JPH10169706A - Vibration damping device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration damping device which can produce active damping effect against vibration inputted in a plurality of directions and is simple in structure. SOLUTION: A single mass member 12 is connected/supported to/by intalling members 16a, 16b, (16c), which are installed in a damping object 14, by means of elastic connecting bodies 18a, 18b, (18c). Meanwhile, a plurality of action chambers 38a, 38b, (38c), which apply the displacing force, the direction of which is difference from each other, to the mass member 12 based on the vibration in the internal pressure, are provided between the mass member 12 and the installing members 16a, 16b, (16c).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration damper mounted on a vibration damping object to reduce vibration in the vibration damping object. It relates to a damper that can be exerted.

[0002]

2. Description of the Related Art A dynamic vibration absorber (dynamic damper) has been widely known as a means for reducing the vibration of a vibration-damping object such as a car body which is a member in which vibration is a problem. ing. In recent years, in order to obtain a more advanced vibration damping effect, an active vibration damping device that suppresses or controls the vibration of the vibration damping target by applying a vibration force to the vibration damping target has also been proposed. As one type, Japanese Patent Application Laid-Open Nos. 3-292219 and 6-23
Japanese Patent No. 5438 and the like disclose that a mass member is supported via a spring member with respect to an attachment member attached to a vibration damping target to form a vibration system, and an electromagnetic force that applies an exciting force to the mass member of the vibration system. There is disclosed a vibration damper in which a drive mechanism is provided so as to exert a vibrating force on a vibration damping target by utilizing a vibration action of a vibration system.

However, in such a conventional vibration damper,
Since the electromagnetic drive mechanism must be incorporated, there is a problem that an increase in size and weight cannot be avoided.

[0004] In addition to the necessity of the coil and the magnet in the electromagnetic drive mechanism, the coil and the magnet must be assembled with high dimensional accuracy in order to stably obtain the desired driving force. Therefore, there is a problem that the structure is complicated, the production is difficult, and the cost is high.

[0005] Further, in the conventional vibration damper using the electromagnetic drive mechanism, the reliability and durability may be problematic due to the complicated structure, and it is difficult to cope with a problem when it occurs. there were.

Further, in a conventional vibration damper using an electromagnetic drive mechanism, since the vibration direction of a mass member constituting a vibration system is limited to one direction due to its structure, input vibration in a single direction is limited. In the case where the effective vibration damping effect can only be obtained for a vibration damping object and there are multiple vibrations to be damped in the vibration damping object with different directions, separate vibration dampers are separately provided for each vibration direction. It had to be mounted, and there were major problems in terms of cost and arrangement space.

[0007]

Here, the inventions according to claims 1 to 7 are all made on the background of the above-mentioned circumstances, and the problem to be solved is a simple structure and a small number of parts. It is an object of the present invention to provide a vibration damper provided with a new vibration mechanism, which is configured with a score, and in which the size and weight of the vibration damper can be advantageously reduced.

Further, the inventions according to the first to seventh aspects exhibit effective vibration suppression or vibration control effects against vibrations input in various directions different from each other by a single mass member. It is another object of the present invention to provide a vibration damper having a novel structure in which a vibration system to be obtained can be compactly configured with a simple structure.

[0009]

In order to solve such a problem, a feature of the invention according to claim 1 is that a single mass member is elastically attached to an attachment member attached to a vibration damping target. While being connected so as to be relatively displaceable by the connecting body,
A plurality of working chambers are provided between the mass member and the mounting member, each of which exerts a displacement force in a different direction on the mass member based on a change in internal pressure. A vibration damper is provided with a plurality of air supply / discharge paths for applying air pressure to cause a pressure change.

In the vibration damper having the structure according to the first aspect of the present invention, the vibration system is configured by the mass member being elastically supported by the elastic coupling member with respect to the vibration damping target. Where the vibration system is
By exerting air pressure fluctuations on any of the plurality of working chambers, the chambers can be vibrated in various directions. That is,
In such a vibration damper, a single mass member is used to form an effective vibration system in a plurality of directions. By controlling a pressure change in each air chamber, the vibration direction of the vibration system is changed. It is possible to vibrate under control.

Therefore, in such a vibration damper, by controlling the pressure change in each air chamber, it is possible to exert a vibration force in various directions on the vibration damping target. A very effective vibration damping effect can be exerted by a vibration system composed of a single mass member even with respect to various kinds of vibrations.

