JP2008079431A - Planar device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a planar device capable of attaining excellent low applied-voltage driving, silence, weight reduction, size reduction, and capable of performing direct-acting displacement with a simple structure compared to the conventional direct-acting displacement actuator. <P>SOLUTION: The planar device A includes a conductive macro-molecule actuator 3, an actuator device A1 having base material 2 including driving electrolyte to the conductive macro-molecule actuator 3, and electrode members 1a, 1b which are electrodes applied to the actuator device A1 and have open hole portions 1c, 1d for partially exposing the actuator device A1. The actuator device A1 positioned in the open hole portions 1c, 1d linearly displaces in its thickness direction by controlling voltage applied to the actuator device A1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a planar device using a conductive polymer actuator element.

  In a linear actuator, a thin planar device having a thickness of several mm includes, for example, a piezoelectric actuator, an electromagnetic actuator, and a fluid actuator, represented by a piezo element, a voice coil, a hydraulic cylinder, a pneumatic cylinder, and the like.

  In recent years, actuators that move linearly are required to be small in size, easy to structure, and driven by a low applied voltage. However, the above actuator does not satisfy this requirement due to the following problems. That is, the piezo element has a small linear displacement and requires a high applied voltage. The voice coil has a complicated structure, a large number of parts, and is heavy. In addition, the hydraulic / pneumatic cylinder has a large driving noise, and the size of the actuator is limited by its components, and a large driving source is required.

  Incidentally, a linear actuator using a conductive polymer is known. Since this actuator is lightweight, it is possible to reduce the weight of the entire apparatus incorporated therein, and it is expected to be used not only as a small drive device such as a micromachine but also as a large drive device. In particular, application is expected for uses such as artificial muscles, robot arms, artificial hands and actuators. For example, a linear actuator using polypyrrole can exhibit a maximum expansion / contraction rate of 15.1% per one oxidation-reduction cycle by electrolytic expansion / contraction, and can generate a maximum force of 22 MPa (for example, see Non-Patent Document 1). .

Genji, 4 others, “High Stretchable and Powerful Polypyrrole Linear Actuators”, Chemistry Letters, Japan, Vol. 32, 2003 No., p 576-577.

  An object of the present invention is to provide a planar device of linear motion displacement that is superior in driving with a low applied voltage, silence, weight reduction, miniaturization, and structural ease as compared with a conventional linear motion displacement actuator.

  The present inventor has focused on the above-mentioned conductive polymer material, which is excellent in light weight, downsizing, ease of structure, etc., and has started development of a device capable of linear displacement using this conductive polymer material, As a result of intensive studies, the present invention has been achieved.

That is, the planar device of the present invention is an actuator element having a conductive polymer actuator and a base material containing a driving electrolyte for the conductive polymer actuator,
An application electrode for the actuator element, comprising an electrode member having an aperture that partially exposes the actuator element;
By controlling the voltage applied to the actuator element, the actuator element positioned in the opening is linearly displaced in the thickness direction.

  The effect of this structure is shown below. The planar device includes an actuator element and an electrode member. The actuator element has a conductive polymer actuator and a base material, for example, a configuration in which the conductive polymer actuator is provided on both sides of the base material, or a configuration in which the conductive polymer actuator is provided only on one surface side. is there. When a conductive polymer actuator is provided only on one side, it is preferable to provide a conductive member on the other side. The base material includes a driving electrolyte, and this driving electric field liquid has a function of a driving liquid that acts on the conductive polymer actuator. The electrode member functions as an application electrode for the actuator element, and has an opening, and the surface of the actuator element can be seen from the opening. The actuator element located in the opening is configured to be linearly displaced.

  For example, the electrode member is installed on both sides of a planar actuator element, and is configured to apply a positive voltage to one surface and use the other surface as a negative electrode. When the voltage of the positive electrode is applied to the conductive polymer actuator, an area change occurs due to the extension in the surface direction of the conductive polymer actuator. On the other hand, when a negative electrode voltage is applied to the conductive polymer actuator, an area change occurs due to contraction in the surface direction of the conductive polymer actuator. That is, by controlling the applied voltage, the conductive polymer actuator expands and contracts in the surface direction, so that the linear displacement in the thickness direction of the actuator element can be taken out from the opening where the actuator element is not regulated. .

  Moreover, as an embodiment of the planar device of the present invention, the conductive polymer actuator is preferably configured on at least one side of the base material, and a conductive member is provided on the other side. The conductive member here may be the same conductive polymer material as the material of the conductive polymer actuator provided on the opposite surface of the metal, the noble metal, or the base material. It is preferable to provide a polymer material. This is because the expansion and contraction behavior of the conductive polymer actuator is more preferably realized by using the same material.

  As another embodiment of the planar device of the present invention, conductive polymer actuators having the same or substantially the same thickness are formed on both surfaces of the insulating base material, and the polarity of the applied voltage to the actuator element is controlled, thereby opening it. The actuator element located in the hole can be configured to be linearly displaced in the thickness direction. With this configuration, for example, the conductive polymer actuator applied to the positive electrode expands and the conductive polymer actuator applied to the negative electrode contracts, so that the positive electrode application surface of the actuator element located at the opening is convex. It becomes a shape, and the negative electrode application surface becomes a concave shape. And, by controlling the polarity of the applied voltage to the actuator element so as to reverse each other, for example, from the positive electrode to the negative electrode, the positive electrode application surface always has a convex shape and the negative electrode application surface has a concave shape. Thus, the shape of the actuator element in the opening can be switched from the convex shape to the concave shape, and from the concave shape to the convex shape.

  As another embodiment of the planar device of the present invention, a conductive polymer actuator having a predetermined thickness is formed on one side of a substrate, and the conductive polymer actuator applied to the positive electrode is extended to be opened. A push-up force is generated by the actuator element located in the hole. According to this configuration, the conductive polymer actuator having a predetermined thickness is provided on one surface of the substrate, and the conductive member is provided on the other surface side. And, for example, when the conductive polymer actuator surface is formed in a convex shape upward from the opening portion in advance, by applying the conductive polymer actuator to the positive electrode, linear displacement is performed so that the convex vertex is raised. . In such a case, by setting the conductive polymer actuator to a predetermined thickness, it is possible to increase (or increase) the pushing force due to this linear displacement. The thickness of the conductive polymer actuator can be designed by its material and manufacturing method, and the thickness can be designed according to the device design. That is, if the required pushing force is determined, the thickness of the conductive polymer actuator can be determined accordingly.

  Moreover, in this invention, when providing a conductive polymer actuator in a base material, it is preferable to provide through a metal electrode layer. As a material of the metal electrode layer, for example, a noble metal such as gold or platinum is preferable. This is because by providing the conductive polymer via the metal electrode layer, the bondability with the substrate and the ion transferability are improved.

  According to the above, the present invention provides a planar device for linear displacement that is superior in driving with low applied voltage, silence, weight reduction, miniaturization, and ease of structure compared to conventional linear displacement actuators. it can.

Hereinafter, embodiments of the present invention will be described in detail.
(Configuration of actuator element)
The actuator element of the present invention can be configured to provide a conductive polymer actuator on at least one surface of a substrate. In addition, the actuator element can be configured such that the conductive polymer actuator is provided on both surfaces of the base material so as to have the same thickness or substantially the same thickness. When the actuator element is provided on one side, it is preferable to provide an electrode layer (hereinafter sometimes referred to as a counter electrode or a driven counter electrode) on the opposite side. The electrode layer is preferably a metal, a noble metal, or the same conductive polymer material. The thickness of the conductive polymer actuator can be set as appropriate. A method for manufacturing the conductive polymer actuator will be described later. The driven counter electrode acts so as not to substantially interfere with the behavior of the conductive polymer actuator on the opposite surface across the substrate.

