
As shown in FIG. 2C, an electrodeposition resin film 6
Is obtained.

【0035】以上の様に、電着法における通電部のみ選
択的に電着樹脂膜を形成できるという利点を応用し、非
常に高い位置精度で電着樹脂膜を配線端子上に形成する
ことができる。通常、この様な樹脂膜を選択的に形成す
る方法としてスクリーン印刷やオフセット印刷等がある
が、形成される樹脂膜の位置精度は50μm程度が限界
である。即ち、これ以下のピッチ間隔を持つプリント配
線板の配線端子において配線端子部表面に選択的に樹脂
膜を塗布することは非常に難しく、適応できない可能性
がある。また、半導体の製造に用いられるフォトリソグ
ラフィ法も高い位置精度で感光性の樹脂膜を形成できる
方法であるが、樹脂膜自体に感光性を持たせているた
め、樹脂膜の材料上の制約が厳しく、且つ粘着性が伴わ
ないため、本発明に適応することは難しい。また、設備
自体も高価で工程も複雑である。以上のことから、本発
明は、通電された部分にのみ選択的に電着樹脂膜が形成
されるという電着法を用い、簡単な工程及び設備にて、
非常に高い位置精度で電着樹脂膜を配線端子上に形成す
ることができる方法であり、これにより狭ピッチのプリ
ント配線板の配線端子においても形成可能な製造方法と
なっている。
As described above, by applying the advantage that the electrodeposited resin film can be selectively formed only in the energized portion in the electrodeposition method, it is possible to form the electrodeposited resin film on the wiring terminals with extremely high positional accuracy. it can. Usually, there are screen printing, offset printing, and the like as a method for selectively forming such a resin film, but the positional accuracy of the formed resin film is limited to about 50 μm. That is, it is very difficult to selectively apply a resin film to the surface of a wiring terminal portion of a wiring terminal of a printed wiring board having a pitch interval smaller than this, which may not be applicable. The photolithography method used in the manufacture of semiconductors is also a method that can form a photosensitive resin film with high positional accuracy. However, since the resin film itself has photosensitivity, there are restrictions on the material of the resin film. It is difficult to adapt to the present invention because it is severe and does not have tackiness. Further, the equipment itself is expensive and the process is complicated. From the above, the present invention uses an electrodeposition method in which an electrodeposited resin film is selectively formed only on an energized portion, with simple steps and equipment,
This is a method in which an electrodeposited resin film can be formed on wiring terminals with extremely high positional accuracy, thereby providing a manufacturing method that can be formed even on wiring terminals of a printed wiring board having a narrow pitch.

【0036】同様に、電着樹脂膜を配線端子上に形成す
る他の方法について図3を用いて説明する。図3(a)
は本発明の一実施の形態における電着基板の断面図、図
3(b)は本発明の一実施の形態における電着基板上に
電着樹脂膜を形成する要部断面図、図3(c)は本発明
の一実施の形態における電着基板上の電着樹脂膜を転写
する要部断面図、図3(d)は本発明の一実施の形態に
おける電着樹脂膜が形成されたプリント配線板の要部断
面図である。
Similarly, another method of forming an electrodeposited resin film on a wiring terminal will be described with reference to FIG. FIG. 3 (a)
FIG. 3B is a cross-sectional view of an electrodeposited substrate according to an embodiment of the present invention, and FIG. 3B is a cross-sectional view of a main part of forming an electrodeposited resin film on the electrodeposited substrate according to an embodiment of the present invention. FIG. 3C is a cross-sectional view of a principal part of transferring an electrodeposited resin film on an electrodeposited substrate according to an embodiment of the present invention, and FIG. 3D is a diagram illustrating an electrodeposited resin film formed according to an embodiment of the present invention. It is principal part sectional drawing of a printed wiring board.

