JPH09302246A - Functional polymer element and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a functional polymer element which functions when voltage is applied thereto and which can easily be made minute. SOLUTION: A conductive polymer film 3 wherein the main chains 3a of conductive polymer molecules are arranged in almost the same direction is formed on the surface of a metal film 2 to give a functional polymer element 1. Voltage is applied between the metal film 2 and an electrode which faces thereto through the polymer film 3 and an electrolyte layer (an electrolyte liq. or film) adjacent thereto, causing the ion transfer between the polymer film 3 and the electrolyte layer. Thus the vol. of the polymer film 3 is changed, and the metal film 2 is distorted together with the polymer film 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a functional polymer element that exhibits various functions based on the transfer of ions by applying a voltage and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, there is a piezoelectric element as an element that functions by applying a voltage, and this piezoelectric element is used for an actuator or the like for driving an object.

[0003]

However, it has been extremely difficult to achieve high-density mounting of the piezoelectric element due to its miniaturization. It is an object of the present invention to provide a functional polymer element that functions by applying a voltage and can be easily miniaturized, and also to provide a manufacturing method thereof.

[0004]

The functional polymer element of the present invention comprises a conductive polymer film in which the main chains of the conductive polymer are aligned in substantially the same direction on the metal film surface. The functional polymer element is characterized by functioning by exchanging ions between the conductive polymer film and an electrolyte layer adjacent thereto by the application of a voltage. Since it functions by transferring and receiving ions, it is easy to miniaturize it, and the conductive polymer film has a structure in which the main chains of the conductive polymer are aligned in substantially the same direction. Therefore, it is possible to obtain functional characteristics with good reproducibility and a large amount of deformation.

Further, in the method for producing a functional polymer element of the present invention, a raw material made of a conductive polymer is vaporized and the vaporized gas is ionized, or a conductive polymer or a monomer or oligomer of the conductive polymer is used. The solution is sprayed to ionize the sprayed mist, and the ions are adsorbed to the metal film surface by applying a voltage to the metal film, thereby forming the conductive polymer film. According to this manufacturing method, it is possible to obtain the functional polymer element in which the conductive polymer film in which the main chains of the conductive polymers are aligned in substantially the same direction is laminated on the metal film surface.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION In the functional polymer element of the present invention, if the conductive polymer film is one whose volume is changed by the transfer of ions, this functional polymer element is
It can be used as a flexural deformation element in which the metal film flexibly deforms together with the conductive polymer film due to a change in volume of the conductive polymer film in the surface direction.

In this case, if the conductive polymer film has a structure in which the main chains of the conductive polymer are aligned in a direction substantially vertical to the metal film surface, the conductive polymer film Since the rate of change in volume due to the exchange of ions increases in the plane direction, the functional polymer element can be efficiently flexibly deformed in response to the application of voltage.

Further, in this functional polymer element, the electrolyte layer may be an electrolytic solution in which an electrolytic substance is dissolved. In that case, the metal film, the conductive polymer film and the electrolytic solution are used. By applying a voltage between the metal film and the opposing electrode via the metal ion, it is possible to exchange ions between the conductive polymer film and the electrolytic solution.

Further, the electrolyte layer may be an electrolyte film made of an electrolytic substance laminated on the conductive polymer film. In that case, the metal film, the conductive polymer film and the electrolyte film may be combined. By applying a voltage between the metal film and an electrode provided so as to face the metal film, it is possible to exchange ions between the conductive polymer film and the electrolyte film. In this case, the interface between the conductive polymer membrane and the electrolyte membrane has a composition in which the components of both membranes are mixed, and the composition ratio is continuous between the conductive polymer membrane and the electrolyte membrane. It is desirable that it has changed to.

