JP2002283560A - Ink jet printer head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink jet printer head in which ejection efficiency can be enhanced while reducing the size and cost and pressure chambers can be arranged with high density. SOLUTION: A plurality of rows of pressure chambers 2 are formed in a thin flat planar head substrate 1 bonded, in the planar direction, with members la-le including at least a sheet of piezoelectric member while penetrating the head substrate 1 in the thickness direction. Since the length of the pressure chamber 2 is equal to the thickness of the thin flat planar head substrate 1, the pressure chamber 2 has no sidewall unpertaining to ejection. Since the capacitance is lowest and movement of the sidewall pertaining to ejection is not suppressed, ejection efficiency can be enhanced while reducing the size and cost. Since the length of the pressure chamber 2 is shortened, trenching is facilitated and its cost can be reduced. Furthermore, the pressure chambers 2 can be arranged with high density by arranging them in a plurality of rows.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet printer head used for printers, copiers, faxes, and the like.

[0002]

2. Description of the Related Art Ink jet printer heads using a shear mode (shear mode) of a piezoelectric material have been proposed, for example, in JP-A-63-247051 and JP-A-2-150355. Is disclosed in Japanese Patent Application Laid-Open No. 7-101056.
As pointed out in the publication, most of them form fine grooves serving as pressure chambers on a substrate formed of a piezoelectric material with a diamond blade, and the piezoelectric material represented by PZT is a ferroelectric substance. There is also a problem that energy efficiency is poor because a portion not involved in ink ejection also has a large capacitance.

In order to solve such a problem, the proposal described in the above-mentioned Japanese Patent Application Laid-Open No. 7-101056 discloses a method in which a piezoelectric member (piezoelectric ceramic substrate) and a low dielectric member (alumina substrate) are arranged on a base member. In addition, the capacitance that is low by making the portion that does not contribute to the ejection of ink a low dielectric member.

Further, a proposal described in Japanese Patent Application Laid-Open No. H11-342615 discloses a method of connecting and fixing a substrate on which a piezoelectric member is laminated in the thickness direction and a substrate on which a low dielectric member is laminated in the thickness direction. A groove serving as a pressure chamber is formed in the substrate, and a portion not involved in the ejection of ink is made of a low dielectric member to reduce the capacitance.

[0005]

However, in the configurations proposed in Japanese Patent Application Laid-Open Nos. 7-101056 and 11-342615, the capacitance can be reduced.
Since the length of the groove serving as the pressure chamber is very long, there is a limit in reducing the capacitance. In addition, since there is a long groove that does not participate in ejection, the size of the ink-jet printer head increases accordingly. Further, since a long groove not involved in the ejection of the ink is processed, the wear of the blade increases, and the frequency of blade replacement increases, leading to an increase in cost.
Generally, the length of the groove involved in ejection is 0.5 to 10 mm
On the other hand, when this groove is processed with a diamond cutter, its diameter is about 50 to 100 mm.
It is about 10 to 10 mm, and the cost increase due to the increase in material and processing for this part cannot be ignored.

[0006] In addition, Japanese Patent Application Laid-Open No.
The proposal described in JP-A-11-342615 is
As compared with the ink jet printer head disclosed in Japanese Patent Application Laid-Open No. 63-247051 and the like, the groove in the portion not involved in the ejection does not operate, so that the operation of the side wall in the groove in the portion involved in the ejection is suppressed, and the capacitance is reduced. Although it is smaller than increasing efficiency, it is undeniable that there are factors that reduce efficiency.

Further, it is required to arrange the pressure chambers at a high density. However, it is difficult to form grooves for forming the pressure chambers, and the thickness of the side wall between the adjacent pressure chambers is small. Therefore, the mechanical strength is extremely low, and it is difficult to increase the density.

[0008]

According to the first aspect of the present invention,
A flat thin plate-shaped head substrate, a number of pressure chambers arranged in a plurality of rows so as to penetrate in the thickness direction of the head substrate, and a part or all of the pressure chambers in a direction orthogonal to the thickness direction of the head substrate. A plurality of side walls formed integrally with the head substrate by a polarized piezoelectric member and arranged on both sides of the pressure chamber, a plurality of internal electrodes formed on respective inner surfaces of the pressure chamber, and the internal electrodes individually A wiring electrode electrically connected to the head substrate and formed on the surface of the head substrate; and an orifice having a number of ink discharge ports opposed to one end of the pressure chamber and laminated and fixed to the flat surface of the head substrate. A plate, a cover having an ink supply unit for supplying ink to the pressure chamber, and a cover fixed to the back surface of the head substrate;
Is provided.

