JP2007057098A - Fluid operation type position adjustment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid operation type position adjustment device including a servo means. <P>SOLUTION: A supply connecting section 22, a discharge connecting section 23, and a power connecting section 24 are provided adjustably by the servo means 12 arranged in a housing 1 of the adjustment device in a fluid circuit. The servo means 12 for positioning its location has two fluid operating surfaces 15a and 15b which are opposite each other. The fluid operating surfaces are the same size, and can fix boundaries of control chambers 37a and 37b, respectively. The two control chambers are connected with a common control pressure connecting section 52 via choke means 34a and 34b arranged between the control chambers. In downstream of the choke means, respective control chambers are connected with discharge outlets 55a and 55b. A control valve means 16 can control two discharge outlets, and can particularly close both discharge outlets. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a fluid operated position adjusting device for a power device, and more particularly to a fluid operated position adjusting device for a process valve. The fluid actuated position adjusting device of the present invention includes an adjusting device housing in which at least one servo means is installed. The servo means can be moved by a fluid operation controlled to perform a positioning operation and is installed to connect the supply and discharge ports and the power unit in a manner depending on its position. Connected to each other in the fluid circuit in different ways.

  This type of position adjustment device includes servo means installed in the adjustment device housing. This servo means plays a role of selectively connecting the power communication unit to either the supply communication unit or the discharge communication unit, or simultaneously disconnecting from both, depending on the set position. By adopting such a method, it is possible to set the fluid pressure of the power communication unit used for the operation of another power device such as a process valve as required (see Patent Document 1).

The position of the servo means that determines the flow switching situation is influenced by an adjustable control pressure acting on the diaphragm elements of the servo means in opposition to the mechanical spring means. Since the position adjustment device is designed so that the servo means takes the discharge position when the control pressure is equal to the surrounding pressure, the power communication part is simultaneously disconnected from the other two communication parts and as a result It is relatively difficult to accurately set a control pressure that generates a blockage situation in which the power unit connected to the communication unit also remains in a fixed position.
European Patent Specification No. 0726511B1

One object of the present invention is to provide a space-saving fluid-operated position adjusting device that can accurately control a power unit by simple means.
In order to achieve these objects and / or other objects that will become apparent from the present specification, claims, and drawings, the present invention is devised as follows.

  First, the servo means has two fluid working surfaces in order to set its position. The two working surfaces face in opposite directions in the servo motion and have the same effect, each serving to delimit the control room. The two control chambers are connected to a common control pressure communication section, and each of the two control chambers communicates with a fluid flow through a choke means installed in the middle by the common control pressure communication section. The two control chambers are also downstream as seen from the respective associated choke means having a discharge port. The two outlets are provided with electrically operated control valve means which constitute a unit with the adjusting device housing. The valve means can open and close the two outlets individually and selectively, including the action of closing both simultaneously.

  In the context of the control by the associated common control pressure communication, the symmetrical design with respect to the two fluid working surfaces compensates for the fluid forces acting on the servo means when both outlets are closed simultaneously, Ensure that a clear positioning can be achieved. When the discharge port is closed, the home position of the servo means may be set at a position where the power communication unit is disconnected from both the supply communication unit and the discharge communication unit and maintains a constant pressure. There is. Since both of the two control chambers are connected to the same control pressure communication section, the accuracy of adjustment is not affected by fluctuations in the control pressure. The servo movement of the servo means causes a change in the effective pressure in the power communication section. To initiate this servo movement, one of the two outlets is opened by appropriate electrical control of the control valve means. In the control room connected to the discharge port, it is only necessary to cause a decompression that makes the state of the system unbalanced. The combination of the adjusting device housing and the control valve means as a single structural unit guarantees space-saving dimensions and simple operation during installation on site.