Further, in the method for producing a functional polymer element according to the present invention, when the ions to be adsorbed on the surface of the metal film are ions of a conductive polymer, the film may be directly used as the conductive polymer film. Even if the ions are ions of a conductive polymer monomer or oligomer, if the ions are accelerated by an electric field and adsorbed on the metal film surface, the monomer or oligomer is polymerized, and the conductive polymer film is formed. Is formed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a functional polymer element which flexibly deforms when a voltage is applied will be described below with reference to the drawings. 1 and 2 show a functional polymer element according to a first embodiment of the present invention, FIG. 1 is an enlarged sectional view of a part of the functional polymer, and FIG. 2 is a side view of the functional polymer element. It is a figure.

In the functional polymer element 1 of this example, a conductive polymer film 3 is laminated in a fixed state on almost one surface of a metal film 2 made of an extremely thin metal thin plate having a flexible bendability. The metal film 2 is made of gold, which is a metal that is electrochemically inactive in a solution.

The volume of the conductive polymer film 3 is changed by the transfer of ions, and the conductive polymer film 3 is formed by doping PPy (polypyrrole) with DBS (dodecylbenzenesulphanate). It is made of conductive polymer.

The conductive polymer film 3 has a structure in which the main chains 3a of the conductive polymer are aligned in substantially the same direction over the entire conductive polymer film 3. The main chain 3a is oriented substantially perpendicular to the surface of the metal film 2.

In the functional polymer element 1, the raw material made of a conductive polymer is vaporized to ionize the vaporized gas, or a solution of a conductive polymer or a monomer or oligomer of the conductive polymer is sprayed. It can be manufactured by a method of forming the conductive polymer film 3 by ionizing the sprayed mist and adsorbing the ions on the surface of the metal film 2 by applying a voltage to the metal film 2.

FIG. 3 shows a first method for producing the functional polymer element 1 described above. In this method, a raw material A made of a conductive polymer is vaporized to ionize the vaporized gas, and the ions are This is a method of adsorbing to the surface of the metal film 2.

In this manufacturing method, the metal film 2 is held horizontally by a moving jig (not shown) having a temperature adjusting function, and the metal film 2 is horizontally moved in one direction at a constant speed. The ions are sequentially deposited on the lower surface of 2 from one end side to the other end side to a predetermined thickness,
The raw material A is evaporated by heating in a horizontally long evaporating dish 10 arranged below the moving path of the metal film 2 along the width direction of the metal film 2 (direction orthogonal to the moving direction).

Above the evaporation dish 10, a pair of ionization electrodes 11a, 11 extending in the width direction of the metal film 2 is provided.
b are arranged at intervals in the moving direction of the metal film 2, and the vaporized gas from the raw material A is produced by applying a high voltage V between the pair of ionization electrodes 11a and 11b. It is ionized by the electric field.

On the other hand, an ion adsorption voltage (DC voltage) is applied to the metal film 2 from the power supply section 12, and the ions ionized by the electric field between the pair of ionization electrodes 11a and 11b are applied to the metal film 2. It is accelerated by the ion adsorption voltage applied to and is adsorbed on the surface of the metal film 2.

That is, in this manufacturing method, the raw material A made of a conductive polymer is vaporized to ionize the vaporized gas, and the ions are adsorbed on the surface of the metal film 2 by applying an ion adsorption voltage to the metal film 2. The conductive polymer film 3 is formed on the surface of the metal film 2 by the moving speed of the metal film 2, the evaporation amount of the raw material A and its ionization rate. It can be arbitrarily selected by controlling the ion adsorption voltage applied to the metal film 2 and the temperature of the metal film 2.

According to this manufacturing method, the functional polymer element 1 is obtained in which the conductive polymer film 3 having a structure in which the main chains 3a of the conductive polymer are aligned in substantially the same direction on the surface of the metal film 2 is laminated. Further, by controlling the parameters such as the ion adsorption voltage applied to the metal film 2 and the temperature of the metal film 2, the orientation of the main chain 3a of the conductive polymer can be made substantially parallel to the surface of the metal film 2. The conductive polymer film 3 aligned in the vertical direction can be formed.

