JP2002317858A - Actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator capable of obtaining a large reduction ratio and converting into high torque. SOLUTION: An input-side angular bevel gear 11 and an output-side angular bevel gear 12 different from each other in the number of teeth are mounted oppositely to each other in a state that their teeth 37, 29 are not engaged with one another in a neutral state, the input-side angular bevel gear 11 is pressed by plural pressing rods 24 vertically moved by fluid pressure through a ball bearing 39 to be oscillated at a predetermined oscillation angle step by step, and is prevented from being rotated by a guide pin 47, further the input and output side angular bevel gears 11, 12 are mounted in a state that a vertex of each pitch face of the gears 11, 12 is agreed with a central point of the ball bearing 39, and a central line of the guide pin 47 and the central point of the ball bearing 39 are arranged on a straight line.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator using a pair of oblique bevel gears. The actuator rotates stepwise and decelerates in synchronism with air or a fluid pressure of water or brake oil, or a pressing force of a solenoid. The present invention relates to an actuator capable of realizing ultra-low speed rotation without using a machine.

[0002]

2. Description of the Related Art Conventionally, as a device that can be rotated at a very low speed by using a pair of gears, a collection of "00 Robotics Mechatronics Lecture Meeting" held at "Japan Society of Mechanical Engineers" held on May 12-13, 2000. A hydraulic motor using a pair of crown gears described in "Development of a Low Speed High Torque Fluid Drive Unit Crown Motor" is known.

[0003]

However, the hydraulic motor described in the above-mentioned collection of papers has an input-side crown gear 711 and an output-side crown gear 712 as shown in FIG. 711 is swingable by a universal joint 713. And an air cylinder (not shown)
Of the input side crown gear 711
Are formed so as to mesh with some teeth 716 of the peripheral portion of the output side crown gear 712. However, as shown in FIG.
Of the second teeth 715 and 716, the outer peripheral side 715a and 7
16a are engaged, but the inner peripheral side 715b / 71
6b does not engage. That is, crown gears 711 and 712
Is used, since each pitch plane of each crown gear is horizontal, the respective pitch planes are in a parallel state and do not intersect. Therefore, it is impossible to make the apexes of the pitch planes of all crown gears coincide with the center of oscillation of the crown gears, and in each of the crown gears 711 and 712, the teeth 715 and 716 mesh with each other over the entire surface. Therefore, there is a problem that the gears do not mesh accurately. As a result, noise is generated when the two crown gears 711 and 712 mesh with each other, heat is generated due to frictional resistance, and rattling occurs. There has been a problem that accuracy is reduced.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem. By using an oblique bevel gear, the entire surface of the teeth meshes and comes into full contact, and as a result, there is no generation of noise, little wear and no backlash. By rotating smoothly, and by ensuring the positioning of the output shaft,
An object of the present invention is to provide an actuator capable of realizing high-precision ultra-low-speed rotation for a long period of time.

[0005]

According to the present invention, a pair of oblique bevel gears which are relatively rotatable and have different numbers of teeth, and a portion of which is engaged with the teeth of each oblique bevel gear. In the other side, the bevel gears of the respective oblique bevel gears are disposed so as to be separated from each other, and one of the oblique bevel gears has the tooth surface of the other oblique bevel gear. Linear pressing means for sequentially pressing at least three or more places of the one oblique bevel gear so as to swing and mesh with each other, and applying a pressing force to the linear pressing means. A pressure applying means, a control means for sequentially operating the pressing force applying means, and a rotation preventing means for preventing rotation of any one of the oblique bevel gears, The vertex of the pitch surface of the bevel gear coincides with the swing center of the swinging oblique bevel gear. By employing the means of so as to, the above-mentioned problems are eliminated.

[0006]

1 to 4 show a first embodiment of the present invention, FIGS. 5 to 6 show a second embodiment of the present invention, and FIGS.
8 shows a third embodiment of the present invention, FIG. 8 shows a fourth embodiment of the present invention, FIGS. 9 and 10 show a fifth embodiment of the present invention,
FIGS. 11 to 12 show a sixth embodiment of the present invention, and FIGS.
FIG. 14 is a seventh embodiment of the present invention, FIGS. 15 to 17 are eighth embodiments of the present invention, and FIGS. 18 to 20 are other embodiments of the ball bearing and bearing used in the present invention. It is a figure which shows a form each. The actuator according to the first to seventh embodiments of the present invention uses a fluid pressure such as air or water or brake oil as a drive source for driving the actuator. The actuator according to the eighth embodiment of the present invention utilizes electromagnetic force as a drive source for driving the actuator. The fluid pressure used as a drive source of the actuator in the first to seventh embodiments includes:
The following description is based on the assumption that air pressure is used for convenience of description of the embodiment.

A first embodiment of the present invention shown in FIGS. 1 to 4 will be described in detail with reference to the drawings. First, the first aspect of the present invention
In the actuator 1A shown in the embodiment, a pneumatic pulse supplied by a rotary valve is used as a driving source for driving the actuator 1A.

FIG. 1 is a longitudinal sectional view of an actuator 1A according to a first embodiment of the present invention. The actuator 1A does not need to be particularly limited. For example, by supplying a pneumatic pulse having a phase difference of 120 ° from the rotary valve RV, the actuator 1A swings stepwise at a swing angle of 120 ° in synchronization with the supply. The input side oblique bevel gear 11 and the output side oblique bevel gear 12 for taking out the swinging motion of the input side oblique bevel gear 11 as rotation. In the first embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 11 will be described as being greater than the number of teeth of the output-side oblique bevel gear 12, but the number of teeth on the output side is opposite. Bevel bevel gear 1
Even if the number of teeth 2 is greater than the number of teeth of the input-side oblique bevel gear 11, the object can be achieved.

A housing 13 for installing the input / output oblique bevel gears 11 and 12 has a concave portion 14 at the center and an outer lid 1 at an upper end edge of a cylindrical cylinder 16 having a thick bottom plate 15.
7 is fixedly formed.

Further, three small recesses 18 are radially recessed in the bottom plate 15 of the cylinder 16 at an interval of 120 ° from each other, and the small recesses 18 are formed in a disk shape. The outer peripheral edge of the partitioning plate 19 is tightly fitted and fixed to the inner peripheral wall surface of the cylinder 16 and is tightly fixed to the upper surface of the bottom plate 15 so that each small recess 18 is formed in a densely partitioned manner. The fluid passages 20 are respectively opened at the centers of the small recesses 18 so as to penetrate therethrough.

Each of the fluid passages 20 formed in the bottom plate 15 of each of the cylinders 16 has a fluid passage 20 through which a joint 21 communicating with the opening of the small recess 18 is fixed.
Reference numeral 1 denotes a fluid transfer pipe 2 for the rotary valve RV.
2 and is configured to supply compressed air from the rotary valve RV into the small recess 18 through the fluid transfer pipe 22. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from the fluid material supply means is applied to each small recess 18. And a branching means such as a rotary valve for supplying the pressing force constitute a pressing force applying means. As the branching unit, an electromagnetic valve or the like can be used. Further, a control means for controlling the rotation of a rotary valve as a branching means at an arbitrary speed in order to sequentially supply the fluid pressure into each small recess 18 is provided. When the control means uses an electromagnetic valve or the like instead of the rotary valve, it sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 18 is provided with a piston 23 formed so as to be in sliding contact with the side wall of the small recess 18, and a push rod having a hemispherical tip is provided at the center of the tip of each piston 23. 24 are projected from each other,
Each of the pressing rods 24 protrudes upward through the partition plate 19 and is formed so as to be able to move up and down as the piston 23 moves up and down. The partition plate 19 has a piston 2
In order to prevent negative pressure in the space above the piston 23 of the small recess 18 when 3 is lowered, a small hole 19a that connects the space above the piston 23 and the recess 14 is formed. In the figure, reference numeral 25 denotes a sealing material such as an O-ring provided on the outer periphery of the piston 23 in order to prevent air leakage between the upper chamber and the lower chamber partitioned by the piston 23 of the small recess 18. In the embodiment of the present invention, the small concave portion 18, the piston 23, and the pressing rod 24 constitute a direct-acting pressing means for sequentially pressing the bottom surface of the input-side oblique bevel gear 11 upward.

An input bevel gear 11 and an output bevel gear 12 each having a diameter smaller than that of the concave portion 14 are provided in a concave portion 14 above the partition plate 19 of the cylinder 16. . The input / output side oblique bevel gear 11.
At the center of the outer lid 17 above the through-hole 12, a through-projection 26 is projected, and a radial bearing 27 integrally fixed to the through-projection 26 penetrates and supports the output shaft 28 so as to be rotatable. Have been.

In the concave portion 14 of the cylinder 16, an output-side oblique bevel gear 12 formed in an inverted concave cross section has a space 30 between the outer cover 17 and its teeth 29 facing downward. Then, the lower end of the output shaft 28 is inserted through a through hole 31 formed in the center of the output-side oblique bevel gear 12, and a groove formed on the outer peripheral edge of the output shaft 28; The output shaft 28 and the output-side oblique bevel gear 12 are non-rotatably connected by closely fitting the key 32 into a groove 33 formed on the inner peripheral edge of the through-hole 31 of the side-oblique bevel gear 12. Fixed.

A curved concave groove 34 is formed in a circumferential direction on the outer side of the upper surface of the output side oblique bevel gear 12, and the curved concave groove 3 is formed.
A curved concave groove 35 is also formed in the inner wall surface of the outer lid 17 facing the outer circumferential surface 4 in the circumferential direction, and a number of steel balls 36 are sandwiched between the curved concave grooves 34, 35, and this is used as a guide to serve as an output side. Bevel bevel gear 1
2 enables smooth rotation.

Furthermore, the teeth 29 of the output-side oblique bevel gear 12
In the neutral state shown in FIG. 1, the input-side oblique bevel gear 11 having the teeth 37 that mesh with the teeth 37 is disposed facing the position where the teeth 29 and 37 do not mesh in the neutral state shown in FIG. 1. I have. However, it does not become neutral,
The positional relationship between the input-side oblique bevel gear 11 and the output-side oblique bevel gear 12 may be set so that any one of the teeth always slightly meshes. However, as described above, in the neutral state, if the teeth 37 and 29 of the input-side oblique bevel gear 11 and the output-side oblique bevel gear 12 face each other in a state where they are not engaged with each other, a higher load than is necessary. , The teeth 37 and 29 of the input-side oblique bevel gear 11 and the output-side oblique bevel gear 12 rotate without any meshing, and a tooth jumping phenomenon occurs, so that an excessive force is prevented from being applied to the device. Thus, it is possible to prevent the entire device from being damaged.

The input-side oblique bevel gear 11 is swingable via a ball bearing 39 between a central portion of the lower surface of the output shaft 28 and a boss 38 protruding from the central portion of the upper surface of the partition plate 19. The equipment is as follows.

At the center of the lower surface side of the input-side oblique bevel gear 11, a concave notch 40 having a diameter of about half of the input-side oblique bevel gear 11 is provided. An umbrella-shaped opening 41 having a diameter such that a part of the ball of the ball bearing 39 protrudes from the upper edge and having a wall surface expanded downward from the upper edge is formed. Of the ball of the ball bearing 39 is slidably contacted with the outer peripheral surface of the ball of the ball bearing 39, and a part of the ball of the ball bearing 39 is projected upward through the umbrella-shaped opening 41.

On the other hand, at the center of the lower surface of the output shaft 28, an umbrella-shaped concave portion 42 having a wall surface expanded downward is recessed,
Ball bearing 39 protruding in the direction of the output-side oblique bevel gear 12
The outer peripheral surface of the ball is formed to be in sliding contact with a part of the wall surface of the umbrella-shaped concave portion 42.

A part of the ball of the ball bearing 39 protrudes from the lower end edge at the center of a disk-shaped press-fitting plate 43 which is press-fitted into the concave portion 40 of the input-side oblique bevel gear 11 and tightly fitted and fixed. An umbrella-shaped opening 44 having a diameter such that the diameter of the umbrella and a wall surface expanding upward from the lower end edge is formed, and a part of the wall surface of the umbrella-shaped opening 44 is partially And a part of the ball of the ball bearing 39 is projected downward from the umbrella-shaped opening 44.

Further, at the center of the boss 38 of the partition plate 19,
An umbrella-shaped concave portion 45 having a wall surface expanded upward is recessed, and the outer peripheral surface of the ball of the ball bearing 39 protruding toward the partition plate 19 comes into sliding contact with a part of the wall surface of the umbrella-shaped concave portion 45. It is formed as follows. That is, the ball bearing 39
Are mounted on the input-side oblique bevel gear 11, the press-fitting plate 43, and the bearing 46 formed between the center of the lower surface of the output shaft 28 and the boss 38 of the partition plate 19 without being shaken. Therefore, the output shaft 28 also stably rotates.

The bearing 46 is not formed by the umbrella-shaped openings 41 and 44 and the umbrella-shaped recesses 42 and 45 which are brought into sliding contact with a part of the ball of the ball bearing 39 as shown in FIG. The umbrella-shaped openings 41 and 44 and the umbrella-shaped recesses 42 and 45 may be curved recesses, respectively, so that the balls of the ball bearing 39 can make surface contact.

On the outer peripheral surface of the input-side oblique bevel gear 11,
In the neutral state of the input-side oblique bevel gear 11 and the output-side oblique bevel gear 12, one or more (two in FIG. 1) guide pins 47 having a predetermined interval are provided in the horizontal direction. A guide groove 48 is formed in a protruding manner, and a guide groove 48 is formed in the vertical direction of the peripheral wall in the cylinder 16 so as to fit the distal end of each guide pin 47 as a guide.

As shown in FIG. 2, the width of the guide groove 48 is formed such that the guide pin 47 can slide along the guide groove 48. Is movable, but the input side oblique bevel gear 1
1 is formed so as not to move in contact with the groove wall 48a in the circumferential direction. Therefore, the input pin bevel gear 11 can swing with the guide pin 47 as a guide, but the groove wall 48a becomes an obstacle, and the input pin bevel gear 11 cannot rotate. I have. That is, by the guide pin 47 and the guide groove 48,
The rotation preventing means of the input-side oblique bevel gear 11 is configured.

The positional relationship between the ball bearing 39 and the input / output oblique bevel gears 11 and 12 is as follows. Ball bearing 39 serving as a swing center of the input-side oblique bevel gear 11
It is necessary to arrange so that the center point of the object coincides. Also,
The positional relationship between the ball bearing 39 and each guide pin 47 is such that each of the guide pins 47 is connected to the input-side oblique bevel gear 11.
In the neutral state of the bevel gear 12 on the output side and the bevel gear 12 on the output side, it is formed to project horizontally from the bevel gear 11 on the input side, and the center line of each guide pin 47 and the swing of the bevel gear 11 on the input side. It is necessary to arrange so that the center point of the ball bearing 39 serving as the center is on a straight line.

As described above, the positional relationship between the ball bearing 39 and the vertices of the pitch surfaces of the input and output bevel gears 11 and 12 and the positional relationship between the ball bearing 39 and each guide pin 47 are set. As a result, as shown in FIG. 3, the teeth 37 and 29 of the input and output bevel gears 11 and 12 are all meshed with each other in the tooth width direction to make full contact. As a result, the output-side oblique bevel gear 12 rotates smoothly without generating noise, with little wear, and with no backlash, and it is possible to realize high-precision ultra-low-speed rotation for a long time.

As shown in FIG. 1, when the input-side oblique bevel gear 11 is in a neutral state or not in the neutral state as described above, the input-side oblique bevel gear 11 and the output-side oblique bevel gear 11 are connected. When any one of the teeth 37 and 29 of the gear 12 is slightly meshed with each other, each pressing rod 24 is disposed at a position where the tip edge thereof slightly touches the bottom surface of the input-side oblique bevel gear 11. Has been established.

The operation of the actuator 1A according to the first embodiment of the present invention having the above configuration will be described.
Rotary valve RV communicating with compressed air source shown in FIG.
Operates in a preset sequence, the pneumatic pulses are sequentially output through the output ports P _{1 to} P ₃ to each of the fluid passages 2.
0. That is, the first-phase pneumatic pulse is shifted to the fluid passage 20a by 120 °, and the second-phase pneumatic pulse is further shifted to the fluid passage 20b (not shown) by 120 °. The pneumatic pulse of the third phase is supplied to the fluid passage 20c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 20.
When supplied to the piston 23a, the piston 23a is pressurized and moves upward, and the tip of the pressing rod 24a presses a part of the bottom surface of the input-side oblique bevel gear 11, which has been in the neutral state, up.
Then, with the pressing of the pressing rod 24a, the other two pressing rods 2
4b and 24c (not shown) are the input-side oblique bevel gear 1
With the inclination of 1, it is pushed downward and moves.

The oblique bevel gear 11 on the input side of the pressing rod 24a
Due to the pressing operation, a part of the umbrella opening 41 of the input-side oblique bevel gear 11 and a part of the umbrella opening 44 of the press-fitting plate 43 slidably contact the peripheral surface of the ball of the ball bearing 39. As shown in FIG. 3, the input-side oblique bevel gear 11 swings, and the input-side oblique bevel gear 11 on the side pressed by the pressing rod 24a moves upward, and the input-side oblique bevel gear 11 moves upward. The teeth 37 of the bevel gear 11 are the teeth 2 of the bevel gear 12 on the output side.
9 mesh. On the other hand, the teeth 37 of the input-side oblique bevel gear 11 on the non-pressed side and the teeth 29 of the output-side oblique bevel gear 12 are separated without engaging with each other.

