JP2002332956A - Film type actuator, and liquid-filled vibration control device and fluid controller using actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lightweight compact inexpensive film-type actuator capable of remarkably expanding a range of application by enlarging the displacement and a working range while keeping the characteristics such as responsiveness and environmental resistance. SOLUTION: This film-type actuator A is formed by using a high molecular actuator element 1 having an ion exchange resin molded plate 1A capable of being curved and deformed by applying the electric potential difference, and placing an elastic film 3 having an area larger than the high molecular actuator element 1, and displaceable in the same direction in accompany with curving and deforming motion of a free end part 1a of the ion exchange resin molded plate 1A, in a state of covering the high molecular actuator element 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a membrane actuator using a polymer actuator element having a curved and deformable ion exchange resin molded plate as an operation main part, and a membrane actuator using the same as an automobile engine. A liquid filled type vibration damping device used as a movable part of a vibration damping device such as a mount and a membrane type actuator thereof are used as a movable element for controlling a fluid flow in a fluid device such as a valve or a pump. The present invention relates to a fluid control device.

[0002]

2. Description of the Related Art An actuator which is lightweight, compact, inexpensive, and excellent in power saving, responsiveness, environmental resistance and the like is disclosed in, for example, JP-A-6-6991 and JP-A-10-206162.
As disclosed in Japanese Unexamined Patent Publication (Kokai) No. H10-207, a polymer actuator element in which a potential difference is applied to an ion-exchange resin molded plate in a hydrated state to cause the ion-exchange resin molded plate to bend and deform has been conventionally proposed. ing. Further, as an applied device configured by using the polymer actuator element for a movable portion, for example, Japanese Patent Application Laid-Open No. 8-1033
As disclosed in Japanese Patent Application Laid-Open No. 6-288, medical tubes such as a blood vessel insertion catheter and an introduction portion of an endoscope, or, for example, Japanese Patent Application Laid-Open Nos. 6-288606 and 9-137.
As disclosed in Japanese Patent Application Laid-Open No. 872 and the like, a fluid control device that performs fluid control such as diversion of a fluid flow and opening and closing of a fluid passage has been conventionally proposed.

[0003]

However, the conventionally proposed polymer actuator element cannot perform a large-area displacement by itself, and in order to increase the displacement area, both ends of the element are required. It is necessary to fix the element or to fix the entire circumference of the element. If such a fixing means is employed, the amount of displacement is reduced and only a very small amount of displacement can be obtained. Therefore, it is lightweight, compact, inexpensive, operates responsively with low power, can operate in various liquids and air, and has excellent environmental resistance, but its application range Is
As is clear from the above-described application devices, a very small medical tube that can pass through a blood vessel, a movable portion for a device having a minute and minute operation range such as a fluid control device that minutely controls a fluid in units of μl, and the like. However, it cannot be used as a movable part or the like of a device having a large operation range, and the application of a polymer actuator element having excellent characteristics is naturally restricted to a narrow range.

[0004] The present invention has been made in view of the above-mentioned circumstances, and the displacement amount and displacement area can be expanded without losing the original characteristics of the polymer actuator element such as responsiveness and environmental resistance. It is a main object to provide a film-type actuator that can be significantly expanded.

Another object of the present invention is to provide a liquid-filled type that can effectively utilize the above-mentioned film-type actuator having a wide application range to improve the vibration damping effect against vibrations in a wide frequency range and to make it compact. An object of the present invention is to provide a vibration isolator.

Another object of the present invention is to make effective use of the film-type actuator having a wide application range as described above.
An object of the present invention is to provide a fluid control device capable of improving control performance as well as expanding a control range of a fluid flow.

[0007]

According to a first aspect of the present invention, there is provided a membrane actuator according to the first aspect of the present invention, wherein a potential difference is applied to an ion-exchange resin molded plate in a water-containing state by applying a potential difference thereto. A polymer actuator element in which a resin molded plate is configured to be able to bend and deform, and one end of the ion exchange resin molded plate that is arranged in an electrically insulated state on both sides of the polymer actuator element to bend and deform. A pair of electrodes that sandwich and hold the other end of the ion-exchange resin molded plate from both sides so as to be ends, and a free end of the ion-exchange resin molded plate that has a larger area than the polymer actuator element. And an elastic film disposed so as to be displaceable in the same direction as the bending deformation operation on the part side.