FIG. 4 shows a second method for manufacturing the functional polymer element 1 described above. In this manufacturing method, a solution of a conductive polymer or a monomer or oligomer of a conductive polymer is sprayed and then sprayed. Is ionized and the ions are adsorbed on the surface of the metal film 2.

In this manufacturing method, the metal film 2 is held horizontally on a moving jig (not shown) having a temperature adjusting function, and the metal film 2 is horizontally moved at a constant speed in one direction while the metal film 2 is moved horizontally. The ions are sequentially deposited on the lower surface of 2 from one end side to the other end side to a predetermined thickness,
The solution is sprayed from a plurality of nozzles 13 arranged below the moving path of the metal film 2 along the width direction of the metal film 2 (direction orthogonal to the moving direction).

Above the nozzle 13, a pair of ionization electrodes 11a, 11 extending along the width direction of the metal film 2 is formed.
b are arranged at intervals in the moving direction of the metal film 2, and the spray mist is generated by the pair of ionization electrodes 11
It is ionized by an electric field created by applying a high voltage V between a and 11b.

On the other hand, an ion adsorption voltage (DC voltage) is applied to the metal film 2 from the power supply section 12, and the ions ionized by the electric field between the pair of ionization electrodes 11a and 11b are not applied to the metal film 2. It is accelerated by the ion adsorption voltage applied to and is adsorbed on the surface of the metal film 2.

That is, in this manufacturing method, a solution of a conductive polymer or a monomer or oligomer thereof is sprayed to ionize the spray mist, and the ions are applied to the metal film 2 by applying an ion adsorption voltage to the metal film 2. The conductive polymer film 3 formed on the surface of the metal film 2 has a thickness of the moving speed of the metal film 2, a concentration and a spray amount of the solution, and a thickness of the conductive polymer film 3. It can be arbitrarily selected by controlling the ionization rate, the ion adsorption voltage applied to the metal film 2, the temperature of the metal film 2, and the like.

According to this manufacturing method, the functional polymer element 1 is obtained in which the conductive polymer film 3 having a structure in which the main chains 3a of the conductive polymer are aligned in substantially the same direction on the surface of the metal film 2 is laminated. Further, by controlling the parameters such as the ion adsorption voltage applied to the metal film 2 and the temperature of the metal film 2, the orientation of the main chain 3a of the conductive polymer can be made substantially parallel to the surface of the metal film 2. The conductive polymer film 3 aligned in the vertical direction can be formed.

In the manufacturing method shown in FIG. 4, when the solution sprayed from the nozzle 13 is a conductive polymer solution, that is, when the ions to be adsorbed on the surface of the metal film 2 are conductive polymer ions. The conductive polymer film 3 can be directly used by simply drying the film.

When the solution sprayed from the nozzle 13 is a solution of a conductive polymer monomer or oligomer, for example, a solution of a monomer or oligomer in which DBS is mixed with Py (pyrrole), these are applied to the metal film 2 surface. If the ions are accelerated and adsorbed, the monomer or oligomer is polymerized at the same time as the adsorption, so that the conductive polymer film 3 can be deposited.

The functional polymer element 1 functions by exchanging ions between the conductive polymer film 3 and an electrolyte layer adjacent thereto by the application of a voltage, and the conductive polymer film 3 is used. If the volume changes due to the transfer of ions, the functional polymer element 1 is deformed by bending the metal film 2 together with the conductive polymer film 3 due to the volume change in the plane direction of the conductive polymer film 3. It can be used as a flexural deformation element.

As the electrolyte layer, for example, an electrolytic solution in which an electrolytic substance is dissolved may be used. In that case,
The above-mentioned electrode is opposed to the surface of the conductive polymer film 3 of the functional polymer element 1 with a gap, and an electrolytic solution is interposed therebetween, or the functionality is provided in a container in which the electrolytic solution is sealed. The polymer element 1 and the electrode may be arranged so as to face each other.