(Conductive polymer material)
The conductive polymer of the present invention is not particularly limited as long as the film-forming body can be expanded and contracted by an applied voltage. For example, those containing pyrrole and / or a pyrrole derivative in the molecular chain are preferable.

In addition, the conductive polymer is not particularly limited as long as the anion as a dopant can be doped and dedoped to the conductive polymer. As the dopant, trifluoromethanesulfonic acid ion, BF ₄ ⁻ , PF ₆ ⁻ , perchloric acid ion or perfluoroalkylsulfonylimide ion can be used according to the required amount of electrolytic expansion and contraction, application, and the like.

In particular, as the conductive polymer, the conductive polymer is a film-shaped conductive polymer doped with perfluoroalkylsulfonylimide ions represented by the following formula (1):
_{(C m F (2m + 1} ) SO 2) (C n F (2n + 1) SO 2) N - (1)
[In the above formula (1), m and n are arbitrary integers. ],
Alternatively, as the conductive polymer, a film-shaped conductive polymer doped with perfluoroalkylsulfonylmethide ion represented by the following formula (2) is used.
_{(C l F (2l + 1} ) SO 2) (C m F (2m + 1) SO 2) (C n F (2n + 1) SO 2) C - (2)
[In the above formula (2), l, m and n are arbitrary integers. ],
However, it is preferable because a higher driving speed can be obtained.

(Base material)
The base material of the present invention is not particularly limited as long as it is a material that can be expanded and contracted in the surface direction, and examples thereof include nonwoven fabric, paper, cloth, cotton, membrane material, woven material, knitted material, and the like. Moreover, it is preferable that a base material has insulation and can hold | maintain so that an electrolyte solution is impregnated or liquid movement is possible. Further, the thickness and hardness of the substrate are not particularly limited as long as they are designed so as to exhibit a linear displacement function.

  Moreover, as a base material, porous base materials (porous support body), such as polytetrafluoroethylene (PTFE), polyamide, polyolefin, a cellulose acetate, are preferable, for example. Among these, as the porous substrate (porous support), porous polytetrafluoroethylene (porous PTFE) is used from the viewpoint of chemical stability and softness and durability in repeated driving of the actuator element. It is particularly preferable to use it. When driven in the air, the layer holding the electrolyte (porous substrate layer (porous support layer)) preferably has a high ionic conductivity, and the porosity is as high as possible. Higher is preferred.

(Drive electrolyte)
The driving electrolyte used in the present invention includes an electrolyte for driving the polymer actuator element by applying a voltage, and is used as a solvent for dissolving the electrolyte. In the present invention, an organic solvent, water, or a mixed solution of an organic solvent and water can be used as a solvent for dissolving the electrolyte. In the present invention, a mixed solution of an organic solvent and an acid, or a mixed solution of an organic solvent, water, and an acid can be used as a solvent for dissolving the electrolyte. Moreover, when using what the said conductive polymer contact-treated with the acid, an organic solvent or the mixed solution of an organic solvent and water can be used as a solvent which melt | dissolves the said electrolyte. By including these mixed solutions as the driving electrolyte, the polymer actuator element can drive a large amount in the driving electrolyte when the amount of expansion / contraction (driving speed) with respect to time in a state where a constant voltage is applied is measured. Speed can be shown.

  In the present invention, the organic solvent is preferably a polar organic compound containing at least one bond or functional group among an ester bond, a carbonate bond, and a nitrile group.

  The organic solvent is not particularly limited, but is preferably a solvent that can be used as an electrochemical reaction field. Examples of the polar organic compound include γ-butyrolactone, α-methyl-γ-butyrolactone (an organic compound containing an ester bond), propylene carbonate, ethylene carbonate, dimethyl carbonate, diethyl carbonate, and methyl ethyl carbonate (above, carbonate. Organic compounds containing a bond), and acetonitrile, propionitrile, succinonitrile (an organic compound containing a nitrile group). The polar organic compound is preferable because a high stretching speed and a large maximum stretching ratio can be obtained. Among these, for example, propylene carbonate, butyrolactone, acetonitrile, or ethylene carbonate is preferable, and long-term durability can be obtained with well-balanced driving performance.

  Moreover, when water is contained in the mixed solvent, the mixing ratio of water and the organic solvent is not particularly limited. When a mixed solvent containing water is used as the solvent of the driving electrolyte, the driving speed can be improved twice or more as compared with the case where only the organic solvent is used. Moreover, the said organic solvent may be used independently, and may mix and use 2 or more types.

  It is difficult to specify the mixing ratio of the driving electrolyte according to the type of conductive polymer or organic solvent. The minimum value of the organic solvent for improving the driving speed depends on the kind of the organic solvent due to the ability of the organic solvent to swell the conductive polymer. For example, for propylene carbonate, the water content of the special grade reagent is 0.005%, so the mixing ratio of water and organic solvent can be 0.1: 99.9. The range of the suitable mixing ratio of water and the organic solvent in the mixed solvent is a volume ratio, and the water-containing ratio lower limit is selected from the values selected from 0.5, 1.0, 5.0, 10 or 20. A range in which the upper limit of the ratio is selected from 99.5, 99.0, 95.0, 90.0, or 80.0 can be selected depending on the type of the organic solvent. The mixing ratio can be obtained by analyzing the driving electrolyte by using a measurement method using a gas chromatography method, particularly a measurement method using the Karl Fischer method when the water content is low. it can.

  For example, when the organic solvent is propylene carbonate, the mixing ratio of water and propylene carbonate is 25:75 to 75:25 by volume ratio, so that the driving speed by applying voltage to the conductive polymer is high. It is preferable because it becomes faster. A plurality of the organic solvents may be used as the mixed solvent, and in this case, the mixing ratio is calculated by a ratio between the weight of water and the total weight of all organic solvents.

  The water is not particularly limited, but is preferably pure water, distilled water, or ion exchanged water because an inhibitor to electrolytic stretching due to metal ions, chloride ions, or the like is hardly included.

In addition, the driving electrolyte includes an anion as an electrolyte. The anion can use trifluoromethanesulfonic acid ions, BF ₄ ⁻ , PF ₆ ⁻ or perfluoroalkylsulfonylimide ions as dopant ions. In addition, as the anion, for example, an electrolyte salt that forms a counter ion with a cation with Na ⁺ , K ⁺ , Li ^+, or the like may be used.

  Examples of the electrolyte salt include lithium salt, sodium salt, potassium salt, lithium perfluoroalkylsulfonylimide, lithium salt of bistrifluoromethanesulfonylimide, tetrabutylammonium salt of bistrifluoromethanesulfonylimide, and the like. Can do.

  When an electrolyte salt is added as the electrolyte, the electrolyte salt is preferably included in an amount of 1 to 90 parts by weight, more preferably 5 to 75 parts by weight, with respect to 100 parts by weight of the driving electrolyte. It is particularly preferable that 50 parts by weight is contained.

  Further, a mixed solution containing an acid can also be used as the driving electrolyte. The acid is not particularly limited, but is preferably a monovalent strong acid.