【0037】図3において、9は金属板10表面に剥離
層11が形成された電着基板であり、電着樹脂膜6の転
写用原版として利用される。ここで、剥離層11は電着
樹脂膜6を金属板10表面から容易に剥離させるための
ものであり、電着膜の転写においては不可欠な要素であ
る。
In FIG. 3, reference numeral 9 denotes an electrodeposited substrate in which a release layer 11 is formed on the surface of a metal plate 10 and is used as a transfer master of the electrodeposited resin film 6. Here, the peeling layer 11 is for easily peeling the electrodeposited resin film 6 from the surface of the metal plate 10, and is an essential element in transferring the electrodeposited film.

【0038】まず、図3(a)に示すように、塗布ロー
ラにて金属板10表面に剥離液を薄く塗布し、乾燥させ
剥離層11が形成された電着基板9を準備し、図3
(b)に示すように、電着液8中にて未硬化状態の電着
樹脂膜6を電着基板9表面に形成する。
First, as shown in FIG. 3 (a), a release liquid is thinly applied to the surface of the metal plate 10 by an application roller and dried to prepare an electrodeposited substrate 9 on which a release layer 11 is formed.
As shown in (b), an uncured electrodeposition resin film 6 is formed on the surface of the electrodeposition substrate 9 in the electrodeposition liquid 8.

【0039】次に、図3(c)に示すように、電着樹脂
膜6の形成された電着基板9を銅配線5上に位置合わせ
し、加圧加熱する。ここで、電着樹脂膜6は未硬化の状
態であり、熱が加えられることにより、粘着性が発現
し、更に加圧されることにより銅配線5上面部に付着す
る。
Next, as shown in FIG. 3C, the electrodeposited substrate 9 on which the electrodeposited resin film 6 is formed is positioned on the copper wiring 5, and heated under pressure. Here, the electrodeposited resin film 6 is in an uncured state, and exhibits adhesiveness when heat is applied, and adheres to the upper surface of the copper wiring 5 when further pressed.

【0040】最後に、冷却後電着基板9を除去すること
で、図3(d)に示すように、銅配線5上面部に電着樹
脂膜6が形成されたプリント配線板が得られる。尚、こ
こで使用された電着基板9は電着樹脂膜6をアルカリ溶
液にて洗浄後、再び図3(a)に戻って転写用原版とし
て繰り返し使用される。
Finally, after cooling, the electrodeposited substrate 9 is removed to obtain a printed wiring board having the electrodeposited resin film 6 formed on the upper surface of the copper wiring 5, as shown in FIG. The electrodeposited substrate 9 used here is used again as a transfer master after cleaning the electrodeposited resin film 6 with an alkaline solution and returning to FIG. 3A again.

【0041】以上の様に、プリント配線板の構造上最も
凸である配線端子上面部に選択的に電着樹脂膜を形成す
るという転写法を用い、電着基板の粗い位置合わせだけ
で非常に高い位置精度で電着樹脂膜を配線端子上面部に
形成することができる。さらに、配線端子のパターンの
制約上、また工法の制約上、配線端子に直接通電でき
ず、前述の様な電着法では対応できない場合において
も、転写法により電着樹脂膜を配線端子上面部に形成す
ることができる。以上のことから、多種多様な狭ピッチ
のプリント配線板の配線端子においても形成可能な製造
方法となっている。
As described above, the transfer method in which the electrodeposited resin film is selectively formed on the upper surface of the wiring terminal which is the most convex in the structure of the printed wiring board is used. The electrodeposition resin film can be formed on the upper surface of the wiring terminal with high positional accuracy. Further, even when the wiring terminals cannot be directly energized due to the restriction of the wiring terminal pattern and the method of construction, and the electrodeposition method as described above cannot be used, the electrodeposition resin film is transferred by the transfer method to the upper surface of the wiring terminal. Can be formed. From the above, it is a manufacturing method that can be formed even on a wide variety of wiring terminals of a printed wiring board having a narrow pitch.