The state shown in FIG. 2 is the functional polymer element 1.
This is an example in which the electrode 8 having an area facing almost the entire surface of the conductive polymer film 3 is faced with a gap, and the electrolytic solution 5 is interposed therebetween.

This functional polymer element 1 has the metal film 2
Is driven by applying a pulse voltage between the metal film 2 and the opposing electrode 8 through the conductive polymer film 3 and the electrolytic solution 7, and the applied voltage is the bending deformation control unit 6 Supplied from

The flexural deformation control unit 6 controls the polarity and voltage value of the pulse voltage applied between the metal film 2 and the electrode 8, and one of them is provided between the metal film 2 and the electrode 8. When a polar voltage is applied, a quantity of ions corresponding to the applied voltage value moves from the conductive polymer film 3 to the electrolytic substance in the electrolytic solution 7, and the volume of the conductive polymer film 3 changes due to the release of the ions.

When a voltage of the other polarity is applied between the metal film 2 and the electrode 8, the conductive substance in the electrolytic solution 7 is doped with ions in an amount corresponding to the applied voltage value. As a result, the volume of the conductive polymer film 3 changes contrary to the time of ion emission.

The amount of change in the volume of the conductive polymer film 3 at the time of ion emission and doping corresponds to the applied voltage value, that is, the amount of ion emission and the amount of doping from the conductive polymer film 3.

When the volume of the conductive polymer film 3 changes due to the exchange of ions between the conductive polymer film 3 and the electrolytic solution 7, the volume change causes the metal film 2 to bend and deform together with the conductive polymer film 3. As a result, the functional polymer element 1 is flexibly deformed over almost the entire area.

That is, the conductive polymer film 3 expands and contracts due to the emission and doping of ions when a voltage is applied, but the metal film 2 in which the conductive polymer film 3 is laminated in a fixed state is applied with a voltage. Since the conductive polymer film 3 expands and contracts, the metal film 2 bends and deforms in an arc shape together with the conductive polymer film 3, and the entire functional polymer element 1 bends as shown by a broken line in FIG. Deform.

The flexural deformation characteristics of the functional polymer element 1 differ depending on the physical properties of the conductive polymer film 3, for example, the conductive polymer film 3 expands due to ion emission,
In the case where the conductive polymer film 3 has a physical property of contracting due to ion doping, when a voltage having a polarity for releasing ions from the conductive polymer film 3 is applied, the surface of the conductive polymer film 3 is bent and deformed so as to become an outer circumferential surface of an arc. Then, when a voltage of opposite polarity is applied, the back surface of the metal film 2 is flexibly deformed in a direction to become the outer peripheral surface of the arc.

When the conductive polymer film 3 has a physical property that it shrinks due to ion emission and expands due to ion doping, when a voltage of a polarity that causes the conductive polymer film 3 to emit ions is applied, The back surface of the metal film 11 is flexibly deformed in the direction of the outer peripheral surface of the arc, and when a voltage of opposite polarity is applied, the surface of the conductive polymer film 3 is flexibly deformed in the direction of the outer peripheral surface of the arc.

The change in the volume of the conductive polymer film 3 due to the exchange of ions is a change in the distance between the conductive polymer main chains 3a of the conductive polymer film 3, and in the functional polymer element 1, Since the conductive polymer film 3 has a structure in which the conductive polymer main chains 3a are aligned in substantially the same direction, stable and highly reproducible functional characteristics can be obtained.

Moreover, in this embodiment, the conductive polymer film 3 has a structure in which the conductive polymer main chain 3a is aligned in a direction substantially perpendicular to the surface of the metal film 2. The rate of change in the volume of the conductive polymer film 3 due to the transfer of ions is large in the plane direction, and therefore the functional polymer element 1 can be flexibly deformed by a large amount of deformation in response to the application of voltage.