Examples of the acid include perfluoroalkylsulfonylimide such as (CF ₃ SO ₂ ) ₂ NH, (C ₂ F ₅ SO ₂ ) ₂ NH, (CF ₃ SO ₂ ) (C ₂ F ₅ SO ₂ ) NH, Perfluoroalkylsulfonylmethides such as (CF ₃ SO ₂ ) ₃ CH, (C ₂ F ₅ SO ₂ ) ₃ CH, (CF ₃ SO ₂ ) (C ₂ F ₅ SO ₂ ) ₂ CH, and inorganic acids such as nitric acid And the like are preferable.

  The acid may be used alone, or two or more kinds may be mixed and used, but the pH of the driving electrolyte is preferably 0-4, more preferably 1-2. preferable. When the pH is 4 or more, it is difficult to obtain a sufficient addition effect. On the other hand, when the pH is 0 or less, the solvent may be decomposed. In addition, when using what the said conductive polymer contact-treated with the acid, it is not necessary to contain an acid in drive electrolyte solution especially.

Furthermore, the driving electrolyte contains an anion. The anion can use trifluoromethanesulfonic acid ions, BF ₄ ⁻ , PF ₆ ⁻ or perfluoroalkylsulfonylimide ions as dopant ions. Even when these anions are used, the driving speed of the polymer actuator element including the conductive polymer can be improved by using the mixed solvent.

In particular, in order to obtain a higher driving speed in the driving electrolyte solution, the bulk of the conductive polymer included in the polymer actuator element includes a perfluoroalkylsulfonylimide ion represented by the following formula (3). In addition, it is more preferable that the driving electrolyte contains a perfluoroalkylsulfonylimide ion represented by the following formula (3).
_{(C m F (2m + 1} ) SO 2) (C n F (2n + 1) SO 2) N - (3)
[In the above formula (3), m and n are arbitrary integers. ]

Furthermore, in order to obtain a higher driving speed in the driving electrolyte, a perfluoroalkylsulfonyl metide ion represented by the following formula (4) is contained in the bulk of the conductive polymer contained in the polymer actuator element. It is more preferable that the driving electrolyte contains a perfluoroalkylsulfonylmethide ion represented by the following formula (4).
_{(C l F (2l + 1} ) SO 2) (C m F (2m + 1) SO 2) (C n F (2n + 1) SO 2) C - (4)
[In the above formula (4), l, m and n are arbitrary integers. ]

  By containing these dopant ions, the perfluoroalkylsulfonylimide or perfluoroalkylsulfonylmethide ion is taken into or released from the bulk of the conductive polymer, and the conductive polymer has a large stretching motion. Therefore, the polymer actuator element can exhibit a higher driving speed than the conventional electroconductive polymer electrostretching method.

  In the present invention, a solution containing a nonionic organic compound that is liquid at normal temperature and pressure can be used as a solvent for dissolving the electrolyte. The nonionic organic compound is not particularly limited as long as it does not have an ionic functional group or ionic moiety in the molecular structure, and can be used as appropriate. The organic compound may be any organic compound that can serve as a salt solvent containing ions that serve as charge carriers, or any organic compound that can serve as charge carriers. The nonionic organic compound has a boiling point or decomposition temperature of 180 ° C. or higher, is preferably liquid at normal temperature and pressure, and preferably has a function as a solvent. Further, an organic solvent having a boiling point of 245 ° C. or higher is more preferable. These compounds may be used alone or in combination of two or more.

  Examples of the nonionic organic compound include diethylene glycol, glycerin, sulfolane, propylene carbonate, butyrolactone, acetonitrile, ethylene carbonate, and a polyether compound. Among them, for example, diethylene glycol, glycerin, sulfolane, propylene carbonate, butyrolactone, or a polyether compound is preferable, and further, using a polyether compound provides a long-term durability with a well-balanced driving performance. Is particularly preferable.

  The nonionic organic compound may be used singly or in combination of two or more, but the blending amount is 0.01 to 100 weights with respect to 100 parts by weight of the electrolytic solution. Parts, preferably 0.05 to 50 parts by weight, more preferably 0.1 to 30 parts by weight. If the amount is less than 0.01 parts by weight, sufficient durability over time may not be obtained, and if the amount exceeds 100 parts by weight, the drive frequency may decrease.

In addition, the driving electrolyte contains an anion as an electrolyte. The anion can use trifluoromethanesulfonic acid ions, BF ₄ ⁻ , PF ₆ ⁻ or perfluoroalkylsulfonylimide ions as dopant ions. In addition, as the anion, for example, an electrolyte salt that forms a counter ion with a cation with Na ⁺ , K ⁺ , Li ^+, or the like may be used.

  Examples of the electrolyte salt include lithium salt, sodium salt, potassium salt, lithium perfluoroalkylsulfonylimide, lithium salt of bistrifluoromethanesulfonylimide, tetrabutylammonium salt of bistrifluoromethanesulfonylimide, and the like. Can do.

  When an electrolyte salt is added as the electrolyte, the electrolyte salt is preferably included in an amount of 1 to 90 parts by weight, more preferably 5 to 75 parts by weight, with respect to 100 parts by weight of the driving electrolyte. It is particularly preferable that 50 parts by weight is contained.

In the present invention, the driving electrolyte may further contain an ionic liquid. The ionic liquid can be used without any particular limitation. Among these, the ionic liquid is composed of imidazolium ions such as tetraalkylammonium ions, dialkylimidazolium ions, and trialkylimidazolium ions, pyrazolium ions, pyrrolium ions, pyrrolium ions, pyrrolidinium ions, and piperidinium ions. At least one cation selected from the group consisting of PF ₆ ⁻ , BF ₄ ⁻ , AlCl ₄ ⁻ , ClO ₄ ⁻ , and an anion selected from at least one group selected from the group consisting of sulfonium imide anions represented by the following formula (5): It is preferable that the salt which consists of a combination of these is included. These ionic liquids may be used alone or in combination of two or more.

_{(C m F (2m + 1} ) SO 2) (C n F (2n + 1) SO 3) N - (5)
[In the above formula (5), m and n are arbitrary integers. ].

  Furthermore, in the driving electrolyte solution, in order to obtain a higher driving speed, the bulk of the conductive polymer included in the actuator element includes a perfluoroalkylsulfonylimide ion represented by the following formula (6), In addition, it is more preferable that the driving electrolyte contains a perfluoroalkylsulfonylimide ion represented by the following formula (6).

_{(C m F (2m + 1} ) SO 2) (C n F (2n + 1) SO 2) N - (6)
[In the above formula (6), m and n are arbitrary integers. ].

  In addition, in order to obtain a higher driving speed in the driving electrolyte, the bulk of the conductive polymer included in the actuator element includes perfluoroalkylsulfonylmethide ion represented by the following formula (7), In addition, it is more preferable that the driving electrolyte contains a perfluoroalkylsulfonyl metide ion represented by the following formula (7).

_{(C l F (2l + 1} ) SO 2) (C m F (2m + 1) SO 2) (C n F (2n + 1) SO 2) C - (7)
[In the above formula (7), l, m and n are arbitrary integers. ].

  By containing these dopant ions, the perfluoroalkylsulfonylimide or perfluoroalkylsulfonylmethide ion is taken into or released from the bulk of the conductive polymer, and the conductive polymer has a large stretching motion. Therefore, the actuator element can exhibit a higher driving speed than the conventional electrolytic polymer electrostretching method.