【0042】最後に、導電性粒子を電着樹脂膜表面に付
着する工程について図4を用いて説明する。図4(a)
は本発明の一実施の形態におけるメッキ原版の断面図、
図4(b)は本発明の一実施の形態におけるメッキ原版
をパターンメッキする要部断面図、図4(c)は本発明
の一実施の形態におけるメッキ原版上の導電性粒子を転
写する要部断面図、4(d)は本発明の一実施の形態に
おける導電性粒子形成後のプリント配線板の要部断面図
である。
Finally, the step of attaching conductive particles to the surface of the electrodeposited resin film will be described with reference to FIG. FIG. 4 (a)
Is a cross-sectional view of a plating master in one embodiment of the present invention,
FIG. 4B is a cross-sectional view of a principal part for pattern-plating a plating master according to one embodiment of the present invention, and FIG. 4C is a cross-sectional view of a main part for transferring conductive particles on the plating master according to one embodiment of the present invention. FIG. 4D is a sectional view of a main part of the printed wiring board after the formation of the conductive particles according to the embodiment of the present invention.

【0043】図4において、12は金属板13表面に絶
縁性パターン膜14が形成されたメッキ原版であり、導
電性粒子7の転写用原版として利用される。さらに、1
5は導電性粒子7を形成する為のメッキ液である。尚、
使用されるメッキ液15の種類としてはNi、Cu、A
u、Ag、Sn等の金属メッキ液を種々選択することが
でき、これらのメッキ液を複数回用い、導電粒子7を金
属メッキ膜の積層構造で形成しても良い。
In FIG. 4, reference numeral 12 denotes a plating original plate having an insulating pattern film 14 formed on the surface of a metal plate 13 and is used as an original plate for transferring the conductive particles 7. In addition, 1
5 is a plating solution for forming the conductive particles 7. still,
The types of the plating solution 15 used are Ni, Cu, A
Various metal plating solutions such as u, Ag, and Sn can be selected, and these plating solutions may be used a plurality of times to form the conductive particles 7 in a laminated structure of a metal plating film.

【0044】まず、図4(a)に示すように、フォトリ
ソグラフィ法により所定形状の開口部を持つ絶縁性パタ
ーン膜14を金属板13表面に形成し、メッキ原版12
を準備し、図4(b)に示すように、メッキ液15中に
てメッキ原版12を通電し、メッキ原版12の開口部に
導電性粒子7を形成する。
First, as shown in FIG. 4A, an insulating pattern film 14 having an opening of a predetermined shape is formed on the surface of a metal plate 13 by a photolithography method.
As shown in FIG. 4B, the plating master 12 is energized in the plating solution 15 to form conductive particles 7 in the openings of the plating master 12.

【0045】次に、図4(c)に示すように、導電性粒
子7の形成されたメッキ原版12を、電着樹脂膜6が形
成された銅配線5上に位置合わせし、加圧加熱させる。
ここで、銅配線5表面の電着樹脂膜6は未硬化の状態で
あり、熱が加えられることにより、粘着性が発現し、更
に導電性粒子7が加圧されることにより電着樹脂膜6表
面に付着する。
Next, as shown in FIG. 4C, the plating original plate 12 on which the conductive particles 7 are formed is positioned on the copper wiring 5 on which the electrodeposited resin film 6 is formed, Let it.
Here, the electrodeposited resin film 6 on the surface of the copper wiring 5 is in an uncured state, and when heat is applied, tackiness is developed, and when the conductive particles 7 are further pressed, the electrodeposited resin film 6 is pressed. 6 Adhere to the surface.

【0046】最後に、メッキ原版12を除去すること
で、図4(d)に示すように、銅配線5上面部に電着樹
脂膜6を介して導電性粒子7が形成されたプリント配線
板が得られる。この際、上記メッキ転写の工程を所望回
数繰り返し、配線端子3上面部の面積に対する導電性粒
子7の被覆率を増加させると、後述する実装時において
確実に半導体との電気的接続が可能となり、なお良い。
また、ここで使用されたメッキ原版12は、図4(a)
に戻って転写用原版として繰り返し使用される。
Finally, by removing the plating master 12, as shown in FIG. 4D, a printed wiring board having conductive particles 7 formed on the upper surface of the copper wiring 5 via the electrodeposition resin film 6. Is obtained. At this time, if the plating transfer process is repeated a desired number of times to increase the coverage of the conductive particles 7 with respect to the area of the upper surface of the wiring terminal 3, electrical connection with the semiconductor can be reliably performed at the time of mounting, which will be described later. Still better.
Also, the plating original plate 12 used here is shown in FIG.
And used repeatedly as a transfer master.