Then, the functional polymer element 1 exchanges ions between the conductive polymer film 3 and the electrolyte layer (electrolyte solution 7 in this embodiment) adjacent to the conductive polymer film 3 by applying a voltage. Since it functions to be flexibly deformed, the flexural deformation force can be used for driving other objects.

That is, the functional polymer element 1 can be used as an actuator or the like used for pressurizing or depressurizing a fluid, or driving a tilt-rotating member, and is used with both ends or the periphery thereof being restrained. Then, as shown by the chain line in FIG. 2, the central portion operates as a diaphragm type actuator that bulges and deforms in the front and back directions, and when used with one end restrained, the free end side bends and deforms in the front and back directions. Operates as an actuator.

5 and 6 show an example in which the functional polymer element 1 is used in a diaphragm type actuator of an inkjet nozzle used in an inkjet printer.

In this ink jet nozzle, the inside of the ink tank 20 is formed by the flexible diaphragm 21 and the ink chamber 2 on the front side.
2 and the pressure chamber 23 on the rear surface side, and the ink chamber 22
Is provided with a nozzle tube 24 on the front surface thereof, and an ink supply port 25 having a check valve is provided on the side surface of the ink chamber 22
The rear surface of the pressure chamber 23 is composed of a diaphragm type actuator composed of the functional polymer element 1, and an ink supply pipe (not shown) is connected to the ink supply port 25.

In the ink jet nozzle shown in FIG. 5, the functional polymer element 1 is attached so that the conductive polymer film 3 faces the rear of the pressure chamber 23, and the electrolytic polymer is placed behind the functional polymer element 1. The liquid chamber 20a is formed, the electrolytic solution 7 is enclosed in the electrolytic chamber 20a, and the electrode 8 facing the functional polymer element 1 is provided on the inner surface of the rear wall of the electrolytic chamber 20a. There is.

In the ink jet nozzle shown in FIG. 6, the functional polymer element 1 is attached so that the conductive polymer film 3 faces the pressure chamber 23, and the electrolytic solution 7 is placed in the pressure chamber 23. An electrode 8 facing the functional polymer element 1 is provided on the surface of the flexible diaphragm 21 on the pressure chamber 23 side while being sealed.

The ink jet nozzles shown in FIGS. 5 and 6 both perform ink ejection from the nozzle tube 24 and ink replenishment into the ink chamber 22 by flexural deformation of the functional polymer element 1. Therefore, when a voltage of either polarity is applied to the functional polymer element 1, the functional polymer element 1 is flexibly deformed so as to bulge toward the pressure chamber 23 side, and the pressure in the pressure chamber 23 (atmospheric pressure in FIG. 4). 5, the electrolyte pressure) rises, whereby the flexible diaphragm 21 is flexed and deformed toward the ink chamber 22 side to pressurize the inside of the ink chamber 22, and the pressure causes the ink a to flow from the tip of the nozzle tube 24. To jet.

When a voltage having a reverse polarity is applied to the functional polymer element 1, the functional polymer element 1 is flexibly deformed so as to bulge to the opposite side, and the pressure in the pressure chamber 23 is lowered to be flexible. The diaphragm 21 bends and deforms toward the pressure chamber 23 side to create a negative pressure in the ink chamber 22, and the ink a is replenished from the ink replenishing port 25 to the ink chamber 22.

The functional polymer element 1 of the above embodiment
Uses the electrolytic solution 5 as an electrolyte layer adjacent to the conductive polymer film 3, but the electrolyte layer may be an electrolyte film made of an electrolytic substance laminated on the conductive polymer film 3.