  In the actuator element of the present invention, the driving electrolyte contains the same anion as the anion contained in the conductive polymer tangible material having a specific shape and containing the conductive polymer. Is preferred. Easily enter / exit into the conductive polymer bulk by containing the same anion as the anion that can be used as a dopant in the bulk of the conductive polymer used in the actuator element. Therefore, it is possible to easily obtain a desired amount of electrolytic expansion / contraction. In addition, when the anion contained in the driving electrolyte is perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion, production of a conductive polymer tangible material that causes electrolytic stretching in the driving electrolyte It is preferable that the ionic radius is the same as that of perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion contained in the electrolyte for electrolysis because the electrolytic expansion and contraction can be easily performed.

(Method for producing conductive polymer actuator)
As the conductive polymer actuator, the conductive polymer film obtained on the working electrode by electrolytic polymerization can be used as it is. Moreover, a conductive polymer layer (film | membrane) can also be formed by carrying out direct electropolymerization to a base material. Moreover, a conductive polymer layer (film) can be simultaneously formed on both surfaces of the substrate by electrolytic polymerization. Further, a conductive polymer layer (film) having a high density can be formed on one side of the substrate, and a conductive polymer layer (film) having a low density on the other side can be formed simultaneously or separately. In this case, the conductive polymer layer (film) corresponds to a conductive polymer actuator, and the low-density conductive polymer layer (film) corresponds to a driven counter electrode.

  Further, it is more preferable that the conductive polymer layer (film) is not directly formed on the base material by electrolytic polymerization, but is performed through the metal electrode layer. As the metal electrode layer, gold, platinum, nickel and the like can be used, and gold, platinum and the like are particularly preferable. The metal electrode layer can be formed on the substrate by a known method. For example, the electrode layer can be formed on the substrate by sputtering. The thickness of the electrode layer is not particularly limited.

  Moreover, the electrolytic solution (electrolytic solution for producing a conductive polymer) used for the above-mentioned electropolymerization is an ether bond, an ester bond, a carbonate bond, a hydroxyl group, a nitro group, a sulfone group, and a nitrile group. It is preferable to contain an organic compound containing a functional group and / or a halogenated hydrocarbon as a solvent. By including the above-mentioned solvent in the above electrolytic solution and further including perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion, the obtained conductive polymer is larger in one redox cycle. It shows electrolytic expansion and contraction.

  Examples of the organic compound include 1,2-dimethoxyethane, 1,2-diethoxyethane, tetrahydrofuran, 2-methyltetrahydrofuran, 1,4-dioxane (an organic compound containing an ether bond), γ-butyrolactone, Ethyl acetate, n-butyl acetate, t-butyl acetate, 1,2-diacetoxyethane, 3-methyl-2-oxazolidinone, methyl benzoate, ethyl benzoate, butyl benzoate, dimethyl phthalate, diethyl phthalate ( Above, organic compound containing ester bond), propylene carbonate, ethylene carbonate, dimethyl carbonate, diethyl carbonate, methyl ethyl carbonate (above, organic compound containing carbonate bond), ethylene glycol, butanol, 1-hexanol, cyclohexano 1-octanol, 1-decanol, 1-dodecanol, 1-octadecanol (above, organic compound containing hydroxyl group), nitromethane, nitrobenzene (above, organic compound containing nitro group), sulfolane, dimethylsulfone (above) , An organic compound containing a sulfone group), and acetonitrile, butyronitrile, benzonitrile (an organic compound containing a nitrile group). The organic compound containing a hydroxyl group is not particularly limited, but is preferably a polyhydric alcohol or a monohydric alcohol having 4 or more carbon atoms because of its high expansion / contraction ratio. In addition to the above examples, the organic compound may have any two or more bonds or functional groups among the ether bond, ester bond, carbonate bond, hydroxyl group, nitro group, sulfone group and nitrile group in the molecule. It may be an organic compound contained in combination.

  In addition, the halogenated hydrocarbon contained as a solvent in the electrolytic solution for producing a conductive polymer is one in which at least one hydrogen in the hydrocarbon is substituted with a halogen atom, and is stably present as a liquid under electrolytic polymerization conditions. If it can do, it will not specifically limit. Examples of the halogenated hydrocarbon include dichloromethane and dichloroethane. Although only one kind of the halogenated hydrocarbon can be used as a solvent in the electrolytic solution for producing the conductive polymer, two or more kinds can be used in combination. The halogenated hydrocarbon may be used as a mixed solution with the organic compound, or a mixed solvent with the organic solvent may be used as a solvent in the electrolytic solution for producing the conductive polymer.

  In the bulk of the conductive polymer obtained by the electrolytic polymerization method, the perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion used in the electrolytic polymerization method is present. The conductive polymer in which the conductive polymer contains the perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion has a large expansion / contraction amount per one oxidation-reduction cycle as described above, and the driving speed (% / The value of s) is also large, and it is preferable because it can be easily obtained. For example, in the case of a film-like body of the above-described conductive polymer tangible material, the maximum expansion rate of conventional electroconductive polymer electrostriction can be obtained up to about 10 to 15% per oxidation-reduction cycle in the surface direction. In contrast, the perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion is included as a dopant in the bulk of the conductive polymer, so that 16% per oxidation-reduction cycle in the lengthwise direction. As described above, an excellent maximum expansion / contraction rate of 20% or more can be exhibited. The film-like body can be suitably used for applications requiring a large expansion / contraction rate typified by artificial muscle. In addition to the dopant, the conductive polymer tangible material may appropriately include a conductive material such as a metal wire or a conductive oxide in order to reduce the resistance value as the working electrode.

  The content of the perfluoroalkylsulfonylimide ion or perfluoroalkylsulfonylmethide ion in the electrolytic polymerization method in the electrolytic solution is not particularly limited, but in order to ensure sufficient ionic conductivity of the electrolytic solution. The perfluoroalkylsulfonylimide salt is preferably contained in the electrolytic solution in an amount of 1 to 40% by weight, and more preferably 2.8 to 20% by weight. Moreover, in order to improve the film quality of the conductive polymer film obtained by the electrolytic polymerization method, a composite electrolyte in which 1 to 80% of trifluoromethanesulfonate is added to the electrolytic solution can also be used. Moreover, these ions may be used alone or in combination of two or more.

  In addition, the electrolytic solution (electrolytic solution for producing a conductive polymer) used in the electrolytic polymerization method further contains a monomer of a conductive polymer in addition to the perfluoroalkylsulfonylimide salt. In addition, other known additives such as polyethylene glycol and polyacrylamide may also be included.

As the electropolymerization method, a known electropolymerization method can be used as the electropolymerization of the conductive polymer monomer, and any of the constant potential method, the constant current method, and the electric sweep method can be appropriately used. it can. For example, the electrolytic polymerization method can be performed at a current density of 0.01 to 20 mA cm ⁻² and a reaction temperature of −70 to 80 ° C. In order to obtain a conductive polymer having a good film quality, a current density of 0.1 It is preferable to carry out under the conditions of ˜2 mA cm ⁻² and the reaction temperature of −40 to 40 ° C., and the reaction temperature is more preferably −30 to 30 ° C.

  In addition, the working electrode used for the said electrolytic polymerization method will not be specifically limited if it can be used for electrolytic polymerization, An ITO glass electrode, a carbon electrode, a metal electrode, etc. can be used suitably. The metal electrode is not particularly limited as long as it is an electrode mainly composed of metal, but a metal for a metal element selected from the group consisting of Pt, Ti, Ni, Au, Ta, Mo, Cr and W. A single electrode or an alloy electrode can be preferably used. Among them, the metal species contained in the metal electrode is particularly preferably Pt or Ti because the obtained conductive polymer has a large expansion / contraction rate and generation force and the electrode can be easily obtained. As the above alloy, for example, trade names “INCOLOY alloy 825”, “INCONEL alloy 600”, “INCONEL alloy X-750” (manufactured by Daido Special Metal Co., Ltd.) can be used. As the counter electrode, a known electrode such as Pt or Ni can be preferably used.