According to the first aspect of the present invention, the pair of electrodes in the polymer actuator element are energized to apply a potential difference to both surfaces of the ion-exchange resin molded plate in a water-containing state. The movement of water molecules accompanying the movement of ions inside causes a difference in the amount of water on both sides, so that the free end of the ion-exchange resin molded plate is bent and deformed with the other end as a fulcrum. With such a bending deformation operation of the polymer actuator element,
The elastic film having an area larger than this is displaced in the same direction, and it is possible to secure a large displacement amount and a displacement range (area) for the entire actuator.

In the above-mentioned membrane type actuator, the shape, arrangement, number of used and the shape and size (area) of the elastic membrane of the ion exchange resin molded plate in the polymer actuator element.
Although it is possible to freely set such as according to the purpose and use, in particular, as described in claim 2, a plurality of polymer actuator elements are formed on the free end side of each ion exchange resin molded plate. By adopting a configuration in which the other end sides of the respective ion-exchange resin molded plates are fixed and held by a pair of annular electrodes integrally connected to each other, the entire membrane actuator is arranged. While minimizing and reducing the weight as much as possible, with each free end of the ion exchange resin molded plate in the plurality of polymer actuator elements being bent and deformed in abutting and assembled state, the elastic film is enlarged over a wide area range, And it can be displaced by a strong force.

Further, as the ion exchange resin molded plate constituting the polymer actuator element in the above-mentioned membrane type actuator, one formed of a polymer electrolyte material may be used. In this case, the ion-exchange resin molded plate is swollen in a space defined by the ion-exchange resin molded plate made of the polymer electrolyte material, the elastic film, and the pair of electrodes. By adopting a configuration in which the liquid medium to be maintained is sealed, the ion-exchange resin molded plate can always be maintained at a high water content, and can be bent and deformed as intended even when used in air for a long time. .

According to a fourth aspect of the present invention, there is provided a liquid filled type vibration damping device according to the present invention, wherein the mounting member connected to one of the vibration generating section and the vibration receiving section, the mounting member connected to the other, and the mounting member connected to the other. In a hollow closed space formed by an elastic body provided between the mounting members, a partition wall that partitions the inside of the space into two main and sub liquid chambers is displaced in a direction in which the volumes of the two liquid chambers are relatively varied. A liquid-filled type vibration damping device, which is provided so as to be stretched as possible and has a restriction passage for connecting both liquid chambers to each other to absorb a fluctuation in the liquid pressure in the main liquid chamber when vibration occurs. As a wall, the membrane-type actuator according to any one of claims 1 to 3 is stretched in a hollow closed space.

According to the fourth aspect of the present invention, the ion exchange is performed by turning on / off the current supply to the pair of electrodes or controlling the current supply voltage in the polymer actuator element constituting the displacement operation section of the film type actuator. By adjusting the potential difference applied to the resin molded plate, the partition wall constituted by the film-type actuator is fixed at a fixed position or displaced so that the volumes of the two main and sub liquid chambers are relatively variable. It is possible to adjust the dynamic spring constant of the main and auxiliary liquid chambers arbitrarily and responsively not only to vibrations in the low frequency range but also to vibrations in the high frequency range. It is possible to exhibit excellent anti-vibration performance against vibrations in a wide frequency range by changing it well. Further, since the partition wall itself using the film-type actuator can be made thinner and lighter, it is easy to make the whole vibration isolator compact.

Further, the fluid control device according to the present invention according to the present invention is a fluid control device comprising a fluid passage provided with a movable member capable of changing its passage area or displacing in the direction of opening and closing. As the movable member, the membrane-type actuator according to any one of claims 1 to 3 is provided in a fluid passage.

