JP2002314092A5 - - Google Patents

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Publication number
JP2002314092A5
JP2002314092A5 JP2002032946A JP2002032946A JP2002314092A5 JP 2002314092 A5 JP2002314092 A5 JP 2002314092A5 JP 2002032946 A JP2002032946 A JP 2002032946A JP 2002032946 A JP2002032946 A JP 2002032946A JP 2002314092 A5 JP2002314092 A5 JP 2002314092A5
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JP
Japan
Prior art keywords
semiconductor
semiconductor device
film
rare gas
gas element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002032946A
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English (en)
Japanese (ja)
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JP2002314092A (ja
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Publication date
Application filed filed Critical
Priority to JP2002032946A priority Critical patent/JP2002314092A/ja
Priority claimed from JP2002032946A external-priority patent/JP2002314092A/ja
Publication of JP2002314092A publication Critical patent/JP2002314092A/ja
Publication of JP2002314092A5 publication Critical patent/JP2002314092A5/ja
Withdrawn legal-status Critical Current

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JP2002032946A 2001-02-09 2002-02-08 半導体装置およびその作製方法 Withdrawn JP2002314092A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002032946A JP2002314092A (ja) 2001-02-09 2002-02-08 半導体装置およびその作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-34294 2001-02-09
JP2001034294 2001-02-09
JP2002032946A JP2002314092A (ja) 2001-02-09 2002-02-08 半導体装置およびその作製方法

Publications (2)

Publication Number Publication Date
JP2002314092A JP2002314092A (ja) 2002-10-25
JP2002314092A5 true JP2002314092A5 (cg-RX-API-DMAC7.html) 2005-08-18

Family

ID=26609241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002032946A Withdrawn JP2002314092A (ja) 2001-02-09 2002-02-08 半導体装置およびその作製方法

Country Status (1)

Country Link
JP (1) JP2002314092A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100975523B1 (ko) * 2003-12-30 2010-08-13 삼성전자주식회사 조절된 이동도를 가지는 반도체 소자 및 이를 적용한 ｔｆｔ

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