JPH09293913A - Functionable polymer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device which is easy to microminiaturize. SOLUTION: A conductive polymer film 12 and electrolyte films 13 are laminated on a metallic film 11 and electrodes 14 are further formed on the electrolyte films 13 to constitute a functionable polymer device 10. Ions are passed between the conductive polymer film 12 and the electrolyte films 13 by application of voltage to change the volume of the conductive polymer film 12. The metallic film 11 and the conductive polymer film 12 are bent and deformed together by the change in volume.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a functional polymer element that gives and receives ions by applying a voltage.

[0002]

2. Description of the Related Art Conventionally, there is a piezoelectric element as an element that functions by applying a voltage, and this piezoelectric element is used for an actuator or the like that drives another object by its bending deformation force.

[0003]

However, it has been extremely difficult to achieve high-density mounting of the piezoelectric element due to its miniaturization. It is an object of the present invention to provide a novel functional polymer element which is easy to miniaturize and replaces a conventional piezoelectric element or the like.

[0004]

A first functional polymer element of the present invention comprises a conductive polymer film and an electrolyte film laminated on a metal film, and the conductive polymer film and the conductive polymer film are formed by applying a voltage. It is characterized by performing the exchange of ions between the electrolyte membrane, the functional polymer element,
Since a voltage is applied to transfer ions between the laminated film of the conductive polymer film and the electrolyte film, miniaturization is easy.

The second functional polymer element of the present invention comprises an electrolyte-dispersed polymer film in which an electrolytic substance is dispersed in a conductive polymer, which is fixed on a metal film, and the conductive polymer is formed by applying a voltage. The functional polymer element is characterized by performing the exchange of ions between the electrolyte and the electrolytic substance. Since the ions are exchanged between the electrolyte and the electrolytic substance, miniaturization is easy.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION The first functional polymer element is
If the volume of the conductive polymer film changes due to the transfer of the ions, and the metal film bends and deforms together with the conductive polymer film due to the volume change, the bending deformation force is used for driving other objects. can do.

In this functional polymer element, the interface between the conductive polymer film and the electrolyte film has a composition in which the components of both films are mixed, and the composition ratio is such that the conductive polymer film and the electrolyte film are mixed. It is desirable to have a continuous change with the membrane.

Further, in this functional polymer element,
The metal film also serves as a voltage applying electrode, and an electrode facing the metal film is provided on the laminated film of the conductive polymer film and the electrolyte film, the electrode being opposed to the metal film. It is desirable to apply a voltage between and.
Furthermore, both the conductive polymer film and the electrolyte film may be extremely thin films, and these films may be alternately laminated in plural layers.

In the second functional polymer element,
The metal film also serves as a voltage application electrode, and an electrode facing the metal film is provided on the electrolyte-dispersed polymer film across the polymer film, and a voltage is applied between the metal film and the electrode. It is desirable to apply.

[0010]

1 to 4 show a first embodiment of the present invention, and FIGS. 1 and 2 are a side view and a plan view of a functional polymer element. Functional polymer element 10 of this example
Is formed by laminating a conductive polymer film 12 in a fixed state on almost the entire surface of the metal film 11 also serving as a voltage applying electrode, and by laminating an electrolyte membrane 13 on the conductive polymer film 12 in a fixed state. Conductive polymer film 12
The electrode 14 facing the metal film 11 is provided on the laminated film of the electrolyte membrane 13 and the laminated film.

The metal film 11 is made of a metal thin plate such as gold which is electrochemically inactive in a solution which is formed to be ultrathin so as to have flexible bendability, and is used for a functional polymer element. The outer shape and the size are selected according to.

The conductive polymer film 12 is formed, for example, in a monomer solution prepared by mixing Py (pyrrole) with DBS (dodecylbenzenesulphanate).
Is formed by a method of forming a conductive polymer film made of a conducting polymer in which PPy (polypyrrole) is doped with DBS on the surface of the metal film 11 by electropolymerization using the metal film 11 as an electrode. There is.

Further, the electrolyte membrane 13 is formed by applying a solution of an ion conductive polymer typified by polyoxyethylene or the like on the conductive polymer membrane 12.

The interface between the conductive polymer membrane 12 and the electrolyte membrane 13 has a composition in which the components of both membranes 12, 13 are mixed, and the composition ratio is such that the conductive polymer membrane 12 and the electrolyte membrane. It changes continuously between 13 and.