Also, in such a vibration damper, it is only necessary to form an action chamber inside, and it is not necessary to incorporate a special driving force generating mechanism for exciting the mass member, so that the vibration damper has different directions. In addition, a vibration damper capable of exhibiting an active vibration reduction effect for a plurality of types of vibrations can be advantageously realized in a compact size with an extremely simple structure and a small number of parts.

Moreover, such a vibration damper has a smaller number of parts compared with a conventional structure having an electromagnetic drive mechanism and the like.
Since high dimensional accuracy is not required, it is excellent in manufacturability and inexpensive.

In the first aspect of the present invention, for example, a rubber elastic body is suitably used as the elastic connecting body. The air pressure applied to the working chamber is negative pressure,
Both positive pressure and atmospheric pressure can be adopted, and they may be adopted in combination. Furthermore, the air supply and exhaust path
It is desirable to provide it on a member fixedly arranged on the vibration damping target, and for example, it is advantageously formed for each mounting member.

The magnitude, frequency, etc. of the air pressure applied to each working chamber should be set appropriately in accordance with the vibration to be damped in the object to be damped. It is also possible to apply different pneumatic pressure changes to a plurality of working chambers. Furthermore, by applying a constant air pressure to some of the working chambers or by appropriately setting the center pressure of the air pressure change applied to the working chambers, the spring constant of the vibration system and, consequently, the natural vibration frequency of the vibration system are adjusted. It is also possible. The air pressure exerted on the working chamber is controlled by, for example, a sine waveform in accordance with the waveform of the vibration to be damped.

Further, in the vibration damper having the structure according to the first aspect of the present invention, more preferably, for example, each of the elastic connecting bodies connecting each mounting member to the mass member includes the mounting member and the mass. It is formed in a shape that is mainly sheared by the displacement of the mass member due to a change in the pressure of the working chamber formed between the members. If such an elastic coupling body is adopted, the mass member is advantageously displaced in the target direction by the action of the air pressure on the working chamber, so that a more effective excitation force can be obtained.

In the vibration damper having the structure according to the first aspect of the present invention, in order to obtain a displacement force with respect to the mass member and furthermore an exciting force, for example, displacement forces in directions different from each other are applied. With respect to at least one of the action chambers acting on the member, located on the opposite side of the mass member,
It is also effective to form a side effect chamber that exerts a displacement force in the same direction and in the opposite direction on the mass member by a pressure change based on the action of air pressure. By providing such a side effect chamber, even when only one of the negative pressure or the positive pressure is used as the air pressure, the air pressure is exerted on the working chamber and the side effect chamber with a phase difference of 180 degrees to thereby increase the mass. There is also an advantage that a displacement force in both directions can be exerted on the member in the vibration direction, and more excellent displacement controllability is secured.

Further, according to a second aspect of the present invention, in the vibration damper having a structure according to the first aspect of the present invention, at least one of the plurality of working chambers is formed by the elastic coupling body. Is composed of an air chamber,
The air supply / discharge path is connected to the air chamber.

In the vibration damper having the structure according to the second aspect of the present invention, the working chamber capable of exerting a displacement force on the mass member by a pressure change can be easily formed with a very simple structure. Therefore, further simplification of the structure and improvement in manufacturability can be achieved.

Further, according to a third aspect of the present invention, in the vibration damper having the structure according to the first or second aspect of the present invention, at least one of the plurality of working chambers is provided by the elastic coupling body. A part of the wall portion is formed and is fluid-tightly divided by a flexible film. A liquid chamber filled with an incompressible fluid is formed on one side of the flexible film. On the other hand, an air chamber connected to the air supply / discharge path is formed on the other side of the flexible film.

In the vibration damper having the structure according to the third aspect of the present invention, the volume of the air chamber can be set small in the working chamber constituted by the liquid chamber and the air chamber. Therefore, the response of the excitation force can be improved by controlling the air pressure.

The invention described in claim 4 is the third invention.
In the vibration damper having the structure according to the invention described in (1), the pressure acting area on the flexible membrane and the pressure acting area on the mass member side are different from each other.