【0047】以上の様に、プリント配線板の構造上最も
凸である配線端子上面部に選択的に導電性粒子を形成す
るという転写法の利点をうまく応用し、メッキ原版の粗
い位置合わせだけで非常に高い位置精度で導電性粒子を
配線端子上面部に形成することができ、狭ピッチのプリ
ント配線板の配線端子においても形成可能な製造方法と
なっている。
As described above, the advantage of the transfer method of selectively forming conductive particles on the upper surface of the wiring terminal, which is the most convex in the structure of the printed wiring board, is successfully applied, and only the rough positioning of the original plate is required. The conductive particles can be formed on the upper surface of the wiring terminal with extremely high positional accuracy, and the manufacturing method can be formed even on a wiring terminal of a printed wiring board having a narrow pitch.

【0048】また、転写法を用いることで、配線端子上
面部のみに導電性粒子を形成することができる。これに
より、後述する半導体のフリップチップ実装において確
実に半導体との電気的接続が可能であり、配線端子とバ
ンプ間の接続抵抗値の増加や導通不良を回避できる。さ
らに、隣接する配線端子間には導電性粒子が存在しない
構造であるため、配線端子間の絶縁性が保持され、半導
体のフリップチップ実装において配線端子間での電気的
ショート不良を回避できる。従って、狭ピッチのプリン
ト配線板端子へのフリップチップ実装においても高接続
信頼性が可能となる。
Further, by using the transfer method, conductive particles can be formed only on the upper surface of the wiring terminal. As a result, electrical connection with the semiconductor can be reliably performed in flip-chip mounting of the semiconductor, which will be described later, and an increase in the connection resistance value between the wiring terminal and the bump and poor conduction can be avoided. Further, since the structure has no conductive particles between adjacent wiring terminals, insulation between the wiring terminals is maintained, and an electrical short failure between the wiring terminals in flip-chip mounting of a semiconductor can be avoided. Therefore, high connection reliability can be achieved even in flip-chip mounting on a narrow-pitch printed wiring board terminal.

【0049】同様に、導電性粒子を配線端子上に形成す
る他の方法について以下に説明する。導電性粒子を付着
させる他の方法として、金属箔をパターンエッチングし
て所定形状の導電性粒子を形成し、前記導電性粒子を前
記電着樹脂膜表面に転写する方法を用いても良い。この
方法も転写法を用いる為、非常に高い位置精度で導電性
粒子を配線端子上面部に形成することができ、狭ピッチ
のプリント配線板の配線端子においても形成可能な製造
方法となっている。
Similarly, another method for forming conductive particles on wiring terminals will be described below. As another method of attaching the conductive particles, a method of pattern-etching a metal foil to form conductive particles having a predetermined shape and transferring the conductive particles to the surface of the electrodeposited resin film may be used. Since this method also uses a transfer method, the conductive particles can be formed on the upper surface of the wiring terminal with extremely high positional accuracy, and is a manufacturing method that can be formed even on a wiring terminal of a printed wiring board having a narrow pitch. .

【0050】また、導電性粒子を付着させる他の方法と
して、導電性粒子を電着樹脂膜表面に吹き付ける方法を
用いても良い。この方法は前述した導電性粒子の転写法
と比較して簡単な工程及び設備にて、非常に高い位置精
度で導電性粒子を配線端子上面部に形成することがで
き、狭ピッチのプリント配線板の配線端子において形成
可能な更に簡便な製造方法となっている。
As another method of attaching the conductive particles, a method of spraying the conductive particles on the surface of the electrodeposited resin film may be used. In this method, the conductive particles can be formed on the upper surface of the wiring terminal with very high positional accuracy by a simple process and equipment compared with the above-described conductive particle transfer method, and the printed wiring board has a narrow pitch. It is a simpler manufacturing method that can be formed in the wiring terminal.