FIG. 3 shows the composition ratio near the interface between the conductive polymer membrane 12 and the electrolyte membrane 13.
The composition ratios of portions 2 and 13 other than the interface portion are 100%, respectively, but at the interface portion, the composition ratio of the conductive polymer film 12 decreases as it approaches the electrolyte membrane 13, and the composition ratio of the electrolyte membrane 13 decreases. Is reduced as it approaches the conductive polymer film 12.

The functional polymer element 10 comprises a metal film 1 which is opposed to the conductive polymer film 12 and the electrolyte film 13 with each other.
It is driven by applying a pulse voltage between the electrode 1 and the electrode 14, and the applied voltage is supplied from the bending deformation control unit 15.

The flexural deformation control unit 15 includes the metal film 1
1 controls the polarity and voltage value of the pulse voltage applied between the electrode 1 and the electrode 14. When a voltage of one polarity is applied between the metal film 11 and the electrode 14, the conductive polymer film 1
Ions in an amount corresponding to the applied voltage value move from 2 to the electrolyte membrane 13, and the conductive polymer film 12 is released by the ion release.
The volume of changes.

When a voltage of the other polarity is applied between the metal film 11 and the electrode 14, the electrolyte film 13 is doped into the conductive polymer film 12 with an amount of ions according to the applied voltage value, and the conductivity is increased. The volume of the polymer film 12 changes contrary to that at the time of ion ejection.

The amount of change in volume of the conductive polymer film 12 at the time of ion emission and doping is corresponding to the applied voltage value, that is, the amount of ion emission and the amount of doping from the conductive polymer film 12.

The transfer of ions between the conductive polymer film 12 and the electrolyte film 13 causes the conductive polymer film 1 to be exchanged.
When the volume of 2 changes, the change in volume causes the metal film 11
Flexibly deforms together with the conductive polymer film 12, whereby the functional polymer element 10 flexibly deforms almost all over.

That is, the conductive polymer film 12 is
The conductive polymer film 12 expands and contracts due to the release and doping of ions due to the application of a voltage, but the conductive polymer film 12 does not expand and contract even when a voltage is applied, so the conductive polymer film 12 expands. Then, the metal film 1
1 flexibly deforms together with the conductive polymer film 12 so as to bulge in an arc shape in the surface direction, and the functional polymer element 10 flexibly deforms as shown by a chain line in FIG. When the conductive polymer film 12 contracts, the metal film 11 and the conductive polymer film 12 are flexibly deformed so as to bulge in an arc shape in the back surface direction of the metal film 11, and the functional polymer element 10 is flexibly deformed in the opposite direction. To do.

The flexural deformation characteristics of the functional polymer element 10 differ depending on the physical properties of the conductive polymer film 12,
For example, in the case where the conductive polymer film 12 has a physical property that expands by ion emission and contracts by ion doping, the functional polymer is applied when a voltage of a polarity that causes the conductive polymer film 12 to release ions is applied. The element 10 is flexibly deformed so as to be expanded in the surface direction of the conductive polymer film 12, and is flexibly deformed so as to be expanded in the back surface direction of the metal film 11 when a voltage of opposite polarity is applied.

When the conductive polymer film 12 has a physical property that it contracts due to ion emission and expands due to ion doping, when a voltage having a polarity for releasing ions from the conductive polymer film 12 is applied, The functional polymer element 10 is bent and deformed so as to bulge toward the back surface of the metal film 11, and is bent and deformed so as to bulge toward the surface direction of the conductive polymer film 12 when a voltage of opposite polarity is applied.

The efficiency of ion transfer between the conductive polymer film 12 and the electrolyte film 13 is determined by the film 1 of both films.
Although it depends on the state of the interface between Nos. 2 and 13, the interface has a composition in which the components of both membranes 12 and 13 are mixed, and the composition ratio is set between the conductive polymer membrane 12 and the electrolyte membrane 13. If it is continuously changed, the ion exchange between the conductive polymer film 12 and the electrolyte film 13 can be performed smoothly, so that the functional polymer element 10 is responsive to voltage application. It flexes and deforms well.

