JP2002305189A - Vertical heat treatment apparatus and method for forcible air cooling - Google Patents
Vertical heat treatment apparatus and method for forcible air coolingInfo
- Publication number
- JP2002305189A JP2002305189A JP2001107750A JP2001107750A JP2002305189A JP 2002305189 A JP2002305189 A JP 2002305189A JP 2001107750 A JP2001107750 A JP 2001107750A JP 2001107750 A JP2001107750 A JP 2001107750A JP 2002305189 A JP2002305189 A JP 2002305189A
- Authority
- JP
- Japan
- Prior art keywords
- blower
- heater
- air
- exhaust
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、縦型熱処理装置お
よびその強制空冷方法に関する。[0001] The present invention relates to a vertical heat treatment apparatus and a forced air cooling method thereof.
【０００２】[0002]
【従来の技術】半導体デバイスの製造においては、被処
理体例えば半導体ウエハに、酸化、拡散、ＣＶＤ（Chem
ical Vapor Deposition）などの処理を行うために、
各種の熱処理装置が用いられている。そして、その一つ
として、一度に多数枚の被処理体の熱処理が可能な縦型
熱処理装置が知られている。2. Description of the Related Art In the manufacture of semiconductor devices, an object to be processed, for example, a semiconductor wafer, is oxidized, diffused, and CVD (Chemical).
ical Vapor Deposition)
Various heat treatment apparatuses are used. As one of them, a vertical heat treatment apparatus that can heat-treat a large number of objects to be processed at one time is known.
【０００３】この縦型熱処理装置は、複数枚の被処理体
を下方から収容する縦型の処理容器を有し、この処理容
器の外側にはこれを取り囲むヒータが設置されている。
このような縦型熱処理装置においては、熱処理中または
熱処理後に高温のヒータ内を強制的に空冷（空気冷却）
するために、ヒータの下部にヒータ内へ空気を送り込む
送風部を設け、ヒータの上部に排気口を設け、該排気口
に排気ダクトを接続するとともに排気口を開閉するシャ
ッターを設けたものが提案されている。シャッターは排
気ダクトの外部に設けたエアシリンダによって開閉駆動
されるようになっている。This vertical heat treatment apparatus has a vertical processing container for accommodating a plurality of objects to be processed from below, and a heater surrounding the processing container is provided outside the processing container.
In such a vertical heat treatment apparatus, the inside of the high-temperature heater is forcibly air-cooled (air-cooled) during or after the heat treatment.
In order to do so, it is proposed to provide a blower that blows air into the heater below the heater, provide an exhaust port above the heater, connect an exhaust duct to the exhaust port, and provide a shutter that opens and closes the exhaust port. Have been. The shutter is opened and closed by an air cylinder provided outside the exhaust duct.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前述し
た縦型熱処理装置においては、排気ダクトによりヒータ
内の雰囲気を吸い出しているものの、送風によりヒータ
内の圧力が陽圧（大気圧よりも高い）になった場合、シ
ャッターの外部動力が貫通している隙間からヒータの断
熱材から発生するごみ（パーティクル）やヒータ内の熱
気が吹き出す場合があり、ごみや熱気を装置外およびク
リーンルーム外へ排出して装置内およびクリーンルーム
内の雰囲気を奇麗に保つという排気ダクトの効果が減衰
されてしまう問題があった。However, in the above-described vertical heat treatment apparatus, although the atmosphere in the heater is sucked out by the exhaust duct, the pressure in the heater becomes positive pressure (higher than the atmospheric pressure) due to the blowing air. If this happens, dust (particles) generated from the heat insulating material of the heater or hot air inside the heater may blow out from the gap through which the external power of the shutter passes, and the dust and hot air may be discharged outside the device and outside the clean room. There has been a problem that the effect of the exhaust duct, which keeps the atmosphere in the apparatus and the clean room clean, is attenuated.
【０００５】図６は従来の縦型熱処理装置における強制
空冷時のごみの発生量の変化を示すグラフ図である。こ
の図は、横軸に強制空冷時の時間を、縦軸に１μｍ以上
のごみの個数を示している。この図から、強制空冷の開
始時（ＯＮ）にごみが少し発生し、強制空冷の終了時
（ＯＦＦ）にごみが多く発生していることが解かる。FIG. 6 is a graph showing changes in the amount of dust generated during forced air cooling in a conventional vertical heat treatment apparatus. In this figure, the horizontal axis indicates the time during forced air cooling, and the vertical axis indicates the number of dust particles of 1 μm or more. From this figure, it can be seen that a small amount of dust is generated at the start of forced air cooling (ON) and a large amount of dust is generated at the end of forced air cooling (OFF).
【０００６】本発明は、前記事情を考慮してなされたも
ので、強制空冷時にごみや熱気の吹き出しを防止するこ
とができる縦型熱処理装置およびその強制空冷方法を提
供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a vertical heat treatment apparatus and a forced air cooling method thereof capable of preventing dust and hot air from being blown out during forced air cooling.
【０００７】[0007]
【課題を解決するための手段】本発明のうち、請求項１
の発明は、複数枚の被処理体を下方から収容する縦型の
処理容器の外側にこれを取り囲むヒータを設置し、該ヒ
ータの下部にヒータ内へ冷却用の空気を送り込む送風部
を設け、ヒータの上部に排気口を設け、該排気口に排気
ダクトを接続した縦型熱処理装置において、前記排気口
にこれを送風圧力により自動的に開閉する弁蓋を設けた
ことを特徴とする。Means for Solving the Problems In the present invention, claim 1 is provided.
According to the invention, a heater is provided outside a vertical processing container that accommodates a plurality of objects to be processed from below, and a blower that feeds cooling air into the heater is provided below the heater, In a vertical heat treatment apparatus having an exhaust port provided above a heater and an exhaust duct connected to the exhaust port, a valve lid is provided at the exhaust port for automatically opening and closing the exhaust port by blowing pressure.
【０００８】請求項２の発明は、複数枚の被処理体を下
方から収容する縦型の処理容器の外側にこれを取り囲む
ヒータを設置し、該ヒータの下部にヒータ内へ冷却用の
空気を送り込む送風部を設け、ヒータの上部に排気口を
設け、該排気口に排気ダクトを接続するとともに排気口
を開閉するシャッターを設けた縦型熱処理装置におい
て、前記ヒータ内の上部に設けられた圧力センサと、該
圧力センサによる検出圧に基いてヒータ内が微陰圧とな
るよう前記送風部を制御する制御部とを備えたことを特
徴とする。According to a second aspect of the present invention, a heater is provided outside a vertical processing container for accommodating a plurality of objects to be processed from below, and cooling air is supplied into the heater below the heater. In a vertical heat treatment apparatus provided with an air blowing section for feeding air, an exhaust port provided at an upper portion of the heater, an exhaust duct connected to the exhaust port, and a shutter for opening and closing the exhaust port, a pressure provided at an upper portion in the heater is provided. A sensor, and a control unit for controlling the blower unit so that the inside of the heater has a slight negative pressure based on the pressure detected by the pressure sensor.
【０００９】請求項３の発明は、請求項１または２記載
の縦型熱処理装置において、前記送風部が、ヒータの下
部に設けられた環状の送風ダクトと、該送風ダクトに空
気を送り込む送風ブロワと、送風ダクトの上部にその周
方向に適宜間隔で突設された送風ノズルとを備え、送風
ノズルの幾つかはヒータ内の下部を冷却すべく短く形成
されていることを特徴とする。According to a third aspect of the present invention, in the vertical heat treatment apparatus according to the first or second aspect, the blower section includes an annular blower duct provided below a heater, and a blower blower for blowing air into the blower duct. And a blower nozzle protruding from an upper part of the blower duct at an appropriate interval in a circumferential direction thereof, and some of the blower nozzles are formed short to cool a lower part in the heater.