FIG. 7 is a side view of a functional polymer element showing a second embodiment of the present invention. The functional polymer element 1a of this embodiment has a conductive film on the metal film 1 over substantially the entire surface thereof. A conductive polymer film 3 in a fixed state, an electrolyte membrane 4 on the conductive polymer film 3 in a fixed state, and a conductive polymer film 3 and an electrolyte film 4 on the laminated film. An electrode 5 is provided so as to face the metal film 2 with the laminated film interposed therebetween.

The metal film 2 and the conductive polymer film 3 are used.
Is the same as that of the first embodiment, and the main chains of the conductive polymer of the conductive polymer film 3 are oriented in substantially the same direction, for example, in the direction substantially perpendicular to the surface of the metal film 2. I have them all.

The electrolyte membrane 4 is formed by applying a solution of an ion conductive polymer represented by polyoxyethylene or the like on the conductive polymer membrane 3.

The interface between the conductive polymer membrane 3 and the electrolyte membrane 4 has a composition in which the components of both membranes 3 and 4 are mixed, and the composition ratio is such that the conductive polymer membrane 3 and the electrolyte membrane are in contact. 4 and continuously changing.

That is, the composition ratios of the conductive polymer film 3 and the electrolyte film 4 except the interface portion are 100%, respectively, but the composition ratio of the conductive polymer film 3 approaches the electrolyte membrane 4 at the interface portion. Electrolyte membrane 4
As the composition ratio of (1) approaches the conductive polymer film 3, it decreases.

In the functional polymer element 1a of this embodiment, a pulse voltage is applied between the metal film 2 and the electrode 5 facing the metal film 2 with the conductive polymer film 3 and the electrolyte film 4 interposed therebetween. Is driven by applying
The applied voltage is supplied from the bending deformation control unit 6 that controls the polarity and voltage value of the pulse voltage.

In the functional polymer element 1a, the metal film 2 and the electrode 5 facing the metal film 2 with the conductive polymer film 3 and the electrolyte film 4 interposed therebetween.
When a voltage is applied between the conductive polymer film 3 and the electrolyte film 4, the conductive polymer film 3 exchanges ions with the electrolyte film 4 to change the volume, and the volume change causes the metal film 2 to bend together with the conductive polymer film 3. The functional polymer element 1a is deformed, and thereby the functional polymer element 1a is flexibly deformed almost all over.

In this case, in this embodiment, the interface between the conductive polymer film 3 and the electrolyte film 4 is made to have a composition in which the components of both films 3 and 4 are mixed and the composition ratio is continuously changed. Therefore, the ion exchange between the conductive polymer film 3 and the electrolyte film 4 can be smoothed, and the functional polymer element 1a can be flexibly deformed in response to the application of voltage.

The functional polymer element 1a of this embodiment is also used.
Also in the above, since the conductive polymer film 3 has a structure in which the direction of the conductive polymer main chain is aligned in a direction substantially perpendicular to the surface of the metal film 2, the ion of the conductive polymer film 3 is The rate of change in volume due to transfer is large in the surface direction, so that the functional polymer element 1a can be efficiently flexibly deformed in response to the application of a voltage.

Then, the functional polymer element 1a functions so that when a voltage is applied, ions are transferred between the conductive polymer film 3 and the electrolyte film 5 laminated thereon to be flexibly deformed. Therefore, it can be operated without using an electrolytic solution, and thus can be used in space.

FIG. 8 shows an example in which the functional polymer element 1a is used in a diaphragm type actuator of an inkjet nozzle used in an inkjet printer.

The structure of this ink jet nozzle is the same as that shown in FIG. 6, but the pressure chamber 23 is an air chamber, and the functional polymer element 1a constituting the rear surface of the pressure chamber 23 is formed. Is attached with any one of the metal film 2 surface and the electrode 5 surface facing the inside of the pressure chamber 23.

The functional polymer element 1a of this example is used.
In which the electrolyte membrane 4 is laminated on the conductive polymer membrane 3 and the electrode 5 is provided on the electrolyte membrane 4, the electrolyte membrane 4 and the electrode 5 resist the bending deformation of the functional polymer element 1a. However, when the amount of flexural deformation required for the functional polymer element 1a is small, the resistance of the electrolyte membrane 4 and the electrode 5 against the flexural deformation does not pose a problem.