Further, in this embodiment, the electrolyte membrane 1 is used.
3 and the electrode 14 formed on the surface thereof are divided into a plurality of portions to reduce the degree to which the electrolyte membrane 13 and the electrode 14 are resistant to the bending deformation of the functional polymer element 10.

Various patterns are conceivable as the division pattern of the electrolyte membrane 13 and the electrode 14. For example, in the case of a horizontally long functional polymer element having a planar shape, the length is larger than the bending deformation amount in the width direction. Since the amount of bending deformation in the direction is large,
It is preferable to divide the electrolyte membrane 13 and the electrode 14 into a plurality of pieces in the direction in which the flexural deformation amount is large (the length direction of the functional polymer element) as shown in FIGS. 1 and 2.

When the functional polymer element has a circular planar shape, it is desirable to divide the electrolyte membrane 13 and the electrode 4 into concentric circular patterns. By doing so, bending in the entire circumferential direction is achieved. Resistance to deformation can be reduced.

When the electrolyte membrane 13 and the electrode 14 are divided into a plurality of pieces as described above, each divided electrode 14 is connected to the bending deformation control portion 15 as shown in FIG. 1, or
Each divided electrode 14 may be commonly connected by a lead wire or the like, and one of the electrodes may be connected to the bending deformation control unit 15.

However, when the amount of flexural deformation required for the functional polymer element 10 is small, the resistances of the electrolyte membrane 13 and the electrode 14 against the flexural deformation do not pose a problem, and it is not necessary to divide them.

Further, even if the amount of flexural deformation required for the functional polymer element 10 is large, if the electrolyte membrane 13 has elasticity, it is not necessary to divide the electrolyte membrane 13 and the electrode 14 is electrically conductive. In the case of a stretchable electrode such as a natural rubber or an ultrathin thin film electrode, the electrode 14 may not be divided.

The functional polymer element 10 has a metal film 11
The conductive polymer film 12 and the electrolyte film 13 are laminated on top of each other, and the application of voltage causes the exchange of ions between the conductive polymer film 12 and the electrolyte film 13. Is easy.

The functional polymer element 10 has a conductive polymer film 12 and an electrolyte film 13 when a voltage is applied.
Ions are exchanged between the laminated films and to be flexibly deformed, so that the flexural deformation force can be used for driving other objects.

That is, considering only the bending deformation of the metal film 11 and the conductive polymer film 12, the electrolyte film 13 is used.
Even if there is not, if a voltage is applied in a state where the laminated body of the metal film 11 and the conductive polymer film 12 is immersed in the electrolytic solution, the exchange of ions occurs between the conductive polymer film 12 and the electrolytic solution. As a result, the volume of the conductive polymer film 12 changes, and the laminated body is flexibly deformed.

However, as described above, the metal film 11 is formed in the electrolytic solution.
It is difficult to extract the flexural deformation force by flexurally deforming the laminated body of the conductive polymer film 12 and the conductive polymer film 12, and thus it is difficult to use the force for driving other objects.

In this respect, the functional polymer element 10 has the conductive polymer film 12 and the electrolyte film 13 for exchanging ions with the conductive polymer film 12, which is laminated on the conductive polymer film 12. It can be flexibly deformed in a space without being immersed therein, and therefore, the flexural deformation force can be utilized for driving other objects.

The above-mentioned functional polymer element 10 can be used as an actuator used for pressurizing and depressurizing a fluid, driving a tilting rotary member, and the like. As shown in FIG. 4 (a), the central portion operates as a diaphragm type actuator that bulges and deforms in the front and back directions, and when used with one end restrained, the free end side becomes the front and back sides as shown in FIG. 4 (b). It operates as a flap-type actuator that bends and deforms in the direction.

FIGS. 5 and 6 show an example in which the functional polymer element 10 is used in a diaphragm type actuator of an ink jet nozzle used in an ink jet printer.

In this ink jet nozzle, the inside of the ink tank 1 whose rear surface is open is partitioned by a flexible diaphragm 2 into an ink chamber 3 on the front surface side and a pressure chamber 4 on the rear surface side, and at the opening of the rear surface of the pressure chamber 4. A diaphragm-type actuator composed of the functional polymer element 10 is fixedly attached to the ink tank 1 around its periphery in an airtight manner, and a nozzle tube 5 is provided on the front surface of the ink chamber 3 so as to be non-returned on the side surface of the ink chamber 3. An ink supply port 6 provided with a valve is provided, and an ink supply pipe (not shown) is connected to the ink supply port 6.