【００１０】請求項４の発明は、複数枚の被処理体を下
方から収容する縦型の処理容器の外側に設置されたヒー
タの上部の排気口のシャッターを開け、排気ブロワによ
り排気するとともにヒータ内に下部から送風ブロワによ
り空気を送り込んでヒータ内を強制的に空冷する方法に
おいて、強制空冷開始時に先ず前記シャッターを開け、
次に排気ブロワと送風ブロワを順に起動し、ヒータ内の
圧力が微陰圧になるように送風ブロワを制御し、ヒータ
内の温度降下に伴う陰圧度の増大を抑えるべく送風ブロ
ワの送風量を増大させることを特徴とする。According to a fourth aspect of the present invention, a shutter is opened at an upper exhaust port of a heater installed outside a vertical processing container for accommodating a plurality of objects to be processed from below, and exhaust is performed by an exhaust blower. In the method of forcibly air-cooling the inside of the heater by sending air from the lower part by a blower blower, at the start of forced air-cooling, first open the shutter,
Next, the exhaust blower and the blower are started in order, the blower is controlled so that the pressure in the heater becomes slightly negative pressure, and the amount of air blown by the blower is controlled to suppress an increase in the degree of negative pressure due to a temperature drop in the heater. Is increased.
【００１１】請求項５の発明は、複数枚の被処理体を下
方から収容する縦型の処理容器の外側に設置されたヒー
タの上部の排気口のシャッターを開け、排気ブロワによ
り排気するとともにヒータ内に下部から送風ブロワによ
り空気を送り込んでヒータ内を強制的に空冷する方法に
おいて、強制空冷終了時に先ず送風ブロワの電源と排気
ブロワの電源を順に切り、前記送風ブロワの電源を切っ
てから送風ブロワの回転が停止するまでの所定時間経過
後に前記シャッターを閉めることを特徴とする。According to a fifth aspect of the present invention, a shutter at an upper exhaust port of a heater installed outside a vertical processing container for accommodating a plurality of workpieces from below is opened, and exhaust is performed by an exhaust blower. In the method of forcibly cooling the inside of the heater by sending air from the lower part by a blower blower, at the end of forced air cooling, first turn off the power of the blower blower and the power of the exhaust blower in order, then turn off the power of the blower blower The shutter is closed after a predetermined time elapses until the rotation of the blower stops.
【００１２】[0012]
【発明の実施の形態】以下に、本発明の実施の形態を添
付図面に基いて詳述する。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
【００１３】先ず、第１の実施の形態を示す図１におい
て、１は縦型熱処理装置で、この縦型熱処理装置１は複
数枚の被処理体例えば半導体ウエハｗを下方から収容し
て所定の熱処理例えばＣＶＤ処理を施す縦型の処理容器
（プロセスチューブ）２を備えている。この処理容器２
は、耐熱性および耐食性を有する材料例えば石英ガラス
により形成されている。First, in FIG. 1 showing the first embodiment, reference numeral 1 denotes a vertical heat treatment apparatus. This vertical heat treatment apparatus 1 accommodates a plurality of objects to be processed, for example, semiconductor wafers w from below and performs a predetermined process. A vertical processing container (process tube) 2 for performing a heat treatment such as a CVD process is provided. This processing container 2
Is formed of a material having heat resistance and corrosion resistance, for example, quartz glass.
【００１４】処理容器２は、図示例では、内管２ａと外
管２ｂの二重管構造になっている。内管２ａは上端およ
び下端が開放されている。外管２ｂは、上端が閉塞さ
れ、下端が開放されている。なお、処理容器２は、外管
２ｂのみからなっていてもよく、この場合、外管２ｂの
頂部に排気部が設けられていてもよい。The processing vessel 2 has a double pipe structure of an inner pipe 2a and an outer pipe 2b in the illustrated example. The upper end and the lower end of the inner tube 2a are open. The outer tube 2b has an upper end closed and a lower end open. The processing vessel 2 may be composed of only the outer tube 2b, and in this case, an exhaust portion may be provided at the top of the outer tube 2b.
【００１５】処理容器２の下部には、本実施の形態で
は、処理容器２内に処理ガスや不活性ガスを導入するガ
ス導入部３と、処理容器２内を排気する排気部４とを有
する短円筒状のマニホールド５が気密に接続されてい
る。このマニホールド５は、耐熱性および耐食性を有す
る材料例えばステンレス鋼により形成されている。マニ
ホールド５の内側には、内管２ａを支持するための内管
支持部８が設けられている。In the present embodiment, a gas introducing section 3 for introducing a processing gas or an inert gas into the processing vessel 2 and an exhaust section 4 for exhausting the inside of the processing vessel 2 are provided below the processing vessel 2. A short cylindrical manifold 5 is airtightly connected. The manifold 5 is formed of a material having heat resistance and corrosion resistance, for example, stainless steel. An inner pipe support 8 for supporting the inner pipe 2a is provided inside the manifold 5.
【００１６】ガス導入部３には、ガス源に通じるガス供
給系の配管が接続される。排気部４には、真空ポンプお
よび圧力制御機構を有する排気系が接続され、処理容器
２内を所定の処理圧力に制御し得るようになっている。
この処理圧力に制御された状態で、ガス導入部３から導
入された処理ガスが処理容器２の内管２ａ内を上昇して
ウエハｗの所定の熱処理に供された後、内管２ａと外管
２ｂとの間の環状通路を下降して排気部４から排気され
るようになっている。The gas introduction unit 3 is connected to a gas supply system pipe leading to a gas source. An exhaust system having a vacuum pump and a pressure control mechanism is connected to the exhaust unit 4 so that the inside of the processing container 2 can be controlled to a predetermined processing pressure.
With the processing pressure controlled at this processing pressure, the processing gas introduced from the gas introduction unit 3 rises inside the inner tube 2a of the processing container 2 and is subjected to a predetermined heat treatment of the wafer w. The gas is exhausted from the exhaust part 4 by descending along the annular passage between the pipe 2b.
【００１７】前記処理容器２内に複数枚例えば１５０枚
程度の半導体ウエハｗを高さ方向に所定間隔で搭載保持
するために、ウエハｗは保持具である例えば石英ガラス
製のボート６に保持され、このボート６はマニホールド
５の下端開口部（炉口）を密閉する例えばステンレス鋼
製の蓋体７の上部に炉口断熱手段である保温筒８を介し
て載置されている。前記処理容器２の下方には、蓋体７
を昇降させて蓋体７の開閉および処理容器２に対するボ
ート６の搬入搬出を行うための昇降機構９が設けられて
いると共にその作業領域であるローディングエリアが設
けられている。In order to mount and hold a plurality of, for example, about 150, semiconductor wafers w in the processing vessel 2 at predetermined intervals in the height direction, the wafers w are held by a holding tool, for example, a boat 6 made of quartz glass. The boat 6 is placed on an upper portion of a lid 7 made of, for example, stainless steel which seals a lower end opening (furnace port) of the manifold 5 via a heat retaining tube 8 which is a furnace port heat insulating means. A lid 7 is provided below the processing container 2.
A lifting mechanism 9 is provided for raising and lowering the lid 7 to open and close the lid 7 and to carry the boat 6 in and out of the processing container 2, and a loading area as a work area thereof is provided.