According to the fifth aspect of the present invention, the energization to the pair of electrodes in the polymer actuator element constituting the displacement operation section of the membrane type actuator is controlled by turning on / off or controlling the energization voltage. By adjusting the potential difference applied to the ion-exchange resin molded plate, the movable member constituted by the membrane type actuator can be displaced in a direction in which the area of the fluid passage is changed or opened / closed with good responsiveness and large displacement. Thus, the present invention can be applied to an on-off valve and a flow control valve in a large-diameter fluid passage, and can also improve the fluid control performance such as quickly adjusting the flow rate.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the principle configuration of a film-type actuator according to the present invention. The structure and operation of this film-type actuator are as follows.

That is, the polymer actuator elements 1
The ion-exchange resin molded plates 1A, 1A which are the main components of 1 are made of an electrolyte material, and the ion-exchange resin molded plates 1A, 1A made of the electrolyte material are connected to one end portions 1a, 1a thereof.
The other end portions 1b, 1b are in contact with both surfaces of each ion exchange resin molded plate 1A, 1A so as to be electrically insulated from each other. It is fixed and held between the pair of upper and lower electrodes 2 and 2. These polymer actuator elements 1
1 on both sides, respectively, a polymer actuator element 1,
Elastic membranes 3 and 3 made of rubber or the like having an area larger than 1 are disposed, and these elastic membranes 3 and 3 and the ion exchange resin molded plate 1A,
1A and a pair of electrodes 2 and 2;
In a state where a liquid medium 5 such as water for maintaining the ion-exchange resin molded plates 1A, 1A in a swollen state is sealed in a space sealed via seal members 4, 4 such as rings, the polymer actuator element 1 , 1, the elastic films 3 and 3 and the electrodes 2 and 2 are integrally assembled to form a film type actuator A.

In the membrane type actuator A having the above-described structure, a current is applied to the pair of electrodes 2 and 2 and the potential difference is applied to both surfaces of the ion exchange resin molded plates 1A and 1A of the polymer actuator elements 1 and 1 swelled by the liquid medium 5. , The difference in the amount of water on both sides occurs due to the movement of water molecules accompanying the movement of positive ions in the ion exchange resin molded plates 1A, 1A toward the cathode (one electrode 2). Molded plate 1
As shown by the imaginary line in FIG. 1, A and 1A have their free ends 1a and 1a curving and deforming with the other ends 1b and 1b fixed between the electrodes 2 and 2 as fulcrums. The elastic film 3 having a large area is bent and displaced in the same direction in accordance with the bending deformation operation of the polymer actuator elements 1 and 1, and the displacement amount and the displacement range (area) of the entire actuator A
Can be secured large.

FIG. 2 to FIG. 4 show an example of an embodiment of the film-type actuator A having the above-described principle configuration. A plurality of strip-shaped actuators (six in FIG. Polymer actuator elements 1...
Free ends 1a of the respective ion exchange resin molded plates 1A.
. Are extended toward the center of the circle, are arranged in a circular shape in a state where they abut against each other at the central portion, and the other end portions 1b... Of the respective ion exchange resin molded plates 1A. A plurality of polymer actuator elements 1 are sandwiched between a pair of annular electrodes 2 and 2 and a plurality of polymer actuator elements 1.
On both front and back sides, circular elastic sealing rubbers 3 and 3 as an elastic film are arranged so as to cover the entire polymer actuator element 1... And to have a peripheral portion sandwiched between the pair of electrodes 2 and 2. I have. Then, a pair of annular electrodes 2 and 2 are tightened and fixed via a plurality of tightening members 6 having a U-shaped cross section and bolts 7 arranged at appropriate intervals in the circumferential direction thereof, thereby forming a plurality of electrodes. The other end portions 1b of the polymer actuator elements 1 and the peripheral edges of the elastic seal rubbers 3, 3 are strongly fixed and held between the pair of electrodes 2, 2, thereby forming a circular membrane type actuator A. are doing.