The functional polymer element 10 used as the diaphragm type actuator has a planar shape corresponding to the opening on the rear surface of the pressure chamber 4, and the electrolyte membrane 13 and the electrode 14 are divided. Although the pattern is different, the basic configuration is the same as that shown in FIGS.

The ink jet nozzle is for ejecting ink from the nozzle tube 5 and supplying ink to the inside of the ink chamber 3 by flexural deformation of the functional polymer element 10. When a voltage of the polarity is applied, the functional polymer element 10 flexibly deforms so as to swell inward and the atmospheric pressure in the pressure chamber 4 rises, whereby the flexible diaphragm 2 flexibly deforms toward the ink chamber 3 side. Then, the inside of the ink chamber 3 is pressurized, and the pressure causes the ink a to be ejected from the tip of the nozzle tube 5.

When a voltage of opposite polarity is applied to the functional polymer element 10, the functional polymer element 10 is flexibly deformed so as to bulge outward, and the pressure in the pressure chamber 4 is reduced, so that the flexible diaphragm is formed. 2 is flexed and deformed to the pressure chamber 4 side, and the ink chamber 3
The inside becomes negative pressure, and the ink a is supplied from the ink supply port 6 to the ink chamber 3.

Further, the ink jet nozzle has a function of adjusting the jet direction of the ink a by changing the angle of the nozzle tube 5. That is, the ink jet nozzle shown in FIG. 5 is such that the slender functional polymer element 10a is spirally wound around the outer periphery of the nozzle tube 5, and the spiral functional polymer element 10a is bent by applying a voltage. The nozzle tube 5 is deformed to change the angle of the nozzle tube 5.

Further, the ink jet nozzle shown in FIG. 6 is such that elongated functional polymer elements 10b are attached to a plurality of locations on the outer circumference of the nozzle tube 5 along the length direction of the nozzle tube 5. The functional polymer element 10b is bent and deformed by application of a voltage to change the angle of the nozzle tube 5.

The functional polymer elements 10a and 10b provided on the nozzle tube 5 have the same basic structure as that shown in FIGS. 1 and 2, and are formed in elongated linear shapes. The functional polymer element 10a, 1
Since the amount of flexural deformation required for 0b is small, the electrolyte membrane and the electrodes are not divided in these functional polymer elements 10a and 10b.

FIG. 7 is an enlarged sectional view of a part of the functional polymer element showing the second embodiment of the present invention. In the functional polymer element 20 of this example, a conductive polymer film 22 and a stretchable electrolyte film 23 are alternately arranged on a plurality of layers (here, three layers each) on a metal film 21 which also serves as a voltage application electrode. A laminated film is laminated in a fixed state, and an electrode 24 is formed on the laminated film.
2 and each electrolyte membrane 23 are formed to have an extremely thin thickness.

The functional polymer element 20 has a structure in which the conductive polymer film 22 and the electrolyte film 23 are exchanged with each other by the application of a voltage between the metal film 21 and the electrode 24. The membrane 22 changes its volume, and the metal membrane 21 is flexibly deformed together with the laminated membrane of the conductive polymer membrane 22 and the electrolyte membrane 23 due to the volume variation.

Also in this functional polymer element 20, the interface between each conductive polymer film 22 and each electrolyte film 23 has a composition in which the components of both films 22 and 23 are mixed and the composition ratio is continuous. If changed to, the ion exchange between the conductive polymer film 22 and the electrolyte film 33 can be made smooth, and the functional polymer element 20 can be flexibly deformed in response to the application of voltage. .

Then, the functional polymer element 2 of this embodiment
According to No. 0, since the conductive polymer film 22 and the electrolyte membrane 23 are alternately laminated by a plurality of layers, the total area of the interface between the conductive polymer film 22 and the electrolyte membrane 23 is large, and therefore the conductive polymer is It is possible to increase the amount of exchanged ions per unit time between the membrane 22 and the electrolyte membrane 33.

Moreover, in this embodiment, since the conductive polymer film 22 and the electrolyte film 23 are formed to have an extremely thin thickness, the migration distance of ions between them is short, and therefore the conductivity is high. Ions can be exchanged between the polymer film 22 and the electrolyte membrane 33 in a short time, and the amount of exchanged ions per unit time can be increased. Therefore, the response of the functional polymer element 20 to the application of a voltage. The sex can be improved.