【００１８】前記マニホールド５は、図示しないベース
プレートの下部に保持されており、このベースプレート
の上部には、処理容器２の周囲を取り囲み処理容器２内
のウエハｗを所定の熱処理温度に加熱昇温するためのヒ
ータ１０が設置されている。このヒータ１０は、処理容
器２の周囲を取囲む筒状（円筒状）の断熱材１１を備
え、この筒状断熱材１１の内周に抵抗発熱線１２が螺旋
状または蛇行状に配設されている。前記ヒータ１０は、
高さ方向に複数の領域に分けて温度制御が可能に構成さ
れている。ヒータ１０には領域毎に温度を検知する図示
しない温度センサが設けられている。The manifold 5 is held at a lower portion of a base plate (not shown). The upper portion of the base plate surrounds the processing vessel 2 and heats the wafer w in the processing vessel 2 to a predetermined heat treatment temperature. Heater 10 is provided. The heater 10 includes a cylindrical (cylindrical) heat insulating material 11 surrounding the periphery of the processing container 2, and a resistance heating wire 12 is spirally or meanderingly arranged on the inner periphery of the cylindrical heat insulating material 11. ing. The heater 10 includes:
The temperature is divided into a plurality of regions in the height direction and the temperature can be controlled. The heater 10 is provided with a temperature sensor (not shown) for detecting a temperature for each area.
【００１９】また、ヒータ１０の筒状断熱材１１の上部
には、ヒータ１０の頂部断熱材である円板状の板状断熱
材１３が被せられ（載置され）ている。ヒータ１０本体
の筒状断熱材１１およびヒータ１０頂部の板状断熱材１
３は、所定の断熱材料例えばシリカ（ＳｉＯ2）および
アルミナ（Ａｌ2Ｏ3）の混合材料により形成されてい
る。On top of the cylindrical heat insulating material 11 of the heater 10, a disc-shaped plate heat insulating material 13 as a top heat insulating material of the heater 10 is covered (placed). The tubular heat insulating material 11 of the heater 10 main body and the plate heat insulating material 1 at the top of the heater 10
3 is formed of a predetermined heat insulating material, for example, a mixed material of silica (SiO 2 ) and alumina (Al 2 O 3 ).
【００２０】前記ヒータ１０の筒状断熱材１１の外側に
は、金属製の円筒状のアウターシェル１４が設けられ、
このアウターシェル１４には図示しない水冷ジャケット
が設けられている。アウターシェル１４の上部には、板
状断熱材１３の上方を覆う金属製の天板１５が取付けら
れている。A cylindrical outer shell 14 made of metal is provided outside the cylindrical heat insulating material 11 of the heater 10.
The outer shell 14 is provided with a water cooling jacket (not shown). A metal top plate 15 that covers the upper part of the plate-like heat insulating material 13 is attached to an upper portion of the outer shell 14.
【００２１】熱処理中や熱処理終了後の急速降温を可能
とすべくヒータ１０内を強制的に空冷するために、ヒー
タ１０の下部にはヒータ１０内へ冷却用の空気を送り込
む送風部２０が設けられ、ヒータ１０の上部の中央部に
は板状断熱材１３および天板１５を貫通する排気口２１
が設けられ、この排気口２１には排気ブロワ２２を備え
た排気ダクト２３が接続されている。In order to forcibly cool the inside of the heater 10 during the heat treatment or after the completion of the heat treatment, a blower 20 for blowing cooling air into the heater 10 is provided below the heater 10. An exhaust port 21 penetrating through the plate-like heat insulating material 13 and the top plate 15 is provided at a central portion of an upper portion of the heater 10.
The exhaust port 21 is connected to an exhaust duct 23 having an exhaust blower 22.
【００２２】前記送風部２０は、ヒータ１０の下部に設
けられた環状の送風ダクト２４と、この送風ダクト２４
に空気を送り込む送風ブロワ２５と、送風ダクト２４の
上部にその周方向に適宜間隔で突設された送風ノズル２
６とから主に構成されている。この場合、図３にも示す
ように、複数例えば１２個の送風ノズル２６のうち幾つ
か例えば６個はヒータ１０内の下部を冷却すべく長さが
短く形成されている。これら長さの長いノズル２６ａ
と、長さの短いノズル２６ｂは、周方向に交互に配置さ
れていることが好ましい。The blower section 20 includes an annular blower duct 24 provided below the heater 10,
Blower 25 for feeding air to the air blower nozzle 2 and a blower nozzle 2 protruding from the upper part of the blower duct 24 in the circumferential direction at appropriate intervals.
6 mainly. In this case, as shown in FIG. 3, some, for example, six of the plural, for example, twelve blowing nozzles 26 are formed to have a short length to cool the lower part in the heater 10. These long nozzles 26a
And the short nozzles 26b are preferably arranged alternately in the circumferential direction.
【００２３】そして、ヒータ１０の上部に設けられた前
記排気口２１の上部には、この排気口２１を送風圧力に
よって自動的に開閉する弁蓋２７が設けられている。こ
の弁蓋２７は、例えばＡｌ２Ｏ３等のセラミックスによ
り形成されていることが好ましい。弁蓋２７は排気口２
１の上面を塞ぐべく排気口２１よりも大きく形成されて
おり、一端がヒンジ２８を介して天板１５に垂直回動可
能に支持されている。弁蓋２７を取り囲む排気ダクト２
３の周囲には断熱材が設けられていることが好ましい。A valve cover 27 for automatically opening and closing the exhaust port 21 by blowing pressure is provided above the exhaust port 21 provided above the heater 10. This valve lid 27 is preferably formed of ceramics such as Al 2 O 3 , for example. The valve lid 27 is the exhaust port 2
1 is formed to be larger than the exhaust port 21 so as to close the upper surface, and one end is supported by the top plate 15 via a hinge 28 so as to be vertically rotatable. Exhaust duct 2 surrounding valve cover 27
It is preferable that a heat insulating material is provided around 3.
【００２４】弁蓋２７は、通常時には自重で排気口２１
を塞いだ閉状態にあり、強制空冷時には送風部２０から
の送風圧力と排気ダクト２３の排気圧力との圧力差およ
び弁蓋２７の重さとのバランスにより自動的に上方に押
し上げられて開閉されるようになっている。特に、エア
シリンダ等外部の動力を用いずに排気口２１の弁蓋２７
を自動開閉できるため、排気ダクト２３には外部動力貫
通用の隙間が形成されたおらず、排気ダクト２３は排気
口２１に気密に接続されている。この場合、排気ダクト
２３は、ヒータ１０の上下方向の熱膨張収縮を吸収し得
る例えば蛇腹等の接続構造が採られていることが好まし
い。Normally, the valve lid 27 is under its own weight and
In the forced air cooling, the air is automatically pushed upward by the balance between the pressure difference between the air blowing pressure from the air blowing unit 20 and the exhaust pressure of the exhaust duct 23 and the weight of the valve cover 27 to be opened and closed. It has become. In particular, the valve cover 27 of the exhaust port 21 can be used without using external power such as an air cylinder.
Can be automatically opened and closed, so that a gap for external power penetration is not formed in the exhaust duct 23, and the exhaust duct 23 is airtightly connected to the exhaust port 21. In this case, it is preferable that the exhaust duct 23 has a connection structure such as a bellows that can absorb the thermal expansion and contraction of the heater 10 in the vertical direction.
【００２５】次に、以上の構成からなる縦型熱処理装置
の作用を述べる。ローディングエリアにおいてボート６
へのウエハｗの移載が終了すると、昇降機構９による蓋
体７の上昇によってボート６を保温筒８と共に処理容器
２内にその下端開口（マニホールド５の下端開口部）か
ら搬入し、その開口を蓋体７で気密に閉塞する。Next, the operation of the vertical heat treatment apparatus having the above configuration will be described. Boat 6 in loading area
When the transfer of the wafer w onto the wafer is completed, the boat 6 is carried into the processing vessel 2 together with the heat retaining cylinder 8 from the lower end opening thereof (the lower end opening of the manifold 5) by raising the lid 7 by the elevating mechanism 9. Is hermetically closed by the lid 7.
