JP2002313853A5 - - Google Patents

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Publication number
JP2002313853A5
JP2002313853A5 JP2001114274A JP2001114274A JP2002313853A5 JP 2002313853 A5 JP2002313853 A5 JP 2002313853A5 JP 2001114274 A JP2001114274 A JP 2001114274A JP 2001114274 A JP2001114274 A JP 2001114274A JP 2002313853 A5 JP2002313853 A5 JP 2002313853A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001114274A
Other versions
JP2002313853A (ja
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Publication date
Application filed filed Critical
Priority to JP2001114274A priority Critical patent/JP2002313853A/ja
Priority claimed from JP2001114274A external-priority patent/JP2002313853A/ja
Publication of JP2002313853A publication Critical patent/JP2002313853A/ja
Publication of JP2002313853A5 publication Critical patent/JP2002313853A5/ja
Withdrawn legal-status Critical Current

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JP2001114274A 2001-04-12 2001-04-12 半導体装置のウェハーマーキング装置 Withdrawn JP2002313853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001114274A JP2002313853A (ja) 2001-04-12 2001-04-12 半導体装置のウェハーマーキング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001114274A JP2002313853A (ja) 2001-04-12 2001-04-12 半導体装置のウェハーマーキング装置

Publications (2)

Publication Number Publication Date
JP2002313853A JP2002313853A (ja) 2002-10-25
JP2002313853A5 true JP2002313853A5 (ja) 2008-05-08

Family

ID=18965371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001114274A Withdrawn JP2002313853A (ja) 2001-04-12 2001-04-12 半導体装置のウェハーマーキング装置

Country Status (1)

Country Link
JP (1) JP2002313853A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7119233B2 (ja) * 2019-08-07 2022-08-16 株式会社カネカ 大判成膜基板およびその製造方法、分割成膜基板およびその製造方法、分割成膜基板の生産管理方法および生産管理システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281438A (ja) * 1986-05-30 1987-12-07 Yokogawa Electric Corp 集積回路の製造方法
JPS63133641A (ja) * 1986-11-26 1988-06-06 Matsushita Electronics Corp 不良認識マ−クの付着方法
JPH01154527A (ja) * 1987-12-11 1989-06-16 Nec Corp マーキング装置
JPH01165135A (ja) * 1987-12-22 1989-06-29 Mitsubishi Electric Corp ウエハプローバ装置
JPH05235120A (ja) * 1992-02-24 1993-09-10 Nec Corp 半導体装置におけるウェハーマーキング装置

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