    In principle, it is also possible to supply a pressure medium for achieving a desired pressure to the control pressure communication part irrespective of the supply communication part. However, a structure is preferable in which the supply to the control pressure communication unit is performed by connecting the pressure in the position adjustment device to a pressure adjustment device that enables setting of the control pressure from the supply communication unit. The control pressure set by the pressure adjusting device is lower than the supply pressure, and even if the discharge port is open, the loss of fluid is minimized.

  The control valve means may be a proportional valve means. Proportional valve means allows continuous stepless operation, which allows not only switching between closed position and constant open position, but also set to an intermediate position with adjustable cross-sectional area It becomes. However, as another method, a design using a switching valve, in particular, a design combining a switching valve and a pulse width modulation system control means is possible.

  Preferably, the control valve means is a piezoelectric valve means, and has a valve member operated by piezoelectricity. This means that the required power can be reduced and that particularly space-saving dimensions are possible.

  When using piezoelectric control valve means, adopt a structural design with two valve members, each associated with one outlet and constructed by two adjacent elongated piezoelectric flexure transducers This is convenient. These valve members are components of an integrated bending transducer unit. Since such a bending transducer unit has a symmetrical structure, it can be controlled with better accuracy than two separate bending transducers.

  When such a bending transducer unit is used, if the bending transducer unit has a support part that forms a rigid interlocking connection between the two bending transducers, it is formed by two valve members. The stroke or stroke magnitude is particularly wide, and as a result a relatively broader outflow section can be set. Such a bearing is installed for rotational movement of the bending transducer unit relative to the valve housing. Therefore, the operation of opening one valve member can be aided by closing the other valve member to the valve seat of the associated outlet by an enhanced force and tilting the flexure transducer unit at the bearing. Such a control valve means is disclosed in European Patent Publication EP 1207329 B1. This is a control valve means particularly suitable for the position adjusting device of the present invention.

  The two fluid working surfaces that determine the position of the servo means are preferably located on the two diaphragm elements. With respect to the diaphragm element, it is preferable that the diaphragm element is installed at two ends of the servo means which are in mutually opposite positions in the axial direction.

  The servo means preferably comprises a plunger-like servo member which can be placed in the adjusting device housing and held at the adjusting device housing by an external diaphragm element at its two ends. This external diaphragm element defines an associated fluid working surface. The servo member preferably further comprises two moving closure members. Each of these closing members can cooperate with a single valve seat installed in a housing surrounding the outflow opening. Between the two outflow openings, there is a power chamber connected to the power communication section, and this power chamber is selectively connected to the supply communication section or the discharge communication section in accordance with the position of the valve member, Or it can be blocked from both of them.

  In order to achieve the home position setting accurately, the servo member is preferably biased in the axial direction of the adjusting device housing by two spring means acting in opposite directions. In order to adjust the characteristics of the adjusting device, the spring setting force of at least one spring means is preferably adjusted.

Further advantageous developments and advantageous forms of the invention will be understood from the detailed description of the embodiments given below and the accompanying drawings.
The entire fluid-operated position adjusting device 1 is designed as a single structural unit in which the individual components are stored densely. These components are depicted in the figure in a rectangular framework showing the position adjustment device, merely to give a brief overview.

  As shown in FIGS. 1 to 3, a power device 2 or some load controlled by the position adjusting device 1 is attached to the position adjusting device 1. Although not shown in detail, an embodiment of the present invention is a fluid operated power unit for a single process valve. The power unit 2 includes a housing 3 and an output drive unit 4 capable of linear motion or rotational motion with respect to the housing 3. The drive chamber 5 defined by the housing 3 and the output drive unit 4 can receive the pressure of the pressure medium in a manner that antagonizes the repulsive force of the spring means 6.

  The fluid action in the drive chamber 5 is set in a controlled manner by the position adjustment device 1 in order to move the output drive 4 to a predetermined position and consequently move the member driven by the output drive 4. Can do. Examples of the member driven by the output driving unit 4 include a valve spool.

  As the pressure medium used for operating the apparatus, compressed air which is also used in the examples is particularly mentioned. However, in principle, other gaseous or liquid media can be used.