8 to 10 show a third embodiment of the present invention, and FIG. 8 is a side view of a functional polymer element.
In the functional polymer element 30 of this example, an electrolyte-dispersed polymer film 32 in which an electrolytic substance is dispersed in a conductive polymer is laminated in a fixed state on a metal film 31 which also serves as a voltage application electrode, over almost the entire surface thereof. An electrode 33 facing the metal film 31 is provided thereon with the electrolyte-dispersed polymer film 32 interposed therebetween.

FIG. 9 is a diagram schematically showing the structure of the electrolyte-dispersed polymer film 32. The electrolyte-dispersed polymer film 32 is composed of a main chain of a conductive polymer (for example, a conducting polymer obtained by doping PPy with DBS). The electrolyte is confined in the network.

The electrolytic substance may be a mixture of ions having a large dissociation degree and a highly viscous solvent, a mixture of ions having a large dissociation degree and an ion conductive polymer, a mixture of ions having a large dissociation degree and an ion conductive oligomer, and the like. is there.

FIG. 10 is a sectional view in each forming step showing the method for forming the electrolyte dispersed polymer film 32. The electrolyte dispersed polymer film 32 is formed as follows. First, as shown in FIG. 10A, a porous temporary polymer made of a polymer that is soluble in a certain solvent but insoluble in a monomer solution of a conductive polymer is formed on the metal film 31. The coating film A is formed by a method similar to the usual porous film forming method.

Next, the temporary coating A is immersed in a monomer solution of a conductive polymer to fill the pores of the temporary coating A, and then the monomer solution is polymerized to obtain As shown in b), the conductive polymer layer 32a is formed in the pores of the temporary coating A.

Next, the temporary coating A is removed using a solvent in which it is soluble, and a porous conductive material having a cross-sectional structure opposite to that of the temporary coating A as shown in FIG. The polymer layer 32a is obtained.

Next, the porous conductive polymer layer 32 is formed.
a is a solution of an electrolytic substance (a mixture of ions having a large dissociation degree and a highly viscous solvent, a mixture of ions having a large dissociation degree and an ion conductive polymer, a mixture of an ion having a large dissociation degree and an ion conductive oligomer) And the solution is filled in the holes of the conductive polymer layer 32a, and the electric field substance layer 32b is formed in the holes of the conductive polymer layer 32a to complete the electrolyte dispersed polymer film 32.

In the functional polymer element 30 of this embodiment, the metal film 31 that faces the electrolyte-dispersed polymer film 32 is provided.
It is driven by applying, for example, a pulse voltage between the electrode 33 and the electrode 33, and the applied voltage is supplied from the bending deformation control unit 34.

This flexural deformation control section 34 includes the metal film 3
1 controls the polarity and voltage value of the pulse voltage applied between the electrode 33 and the electrode 33. When a voltage of one polarity is applied between the metal film 31 and the electrode 33, the voltage is applied in the electrolyte dispersed polymer film 32. From the conductive polymer layer 32a to the electric field substance layer 32b, an amount of ions corresponding to the applied voltage value is released,
The volume of the electrolyte-dispersed polymer film 32 changes.

When a voltage of the other polarity is applied between the metal film 31 and the electrode 33, an amount corresponding to the applied voltage value from the electric field substance layer 32b to the conductive polymer layer 32a in the electrolyte dispersed polymer film 32. Is doped with
The volume of the electrolyte-dispersed polymer film 32 changes contrary to when ions are released from the conductive polymer layer 32a.

The volume change amount of the electrolyte-dispersed polymer film 32 corresponds to the applied voltage value, that is, the ion emission amount and the doping amount from the conductive polymer layer 32a. Then, the electrolyte-dispersed polymer film 3 is formed by giving and receiving ions between the conductive polymer layer 32a and the electrolytic substance layer 32b.
When the volume of 2 changes, the metal film 31
Flexibly deforms together with the electrolyte-dispersed polymer film 32, so that the functional polymer element 30 flexibly deforms almost entirely.