Therefore, when a voltage is applied to the selected internal electrode, ink in the pressure chamber between the side walls is ejected from the ink ejection port. In this case, since the length of the pressure chamber is equal to the thickness of the flat thin plate-shaped head substrate, there is no side wall of the pressure chamber that is not involved in ejection. For this reason, the capacitance is minimal, and the movement of the side wall involved in the ejection is not suppressed, so that the ejection efficiency is remarkably improved, and the size and cost can be reduced. Further, since the length of the pressure chamber is short, the processing of the groove is facilitated and the processing cost can be reduced. Furthermore, since the pressure chambers are arranged in a plurality of rows, it is possible to satisfy the miniaturization and achieve a high density.

According to a second aspect of the present invention, there is provided a flat thin plate in which at least three or more plate-like members including one or more piezoelectric members pre-polarized in a direction perpendicular to the plate thickness direction are joined in a plane direction. A head substrate, and a number of pressure chambers arranged in a plurality of lines at positions straddling the joining surfaces of the members including the piezoelectric member and penetrating in the thickness direction of the head substrate, and side walls arranged on both sides of each pressure chamber; A large number of internal electrodes formed on the side wall of at least the piezoelectric member on the inner surface of the pressure chamber, and wiring electrodes formed on the surface of the head substrate by being individually electrically connected to the internal electrodes; An orifice plate having a large number of ink ejection ports opposed to the opening surface of the pressure chamber and stacked and fixed on a flat surface of the head substrate; and an ink supply unit for supplying ink to the pressure chamber. Comprising a cover which is fixed to the rear surface of the plate, the.

Therefore, when a voltage is applied to the selected internal electrode, ink in the pressure chamber between the side walls is ejected from the ink ejection port. In this case, since the length of the pressure chamber is equal to the thickness of the flat thin plate-shaped head substrate, there is no side wall of the pressure chamber that is not involved in ejection. For this reason, the capacitance is minimal, and the movement of the side wall involved in the ejection is not suppressed, so that the ejection efficiency is remarkably improved, and the size and cost can be reduced. Further, since the length of the pressure chamber is short, the processing of the groove is facilitated and the processing cost can be reduced. Further, since the head substrate has a large number of pressure chambers arranged in a plurality of rows along the joining surface of the adjacent members, it is possible to satisfy the miniaturization and achieve the high density.

According to a third aspect of the present invention, in the first or second aspect, the wiring electrode extends toward one side of the head substrate.

Therefore, it is possible to collectively arrange the connection structure with the external circuit, and it is possible to further reduce the size of the ink jet printer head.

The invention described in claim 4 is the first to third aspects of the present invention.
In the invention according to any one of the above, the pressure chambers and the ink ejection ports connected to one end thereof are arranged in a staggered manner.

Therefore, the arrangement density of the pressure chambers and the ink discharge ports can be satisfied, and furthermore, it is possible to provide a margin in the arrangement interval between the adjacent pressure chambers and the ink discharge ports, thereby facilitating the production. It becomes possible.

[0016] The invention according to claim 5 provides the invention according to claims 1 to 4.
In the invention according to any one of the above, a plurality of the ink supply units formed on the cover are each independently formed,
The pressure chambers are divided into a plurality of groups corresponding to colors of ink to be used, and the pressure chambers in the same group are connected to any one of the ink supply units.

Therefore, the arrangement density of the pressure chambers and the ink discharge ports is high, and by supplying inks of different colors to each of the plurality of ink supply units, the inks of different colors are divided into pressure chambers divided into groups. Since the ink is supplied, multicolor printing can be performed with one inkjet printer head.

[0018]

FIG. 1 shows a first embodiment of the present invention.
This will be described with reference to FIG. First, FIGS. 1 and 2
The configuration of the inkjet printer head H will be described with reference to FIG. FIG. 1 shows an inkjet printer head H.
FIG. 2 is an ink jet printer head H
It is a perspective view of.

The ink jet printer head H has a flat thin plate-shaped head substrate 1 and a large number of ink discharge ports 3 opposed to one end of a pressure chamber 2 formed in the head substrate 1. It has an orifice plate 4 laminated and fixed on the front surface, and a cover 6 having an ink supply unit 5 for supplying ink to the pressure chamber 2 and joined to the back surface of the head substrate 1. The cover 6 is formed in a flat container shape, and a common ink chamber 7 communicated with each pressure chamber 2 is formed therein. The head substrate 1 has four piezoelectric members 1a,
It is formed by joining the members 1b, 1c, 1d and the member 1e other than the piezoelectric member in a plane direction.