When the pressurization of the piston 23a is stopped and the pneumatic pulse of the second phase is supplied to the fluid passage 20b,
The piston 23b (not shown) is pressurized and moves upward,
The tip of the pressing rod 24b presses a part of the bottom surface of the input-side oblique bevel gear 11 upward. On the other hand, the other pressing rods 24a and 24
c moves downward. As a result, the meshing state between the teeth 37 of the input-side oblique bevel gear 11 and the teeth 29 of the output-side oblique bevel gear 12 due to the first-phase pneumatic pulse is released and separated. Then, the teeth 37 of the input-side bevel gear 11 on the side pressed by the pressing bar 24b mesh with the teeth 29 of the output-side bevel gear 12 in the same manner as described above.

Hereinafter, the pressure of the piston 23c (not shown) by the pneumatic pulse of the third phase, the pressing of the pressing rod 24c upward, the downward movement of the other pressing rods 24a and 24b, the oblique input side The operation of meshing and separating the teeth 37 of the bevel gear 11 with the teeth 29 of the output side oblique bevel gear 12 is the same as that described above, and the description is omitted.

By the pressurization of the piston 23a by the pneumatic pulse of the first phase to the pressurization of the piston 23c by the pneumatic pulse of the third phase, the input-side oblique bevel gear 11 having a large number of teeth becomes 3 Swings three times at three different positions, and the teeth 37 of the input-side bevel gear 11 and the teeth 29 of the output-side bevel gear 12 having a small number of teeth are meshed three times. The oblique bevel gear 12 is a ball bearing 3
A part of the wall surface of the beveled concave portion 42 at the center of the lower surface of the output shaft 28 slides on the peripheral surface of the ball 9 and the input-side oblique bevel gear 11 and the output-side oblique bevel gear 11 are guided by the steel balls 36 as guides. This means that the rotation has been performed by the difference in the number of teeth from the number of teeth.

The number of teeth 37 and 29 of the input-side oblique bevel gear 11 and the output-side oblique bevel gear 12 is not particularly limited. However, in the first embodiment of the present invention, the input-side oblique bevel gear 11 has an input-side oblique gear. The number of teeth 37 of the bevel gear 11 is 121, the number of teeth 29 of the output bevel gear 12 is 120, and the difference in the number of teeth is 1. Therefore, the number of bevel gears 11 on the input side is three. Due to the oscillating motion, the output side oblique bevel gear 12 becomes 360 ° / 12
It rotates by 0 = 3 °. That is, the output shaft 28 connected to the output-side oblique bevel gear 12 rotates 1 ° with one pneumatic pulse. Then, the output side oblique bevel gear 12 continuously rotates by repeating the pressing operation by the pressing rod 24 at the tip of the piston 23, and the output shaft 28 connected thereto is continuously rotated. Can be done.

Although the three pistons 23 according to the first embodiment of the present invention are formed at an interval of 120 °, even if the number is four or more, the object can be achieved. .

Next, a second embodiment of the present invention shown in FIGS. 5 and 6 will be described in detail with reference to the drawings. First, the actuator 1B according to the second embodiment of the present invention uses a pneumatic pulse supplied by a rotary valve as a drive source for driving the actuator 1B, as in the first embodiment. Can be

FIG. 5 is a longitudinal sectional view of an actuator 1B according to a second embodiment of the present invention. The actuator 1B is not particularly limited, but for example, has a phase difference of 120 ° from a rotary valve RV (not shown because the same one as in the first embodiment is used).
Supply of the pneumatic pulse, the swing angle 12
Input / output bevel gear 51 that swings stepwise at 0 °
And a fixed oblique bevel gear 52 that meshes with the input / output oblique bevel gear 51 and controls the rotation angle of the input / output oblique bevel gear 51. In the embodiment of the present invention, the number of teeth of the input / output bevel gear 51 will be described as being greater than the number of teeth of the fixed bevel gear 52. Bevel gear 52
Even if the number of teeth is greater than the number of teeth of the input / output oblique bevel gear 51, the object can be achieved.

A housing 53 for installing the input / output bevel gear 51 and the fixed bevel gear 52 has a recess 5 in the center.
4 and is formed by opening the upper end of a cylindrical cylinder 56 having a thick bottom plate 55.

Further, inside the bottom plate 55 of the cylinder 56, three small recesses 57 are radially recessed at an interval of 120 ° from each other, and the small recesses 57 are formed in a disk shape. The outer peripheral edge of the partition plate 58 is tightly fitted and fixed to the inner peripheral wall surface of the cylinder 56, and is tightly fixed to the upper surface of the bottom plate 55 so that each small recess 57 is formed in a densely partitioned manner. A fluid passage 59 is opened at the center of each of the small recesses 57 so as to penetrate therethrough.

Each of the fluid passages 59 formed in the bottom plate 55 of each of the cylinders 56 has a fluid passage 59 through which a joint 60 communicating with the small recess 57 is fixed.
0 is a fluid transfer pipe 6 for each of the rotary valves RV.
1 to supply compressed air from the rotary valve RV into the small recess 57 through the fluid transfer pipe 61. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from the fluid material supply means is applied to each small recess 57. And a branching means such as a rotary valve for supplying the pressing force constitute a pressing force applying means. As the branching unit, an electromagnetic valve or the like can be used. Further, in order to sequentially supply the fluid pressure into each of the small recesses 57, a control means for controlling the rotation of a rotary valve as a branching means at an arbitrary speed is provided. When the control means uses an electromagnetic valve or the like instead of the rotary valve, it sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 57 is provided with a piston 62 formed so as to be in sliding contact with the side wall of the small recess 57, and a push rod having a hemispherical tip is provided at the center of the tip of each piston 62. 63 are protruded respectively,
Each of the pressing rods 63 penetrates the partition plate 58 and protrudes upward, and is formed so as to be able to move up and down as the piston 62 moves up and down. The partition plate 58 includes a piston 6.
In order to prevent a negative pressure from being applied to the space above the piston 62 of the small concave portion 57 when the 2 is lowered, a small hole 58a is formed which communicates the space above the piston 62 with the concave portion 54. In the drawing, reference numeral 64 denotes a sealing material such as an O-ring provided on the outer periphery of the piston 62 in order to prevent air leakage between the upper chamber and the lower chamber of the small recess 57 partitioned by the piston 62. In the embodiment of the present invention, the small concave portion 57, the piston 62 and the pressing rod 63 constitute a direct-acting pressing means for sequentially pressing the bottom surface of the input / output bevel gear 51 upward.

An input / output bevel gear 51 and a fixed bevel gear 52 having a smaller diameter than the concave portion 54 are provided in a concave portion 54 above the partition plate 58 of the cylinder 56. I have. In the opening at the upper end of the cylinder 56, a rotational output plate 66 having an inverted concave shape through a radial bearing 65 fixed to the inner peripheral wall of the upper end opening rotates on the inner peripheral surface of the cylinder 56. It is designed to be free.

A shaft 67 is erected and fixed at the center of the upper surface of the partition plate 58, and a fixed oblique bevel gear 52 having an inverted concave cross section is provided above the shaft 67 so that its teeth 68 move downward. The fixed oblique bevel gear 52 is prevented from coming off by a stopper 69 fixed to the upper end of the shaft 67 while being penetrated and fixed to the side. The method of fixing the shaft 67 to the partition plate 58 is not particularly limited, but preferably, as shown in FIG. 5, a square projection 70 protruding from the shaft 67 is punched in the partition plate 58. A method of penetrating the provided square hole 71 and tightly fitting it to the bottom plate 55 and fixing it is recommended.

Further, the input / output bevel gear 51 having teeth 72 meshing with the teeth 68 of the fixed bevel gear 52 and having a concave section is used in the neutral state shown in FIG. The teeth 68 and 72 are disposed facing each other at positions where they do not mesh with each other. However, the positional relationship between the input / output bevel gear 51 and the fixed bevel gear 52 is set so that the teeth do not become neutral and any one of the teeth always slightly meshes. Is also good. However, as described above, if the teeth 72 and 68 of the input / output bevel gear 51 and the fixed bevel gear 52 face each other in a neutral state and are not meshed with each other, an unnecessarily high height is required. When a load is applied, the input / output oblique bevel gear 51
In this case, the teeth 72 and 68 of the fixed oblique bevel gear 52 do not mesh with each other, and a tooth jumping phenomenon occurs in which the teeth are rotated. This prevents an excessive force from being applied to the apparatus, thereby preventing the entire apparatus from being damaged.

The input / output bevel gear 51 is a ball bearing 74 fixed to a shaft 67 below the fixed bevel gear 52 through a through hole 73 provided at the center.
It is arranged so that it can swing freely via the.

At the center of the lower surface side of the input / output bevel gear 51, a concave notch 75 having a diameter of about half of that of the input / output bevel gear 51 is provided. A curved opening 76 having a diameter such that a part of the ball of the ball bearing 74 projects from the upper end edge and having a curved wall surface expanding downward from the upper end edge is formed at the center of the curved opening. The entire wall surface of the ball bearing 74 is brought into sliding contact with the outer peripheral surface of the ball of the ball bearing 74, and a part of the ball of the ball bearing 73 is projected upward through the curved opening 76.

Also, a disc-shaped press-fit plate 77 which is press-fitted into the concave notch 75 of the input / output oblique bevel gear 51 and tightly fixed thereto.
A curved opening 78 having a diameter such that a part of the ball of the ball bearing 74 protrudes from the lower end edge and having a curved wall surface which is expanded upward from the lower end edge, The entire wall surface of the opening 78 is brought into surface contact with the outer peripheral surface of the ball of the ball bearing 74, and a part of the ball of the ball bearing 74 is projected downward from the curved opening 78. That is, the ball of the ball bearing 74 is supported by the bearing portion 79 formed between the curved openings 76 and 78, and is penetrated and fixed to the shaft 67 so that the ball is not shaken.

The ball bearing 74 is provided on all wall surfaces of the curved openings 76 and 78 as shown in FIG.
The curved openings 76 and 78 are not formed so as to be in surface contact with each other, but so as to be able to slidably contact a part of the ball of the ball bearing 74 as shown in the first embodiment. Each may be an umbrella-shaped opening.

On the outer peripheral surface of the input / output bevel gear 51, a cylindrical guide pin 80 is provided at a predetermined interval, and the input / output bevel gear 51 and the fixed bevel gear 52 are provided. In the neutral state, one or a plurality (two in FIG. 5) of horizontal protrusions are formed in the horizontal direction, and a guide groove 81 for fitting the leading end of the guide pin 80 for guiding is provided on the peripheral wall of the rotary output plate 66. 81 is recessed on the lower end surface side. As shown in FIG. 6, the width of the guide groove 81 is formed such that the guide pin 80 can slide.
In FIG. 5, the groove wall 81a is formed so as to be able to move vertically along the guide groove 81 and to be able to move by pressing the groove wall 81a also in the circumferential direction of the input / output bevel gear 51. Therefore, the input / output bevel gear 51 can swing with the guide pin 80 as a guide,
The input / output oblique bevel gear 51 can rotate by being pressed by the guide pin 80 via the radial bearing 65. That is, the configuration of the guide pin 80 and the guide groove 81 prevents the input / output oblique bevel gear 51 from rotating relative to the fixed oblique bevel gear 52, which is Bevel gear 5 for input and output to bevel gear 52
The first relative rotation preventing means is constituted.

The positional relationship between the ball bearing 74 and the input / output oblique bevel gear 51 and the fixed oblique bevel gear 52 is as follows. And the center point of the ball bearing 74, which is the swing center of the input / output oblique bevel gear 51, needs to be arranged. The positional relationship between the ball bearing 74 and each of the guide pins 80 is such that the input / output bevel gear 51
In the neutral state of the fixed oblique bevel gear 52 and the oblique bevel gear 52 for input and output, it is formed to protrude horizontally from the oblique bevel gear 51 for input and output,
It is necessary to arrange the center line of each guide pin 80 and the center point of the ball bearing 74 which is the swing center of the input / output oblique bevel gear 51 on a straight line.

As described above, the positional relationship between the ball bearing 74 and the vertices of the pitch surfaces of the input / output oblique bevel gear 51 and the fixed oblique bevel gear 52, and the relationship between the ball bearing 74 and each guide pin 80 By setting the positional relationship, the first
3, the teeth 72 of the input / output side bevel gear 51 and the fixed bevel gear 52 are similar to those shown in FIG.
All 68 are meshed over the entire surface of the tooth in the tooth width direction to be in full contact (not shown). As a result, the input and output bevel gear 51 rotates smoothly without generating noise, without abrasion, and without backlash, and it is possible to realize high-precision ultra-low-speed rotation for a long time. is there.

As shown in FIG. 5, when the input / output bevel gear 51 is in the neutral state or not in the neutral state as described above, the input / output bevel gear 5 is not used.
1 and one of the teeth 72 and 68 of the fixed oblique bevel gear 52 are slightly meshed with each other,
Numeral 3 is disposed at a position where its leading edge slightly contacts the bottom surface of the input / output bevel gear 51.

The operation of the actuator 1B according to the second embodiment of the present invention having the above configuration will be described.
As shown in FIG. 4 in the first embodiment, when the rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output ports P ₁ to P _{1 are} output.
Pneumatic pulses are sequentially supplied to each fluid passage 59 via P ₃ (not shown). That is, the pneumatic pulse of the first phase is supplied to the fluid passage 59a, and the pneumatic pulse of the second phase which is 120 ° out of phase is supplied to the fluid passage 59b (not shown).
The third phase pneumatic pulse further shifted by 120 ° is supplied to the fluid passage 59c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 59.
is supplied to the piston 62a, the piston 62a is pressurized and moves upward, and the tip of the pressing rod 63a presses a part of the bottom surface of the input / output bevel gear 51 which has been in the neutral state up to now. I do. Then, with the pressing of the pressing bar 63a, the other two pressing bars 63b and 63c (not shown) are pressed and moved downward with the inclination of the input / output bevel gear 51.

By the pressing operation of the pressing rod 63a against the input / output oblique bevel gear 51, the peripheral surface of the ball of the ball bearing 74 is moved to the curved opening 7 of the input / output oblique bevel gear 51.
The input and output oblique bevel gear 51 swings while all the wall surfaces of the curved opening 78 of the press-fit plate 77 and the press-fitting plate 77 are in contact with each other,
The input / output bevel gear 51 on the side pressed by the pressing rod 63a moves upward, and the teeth 72 of the input / output bevel gear 51 on the side moved upward move the fixed bevel gear 52.
Meshes with the teeth 68. On the other hand, the teeth 72 of the input / output bevel gear 51 on the non-pressed side and the teeth 68 of the fixed bevel gear 52 are separated without engaging with each other (this state corresponds to the first embodiment). Since it is the same as FIG. 3 shown in the embodiment, illustration is omitted).

When the pressurization of the piston 62a is stopped and the second-phase pneumatic pulse is supplied to the fluid passage 59b,
The piston 62b (not shown) is pressurized and moves upward, and the tip of the pressing rod 63b presses a part of the bottom surface of the input / output bevel gear 51 upward. On the other hand, the other pressing rod 63a
63c (not shown) moves downward. This allows
The meshing state between the teeth 72 of the input / output bevel gear 51 and the teeth 68 of the fixed bevel gear 52 due to the pneumatic pulse of the first phase is released and separated. The teeth 72 of the input / output bevel gear 51 on the side pressed by the pressing bar 63b mesh with the teeth 68 of the fixed bevel gear 52 in the same manner as described above.

Hereinafter, the piston 62c (not shown) is pressurized by the pneumatic pulse of the third phase, the pressing rod 63c is pressed upward, and the other pressing rods 63a and 63b are moved downward.
The meshing and separation of the teeth 72 of the input / output bevel gear 51 with the teeth 68 of the fixed bevel gear 52 are the same as those described above, and the description is omitted.

By the pressurization of the piston 62a by the pneumatic pulse of the first phase to the pressurization of the piston 62c by the pneumatic pulse of the third phase, the input / output bevel gear 51 having many teeth is formed. By swinging three times at three different positions, the teeth 72 of the input and output bevel gear 51 mesh with the teeth 68 of the fixed bevel gear 52 having a small number of teeth three times, respectively. The oblique bevel gear 51 for input and output
Is in surface contact with the peripheral surface of the ball of the ball bearing 74, and has rotated by the difference in the number of teeth between the input / output bevel gear 51 and the fixed bevel gear 52.

The number of teeth 72 and 68 of the input / output bevel gear 51 and the fixed bevel gear 52 is not particularly limited. However, in the second embodiment of the present invention, the input / output bevel gear 51 and the fixed bevel gear 52 have the same number of teeth. The number of teeth 72 of the output bevel gear 51 is 121, the number of teeth 68 of the fixed bevel gear 52 is 120, and the difference in the number of teeth is 1. Therefore, the input / output bevel gear is used. 51 is 3
Due to the swinging motion, the input / output bevel gear 51 rotates 360 ° / 120 = 3 °. That is, with one pneumatic pulse, the rotary output plate 66 connected to the input / output bevel gear 51 via the guide pin 80 rotates 1 °. The input / output bevel gear 51 continuously rotates by continuously repeating the pressing operation by the pressing rod 63 at the tip of the piston 62, and the rotary output plate 66 connected thereto is continuously rotated. Can be rotated.