However, when the flexural deformation amount required for the functional polymer element 1a is large, the electrolyte membrane 4 and the electrode 5 are used.
Are preferably divided into a plurality of parts in the bending deformation direction of the functional polymer element 1a or are formed in a meandering manner. In this case, the electrolyte membrane 4 and the electrode 5 are formed in the functional polymer element 1a. The degree of resistance against flexural deformation can be reduced.

In the functional polymer elements 1 and 1a of the first and second embodiments, the exchange of ions between the conductive polymer film 3 and the electrolyte layer (electrolyte solution 7 or electrolyte film 4). The functional polymer element of the present invention is not limited to that of the above-described embodiment, but is used as a flexible deformable element that causes a mechanical action called flexural deformation due to a volume change of the conductive polymer film 3 due to the conductive polymer film 3. Application to non-mechanical elements such as optical shutters and various sensors where physical properties such as light transmittance and dielectric constant of the film itself change due to ion exchange between the polymer film and electrolyte layer Even in that case, since the conductive polymer film 3 has a structure in which the main chains of the conductive polymers are aligned in substantially the same direction, good reproducibility and large deformation amount can be obtained. The characteristics can be obtained.

[0067]

The functional polymer element of the present invention comprises a conductive polymer film in which the main chains of the conductive polymer are aligned in substantially the same direction on the metal film surface, and a voltage is applied. It is characterized by functioning by exchanging ions between the conductive polymer film and the electrolyte layer adjacent to the conductive polymer film, and the functional polymer element is capable of exchanging ions by applying a voltage. Since it works by functioning, it is easy to miniaturize it, and the conductive polymer film has a structure in which the main chains of the conductive polymer are aligned in almost the same direction. It is possible to obtain functional characteristics that are excellent in the property and have a large amount of deformation.

In the functional polymer element of the present invention, if the conductive polymer film has a volume that is changed by the transfer of ions, the functional polymer element is disposed in the plane direction of the conductive polymer film. It can be used as a flexural deformation element in which the metal film flexibly deforms together with the conductive polymer film due to a volume change.

In this case, if the conductive polymer film has a structure in which the main chains of the conductive polymer are aligned in a direction substantially perpendicular to the metal film surface, the conductive polymer film Since the rate of change in volume due to the exchange of ions increases in the plane direction, the functional polymer element can be efficiently flexibly deformed in response to the application of voltage.

In this functional polymer element, the electrolyte layer may be an electrolytic solution in which an electrolytic substance is dissolved. In that case, the metal film, the conductive polymer film and the electrolytic solution are By applying a voltage between the metal film and the opposing electrode via the metal ion, it is possible to exchange ions between the conductive polymer film and the electrolytic solution.

Further, the electrolyte layer may be an electrolyte film made of an electrolytic substance laminated on the conductive polymer film. In that case, the metal film, the conductive polymer film and the electrolyte film may be combined. By applying a voltage between the metal film and the opposing electrode via the ion, it is possible to exchange ions between the conductive polymer film and the electrolyte film.

In the method for producing a functional polymer element of the present invention, a raw material made of a conductive polymer is vaporized to ionize the vaporized gas, or a conductive polymer or a monomer or oligomer of the conductive polymer is used. The solution is sprayed to ionize the sprayed mist, and the ions are adsorbed to the metal film surface by applying a voltage to the metal film, thereby forming the conductive polymer film. According to this manufacturing method, it is possible to obtain the functional polymer element in which the conductive polymer film in which the main chains of the conductive polymers are aligned in substantially the same direction is laminated on the metal film surface.