In the vibration damper having the structure according to the fourth aspect of the present invention, the pressure acting area on the flexible membrane side, which is the input side to the liquid chamber, and the output side from the liquid chamber, By appropriately adjusting the difference between the pressure acting area on a certain mass member and the size, the displacement force or displacement when the air pressure exerted on the air chamber is transmitted to the mass member via the liquid pressure in the liquid chamber It is possible to adjust the transmission rate such as quantity,
This makes it possible to more advantageously obtain the desired displacement of the mass member and, consequently, the generated excitation force.

If the pressure acting area on the mass member side is set smaller than the pressure acting area on the flexible membrane side in the wall of the liquid chamber, the displacement of the mass member can be more advantageously obtained. On the other hand, if the pressure acting area on the mass member side is set larger than the pressure acting area on the flexible membrane side, it is possible to more advantageously obtain the driving force applied to the entire mass member.

The invention described in claim 5 is the first invention.
In a vibration damper having a structure according to any one of claims to 4, the pressure change in the plurality of working chambers causes:
It is characterized in that displacement forces in directions orthogonal to each other are exerted on the mass member.

In the vibration damper having the structure according to the fifth aspect of the present invention, by appropriately adjusting the air pressure in each of the working chambers which exerts a displacement force in a direction orthogonal to each other on the mass member, various vibrations can be obtained. It is possible to easily and advantageously generate the exciting force in the direction, and therefore, while suppressing the number of working chambers and simplifying the structure, the active vibration reducing effect for the vibration in different directions can be efficiently achieved. It is possible to obtain.

Further, according to a sixth aspect of the present invention, in the vibration damper according to any one of the first to fifth aspects, the air pressure exerted on the working chamber through the air supply / discharge path is a vibration to be damped. Characterized in that an air pressure control device which fluctuates in synchronization with the frequency of the air pressure is provided.

In the vibration damper having the structure according to the sixth aspect of the present invention, active reduction of vibration can be advantageously achieved.

The invention described in claim 7 is the first invention.
7. In the vibration damper according to any one of claims 6 to 6, a plurality of the mounting members are provided separately from each other in different directions with respect to the mass member, and the mounting members are mounted on a single bracket. It is fixed, and is adapted to be attached to the vibration damping target via the bracket.

According to the vibration damper having the structure according to the seventh aspect of the present invention, the manufacturability and the mountability to the vibration damping object are improved. In addition, the elastic connecting members for connecting the respective mounting members to the mass member can be formed independently of each other, whereby the degree of freedom in tuning the spring characteristics of the vibration system can be expanded.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, in order to clarify the present invention more specifically, embodiments of the present invention will be described in detail with reference to the drawings.

First, FIG. 1 and FIG. 2 show a vibration damper 10 as one embodiment of the present invention. The vibration damper 10 includes a mounting member 16 as a mounting member in which a single mass member 12 is mounted on a vibration body 14 to be damped.
a, 16b, and 16c are elastically connected to each other through rubber elastic bodies 18a, 18b, and 18c as elastic connecting bodies. One vibration system including the spring systems 18b and 18c is configured. The vibration in the vibrating body 14 is actively suppressed by utilizing a vibration phenomenon or a vibration action in the vibration system.

More specifically, the mass member 12 has a solid rectangular block shape, and is formed of a material having a large specific gravity, such as an iron-based metal. In the mass member 12, three rectangular surfaces adjacent to each other are attached to the mounting surface 20.
a, 20b, and 20c.
In a, 20b, and 20c, shallow-bottom circular mounting recesses 22a, 22b, and 22c that open at the center are formed, respectively. That is, these three mounting recesses 22a,
22b and 22c are formed so as to pass through substantially the center point of the mass member 12 and open in three axial directions orthogonal to each other.

On the other hand, the mounting brackets 16a, 16b, 16
Each of c has a small diameter rod shape, and one end (outside end) in the axial direction is a bolt 24. In addition, an air supply / discharge passage 26 extending through in the axial direction is provided inside each mounting bracket 16. In addition, a port 28 that protrudes axially outward from an axial end of the bolt 20 is formed integrally with each mounting bracket 16 to connect an air pipe (not shown) to the air supply / discharge path 26. ing.

Then, these mounting brackets 16a, 16
b, 16c are the mounting surfaces 20a, 20
b, 20c, the mounting recesses 22a, 22b, 22
The other end (inner end) in the axial direction is inserted into the space c and separated by a predetermined amount. In other words, the mounting brackets 16a, 16b, 16c are attached to the mounting recesses 22a, 22a.
It is arranged coaxially with b and 22c and at a position separated by a predetermined distance outward in the axial direction.