【0051】次に、この様なプリント配線板を用いた半
導体の実装方法について図5を用いて説明する。尚、図
1、図2、図3及び図4と同じ符号のものは図5におい
ても基本的に同一であるためここでは説明を省略する。
Next, a method of mounting a semiconductor using such a printed wiring board will be described with reference to FIG. 1, 2, 3, and 4 are basically the same as those in FIG. 5, and a description thereof will be omitted.

【0052】最初に、本発明のプリント配線板を用いた
半導体の実装工程について図5を用いて説明する。図5
(a)は本発明の一実施の形態におけるプリント配線板
の要部断面図、図5(b)は本発明の一実施の形態にお
ける絶縁性樹脂を形成する要部断面図、図5(c)は本
発明の一実施の形態における半導体を実装する要部断面
図、図5(d)は本発明の一実施の形態における半導体
実装後の要部断面図である。
First, a semiconductor mounting process using the printed wiring board of the present invention will be described with reference to FIG. FIG.
5A is a cross-sectional view of a main part of a printed wiring board according to one embodiment of the present invention, FIG. 5B is a cross-sectional view of a main part forming an insulating resin according to one embodiment of the present invention, and FIG. 5) is a cross-sectional view of a main part for mounting a semiconductor according to an embodiment of the present invention, and FIG. 5D is a cross-sectional view of a main part after mounting the semiconductor according to the embodiment of the present invention.

【0053】図5において、16は接着性を有する絶縁
性樹脂、17は半導体のベアチップ18上の端子上にバ
ンプ19が形成された半導体である。尚、ここでは実装
部品として半導体を例示しているが、チップ抵抗、チッ
プコンデンサ、等の各種表面実装型部品を搭載しても良
く、またITO基板、フレキシブルプリント配線板等の
各種基板と接続させても良い。
In FIG. 5, reference numeral 16 denotes an insulating resin having adhesiveness, and reference numeral 17 denotes a semiconductor in which bumps 19 are formed on terminals on a semiconductor bare chip 18. Here, a semiconductor is exemplified as a mounting component, but various surface mounting components such as a chip resistor and a chip capacitor may be mounted, and the semiconductor device may be connected to various substrates such as an ITO substrate and a flexible printed wiring board. May be.

【0054】まず、図5(a)に示すように、本発明の
一実施の形態にて作製された銅配線5表面上に電着樹脂
膜6を介して導電性粒子7が付着されている配線端子3
を有するプリント配線板を準備し、図5(b)に示すよ
うに、ディスペンサーを用いて絶縁性樹脂16を塗布
し、配線端子3を被覆する。
First, as shown in FIG. 5A, conductive particles 7 are adhered via an electrodeposition resin film 6 on the surface of a copper wiring 5 manufactured in one embodiment of the present invention. Wiring terminal 3
Is prepared, and an insulating resin 16 is applied using a dispenser to cover the wiring terminals 3 as shown in FIG. 5B.

【0055】次に、図5(c)に示すように、バンプ1
9の形成された半導体17を配線端子3に対して位置合
わせし、加圧し密着させる。この際、半導体17上のバ
ンプ19が導電性粒子7を押し付け、電着樹脂膜6を破
り、銅配線5に完全に接触させる。これにより、半導体
17に形成されたバンプ19とプリント配線板の配線端
子3を導電性粒子7を介して完全に導通させた状態が得
られる。また、配線端子3間には導電性粒子7が全く存
在していない。以上のことから、実装時において確実に
半導体との電気的接続が可能であり、かつ配線端子間の
絶縁性も保持されており、高い接続信頼性が得られてい
る。
Next, as shown in FIG.
The semiconductor 17 on which the semiconductor substrate 9 is formed is aligned with the wiring terminal 3, and is pressurized and adhered. At this time, the bumps 19 on the semiconductor 17 press the conductive particles 7 to break the electrodeposited resin film 6 and bring the copper particles 5 into complete contact. As a result, a state is obtained in which the bumps 19 formed on the semiconductor 17 and the wiring terminals 3 of the printed wiring board are completely conducted through the conductive particles 7. Further, no conductive particles 7 exist between the wiring terminals 3. From the above, the electrical connection with the semiconductor can be reliably performed at the time of mounting, the insulation between the wiring terminals is maintained, and high connection reliability is obtained.