Each of the piezoelectric members 1a to 1d using a piezoelectric material such as PZT (lead zirconate titanate) is polarized in a direction perpendicular to the thickness direction of the head substrate 1 (vertically in FIGS. 1 and 2). Piezoelectric members 1a and 1b, piezoelectric member 1
c and 1d are mutually polarized in opposite directions and joined. The pressure chamber 2 has a joint surface between the piezoelectric members 1a and 1b,
The piezoelectric members 1c and 1d are arranged in two rows so as to straddle a joining surface between the piezoelectric members 1c and 1d. The detailed configuration of the ink jet printer head H will be described in the order of manufacturing steps with reference to FIGS.

First, as shown in FIGS. 3A and 3B, flat plate-like piezoelectric members 10a to 10d are prepared. These piezoelectric members 10a to 10d are polarized in the plate thickness direction when the area before slicing is large. Then, the piezoelectric members 10a and 10b and the piezoelectric members 10c and 10d are joined so that the polarization directions are opposite (in other words, the same poles overlap). Joining is performed with an adhesive.

Next, as shown in FIG. 4, the thicker piezoelectric member 10a extends from the surface of the thinner piezoelectric member 10b or 10d.
Alternatively, a large number of grooves 8 having one side opening having a depth reaching 10c are formed in parallel. These grooves 8 are ground in parallel by a dicing saw diamond wheel or the like used for cutting an IC wafer. Side walls 9 are formed on both sides of these grooves 8. The size of the groove 8 varies depending on the specifications of the ink jet printer head H and the like. The width of the side wall 9 is also substantially the same as the width of the groove 8, but the piezoelectric member 10
Approximately 50-20 from the relationship of mechanical strength of a-10d
0 μm. Piezoelectric members 10a-1 having a size of 50 μm or less
In the case of 0d, since the mechanical strength is weak and the handling property is poor, it is very difficult to make. The piezoelectric members 10b, 10d
Is about half the depth of the groove 8, but a thicker one may be used to determine the thickness later by polishing or the like.
The thickness of the piezoelectric members 10a and 10c is designed in consideration of the joining of the cover 6 and the like.

Next, a metal film to be the internal electrode 11 is formed on the inner surface of the groove 8. In this example, a nickel film is formed by an electroless nickel plating method, and then a gold film is formed by an electrolytic gold plating method. Since the metal film on the side wall 9 is unnecessary, it may be masked and plated in advance, or may be removed by polishing or etching after plating. Further, the internal electrode 11 may be formed by a known technique such as a sputtering method or a vapor deposition method, instead of the plating method. However, in this case, it is necessary to form the electrode film up to the vicinity of the bottom of the groove 8, so that an appropriate method needs to be selected according to the depth and width of the groove 8.

Next, as shown in FIGS. 5 and 6 (a),
Between the piezoelectric member 10b and the piezoelectric member 10c, the piezoelectric member 10
d and the block member 10e other than the piezoelectric member are bonded by bonding to form the block laminate 12. This allows
The grooves 8 arranged in two rows are closed at one surface opened in a U-shape. The material of the block material 10e may be selected in consideration of slicing described later and formation of wiring electrodes. Here, a free-cutting ceramic was used. When emphasis is placed on slicing, it is effective to use a piezoelectric member, but there is no need for polarization.

Next, the block laminate 12 is sliced along the dotted line shown in FIG. This slicing process
This is performed by a known technique such as a diamond cutter, a band saw, and a wire saw. By this slicing, a plurality of head substrates 1 are formed from the block laminate 12.

FIG. 6B shows one sliced head substrate 1. The piezoelectric members 1a to 1d of the head substrate 1 are the same as the piezoelectric members 10a to 1d in FIG.
6d is a thin chip obtained by slicing the block member 10e in FIG. 6A, and thus the flat thin plate-shaped head substrate 1 is formed. In this state, the U-shaped groove 8 whose one side is open becomes the pressure chamber 2 whose periphery is closed. The pressure chambers 2 penetrate in the thickness direction of the head substrate 1 and are arranged in two rows. The thickness of the head substrate 1, that is, the length of the pressure chamber 2, is a thickness for slicing the block laminate 12, and in this example, 0.5 to 3
It is about 0 mm. In addition, since the orifice plate 4 and the cover 6 are adhered to the slice surface, the slice may be sliced to be thick, and the thickness may be obtained by polishing or lapping to serve as a surface finish.