【００２６】そして、処理容器２内を、排気部４からの
排気系による減圧排気により所定の圧力ないし真空度に
制御すると共にヒータ１０により所定の処理温度に制御
し、ガス導入部３より処理ガスを処理容器２内に導入し
てウエハｗに所定の熱処理例えばＣＶＤ処理を開始す
る。The inside of the processing vessel 2 is controlled to a predetermined pressure or degree of vacuum by depressurizing and exhausting the exhaust gas from an exhaust unit 4, and is controlled to a predetermined processing temperature by a heater 10. Is introduced into the processing container 2 to start a predetermined heat treatment, for example, a CVD process on the wafer w.
【００２７】この熱処理中あるいは熱処理終了後にヒー
タ１０内を強制空冷を行ない、熱処理終了後は処理ガス
の導入を停止して不活性ガスの導入により処理容器２内
をパージし、蓋体７を下降させて処理容器２内を開放す
ると共にボート６をローディングエリアに搬出すればよ
い。During or after the heat treatment, the inside of the heater 10 is forcibly air-cooled. After the heat treatment, the introduction of the processing gas is stopped, the inside of the processing vessel 2 is purged by introducing an inert gas, and the lid 7 is lowered. Then, the processing vessel 2 may be opened, and the boat 6 may be carried out to the loading area.
【００２８】前記強制空冷を行なう場合には、ヒータ１
０の電源を切り、先ず排気ブロワ２２の電源を入れて排
気ブロワ２２を起動し、次に送風ブロワ２５の電源を入
れて送風ブロワ２５を起動する。これにより、排気口２
１を塞いで閉状態にある弁蓋２７の上面には排気ダクト
２３内の陰圧が作用し、弁蓋２７の下面には送風ダクト
２４の送風ノズル２６から吹き込まれる空気によるヒー
タ１０内の陽圧が作用するため、その送風圧力具体的に
は弁蓋２７の上下面の差圧と蓋体２７の自重とのバラン
スにより弁蓋２７が上方へ押し上げられて所定の開度で
開放される。これにより、ヒータ１０内の雰囲気が排気
口２１から排気ダクト２３へ排気され、ヒータ１０内が
強制空冷されることになる。When performing the forced air cooling, the heater 1
0 is turned off, the exhaust blower 22 is first turned on to start the exhaust blower 22, and then the blower blower 25 is turned on to start the blower blower 25. Thereby, the exhaust port 2
A negative pressure in the exhaust duct 23 acts on the upper surface of the valve lid 27 in a closed state by closing the valve 1, and a positive pressure in the heater 10 due to air blown from the ventilation nozzle 26 of the ventilation duct 24 acts on the lower surface of the valve lid 27. Since the pressure acts, the valve cover 27 is pushed upward by a balance between the blowing pressure, specifically, the differential pressure between the upper and lower surfaces of the valve cover 27 and the own weight of the cover 27, and is opened at a predetermined opening degree. Thus, the atmosphere in the heater 10 is exhausted from the exhaust port 21 to the exhaust duct 23, and the inside of the heater 10 is forcibly air-cooled.
【００２９】強制空冷を終了する場合には、先ず送風ブ
ロワ２５の電源を切り、次に排気ブロワ２２の電源を切
れば良く、これにより弁蓋２７には圧力差が作用しなく
なるため、弁蓋２７が自重で降下して排気口２１を自動
的に塞ぐ。ヒータ１０の昇温加熱時には、弁蓋２７が排
気口２１を塞いでいることにより排気口２１からのヒー
タ１０内の熱の逃げを防止することができる。When the forced air cooling is to be terminated, the power supply to the blower blower 25 must be turned off first, and then the power supply to the exhaust blower 22 needs to be turned off. 27 descends by its own weight and automatically closes the exhaust port 21. At the time of heating and heating of the heater 10, the escape of heat in the heater 10 from the exhaust port 21 can be prevented by closing the exhaust port 21 with the valve lid 27.
【００３０】このように、前記排気口２１にこれを送風
圧力により自動的に開閉する弁蓋２７を設けているた
め、エアシリンダ等外部の動力を用いずに排気口２１の
弁蓋２７を自動開閉でき、外部動力貫通用の隙間が無い
ことから強制空冷時にヒータ１０内が陽圧になったとし
ても従来のように外部動力貫通用の隙間等からごみや熱
気が吹き出すようなことはなくなり、強制空冷時のごみ
や熱気の吹き出しを防止することができ、装置内および
クリーンルーム内の雰囲気を奇麗に保つことができる。
また、外部動力貫通用の隙間が無いことから、ヒータ外
上部の外気を吸い込むこと無くヒータ１０内の雰囲気を
十分に排気することができ、排気ダクト２３の効果を高
めることができる。As described above, since the exhaust port 21 is provided with the valve cover 27 for automatically opening and closing the exhaust port 21 by the blowing pressure, the valve cover 27 of the exhaust port 21 is automatically opened without using external power such as an air cylinder. It can be opened and closed, and since there is no gap for external power penetration, even if the inside of the heater 10 becomes positive pressure during forced air cooling, dust and hot air do not blow out from the gap for external power penetration as in the past, It is possible to prevent dust and hot air from being blown out during forced air cooling, so that the atmosphere in the apparatus and the clean room can be kept clean.
Further, since there is no gap for external power penetration, the atmosphere in the heater 10 can be sufficiently exhausted without sucking in the outside air outside the heater, and the effect of the exhaust duct 23 can be enhanced.
【００３１】ところで、ヒータ１０に設けられている図
示しない温度センサにより検知したヒータ１０の上部と
下部のヒータ温度の強制空冷時の温度変化は、例えば図
５に示す通りであり、保温筒８の存在によりヒータ１０
の下部の方が上部よりも降温時間が多くかかっている。
そこで、送風ダクト２４の上部にその周方向に適宜間隔
で突設された送風ノズル２６のうちの幾つかはヒータ１
０内の下部を冷却すべく短く形成されているため、ヒー
タ１０内の上部よりも降温時間の遅い下部の降温時間を
上部の降温時間と同程度に早めることができ、強制空冷
時間の短縮化が図れる。By the way, the temperature changes during the forced air cooling of the upper and lower heater temperatures of the heater 10 detected by a temperature sensor (not shown) provided in the heater 10 are as shown in FIG. The presence of heater 10
The lower part takes longer to cool down than the upper part.
Therefore, some of the blowing nozzles 26 protruding from the upper part of the blowing duct 24 at appropriate intervals in the circumferential direction thereof are provided with the heater 1.
Since the lower part of the heater 10 is formed to be short, the lower part of the heater 10 has a lower temperature lowering time than that of the upper part. Can be achieved.
【００３２】図２は本発明の第２の実施の形態を示す縦
型熱処理装置の断面図である。図２の実施の形態におい
て、図１の実施の形態と同一部分は同一参照符号を付し
て説明を省略する。図２の実施の形態においては、排気
口２１の上部にこれを開閉するシャッター３０が設けら
れている。アウターシェル１４の天板１５上には、前記
シャッター３０を開閉移動可能に収容する金属製のハウ
ジング３１が設けられ、このハウジング３１に排気ダク
ト２３が接続されている。FIG. 2 is a sectional view of a vertical heat treatment apparatus showing a second embodiment of the present invention. In the embodiment of FIG. 2, the same parts as those of the embodiment of FIG. In the embodiment of FIG. 2, a shutter 30 for opening and closing the exhaust port 21 is provided above the exhaust port 21. On the top plate 15 of the outer shell 14, there is provided a metal housing 31 which accommodates the shutter 30 so as to be able to open and close. The housing 31 is connected to the exhaust duct 23.