【0056】最後に、図5(d)に示すように絶縁性樹
脂16を加熱硬化させて半導体17を完全に固定接合す
る。これにより、接合部は硬化された絶縁性樹脂16で
保護されるため、高い信頼性を得る事ができる。
Finally, as shown in FIG. 5D, the insulating resin 16 is cured by heating to completely fix and bond the semiconductor 17. As a result, the bonding portion is protected by the cured insulating resin 16, so that high reliability can be obtained.

【0057】以上のことから、予め、配線端子上に電着
樹脂膜を介して導電性粒子が付着させているという高接
続信頼性の構造を持つプリント配線板を用意し、絶縁性
樹脂を塗布し、半導体チップを搭載するという、簡単な
工程で実装を完了するため、実装プロセスが簡略化で
き、かつ狭ピッチのプリント配線板の配線端子において
高接続信頼性を有する接続が可能な実装方法である。
In view of the above, a printed wiring board having a highly reliable connection structure in which conductive particles are attached to wiring terminals via an electrodeposition resin film in advance is prepared, and an insulating resin is applied. However, since the mounting is completed in a simple process of mounting the semiconductor chip, the mounting process can be simplified, and a mounting method capable of connecting with high connection reliability at the wiring terminals of the narrow pitch printed wiring board. is there.

【0058】[0058]

【発明の効果】本発明の請求項1に記載のプリント配線
板は、実装時において確実に半導体との電気的接続が可
能であり、かつ配線端子間の絶縁性も保持され、狭ピッ
チのプリント配線板端子へのフリップチップ実装におい
て高接続信頼性を有するプリント配線板が得られるとい
う効果がある。
According to the printed wiring board of the first aspect of the present invention, the electrical connection with the semiconductor can be reliably performed at the time of mounting, the insulation between the wiring terminals is maintained, and the printed wiring board having a narrow pitch is provided. In flip-chip mounting on a wiring board terminal, there is an effect that a printed wiring board having high connection reliability can be obtained.

【0059】本発明の請求項2から5に記載のプリント
配線板の製造方法は、電着法及び転写法を利用し、非常
に高い位置精度で電着樹脂膜及び導電性粒子を配線端子
上に形成可能であるため、狭ピッチのプリント配線板の
配線端子上に高接続信頼性の接続手段を有するプリント
配線板を製造できるという効果がある。
The method for manufacturing a printed wiring board according to claims 2 to 5 of the present invention utilizes an electrodeposition method and a transfer method to deposit an electrodeposited resin film and conductive particles on wiring terminals with extremely high positional accuracy. Therefore, there is an effect that a printed wiring board having a connection means having high connection reliability on a wiring terminal of the printed wiring board having a narrow pitch can be manufactured.

【0060】本発明の請求項6から7に記載のプリント
配線板を用いた電子部品の接続方法は、簡単な工程で実
装を完了するため、実装プロセスが簡略化でき、かつ狭
ピッチのプリント配線板の配線端子において高接続信頼
性を有する接続が可能な実装方法が得られるという効果
がある。
According to the method for connecting electronic components using the printed wiring board according to claims 6 and 7 of the present invention, mounting is completed in a simple process, so that the mounting process can be simplified and a narrow pitch printed wiring is provided. There is an effect that a mounting method capable of connecting with high connection reliability at the wiring terminals of the board is obtained.