In the method for producing a functional polymer element of the present invention, when the ions to be adsorbed on the metal film surface are the ions of the conductive polymer, the coating can be used as it is as the conductive polymer film. Also, when the ion is a monomer or oligomer ion of a conductive polymer, if these ions are accelerated and adsorbed on the metal film surface, the monomer or oligomer is polymerized,
The conductive polymer film is formed.

[Brief description of drawings]

FIG. 1 is an enlarged sectional view of a part of a functional polymer element showing a first embodiment of the present invention.

FIG. 2 is a side view of the functional polymer element.

FIG. 3 is a diagram showing a first manufacturing method of the functional polymer element.

FIG. 4 is a diagram showing a second manufacturing method of the functional polymer element.

FIG. 5 is a cross-sectional view showing an example in which the functional polymer element of the first embodiment is used in a diaphragm actuator of an inkjet nozzle.

FIG. 6 is a cross-sectional view showing another example in which the functional polymer element of the first embodiment is used for the diaphragm type actuator of the inkjet nozzle.

FIG. 7 is a side view of the functional polymer element showing the second embodiment of the present invention.

FIG. 8 is a cross-sectional view showing an example in which the functional polymer element according to the second embodiment is used for a diaphragm type actuator of an inkjet nozzle.

[Explanation of symbols]

 1, 1a ... Functional polymer element 2 ... Metal film 3 ... Conductive polymer film 3a ... Main chain of conductive polymer 4 ... Electrolyte film 5 ... Electrode 7 ... Electrolyte solution 8 ... Electrode

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location B41J 2/055

Claims (7)

[Claims] 1. A conductive polymer film in which the main chains of conductive polymers are aligned in substantially the same direction on a metal film surface, and the conductive polymer film and the conductive polymer film are adjacent to the conductive polymer film when a voltage is applied. A functional polymer element characterized by functioning by giving and receiving ions to and from an electrolyte layer. 2. The main chain of the conductive polymer of the conductive polymer film is oriented substantially perpendicular to the metal film surface, and the volume of the conductive polymer film is changed by the transfer of the ions. The functional polymer element according to claim 1, wherein the metal film bends and deforms together with the conductive polymer film due to a volume change in the plane direction. 3. The electrolyte layer is an electrolytic solution in which an electrolytic substance is dissolved, and the conductive polymer film faces the metal film and the metal film via the conductive polymer film and the electrolytic solution. By applying a voltage between the electrodes,
The functional polymer element according to claim 1 or 2, which exchanges ions with the electrolytic solution. 4. The electrolyte layer is an electrolyte film made of an electrolytic substance laminated on the conductive polymer film, and the conductive polymer film includes the metal film, the conductive polymer film and the electrolyte film. The ion is exchanged with the electrolyte membrane by applying a voltage between the metal membrane and an electrode facing the metal membrane via the electrolyte membrane.
Alternatively, the functional polymer element according to claim 2. 5. A method for producing a functional polymer element, which comprises laminating a conductive polymer film in which the main chains of the conductive polymer are aligned in substantially the same direction on the metal film surface. A raw material made of a conductive polymer is evaporated to ionize the vaporized gas, and the ions are adsorbed to the surface of the metal film by applying a voltage to the metal film to form the conductive polymer film. Method for producing functional polymer element. 6. A method for producing a functional polymer element, which comprises laminating a conductive polymer film in which the main chains of the conductive polymer are aligned in substantially the same direction on a metal film surface, the method comprising: Of a conductive polymer or conductive polymer monomer or oligomer is sprayed to ionize the spray mist, and the ions are adsorbed to the metal film surface by applying a voltage to the metal film, thereby forming the conductive polymer film. A method for producing a functional polymer element, which comprises forming 7. The ion to be adsorbed on the metal film surface is an ion of a conductive polymer monomer or oligomer, and the ion is adsorbed to the metal film surface and polymerized to form the conductive polymer film. 7. The method for producing a functional polymer element according to claim 6, wherein.