  The position adjusting device 1 includes an adjusting device housing 7. Inside the adjustment device housing 7, a vertically long housing inner chamber 8 including a servo means 12 is provided. The servo means is composed of several components. The servo means 12 also has a vertically long shape, so that the servo means or individual components of the servo means perform a linear movement in the direction of the longitudinal axis 14 of the housing inner chamber 8 in the adjusting device housing 7. Has been placed. This linear motion is called servo motion 13.

  The servo movement 13 of the servo means 12 by the controlled fluid action on the two fluid working surfaces 15a, 15b and the resulting positioned position can be switched in opposite directions of the servo means 12. In order to control the fluid action, an electric control valve means 16 is installed. Control valve means 16 operates according to a position signal detected by suitable sensor means 17. The sensor means is, for example, a system that measures the displacement of the power unit 2 with respect to the output drive unit 4, and the acquired position signal is transmitted to the electronic control means 18. In response, the electronic control means 18 produces an electrical activation signal for the control valve means 16. The electronic control means 18 is most preferably designed as a component of the position adjusting device 1 which is a structural unit.

  The adjusting device housing 7 is provided with a supply communication unit 22, a discharge communication unit 23, and a power communication unit 24. The supply communication unit 22 can be connected to the pressure source P. The pressure source P is a supply source of compressed air in particular, and provides a pressure medium necessary for the operation of the output drive unit 4.

The discharge communication unit 23 is connected to the outside air R. If liquid is used for the operation of the position adjusting device 1, the discharge communication part 23 is connected to the tank.
The power communication unit 24 is used for connection with the power unit 2. The power communication unit 24 is connected to the drive chamber 5 via a fluid line 25 such as an integrated fluid duct.

  The three connecting portions 23, 24, and 25 described above are connected via the housing inner chamber 8 and a fluid duct that passes through the inside of the adjusting device housing 7. These fluid ducts communicate with the inside of the housing inner chamber 8 through holes formed in the side wall of the adjusting device housing 7. The power communication unit 24 is connected to a portion called the power chamber 26 of the housing inner chamber 8, whereas the supply communication unit 22 is always connected to the supply chamber 27, and the discharge communication unit 23 is a discharge chamber. 28 is connected.

  The power chamber 26 is adjacent to the supply chamber 27 on one side surface in the axial direction and is adjacent to the discharge chamber 28 on the other side surface. The power chamber 26 is connected to each of the supply chamber 27 and the discharge chamber 28 adjacent to each other via the outflow openings 32a and 32b. The outflow openings 32a and 32b are connected to the supply chamber 27 and the discharge chamber 28 in the axial direction. The boundary part is prescribed | regulated by the annular valve seat 31 which faces one each of which is related. These valve seats 31 face the closing members 33a and 33b that can move in the direction of the longitudinal axis 14 in any case.

  A plunger-shaped central servo member 34 is disposed in the direction of the vertical axis 14 extending in the servo movement direction 13 so as to penetrate the two closing members 33a and 33b disposed in the supply chamber 27 and the discharge chamber 28, respectively. A flexible external diaphragm or thin film element 35a, 35b is attached to the two end portions of the servo member 34 in a sealed manner, respectively. These elements, on the other hand, are also supported in a sealed manner by the adjusting device housing 7. Each of the outer diaphragm elements 35a and 35b, together with the end walls 36a and 36b of the housing inner chamber 8 adjacent in the axial direction, respectively define first and second control chambers 37a and 37b. In either case, the diaphragm surface facing the individual control chamber constitutes one of the two fluid working surfaces 15a, 15b described above.

  Inner diaphragm elements 38a and 38b are respectively provided at positions slightly apart from the two outer diaphragm elements 35a and 35b in the axial direction. These inner diaphragm elements 38a, 38b are attached in a sealed manner to one of the closing members 33a and 33b on the one hand and to the adjusting device housing 7 on the other hand. The inner diaphragm elements 38a and 38b bound the discharge chamber 28 and the supply chamber 27, respectively, on the side surface opposite to the outflow openings 32a and 32b.