【００３３】前記シャッター３０は、排気口２１の上面
を水平方向にスライド開閉可能に覆う例えば石英製の蓋
体として形成されている。シャッター３０の上部には例
えば凹部が設けられ、この凹部に断熱材が充填されてい
ることが好ましい（図示省略）。前記シャッター３０に
は、ハウジング３１を貫通して外部からシャッター３０
を開閉駆動するためのエアシリンダ３２が連結されてい
る。ハウジング３１には、シャッター３０の外部動力貫
通用の隙間３３が存在する。The shutter 30 is formed as a lid made of, for example, quartz, which slidably opens and closes the upper surface of the exhaust port 21 in the horizontal direction. For example, a concave portion is provided in the upper portion of the shutter 30, and the concave portion is preferably filled with a heat insulating material (not shown). The shutter 30 is provided with a shutter 30 through the housing 31 from outside.
Is connected to an air cylinder 32 for opening / closing the air cylinder. The housing 31 has a gap 33 for external power penetration of the shutter 30.
【００３４】前記ヒータ１０内の上部には、強制空冷時
のヒータ１０内の圧力を検知するための圧力センサ３４
が設けられ、圧力センサ３４による検出圧に基いてヒー
タ１０内が微陰圧例えば大気圧−３０Ｐａとなるよう前
記送風部２０の送風ブロワ２５が制御部３５により制御
されるように構成されている。また、前記エアシリンダ
３２および排気ブロワ２２も前記制御部３５により制御
されるように構成されている。A pressure sensor 34 for detecting the pressure in the heater 10 during forced air cooling is provided above the heater 10.
The blower blower 25 of the blower unit 20 is controlled by the control unit 35 so that the inside of the heater 10 has a slight negative pressure, for example, an atmospheric pressure of −30 Pa, based on the pressure detected by the pressure sensor 34. . Further, the air cylinder 32 and the exhaust blower 22 are also configured to be controlled by the control unit 35.
【００３５】この場合、前記制御部３５は、強制空冷開
始時に先ず前記シャッター３０を開け、次に排気ブロワ
２２の電源と送風ブロワ２５の電源を順に入れてこれら
排気ブロワ２２と送風ブロワ２５を順に起動し、ヒータ
１０内の圧力を圧力センサ３４により検出してヒータ１
０内が微陰圧になるように送風ブロワ２５を制御し、ヒ
ータ１０内の温度降下に伴う陰圧度の増大を抑えるべく
送風ブロワ２５の送風量を増大させるように設定されて
いる。また、前記制御部３５は、強制空冷終了時に先ず
送風ブロワ２５の電源と排気ブロワ２２の電源を順に切
り、前記送風ブロワ２５の電源を切ってから送風ブロワ
２５の回転が停止するまでの所定時間経過後例えば１分
３０秒後に前記シャッター３０を閉めるように設定され
ている。In this case, the control unit 35 first opens the shutter 30 at the start of forced air cooling, then turns on the power of the exhaust blower 22 and the power of the blower blower 25 in order, and turns on the exhaust blower 22 and the blower blower 25 in order. Upon activation, the pressure in the heater 10 is detected by the pressure sensor 34 and the heater 1
The blower blower 25 is controlled so that the inside of the heater 10 has a slight negative pressure, and the amount of air blown by the blower blower 25 is increased to suppress an increase in the degree of negative pressure due to a temperature drop in the heater 10. Further, at the end of the forced air cooling, the control unit 35 first turns off the power of the blower blower 25 and the power of the exhaust blower 22 in order, and turns off the power of the blower blower 25 for a predetermined time from when the rotation of the blower blower 25 stops. For example, the shutter 30 is set to be closed one minute and thirty seconds after the lapse.
【００３６】次に、以上の構成からなる縦型熱処理装置
の作用および強制空冷方法について説明する。前記縦型
熱処理装置において、熱処理中または熱処理終了後にヒ
ータ１０内の強制空冷を行なう場合には、先ずヒータ１
０の電源を切り、シャッター３０を開ける。そして、排
気ブロワ２２の電源を入れて排気ブロワ２２を起動し、
次に送風ブロワ２５の電源を入れて送風ブロワ２５を起
動する。これにより、ヒータ１０内に室温の空気が送り
込まれると共にヒータ１０内の雰囲気が排気口２１から
排気ダクト２３に吸い出され、ヒータ１０内の強制空冷
が開始される。Next, the operation of the vertical heat treatment apparatus having the above configuration and a forced air cooling method will be described. In the vertical heat treatment apparatus, when performing forced air cooling in the heater 10 during or after the heat treatment, the heater 1
0 is turned off, and the shutter 30 is opened. Then, the power of the exhaust blower 22 is turned on and the exhaust blower 22 is started,
Next, the power of the blower blower 25 is turned on and the blower blower 25 is started. As a result, air at room temperature is sent into the heater 10 and the atmosphere in the heater 10 is sucked out from the exhaust port 21 into the exhaust duct 23, and forced air cooling in the heater 10 is started.
【００３７】そして、この強制空冷中、ヒータ１０内の
圧力が圧力センサ３４により検知されており、この圧力
センサ３４による検出圧に基いてヒータ１０内が微陰圧
の設定圧となるよう送風ブロワ２５が制御部３５により
制御されている。これにより、強制空冷時にヒータ１０
内が陽圧になるのが防止され、シャッター３０の外部動
力貫通用の隙間３３があったとしてもその隙間３３から
のごみや熱気の吹き出しを防止することができる。圧力
センサ３４がヒータ１０内の陽圧になり易い上部に配置
されているため、ヒータ１０内の圧力を精度良く検知す
ることができる。強制空冷を終了する場合には、先ず送
風ブロワ２５の電源を切り、次に排気ブロワ２２の電源
を切り、次にシャッター３０を閉じれば良い。During the forced air cooling, the pressure in the heater 10 is detected by the pressure sensor 34. Based on the pressure detected by the pressure sensor 34, the blower blower blows the inside of the heater 10 to a slight negative pressure. 25 is controlled by the control unit 35. As a result, the heater 10 can be used during forced air cooling.
The inside is prevented from becoming positive pressure, and even if there is a gap 33 for external power penetration of the shutter 30, it is possible to prevent dust and hot air from being blown out of the gap 33. Since the pressure sensor 34 is disposed on the upper portion of the heater 10 where the positive pressure easily occurs, the pressure in the heater 10 can be accurately detected. To end the forced air cooling, the power of the blower blower 25 is first turned off, then the power of the exhaust blower 22 is turned off, and then the shutter 30 is closed.
【００３８】一般的に、強制空冷開始時には、ごみや熱
気の吹き出しを抑制するために、ＯＮ信号により先ずシ
ャッター３０を開け、次に排気ブロワ２２の電源と送風
部ブロワ２５の電源を順に入れて排気ブロワ２２と送風
ブロワ２５を順に起動する。しかしながら、送風ブロワ
２５が起動してヒータ１０内が陽圧になった場合、シャ
ッター３０の外部動力貫通用の隙間３３からごみや熱気
が吹き出してしまう。図６に示すように強制空冷の開始
時（ＯＮ）にごみが発生しているのはこのためである。Generally, at the start of forced air cooling, the shutter 30 is first opened by an ON signal, and then the power of the exhaust blower 22 and the power of the blower blower 25 are turned on in order in order to suppress the blowing of dust and hot air. The exhaust blower 22 and the blower blower 25 are sequentially activated. However, when the blower 25 is activated and the inside of the heater 10 becomes a positive pressure, dust and hot air blow out from the gap 33 for the external power penetration of the shutter 30. This is why dust is generated at the start of forced air cooling (ON) as shown in FIG.