The flexural deformation characteristics of the functional polymer element 30 differ depending on the physical properties of the conductive polymer layer 32a of the electrolyte-dispersed polymer film 32. For example, the conductive polymer layer 32a expands due to ion emission, and due to ion doping. When it has a physical property of contracting, the functional polymer element 30 is bent and deformed so as to bulge in the surface direction of the electrolyte-dispersed polymer film 32 when a voltage of a polarity that releases ions from the conductive polymer layer 32a is applied. Then, when a reverse polarity voltage is applied, the metal film 31 is flexibly deformed so as to bulge toward the back surface of the metal film 31.

When the conductive polymer layer 32a has a physical property of contracting by ion emission and expanding by ion doping, when a voltage having a polarity for releasing ions from the conductive polymer layer 32a is applied. The functional polymer element 30 bends and deforms so as to bulge toward the back surface of the metal film 31, and bends and deforms so as to bulge toward the front surface of the electrolyte-dispersed polymer film 32 when a voltage of opposite polarity is applied.

In this embodiment, the electrode 33 formed on the surface of the electrolyte-dispersed polymer film 32 is divided into a plurality of parts, and the degree to which the electrode 33 becomes resistant to the bending deformation of the functional polymer element 30 is reduced. are doing.

However, when the amount of flexural deformation required for the functional polymer element 30 is small, the resistance of the electrode 33 to the flexural deformation does not matter so much, so there is no need to divide the electrode 33, and Functional polymer element 3
Even if the amount of flexural deformation required for 0 is large, if the electrode 33 is an electrode having elasticity such as conductive rubber or an extremely thin thin film electrode, the electrode 33 may not be divided.

In the functional polymer element, an electrolyte-dispersed polymer film 32 in which an electrolytic substance is dispersed in a conductive polymer is fixed on a metal film 31, and the conductive polymer and the electrolytic substance are separated by applying a voltage. Since the ions are exchanged between them, miniaturization is easy.

In this functional polymer element 30, the application of voltage causes the transfer of ions within the electrolyte-dispersed polymer film 32, that is, the transfer of ions between the conductive polymer layer 32a and the electrolytic substance layer 32b. Since it is generated and flexibly deformed, its flexural deformation force can be used for driving other objects, as in the case of the functional polymer element 10 of the second embodiment described above.

That is, the functional polymer element 30 of this embodiment can also be used as an actuator or the like used for pressurizing or depressurizing a fluid, driving an inclining / rotating member, or the like, and restraining both ends or the periphery thereof. When used in the state,
The central portion operates as a diaphragm type actuator that bulges and deforms in the front and back directions, and when used with one end restrained, the free end side operates as a flap type actuator that bends and deforms in the front and back directions.

In the first, second and third embodiments described above, the voltage is applied on the laminated film of the conductive polymer film 12 and the electrolyte film 13 or on the electrolyte dispersed polymer film 32. Although the electrodes 14, 24, 33 are provided, when the functional polymer elements 10, 20, 30 are used by being brought into contact with a driven body driven by its bending deformation force, the electrodes 14, 24, 33, the surface of the laminated film or the electrolyte-dispersed polymer film 32 is brought into contact with a driven body, and the driven body is used as an electrode to form the functional polymer element 10, 20,
A voltage may be applied between the metal films 11, 21, 31 of 30 and the driven body.

Further, the functional polymer elements of the first to third embodiments are mechanically called flexural deformation due to volume change of the conductive polymer film due to transfer of ions between the conductive polymer film and the electrolyte film. The functional polymer element of the present invention is not limited to that of the above-described embodiment, but is used as a flexible deformation element that causes a mechanical action, and the ion exchange between the conductive polymer film and the electrolyte film is performed. It is also possible to apply the present invention to, for example, optical shutters and various sensors other than mechanical elements in which the physical properties of the film itself such as light transmittance and dielectric constant change.

[0070]

The first functional polymer element of the present invention is
A conductive polymer film and an electrolyte film are laminated on a metal film, and since ions are transferred between the conductive polymer film and the electrolyte film by applying a voltage,
Easy to miniaturize.

If the first functional polymer element is such that the volume of the conductive polymer film changes due to the transfer of the ions, and the volume change causes the metal film to bend and deform together with the conductive polymer film. The bending deformation force can be used for driving other objects.