The circular film type actuator A
, Formed by the elastic seal rubbers 3 and 3, the ion exchange resin molded plates 1A and 1A and the electrodes 2 and 2, and
It is a principle configuration that a liquid medium 5 such as water for maintaining the ion-exchange resin molded plates 1A, 1A in a swollen state is sealed in a space sealed via seal members 4, 4 such as O-rings. It is as stated. The operation of the circular membrane type actuator A is substantially the same as that of the above-mentioned principle configuration. As the free ends 1a of the exchange resin molded plates 1A are bent and deformed in the butted and assembled state, the elastic sealing rubber 3
Can be displaced with a large force over a wide area range.

FIG. 5 is a longitudinal sectional view of a liquid filled type vibration damping device constructed using the circular film type actuator A. This liquid filled type vibration damping device includes a mounting member 11 connected to a vibration generating source side such as an automobile engine, a mounting member 12 connected to a vibration receiving portion side such as an automobile frame, and a space between the mounting members 11 and 12. A partition wall for partitioning the interior of the hollow closed space into two main and sub liquid chambers 15 and 16 in a hollow closed space formed by a substantially annular conical elastic rubber (elastic body) 13 interposed therebetween. 14 is provided so as to be displaceable in the a-b direction in which the volumes of the two liquid chambers 15 and 16 are relatively variable, and a diaphragm 17
An air chamber 18 in which gas (air) is sealed is formed through the air chamber. Further, between the partition wall 14 and the cylindrical casing 19 fixedly connected to the mounting member 12, the two liquid chambers 1 are provided.
5 and 16 are communicated with each other to provide elastic rubber 13 when vibration occurs.
A part of the sealed liquid in the main liquid chamber 15 which is compressed due to the elastic deformation is caused to flow toward the sub liquid chamber 16 to absorb the fluctuation of the liquid pressure in the main liquid chamber 15 together with the deformation of the diaphragm 17. A buffer restriction passage (orifice) 20 is formed.

As the partition wall 14 in the liquid-filled type vibration damping device having the above-described basic configuration, a membrane type actuator A having the configuration shown in FIGS. 2 to 4 is used, and is stretched in a hollow closed space. And turn on / off the power to the electrodes 2 and 2 on the membrane type actuator A {partition wall (14)}.
A control device (not shown) for increasing and decreasing the OFF and energizing currents is provided.

In the liquid filled type vibration damping device having the above structure,
Under the condition that the vibration in the low frequency region acts, the dynamic spring constant of the membrane-type actuator A serving as the partition wall 14 is increased by turning off the power supply to the electrodes 2 and 2, and the partition wall 14 is fixed. . In this state, a part of the sealed liquid in the main liquid chamber 15 which is compressed by the deformation of the elastic rubber 13 due to the vibration is restricted to the sub liquid chamber 16 through the restriction passage 20 and the liquid in the main liquid chamber 15 is restricted. The pressure fluctuations are absorbed, whereby the vibration in the low frequency region is attenuated and a predetermined vibration-proof function can be exhibited.

On the other hand, under conditions where vibrations in the high frequency region act, the energization of the electrodes 2, 2 is turned on, and the energizing current is increased or decreased, so that the dynamic spring The constant becomes small, and the partition wall 14 changes the volume of the main and sub liquid chambers 15 and 16 in the a-b direction relatively responsively according to the vibration frequency. As a result, a sufficiently large anti-vibration function can be exhibited even for vibration in a wide high-frequency range.

FIGS. 6 and 7 are a vertical sectional side view and a bottom view of a valve which is an example of a fluid control device constituted by using the circular membrane type actuator A. This valve serves as a valve body (movable member) 24 that opens and closes the passage 22 in a fluid passage 22 in a valve casing 21 so as to face a valve seat 23 provided at an inlet portion from an upstream passage 22A to a downstream passage 22B. , FIG. 2
4 is installed, and the elastic seal rubber 3 in the film type actuator A is displaced along with the curved deformation of the plurality of polymer actuator elements 1. Fluid passage 22
Are configured to open and close.