  The monomer of the conductive polymer contained in the electrolytic solution used in the above electrolytic polymerization method is not particularly limited as long as it is a compound that is polymerized by oxidation by electrolytic polymerization and exhibits conductivity. For example, pyrrole , Hetero five-membered cyclic compounds such as thiophene and isothianaphthene, and derivatives such as alkyl groups and oxyalkyl groups thereof. Of these, hetero five-membered cyclic compounds such as pyrrole and thiophene, and derivatives thereof are preferable, and in particular, a conductive polymer containing pyrrole and / or a pyrrole derivative is easy to produce, and as a conductive polymer. It is preferable because it is stable. These compounds may be used alone or in combination of two or more.

  In the actuator element, the thickness of the conductive high-layer (film) is appropriately designed according to the specifications of the device, and examples thereof include a range of 0.01 to several hundred μm.

(Electrode member)
The shape and size of the electrode member are not particularly limited, and for example, a circular shape, a square shape, a polygonal shape, an irregular shape, and the like can be appropriately designed according to the device application. The electrode member can be made of a solid material or a flexible material, and a material can be selected according to its use as a device. The electrode member is not particularly limited as long as it exhibits its function, and examples thereof include metals and noble metals.

  Further, the electrode member is constituted by, for example, a pair of members so that it can be applied to both surfaces of the actuator element. And the shape and size in particular of the aperture part formed in an electrode member are not restrict | limited, For example, according to a device use, a round shape, a square shape, a polygon, an irregular shape, etc. can be designed suitably. Moreover, an opening part may be formed in one member, and can also be formed in both members. Also, a plurality of apertures can be provided.

(Structure of planar device)
(Embodiment 1)
An example of a planar device will be described with reference to FIG. FIG. 1A shows an example of the appearance of the planar device A. The planar device A has a circular shape, and circular opening portions 1c and 1d are formed in each of the electrode members 1a and 1b as shown in FIG. A conductive polymer actuator 3 is formed on one surface of the substrate 2, and a driven counter electrode 4 is formed on the opposite surface. The electrode members 1a and 1b are assembled so as to sandwich the end of the actuator element A1 over the entire circumference. The assembly is not particularly limited, but can be fixed with screws, for example. In addition, the planar device A or the actuator element A1 is preliminarily immersed in the driving electrolyte so that the substrate 2 holds the driving electrolyte. Further, when the actuator element A1 swells when immersed in the drive electrolyte, the amount of swelling and expansion is shown as a concave shape on the lower side in the drawing.

  FIGS. 1C and 1D are diagrams illustrating a case where a spherical weight 5 is placed on the planar device A and a voltage is applied. As shown in FIG. 1 (c), when a positive electrode is applied to the conductive polymer actuator 3 and a negative electrode is applied to the driven counter electrode 4, the conductive polymer actuator 3 extends and follows the base 2. The driven counter electrode 4 behaves. As a result, the actuator element A1 is linearly displaced vertically downward with the weight 5 placed on it. When the voltage application is stopped, the linear displacement is also stopped, and when the voltage application is performed again, the linear displacement is resumed.

  In addition, as shown in FIG. 1D, when a negative electrode is applied to the conductive polymer actuator 3 and a positive electrode is applied to the driven counter electrode 4, the conductive polymer actuator 3 contracts and is driven so as to follow. The material 2 and the driven counter electrode 4 behave. As a result, the actuator element A1 is linearly displaced vertically upward while the weight 5 is placed. When the voltage application is stopped, the linear displacement is also stopped, and when the voltage application is performed again, the linear displacement is resumed.

  The planar device A of Embodiment 1 functions as a pulling force when the conductive polymer actuator 3 contracts, for example.

(Embodiment 2)
An example of a planar device will be described with reference to FIG. FIG. 2A shows an example of a cross-sectional view of the planar device B. The planar device B has a circular shape, and circular hole portions 11c and 11d are formed in the electrode members 11a and 11b, respectively. Conductive polymer actuators 13 and 14 are formed on both surfaces of the substrate 2 to have the same thickness or substantially the same thickness. The conductive polymer actuators 13 and 14 are formed in an area smaller than the circular opening portions 11c and 11d, and the electrode members 11a and 11b are assembled so as to sandwich the end portion of the substrate 12 over the entire circumference. It has been. The assembly is not particularly limited, but can be fixed with screws, for example. Further, the planar device B or the actuator element B1 is preliminarily immersed in the driving electrolyte, and the driving electrolyte is held on the base 2. Furthermore, when immersed in the driving electrolyte, the actuator element B1 swells and the amount of swelling and extension is shown as a concave shape on the lower side in the drawing.

  As shown in FIG. 2B, when a negative electrode is applied to the conductive polymer actuator 13 and a positive electrode is applied to the conductive polymer actuator 14, the conductive polymer actuator 13 contracts, and the conductive polymer actuator 14 extends. The base material 12 behaves so as to follow them. As a result, the actuator element B1 is linearly displaced vertically upward. When the voltage application is stopped, the state shown in FIG. 2B (upwardly convex shape) is maintained.

  On the other hand, when a positive electrode is applied to the conductive polymer actuator 13 and a negative electrode is applied to the conductive polymer actuator 14, the conductive polymer actuator 13 expands and the conductive polymer actuator 14 contracts. The base material 2 behaves so as to follow them. As a result, the actuator element B1 is linearly displaced vertically downward. When the voltage application is stopped, the state shown in FIG. 2A (a convex shape downward) is maintained.

  In FIG. 2C, the conductive polymer actuators 13 and 14 are formed on the both surfaces of the base material 2 to have the same thickness or substantially the same thickness, and the conductive polymer actuators 13 and 14 have circular openings. An example is shown in which the electrode members 11a and 11b are assembled so as to sandwich the end portions of the conductive polymer actuators 13 and 14 over their entire circumferences, with an area larger than the portions 11c and 11d. Also in this configuration, when a positive electrode is applied to the conductive polymer actuator 13 and a negative electrode is applied to the conductive polymer actuator 14, it is linearly displaced vertically downward to form a convex shape on the lower side. Then, when a negative electrode is applied to the conductive polymer actuator 13 and a positive electrode is applied to the conductive polymer actuator 14, it is displaced linearly upward and forms a convex shape on the upper side.

  In the planar device B of the second embodiment, conductive polymer actuators 13 and 14 are formed with a base material 12 sandwiched therebetween, each of which has a working electrode-counter electrode relationship, and when one is extended, the other is contracted by a bimorph. It is configured. Due to such a configuration, the displacement in the thickness direction is a displacement of unevenness.

(Embodiment 3)
An example of the planar device will be described with reference to FIG. The planar device C has a circular shape, and as shown in FIG. 3A, circular apertures 21c and 21d (21d may be omitted) are formed in the electrode members 21a and 21b, respectively. Has been. A conductive polymer actuator 23 is formed on one surface (upper side in the drawing) of the base material 22, and a driven counter electrode 24 is formed on the opposite surface. The conductive polymer actuator 23 is formed on the base material 22, but in FIG. 3, the conductive polymer actuator 23 is formed so as to be thicker than other portions at a position in the opening 21 c. In addition, you may form so that it may have predetermined thickness over the whole formed in the base material 22. FIG.