【００３９】この問題を解決するためには、ヒータ１０
内が陰圧になるように排気ブロワ２２や送風ブロワ２５
を制御することが好ましい。しかしながら、単にヒータ
１０内を陰圧にするだけでは、図４に一点鎖線で示すよ
うに、ヒータ温度の降下に伴いヒータ内雰囲気の熱膨張
の量が減少するため、時間と共に陰圧度が増大してしま
い、その結果、ヒータ内が冷えにくくなり（降温レート
が低下し）、強制空冷時間が長くなってしまう。To solve this problem, the heater 10
Exhaust blower 22 and blower blower 25 so that the inside is at a negative pressure.
Is preferably controlled. However, simply setting the inside of the heater 10 to a negative pressure, as indicated by a dashed line in FIG. 4, causes the amount of thermal expansion of the atmosphere in the heater to decrease with a decrease in the heater temperature. As a result, the inside of the heater becomes difficult to cool (the temperature drop rate decreases), and the forced air cooling time becomes long.
【００４０】そこで、本実施の形態における縦型熱処理
装置の強制空冷方法においては、強制空冷開始時には先
ず前記シャッター３０を開け、次に排気ブロワ２２の電
源と送風ブロワ２５の電源を順に入れてこれら排気ブロ
ワ２２と送風ブロワ２５を順に起動し、ヒータ１０内の
圧力を圧力センサ３４により検出してヒータ１０内が微
陰圧（例えば大気圧−３０Ｐａ）になるように送風ブロ
ワ２５を制御し、ヒータ１０内の温度降下に伴う陰圧度
の増大を抑えるべく送風ブロワ２５の送風量を増大させ
るようにする。この強制空冷方法によれば、強制空冷開
始時にヒータ１０内が陽圧になるのを防止でき、シャッ
ター３０の外部動力貫通用の隙間３３からごみや熱気が
吹き出すのを防止することができると共に、図４に実線
で示すように、陰圧度を一定に保ちつつ送風量を増大す
ることによって陰圧度の増大に伴う降温レートの低下を
抑制し、強制空冷時間の短縮化が図れる。Therefore, in the forced air cooling method of the vertical heat treatment apparatus according to the present embodiment, when the forced air cooling is started, the shutter 30 is first opened, and then the power supply of the exhaust blower 22 and the power supply of the blower blower 25 are sequentially turned on. The exhaust blower 22 and the blower blower 25 are sequentially activated, the pressure inside the heater 10 is detected by the pressure sensor 34, and the blower blower 25 is controlled so that the inside of the heater 10 becomes a slight negative pressure (for example, atmospheric pressure −30 Pa). The amount of air blown by the blower blower 25 is increased to suppress an increase in the degree of negative pressure due to a temperature drop in the heater 10. According to this forced air cooling method, it is possible to prevent the inside of the heater 10 from becoming a positive pressure at the start of the forced air cooling, and prevent dust and hot air from blowing out from the gap 33 for external power penetration of the shutter 30. As shown by the solid line in FIG. 4, by increasing the air flow while keeping the negative pressure degree constant, it is possible to suppress a decrease in the temperature drop rate due to the increase in the negative pressure degree and to shorten the forced air cooling time.
【００４１】また、一般的に、強制空冷終了時には、ご
みや熱気の吹き出しを抑制するために、ＯＦＦ信号によ
り先ず送風ブロワ２５の電源と排気ブロワ２２の電源を
順に切り、次にシャッター３０を閉める。この場合、例
えば、ＯＦＦ信号と同時に送風ブロワ２５の電源を切
り、その３秒後に排気ブロワ２２の電源を切り、更にそ
の１秒後にシャッター３０を閉じるというシーケンス制
御が行なわれている。従って、シャッター３０を閉める
タイミングは、ＯＦＦ信号から４秒後である。Generally, at the end of forced air cooling, the power of the blower blower 25 and the power of the exhaust blower 22 are turned off in order by an OFF signal, and then the shutter 30 is closed in order to suppress the emission of dust and hot air. . In this case, for example, sequence control is performed such that the power of the blower blower 25 is turned off simultaneously with the OFF signal, the power of the exhaust blower 22 is turned off three seconds after that, and the shutter 30 is closed one second after that. Therefore, the shutter 30 is closed four seconds after the OFF signal.
【００４２】しかしながら、送風ブロワ２５の電源を切
っても送風ブロワ２５は直ぐに止まらず慣性力でしばら
く回転しているため、その回転中にシャッター３０を閉
めると、ヒータ１０内が陽圧になってしまい、ヒータ１
０の隙間例えばヒータ下部の隙間等からごみや熱気が吹
き出してしまう。図６に示すように強制空冷の終了時
（ＯＦＦ）にごみが発生しているのはこのためである。However, even when the power of the blower blower 25 is turned off, the blower blower 25 does not stop immediately but rotates for a while due to inertial force. Therefore, when the shutter 30 is closed during the rotation, the inside of the heater 10 becomes positive pressure. Finally, heater 1
Dust or hot air blows out from a gap of 0, for example, a gap below the heater. This is why dust is generated at the end of forced air cooling (OFF) as shown in FIG.
【００４３】そこで、本実施の形態における縦型熱処理
装置の強制空冷方法においては、強制空冷終了時には先
ず送風ブロワ２５の電源と排気ブロワ２２の電源を順に
切り、前記送風ブロワ２５の電源を切ってから送風ブロ
ワ２５の回転が停止するまでの所定時間経過後例えば１
分３０秒後に前記シャッター３０を閉めるようにする。
この強制空冷方法によれば、電源を切った後の送風ブロ
ワ２５の慣性回転に起因してヒータ１０内が陽圧になる
現象を防止することができ、強制空冷終了時のごみや熱
気の吹き出しを防止することができる。Therefore, in the forced air cooling method of the vertical heat treatment apparatus according to the present embodiment, at the end of the forced air cooling, first, the power supply of the blower blower 25 and the power supply of the exhaust blower 22 are sequentially turned off, and the power supply of the blower blower 25 is turned off. After a lapse of a predetermined time from when the rotation of the blower blower 25 stops, for example, 1
After 30 minutes, the shutter 30 is closed.
According to this forced air cooling method, it is possible to prevent a phenomenon in which the inside of the heater 10 becomes positive pressure due to the inertial rotation of the blower blower 25 after the power is turned off, and blow out dust and hot air at the end of the forced air cooling. Can be prevented.
【００４４】以上、本発明の実施の形態を図面により詳
述してきたが、本発明は前記実施の形態に限定されるも
のではなく、本発明の要旨を逸脱しない範囲での種々の
設計変更等が可能である。例えば、前記実施の形態で
は、熱処理の一例としてＣＶＤ処理が例示されている
が、本発明の縦型熱処理装置は、ＣＶＤ処理以外に、例
えば拡散処理、酸化処理、アニール処理等にも適用可能
である。また、前記実施の形態では、処理容器にマニホ
ールドを備えた縦型熱処理装置が例示されているが、本
発明の縦型熱処理装置は、処理容器にマニホールドを備
えていなくてもよい。また、被処理体としては、半導体
ウエハ以外に、例えばＬＣＤ基板やガラス基板等であっ
てもよい。The embodiments of the present invention have been described in detail with reference to the drawings. However, the present invention is not limited to the above embodiments, and various design changes and the like can be made without departing from the gist of the present invention. Is possible. For example, in the above-described embodiment, CVD processing is illustrated as an example of heat treatment. However, the vertical heat treatment apparatus of the present invention can be applied to, for example, diffusion processing, oxidation processing, annealing processing, and the like in addition to CVD processing. is there. Further, in the above-described embodiment, the vertical heat treatment apparatus having the processing vessel provided with the manifold is exemplified, but the vertical heat treatment apparatus of the present invention may not have the processing vessel provided with the manifold. The object to be processed may be, for example, an LCD substrate, a glass substrate, or the like, other than the semiconductor wafer.
【００４５】[0045]
【発明の効果】以上要するに本発明によれば、次のよう
な効果を奏することができる。In summary, according to the present invention, the following effects can be obtained.