  A first pressure compensation chamber 42a and a second pressure compensation chamber 42b are formed by the paired inner diaphragm element and outer diaphragm element 38a and 35a, and 38b and 35b, respectively. The first pressure compensation chamber 42a and the second pressure compensation chamber 42b are always connected to the power chamber 26 via at least one pressure compensation duct 43a, 43b extending through the inside of each closing member 33a, 33b. ing. The pressure compensation ducts 43a and 43b are opened inside the circumference of the valve seat 31 facing each other on the end surfaces in the axial direction of the closing members 33a and 33b. It is also possible to form the pressure compensation ducts 43 a and 43 b inside the adjusting device housing 7.

  The closing members 33a and 33b are urged toward the closing member facing each other in the axial direction of the servo member 34 by the associated mechanical spring means 44a and 44b. When the associated spring means 44a, 44b are compressed, the two closing members 33a, 33b can move independently in the axial direction of the servo member 34 that is sandwiched coaxially therebetween.

  In the embodiment shown in FIG. 1, the spring means 44a, 44b are in the form of compression spring means coaxially mounted on the servo means 34, with the heads 45a, 45b of the servo means 34 widened at one end. At the other end, abutting against the bases of the adjacent blocking members 33a and 33b. The heads 45 a and 45 b serve to attach the external diaphragm elements 35 a and 35 b, and the base portions of the closing members 33 a and 33 b have a larger diameter than the servo member 34.

  A tracking portion 46 of the servo member 34 exists between the two closing members 33a and 33b in the axial direction. The diameter of the follower 46 is larger than the diameter of the vertical portion of the servo member 34 that supports the adjacent blocking members 33a and 33b, respectively, and is used to move the two blocking members 33a and 33b with respect to the servo member 34. It is in contact with and stationary, and serves to limit the movement of the individual closing members 33a, 33b to the other closing member.

  The diaphragm elements 35 and 38 have rubber elasticity or elastic characteristics. In the adjusting device housing 7, the diaphragm elements 35, 38 hold the servo member 34 on the one hand and the closing members 33 a and 33 b on the other side so that they can perform the servo movement 13 described above. In this design, when no pressure is applied to the system, the servo means 12 is located at the home position as shown in FIG. 1, in which the valve seat 31 faces the two closing members 33a and 33b. In a sealing manner and keeps the associated outflow openings 32a, 32b closed. The length of the follower 46 is selected so that the follower 46 is just in contact with the closing members 33a and 33b or at a minimum distance from the closing members 33a and 33b in such a home position.

  However, in order to perform the installation of the servo means 12 at the home position in a repositionable manner, it is effective if there are two spring means 47a and 47b in addition to the above. These spring means 47a, 47b act between the servo member 34 and the adjusting device housing 7 and push the servo member 34 in opposite directions in the axial direction, so that the servo member 34 is in the further spring means. It is made to position in the home position in the center of 47a, 47b. If the spring force of at least one of these additional spring means 47a and 47b can be adjusted, as indicated by the slanted arrow 47 'in FIG. 1, the home position of the entire system is not under pressure at the stage of assembly. It can be adjusted to the state.

  By adjusting the level of biasing by the additional spring means 47a, 47b, it is possible to adjust the level of the fluid servo force required to move the servo member 34, thereby determining the characteristics of the position adjusting device. It becomes possible.

  When the servo member 34 moves in either direction from the home position, the closing member positioned forward in the movement direction is moved by the follower 46 and moves away from the associated valve seat 31. On the other hand, the other closing member tries to follow the movement of the servo member 34, but is stopped at a predetermined position by the associated valve seat 31. The spring means 44a or 44b acting between the closing member and the servo member 34 are compressed, so that the thrust in the closing direction is increased.