  The electrode members 21a and 21b are assembled so as to sandwich the end of the actuator element C1 over the entire circumference. The assembly is not particularly limited, but can be fixed with screws, for example. Further, the planar device C or the actuator element C1 is preliminarily immersed in the driving electrolyte so that the substrate 22 holds the driving electrolyte. Further, when the actuator element C1 swells when dipped in the driving electrolyte, the amount of swelling and expansion is shown as a convex shape on the upper side in the drawing.

  As shown in FIG. 3B, when a positive electrode is applied to the conductive polymer actuator 23 and a negative electrode is applied to the driven counter electrode 24, the conductive polymer actuator 23 expands, and the behavior of the entire actuator element C1 is as follows. , It is displaced linearly upwards vertically. The pushing force generated here becomes stronger (larger) according to the thickness of the conductive polymer actuator 23. Furthermore, when the conductive polymer actuator 23 has a predetermined thickness, it is presumed that the push-up force generated vertically upward is strong (large) by being restricted by the inner wall surface of the aperture 21c of the electrode member 21a. The base material 22 and the driven counter electrode 24 follow the behavior of the conductive polymer actuator 23. When the voltage application is stopped, the linear displacement is also stopped, and when the voltage application is performed again, the linear displacement is resumed.

  As shown in FIG. 3C, when a negative electrode is applied to the conductive polymer actuator 23 and a positive electrode is applied to the driven counter electrode 24, the conductive polymer actuator 23 contracts, and the behavior of the entire actuator element C1 is as follows. , Linearly move downwards vertically.

  In the planar device C of the third embodiment, for example, by increasing the thickness of the conductive polymer actuator (layer) constituting the planar device A of the first embodiment, the conductive polymer actuator (layer) exhibits an elongation behavior. When shown, it functions as a push-up force that rises due to displacement restriction by the opened electrode member. The thickness of the conductive polymer actuator (layer) depends on the size of the aperture of the electrode member, and is preferably set to be 1% or more of the diameter of the circular aperture, for example. For example, if the diameter of the circular aperture is 3 mm, the thickness of the conductive polymer actuator (layer) is preferably set to 30 μm or more. It is considered that the pushing force increases as the thickness of the conductive polymer actuator (layer) increases.

(Voltage application control)
In the present invention, examples of the method for controlling the applied voltage include switching between positive and negative electrodes, voltage value control, pulse control, continuous application, and intermittent application control. In the present invention, expansion and contraction occurs in proportion to the applied time (period). Therefore, the amount of linear motion displacement can be easily controlled by controlling the application time.

  The applied voltage depends on the design of the device size / performance, conductive polymer actuator material, thickness, size, etc. When polypyrrole is used as the conductive polymer, the applied voltage is, for example, polypyrrole. Is not more than a voltage value that does not decompose, and a range of 0.75 V to 2 V is exemplified.

<Another embodiment>
When the conductive polymer actuator is formed, the formation area may be smaller than the opening portion. The conductive polymer actuator may not be sandwiched between the electrode members. Further, the electrode member is not limited to a rigid member depending on the application of the device, and can be composed of a flexible conductive member. In addition, the shape of the electrode member can be designed according to the use of the device, and the size of the aperture can be appropriately designed.

(Use)
The planar device of the present invention can be used as an actuator such as a diaphragm pump, a tactile display, and a massager.

  In addition, the planar device can be used for a device that forms a multilayer and requires a stroke. In addition, by using multiple layers, partial displacement can be taken out and the invention can be applied to applications that require resolution.

  More specifically, the planar device of the present invention is an OA device, an antenna, a device on which a person such as a bed or a chair is placed, a medical device, an engine, an optical device, a fixture, a side trimmer, a vehicle, an elevator, a food processing Equipment, cleaning equipment, measuring equipment, inspection equipment, control equipment, machine tools, processing machines, electronic equipment, electron microscopes, electric razors, electric toothbrushes, manipulators, masts, game equipment, amusement equipment, riding simulation equipment, vehicle occupants A valve, brake and lock device used for all machines including the above-mentioned devices such as a presser device, an aircraft accessory equipment expansion device, OA equipment and measuring equipment, etc., comprises a drive part or a circular arc part that generates a linear drive force. Drive unit that generates driving force to move the track type track, or linear or curvilinear motion It can be suitably used as the pressing unit.

  In addition to the above-mentioned devices, equipment, instruments, etc., the planar device is a positioning device drive unit, a posture control device drive unit, a lifting device drive unit, a transport device drive unit, Driving unit that generates linear driving force in driving unit of moving device, driving unit of adjusting device such as amount and direction, driving unit of adjusting device such as shaft, driving unit of guiding device, and pressing unit of pressing device Or it can use suitably as a drive part which generates the drive force for moving the track type track which consists of circular arc parts, or a press part which carries out a linear operation or a curve operation.

  In addition, the planar device can be suitably used as a drive unit in the joint device, such as a joint unit that can be directly driven, such as a joint intermediate member, or a drive unit that gives a rotational motion to the joint.

  The planar device includes, for example, a drive unit for an inkjet part in an inkjet printer such as a CAD printer, a drive unit for displacing the optical axis direction of the light beam of the printer, and a head drive unit for a disk drive device such as an external storage device. In addition, it can be suitably used as a drive unit for paper pressing contact force adjusting means in a paper feeding device of an image forming apparatus including a printer, a copier, and a fax machine.

  The planar device is, for example, a measurement unit for moving a high-frequency power supply unit such as a frequency sharing antenna for radio astronomy to the second focal point, a drive unit for a drive mechanism for moving the power supply unit, and a vehicle-mounted pneumatic operation It can be suitably used for a drive part of a lift mechanism in a mast such as a telescopic mast (telescoping mast) or an antenna.

  In addition, the planar device is used for, for example, a driving unit of a massage unit of a chair-shaped massage machine, a driving unit of a nursing care or medical bed, a driving unit of a posture control device of an electric reclining chair, a massage machine, an easy chair, or the like. Recliner backrest / Ottoman retractable rod drive part, chair backrest, legrest, etc. It can be suitably used for a drive unit used for turning driving of a bed of a care bed and the drive unit for posture control of a standing chair.

  In addition, the planar device includes, for example, a driving unit of a testing device, a driving unit of a pressure measuring device such as a blood pressure used in an extracorporeal blood treatment device, a driving unit of a catheter, an endoscope device or forceps, an ultrasonic wave, etc. A drive unit for a cataract surgery device using a chin, a drive unit for an exercise device such as a jaw movement device, a drive unit for a means for relatively expanding and contracting a member of a hoist for a sick person, It can be suitably used for a drive unit for posture control or the like.

  The planar device includes, for example, a vibration isolator driving unit that attenuates vibration transmitted from a vibration generating unit such as an engine to a vibration receiving unit such as a frame, and a valve operating unit driving unit for an intake and exhaust valve of an internal combustion engine. It can be suitably used for a drive unit of an engine fuel control device and a drive unit of an engine fuel supply device such as a diesel engine.

  The planar device can be suitably used, for example, for a pressing portion of a fixture such as caulking and fixing a hose fitting to a hose body.

  The planar device includes, for example, a driving unit such as a winding spring of an automobile suspension, a driving unit of a fuel filler lid opener for unlocking a fuel filler lid of a vehicle, a driving unit for driving and extending and retracting a bulldozer blade, and for automobiles. It can be suitably used for a drive unit of a drive device for automatically switching the transmission gear ratio and for automatically connecting and disconnecting a clutch.