The three pistons 62 according to the second embodiment of the present invention are formed at intervals of 120 °, but the object can be achieved with four or more pistons. .

The third embodiment of the present invention shown in FIG. 7 will be described in detail with reference to the drawings. In the actuator 1C according to the third embodiment of the present invention, a pneumatic pulse supplied by a rotary valve is used as a drive source for driving the actuator IC, as in the first embodiment.

FIG. 7 is a longitudinal sectional view of an actuator 1C according to a third embodiment of the present invention. The actuator 1C does not need to be particularly limited, but for example, has a phase difference of 120 ° from a rotary valve RV (not shown because the same one as in the first embodiment is used).
Supply of the pneumatic pulse, the swing angle 12
The input bevel gear 111 is configured to include an input bevel gear 111 that swings stepwise at 0 ° and an output bevel gear 112 that takes out the swinging motion of the input bevel gear 111 as rotation. . In the embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 111 is described as being larger than the number of teeth of the output-side oblique bevel gear 112. When the number of teeth of the bevel gear 112 is the input-side oblique bevel gear 1
Even if it is more than 11, the object can be achieved.

The input / output oblique bevel gears 111 and 112
The housing 113 is provided with a concave portion 114 at the center and an outer lid 117 fixed to the upper end edge of a cylindrical cylinder 116 having a thick bottom plate 115.

Further, the bottom plate 115 of the cylinder 116
Are spaced apart from each other by a distance of 120 °.
18 are radially recessed, and the outer periphery of a disk-shaped partition plate 119 is formed in the small recess 118 by the cylinder 1.
16 and tightly fixed to the upper surface of the bottom plate 115, each small recess 118 is formed in a tightly partitioned manner, and further penetrates through the bottom plate 115 to form each small recess 11
8, fluid passages 120 are respectively opened at the center.

Each of the fluid passages 120 provided in the bottom plate 115 of each of the cylinders 116 has a small recess 118.
Are connected to the rotary valve RV via fluid transfer pipes 122, respectively.
2 to supply compressed air from the rotary valve RV into the small recess 118. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from the fluid material supply means are applied to each of the small recesses 118.
The pressing force applying means is constituted by a branching means such as a rotary valve supplied into the inside. As the branching unit, an electromagnetic valve or the like can be used. Further, in order to sequentially supply the fluid pressure into each of the small recesses 118, a control unit for controlling the rotation of a rotary valve as a branching unit at an arbitrary speed is provided. When the control means uses an electromagnetic valve or the like instead of the rotary valve, it sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 118 has a corresponding one of the small recesses 118.
Each of the pistons 123 is formed so as to be in sliding contact with the side wall of the piston, and at the center of the distal end of each piston 123, a pressing rod 124 having a hemispherical distal end is protrudingly provided. It is formed so as to protrude upward through the partition plate 119 and move up and down with the up and down movement of the piston 123. In addition, the partition plate 1
19, when the piston 123 descends, the small recess 11
8 in order to prevent the space above the piston 123 from becoming negative pressure.
And a small hole 119a that communicates with. In the figure, 1
Numeral 25 denotes a piston 1 to prevent air leakage between the upper chamber and the lower chamber partitioned by the piston 123 of the small recess 118.
A sealing material such as an O-ring provided on the outer periphery of the reference numeral 23.
In the embodiment of the present invention, the small concave portion 118, the piston 123 and the pressing rod 124 constitute a linear motion pressing means for sequentially pressing the bottom surface of the input side oblique gear 111 upward.

An input bevel gear 111 and an output bevel gear 112 having a smaller diameter than the concave part 114 are provided in a concave part 114 above the partition plate 119 of the cylinder 116. . In the center of the outer cover 118 above the input / output side bevel gears 111 and 112,
A penetrating protrusion 126 is provided, and the penetrating protrusion 126 is formed.
The output shaft 128 is attached to the radial bearing 127 integrally fixed to the
Are supported so as to be rotatable.

In the concave portion 114 of the cylinder 116, an output oblique bevel gear 112 formed in an inverted concave cross section is provided.
However, the output shaft 128 has a gap 130 between the output side oblique bevel gear 112 and a gap 130 between the output side oblique bevel gear 112 and the tooth 129 facing downward. The key 132 is inserted into the groove formed on the outer peripheral edge of the output shaft 128 and the groove 133 formed on the inner peripheral edge of the through hole 131 of the output-side oblique bevel gear 112. The output shaft 128 and the output side oblique bevel gear 11
2 are connected and fixed so as not to rotate.

A curved concave groove 134 is recessed in the outer circumferential direction on the upper surface of the output-side oblique bevel gear 112, and the inner wall surface of the outer lid 117 facing the curved concave groove 134 is also circumferentially formed. The curved concave grooves 135 are recessed, and the respective curved concave grooves 134 and 135 are formed.
A large number of steel balls 136 are interposed therebetween, and the output side oblique bevel gear 112 can be smoothly rotated using the steel balls 136 as guides.

Further, the tooth 1 of the output side oblique bevel gear 112
In the neutral state shown in FIG. 7, the input-side oblique bevel gear 111 having the teeth 137 meshing with the teeth 29 and facing each other is disposed at a position where the teeth 129 and 137 do not mesh with each other in the neutral state shown in FIG. ing. However, even if the positional relationship between the input-side oblique bevel gear 111 and the output-side oblique bevel gear 112 is set so that one of the teeth does not always enter the neutral state, and any of the teeth always slightly meshes. Good. However, as described above, in the neutral state, the teeth 137 and 129 of the input-side oblique bevel gear 111 and the output-side oblique bevel gear 112
Are arranged facing each other in a state where they are not meshed, the teeth 137 and 12 of the input-side oblique bevel gear 111 and the output-side oblique bevel gear 112 when an excessively high load is applied.
In No. 9, the tooth jumping phenomenon that rotates without meshing anywhere occurs, preventing an excessive force from being applied to the apparatus, and preventing the entire apparatus from being damaged.

The input oblique bevel gear 111 is provided with a ball bearing 139 between the center of the lower surface of the output shaft 128 and the boss 138 projecting from the center of the upper surface of the partition plate 119.
The device is configured to be swingable via the.

At the center of the lower surface of the input-side oblique bevel gear 111, there is provided a concave notch 140 having a diameter about half of that of the input-side oblique bevel gear 111, and at the center of the concave notch 140. An umbrella-shaped opening 141 having a diameter such that a part of the ball of the ball bearing 139 projects from the upper end edge and having a wall surface expanded downward from the upper end edge is formed, and the wall surface of the umbrella-shaped opening 141 is formed. Is made to slide on the outer peripheral surface of the ball of the ball bearing 139, and a part of the ball of the ball bearing 139 is projected upward through the umbrella-shaped opening 141.

On the other hand, at the center of the lower surface of the output shaft 128,
An umbrella-shaped recess 142 having a wall surface expanding downward is recessed, and the outer peripheral surface of the ball of the ball bearing 139 projecting toward the output-side oblique bevel gear 112 is aligned with one wall surface of the umbrella-shaped recess 142. It is formed so as to be in sliding contact with the portion.

Also, a disc-shaped press-fitting plate 143 which is press-fitted into the concave notch 140 of the input-side oblique bevel gear 111 and tightly fixed thereto.
An umbrella-shaped opening 144 having a diameter such that a part of the ball of the ball bearing 139 protrudes from the lower end edge and having a wall surface expanded upward from the lower end edge is formed in the center of the umbrella. Part of the wall surface of the opening 144 is connected to the ball bearing 1.
39 is slid in contact with the outer peripheral surface of the ball, and
A part of the ball of the ball bearing 139 is made to protrude downward from 44.

Further, an umbrella-shaped recess 145 having a wall surface expanding upward is recessed in the center of the boss 138 of the partition plate 119, and the ball bearing 1 protruding toward the partition plate 119 is formed.
The outer peripheral surface of the ball 39 is formed to be in sliding contact with a part of the wall surface of the umbrella-shaped concave portion 145. That is, the ball of the ball bearing 139 has the input-side oblique bevel gear 111,
The press-fit plate 143, the center of the lower surface of the output shaft 128, and the bearing portion 146 formed between the bosses 138 of the partition plate 119 are provided without shaking. Therefore, the output shaft 128
Also rotates stably.

The bearing portion 146 is not formed by the umbrella-shaped openings 141 and 144 and the umbrella-shaped recesses 142 and 145 which are in sliding contact with a part of the ball of the ball bearing 139 as shown in FIG. The umbrella-shaped openings 141 and 144 are provided so as to make surface contact with the balls of the ball bearing 139.
The umbrella-shaped concave portions 142 and 145 may be curved concave portions.

The outer cover 117 at the outer surface of the output-side oblique bevel gear 112 and the input-side oblique bevel gear 111 has teeth 1
A fixed annular bevel gear 148 with its 47 facing downward is vertically provided, and a braking annular bevel gear 150 provided on the outer peripheral surface of the input-side oblique bevel gear 111 with teeth 149 meshing with the teeth 147 is provided. However, they are fixed at positions where they do not engage in the neutral state shown in FIG. The fixed annular bevel gear 1
48 and the number of teeth of the annular bevel gear 150 for braking are the same.

Therefore, since the teeth 147 and 149 are not engaged with each other, the input-side oblique bevel gear 111 can swing up and down in FIG.
When the 149 is engaged, the input-side oblique bevel gear 111 is formed so as not to move in the circumferential direction. Accordingly, the fixed annular bevel gear 148 and the braking annular bevel gear 150
Until the respective teeth 147 and 149 mesh with each other, the input side oblique bevel gear 111 can swing.
When the 149 meshes, the input-side oblique bevel gear 111 cannot rotate. That is, the fixed annular bevel gear 148 and the braking annular bevel gear 150 constitute a rotation preventing means of the input-side oblique bevel gear 111.

The positional relationship between the ball bearing 139 and the input / output oblique bevel gears 111 and 112 is as follows. It is necessary to dispose the input side oblique bevel gear 111 so that the center point of the ball bearing 139 which is the swing center of the input side oblique gear 111 coincides with the center point. The positional relationship between the ball bearing 139 and the fixed annular bevel gear 148 and the braking annular bevel gear 150 is as follows.
It is necessary to arrange the input side oblique bevel gear 111 so that the center point of the ball bearing 139 which is the swing center of the input side oblique bevel gear 111 coincides.

As described above, the center point of the ball bearing 139 coincides with the apexes of the pitch surfaces of the input and output bevel gears 111 and 112, and the center point of the ball bearing 139 and the fixed ring Bevel gear 148 and annular bevel gear 1 for braking
By making the vertices of the pitch planes of the 50 teeth 147 and 149 coincide with each other, the teeth 13 of the input and output bevel gears 111 and 112 are formed in the same manner as shown in FIG. 3 of the first embodiment.
7 and 129 are engaged with each other in the tooth width direction on the entire surface of the teeth to be in full contact (not shown). As a result, the output-side oblique bevel gear 112 does not generate noise, has little wear, and has no backlash, so that the output-side oblique bevel gear 112 rotates smoothly, and it is possible to realize high-precision ultra-low-speed rotation for a long time.

As shown in FIG. 7, when the input-side oblique bevel gear 111 is in the neutral state or not in the neutral state as described above, the input-side oblique bevel gear 111 and the output-side oblique bevel gear 111 are connected. When any one of the teeth 137 and 129 of the gear 112 is slightly meshed, each pressing rod 1
Numeral 24 is provided at a position where its leading edge slightly contacts the bottom surface of the input-side oblique bevel gear 111.

The operation of the actuator 1C according to the third embodiment of the present invention will be described.
As shown in FIG. 4 in the first embodiment, when the rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output ports P ₁ to P _{1 are} output.
Pneumatic pulses are sequentially supplied to each fluid passage 120 via P ₃ (not shown). That is, the pneumatic pulse of the first phase is shifted to the fluid passage 120a by 120 °, and the pneumatic pulse of the second phase is shifted to the fluid passage 120b (not shown) by a further 120 °. The third phase pneumatic pulse is supplied to a fluid passage 120c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 12.
When it is supplied to 0a, the piston 123a is pressurized and moves upward, and the tip of the pressing rod 124a presses a part of the bottom surface of the input-side oblique bevel gear 111 that has been in the neutral state up to now. The other two pressing rods 124b and 124c (not shown) are pressed downward and move with the inclination of the input oblique bevel gear 111 as the pressing rod 124a is pressed.

The oblique bevel gear 1 on the input side of the pressing rod 124a
11, the beveled opening 141 of the input-side oblique bevel gear 111 is formed on the peripheral surface of the ball of the ball bearing 139.
And the input side oblique bevel gear 111 swings while a part of the umbrella-shaped opening 144 of the press-fitting plate 143 slides.
The input bevel gear 111 on the side pressed by the pressing rod 124a moves upward, and the teeth 137 of the input bevel gear 111 on the side that has moved upward move the output bevel gear 112 on the output side.
Meshes with the teeth 129.

On the other hand, the teeth 137 of the input-side bevel gear 111 on the non-pressed side are separated from the teeth 129 of the output-side bevel gear 112 without engaging with each other (this state corresponds to the first embodiment). Since it is the same as FIG. 3 shown in the embodiment, illustration is omitted). At this time, the input-side oblique bevel gear 111
As the teeth 137 of the output side bevel gear 112 mesh with the teeth 129 of the output side bevel gear 112, the braking annular bevel gear 150 also tilts, and its teeth 149 mesh with the teeth 147 of the fixed annular bevel gear 148. The rotation of the bevel gear 111 is prevented.

The pressurization of the piston 123a is stopped,
When the second-phase pneumatic pulse is supplied to the fluid passage 120b, the piston 123b (not shown) is pressurized and moves upward, so that the tip of the pressing rod 124b is at the bottom of the input-side oblique bevel gear 111. Part is pressed upward. On the other hand, the other pressing rod 12
4a and 124c move downward. Thereby, the input-side oblique bevel gear 111 by the pneumatic pulse of the first phase is used.
The meshing condition between the teeth 137 of the output side oblique bevel gear 112 and the teeth 129 of the output side bevel gear 112 is released, and the meshing condition between the teeth 149 of the braking annular bevel gear 150 and the teeth 147 of the fixed annular bevel gear 148 is also released. Being separated.

At the same time as the above, the teeth 137 of the input-side bevel gear 111 pressed by the pressing bar 124b mesh with the teeth 129 of the output-side bevel gear 112,
The braking annular bevel gear 150 also tilts, and its teeth 149 mesh with the teeth 147 of the fixed annular bevel gear 148, thereby preventing the input-side oblique bevel gear 111 from rotating.

Hereinafter, the pressure of the piston 123c (not shown) by the pneumatic pulse of the third phase, the pressing of the pressing rod 124c upward, the downward movement of the other pressing rods 124a and 124b, the oblique input side The engagement and separation of the teeth 137 of the bevel gear 111 with the teeth 129 of the output oblique bevel gear 112 and the engagement and separation of the teeth 149 of the braking annular bevel gear 150 and the teeth 147 of the fixed annular bevel gear 148 are also described. Since the operation is the same as described above, the description is omitted.

By the pressurization of the piston 123a by the pneumatic pulse of the first phase to the pressurization of the piston 123c by the pneumatic pulse of the third phase, the input-side oblique bevel gear 111 having a large number of teeth becomes 3 Swinging three times at three different positions, and the teeth 137 of the input-side oblique bevel gear 111 and the teeth 129 of the output-side oblique bevel gear 112 having a small number of teeth are respectively meshed three times. Oblique bevel gear 112
The output shaft 12 is mounted on the peripheral surface of the ball of the ball bearing 139.
8, a part of the wall surface of the umbrella-shaped concave portion 142 at the center of the lower surface is in sliding contact with the input-side oblique bevel gear 111 using the steel ball 136 as a guide.
And the output side oblique bevel gear 112 has rotated by the number of teeth.

The number of teeth 137 and 129 of the input-side oblique bevel gear 111 and the output-side oblique bevel gear 112 is not particularly limited, but in the third embodiment of the present invention,
The number of teeth 137 of the input-side bevel gear 111 is 121, the number of teeth 129 of the output-side bevel gear 112 is 120, and the difference in the number of teeth is 1. Therefore, the input-side bevel gear 111 is set.
Made three oscillating movements, the output side oblique bevel gear 1
12 rotates 360 ° / 120 = 3 °. That is, with one pneumatic pulse, the output side oblique bevel gear 112
Is rotated by 1 °. The pressing rod 124 at the tip of the piston 123
, The output-side oblique bevel gear 112 continuously rotates, and the output shaft 128 connected thereto can be continuously rotated.

The three pistons 123 according to the third embodiment of the present invention are formed at intervals of 120 °, but the object can be achieved with four or more pistons. .

Next, a fourth embodiment of the present invention shown in FIG. 8 will be described in detail with reference to the drawings. First, the fourth invention
It is a longitudinal cross-sectional view of the actuator 1D shown in the embodiment. The actuator 1D is not particularly limited. For example, as shown in the first embodiment, a pneumatic pulse supplied by a rotary valve is used as a driving source for driving the actuator 1D. Can be

FIG. 8 is a longitudinal sectional view of an actuator 1D according to a fourth embodiment of the present invention. The actuator 1D does not need to be particularly limited. For example, the actuator 1D has a phase difference of 120 ° from a rotary valve RV (not shown because the same one as in the first embodiment is used).
Supply of the pneumatic pulse, the swing angle 12
The input bevel gear 151 is configured to include an input bevel gear 151 that swings stepwise at 0 ° and an output bevel gear 152 that extracts the swinging motion of the input bevel gear 151 as rotation. . In the embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 151 is described as being greater than the number of teeth of the output-side oblique bevel gear 152. The number of teeth of the bevel gear 152 is the input-side oblique bevel gear 1
The purpose can be achieved with more than 51 teeth.