Further, these mounting brackets 16a, 16b,
16c and the mass member 12, rubber elastic bodies 18a, 1
8b and 18c are interposed.
a, 18b, 18c, the mounting brackets 16a, 16
b, 16 c are elastically connected to the mass member 12.

That is, the rubber elastic bodies 18a, 18b, 1
8c has a substantially annular plate shape, and the outer peripheral surface of one axial end (inner end) of the mounting brackets 16a, 16b, 16c is vulcanized to the inner peripheral surface. On the other hand, the connection fitting 30 having a substantially cylindrical shape
a, 30b, 30c are embedded and vulcanized and bonded,
The connecting members 30a, 30b, 30c are
Are fitted into and fixed to the mounting recesses 22a, 22b, 22c, respectively.
b, 16c and the mass member 12 between the rubber elastic bodies 18a, 18
8b and 18c are interposed. Note that an outer flange portion 32 that protrudes from the outer peripheral surface of the rubber elastic body 18 and expands is formed integrally at one end in the axial direction of each connection metal fitting 30. The connection fitting 30 is pressed and fixed by the fixing ring 34 press-fitted into the mounting recess 22 so that the mass member 12
It is stuck to.

Thus, the rubber elastic bodies 18a, 18b,
The mounting brackets 16a, 16
The relative displacement of the mass member 12 with respect to b and 16c is allowed. In addition, each mounting recess 22a, 22
b, 22c have mounting brackets 16a, 16b, 16c
The central portion 36 of the bottom surface facing the axial end portion is slightly deeper, so that the fittings 16a, 16b, 16c do not contact the mass member 12.

Further, as described above, with respect to the mass member 12,
Rubber elastic body 18 having mounting bracket 16 and connecting bracket 30
The openings of the mounting recesses 22a, 22b, and 22c are covered by assembling the integrally vulcanized molded products a, 18b, and 18c, so that the mounting brackets 16a, 16b, and
Between the facing surfaces of the mass member 16 and the mass member 12, air chambers 38 a, 38 b, and 38 c each having a part of a wall made of rubber elastic bodies 18 a, 18 b, and 18 c and sealed from an external space
Are formed respectively. Note that a seal rubber layer 40 is sandwiched between the outer flange portion 32 of each connection fitting 30 and the bottom surface of the mounting recess 22, so that the airtightness of each air chamber 38 is ensured.

Further, these air chambers 38a, 38b,
An air supply / discharge passage 26 provided in the mounting brackets 16a, 16b, 16c is opened and communicated with 38c. In this embodiment, these air chambers 38 are used.
The working chamber is constituted by a, 38b and 38c.

Then, the vibration damper 1 having the structure as described above is provided.
0 is the mounting bracket 16a, 1 as shown in FIG.
6b and 16c are mounted by being fixedly mounted to the vibrating body 14 via the bracket 42, respectively.

The bracket 42 has three flat plate-like support plate portions 44a, 44 extending in directions orthogonal to each other.
b, 44c. Each of the mounting holes 46 penetrating through the support plate portions 44a, 44b, 44c.
On the other hand, the bolts 24 of the mounting brackets 16a, 16b, 16c are inserted and fixed by nuts 48, whereby the three mounting brackets 16a, 16b, 16c are integrally connected and fixed. Then, the bracket 42 is superimposed on the mounting surface of the vibrating body 14 in one flat plate portion 44a, and the bracket 42 is fixed to the vibrating body 12 by the bolt 24 of the mounting bracket 16a inserted into the mounting hole 46 of the flat plate portion 44a. To be fixed. Also,
At that time, preferably, each of the mounting brackets 16a, 16b, 16
The axial direction of c, that is, the facing direction of each of the mounting members 16a, 16b, 16c and the mass member 12 is set so as to be the direction of the vibration to be anti-vibrated in the vibrating body 14, respectively.

Further, although not explicitly shown in the drawings,
An air pipe is connected to the port 28 of each of the mounting brackets 16a, 16b, 16c, and an air chamber 38 is provided.
a, 38b and 38c are each selectively connected to the negative pressure source and the atmosphere via a switching valve. As the negative pressure source, any of a negative pressure pump, an intake system of an internal combustion engine, a negative pressure tank, and the like can be adopted.
As the switching valve, an electromagnetic switching valve having excellent responsiveness and controllability is preferably employed. In addition, each air chamber 38a,
Connections to the negative pressure source and the atmosphere at 38b and 38c can be controlled independently of each other.