Further, in the first functional polymer element, the interface between the conductive polymer film and the electrolyte film has a composition in which the components of both films are mixed, and the composition ratio is set to the conductive polymer. If continuously changed between the membrane and the electrolyte membrane, since the exchange of ions between the conductive polymer membrane and the electrolyte membrane can be performed smoothly, the functional polymer element for the application of voltage Responsiveness can be improved.

Further, in the first functional polymer element, if the conductive polymer film and the electrolyte film are both extremely thin films and these films are alternately laminated, a plurality of layers are formed. The total area of the interface between the functional polymer membrane and the electrolyte membrane is increased, and the migration distance of ions is shortened to increase the amount of exchanged ions per unit time, thereby increasing the responsiveness of the functional polymer element to the application of voltage. You can do better.

The second functional polymer element of the present invention is formed by laminating an electrolyte-dispersed polymer film, in which an electroconductive substance is dispersed in a conductive polymer, on a metal film. Since the ions are exchanged in the film, that is, the ions are exchanged between the conductive polymer and the electrolytic substance, miniaturization is easy.

In the second flexural deformation element of the present invention, if the volume of the electrolyte-dispersed polymer membrane changes due to the transfer of the ions, and the volume change causes the metal membrane to flexibly deform together with the electrolyte-dispersed polymer membrane, The bending deformation force can be used for driving other objects.

[Brief description of drawings]

FIG. 1 is a side view of a functional polymer element showing a first embodiment of the present invention.

FIG. 2 is a plan view of the functional polymer element.

FIG. 3 is a diagram showing a composition ratio in the vicinity of an interface between a conductive polymer film and an electrolyte film.

FIG. 4 is a view showing a deformed state of the functional polymer element.

FIG. 5 is a cross-sectional view showing an example in which the functional polymer element is used in a diaphragm actuator of an inkjet nozzle.

FIG. 6 is a cross-sectional view showing another example in which the functional polymer element is used in a diaphragm actuator of an inkjet nozzle.

FIG. 7 is an enlarged sectional view of a part of the functional polymer element showing the second embodiment of the present invention.

FIG. 8 is a side view of the functional polymer element showing the third embodiment of the present invention.

FIG. 9 is a diagram schematically showing the structure of an electrolyte-dispersed polymer film.

FIG. 10 is a cross-sectional view in each forming step showing a method for forming an electrolyte dispersed polymer film.

[Explanation of symbols]

 10, 20, 30 ... Functional polymer element 11, 21, 31 ... Metal film 12, 22 ... Conductive polymer film 13, 23 ... Electrolyte film 14, 24 ... Electrode 32 ... Electrolyte-dispersed polymer film 32a ... Conductive polymer layer 32b ... Electrolyte layer

Claims (7)

[Claims] 1. A conductive polymer film and an electrolyte film are laminated on a metal film, and ions are transferred between the conductive polymer film and the electrolyte film by applying a voltage. A functional polymer element. 2. The functionality according to claim 1, wherein the volume of the conductive polymer film changes due to the transfer of the ions, and the volume change causes the metal film to flex and deform together with the conductive polymer film. Polymer element. 3. The interface between the conductive polymer membrane and the electrolyte membrane has a composition in which the components of both membranes are mixed, and the composition ratio is continuously between the conductive polymer membrane and the electrolyte membrane. The functional polymer element according to claim 1 or 2, wherein the functional polymer element is changed. 4. The metal film also serves as a voltage application electrode, and an electrode facing the metal film is provided on the laminated film of the conductive polymer film and the electrolyte film with the laminated film interposed therebetween. The functional polymer element according to claim 1 or 2, wherein a voltage is applied between the metal film and the electrode. 5. The functionality according to claim 1, wherein both the conductive polymer membrane and the electrolyte membrane are extremely thin membranes, and these membranes are alternately laminated in plural layers. Polymer element. 6. An electrolyte-dispersed polymer film in which an electroconductive substance is dispersed in a conductive polymer is fixed on a metal film, and ions are transferred between the electroconductive polymer and the electrolytic substance by applying a voltage. A functional polymer element characterized by the above. 7. The metal film also serves as a voltage applying electrode, and an electrode facing the metal film with the polymer film sandwiched between the polymer film and the electrolyte-dispersed polymer film is provided. The functional polymer element according to claim 6, wherein a voltage is applied between the electrode and the electrode.