In the valve having the above-mentioned structure, by turning off the power supply to the electrodes 2 and 2 in the membrane type actuator A, the elastic sealing rubber 3 {the valve body (24)} in the membrane type actuator A is changed as shown in FIG. Then, the valve is brought into a closed state in which the valve is in close contact with the valve seat 23, and the fluid flow from the upstream passage 22A to the downstream passage 22B can be stopped. On the other hand, when the energization to the electrodes 2 and 2 is turned on, the elastic seal rubber 3 in the membrane type actuator A serving as the valve body 24 is displaced in a direction away from the valve seat 23 as shown in FIG. In this state, fluid can flow from the upstream passage 22A to the downstream passage 22B as shown by the arrow. At this time, the amount of displacement of the valve body 24, that is, the opening degree is adjusted by increasing or decreasing the energizing current. Thereby, the flow rate of the fluid can be adjusted arbitrarily and with high responsiveness.

FIG. 9 is a vertical sectional side view of a discharge pressure adjusting device of a pump which is another example of a fluid control device constituted by using the above-mentioned circular membrane type actuator A. The discharge pressure adjusting device of this pump has check valves 31 at the inlet and outlet respectively.
A circular film type having a configuration shown in FIGS. 2 to 4 as a movable member 33 for controlling the discharge pressure from the pump at the bottom of the accumulator chamber 32 having the A and 31B. An actuator A is provided.

In the pump discharge pressure adjusting device having the above structure, the liquid discharged from the pump is supplied to the one check valve 31A.
Is introduced into the accumulator chamber 32 through At this time, the energization to the electrodes 2 and 2 in the film type actuator A is turned on, and the elastic seal rubber 3 {movable member (33)} in the film type actuator A is expanded in the direction of expanding the accumulator chamber 32 as shown in FIG. By bending and displacing, the liquid discharged from the pump can be accumulated in the accumulator chamber 33 through the primary flow path 34A and the check valve 31A while absorbing the pulsation of the hydraulic pressure.

When the hydraulic pressure in the accumulator chamber 33 reaches the set time, one check valve 31A is closed and the other check valve 31B is opened, and the liquid in the accumulator chamber 32 is discharged. It is discharged to the secondary side flow path 34B through 31B. At this time, the current flowing through the electrodes 2 and 2 in the film-type actuator A is reversed so that the elastic sealing rubber 3 {movable member (33)} is bent and displaced in the direction to reduce the accumulator chamber 32 as shown in FIG. Thereby, the liquid in the accumulate chamber 32 can be sent out to the secondary flow path 34B through the other check valve 31B at a substantially constant pressure.

In each of the above embodiments and application examples, the membrane type actuator A having a circular outer shell has been described. However, the outer shell may be square such as square or rectangular. The size (area) of the elastic seal rubber,
The shape is not particularly limited, and can be freely set according to the purpose and use.

[0030]

As described above, according to the first and second aspects of the present invention, the polymer actuator element inherently has light weight, small size, low cost, power saving, responsiveness, and durability. While maintaining excellent environmental characteristics, the elastic membrane with a large area is displaced by the bending deformation operation of the polymer actuator element to expand the amount of displacement and the displacement range (area) of the entire actuator and improve the responsiveness. Can be achieved. Therefore, it can be effectively used as a movable part of various devices that require a large operation range and prompt operability, and the application range can be significantly expanded.

According to the present invention described in claim 4,
By using the membrane-type actuator having the above effects as the partition wall, it is possible to provide a compact liquid-filled type vibration damping device that is excellent in vibration damping performance against vibration in a wide high frequency range.

Further, according to the present invention, the membrane-type actuator having the above-mentioned effect is used as a movable member such as a valve body, so that an on-off valve and a flow rate adjustment in a large-diameter fluid passage can be achieved. It is possible to provide a fluid control device which is applicable to a valve and has excellent fluid control performance capable of quickly adjusting a flow rate.

[Brief description of the drawings]

FIG. 1 is a principle configuration diagram of a film type actuator according to the present invention.

FIG. 2 is an external perspective view showing an example of a product of the film type actuator.

FIG. 3 is a plan view of the embodiment.

FIG. 4 is a longitudinal sectional view taken along the line GG of FIG. 3;

FIG. 5 is a vertical cross-sectional view of a liquid-filled type vibration damping device, which is an example of a product to which the film-type actuator is applied.

FIG. 6 is an enlarged vertical sectional side view of a main part of a valve which is another example of a product to which the membrane actuator is applied.