  The planar device includes, for example, a driving unit of a lifting device of a wheelchair with a seat plate lifting device, a driving unit of a lift for removing a step, a driving unit of a lifting transfer device, a medical bed, an electric bed, an electric table, an electric chair, It is suitable for use as a driving unit for lifting and lowering of a nursing bed, a lifting table, a CT scanner, a truck cabin tilt device, a lifter, etc. it can.

  The planar device can be suitably used for, for example, a drive unit of a discharge amount adjusting mechanism such as a food discharge nozzle device of a food processing apparatus.

  The said planar device can be used suitably for drive parts, such as raising / lowering of the trolley | bogie of a cleaning apparatus, a cleaning part, etc., for example.

  The planar device includes, for example, a driving unit of a measurement unit of a three-dimensional measuring apparatus that measures the shape of a surface, a driving unit of a stage device, a driving unit of a sensor part such as a detection system of tire operating characteristics, and an impact of a force sensor. The drive unit of the device that gives the initial speed of the response evaluation device, the drive unit of the piston drive device of the piston cylinder of the device including the in-hole water permeability test device, the drive unit for moving in the elevation angle direction of the concentrating tracking power generation device, XYθ when alignment is required in a driving device of a tuning mirror vibration device of a sapphire laser oscillation wavelength switching mechanism of a measuring device including a concentration measuring device, an inspection device of a printed circuit board, or a flat panel display such as a liquid crystal or PDP Table drive unit, electron beam (E-beam) system or focused ion beam (FIB) system Adjustable aperture device drive unit used in charged particle beam systems, etc., etc., support device or drive unit of measurement target in flatness measuring device, as well as assembly of fine devices, semiconductor exposure devices and semiconductors It can be suitably used for a driving unit of a precision positioning device such as an inspection device or a three-dimensional shape measuring device.

  The planar device is, for example, a drive unit of a rubber composition press molding vulcanizing device, a driving unit of a component aligning device that aligns a transferred part in a single row / single layer or a predetermined posture, compression molding, etc. Drive unit of the apparatus, drive unit of the holding mechanism of the welding device, drive unit of the bag making and filling machine, drive unit of machine tools such as machining centers, molding machines such as injection molding machines and press machines, printing devices, coating devices, etc. Drive unit for fluid application device such as lacquer spraying device, drive unit for manufacturing device for manufacturing camshaft, etc., drive unit for lifting device for lining material, drive device for tufted ear regulating body in unwoven loom, tufting machine Needle drive system, looper drive system, drive unit such as knife drive system, drive unit for polishing device that polishes parts such as cam grinder and ultra-precision machined part, drive unit for brake device for hook frame in loom Driving unit driving device for forming warp opening for weft insertion in loom, driving unit for protective sheet peeling device such as semiconductor substrate, driving unit for threading device, driving unit for assembly device for electron gun for CRT , A drive unit of a shifter fork drive selection linear control device in a torsion race machine for manufacturing a torsion race having application to a garment for clothing, a table cloth, a seat cover, etc., a drive unit of a horizontal movement mechanism of an annealing window drive device, Driving unit of glass melting furnace for hearth, driving unit for moving back and forth the rack of exposure device such as fluorescent screen forming method of color picture tube, driving unit of torch arm of ball bonding apparatus, driving of bonding head in XY direction Component mounting process and measurement / inspection process drive during mounting, chip component mounting and measurement using probes In a field such as a drive unit for raising and lowering a cleaning tool support of a substrate cleaning device, a drive unit for moving a detection head that scans a glass substrate forward and backward, a drive unit for a positioning device of an exposure device that transfers a pattern onto a substrate, and precision processing Submicron-order micropositioning device driving unit, chemical mechanical polishing tool measuring unit driving unit driving unit, exposure apparatus used when manufacturing circuit devices such as conductor circuit elements and liquid crystal display elements in a lithography process, and A drive unit for positioning a stage device suitable for a scanning exposure apparatus, a drive unit for transporting or positioning a workpiece, a drive unit for positioning and transporting a reticle stage, a wafer stage, etc., and a precise positioning in a chamber Stage unit drive, workpiece in chemical mechanical polishing system or Represented by semiconductor wafer positioning device drive unit, semiconductor stepper device drive unit, drive unit for precise positioning in the processing machine introduction station, machine tools such as NC machines and machining centers, etc. or IC industry steppers The reference grating plate of the light beam scanning device is used in the drive unit of the passive vibration isolation device for various devices and the vibration isolation device for active vibration isolation, the exposure device used in the lithography process for manufacturing semiconductor elements and liquid crystal display elements, etc. It can be suitably used for a drive unit that is displaced in the direction of the optical axis and a drive unit of a transfer device that transfers the product into the article processing unit in the transverse direction of the conveyor.

  The planar device can be suitably used for, for example, a drive unit for a probe positioning device of a scanning probe microscope such as an electron microscope, and a drive unit for positioning an electron microscope sample fine movement device.

  The planar device is, for example, an automatic welding robot, a driving unit of a joint mechanism represented by a wrist of a robot arm in a robot or manipulator including an industrial robot or a nursing robot, a driving unit of a joint other than the direct drive type, In order to manipulate minute objects in any state in the robot finger itself, the drive unit of the motion conversion mechanism of a slide opening and closing chuck device used as a robot hand, cell micro manipulation or micro component assembly work, etc. It can be suitably used for a drive unit of a micromanipulator, a drive unit of a prosthesis such as an electric prosthesis having a plurality of fingers that can be opened and closed, a drive unit of a handling robot, a drive unit of a prosthesis, and a drive unit of a power suit .

  The planar device can be suitably used for, for example, a pressing portion of a device that presses the upper rotary blade or the lower rotary blade of the side trimmer.

  The planar device is preferably used for, for example, a driving unit for an accessory in a game machine such as a pachinko machine, a driving unit for an amusement device such as a doll or a pet robot, and a driving unit for a simulation apparatus for a boarding simulation apparatus. Can do.

  The planar device can be used, for example, in a valve drive unit used in all machines including the above-described devices. For example, a valve drive unit of an evaporative helium gas reliquefaction device, a bellows pressure-sensitive control valve Drive unit, opening device drive unit for driving the frame, vacuum gate valve drive unit, solenoid operated control valve drive unit for hydraulic system, and valve drive unit incorporating a motion transmission device using a pivot lever The rocket movable nozzle valve drive unit, the suck back valve drive unit, and the pressure regulating valve unit drive unit can be suitably used.

  The planar device can be used as, for example, a pressing portion of a brake used in all machines including the equipment and the like. For example, the planar device is suitable for an emergency brake, a safety brake, an elevator brake, or an elevator brake. It can be used suitably for the pressing part of the braking device and the pressing part of the brake structure or brake system.

The planar device can be used, for example, as a pressing unit of a locking device used in general machines including the above devices, etc., for example, a pressing unit of a mechanical locking device, a pressing unit of a vehicle steering locking device, and It can be suitably used for a pressing portion of a power transmission device having both a load limiting mechanism and a coupling release mechanism.
<Example>

  Examples that specifically show the structure and effects of the present invention will be described below. Needless to say, the present invention is not limited to the following examples, and extends to all forms, aspects, products, and parts that share the same technical idea of the present invention.