【0061】そして、本発明は、実装プロセスの簡便性
を損なうこと無く、狭ピッチのプリント配線板配線端子
へのフリップチップ実装を高接続信頼性で可能とする接
続手段を有するプリント配線板及びその製造方法並びに
それを用いた電子部品の接続方法を提供することができ
るものである。
The present invention also relates to a printed wiring board having connection means for enabling flip-chip mounting on a printed wiring board wiring terminal of a narrow pitch with high connection reliability without impairing the simplicity of the mounting process, and a printed circuit board having the same. It is possible to provide a manufacturing method and a method for connecting electronic components using the same.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態におけるプリント配線板
の断面図
FIG. 1 is a cross-sectional view of a printed wiring board according to an embodiment of the present invention.

【図2】本発明の一実施の形態におけるプリント配線板
に電着樹脂膜を直接形成する工程の要部断面図
FIG. 2 is an essential part cross-sectional view of a step of directly forming an electrodeposition resin film on a printed wiring board in one embodiment of the present invention.

【図3】本発明の一実施の形態における電着基板上の電
着樹脂膜をプリント配線板に転写する工程の要部断面図
FIG. 3 is an essential part cross-sectional view of a step of transferring an electrodeposited resin film on an electrodeposited substrate to a printed wiring board in one embodiment of the present invention.

【図4】本発明の一実施の形態におけるメッキ原版上の
導電性粒子をプリント配線板に転写する工程の要部断面
FIG. 4 is an essential part cross-sectional view of a step of transferring conductive particles on a plating original plate to a printed wiring board in one embodiment of the present invention.

【図5】本発明の一実施の形態におけるプリント配線板
に半導体を実装する工程の要部断面図
FIG. 5 is an essential part cross-sectional view of a step of mounting a semiconductor on a printed wiring board according to one embodiment of the present invention;

【符号の説明】[Explanation of symbols]

1 ベースフィルム 2 接着層 3 配線端子 4 カバーフィルム 5 銅配線 6 電着樹脂膜 7 導電性粒子 8 電着液 9 電着基板 10 金属板 11 剥離層 12 メッキ原版 13 金属板 14 絶縁性パターン膜 15 メッキ液 16 絶縁性樹脂 17 半導体 18 ベアチップ 19 バンプ REFERENCE SIGNS LIST 1 base film 2 adhesive layer 3 wiring terminal 4 cover film 5 copper wiring 6 electrodeposition resin film 7 conductive particles 8 electrodeposition liquid 9 electrodeposition substrate 10 metal plate 11 release layer 12 plating original plate 13 metal plate 14 insulating pattern film 15 Plating solution 16 Insulating resin 17 Semiconductor 18 Bare chip 19 Bump

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5E319 AA03 AB01 AC01 AC16 BB11 CC61 CD04 CD25 GG01 GG09 5F044 KK03 KK18 KK19 LL09 RR19 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5E319 AA03 AB01 AC01 AC16 BB11 CC61 CD04 CD25 GG01 GG09 5F044 KK03 KK18 KK19 LL09 RR19