【００４６】（１）請求項１の発明によれば、複数枚の
被処理体を下方から収容する縦型の処理容器の外側にこ
れを取り囲むヒータを設置し、該ヒータの下部にヒータ
内へ冷却用の空気を送り込む送風部を設け、ヒータの上
部に排気口を設け、該排気口に排気ダクトを接続した縦
型熱処理装置において、前記排気口にこれを送風圧力に
より自動的に開閉する弁蓋を設けているため、エアシリ
ンダ等外部の動力を用いずに排気口の弁蓋を自動開閉で
き、外部動力貫通用の隙間が無いことから強制空冷時に
ヒータ内が陽圧になったとしてもごみや熱気の吹き出し
を防止することができる。(1) According to the first aspect of the present invention, a heater is provided outside a vertical processing container for accommodating a plurality of objects to be processed from below, and the heater is disposed below the heater into the heater. In a vertical heat treatment apparatus in which a blower for feeding cooling air is provided, an exhaust port is provided above the heater, and an exhaust duct is connected to the exhaust port, a valve that automatically opens and closes the exhaust port by the blowing pressure. Since the lid is provided, the exhaust port valve lid can be automatically opened and closed without using external power such as an air cylinder.There is no gap for external power penetration, so even if the inside of the heater becomes positive pressure during forced air cooling. It is possible to prevent hot air from blowing out.
【００４７】（２）請求項２の発明によれば、複数枚の
被処理体を下方から収容する縦型の処理容器の外側にこ
れを取り囲むヒータを設置し、該ヒータの下部にヒータ
内へ冷却用の空気を送り込む送風部を設け、ヒータの上
部に排気口を設け、該排気口に排気ダクトを接続すると
ともに排気口を開閉するシャッターを設けた縦型熱処理
装置において、前記ヒータ内の上部に設けられた圧力セ
ンサと、該圧力センサによる検出圧に基いてヒータ内が
微陰圧となるよう前記送風部を制御する制御部とを備え
ているため、強制空冷時にヒータ内が陽圧になるのを防
止でき、シャッターの外部動力貫通用の隙間があったと
してもその隙間からのごみや熱気の吹き出しを防止する
ことができる。(2) According to the second aspect of the present invention, a heater is provided outside the vertical processing container for accommodating a plurality of objects to be processed from below, and the heater is disposed below the heater into the heater. In a vertical heat treatment apparatus provided with a blower for feeding cooling air, an exhaust port provided at an upper portion of the heater, an exhaust duct connected to the exhaust port, and a shutter for opening and closing the exhaust port, And a control unit that controls the blower so that the inside of the heater has a slight negative pressure based on the pressure detected by the pressure sensor. Thus, even if there is a gap for external power penetration of the shutter, dust and hot air can be prevented from blowing out from the gap.
【００４８】（３）請求項３の発明によれば、前記送風
部が、ヒータの下部に設けられた環状の送風ダクトと、
該送風ダクトに空気を送り込む送風ブロワと、送風ダク
トの上部にその周方向に適宜間隔で突設された送風ノズ
ルとを備え、送風ノズルの幾つかはヒータ内の下部を冷
却すべく短く形成されているため、ヒータ内の上部より
も降温時間の遅い下部の降温時間を上部の降温時間と同
程度に早めることができ、強制空冷時間の短縮化が図れ
る。(3) According to the third aspect of the present invention, the blower section includes an annular blower duct provided below the heater,
A blower that blows air into the blower duct, and a blower nozzle protruding from the upper part of the blower duct at appropriate intervals in the circumferential direction are provided.Some of the blower nozzles are formed short to cool the lower part in the heater. Therefore, the temperature lowering time of the lower part, which is slower than the upper part of the heater, can be shortened as much as the temperature lowering time of the upper part, and the forced air cooling time can be shortened.
【００４９】（４）請求項４の発明によれば、複数枚の
被処理体を下方から収容する縦型の処理容器の外側に設
置されたヒータの上部の排気口のシャッターを開け、排
気ブロワにより排気するとともにヒータ内に下部から送
風ブロワにより空気を送り込んでヒータ内を強制的に空
冷する方法において、強制空冷開始時に先ず前記シャッ
ターを開け、次に排気ブロワと送風ブロワを順に起動
し、ヒータ内の圧力が微陰圧になるように送風ブロワを
制御し、ヒータ内の温度降下に伴う陰圧度の増大を抑え
るべく送風ブロワの送風量を増大させるため、強制空冷
時にヒータ内が陽圧になるのを防止でき、シャッターの
外部動力貫通用の隙間があったとしてもその隙間からの
ごみや熱気の吹き出しを防止することができ、しかも、
陰圧度の増大に伴う降温レートの低下を抑制でき、強制
空冷時間の短縮化が図れる。(4) According to the fourth aspect of the present invention, the shutter at the upper exhaust port of the heater installed outside the vertical processing vessel for accommodating a plurality of workpieces from below is opened, and the exhaust blower is opened. In the method of forcibly air-cooling the inside of the heater by sending air from the lower part by a blower blower into the heater and opening the shutter at the start of forced air-cooling, and then sequentially starting the exhaust blower and the blower blower, The blower is controlled so that the pressure inside the heater becomes slightly negative, and the amount of air blown by the blower is increased to suppress the increase in the degree of negative pressure due to the temperature drop inside the heater. Can be prevented, and even if there is a gap for external power penetration of the shutter, dust and hot air can be prevented from blowing out from the gap, and
It is possible to suppress a decrease in the temperature drop rate due to an increase in the degree of negative pressure, and to shorten the forced air cooling time.
【００５０】（５）請求項５の発明によれば、複数枚の
被処理体を下方から収容する縦型の処理容器の外側に設
置されたヒータの上部の排気口のシャッターを開け、排
気ブロワにより排気するとともにヒータ内に下部から送
風ブロワにより空気を送り込んでヒータ内を強制的に空
冷する方法において、強制空冷終了時に先ず送風ブロワ
の電源と排気ブロワの電源を順に切り、前記送風ブロワ
の電源を切ってから送風ブロワの回転が停止するまでの
所定時間経過後に前記シャッターを閉めるため、電源を
切った後の送風ブロワの慣性回転に起因するヒータ内の
陽圧化現象を防止することができ、強制空冷終了時のご
みや熱気の吹き出しを防止することができる。(5) According to the fifth aspect of the present invention, the shutter of the upper exhaust port of the heater installed outside the vertical processing container for accommodating a plurality of workpieces from below is opened, and the exhaust blower is opened. In the method of forcibly cooling the inside of the heater by blowing air from the lower part of the heater with a blower blower from the lower part, at the end of the forced air cooling, the power supply of the blower blower and the power supply of the exhaust blower are sequentially turned off in order, and the power supply of the blower blower is turned off. The shutter is closed after a lapse of a predetermined time from when the blower is turned off until the rotation of the blower blower stops, so that a positive pressure phenomenon in the heater due to the inertial rotation of the blower after the power is turned off can be prevented. In addition, it is possible to prevent dust and hot air from being blown out at the end of forced air cooling.
【図１】本発明の第１の実施の形態を示す縦型熱処理装
置の縦断面図である。FIG. 1 is a vertical sectional view of a vertical heat treatment apparatus showing a first embodiment of the present invention.
【図２】本発明の第２の実施の形態を示す縦型熱処理装
置の縦断面図である。FIG. 2 is a longitudinal sectional view of a vertical heat treatment apparatus showing a second embodiment of the present invention.
【図３】送風ノズルの配置を示す概略的平面図である。FIG. 3 is a schematic plan view showing an arrangement of a blowing nozzle.