The input / output side oblique bevel gears 151 and 152
The housing 153 is provided with a concave portion 154 at the center and an outer lid 157 fixed to the upper end edge of a cylindrical cylinder 156 having a thick bottom plate 155.

Further, the bottom plate 155 of the cylinder 156
Are spaced apart from each other by a distance of 120 °.
58 are radially recessed, and the outer peripheral edge of the disk-shaped partition plate 159
The small recesses 158 are tightly fitted and fixed to the inner peripheral wall surface of the base plate 56 and are tightly fixed to the upper surface of the bottom plate 155 so that the small recesses 158 are formed in a densely partitioned manner.
8, fluid passages 160 are respectively opened at the center.

Each of the fluid passages 160 provided in the bottom plate 155 of each of the cylinders 156 has a small recess 158.
Are connected to the rotary valve RV via fluid transfer pipes 162, respectively.
2 to supply compressed air from the rotary valve RV into the small recess 158. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from each of the small recesses 158 are supplied from the fluid material supply means.
The pressing force applying means is constituted by a branching means such as a rotary valve supplied into the inside. As the branching unit, an electromagnetic valve or the like can be used. Further, in order to sequentially supply the fluid pressure into each of the small recesses 158, a control means for controlling the rotation of a rotary valve as a branching means at an arbitrary speed is provided. When an electromagnetic valve or the like is used instead of the rotary valve, the control means sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 158 has
A piston 163 formed so as to be in sliding contact with the side wall of the piston 163 is provided.
Elastic body 16 such as rubber, elastomer, coil spring, etc. at the tip
Each of the pressing rods 165 to which the pistons 163 are mounted is formed so as to protrude upward through the partition plate 159 and move up and down as the piston 163 moves up and down. In order to prevent the space above the piston 163 of the small recess 158 from becoming negative pressure when the piston 163 descends, the space above the piston 163 and the recess 154 communicate with the partition plate 159. A small hole 159a is formed. In the drawing, reference numeral 166 denotes a sealing material such as an O-ring provided on the outer periphery of the piston 163 in order to prevent air leakage between the upper chamber and the lower chamber partitioned by the piston 163 of the small recess 158. In the embodiment of the present invention, the input-side oblique bevel gear 1 is formed by the small recess 158, the piston 163, and the pressing rod 165.
A linear motion pressing means for sequentially pressing the bottom surface of 51 in the upward direction is constituted.

In the concave portion 154 above the partition plate 159 of the cylinder 156, an input oblique bevel gear 151 and an output oblique bevel gear 152 each having a smaller diameter than the concave portion 154 are arranged. . And, in the center of the outer lid 157 above the input / output side oblique bevel gears 151 and 152,
A penetrating projection 167 is provided, and the penetrating projection 167 is provided.
The output shaft 169 is attached to a radial bearing 168 integrally fixed to the
Are supported so as to be rotatable.

In the concave portion 154 of the cylinder 156, an output-side oblique bevel gear 152 having an inverted concave cross section is formed.
However, there is a gap 171 between the outer shaft 157 and the teeth 170 facing downward, and the output shaft 169 is inserted into a through hole 172 formed in the center of the output side bevel gear 152. The key 173 is inserted into the groove formed on the outer peripheral edge of the output shaft 169 and the groove 174 formed on the inner peripheral edge of the through hole 172 of the output side bevel gear 152. By fitting, the output shaft 169 and the output side oblique bevel gear 15
2 are connected and fixed so as not to rotate.

The output oblique bevel gear 152 is provided with a concave groove 175 in the outer circumferential direction on the upper surface, and the inner wall surface of the outer lid 157 facing the concave groove 175 is also provided in the circumferential direction. The concave grooves 176 are recessed, and the respective concave grooves 175 and 176 are formed.
A large number of steel balls 177 are interposed between them, and the output side oblique bevel gear 152 can be smoothly rotated using the steel balls as guides.

Further, the tooth 1 of the output side oblique bevel gear 152
An input-side bevel gear 151 having teeth 178 meshing with the gear 70 and having a concave cross section is disposed facing the position where the teeth 170 and 178 do not mesh in the neutral state shown in FIG. ing. However, even if the positional relationship between the input-side oblique bevel gear 151 and the output-side oblique bevel gear 152 is set so that any one of the teeth does not always enter the neutral state and is in a state in which any one of the teeth is slightly meshed. Good. However, as described above, in the neutral state, the teeth 178 and 170 of the input-side oblique bevel gear 151 and the output-side oblique bevel gear 152 are provided.
Are arranged in a state where they are not engaged with each other, the teeth 178 and 17 of the input-side oblique bevel gear 151 and the output-side oblique bevel gear 152 when an excessively high load is applied.
In the case of 0, a tooth jumping phenomenon occurs in which the tooth is rotated without any meshing, the excessive force is prevented from being applied to the device, and the entire device can be prevented from being damaged.

The input-side oblique bevel gear 151 is provided between a central portion of the lower surface of the output shaft 169 and a boss 179 projecting from the center of the upper surface of the partition plate 159.
The device is configured to be swingable via the.

The input-side oblique bevel gear 151 is provided with a concave portion 181 having a diameter of about half of the input-side oblique bevel gear 151 at the lower central portion thereof. An umbrella-shaped opening 182 having a diameter such that a part of the ball of the ball bearing 180 protrudes from the upper end edge and having a wall surface expanded downward from the upper end edge is formed, and the wall surface of the umbrella-shaped opening 182 is formed. Of the ball of the ball bearing 180 is slidably contacted with the outer peripheral surface of the ball of the ball bearing 180, and a part of the ball of the ball bearing 180 is projected upward through the umbrella-shaped opening 182.

On the other hand, at the center of the lower surface of the output shaft 169,
An umbrella-shaped concave portion 183 having a wall surface expanding downward is recessed, and the outer peripheral surface of the ball of the ball bearing 180 projecting in the direction of the output-side oblique bevel gear 152 is one of the wall surfaces of the umbrella-shaped concave portion 183. It is formed so as to be in sliding contact with the portion.

A disc-shaped press-fitting plate 184 press-fitted into the concave notch 181 of the input-side oblique bevel gear 151 and tightly fixed thereto.
An umbrella-shaped opening 185 having a diameter such that a part of the ball of the ball bearing 180 protrudes from the lower end edge and having a wall surface expanded upward from the lower end edge is formed at the center of the umbrella. A part of the wall surface of the opening 185 is connected to the ball bearing 1.
80, and the umbrella-shaped opening 1
A part of the ball of the ball bearing 180 is made to protrude downward from the ball bearing 85.

Further, an umbrella-shaped concave portion 186 having a wall surface expanding upward is formed in the center of the boss 179 of the partition plate 159 so that the ball bearing 1 protrudes toward the partition plate 159.
The outer peripheral surface of the ball 80 is formed to be in sliding contact with a part of the wall surface of the umbrella-shaped recess 186. In other words, the ball of the ball bearing 180 has an input-side oblique bevel gear 151,
The press-fit plate 184 and the bearing 187 formed between the center of the lower surface of the output shaft 169 and the boss 179 of the partition plate 159 do not swing. Therefore, output shaft 1
69 also rotates stably.

The bearing 187 has umbrella-shaped openings 182 and 185 and umbrella-shaped recesses 183 and 186 for slidingly contacting a part of the ball of the ball bearing 180 as shown in FIG.
The umbrella-shaped opening 182.1 is formed so as to make surface contact with the ball of the ball bearing 180 instead of being formed by
The 85 and the umbrella-shaped concave portions 183 and 186 may be curved concave portions, respectively.

A notch 188 is provided at the outer peripheral edge of the bottom face of the input side bevel gear 151, and an elastic body 164 fixed to the tip of each of the pressing rods 165 is fitted into the center of the notch 188. A fixing concave portion 189 for fixing and fixing is provided, and the elastic body 164 is fitted and fixed in the fixing concave portion 189, so that each pressing rod 165 and the input-side oblique bevel gear 151 are connected to the elastic body 1
64.

Therefore, in FIG. 8, the input-side oblique bevel gear 151 is formed so as to be able to swing up and down by bending of the elastic body 164 but not to move in the circumferential direction. By moving the pressing rod 165 upward, the elastic body 164 is bent in the notch 188, so that the input-side oblique bevel gear 151 can swing. Input side bevel gear 151
It has the role of preventing rotation because it cannot rotate. That is, the elastic body 164 forms a rotation preventing means of the input-side oblique bevel gear 151.

The positional relationship between the ball bearing 180 and the input / output oblique bevel gears 151, 152 is as follows. The apex of each pitch surface of the input / output oblique bevel gears 151, 152 It is necessary to arrange the input side oblique bevel gear 151 so that the center point of the ball bearing 180, which is the swing center of the bevel gear 151, coincides with the center point.

As described above, the ball bearing 180 and the apexes of the pitch surfaces of the input / output oblique bevel gears 151 and 152 have the above-described positional relationship, so that the first embodiment can be modified. As shown in FIG. 3, the teeth 178 and 170 of the input and output bevel gears 151 and 152 are all meshed with each other in the tooth width direction to make full contact. As a result, the output-side oblique bevel gear 152 rotates smoothly without generating noise and with little abrasion, and high-precision ultra-low-speed rotation can be realized for a long time.

As shown in FIG. 8, when the input-side oblique bevel gear 151 is in the neutral state or not in the neutral state as described above, the input-side oblique bevel gear 151 and the output-side oblique bevel gear 151 are connected. When any one of the teeth 178 and 170 of the gear 152 is slightly meshed, each push rod 1
The 65 elastic members 164 are arranged in a state of being elastic without being bent.

An operation of the actuator 1D according to the fourth embodiment of the present invention having the above-described configuration will be described.
As shown in FIG. 4 in the first embodiment, when the rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output ports P ₁ to P _{1 are} output.
Pneumatic pulses are sequentially supplied to each fluid passage 160 via P ₃ (not shown). That is, the pneumatic pulse of the first phase is shifted to the fluid passage 160a by 120 °, and the pneumatic pulse of the second phase is shifted to the fluid passage 160b (not shown) by a further 120 °. The third phase pneumatic pulse is supplied to a fluid passage 160c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 16.
0a, the piston 163a is pressurized and moves upward, and the elastic body 164 at the tip of the pressing rod 165a is bent, so that the input-side oblique bevel gear 1 which has been in the neutral state until now is bent.
A part of the bottom surface of 51 is pressed upward. The other two pressing rods 165b and 165b are pressed by the pressing rod 165a.
5c (not shown) is moved by being pressed downward while the respective elastic bodies 164b and 164c (both not shown) are bent with the inclination of the input-side oblique bevel gear 151.

Bevel gear 1 on the input side of the pressing rod 165a
51, the peripheral surface of the ball of the ball bearing 180 is moved to the beveled opening 182 of the input-side oblique bevel gear 151.
The input-side oblique bevel gear 151 swings while a part of the umbrella-shaped opening 185 of the press-fitting plate 184 slides, and the input-side oblique bevel gear 151 on the side pressed by the pressing rod 165a moves upward. The tooth 178 of the input-side bevel gear 151 on the side that has moved and moved upward is the tooth 1 of the output-side bevel gear 152.
Engage with 70. On the other hand, the teeth 178 of the input-side oblique bevel gear 151 on the non-pressed side and the output-side oblique bevel gear 15
The second teeth 170 are separated without being engaged (this state is
Since it is the same as FIG. 3 in the first embodiment,
(Not shown).

Stop applying pressure to the piston 163a,
When the pneumatic pulse of the second phase is supplied to the fluid passage 160b, the piston 163b (not shown) is pressurized and moves upward, and bends the elastic body 164b at the tip of the pressing rod 165b while inputting. A part of the bottom surface of the oblique bevel gear 151 is pressed upward. On the other hand, the other pressing rods 165a and 165c move downward. As a result, the meshing state between the teeth 178 of the input-side oblique bevel gear 151 and the teeth 170 of the output-side oblique bevel gear 152 due to the first-phase pneumatic pulse is released and separated. Then, the teeth 178 of the input-side oblique bevel gear 151 on the side pressed by the pressing bar 165b mesh with the teeth 170 of the output-side oblique bevel gear 152 in the same manner as described above.

Hereinafter, the piston 163c (not shown) is pressurized by the pneumatic pulse of the third phase, the pressing rod 165c is pressed upward by the elastic body 164c, and the other pressing rod 1
65a / 165b downward movement, input-side oblique bevel gear 151
The engagement of the output-side oblique bevel gear 152 with the tooth 170 and the separation of the output-side oblique bevel gear 152 from the tooth 170 are the same as those described above, and therefore the description thereof is omitted.

By the pressurization of the piston 163a by the pneumatic pulse of the first phase to the pressurization of the piston 163c by the pneumatic pulse of the third phase, the input-side oblique gear 151 having a large number of teeth is increased by three. Swings three times at three different positions, and the teeth 178 of the input-side bevel gear 151 and the teeth 170 of the output-side bevel gear 152 having a small number of teeth are respectively meshed three times. Oblique bevel gear 152
The output shaft 16 on the peripheral surface of the ball of the ball bearing 180.
9, a part of the wall surface of the umbrella-shaped recess 183 at the center of the lower surface slides, and the input-side oblique bevel gear 151 uses the steel ball 177 as a guide.
And the output side oblique bevel gear 152 rotates by the difference in the number of teeth.

The number of teeth 178 and 170 of the input-side oblique bevel gear 151 and the output-side oblique bevel gear 152 is not particularly limited. However, in the fourth embodiment of the present invention,
The number of teeth 178 of the input side bevel gear 151 is 121, the number of teeth 170 of the output side bevel gear 152 is 120, and the difference in the number of teeth is 1. Therefore, the input side bevel gear 151 is formed.
Made three oscillating movements, the output side oblique bevel gear 1
52 rotates 360 ° / 120 = 3 °. That is, the output shaft 169 connected to the output-side oblique bevel gear 152 rotates 1 ° with one pneumatic pulse.
The output side oblique bevel gear 152 continuously rotates by successively repeating the pressing operation by the pressing rod 165 at the tip of the piston 163, and the output shaft 169 connected thereto is continuously rotated. Can be done.

The three pistons 163 according to the fourth embodiment of the present invention are formed at intervals of 120 °. However, even if the number is four or more, the object can be achieved. .

The fifth embodiment of the present invention shown in FIGS. 9 and 10 will be described in detail with reference to the drawings. First, it is a longitudinal sectional view of an actuator 1E according to a fifth embodiment of the present invention. The actuator 1E does not need to be particularly limited. For example, as shown in the first embodiment, as a driving source for operating the actuator 1E,
Pneumatic pulses supplied by a rotary valve are used.

FIG. 9 is a longitudinal sectional view of an actuator 1E according to a fifth embodiment of the present invention. The actuator 1E is not particularly limited, but for example, has a phase difference of 120 ° from a rotary valve RV (not shown because the same one as in the first embodiment is used).
Supply of the pneumatic pulse, the swing angle 12
An input bevel gear 211 that swings stepwise at 0 ° and an output bevel gear 212 that takes out the swinging motion of the input bevel gear 211 as rotation are formed. . In the embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 211 is described as being larger than the number of teeth of the output-side oblique bevel gear 212. When the number of teeth of the bevel gear 212 is the input-side oblique bevel gear 2
The purpose can be achieved with more than 11 teeth.

The input / output oblique bevel gears 211 and 212
The housing 213 is provided with a concave portion 214 at the center and an outer lid 217 fixed to the upper end edge of a cylindrical cylinder 216 having a thick bottom plate 215.

Further, the bottom plate 215 of the cylinder 216
Are inwardly spaced apart from each other by 120 °.
In the small recess 218, the outer peripheral edge of a disk-shaped partition plate 219 is closely fitted and fixed to the inner peripheral wall surface of the cylinder 216, and the small concave portion 218 is tightly fixed to the upper surface of the bottom plate 215. Then, each small recess 218 is formed in a densely partitioned manner, and further penetrates through the bottom plate 215 to form each small recess 2.
Fluid passages 220 are respectively opened at the center of 18.

Each of the fluid passages 220 provided in the bottom plate 215 of each of the cylinders 216 has a small recess 218.
Are connected to the rotary valve RV via fluid transfer pipes 222, respectively. The joints 221 are connected to the rotary valves RV via fluid transfer pipes 222, respectively.
2 to supply compressed air from the rotary valve RV into the small recess 218. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from the fluid material supply means are applied to each of the small recesses 218.
The pressing force applying means is constituted by a branching means such as a rotary valve supplied into the inside. As the branching unit, an electromagnetic valve or the like can be used. Further, a control means for controlling the rotation of a rotary valve as a branching means at an arbitrary speed is provided to sequentially supply the fluid pressure into each small recess 218. When an electromagnetic valve or the like is used instead of the rotary valve, the control means sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 218 has a corresponding one of the small recesses 218.
A piston 223 formed so as to be in sliding contact with the side wall of the piston 223 is provided, and a pressing rod 225 having a diameter smaller than that of the spherical tip 224 is formed so as to protrude from the spherical tip 224. Each of the pressing rods 225 is projected upward through the partition plate 219,
It is formed so as to be able to move up and down with the up and down movement of the piston 223. The partition plate 219 has a piston 22
In order to prevent the space above the piston 223 of the small recess 218 from becoming negative pressure when
23 a small hole 219 communicating the upper space with the recess 214
a is formed. In the figure, reference numeral 226 denotes a sealing material such as an O-ring provided on the outer periphery of the piston 223 in order to prevent air leakage between the upper chamber and the lower chamber partitioned by the piston 223 of the small recess 218. In the embodiment of the present invention, the small concave portion 218, the piston 223, and the pressing rod 225 constitute a linear motion pressing means for sequentially pressing the bottom surface of the input-side oblique bevel gear 211 upward.