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】配線端子上に電着樹脂膜を形成し、前記電
着樹脂膜表面に導電性粒子を付着させたことを特徴とす
るプリント配線板。
1. A printed wiring board comprising: an electrodeposited resin film formed on a wiring terminal; and conductive particles adhered to the surface of the electrodeposited resin film.
【請求項2】電着法により配線端子上に電着樹脂膜を直
接形成し、前記電着樹脂膜表面に導電性粒子を付着させ
ることを特徴とするプリント配線板の製造方法。
2. A method for manufacturing a printed wiring board, comprising: forming an electrodeposited resin film directly on a wiring terminal by an electrodeposition method; and attaching conductive particles to the surface of the electrodeposited resin film.
【請求項3】電着基板上に所定形状の電着樹脂膜を形成
し、前記電着樹脂膜を配線端子上に転写し、前記電着樹
脂膜表面に導電性粒子を付着させることを特徴とするプ
リント配線板の製造方法。
3. An electrodeposited resin film having a predetermined shape is formed on an electrodeposited substrate, the electrodeposited resin film is transferred onto a wiring terminal, and conductive particles are attached to the surface of the electrodeposited resin film. Manufacturing method of a printed wiring board.
【請求項4】前記導電性粒子を付着させる方法として、
メッキ原版上にパターンメッキにて所定形状の導電性粒
子を形成し、前記導電性粒子を前記電着樹脂膜表面に転
写することを特徴とする請求項2,3いずれか1記載の
プリント配線板の製造方法。
4. A method for adhering the conductive particles,
4. The printed wiring board according to claim 2, wherein conductive particles having a predetermined shape are formed on the plating original plate by pattern plating, and the conductive particles are transferred to the surface of the electrodeposited resin film. Manufacturing method.
【請求項5】前記導電性粒子を付着させる方法として、
金属箔をパターンエッチングして所定形状の導電性粒子
を形成し、前記導電性粒子を前記電着樹脂膜表面に転写
することを特徴とする請求項2,3いずれか1記載のプ
リント配線板の製造方法。
5. A method for adhering the conductive particles,
4. The printed wiring board according to claim 2, wherein the metal foil is pattern-etched to form conductive particles having a predetermined shape, and the conductive particles are transferred to the surface of the electrodeposited resin film. Production method.
【請求項6】配線端子上に電着樹脂膜を形成し、前記電
着樹脂膜表面に導電性粒子を付着させたプリント配線板
を用いて、前記導電性粒子を絶縁性樹脂で被覆した後、
電子部品に形成されたバンプと前記プリント配線板の配
線端子を前記導電性粒子を介して導通させた状態で前記
絶縁性樹脂にて固定接合することを特徴とする電子部品
の接続方法。
6. An electro-deposited resin film is formed on a wiring terminal, and the conductive particles are coated with an insulating resin using a printed wiring board having conductive particles adhered to the surface of the electrodeposited resin film. ,
A method of connecting electronic components, wherein the bumps formed on the electronic components and the wiring terminals of the printed wiring board are fixedly joined with the insulating resin in a state where the bumps are made conductive through the conductive particles.
【請求項7】配線端子上に電着樹脂膜を形成し、前記電
着樹脂膜表面に導電性粒子を付着させたプリント配線板
を用いて、前記導電性粒子を絶縁性樹脂で被覆した後、
電子部品に形成された配線端子と前記プリント配線板の
配線端子を前記導電性粒子を介して導通させた状態で前
記絶縁性樹脂にて固定接合することを特徴とする電子部
品の接続方法。
7. A method in which an electrodeposited resin film is formed on a wiring terminal, and the conductive particles are coated with an insulating resin using a printed wiring board having conductive particles adhered to the surface of the electrodeposited resin film. ,
A method of connecting an electronic component, wherein a wiring terminal formed on the electronic component and a wiring terminal of the printed wiring board are fixedly joined to each other with the insulating resin in a state where the wiring terminal is electrically connected through the conductive particles.
JP2001137026A 2001-05-08 2001-05-08 Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same Pending JP2002335070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001137026A JP2002335070A (en) 2001-05-08 2001-05-08 Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001137026A JP2002335070A (en) 2001-05-08 2001-05-08 Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same

Publications (1)

Publication Number Publication Date
JP2002335070A true JP2002335070A (en) 2002-11-22

Family

ID=18984189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001137026A Pending JP2002335070A (en) 2001-05-08 2001-05-08 Printed circuit board and its manufacturing method as well as method for connecting electronic component using the same

Country Status (1)

Country Link
JP (1) JP2002335070A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006060065A (en) * 2004-08-20 2006-03-02 Mitsubishi Electric Corp Semiconductor device and method for manufacturing the same
WO2007058897A1 (en) * 2005-11-15 2007-05-24 3M Innovative Properties Company Method for connecting printed circuit boards

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006060065A (en) * 2004-08-20 2006-03-02 Mitsubishi Electric Corp Semiconductor device and method for manufacturing the same
WO2007058897A1 (en) * 2005-11-15 2007-05-24 3M Innovative Properties Company Method for connecting printed circuit boards

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