That is, in such a vibration damper 10, the switching valve is switched to operate, and any one of the air chambers 38 is operated.
If the negative pressure and the atmospheric pressure are alternately applied to the mass member 12, the mass member 12 approaches the mounting member 16 in the direction facing the mounting member 16 in accordance with the pressure change of the air chamber 38.
A separating displacement force is exerted. In short, each of the mounting brackets 16a, 16b, and 16c is axially opposed to the mass member 12 with the air chambers 38a, 38b, and 38c interposed therebetween, and the rubber elastic bodies 18a, 18b, and 18c. Relative displacement is allowed based on the elastic deformation of any one of the air chambers 38.
, The mass member 16 is displaced in the axial direction toward the mounting bracket 16 opposed to the air chamber 38 with the air chamber 38 interposed therebetween.

In this case, the mass member 12 is displaced with respect to the mounting bracket 16 at a cycle corresponding to the switching cycle of the switching valve. Elastic body 18
The vibration system composed of a, 18b, and 18c can be vibrated at an arbitrary frequency, and by adjusting the magnitude of the negative pressure applied to the air chamber 48, the vibration force or the amplitude in the vibration system can be increased. Can also be controlled.

The three air chambers 38a, 38b, 38
The displacement direction of the mass member 12 can be controlled depending on which of the pressure chambers c and the negative pressure and the atmospheric pressure are applied. In particular, in the present embodiment, the three air chambers 38a, 38
Since the directions of displacement of the mass member 12 based on the pressure control of 8b and 38c are set in three directions orthogonal to each other, the air pressure control in the three air chambers 38a, 38b and 38c is performed independently, so that the vibrating body 14 is controlled. On the other hand, the vibrating force in three directions or various directions as a resultant force thereof can be effectively exerted.

Therefore, by controlling the switching of the switching valve in accordance with the frequency and amplitude of the vibration of the vibration body 14 to be damped, the pressure of each of the air chambers 38a, 38b and 38c is controlled. By applying an effective excitation force to the, an effective vibration suppression effect or vibration control effect can be obtained.

In particular, the mass member 12 and the rubber elastic body 1
In the resonance frequency range of the vibration system composed of 8a, 18b and 18c, a larger exciting force is efficiently generated by the resonance action, and a more excellent vibration suppression effect or vibration control effect can be exhibited. In addition, the fact that the spring constant of the vibration system composed of the mass member 12 and the rubber elastic bodies 18a, 18b, 18c is influenced by the pressure of the air chambers 38a, 38b, 38c is positively used, and one or two of them are used. By applying an integral pressure to one air chamber 38, the other air chamber 38
When the mass member 12 is vibrated by causing a pressure change to
It is also possible to appropriately adjust and set the resonance frequency in the vibration system.

Moreover, in the vibration damper 10, since it is not necessary to incorporate an actuator member such as an electromagnetic driving means into the vibration damper 10, the structure is extremely simple, the production is easy, and the vibration damper 10 is lightweight, compact and inexpensive. There are great benefits. Moreover, since the structure is simple, it has excellent durability and reliability, and has an advantage that it is easy to cope with a failure. Further, in the present embodiment, in particular, the same member can be employed as the integrally vulcanized molded product of the three rubber elastic bodies 18a, 18b, 18c attached to the mass member 12, thereby producing the same. Further improvement in properties and the like can be achieved.

In short, in the vibration damper 10 as described above, a vibration damper capable of exhibiting an effective vibration damping effect against vibrations in a plurality of directions is advantageously realized with a compact size and a simple structure. You get.

Further, in the vibration damper 10, since the displacement force of the mass member 16 can be obtained by using the negative pressure, especially in an automobile or the like using an internal combustion engine, the negative pressure generated in the intake system or the like. Can be effectively utilized, and there is an advantage that no special driving energy generating means is required. If compressed air is easily obtained,
Of course, it is also possible to displace the mass member 16 using positive pressure instead of negative pressure.

The embodiments of the present invention have been described above in detail, but these are literal examples.
These embodiments are not to be construed as limiting in any way.