An input oblique bevel gear 211 and an output oblique bevel gear 212 having a diameter smaller than that of the concave portion 214 are arranged in a concave portion 214 above the partition plate 219 of the cylinder 216. . And, in the center of the outer lid 217 above the input / output side oblique bevel gears 211 and 212,
A penetrating protrusion 227 is protruded, and the penetrating protrusion 227 is provided.
The output shaft 229 is attached to the radial bearing 228 integrally fixed to the
Are supported so as to be rotatable.

In the concave portion 214 of the cylinder 216, an output-side oblique bevel gear 212 formed in an inverted concave cross section is provided.
However, the output shaft 229 is formed in a through hole 232 formed at the center of the output-side oblique bevel gear 212 with a gap 231 between the outer cover 217 and the teeth 230 facing downward. The key 233 is inserted through the lower end of the key 233 into a groove formed on the outer peripheral edge of the output shaft 229 and a groove 234 formed on the inner peripheral edge of the through hole 232 of the output side bevel gear 212. By fitting, the output shaft 229 and the output side oblique bevel gear 21
2 are connected and fixed so as not to rotate.

A curved concave groove 235 is provided in the outer circumferential direction on the upper surface of the output side oblique bevel gear 212, and the inner wall surface of the outer lid 217 facing the curved concave groove 235 is also circumferentially formed. The curved grooves 236 are recessed, and the respective curved grooves 235 and 236 are formed.
A large number of steel balls 237 are interposed therebetween, and the output side oblique bevel gear 212 can be smoothly rotated using the steel balls 237 as guides.

Further, tooth 2 of the output-side oblique bevel gear 212
The input-side oblique bevel gear 211 having the teeth 238 meshing with the gear 30 and having a concave cross section is disposed facing the position where the teeth 230 and 238 do not mesh in the neutral state shown in FIG. ing. However, even if the positional relationship between the input-side oblique bevel gear 211 and the output-side oblique bevel gear 212 is set so as not to be in a neutral state and to be in a state where any one of the teeth always slightly meshes. Good. However, as described above, in the neutral state, the teeth 238 and 230 of the input-side oblique bevel gear 211 and the output-side oblique bevel gear 212
, 23 and 23 of the input-side oblique bevel gear 211 and the output-side oblique bevel gear 212 when an unnecessarily high load is applied.
In the case of 0, a tooth jumping phenomenon occurs in which the tooth is rotated without any meshing, the excessive force is prevented from being applied to the device, and the entire device can be prevented from being damaged.

The input-side oblique bevel gear 211 is provided with a ball bearing 24 between a boss 239 projecting from the center of the lower surface of the output shaft 229 and the center of the upper surface of the partition plate 219.
It is so arranged as to be able to swing freely through the zero.

At the center of the lower surface of the input-side oblique bevel gear 211, a concave notch 241 having a diameter of about half of the input-side oblique bevel gear 211 is provided, and at the center of the concave notch 241. An umbrella-shaped opening 242 having a diameter such that a part of the ball of the ball bearing 240 protrudes from the upper edge and having a wall surface expanded downward from the upper edge is formed, and the wall surface of the umbrella-shaped opening 242 is formed. Of the ball of the ball bearing 240 is slidably in contact with the outer peripheral surface of the ball of the ball bearing 240, and a part of the ball of the ball bearing 240 is projected upward through the umbrella-shaped opening 242.

On the other hand, at the center of the lower surface of the output shaft 229,
An umbrella-shaped concave portion 243 having a wall surface expanding downward is recessed, and the outer peripheral surface of the ball of the ball bearing 240 protruding toward the output-side oblique bevel gear 212 faces one of the wall surfaces of the umbrella-shaped concave portion 243. It is formed so as to be in sliding contact with the portion.

A disc-shaped press-fitting plate 244 which is press-fitted into the concave portion 241 of the input-side oblique bevel gear 211 and tightly fixed thereto.
An umbrella-shaped opening 245 having a diameter such that a part of the ball of the ball bearing 240 protrudes from the lower edge and having a wall surface expanding upward from the lower edge is formed in the center of the umbrella. A part of the wall surface of the opening 245 is connected to the ball bearing 2.
40, and the umbrella-shaped opening 2
A part of the ball of the ball bearing 240 is projected downward from 45.

Further, an umbrella-shaped concave portion 246 having a wall surface expanding upward is formed in the center of the boss 239 of the partition plate 219, and the ball bearing 2 protruding toward the partition plate 219 is formed.
The outer peripheral surface of the ball 40 is formed to be in sliding contact with a part of the wall surface of the umbrella-shaped recess 246. That is, the ball of the ball bearing 240 has an input-side oblique bevel gear 211,
The press-fit plate 244 and the bearing 247 formed between the center of the lower surface of the output shaft 229 and the boss 239 of the partition plate 219 do not swing. Therefore, the output shaft 2
29 also rotates stably.

The bearing 247 has umbrella-shaped openings 242 and 245 and umbrella-shaped recesses 243 and 246 for sliding contact with a part of the ball of the ball bearing 240 as shown in FIG.
The umbrella-shaped openings 242 and 2 are formed so as to make surface contact with the balls of the ball bearing 240 instead of being formed by
45 and the umbrella-shaped concave portions 243 and 246 may be curved concave portions, respectively.

On the outer periphery of the bottom surface of the input-side oblique bevel gear 211, a guide groove 248 into which the spherical tip 224 of each pressing rod 225 is fitted is formed. As shown in FIG. 10, the width of the guide groove 248 is formed such that the spherical tip 224 can slide. The spherical tip 224 is movable in the vertical direction in FIG. Bevel gear 2
11 is formed so as not to move in the circumferential direction by contacting the groove wall 248a. Accordingly, the input side oblique bevel gear 211 can swing upward using the spherical tip 224 as a guide, but the groove wall 248a becomes an obstacle and the input side oblique bevel gear 211 cannot rotate. Plays a role. That is, the spherical tip 224 and the guide groove 248 constitute a rotation preventing means of the input-side oblique bevel gear 211.

The positional relationship between the ball bearing 240 and the input / output oblique bevel gears 211 and 212 is as follows. It is necessary to arrange the input side oblique bevel gear 211 so that the center point of the ball bearing 240 which is the swing center of the input side oblique bevel gear 211 coincides. Also, the ball bearing 240 and each spherical tip 22
4, the input side bevel gear 211 is in a neutral state, and the spherical tip 224 is on the input side bevel gear 21.
1, the center point of the spherical tip 224 and the center point of the ball bearing 240, which is the center of swinging of the input-side oblique bevel gear 211, are aligned so as to be horizontal in a straight line. Need to be set up.

As described above, the positional relationship between the ball bearing 240 and each of the teeth 238 and 230 of the input and output oblique bevel gears 211 and 212, and the ball bearing 240 and the spherical tip 224
In the same manner as shown in FIG. 3 in the first embodiment, the input / output side bevel gear 2
All the teeth 238 and 230 of the teeth 11 and 212 are engaged with each other in the tooth width direction on the entire surface of the teeth, and the entire surface is in contact. As a result, there is no noise, little wear, no backlash,
The output-side oblique bevel gear 212 rotates smoothly, and high-precision ultra-low-speed rotation can be realized for a long time.

As shown in FIG. 9, when the input-side oblique bevel gear 211 is in the neutral state or not in the neutral state as described above, the input-side oblique bevel gear 211 and the output-side oblique bevel gear 211 are connected. When any one of the teeth 238 and 230 of the gear 212 is slightly meshed, each pressing rod 2
The 25 spherical distal ends 224 are disposed at positions where the distal edges thereof lightly contact the bottom of the input-side oblique bevel gear 211, respectively.

An operation of the actuator 1E according to the fifth embodiment of the present invention having the above-described structure will be described.
As shown in FIG. 4 in the first embodiment, when a rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output port P _{1 is} output.
To P 3 sequentially pneumatic pulse through the _(not shown) is supplied to each of the fluid passages 220. That is, the first-phase pneumatic pulse is shifted to the fluid passage 220a by 120 °, and the second-phase pneumatic pulse is shifted to the fluid passage 220b (not shown) by a further 120 °. The third-phase pneumatic pulse is supplied to a fluid passage 220c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 22.
When it is supplied to 0a, the piston 223a is pressurized and moves upward, and the spherical tip 224a of the pressing rod 225a presses a part of the input-side oblique bevel gear 211 which has been in the neutral state up to now. Then, with the pressing of the pressing rod 225a, the other two pressing rods 225b and 225c (not shown) are pressed downward and move with the inclination of the input-side oblique bevel gear 211.

The oblique bevel gear 2 on the input side of the pressing rod 225a
11, the peripheral surface of the ball of the ball bearing 240 is moved to the beveled opening 242 of the input-side oblique bevel gear 211.
And the input-side oblique bevel gear 211 swings while a part of the umbrella-shaped opening 245 of the press-fitting plate 244 slides,
The input-side bevel gear 211 on the side pressed by the pressing rod 225a moves upward, and the teeth 238 of the input-side bevel gear 211 on the side that has moved upward move the output-side bevel gear 212.
Meshes with the teeth 230. On the other hand, the teeth 238 of the input-side oblique bevel gear 211 on the non-pressed side and the teeth 230 of the output-side oblique bevel gear 212 are separated without engaging with each other (this state corresponds to the state in the first embodiment). The illustration is omitted because it is the same as FIG. 3).

The pressurization of the piston 223a is stopped,
When the pneumatic pulse of the second phase is supplied to the fluid passage 220b, the piston 223b (not shown) is pressurized and moves upward, and the spherical tip 224b (not shown) of the pressing rod 225b.
Presses a part of the bottom surface of the input-side oblique bevel gear 211 upward. On the other hand, the other pressing rods 225a and 225c (not shown) move downward. Thereby, the teeth 238 of the input-side oblique bevel gear 211 by the pneumatic pulse of the first phase are obtained.
And the teeth 230 of the output-side oblique bevel gear 212 are released from engagement with each other. Then, as described above, the pressing rod 22
The teeth 238 of the input-side bevel gear 211 on the side pressed by the spherical tip 224b of 5b mesh with the teeth 230 of the output-side bevel gear 212.

Hereinafter, the pressure of the piston 223c (not shown) by the pneumatic pulse of the third phase and the pressing rod 225c
(Not shown) pressing the spherical tip 224c upward, moving the other pressing rods 225a and 225b downward, and moving the teeth 238 of the input bevel gear 211 to the teeth 230 of the output bevel gear 212. The engagement and separation are the same as those described above, and the description is omitted.

By the pressurization of the piston 223a by the pneumatic pulse of the first phase to the pressurization of the piston 223c by the pneumatic pulse of the third phase, the input-side oblique gear 211 having a large number of teeth becomes 3 Swinging three times at three different positions, and the teeth 238 of the input-side bevel gear 211 and the teeth 230 of the output-side bevel gear 212 having a small number of teeth are respectively meshed three times. Oblique bevel gear 212
The output shaft 22 is mounted on the peripheral surface of the ball of the ball bearing 240.
9, a part of the wall surface of the umbrella-shaped concave portion 243 at the center of the lower surface is in sliding contact with the input-side oblique bevel gear 211 using the steel ball 237 as a guide.
And the output side oblique bevel gear 212 has rotated by the difference in the number of teeth.

The number of teeth 238 and 230 of the input-side oblique bevel gear 211 and the output-side oblique bevel gear 212 is not particularly limited. However, in the fifth embodiment of the present invention,
The number of teeth 238 of the input side bevel gear 211 is 121, the number of teeth 230 of the output side bevel gear 212 is 120, and the difference in the number of teeth is 1.
Made three oscillating movements, the output side oblique bevel gear 2
12 rotates 360 ° / 120 = 3 °. That is, the output shaft 229 connected to the output-side oblique bevel gear 212 rotates 1 ° with one pneumatic pulse.
The output side oblique bevel gear 212 continuously rotates by successively repeating the pressing operation by the pressing rod 225 at the tip of the piston 223, and the output shaft 229 connected thereto is continuously rotated. Can be done.

The three pistons 223 according to the fifth embodiment of the present invention are formed with an interval of 120 °, but the object can be achieved with four or more pistons.

A sixth embodiment of the present invention shown in FIGS. 11 to 12 will be described in detail with reference to the drawings. First, the actuator 1F according to the sixth embodiment of the present invention is similar to the actuator 1F according to the first embodiment.
A pneumatic pulse supplied by a rotary valve is used as a driving source for driving the motor.

FIG. 11 is a longitudinal sectional view of an actuator 1F according to a sixth embodiment of the present invention. Although there is no particular limitation on the actuator 1F, for example, a phase difference 120 from a rotary valve RV (not shown because the same one as in the first embodiment is used) is used.
Supply of pneumatic pulse of 1 °, the swing angle is 1
Input and output bevel gear 25 that swings stepwise at 20 °
1 and a fixed oblique bevel gear 252 for controlling the rotation angle of the input / output oblique bevel gear 251.
In the embodiment of the present invention, the number of teeth of the input / output bevel gear 251 is described as being greater than the number of teeth of the fixed bevel gear 252. Even if the number of teeth of the oblique bevel gear 252 is greater than the number of teeth of the input / output oblique bevel gear 251, the object can be achieved.

The housing 253 for installing the input / output oblique bevel gear 251 and the fixed oblique bevel gear 252 is provided with a concave portion 254 at the center and an upper end of a cylindrical cylinder 256 having a thick bottom plate 255. An outer lid 257 is fixed to the edge and formed.

Further, the bottom plate 255 of the cylinder 256
Are inwardly spaced apart from each other by 120 °.
In the small recess 258, the outer peripheral edge of a disk-shaped partition plate 259 is closely fitted and fixed to the inner peripheral wall surface of the cylinder 256, and the small concave portion 258 is tightly fixed to the upper surface of the bottom plate 255. Each of the small recesses 258 is formed so as to be densely partitioned, and further penetrates through the bottom plate 255.
Fluid passages 260 are respectively opened at the center of 58.

Each of the fluid passages 260 provided in the bottom plate 255 of each of the cylinders 256 has a small recess 258.
Are connected to the rotary valve RV via fluid transfer pipes 262, respectively.
2 to supply compressed air from the rotary valve RV into the small recess 258. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from each of the small recesses 258 are supplied from the fluid material supply means.
The pressing force applying means is constituted by a branching means such as a rotary valve supplied into the inside. As the branching unit, an electromagnetic valve or the like can be used. Further, in order to sequentially supply the fluid pressure into each of the small recesses 258, a control unit for controlling the rotation of a rotary valve as a branching unit at an arbitrary speed is provided. When an electromagnetic valve or the like is used instead of the rotary valve, the control means sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 258 has
Each of the pistons 263 is formed so as to be in sliding contact with a side wall of the piston. At the center of the tip of each piston 263, a pressing rod 264 having a hemispherical tip is protrudingly provided. It is formed to protrude upward through the partition plate 259 and move up and down as the piston 263 moves up and down. In addition, the partition plate 2
When the piston 263 descends, the small recess 25
In order to prevent the space above the piston 263 from becoming negative pressure, the space above the piston 263 and the recess 254 are formed.
And a small hole 259a that communicates with. In the figure, 2
Numeral 65 denotes a piston 2 for preventing air leakage between the upper chamber and the lower chamber partitioned by the piston 263 of the small recess 258.
63 is a sealing material such as an O-ring provided on the outer periphery of 63.
In the embodiment of the present invention, the small concave portion 258, the piston 263, and the pressing rod 264 constitute a linear motion pressing unit that sequentially presses the bottom surface of the input / output bevel gear 251 upward.

In the concave portion 254 on the upper side of the partition plate 259 of the cylinder 256, an input / output oblique bevel gear 251 and a fixed oblique bevel gear 252 having a smaller diameter than the concave portion 254 are provided. I have. At the center of the outer lid 257 above the input / output oblique bevel gear 251 and the fixed oblique bevel gear 252, a penetrating projection 266 is protruded, and is integrally fixed to the penetrating projection 266. The output shaft 268 is supported by the provided radial bearing 267 so as to be rotatable.

A fixed bevel gear 252 formed in an annular shape with the teeth 269 facing downward is fixed to the inner wall surface of the outer lid 257 of the cylinder 256, and the teeth 269 of the fixed bevel gear 252 are fixed. An input / output bevel gear 251 with the teeth 270 facing upward is disposed so as to face the input / output bevel gear 251 and the input / output bevel gear 251 and the cylinder 2
The base end of the output shaft 268 located in the 56 concave portion 254 is connected by a universal joint 271.