  The two fluid working surfaces 15a, 15b on the outer diaphragm elements 35a, 35b have the same size. In this embodiment, the “fluid working surface” always refers to an effective fluid working surface that is related to the measurement of the generated servo force, and the diaphragm is different from the case of a piston, for example, because of its deformation behavior. Usually, the area is smaller than the total cross-sectional area. As used herein, a fluid working surface is always understood to be an effective fluid working surface.

  The two control chambers 37a and 37b are connected to a common control pressure communication section 52 through first and second control ducts 48a and 48b, respectively. The control pressure communication unit 52 is connected to the output of the illustrated pressure regulator 53 in the embodiment. The pressure adjustment device 53 is designed as a component of the position adjustment device 1, and the supply port on the inlet side is connected to the supply communication unit 22. In this way, since the controlled pressure medium is discharged from the supply communication unit, no extra communication unit is required. By using the pressure adjusting device 53, it is possible to accurately set a desired control pressure which is generally substantially lower than the supply pressure.

However, it is equally possible to supply the desired level of control pressure in a separate manner, as shown by the chain line 52 'in FIG.
In the middle of the two control ducts 48a, 48b, for example, there are choke means 54a, 54b in the form of narrowed portions of the ducts, respectively. The two choke means 54a, 54b preferably have the same blocking effect.

  Exhaust ducts 56a and 56b extend from the control ducts 48a and 48b, respectively, and lead to the exhaust ports 55a and 55b. In the flow direction towards the control chambers 37a, 37b respectively, the branch point of the discharge ducts 56a, 56b is downstream from the associated choke means 54a, 54b. The discharge ducts 56a, 56b can also be branched directly from the associated control chambers 37a, 37b, respectively.

  The two outlets 55a and 55b are components of the control valve means 16 described above, and the control valve means 16 selectively includes the possibility of closing the two outlets 55a and 55b at the same time. It plays the role of closing and opening. If one of the outlets is open, the other outlet is closed.

  The control valve means 16 in the embodiment can be operated while functioning as a continuous operation valve. In addition to the closed position and the maximum open position, the control valve means 16 can be used to adjust various sizes of the outlet cross section to be adjustable. Has an appropriate intermediate position. It is also possible to perform pulse width modulation control on the control valve means 16 in order to manage the flow rate of the discharged pressure medium.

  Theoretically, the control valve means 16 can be designed as an electromagnetically driven operating system. However, a piezoelectric type design is more preferred. Therefore, as shown in FIGS. 1 and 4, for example, the position adjusting device 1 can be configured by two piezoelectric operation valve members 57 a and 57 b respectively associated with one of the two discharge ports 55 a and 55 b. It is. These piezoelectric valve members are constituted by elongated piezoelectric bending transducers 58a and 58b, respectively. The piezoelectric flexure transducers 58a, 58b bend at a deflection surface 62 at a right angle with respect to the main surface, which is an extension of the individual flexure transducers 58a, 58b, when a corresponding control voltage is applied. In the closed position, the valve members 57a, 57b each engage the associated valve seat 63. The valve seat 63 surrounds the associated discharge ports 55a and 55b while maintaining a sealing function.

  The control valve means 16 may have its own control valve at each of the outlets 55a, 55b. On the contrary, the control valve means 16 in the embodiment is composed of a single 3/3 type continuous operation valve. This single 3/3 continuous operation valve uses the design described in European Patent EP 1207329, the contents of which are incorporated herein. In this case, the two piezoelectric bending transducers 58a and 58b are arranged side by side, their extended surfaces are joined together, and a solid support portion 64 provided at one end of the piezoelectric bending transducers 58a and 58b is integrated into a U-shaped or branched shape. The bending transducer unit 65 is coupled.