【図４】強制空冷時のヒータ温度の変化とヒータ内の圧
力変化を示すグラフ図である。FIG. 4 is a graph showing a change in heater temperature and a change in pressure in the heater during forced air cooling.
【図５】強制空冷時のヒータの上部と下部の温度変化を
示すグラフ図である。FIG. 5 is a graph showing temperature changes in the upper and lower portions of the heater during forced air cooling.
【図６】従来の縦型熱処理装置における強制空冷時のご
みの発生量の変化を示すグラフ図である。FIG. 6 is a graph showing a change in the amount of dust generated during forced air cooling in a conventional vertical heat treatment apparatus.
【符号の説明】 ｗ 半導体ウエハ（被処理体） １ 縦型熱処理装置 ２ 処理容器 ２０ 送風部 ２１ 排気口 ２２ 排気ブロワ ２３ 排気ダクト ２４ 送風ダクト ２５ 送風ブロワ ２６ 送風ノズル ２７ 弁蓋 ３０ シャッター ３４ 圧力センサ ３５ 制御部[Description of Signs] w Semiconductor wafer (object to be processed) 1 Vertical heat treatment apparatus 2 Processing vessel 20 Blower section 21 Exhaust port 22 Exhaust blower 23 Exhaust duct 24 Blower duct 25 Blower blower 26 Blower nozzle 27 Valve cover 30 Shutter 34 Pressure sensor 35 control unit
Claims (5)
型の処理容器の外側にこれを取り囲むヒータを設置し、
該ヒータの下部にヒータ内へ冷却用の空気を送り込む送
風部を設け、ヒータの上部に排気口を設け、該排気口に
排気ダクトを接続した縦型熱処理装置において、前記排
気口にこれを送風圧力により自動的に開閉する弁蓋を設
けたことを特徴とする縦型熱処理装置。1. A heater surrounding a vertical processing vessel for accommodating a plurality of objects to be processed from below is provided.
In a vertical heat treatment apparatus in which a blower for feeding cooling air into the heater is provided below the heater, an exhaust port is provided above the heater, and an exhaust duct is connected to the exhaust port, the air is blown to the exhaust port. A vertical heat treatment apparatus having a valve lid that automatically opens and closes by pressure.
型の処理容器の外側にこれを取り囲むヒータを設置し、
該ヒータの下部にヒータ内へ冷却用の空気を送り込む送
風部を設け、ヒータの上部に排気口を設け、該排気口に
排気ダクトを接続するとともに排気口を開閉するシャッ
ターを設けた縦型熱処理装置において、前記ヒータ内の
上部に設けられた圧力センサと、該圧力センサによる検
出圧に基いてヒータ内が微陰圧となるよう前記送風部を
制御する制御部とを備えたことを特徴とする縦型熱処理
装置。2. A heater surrounding a vertical processing container for accommodating a plurality of objects to be processed from below is provided,
A vertical heat treatment in which a blower for feeding cooling air into the heater is provided below the heater, an exhaust port is provided above the heater, an exhaust duct is connected to the exhaust port, and a shutter for opening and closing the exhaust port is provided. The apparatus, further comprising: a pressure sensor provided at an upper portion in the heater, and a control unit that controls the blowing unit so that the inside of the heater has a slight negative pressure based on a pressure detected by the pressure sensor. Vertical heat treatment equipment.
た環状の送風ダクトと、該送風ダクトに空気を送り込む
送風ブロワと、送風ダクトの上部にその周方向に適宜間
隔で突設された送風ノズルとを備え、送風ノズルの幾つ
かはヒータ内の下部を冷却すべく短く形成されているこ
とを特徴とする請求項１または２記載の縦型熱処理装
置。3. The blower is provided with an annular blower duct provided at a lower portion of the heater, a blower for blowing air into the blower duct, and protruding from an upper portion of the blower duct at appropriate intervals in a circumferential direction thereof. The vertical heat treatment apparatus according to claim 1, further comprising a blowing nozzle, wherein some of the blowing nozzles are formed to be short to cool a lower portion in the heater.
型の処理容器の外側に設置されたヒータの上部の排気口
のシャッターを開け、排気ブロワにより排気するととも
にヒータ内に下部から送風ブロワにより空気を送り込ん
でヒータ内を強制的に空冷する方法において、強制空冷
開始時に先ず前記シャッターを開け、次に排気ブロワと
送風ブロワを順に起動し、ヒータ内の圧力が微陰圧にな
るように送風ブロワを制御し、ヒータ内の温度降下に伴
う陰圧度の増大を抑えるべく送風ブロワの送風量を増大
させることを特徴とする縦型熱処理装置の強制空冷方
法。4. A shutter at an upper exhaust port of a heater installed outside a vertical processing container accommodating a plurality of workpieces from below is opened, and air is exhausted by an exhaust blower and air is blown into the heater from below. In the method of forcibly air-cooling the inside of the heater by sending air by a blower, the shutter is first opened at the start of forced air-cooling, and then the exhaust blower and the blower are started in order, so that the pressure in the heater becomes a slight negative pressure. A forced air cooling method for a vertical heat treatment apparatus, characterized in that the blower is controlled to increase the amount of air blown by the blower to suppress an increase in the degree of negative pressure due to a temperature drop in the heater.
型の処理容器の外側に設置されたヒータの上部の排気口
のシャッターを開け、排気ブロワにより排気するととも
にヒータ内に下部から送風ブロワにより空気を送り込ん
でヒータ内を強制的に空冷する方法において、強制空冷
終了時に先ず送風ブロワの電源と排気ブロワの電源を順
に切り、前記送風ブロワの電源を切ってから送風ブロワ
の回転が停止するまでの所定時間経過後に前記シャッタ
ーを閉めることを特徴とする縦型熱処理装置の強制空冷
方法。5. A shutter at an upper exhaust port of a heater installed outside a vertical processing container accommodating a plurality of objects to be processed from below is opened, air is exhausted by an exhaust blower, and air is blown into the heater from below. In the method of forcibly air-cooling the heater by sending air in with a blower, at the end of forced air-cooling, first turn off the power of the blower and the power of the exhaust blower, then turn off the power of the blower, and then stop the rotation of the blower. A forced air cooling method for the vertical heat treatment apparatus, wherein the shutter is closed after a predetermined time elapses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001107750A JP4610771B2 (en) | 2001-04-05 | 2001-04-05 | Vertical heat treatment apparatus and forced air cooling method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001107750A JP4610771B2 (en) | 2001-04-05 | 2001-04-05 | Vertical heat treatment apparatus and forced air cooling method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002305189A true JP2002305189A (en) | 2002-10-18 |
| JP4610771B2 JP4610771B2 (en) | 2011-01-12 |
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ID=18960018
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| JP2001107750A Expired - Fee Related JP4610771B2 (en) | 2001-04-05 | 2001-04-05 | Vertical heat treatment apparatus and forced air cooling method thereof |
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| JP2009135541A (en) * | 2003-09-19 | 2009-06-18 | Hitachi Kokusai Electric Inc | Method of manufacturing semiconductor device, and substrate processing apparatus |
| CN102191474A (en) * | 2010-03-12 | 2011-09-21 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and assembly of pressure detection system and temperature sensor |
| CN102191473A (en) * | 2010-03-10 | 2011-09-21 | 东京毅力科创株式会社 | Vertical heat treatment apparatus and method for cooling the apparatus |
| US8636409B2 (en) | 2011-02-18 | 2014-01-28 | Tokyo Electron Limited | Heat treatment apparatus and temperature measuring method thereof |
| US8835811B2 (en) | 2011-03-01 | 2014-09-16 | Tokyo Electron Limited | Thermal processing apparatus and method of controlling the same |
| US9255736B2 (en) | 2010-09-09 | 2016-02-09 | Tokyo Electron Limited | Vertical-type heat treatment apparatus |
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