Next, as shown in FIG. 7, a large number of wiring electrodes 13 are formed on one surface of the head substrate 1. Since the wiring electrode 13 needs to be electrically connected to the internal electrode 11 described above, a method of forming a metal film that goes around the pressure chamber 2 is preferable. Here, a metal film is formed by a sputtering method. As the type of metal film,
Use chromium, aluminum, gold, titanium, or the like. Internal electrode 1
As in the case of 1, masking in advance, or masking a necessary portion after film formation and removing it by etching, etc.
Patterning is performed by a known method.

Next, as shown in FIG. 8, the orifice plate 4 in which the ink discharge ports 3 are formed in advance is connected to the wiring electrode 1.
3 is bonded to the surface of the head substrate 1 where the head 3 is not formed. At this time, the ink ejection port 3 and the pressure chamber 2 are aligned and bonded so as to be aligned. The orifice plate 4 may be a well-known one. For example, a metal plate formed by an electroforming method, a metal plate having the ink discharge ports 3 formed by a pressing method, a resin plate having the ink discharge ports 3 formed by laser processing, or the like is used. it can. The ink discharge ports 3 are arranged in two rows in accordance with the arrangement pattern of the pressure chambers 2.

As shown in FIG. 10A, in order to prevent the ink discharge ports 3 from being blocked by the adhesive when the orifice plate 4 is bonded, as shown in FIG. After adhering to the nozzles 1, the ink discharge ports 3 may be formed by a laser processing method as shown in FIG. 10 (b). In this case, since both ends of the pressure chamber 2 are opened on both sides of the flat thin plate-shaped head substrate 1, the ink ejection port 3 can be easily recognized from the side opposite to the orifice plate 4, and the positional accuracy of the ink ejection port 3 can be improved. Is improved.

The orifice plate 4 may be adhered to the surface on which the wiring electrodes 13 are formed, depending on the method of connecting the wiring electrodes 13 to external drive voltage generating means.

Next, as shown in FIG. 8, the cover 6 is joined to the surface of the head substrate 1 opposite to the orifice plate 4. At this time, the common ink chamber 7 (see FIG. 1) and the pressure chamber 2
And are adhered so as to be aligned. Cover 6
May be formed by a well-known method such as resin molding, metal molding, metal cutting, or the like, but it is considered that the material is resistant to the ink used. When heat is required for bonding, the coefficient of thermal expansion may be considered in order to prevent warpage, depending on the dimensions and shape of the cover 6. Note that a connection pipe 14 (see FIG. 2) for receiving ink from an ink tank (not shown) may be connected to the ink supply unit 5 of the cover 6.

In this configuration, when a voltage is applied to the desired internal electrode 11 of the pressure chamber 2 through the wiring electrode 13, the ink inside the pressure chamber 2 is discharged by the deformation operation of the side walls 9 of the pressure chamber 2. Discharge from outlet 3. On this occasion,
Since the length of the pressure chamber 2 is equal to the thickness of the flat thin plate-shaped head substrate 1, there is no side wall 9 of the pressure chamber 2 that is not involved in ejection. For this reason, the capacitance is minimum, and the movement of the side wall 9 involved in the ejection is not suppressed, so that the ejection efficiency is remarkably improved, and the size and cost can be reduced. Further, since the length of the pressure chamber 2 is short, machining of the groove 8 in FIG. 4 is facilitated, and wear of a cutting tool for machining the groove 8 can be reduced, so that machining cost can be reduced.

The ink jet printer head H of the present invention
Since the pressure chambers 2 and the ink discharge ports 3 are arranged in two rows, it is possible to perform printing at a very high density as compared with the related art. The density can be further increased by forming the pressure chambers 2 and the ink discharge ports 3 in three rows and four rows.

In this case, as shown in FIGS.
By arranging the pressure chambers 2 and the ink ejection ports 3 connected to one end thereof in a staggered manner, the arrangement density of the pressure chambers 2 and the ink ejection ports 3 can be increased, and the control of the ink ejection operation is achieved. The print dot density can be increased. In addition, a margin can be provided in the arrangement interval between the adjacent pressure chambers 2 and the ink discharge ports 3, so that the production can be facilitated. The thickness of the side wall 9 can also have a margin. As described above, in the case where the pressure chambers 2 are arranged in a staggered manner and the wiring electrodes 13 are extended downward, as shown in FIGS. The wiring electrodes 13 connected to the internal electrodes 11 of the chamber 2 pass between the wiring electrodes 13 connected to the internal electrodes 11 of the pressure chambers 2 arranged in the lower row, thereby forming a high-density wiring pattern. can do.