The teeth 26 of the fixed oblique bevel gear 252
In the neutral state shown in FIG. 11, the input / output bevel gear 251 having the teeth 270 meshing with the gear 9 is disposed so as to face positions where the teeth 269 and 270 do not mesh with each other. The oblique bevel gear 251 for both output and swing is rotatable and rotatable via a universal joint 271 provided between the output shaft 268 and the bevel gear 251. However, the positional relationship between the input / output bevel gear 251 and the fixed bevel gear 252 is set so that the teeth are not in a neutral state and any one of the teeth always slightly meshes. Is also good. However, as described above, if the teeth 270 and 269 of the input / output bevel gear 251 and the fixed bevel gear 252 face each other in a neutral state and are not meshed with each other, an unnecessarily high height is required. When a load is applied, the teeth 270 and 269 of the input / output bevel gear 251 and the fixed bevel gear 252 may rotate without any meshing with each other, causing excessive force to be applied to the device. Thus, the entire device can be prevented from being damaged. The universal joint 271 prevents the input and output bevel gear 251 from rotating relative to the fixed bevel gear 252, and the universal joint 271 prevents the bevel gear 252 from rotating relative to the fixed bevel gear 252. The input / output oblique bevel gear 251 constitutes relative rotation prevention means.

The universal joint 271 is not particularly limited, but it is recommended to use the one shown in FIG. That is, a pin 2 is attached to the forward end of the mounting piece 272 projecting from the base end of the output shaft 268 at two intervals.
73 is rotatably supported, and the center of the pin 273 is rotatably supported on the inner periphery of the input / output oblique bevel gear 251 and the center of the pin 274 is connected and fixed in a cross shape. The universal joint 271 formed is used.

The positional relationship between the universal joint 271 and the input / output oblique bevel gear 251 and the fixed oblique bevel gear 252 is as follows. It is necessary to dispose the apex of each pitch plane so that the center point of the pins 273 and 274 of the universal joint 271 which is the swing center of the input / output bevel gear 251 coincides.

As described above, the pins 273 and 274, the input / output oblique bevel gear 251 and the fixed oblique bevel gear 252
3, the teeth 270 of the input / output bevel gear 251 and the fixed bevel gear 252, as shown in FIG. 3 in the first embodiment. All 269 mesh with the entire surface of the tooth in the tooth width direction to be in full contact. As a result, the input and output bevel gear 251 rotates smoothly without generating noise and wear, and there is no backlash, and it is possible to realize high-precision ultra-low-speed rotation for a long time. is there.

As shown in FIG. 11, when the input / output bevel gear 251 is in the neutral state, or not in the neutral state as described above, the input / output bevel gear 251 is fixed to the input / output bevel gear 251. When any one of the teeth 270 and 269 of the oblique bevel gear 252 is slightly meshed with each other, each pressing rod 264 has its leading edge lightly attached to the bottom surface of the input / output bevel gear 251. It is arranged at the position where it contacts.

The operation of the actuator 1F according to the sixth embodiment of the present invention having the above structure will be described.
As shown in FIG. 4 in the first embodiment, when a rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output port P _{1 is} output.
To P 3 sequentially pneumatic pulse through the _(not shown) is supplied to each of the fluid passages 260. That is, the first-phase pneumatic pulse is shifted to the fluid passage 260a by 120 °, and the second-phase pneumatic pulse is shifted to the fluid passage 260b by a further 120 ° in the third phase. The pneumatic pulse is supplied to a fluid passage 260c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 26.
0a, the piston 263a is pressurized and moves upward, and the tip of the pressing rod 264a presses a part of the bottom surface of the input / output bevel gear 251 which has been in the neutral state up to now. I do. Then, with the pressing of the pressing bar 264a, the other two pressing bars 264b and 264c (not shown) are pressed and moved downward with the inclination of the input / output oblique bevel gear 251.

By the pressing operation of the pressing bar 264a against the input / output oblique bevel gear 251, the input / output oblique bevel gear 251 swings via the universal joint 271.
The input / output bevel gear 251 on the side pressed by the pressing rod 264a moves upward, and the teeth 270 of the input / output bevel gear 251 on the side that has moved upward move to the fixed oblique bevel gear 252. Mesh with teeth 269; On the other hand, the teeth 270 of the input-side oblique bevel gear 251 on the non-pressed side and the teeth 269 of the output-side oblique bevel gear 252 are separated without engaging with each other (this state is the same as in the first embodiment). The illustration is omitted because it is the same as FIG. 3).

The pressurization of the piston 263a is stopped,
When the pneumatic pulse of the second phase is supplied to the fluid passage 260b, the piston 263b (not shown) is pressurized and moves upward, so that the tip of the pressing rod 264b is driven by the input / output oblique bevel gear 251. A part of the bottom is pressed upward. On the other hand, the other pressing rods 264a and 264c (not shown) move downward. As a result, the meshing state between the teeth 270 of the input / output bevel gear 251 and the teeth 269 of the fixed bevel gear 252 by the pneumatic pulse of the first phase is released and separated. Then, the teeth 270 of the input / output bevel gear 251 on the side pressed by the pressing bar 264b engage the teeth 269 of the fixed bevel gear 252 in the same manner as described above.

Hereinafter, the pressure of the piston 263c (not shown) by the pneumatic pulse of the third phase, the pressing of the pressing rod 264c to the upper side, the downward movement of the other pressing rods 264a and 264b, the input / output The engagement and separation of the teeth 270 of the oblique bevel gear 251 with the teeth 269 of the fixed oblique bevel gear 252 are the same as those described above, and the description is omitted.

By the pressurization of the piston 263a by the pneumatic pulse of the first phase to the pressurization of the piston 263c by the pneumatic pulse of the third phase, the input / output bevel gear 251 having a large number of teeth is formed. The tooth 27 of the input / output bevel gear 251 is swung three times at three different positions.
0 and the teeth 269 of the fixed bevel gear 252 having a small number of teeth are meshed three times, so that the input / output bevel gear 251 is fixed to the input / output bevel gear 251. This means that the shaft has rotated by the difference in the number of teeth from the oblique bevel gear 252.

The input / output oblique bevel gear 251
The number of teeth 270 and 269 of the fixed bevel gear 252 is not particularly limited. However, in the sixth embodiment of the present invention, the number of teeth 270 of the input / output bevel gear 251 is 121. Since the number of teeth 269 of the fixed oblique bevel gear 252 is 120 and the difference in the number of teeth is 1, the input / output oblique bevel gear 251 swings three times.
The oblique bevel gear 251 for input and output is 360 ° / 120 = 3
Rotate only by °. That is, with one pneumatic pulse, the output shaft 268 connected to the input / output bevel gear 251 via the universal joint 271 rotates 1 °.
By repeating the pressing operation of the distal end of the piston 263 by the pressing rod 264, the input / output oblique bevel gear 251 continuously rotates, and the output shaft 268 connected thereto via the universal joint 271. Can be continuously rotated.

Although the three pistons 263 according to the sixth embodiment of the present invention are formed with an interval of 120 °, four or more pistons 263 can achieve the object. .

A seventh embodiment of the present invention shown in FIGS. 13 and 14 will be described in detail with reference to the drawings. First, in the actuator 1G according to the seventh embodiment of the present invention, a pneumatic pulse supplied by a rotary valve is used as a drive source for driving the actuator 1G, as in the first embodiment.

FIG. 13 is a longitudinal sectional view of an actuator 1G according to a seventh embodiment of the present invention. The actuator 1G does not need to be particularly limited. For example, the phase difference 120 from the rotary valve RV (not shown because the same one as in the first embodiment is used) is used.
Supply of pneumatic pulse of 1 °, the swing angle is 1
An input-side oblique bevel gear 311 that swings stepwise at 20 °,
The output side bevel gear 312 is formed to take out the swinging motion of the input side bevel gear 311 as rotation. In the embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 311 is described as being greater than the number of teeth of the output-side oblique bevel gear 312. The number of teeth of the bevel gear 312 is the input-side oblique bevel gear 31
Even if the number of teeth is larger than one, the object can be achieved.

The input / output oblique bevel gears 311, 312
The housing 313 which is provided with a housing 313 is formed by providing a concave portion 314 in the center and fixing an outer lid 317 to an upper end edge of a cylindrical cylinder 316 having a thick bottom plate 315.

Further, the bottom plate 315 of the cylinder 316
Are provided with a small recess 3 at an interval of 120 ° from each other.
In the small recess 318, the outer peripheral edge of a disk-shaped partition plate 319 is tightly fitted to the inner peripheral wall surface of the cylinder 316, and is closely fixed to the upper surface of the bottom plate 315. Then, each of the small recesses 318 is formed to be densely partitioned, and further penetrates through the bottom plate 315 to form each of the small recesses 3.
A fluid passage 320 is opened at the center of each of the 18.

Each of the fluid passages 320 provided in the bottom plate 315 of each of the cylinders 316 has a small recess 318.
Are connected to the rotary valve RV via fluid transfer pipes 322, respectively.
2 to supply compressed air from the rotary valve RV into the small recess 318. In the embodiment of the present invention, a fluid material such as compressed air, a fluid material supply means such as a compressor for supplying the fluid material, and a pressing force of the fluid material from each of the small recesses 318 are supplied from the fluid material supply means.
The pressing force applying means is constituted by a branching means such as a rotary valve supplied into the inside. As the branching unit, an electromagnetic valve or the like can be used. Further, a control means for controlling the rotation of a rotary valve as a branching means at an arbitrary speed is provided to sequentially supply the fluid pressure into each small recess 318. When an electromagnetic valve or the like is used instead of the rotary valve, the control means sequentially controls the operation of the electromagnetic valve or the like.

Each of the small recesses 318 has a corresponding one of the small recesses 318.
Each of the pistons 323 formed so as to slide on the side wall of the piston 323 is provided, and a pressing rod 324 having a hemispherical tip is protruded from the center of the distal end of each of the pistons 323. It is formed so as to protrude upward through the partition plate 319 and move up and down as the piston 323 moves up and down. In addition, the partition plate 3
19, when the piston 323 descends, the small recess 31
In order to prevent the space above the piston 323 from becoming negative pressure, the space above the piston 323 and the recess 314 are formed.
And a small hole 319a that communicates with. In the figure, 3
Reference numeral 25 denotes a piston 3 for preventing air leakage between the upper chamber and the lower chamber partitioned by the piston 323 of the small recess 318.
A sealing material such as an O-ring provided on the outer periphery of the reference numeral 23.
In the embodiment of the present invention, the small concave portion 318, the piston 323, and the pressing rod 324 constitute a linear motion pressing unit that sequentially presses the bottom surface of the input-side oblique bevel gear 311 upward.

In the concave portion 314 above the partition plate 319 of the cylinder 316, an input-side oblique bevel gear 311 and an output-side oblique bevel gear 312 each having a smaller diameter than the concave portion 314 are arranged. . And, in the center of the outer lid 317 above the input / output side bevel gears 311 and 312,
A penetrating projection 326 is protruded, and the penetrating projection 326 is formed.
The output shaft 328 is attached to a radial bearing 327 integrally fixed to the
Are supported so as to be rotatable.

In the concave portion 314 of the cylinder 316, an output-side oblique bevel gear 312 formed in a reverse concave shape is used.
The output shaft 328 has a through hole 331 formed in the center of the output-side oblique bevel gear 312 with a gap 330 between the outer cover 317 and the teeth 329 facing downward. The key 332 is inserted into the groove formed in the outer peripheral edge of the output shaft 328 and the groove 333 formed in the inner peripheral edge of the through hole 331 of the output-side oblique bevel gear 312. By fitting, the output shaft 328 and the output-side oblique bevel gear 31
2 are connected and fixed so as not to rotate.

A curved concave groove 334 is formed in the outer circumferential direction on the upper surface of the output-side oblique bevel gear 312, and the inner wall surface of the outer lid 317 facing the curved concave groove 334 is also circumferentially formed. The concave grooves 335 are recessed, and the respective concave grooves 334 and 335 are formed.
A large number of steel balls 336 are sandwiched between them, and the output side oblique bevel gear 312 can be smoothly rotated using the steel balls 336 as guides.

Further, the teeth 3 of the output side oblique bevel gear 312
In the neutral state shown in FIG. 13, the input-side oblique bevel gear 311 provided with the teeth 337 meshing with the teeth 29 is disposed facing the position where the teeth 329 and 337 do not mesh in the neutral state shown in FIG. I have. However, even if the positional relationship between the input-side oblique bevel gear 311 and the output-side oblique bevel gear 312 is set so that any one of the teeth does not always enter the neutral state and is in a state of being slightly meshed. Good. However,
As described above, in the neutral state, the input-side oblique gear 3
11 and the teeth 337 and 329 of the output-side oblique bevel gear 312 are arranged facing each other in a state where they are not meshed with each other, and when an excessively high load is applied, the input-side oblique bevel gear 3
11 and the teeth 337 and 329 of the output-side oblique bevel gear 312 cause a tooth jump phenomenon in which the teeth 337 and 329 rotate without meshing with each other, so that excessive force is prevented from being applied to the apparatus, and damage to the entire apparatus can be prevented.

The input-side oblique bevel gear 311 can swing freely via a universal joint 338 provided between the inner peripheral wall of the input-side oblique bevel gear 311 and the partition plate 319, but cannot rotate. The equipment is as follows. That is, the universal joint 338 constitutes a rotation preventing means of the input-side oblique bevel gear 311.

It is not necessary to particularly limit the universal joint 338, but it is recommended to use the one shown in FIG. That is, the pin 3 is attached to the tip of the mounting piece 339 protruding from the upper surface of the partition plate 319 at two intervals.
40 is rotatably supported, and a pin 341 whose both ends are rotatably supported on the inner periphery of the input-side oblique bevel gear 311 is fixedly connected to the center of the pin 340 in a cross shape. The formed universal joint 338 is used.

The positional relationship between the universal joint 338 and the input / output oblique bevel gears 311 and 312 is as follows. The apex of each pitch surface of the input / output oblique bevel gears 311 and 312 and the input side Universal joint 33 which becomes the swing center of the oblique bevel gear 311
It is necessary to arrange so that the center point of the eighth pin 340 coincides.

As described above, the positional relationship between the pin 340 and the apexes of each pitch plane of the input-side oblique bevel gear 311 and the output-side oblique bevel gear 312 is used to obtain a diagram according to the first embodiment. 3, each tooth 337.3 of the input-side oblique bevel gear 311 and the output-side oblique bevel gear 312 is provided.
29 are meshed over the entire surface of the tooth in the tooth width direction, resulting in full surface contact. As a result, the output-side oblique bevel gear 312 does not generate noise, has little wear, and has no backlash, and the output-side oblique bevel gear 312 rotates smoothly, thereby realizing high-precision ultra-low-speed rotation for a long period of time.

As shown in FIG. 13, when the input-side oblique bevel gear 311 is in the neutral state or not in the neutral state as described above, the input-side oblique bevel gear 311 and the output-side oblique bevel gear 311 are in a neutral state. When any one of the teeth 337 and 329 of the gear 312 is slightly meshed with each other, each pressing rod 324 is disposed at a position where its leading edge slightly touches the bottom surface of the input-side oblique bevel gear 311. Has been established.

An operation of the actuator 1G according to the seventh embodiment of the present invention having the above-described structure will be described.
As shown in FIG. 4 in the first embodiment, when a rotary valve RV (not shown) communicating with the compressed air source operates in a preset sequence, the output port P _{1 is} output.
Pneumatic pulses are sequentially supplied to each fluid passage 320 through ＰP ₃ (not shown). That is, the pneumatic pulse of the first phase is shifted to the fluid passage 320a by 120 °, and the pneumatic pulse of the second phase is shifted by 120 ° to the fluid passage 320b (not shown). The pneumatic pulse of the third phase is supplied to a fluid passage 320c (not shown).

Now, the pneumatic pulse of the first phase is applied to the fluid passage 32.
When it is supplied to 0a, the piston 323a is pressurized and moves upward, and the tip of the pressing rod 324a presses a part of the bottom surface of the input-side oblique gear 311 which has been in the neutral state up to now. The other two pressing rods 324b and 324c (not shown) are pressed and moved downward with the inclination of the input-side oblique bevel gear 311 as the pressing rod 324a is pressed.

The oblique bevel gear 3 on the input side of the pressing rod 324a
11, the input-side oblique bevel gear 311 swings via the universal joint 338, and the input-side oblique bevel gear 311 on the side pressed by the pressing rod 324a.
11 moves upward, and the teeth 337 of the input-side oblique bevel gear 311 on the side that has moved upward move to the teeth 32 of the output-side oblique bevel gear 312.
9 mesh. On the other hand, the teeth 337 of the input-side oblique bevel gear 311 on the non-pressed side and the output-side oblique bevel gear 31
The second teeth 329 are not meshed and are separated from each other.
Since it is the same as FIG. 3 in the first embodiment,
(Not shown).

The pressurization of the piston 323a is stopped,
When the pneumatic pulse of the second phase is supplied to the fluid passage 320b, the piston 323b (not shown) is pressurized and moves upward, and the tip of the pressing rod 324b is moved to the input side oblique bevel gear 311.
Part of the bottom surface is pressed upward. Then, the other pressing rods 324a and 324c (not shown) move downward. Thereby, the teeth 337 of the input-side oblique bevel gear 311 and the output-side oblique bevel gear 31 due to the pneumatic pulse of the first phase are output.
The meshing state with the second tooth 329 is released and the second tooth 329 is separated.
Then, the teeth 337 of the input-side oblique bevel gear 311 on the side pressed by the pressing bar 324b mesh with the teeth 329 of the output-side oblique bevel gear 312 in the same manner as described above.