  Both of the bending transducers 58a and 58b can be electrically controlled. This control is preferably performed independently or in a constantly set manner to harmonize with each other. There is no detailed illustration of the wiring required for control. This type of control allows a special mode of interlocking operation. More importantly, the flexure transducer unit 65 at the bearing 64 is such that the entire flexure transducer unit 65 can rotate relative to the valve housing 66 about a rotational axis 67 perpendicular to the deflection surface 62. It is supported by the valve housing 66 of the control valve means. For this reason, a firm clamp is not used, and a support is provided so that the above-described rotational movement can be reliably performed. This is illustrated in FIG.

  The bending transducer unit 65 is actuated by mechanical spring means (not shown) so that both the valve members 57a, 57b assume the closed position when electrically disabled, as shown in FIG. Is preferred. From this state, the bending transducers 58a, 58b are driven to open the associated discharge ports 55a, 55b, respectively, and as a result, the discharge cross section is opened larger or smaller depending on the stroke. If necessary, the opening stroke can be further increased by applying an effective force in the closing direction and simultaneously actuating the other bending transducer. Due to the rigid connection of the support 64, the resulting deflection of the bending transducer biasing the valve seat 63 causes the entire bending transducer unit 65 to rotate about the axis of rotation 67 and has already been lifted. Bend the vessel further.

  However, the use of the flexure transducer unit 65 is further beneficial in that it provides a perfect symmetry as a design feature. Such a feature effectively promotes the purpose of accurate position adjustment. Similarly, the adjusting device housing 7 incorporating the servo means 12 is also designed to have symmetry with respect to the center in the longitudinal direction. However, when this is taken into consideration, the position adjusting device 1 as a whole is symmetrical. It can be said that the design has

Below, the typical operating method of the position adjustment apparatus 1 is demonstrated.
During operation of the system, the pressure medium is introduced into the supply chamber 27 through the supply communication section 22 and further into the two control chambers 37a and 37b through the pressure adjusting device 53, and is shown in FIG. The home position is taken. In this state, the output drive unit 4 of the connected power unit 2 is also at the home position indicated by the chain line in FIG.

  The servo members 34 are also housed in their home positions by the fluid operating surfaces 15a and 15b of the same quality provided in the two external diaphragm elements 35a and 35b. This is because the pressure applied to the first closing member 33a and the first inner diaphragm element 38a has been corrected in the same manner or balanced with each other as a result of the pressure supply. . The two discharge ports 55a and 55b are closed.

  Next, in order to move the output drive unit 4, the fluid pressure in the second control chamber 37 b closest to the supply chamber 27 is reduced. In FIG. 2, this occurs as a result of opening the second outlet 55b connected to the associated second control duct 48b by appropriately operating the control valve means 16. In this case, the second choke means 54 b installed upstream prevents excessive fluid from flowing out from the control pressure communication portion 52. The flow rate allowed by the second choke means 54b is preferably substantially lower than the discharge flow rate allowed by the control valve means 16.

  Since the first discharge port 55a remains closed, the pressure in the first control chamber 37a is kept constant. As a result, the force relationship in the servo means 12 changes and the servo member 34 is discharged. It moves toward the second control room 37b. At this time, the first closing member 33b moves together with the follower 46 to move away from the related valve seat 31, and the second outflow opening 32b located between the supply chamber 27 and the power chamber 26 opens. Accordingly, the pressure medium flows from the supply communication unit 22 to the power communication unit 24 and further reaches the drive chamber 5 of the connected power unit 2.

  Since the pressure in the pressure compensation chambers 42a and 42b is equal to the pressure in the power chamber 26 by the pressure compensation ducts 43a and 43b, pressure correction or pressure equalization occurs, and the first closing member 33a One spring means 44a holds the closed position.

  When the output drive unit 4 reaches a desired position, the second discharge port 55b is closed again under the control of the electronic control means 18. Shortly thereafter, all control pressure in the second control chamber 37b is restored by the choke means 54b, and the servo means 12 returns to the home position as shown in FIG. Since the control pressure in the two control chambers 37a and 37b is no longer constant, the pressure does not change any more and the output drive unit 4 remains in the desired position.