[Example 1]
As a base material, a stretchable nonwoven fabric separator (product number PTS100K basis weight 105 g / m ² , manufactured by Kurashiki Fiber Processing Co., Ltd.) was used. An Au layer having a thickness of about 0.1 μm was constructed on one side of the substrate by sputtering. Using this as a counter electrode, by electropolymerization method (conditions: pyrrole, 0.1 mol / l, −10 ° C.), constant current electrolysis at a current density of 0.2 mA cm ^{−2 in} a methyl benzoate solution of TBATFSI for 12 hours. Polymerization was performed. After electropolymerization, it was washed with acetone and dried indoors to obtain a device having a three-layer structure of [PPy-TFSI ⁻ / Au / base material] in which the base material and PPy-TFSI ⁻ were combined. At this time, the composite PPy-TFSI ^- layer had a thickness of 15 to 20 μm.

In addition, a current of 0.2 mA cm ^{−2 was used in} a methyl benzoate solution of TBACF ₃ SO ₃ by a electrolytic polymerization method (conditions: pyrrole, 0.1 mol / l, −10 ° C.) using a gold plate as a working electrode. for 4 hours constant current electrolytic polymerization in density, conductive polymer film _{(PPy-CF 3} SO 3 ^- layer) was formed. Washed with electrolytic polymerization after acetone, conductive polymer film ^- a _{(PPy-CF 3} SO 3 layer) was peeled off from the metal plate, and dried indoors. Conductive polymer film ^- thickness _{(PPy-CF 3} SO 3 layer) was 10 to 15 [mu] m.

Then, the element [PPy-TFSI ^- / Au / substrate] in the conductive polymer film ^- overlapping _{(PPy-CF 3} SO 3 layers), a pair of electrode members (circular openings (diameter 30 mm) was formed SUS304 The sheet-like device was constructed by sandwiching with a gold plated plate and fixing with screws.

Planar device a conductive polymer film ^- as _{(PPy-CF 3} SO 3 layers) the lower, driving electrolyte (acetonitrile: deionized water mixed solvent (5: 5) (1M in LiTFSI (bistrifluoromethanesulfonylimide soaked for 1 hour in containing) solution) of lithium salt), with the inclusion of the driving electrolyte substrate, the conductive polymer film (PPy-CF ₃ SO ₃ ^- layer) was allowed to swell. Then, it pulled up from drive electrolyte and wiped the drive electrolyte on the surface device surface.

Conductive polymer film ^- a _{(PPy-CF 3} SO 3 layers) in the lower side, placing the spheres of the weight (about 30 g), conductive polymer film _{(PPy-CF 3} SO 3 ^- layer) positive electrode side of the A voltage (1.5 V) was applied to the driven counter electrode, and a negative voltage (-1.5 V) was applied to the driven counter electrode, and the weight was confirmed to fall vertically. The conductive polymer film ^- a _{(PPy-CF 3} SO 3 layers) negative electrode side of the voltage (-1.5V), is applied to the positive voltage (1.5V) to the driven side of the counter electrode, the weight is increased vertical Confirmed to do. The vertical displacement at this time was about 3 mm. Further, it was confirmed that when the voltage application was stopped halfway, the vertical displacement stopped, and when the voltage application was resumed, the vertical displacement resumed.

[Example 2]
As the base material, a hydrophilic PTFE membrane filter (thickness 29 μm, porosity 60%, manufactured by Japan Gore-Tex) was used. An Au layer having a thickness of about 0.1 μm was constructed on both surfaces of the substrate by sputtering. Using this as a working electrode, both surfaces of this base material were sandwiched between a pair of peak materials having a circular hole having a diameter of 5 mm (masking), and an electrolytic polymerization method (conditions: pyrrole, 0.1 mol / l, −10 ° C. ), Constant current electropolymerization (spot polymerization) was carried out in a TBATFSI methyl benzoate solution at a current density of 0.2 mA cm ⁻² for 12 hours. Washed with electrolytic polymerization after acetone and dried in a room, substrate and PPy-TFSI ^- is complexed, a five-layer structure of ^{[PPy-TFSI - - / Au} / substrate / Au / PPy-TFSI] A PPy bimorph element (corresponding to an actuator element) was obtained. At this time both of the complexed PPy-TFSI ^- the thickness of the layer was 20 to 25 m. Since both PPy-TFSI layers are formed on the Au layer as the working electrode, they are circular with a diameter of about 5 mm.

Then, the PPy bimorph element, PPy-TFSI ^- as the layer is positioned within the circular aperture, and secured with screws sandwiched between a pair of electrode members (SUS304 gold plated plate circular aperture (diameter 7 mm) was formed) A planar device was constructed.

The planar device is immersed in a driving electrolyte (gamma butyrolactone: ethylene carbonate mixed solvent (5: 5) solution containing 0.5 M TBATFSI (tetrabutylammonium salt of bistrifluoromethanesulfonylimide)) for 1 hour. The drive electrolyte was included in the material, and the conductive polymer film (PPy-TFSI ^- layer) was swollen. Then, it pulled up from drive electrolyte and wiped the drive electrolyte on the surface device surface.

  The positive electrode voltage (1.5V) is applied to one conductive polymer film side, the negative electrode voltage (-1.5V) is applied to the other conductive polymer film side, and the positive electrode application side has a convex shape. It was confirmed that the side was concave. Moreover, when the positive electrode and the negative electrode were alternately switched, it was confirmed that the uneven shape was switched accordingly.

The figure explaining an example of embodiment of the planar device of this invention The figure explaining an example of embodiment of the planar device of this invention The figure explaining an example of embodiment of the planar device of this invention

Explanation of symbols

A, B, C Planar devices A1, B1, C1 Actuator elements 1a, 1b, 11a, 11b, 21a, 21b Electrode members 1c, 1d, 11c, 11d, 21c, 21d Openings 2, 12, 22 Base material 3 , 13, 14, 23 Conductive polymer actuator 4, 24 Driven counter electrode

Claims (9)

An actuator element having a conductive polymer actuator and a substrate containing a driving electrolyte for the conductive polymer actuator;
An application electrode for the actuator element, comprising an electrode member having an aperture that partially exposes the actuator element;
By controlling the voltage applied to the actuator element, the actuator element located in the opening is linearly displaced in the thickness direction thereof.   The conductive polymer actuator is configured on at least one surface of the base material, and the actuator element positioned in the aperture is configured to be linearly displaced in the thickness direction by controlling the voltage applied to the actuator element. The planar device according to claim 1.   By constructing conductive polymer actuators of the same or substantially the same thickness on both sides of the substrate and controlling the polarity of the voltage applied to the actuator elements, the actuator elements located in the apertures are linearly displaced in the thickness direction. The planar device according to claim 1, wherein the planar device is configured as described above.   When the conductive polymer actuator applied to the positive electrode expands and the conductive polymer actuator applied to the negative electrode contracts, the positive electrode application surface of the actuator element located at the aperture becomes convex, and the negative electrode application surface The planar device according to claim 3, wherein is a concave shape.   A conductive polymer actuator having a predetermined thickness is formed on one surface of the base material, and the conductive polymer actuator applied to the positive electrode is extended to form a push-up force by the actuator element located in the opening. 2. A planar device according to claim 1, characterized in that:   The planar device according to any one of claims 1 to 5, wherein the conductive polymer actuator is configured on the substrate via a metal electrode layer.   The planar device according to claim 2 or 5, wherein the substrate is a nonwoven fabric.   The planar device according to claim 3 or 4, wherein the substrate is porous polytetrafluoroethylene.   The planar device according to any one of claims 1 to 8, wherein the conductive polymer includes pyrrole and / or a pyrrole derivative in a molecular chain.

Images