JP2002313853A5 - - Google Patents
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- Publication number
- JP2002313853A5 JP2002313853A5 JP2001114274A JP2001114274A JP2002313853A5 JP 2002313853 A5 JP2002313853 A5 JP 2002313853A5 JP 2001114274 A JP2001114274 A JP 2001114274A JP 2001114274 A JP2001114274 A JP 2001114274A JP 2002313853 A5 JP2002313853 A5 JP 2002313853A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001114274A JP2002313853A (ja) | 2001-04-12 | 2001-04-12 | 半導体装置のウェハーマーキング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001114274A JP2002313853A (ja) | 2001-04-12 | 2001-04-12 | 半導体装置のウェハーマーキング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002313853A JP2002313853A (ja) | 2002-10-25 |
JP2002313853A5 true JP2002313853A5 (ja) | 2008-05-08 |
Family
ID=18965371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001114274A Withdrawn JP2002313853A (ja) | 2001-04-12 | 2001-04-12 | 半導体装置のウェハーマーキング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002313853A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7119233B2 (ja) * | 2019-08-07 | 2022-08-16 | 株式会社カネカ | 大判成膜基板およびその製造方法、分割成膜基板およびその製造方法、分割成膜基板の生産管理方法および生産管理システム |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62281438A (ja) * | 1986-05-30 | 1987-12-07 | Yokogawa Electric Corp | 集積回路の製造方法 |
JPS63133641A (ja) * | 1986-11-26 | 1988-06-06 | Matsushita Electronics Corp | 不良認識マ−クの付着方法 |
JPH01154527A (ja) * | 1987-12-11 | 1989-06-16 | Nec Corp | マーキング装置 |
JPH01165135A (ja) * | 1987-12-22 | 1989-06-29 | Mitsubishi Electric Corp | ウエハプローバ装置 |
JPH05235120A (ja) * | 1992-02-24 | 1993-09-10 | Nec Corp | 半導体装置におけるウェハーマーキング装置 |
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2001
- 2001-04-12 JP JP2001114274A patent/JP2002313853A/ja not_active Withdrawn