Even if the control pressure decreases for some reason, the home position is maintained by the two additional spring means 47a and 47b.
To initialize the output drive unit 4 as shown in FIG. 3, the control valve means 16 is controlled so that the first discharge port 55a is opened while the second discharge port 55b remains closed. Thus, the first control chamber 37a connected to the first discharge port 55a is discharged through the associated first control duct 48a. As a result, the pressure acts asymmetrically on the plurality of diaphragms—however, the control pressure in the second control chamber 37b actually remains constant—the servo member 34 is in the direction of the first control chamber 37a. The follower 46 pushes up the first closing member 33a from the associated valve seat. Through the first outflow opening 32a thus opened, the fluid in the power communication unit 24 is discharged to the discharge communication unit 23 together with the fluid in the driving chamber 5 connected thereto.

  If the output drive part 4 returns to a desired position, the control means 18 will switch the 1st valve member 57a to the original closed position, and the two discharge ports 55a and 55b will be closed. Here, the predetermined control pressure set by the control pressure communication unit 52 may be restored to the first control chamber 37a using the first choke means 54a. In this way, the servo means 12 returns to the home position as shown in FIG. 1, and the pressure set in the power communication unit 24 becomes constant again.

  An advantage of the design described in the embodiment is that the servo member 34 assumes the home position when the two control chambers 37a and 37b are under the same pressure condition. At this time, the power communication unit 24 is simultaneously shut off from both the supply communication unit 22 and the discharge communication unit 23 in a fluid-tight manner, and the fluid pressure of the power communication unit 24 becomes constant.

It is the schematic which shows the suitable whole arrangement | positioning in case the servo means of the position adjustment apparatus by this invention has taken the home position partially with a longitudinal cross-sectional view. FIG. 2 is a schematic diagram showing an overall arrangement similar to that in FIG. 1 when a servo unit or a setting unit takes a supply position. It is the schematic which shows the whole arrangement | positioning similar to FIG. 1, 2 when a servo means has taken the discharge position. FIG. 4 is a plan view of the bending transducer unit of the control valve means designed in a particularly advantageous manner as seen from the direction of arrow IV.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Fluid operation type position adjustment apparatus 2 ... Power unit 7 ... Adjustment apparatus housing 8 ... Housing inner chamber 12 ... Servo means 15a, 15b ... Fluid operation surface 16 ... Control valve means 22 ... Supply communication part 23 ... Discharge communication part 24 ... Power communication section 26 ... Power chamber 27 ... Supply chamber 28 ... Discharge chamber 31 ... Valve seats 32a, 32b ... Outlet openings 33a, 33b ... Closing members 34 ... Servo members 35a, 35b ... External diaphragm elements 37a, 37b ... Control chamber 38a, 38b ... Internal diaphragm elements 42a, 42b ... Pressure compensation chambers 44a, 44b, 47a, 47b ... Spring means 46 ... Following part 52 ... Common control pressure communication part 53 ... Pressure adjusting devices 54a, 54b ... Choke means 55a, 55b ... Exhaust Outlet 57a, 57b ... Valve members 58a, 58b ... Piezoelectric bending transducer 62 ... Deflection surface 64 ... Bearing 65 ... Bending conversion Unit

Claims (17)