For example, in each of the above-described embodiments, an active vibration damping effect is obtained by applying a varying air pressure to the air chamber 38 to displace the mass member 12 to generate an exciting force. In addition, an effective passive vibration damping effect can be obtained by using a vibration damper having a structure according to the present invention as a dynamic damper. In this case, for example, a constant negative pressure or a positive pressure is applied to the air chamber 38 to change the supporting spring constant of the mass member 12 with respect to the mounting bracket 16 so as to appropriately change the resonance frequency in the vibration system. Therefore, it is possible to realize a sub-vibration system capable of exhibiting an optimal vibration absorbing effect in response to a change in the frequency of input vibration to be damped, and the like.

By appropriately setting the volume of the air chamber 38, the rigidity of the wall spring, and the like, it is possible to use the resonance phenomenon caused by the compression spring action of air.
A larger excitation force can be obtained more efficiently.

Further, in the above embodiment, the three air chambers 38a, 38b and 38c are formed so that the displacement directions of the mass member 12 are orthogonal to each other. Thus, the direction of the displacement force applied from the air chamber 38 to the mass member 12 should be set, and it is possible to attach two or four or more air blowers.

Further, in the vibration damper having the structure according to the present invention, an active vibration damping effect can be obtained with respect to input vibration in a specific direction in accordance with the state of input vibration and the like, and an input in another direction can be obtained. It is also possible to obtain a passive vibration damping effect as a dynamic damper against vibration.

In addition, although not enumerated one by one, the present invention
Based on the knowledge of those skilled in the art, various changes, modifications, improvements, and the like can be made, and unless such embodiments depart from the spirit of the present invention.
Both are included in the scope of the present invention,
Needless to say.

[0058]

As is clear from the above description, in any of the vibration dampers constructed according to the first to seventh aspects of the present invention, the mass member is displaced based on the air pressure exerted from the outside. As a result, a vibration force is generated on the vibration damping target, and in particular, a vibration force is generated in a plurality of directions using a single mass member and without incorporating a vibration actuator means. Can be done.

Therefore, a vibration damper capable of exhibiting an effective vibration damping effect for input vibrations in a plurality of directions can be advantageously realized with an extremely lightweight and compact structure.

[Brief description of the drawings]

FIG. 1 is an explanatory longitudinal sectional view showing a vibration damper as one embodiment of the present invention, and is a view corresponding to a II section in FIG. 2;

FIG. 2 is a plan view of the vibration damper shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Damper 12 Mass member 14 Vibration body 16 Mounting bracket 18 Rubber elastic body 26 Air supply / discharge path 38 Air chamber 42 Bracket

Claims (7)

[Claims] 1. A single mass member is connected to an attachment member attached to a vibration damping target by an elastic connector so as to be relatively displaceable, and between the mass member and the attachment member.
In order to provide a plurality of working chambers that respectively apply displacement forces in different directions to the mass member based on a change in internal pressure, and to apply a pneumatic pressure to each of the working chambers independently to generate a pressure change. A plurality of air supply / discharge paths. 2. At least one of the plurality of working chambers comprises an air chamber of which a part of a wall is formed by the elastic connecting body, and the air supply / discharge passage is connected to the air chamber. The vibration damper according to claim 1. 3. An at least one of the plurality of working chambers, a part of a wall portion is constituted by the elastic connecting body, and is fluid-tightly divided into two by a flexible membrane. A liquid chamber filled with an incompressible fluid is formed on one side of the flexible membrane, and the air supply / discharge path is connected to the other side of the flexible membrane on the other side. 3. The vibration damper according to claim 1, wherein a chamber is formed. 4. A pressure action area in the flexible membrane,
The vibration damper according to claim 3, wherein the pressure action areas on the mass member side are different from each other. 5. The vibration damper according to claim 1, wherein a displacement force in directions orthogonal to each other is exerted on said mass member by a pressure change in said plurality of working chambers. vessel. 6. The air pressure control device according to claim 1, further comprising an air pressure control device for changing an air pressure applied to the working chamber through the air supply / discharge path in synchronization with a frequency of vibration to be damped. Damper. 7. A plurality of the mounting members are provided separately from each other with respect to the mass member in different directions, and the mounting members are fixed to a single bracket. The vibration damper according to any one of claims 1 to 6, wherein the vibration damper is attached to the vibration damping object via a vibration damper.