FIG. 7 is a bottom view of the same valve.

FIG. 8 is a vertical sectional side view showing an operating state of the valve.

FIG. 9 is an enlarged vertical cross-sectional view of a main part of a discharge pressure adjusting device for a pump, which is another example of a product to which the membrane actuator is applied.

FIG. 10 is a longitudinal sectional side view showing one operation state of the discharge pressure adjusting device of the pump.

FIG. 11 is a vertical sectional side view showing another operation state of the discharge pressure adjusting device of the pump.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 polymer actuator element 1A ion-exchange resin molded plate 1a free end of ion-exchange resin molded plate 1b fixed-side end of ion-exchange resin molded plate 2 electrode 3 elastic film (elastic seal rubber) 11, 12 mounting member 13 elastic rubber ( Elastic body) 14 Partition wall 15 Main liquid chamber 16 Sub liquid chamber 20 Restricted passage 22 Fluid passage 24 Valve body (movable member) 33 Movable member for controlling discharge pressure A Membrane actuator

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Naoko Fujiwara 1-38-31 Midorioka, Ikeda-shi, Osaka Prefecture Independent Administrative Institution AIST Kansai Center (72) Inventor Keisuke Oguro 1 Midorioka, Ikeda-shi, Osaka No.8-31, Kansai Center, National Institute of Advanced Industrial Science and Technology (72) Inventor Takanori Hiraoka 1-17-18, Edobori, Nishi-ku, Osaka-shi, Osaka Toyo Tire & Rubber Co., Ltd. (72) Toshifumi Sakata Osaka 1-17-18 Edobori, Nishi-ku, Osaka-shi Toyo Tire & Rubber Co., Ltd. F-term (reference) 3J047 AB01 CA01 DA02 FA02

Claims (5)

[Claims] 1. A polymer actuator element in which a potential difference is applied to an ion-exchange resin molded plate in a hydrated state so that the ion-exchange resin molded plate can be bent and deformed. A pair of electrodes which are arranged in an electrically insulated state and one end of the ion exchange resin molded plate is a free end capable of bending deformation so as to sandwich and hold the other end of the ion exchange resin molded plate from both sides. An elastic membrane having an area larger than that of the polymer actuator element and arranged to be displaceable in the same direction as the free-end side of the ion-exchange resin molded plate along with the bending deformation operation. A film type actuator characterized by the above-mentioned. 2. A plurality of said polymer actuator elements are arranged in a state where the free end sides of the respective ion-exchange resin molded plates abut against each other, and the other end of each of said ion-exchange resin molded plates is provided. The film type actuator according to claim 1, wherein the side is fixedly held by a pair of annular electrodes integrally connected. 3. An ion-exchange resin molded plate constituting the polymer actuator element is made of a polymer electrolyte material, and the ion-exchange resin molded plate made of the polymer electrolyte material, an elastic film and a pair of electrodes are used. 3. The membrane actuator according to claim 1, wherein a liquid medium for maintaining the ion-exchange resin molded plate in a swollen state is sealed in the formed space. 4. A hollow closed space formed by an attachment member connected to one of the vibration generating portion and the vibration receiving portion, an attachment member connected to the other, and an elastic body provided between the two attachment members. A partition wall for partitioning the interior of the space into two main liquid chambers is provided so as to be displaceable in a direction in which the volumes of the two liquid chambers are relatively variable, and the two liquid chambers communicate with each other to vibrate. 4. A liquid-filled type vibration damping device provided with a restriction passage for absorbing a fluctuation in liquid pressure in a main liquid chamber at the time of occurrence, wherein the partition wall is a film-type actuator according to any one of claims 1 to 3. A liquid-filled type vibration damping device using a membrane-type actuator, characterized by being stretched inside a hollow closed space. 5. A fluid control device comprising a movable member provided in a fluid passage, the movable member being displaceable in a direction in which the passage area can be varied or opened and closed, wherein the movable member is any one of claims 1 to 3. A fluid control device using a membrane actuator, wherein the membrane actuator described is installed in a fluid passage.