Fluid actuated position adjusting device for a power device, in particular a fluid actuated position adjusting device for a process valve, comprising an adjusting device housing, at least one servo means being installed in the adjusting device housing The servo means can be moved by a fluid operation controlled to perform a position determining operation, and depending on the position of the servo means itself, a supply communication section and a discharge communication section, and a power unit Power communication units installed for connection with each other can be connected to each other in the fluid circuit in different ways, the servo means facing each other in the opposite direction of the servo movement to determine its position Two fluid working surfaces of the same size, both of which define a control chamber, and the two control chambers are connected to a common control pressure communication part. The two control chambers are connected to the flow of fluid via a choke means located in the middle by the common control pressure communication part, and the two control chambers are connected to respective choke members having discharge ports. The two outlets are provided with electrically operated control valve means, the control valve means together with the adjusting device housing form a structural unit, and The control valve means is a fluid operated position adjusting device capable of opening and closing two outlets individually and selectively including the possibility of closing both of them simultaneously. The control pressure communication part is connected to the supply communication part on its supply side, and a pressure regulator designed as a component of the structural unit is connected between the control pressure communication part and the supply communication part. Item 2. The position adjusting device according to Item 1. 2. The position adjusting device according to claim 1, wherein the control valve means is designed to operate continuously and / or pulse width modulated. The position adjusting device according to claim 1, wherein the control valve means has a valve member capable of being operated by piezoelectricity. The control valve means has two valve members each associated with an outlet, the valve member being disposed in the valve housing and constituted by two side-by-side elongated piezoelectric flexure transducers, The position adjusting device according to claim 1, wherein the piezoelectric bending transducer is a component of an integrated bending transducer unit. The bending transducer unit is installed to rotate around the rotation axis with respect to the valve housing, and the rotation shaft extends perpendicular to the deflection surface of the bending transducer, and the bending transducer unit itself is 6. The position adjusting device according to claim 5, wherein the position adjusting device is installed at a bearing portion at one end of the first and second bending transducers. 2. The position adjusting device according to claim 1, wherein the two control chambers are formed by end surfaces of the inner chamber of the housing in which the servo means are stored, facing each other in the axial direction. The servo means is positioned to shut off the power connection from both the supply connection and the discharge connection when the two control chambers are placed under the same fluid pressure conditions. The position adjusting device described. The position adjusting device according to claim 1, wherein the two fluid working surfaces are each provided on one diaphragm element. Servo means is installed in the housing inner chamber of the adjusting device housing and has a plunger-like servo member extending in the longitudinal direction of the housing inner chamber which can be installed with respect to the adjusting device housing, the servo member having two ends thereof 2. A position adjustment device according to claim 1, wherein the position adjustment device is held in the adjustment device housing so that it can be moved by an external diaphragm element at a portion, the external diaphragm element defining an associated fluid working surface. The servo member supports two closing members on the same axis, and the closing members are disposed at a distance from each other between the servo member and the adjusting device housing in the axial direction and acted in a direction toward each other by the spring means. Further, a power chamber is provided between each of the two valve seats facing in opposite directions in the axial direction and connected to a power communication portion between the closing members. Is connected to the supply chamber connected to the supply communication part on one side, and connected to the discharge chamber connected to the discharge communication part on the other side, and exists between the closing members. The follower portion of the servo member is designed such that, at the home position of the servo member, the two closing members engage with the associated valve seat and close the associated outflow opening. In response to the servo direction of the servo member, to release one of the closure member from the associated valve seat, the position adjusting device according to claim 11. The position adjusting device according to claim 11, wherein the servo member takes a home position when the same pressure is applied to the two control chambers. Each closing member is held by an inner diaphragm element so as to be movable with respect to the housing. The inner diaphragm element is axially inwardly of the outer diaphragm element installed adjacent to the outer diaphragm element. The diaphragm element is located at a distance from the diaphragm element, and the inner diaphragm element seals each adjacent discharge chamber or supply chamber from the pressure compensation chamber installed between the inner diaphragm element and the outer diaphragm element. The position adjusting device according to claim 11, wherein each of the pressure compensation chambers is always connected to a power chamber so that a fluid flows. The position adjusting device according to claim 13, wherein each pressure compensation chamber is always connected to the power chamber via an adjacent closing member so that fluid flows. 11. The position adjusting device according to claim 10, wherein the servo member is biased in the axial direction by two spring means each acting in opposite directions with respect to the adjusting device housing. 16. The position adjusting device according to claim 15, wherein the servo member is installed at a central position by two spring means acting in opposite directions. 16. A position adjusting device according to claim 15, wherein the spring force of at least one spring means is adjustable.

Images