Hereinafter, the piston 323c is pressurized by the pneumatic pulse of the third phase and the pressing rod 324c is pressed upward, the other pressing rods 324a and 324b are moved downward, and the teeth of the input oblique bevel gear 311 are moved. 337 output-side oblique bevel gear 3
The engagement and separation of the twelve teeth 329 are the same as those described above, and the description is omitted.

By the pressurization of the piston 323a by the pneumatic pulse of the first phase to the pressurization of the piston 323c by the pneumatic pulse of the third phase, the input-side oblique gear 311 having a large number of teeth becomes 3 At three different positions, the teeth 337 of the input-side bevel gear 311 and the teeth 329 of the output-side bevel gear 312 having a small number of teeth mesh with each other three times. Oblique bevel gear 312
Is an input-side oblique bevel gear 311 using a steel ball 336 as a guide.
And the output side oblique bevel gear 312 rotates by the difference in the number of teeth.

The number of teeth 337 and 329 of the input-side oblique bevel gear 311 and the output-side oblique bevel gear 312 is not particularly limited. However, in the seventh embodiment of the present invention,
The number of teeth 337 of the input side bevel gear 311 is 121, the number of teeth 329 of the output side bevel gear 312 is 120, and the difference in the number of teeth is 1.
Made three oscillating movements, the output side oblique bevel gear 3
12 rotates 360 ° / 120 = 3 °. That is, the output shaft 328 connected to the output-side oblique bevel gear 312 rotates 1 ° with one pneumatic pulse.
By repeating the pressing operation by the pressing rod 324 at the tip of the piston 323, the output-side oblique bevel gear 31 is formed.
The output shaft 32 continuously rotates and is connected thereto.
8 can be rotated continuously.

Although three pistons 323 according to the seventh embodiment of the present invention are formed with an interval of 120 °, the purpose can be achieved with four or more pistons. .

An eighth embodiment of the present invention shown in FIGS. 15 to 17 will be described in detail with reference to the drawings. First, an actuator 1H according to an eighth embodiment of the present invention utilizes electromagnetic force as a drive source for driving the actuator 1H. A power source for supplying power to a solenoid described later, and solenoids provided at three or more locations operated by the power supplied from the power source constitute a pressing force applying means. Further, control means for sequentially supplying power to each solenoid is provided.

FIG. 15 is a longitudinal sectional view of an actuator 1H according to an eighth embodiment of the present invention. The actuator 1H does not need to be particularly limited. For example, when the electromagnetic pulse having a phase difference of 120 ° is supplied from the electromagnetic pulse control unit MC, the actuator 1H oscillates at a swing angle of 120 ° in synchronization with the supply. The input side oblique bevel gear 411 that moves and the output side oblique bevel gear 412 that takes out the swinging motion of the input side oblique bevel gear 411 as rotation. In the embodiment of the present invention, the number of teeth of the input-side oblique bevel gear 411 is described as being greater than the number of teeth of the output-side oblique bevel gear 412. Even if the number of teeth of the bevel gear 412 is larger than the number of teeth of the input-side oblique bevel gear 411, the object can be achieved.

The input / output oblique bevel gears 411 and 412
The housing 413 is provided with a concave portion 414 at the center, and an outer lid 417 fixed to the leading edge of a cylindrical cylinder 416 having a thick bottom plate 415.

Further, the bottom plate 415 of the cylinder 416
Are provided with a small recess 4 at a distance of 120 ° from each other.
In the small concave portion 418, the outer peripheral edge of a disk-shaped partition plate 419 is fixed in sliding contact with the inner peripheral wall surface of the cylinder 416, and is closely fixed to the upper surface of the bottom plate 415. Each of the small recesses 418 is formed in a partitioned manner, and further, insertion holes 421 for penetrating the bottom plate 415 and inserting the power cord 420 are opened.

Each of the small recesses 418 has a solenoid 42
2 are provided, and a plunger 424 made of a magnetic material such as iron having a hemispherical tip is provided in a hollow portion 423 at the center of the solenoid 422, and the plunger 424 is connected to the partition plate 419. , And is formed to protrude upward and to move upward by energization of the solenoid 422. In the embodiment of the present invention, the small concave portion 418, the solenoid 422, and the plunger 424 constitute a linear motion pressing unit that sequentially presses the bottom surface of the input-side oblique bevel gear 411 upward.

An input oblique bevel gear 411 and an output oblique bevel gear 412 having a smaller diameter than the concave portion 414 are provided in a concave portion 414 above the partition plate 419 of the cylinder 416. . And, in the center of the outer lid 417 above the input / output side bevel gears 411 and 412,
A penetrating protrusion 425 is protruded, and the penetrating protrusion 425 is provided.
The output shaft 427 is attached to a radial bearing 426 integrally fixed to the
Are supported so as to be rotatable.

In the concave portion 414 of the cylinder 416, an output-side oblique bevel gear 412 having an inverted concave section is formed.
However, there is a gap 429 between the outer cover 417 with its teeth 428 directed downward, and the output shaft 427 is inserted into a through hole 430 formed in the center of the output side bevel gear 412. The key 431 is inserted into the groove formed in the outer peripheral edge of the output shaft 427 and the groove 432 formed in the inner peripheral edge of the through hole 430 of the output side bevel gear 412. By fitting, the output shaft 427 and the output-side oblique bevel gear 41
2 are connected and fixed so as not to rotate.

[0200] A curved concave groove 433 is formed on the upper surface of the output-side oblique bevel gear 412 in the outer circumferential direction, and the inner wall surface of the outer lid 417 facing the curved concave groove 433 is also circumferentially formed. The concave grooves 434 are recessed, and the respective concave grooves 433 and 434 are formed.
A large number of steel balls 435 are sandwiched between them, and the output side oblique bevel gear 412 can be smoothly rotated using the steel balls 435 as guides.

Further, the tooth 4 of the output-side oblique bevel gear 412
In the neutral state shown in FIG. 15, the input-side oblique bevel gear 411 including the teeth 436 meshing with the gear 28 and facing each other is disposed facing the position where the teeth 428 and 436 do not mesh with each other in the neutral state shown in FIG. ing. However, even if the positional relationship between the input-side oblique bevel gear 411 and the output-side oblique bevel gear 412 is set so as not to be in a neutral state and to be in a state in which any one of the teeth always slightly meshes. Good. However, as described above, in the neutral state, the teeth 436 and 428 of the input-side oblique bevel gear 411 and the output-side oblique bevel gear 412 are provided.
Are facing each other in a state where they are not engaged with each other, the teeth 436 and 42 of the input-side oblique bevel gear 411 and the output-side oblique bevel gear 412 when an excessively high load is applied.
No. 8 causes a tooth jumping phenomenon that rotates without any meshing, preventing an excessive force from being applied to the apparatus, and preventing the entire apparatus from being damaged.

The input-side oblique bevel gear 411 is provided with a ball bearing 438 between the center of the lower surface of the output shaft 427 and the boss 437 protruding from the center of the upper surface of the partition plate 419.
The device is configured to be swingable via the.

At the center of the lower surface of the input-side oblique bevel gear 411, there is provided a concave notch 439 having a diameter of about half of that of the input-side oblique bevel gear 411, and at the center of the concave notch 439. An umbrella-shaped opening 440 having a diameter such that a part of the ball of the ball bearing 438 protrudes from the upper edge and having a wall surface expanded downward from the upper edge is formed. Are made to slide on the outer peripheral surface of the ball of the ball bearing 438, and a part of the ball of the ball bearing 438 is projected upward through the umbrella-shaped opening 440.

On the other hand, at the center of the lower surface of the output shaft 427,
An umbrella-shaped concave portion 441 having a wall surface that expands downward is recessed, and the outer peripheral surface of the ball of the ball bearing 438 protruding in the direction of the output-side oblique bevel gear 412 is one of the wall surfaces of the umbrella-shaped concave portion 441. It is formed so as to be in sliding contact with the portion.

Also, a disc-shaped press-fitting plate 442 that is press-fitted into the concave notch 439 of the input-side oblique bevel gear 411 and tightly fixed thereto.
An umbrella-shaped opening 443 having a diameter such that a part of the ball of the ball bearing 438 protrudes from the lower end edge and having a wall surface expanded upward from the lower end edge is formed in the center of the umbrella. A part of the wall surface of the opening 443 is connected to the ball bearing 4.
38, and the umbrella-shaped opening 4
A part of the ball of the ball bearing 438 is projected downward from 43.

Further, an umbrella-shaped concave portion 444 having a wall surface expanding upward is recessed in the center of the boss 437 of the partition plate 418, and the ball bearing 43 protrudes toward the partition plate 419.
The outer peripheral surface of the ball No. 8 is formed so as to slide on a part of the wall surface of the umbrella-shaped concave portion 444. That is, the ball of the ball bearing 438 is not shaken by the input-side oblique bevel gear 411, the press-fitting plate 442, and the bearing 445 formed between the center of the lower surface of the output shaft 427 and the boss 437 of the partition plate 418. Equipment has been. Therefore, the output shaft 427
Also rotates stably.

The bearing 445 has umbrella-shaped openings 440 and 443 and umbrella-shaped recesses 441 and 44 for sliding contact with a part of the ball of the ball bearing 438 as shown in FIG.
4 instead of the ball bearing 438.
Umbrella-shaped opening 440.
The 443 and the umbrella-shaped concave portions 441 and 444 may be curved concave portions, respectively.

On the outer peripheral surface of the input side bevel gear 411,
One or more (two in FIG. 15) cylindrical guide pins 446 project in the horizontal direction in a neutral state of the input side bevel gear 411 and the output side bevel gear 412 at a predetermined interval. A guide groove 447 that is formed and is used as a guide by fitting the tip of each guide pin 446 is formed in the vertical direction of the inner peripheral wall of the cylinder 416.

As shown in FIG. 16, the width of the guide groove 447 is formed such that the guide pin 446 can slide along the guide groove 447, and is movable up and down in FIG. However, the input side bevel gear 411 is formed so as not to move in contact with the groove wall 447a in the circumferential direction. Therefore, although the input side oblique bevel gear 411 can swing with the guide pin 446 as a guide, the input side oblique bevel gear 411 is obstructed by the groove wall 447a.
It has the role of preventing rotation because it cannot rotate. That is, the guide pin 446 and the guide groove 447
Thus, the rotation preventing means of the input-side oblique bevel gear 411 is configured.

The positional relationship between the ball bearing 438 and the input / output oblique bevel gears 411 and 412 is as follows. It is necessary to dispose the input side oblique bevel gear 411 so that the center point of the ball bearing 438 which is the swing center of the input side oblique bevel gear 411 coincides. The ball bearing 438 and each guide pin 4
The guide pin 446 has a positional relationship with
In a neutral state of the input-side oblique bevel gear 411 and the output-side oblique bevel gear 412, the input-side oblique bevel gear 411 is formed so as to protrude horizontally from the input-side oblique bevel gear 411. It is necessary to arrange so that the center point of the ball bearing 438 which becomes the swing center of the bevel gear 411 is on a straight line.

As described above, the positional relationship between the ball bearing 438 and the vertices of the pitch surfaces of the input and output oblique bevel gears 411 and 412, and the ball bearing 438 and each guide pin 44
6, the teeth 436 and 428 of the input and output bevel gears 411 and 412 are all in the tooth width direction, as shown in FIG. 3 in the first embodiment. The entire surface of the tooth meshes with the entire surface of the tooth. As a result, there is no noise, little wear, no backlash,
The output-side oblique bevel gear 412 rotates smoothly, and high-precision ultra-low-speed rotation can be realized for a long time.

As shown in FIG. 15, when the input-side oblique bevel gear 411 is in the neutral state or not in the neutral state as described above, the input-side oblique bevel gear 411 and the output-side oblique bevel gear 411 are connected. When any one of the teeth 436 and 428 of the tooth 412 is slightly meshed with each other, each plunger 424 has its leading edge at the input side oblique bevel gear 411.
Are arranged at positions where they come into light contact with the bottom surface of each of them.

An operation of the actuator 1H according to the eighth embodiment of the present invention having the above-described structure will be described.
When the electromagnetic pulse control unit MC connected to the power supply shown in FIG. 17 operates in a preset sequence, the electromagnetic pulse from the electromagnetic pulse control unit MC is supplied to each solenoid 422. That is, the first phase electromagnetic pulse is shifted to the solenoid 422a by 120 °, the second phase electromagnetic pulse is shifted to the solenoid 422b (not shown), and the third phase is further shifted by 120 ° to the solenoid 422b. Are sequentially supplied to a solenoid 422c (not shown).

Now, the electromagnetic pulse control unit MC issues the first
When the electromagnetic pulse of the phase is supplied to the solenoid 422a, the solenoid 422a is magnetized and the plunger 4
24a is moved upward, and its tip presses a part of the bottom surface of the input-side oblique gear 411 that has been in the neutral state up to now. On the other hand, the other two plungers 424b and 42
4c (not shown) is pressed downward and moves with the inclination of the input-side oblique bevel gear 411.

When the plunger 424a presses the input-side oblique bevel gear 411, the ball bearing 438 is pressed.
The input side oblique bevel gear 411 swings while a part of the beveled opening 440 of the input side oblique bevel gear 411 and a part of the beveled opening 443 of the press-fitting plate 442 are in sliding contact with the peripheral surface of the ball. Then, as shown in FIG. 3 in the first embodiment, the input-side oblique gear 411 on the side pressed by the plunger 424a moves upward, and the input-side oblique on the side moved upward. The teeth 436 of the bevel gear 411 mesh with the teeth 428 of the output side oblique bevel gear 412. On the other hand, the teeth 436 of the input-side oblique bevel gear 411 on the non-pressed side and the teeth 428 of the output-side oblique bevel gear 412 are separated without being engaged.

The supply of the electromagnetic pulse to the solenoid 422a is stopped, and the electromagnetic pulse of the second phase is
2b (not shown), the solenoid 422
b is magnetized to move the plunger 424b upward,
The tip presses a part of the bottom surface of the input-side oblique bevel gear 411 upward. On the other hand, other plungers 424a and 42
4c moves downward. As a result, the engagement state between the teeth 436 of the input-side oblique bevel gear 411 and the teeth 428 of the output-side oblique bevel gear 412 by the solenoid 422a is released and separated. Then, similarly to the above, the input side oblique bevel gear 411 on the side pressed by the plunger 424b.
Of the output side oblique bevel gear 412 mesh with the teeth 428 of the output side bevel gear 412.

Hereinafter, the third phase electromagnetic pulse is supplied to the solenoid 422c, the plunger 424c is pushed upward, the other plungers 424a and 424b are moved downward, and the teeth 436 of the input oblique bevel gear 411 are moved. The engagement of the output side oblique bevel gear 412 with the teeth 428 is the same as described above, and the description is omitted.

The solenoid 4 of the first phase electromagnetic pulse
By supplying the electromagnetic pulse of the third phase from the supply to the solenoid 22a to the solenoid 422c, the input-side oblique gear 411 having a large number of teeth swings three times at three different positions, and the input-side oblique bevel gear 411. Since the teeth 436 of the gear 411 and the teeth 428 of the output-side oblique bevel gear 412 having a small number of teeth mesh with each other three times, the output-side oblique bevel gear 412 comes into contact with the peripheral surface of the ball of the ball bearing 438. A part of the wall surface of the umbrella-shaped concave portion 441 at the center of the lower surface of the output shaft 427 is in sliding contact with the steel ball 435 as a guide by the difference in the number of teeth between the input-side bevel gear 411 and the output-side bevel gear 412. You have rotated.

The number of teeth 436 and 428 of the input-side oblique bevel gear 411 and the output-side oblique bevel gear 412 is not particularly limited. However, in the eighth embodiment of the present invention,
The number of teeth 436 of the input side bevel gear 411 is 121, the number of teeth 428 of the output side bevel gear 412 is 120, and the difference in the number of teeth is 1. Therefore, the input side bevel gear 411 is formed.
Made three oscillating movements, the output side oblique bevel gear 4
12 rotates 360 ° / 120 = 3 °. That is, the output side oblique bevel gear 412 is generated by one electromagnetic pulse.
And the output shaft 427 connected with the rotation of the rotation of the output shaft by 1 °. Then, by repeating the pressing operation by the plunger 422, the output-side oblique bevel gear 412 continuously rotates, and the output shaft 427 connected thereto can be continuously rotated.

The three solenoids 422 according to the eighth embodiment of the present invention are formed at intervals of 120 °. However, even if the number is four or more, the object can be achieved.

The electromagnetic force used as a drive source in the eighth embodiment of the present invention is used in place of the drive source using fluid pressure shown in the first to seventh embodiments. be able to.

FIG. 18 is a sectional view showing another embodiment of the ball bearing shown in the first, third to fifth and eighth embodiments. In FIG. 18, an umbrella-shaped recess 61 is formed at the center of the lower surface of the output shaft 613 that is fixedly inserted through a through hole 612 formed at the center of the output-side oblique bevel gear 611.
4 is recessed, and an input bevel gear 615 disposed facing the output bevel gear 611 is also provided with a beveled recess 616 facing the beveled recess 614. The umbrella-shaped recesses 614 and 616 form the bearing 618 of the ball bearing 617.

That is, the ball bearing 617 is
The ball bearing 617 is provided between a part of the wall surface of each of the umbrella-shaped concave portions 614 and 616 forming the umbrella-shaped concave portions 614 and 616.
Balls are slid in contact and pinched. Since the input side oblique bevel gear 615 of the ball bearing 617 is pressed by the pressing rod 620 penetrating the partition plate 619,
The ball of the ball bearing 617 is mounted without swinging. The umbrella-shaped recesses 614 and 616 may be curved recesses so that the ball bearing 617 can make surface contact with the ball.

FIG. 19 is a sectional view showing still another embodiment of the ball bearing shown in the first, third to fifth and eighth embodiments. In FIG. 19, a through hole 632 formed in the center of the output side oblique bevel gear 631 is shown.
A bevel-shaped recess 634 is formed in the center of the lower surface of the output shaft 633 that is inserted and fixed to the output shaft 633.
The input-side oblique bevel gear 635 disposed facing the umbrella also has an umbrella-shaped recess 636 facing the umbrella-shaped recess 634, and a ball bearing 637 is formed by each of the umbrella-shaped recesses 634 and 636.
Bearing portion 638 is formed. Further, an umbrella-shaped recess 639 recessed at the center of the lower surface of the input-side oblique bevel gear 635.
And a curved recess 641 recessed at the center of the upper surface of the partition plate 640
A steel ball 642 for pressing is inserted between the ball bearings 6.
37 is pressed. Note that the curved concave portion 641 is different from the steel ball 642 in that the input side oblique bevel gear 6
35 so that the steel ball 6
It is necessary to make the diameter slightly larger than 42.

That is, the ball bearing 637 is
The ball bearing 637 is provided between a part of the wall surface of each of the umbrella-shaped recesses 634 and 636 forming the umbrella-shaped recesses 634 and 636.
Balls are slid in contact and pinched. Then, the ball bearing 637 is pressed upward by the pressing steel ball 642, and a pressing rod 643 penetrating the partition plate 640.
As a result, the input-side oblique bevel gear 635 is pressed, so that the ball of the ball bearing 637 is mounted without swinging. The umbrella-shaped concave portions 634 and 636 may be curved concave portions so that the ball bearings 637 can make surface contact with the balls. Also, an umbrella-shaped recess 639
Alternatively, a curved concave portion may be provided so as to make surface contact with the steel ball 642. Further, the curved concave portion 641 may be an umbrella-shaped concave portion in which the steel ball 642 can slightly swing by the swinging motion of the input-side oblique bevel gear 635.

FIG. 20 is a sectional view showing still another embodiment of the ball bearing shown in the first, third to sixth and seventh embodiments. 20, an umbrella-shaped recess 654 is formed in the center of the lower surface of the output shaft 653 fixedly inserted through a through-hole 652 formed in the center of the output-side oblique bevel gear 651, and the output of the output bevel gear 651 is formed. The input-side oblique bevel gear 655 disposed facing the side-oblique bevel gear 651 is also provided with an umbrella-shaped recess 656 facing the umbrella-shaped recess 654 so that each of the umbrella-shaped recesses 654. 656 and ball bearing 6
57 bearing portions 658 are formed. Further, a concave portion 659 formed in the center of the lower surface of the input-side oblique bevel gear 655 is provided.
A pressing elastic body 6 such as a rubber, an elastomer, a coil spring or the like is provided between
The ball bearing 657 is formed so as to press the ball bearing 657.

In other words, the ball bearing 657 is
A ball bearing 657 is provided between a part of the wall surface of each of the umbrella-shaped recesses 654 and 656 forming the umbrella-shaped recesses 654 and 656.
Balls are slid in contact and pinched. Then, the ball bearing 657 is pressed upward by the pressing elastic body 662, and the pressing rod 66 penetrating the partition plate 660.
3, the input-side oblique bevel gear 655 is pressed, so that the ball of the ball bearing 657 is mounted without shaking. The umbrella-shaped recesses 654 and 656 may be curved recesses so that the ball bearing 657 can make surface contact with the ball.

[0228]

As described above, the present invention uses a pair of oblique bevel gears instead of a pair of crown gears, and each of the oblique bevel gears forms a conical angle forming oblique. Since the apex of the pitch surface coincides with the center of oscillation of the oscillating bevel gear, unlike the crown gear, when the teeth of each oblique bevel gear mesh with each other, the entire surface of each tooth meshes, noise No high-accuracy and low-noise meshing can be realized without generating friction, generating frictional resistance, and generating backlash, and the output side bevel gear rotates smoothly. Thus, it is possible to realize high-precision ultra-low-speed rotation for a long period of time. In addition, a large reduction ratio can be obtained with only a pair of oblique bevel gears, and an effect that high torque can be converted can be obtained. Further, a ball bearing is provided at the swing center of the input-side oblique bevel gear, and the ball bearing is sandwiched between a support provided on the housing and a support provided on the output-side shaft. Since the shaft part was supported by the radial bearing in the housing, the output side shaft part was stably supported without fluctuation,
An excellent effect that a stable rotation output can be achieved.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of an actuator of the present invention.

FIG. 2 is a sectional view of a guide groove portion in the first embodiment of the actuator of the present invention.

FIG. 3 is a cross-sectional view illustrating a meshing state of an input-side oblique bevel gear and an output-side oblique bevel gear according to the first embodiment of the actuator of the present invention.

FIG. 4 is a bottom view showing the first embodiment of the actuator of the present invention.

FIG. 5 is a longitudinal sectional view showing a second embodiment of the actuator of the present invention.

FIG. 6 is a side view of a guide groove portion according to a second embodiment of the actuator of the present invention.

FIG. 7 is a longitudinal sectional view showing a third embodiment of the actuator of the present invention.

FIG. 8 is a longitudinal sectional view showing a fourth embodiment of the actuator of the present invention.

FIG. 9 is a longitudinal sectional view showing a fifth embodiment of the actuator of the present invention.

FIG. 10 is a longitudinal sectional view of a guide groove portion according to a fifth embodiment of the actuator of the present invention.

FIG. 11 is a longitudinal sectional view showing a sixth embodiment of the actuator of the present invention.

FIG. 12 is a bottom view showing a universal joint according to a sixth embodiment of the actuator of the present invention.

FIG. 13 is a longitudinal sectional view showing a seventh embodiment of the actuator of the present invention.

FIG. 14 is a plan view showing a universal joint according to a seventh embodiment of the actuator of the present invention.

FIG. 15 is a longitudinal sectional view showing an eighth embodiment of the actuator of the present invention.

FIG. 16 is a sectional view of a guide groove portion showing an eighth embodiment of the actuator of the present invention.

FIG. 17 is a bottom view showing an eighth embodiment of the actuator of the present invention.

FIG. 18 is a longitudinal sectional view showing another embodiment of the ball bearing used in the actuator of the present invention.

FIG. 19 is a longitudinal sectional view showing still another embodiment of the ball bearing used in the actuator of the present invention.

FIG. 20 is a longitudinal sectional view showing still another embodiment of the ball bearing used in the actuator of the present invention.

FIG. 21 is a longitudinal sectional view of a conventional actuator.

FIG. 22 is a cross-sectional view showing a meshing state of crown bevel gears in a conventional actuator.

[Explanation of symbols]

RV rotary valve, MC electromagnetic pulse control unit,
1A-1H actuator, 11 input bevel gear, 12 output bevel gear, 23 piston,
24 pressing rod, 39 ball bearing, 47 guide pin, 51 input / output oblique bevel gear, 52 fixed oblique bevel gear, 62 piston, 63 pressing rod, 74
Ball bearings, 80 guide pins, 111 input bevel bevel gears, 112 output bevel bevel gears, 123
Piston, 124 pressure rod, 139 ball bearing,
148 fixed annular bevel gear, 150 braking annular bevel gear, 151 input oblique bevel gear, 152 output oblique bevel gear, 163 piston, 164 elastic body, 1
65 pressing rod, 180 ball bearing, 211 input oblique bevel gear, 212 output oblique bevel gear, 223
Piston, 224 spherical tip, 225 pressure rod,
240 ball bearing, 251 input / output bevel gear, 252 fixed bevel gear, 263 piston,
264 press rod, 271 universal joint, 311 input oblique bevel gear, 312 output oblique bevel gear, 323
Piston, 324 pressing rod, 338 universal joint,
411 bevel gear on the input side, 412 bevel gear on the output side, 422 solenoid, 424 plunger,
438 Ball bearing, 446 Guide pin, 611
Bevel gear on the output side, 614 bevel gear on the input side,
616 ball bearing, 619 pressing rod, 631 output-side oblique bevel gear, 634 input-side oblique bevel gear, 63
6 ball bearing, 642 pressing rod, 651 output oblique bevel gear, 654 input oblique bevel gear, 656
Ball bearing, 662 pressing rod.

Claims (13)

[Claims] 1. A pair of oblique bevel gears which are relatively rotatable and have different numbers of teeth, and a part of the oblique bevel gears on the opposite side when the teeth of the respective oblique bevel gears mesh with each other. , The bevel gears of the respective oblique bevel gears are disposed so as to be separated from each other, and one of the oblique bevel gears is swung toward the tooth surface of the other oblique bevel gear. To engage
A linear pressing means for sequentially pressing at least three or more locations of the one oblique bevel gear; a pressing means for applying a pressing force to the linear pressing means; and Control means and a rotation preventing means for preventing any one of the oblique bevel gears from rotating, and a vertex of a pitch surface of each of the oblique bevel gears swings. An actuator characterized in that it coincides with the swing center of the oblique bevel gear. 2. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, the actuator comprising: an input side bevel gear and an output side bevel gear each having a different number of teeth; In a state where the teeth of the respective oblique bevel gears are engaged with each other, the gears are arranged so that the tooth surfaces of the respective oblique bevel gears are separated from each other on the opposite side, and the input is performed. The oblique bevel gear is
It is pushed by a plurality of pushing rods which move up and down by the fluid pressure or the electromagnetic force via the ball bearing, and swings stepwise at a predetermined swing angle, but is formed so as not to rotate by a guide pin, and the guide is formed. The pin is formed so as to protrude horizontally from the input-side oblique bevel gear in the neutral state of the input-side oblique bevel gear and the output-side oblique bevel gear, and has a center line of the guide pin and a center point of the ball bearing. Are arranged so as to be on a straight line, and furthermore, the apexes of the respective pitch surfaces of the input and output bevel gears are arranged so as to coincide with the center point of the ball bearing. The teeth of the input-side oblique bevel gear sequentially mesh with the teeth of the output-side oblique bevel gear by the oscillating motion, and the output-side oblique bevel gear has a tooth number difference between the input-side oblique bevel gear and the output-side oblique bevel gear. An actuator characterized in that the bevel gear rotates on itself. 3. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, said actuator comprising an input / output bevel gear and a fixed bevel gear having different numbers of teeth. In a state where the teeth of each of the oblique bevel gears mesh with each other in a part, at the opposite side, the tooth faces of the respective oblique bevel gears are arranged so as to be separated from each other, and The input / output bevel gear is pressed by a plurality of pressing rods that move up and down by the fluid pressure or the electromagnetic force via the ball bearing, and swings stepwise at a predetermined swing angle and guides. The guide pin is formed so as to rotate by a pin, and the guide pin is formed to protrude horizontally from the input-side oblique bevel gear in a neutral state of the input-side oblique bevel gear and the output-side oblique bevel gear. Center line and The center point of the ball bearing is disposed so as to be in line with the center point of the ball bearing. Due to the swinging motion of the input / output bevel gear, the teeth of the input / output bevel gear mesh with the teeth of the fixed bevel gear sequentially, and the input / output bevel gear and the fixed bevel gear are fixed. An actuator characterized in that the input / output oblique bevel gear rotates by the difference in the number of teeth of the bevel gear. 4. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, the actuator comprising: an input side bevel gear and an output side bevel gear each having a different number of teeth; In a state where the teeth of the respective oblique bevel gears are engaged with each other, the gears are arranged so that the tooth surfaces of the respective oblique bevel gears are separated from each other on the opposite side, and the input is performed. The oblique bevel gear is
It is pressed by a plurality of pressing rods which move up and down by the fluid pressure or electromagnetic force via a ball bearing, and swings stepwise at a predetermined swing angle, but faces outside the input side oblique bevel gear. It is formed so that it cannot rotate by the fixed annular bevel gear and the annular bevel gear for braking, and furthermore, the vertex of each pitch surface of the input / output oblique bevel gear coincides with the center point of the ball bearing. And the apex of each pitch surface of the fixed annular bevel gear and the braking annular bevel gear is aligned with the center point of the ball bearing. The teeth of the input-side oblique bevel gear sequentially mesh with the teeth of the output-side oblique bevel gear, and the output-side oblique bevel gear has a tooth number difference between the input-side oblique bevel gear and the output-side oblique bevel gear. An actuator characterized in that it rotates. 5. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, said actuator comprising: an input side bevel gear and an output side bevel gear each having a different number of teeth; In a state where the teeth of the respective oblique bevel gears are engaged with each other, the gears are arranged so that the tooth surfaces of the respective oblique bevel gears are separated from each other on the opposite side, and the input is performed. The oblique bevel gear is
It is pressed by a plurality of pressing rods which move up and down by the fluid pressure or electromagnetic force via a ball bearing, and swings stepwise at a predetermined swing angle, but an elastic body provided at the tip of the pressing rod Is formed so that it cannot rotate.
The apex of each pitch surface of the output-side oblique bevel gear and the center point of the ball bearing are arranged so as to coincide with each other, and the teeth of the input-side oblique bevel gear are rotated by the swinging motion of the input-side oblique bevel gear. The output side oblique bevel gear is sequentially engaged with the teeth of the output side oblique bevel gear, and the output side oblique bevel gear rotates by the number of teeth of the input side oblique bevel gear and the output side oblique bevel gear. Actuator. 6. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, the actuator comprising: an input side bevel gear and an output side bevel gear each having a different number of teeth; In a state where the teeth of the respective oblique bevel gears are engaged with each other, the gears are arranged so that the tooth surfaces of the respective oblique bevel gears are separated from each other on the opposite side, and the input is performed. The oblique bevel gear is
It is pressed by a plurality of pressing rods which move up and down by the fluid pressure or the electromagnetic force via the ball bearing, and swings stepwise at a predetermined swing angle, but a spherical tip provided at the tip of the pressing rod. Further, it is formed so that it cannot rotate, and furthermore, it is arranged so that the apex of each pitch surface of the input / output side bevel gear and the center point of the ball bearing coincide, and the input bevel bevel gear is in a neutral state. In a state in which the spherical tip is in contact with the input-side oblique bevel gear, the center point of the spherical tip and the center point of the ball bearing are disposed so as to be horizontally aligned with each other, The teeth of the input-side oblique bevel gear sequentially mesh with the teeth of the output-side oblique bevel gear due to the swinging motion of the bevel gear, and the tooth number difference between the input-side oblique bevel gear and the output-side oblique bevel gear. Only the output side oblique bevel gear rotates on its own Eta. 7. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, the actuator comprising an input / output bevel gear and a fixed bevel gear having different numbers of teeth. In a state where the teeth of each of the oblique bevel gears mesh with each other in a part, at the opposite side, the tooth faces of the respective oblique bevel gears are arranged so as to be separated from each other, and The input / output bevel gear is pressed by a plurality of pressing rods that move up and down by the fluid pressure or the electromagnetic force through the universal joint, and swings stepwise at a predetermined swing angle and rotates. The input / output oblique gear and the fixed oblique bevel gear are arranged so that the apexes of the respective pitch surfaces thereof coincide with the center point of the universal joint. The input and output by the swinging motion of the bevel gear The teeth of the oblique bevel gear sequentially mesh with the teeth of the fixed oblique bevel gear, and the input / output oblique bevel gear rotates by the difference in the number of teeth between the input / output bevel gear and the fixed oblique bevel gear. An actuator characterized in that: 8. An actuator driven by a fluid pressure or an electromagnetic force controlled by a control means, the actuator comprising: an input side bevel gear and an output side bevel gear each having a different number of teeth; In a state where the teeth of the respective oblique bevel gears are engaged with each other, the gears are arranged so that the tooth surfaces of the respective oblique bevel gears are separated from each other on the opposite side, and the input is performed. The oblique bevel gear is
It is pressed by a plurality of pressing rods that move up and down by the fluid pressure or the electromagnetic force through the universal joint and swings stepwise at a predetermined swing angle, but is formed so as not to rotate by the universal joint, A vertex of each pitch surface of the input / output side bevel gear and a center point of the universal joint are arranged so as to coincide with each other, and the input side oblique bevel gear is swung by the input side oblique bevel gear. Teeth of the output side oblique bevel gear mesh with the teeth of the output side bevel gear sequentially,
An actuator, wherein the output-side oblique bevel gear rotates by the difference in the number of teeth between the input-side oblique bevel gear and the output-side oblique bevel gear. 9. A pressurizing means, comprising: a fluid for pressing each piston; a supply of the fluid; and a branch for supplying a pressing force of the fluid from the supply of fluid to the piston. The actuator of claim 1 comprising: 10. An actuator according to claim 1, wherein said control means controls said branch means so that a fluid acts on each piston sequentially. 11. The actuator according to claim 1, wherein the pressing force applying means is a solenoid for pressing the plunger. 12. The actuator according to claim 1, wherein the control means is an electromagnetic pulse control section for branching and supplying a pressing force by a solenoid to each plunger. 13. A ball bearing is provided at the center of oscillation of the input-side oblique bevel gear, and the ball bearing is sandwiched between a support portion provided on the bottom surface of the housing and a support portion provided on the output-side shaft portion. The actuator according to any one of claims 2, 4 to 6, wherein the output side shaft portion is supported on the housing by a radial bearing.