As shown in FIGS. 2 and 7, the wiring electrodes 13 extend toward one side (the lower side in the figure) of the head substrate 1, so that a connection structure (for example, a connector) with an external circuit is required. It is possible to arrange them collectively, and it is possible to further reduce the size of the inkjet printer head H.

In the example where the pressure chambers 2 are arranged in two rows,
By providing a head substrate formed by joining at least three plate-like members in the surface direction and forming the pressure chambers 2 so as to straddle the joining surfaces of the three members, the pressure chambers 2 are arranged in two rows. can do. In this case, the pressure chamber 2 can be deformed for ink ejection by using a piezoelectric member for at least the center member of the three members to be joined.

Next, a second embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. The same parts as those in the above embodiment are denoted by the same reference numerals, and description thereof is omitted. The ink jet printer head H of the present embodiment prepares two head substrates 1 used in the above embodiment and joins the head substrates 1 in a plane direction as shown in FIG. The chambers 2 are arranged in a staggered manner over four rows. As shown in FIG. 11, the orifice plate 4 adhered to the front surface of the head substrate 1 has a large number of ink ejection ports 3 arranged in accordance with the arrangement pattern of the pressure chambers 2.
Are formed. The cover 6 bonded to the back surface of the head substrate 1 has four ink supply units 5 provided independently and four common ink chambers 7 communicating with one of these ink supply units 5. And And pressure chamber 2
Are divided into four color groups (row units) corresponding to the colors of the inks to be used, and the pressure chambers 2 in the same group are connected to independent ink supply units 5 via independent common ink chambers 7.

In such a configuration, the ink in the ink tank (not shown) is divided into yellow, magenta, cyan, and black colors, and is divided into groups through the respective ink supply units 5 and the common ink chamber 7. The pressure is supplied to the pressure chamber 2. Therefore, ink is ejected from the ink ejection port 3 by applying a voltage to the internal electrode 11.
Therefore, a high-precision color inkjet print head can be provided in combination with the high-density arrangement of the pressure chambers 2.

In this embodiment, many pressure chambers 2 are divided into four groups, but they may be divided into two groups or three groups. Even in this case, printing of two or more colors can be performed.

In the above-described embodiment, the pressure chamber is formed by forming a groove having a depth extending over the two piezoelectric members. However, one piezoelectric member is joined to another member other than the piezoelectric member. The present invention is also applicable to a configuration in which a pressure chamber is formed by forming a groove having a depth extending over a joint surface between the two.

[0041]

According to the first aspect of the present invention, since the length of the pressure chamber is equal to the thickness of the flat thin plate-shaped head substrate, there is no side wall of the pressure chamber which is not involved in the ejection. For this reason, the capacitance is minimal, and the movement of the side wall involved in the ejection is not suppressed, so that the ejection efficiency is remarkably improved, and the size and cost can be reduced. Further, since the length of the pressure chamber is short, the processing of the groove is facilitated and the processing cost can be reduced. Furthermore, since the pressure chambers are arranged in a plurality of rows, it is possible to satisfy the miniaturization and achieve a high density.

According to the second aspect of the present invention, since the length of the pressure chamber is equal to the thickness of the flat thin plate-shaped head substrate,
There is no side wall of the pressure chamber that is not involved in the discharge. For this reason, the capacitance is minimal, and the movement of the side wall involved in the ejection is not suppressed, so that the ejection efficiency is remarkably improved, and the size and cost can be reduced. Further, since the length of the pressure chamber is short, the processing of the groove is facilitated and the processing cost can be reduced. Further, since the head substrate has a large number of pressure chambers arranged in a plurality of rows along the joining surface of the adjacent members, it is possible to satisfy the miniaturization and achieve the high density.

According to the third aspect of the present invention, in the first or second aspect of the present invention, since the wiring electrodes extend toward one side of the head substrate, the connection structure with an external circuit is intensively performed. Therefore, the size of the ink jet printer head can be further reduced.

According to the invention described in claim 4, in the invention described in any one of claims 1 to 3, the pressure chambers and the ink ejection ports connected to one end thereof are arranged in a staggered manner. Since the arrangement density of the pressure chambers and the ink ejection ports is satisfied and the arrangement interval between the adjacent pressure chambers and the ink ejection ports can be provided with a margin, manufacturing can be facilitated.

According to a fifth aspect of the present invention, in the first aspect of the invention, a plurality of ink supply portions formed on the cover are formed independently of each other, and the pressure chamber is used for the ink to be used. The pressure chambers of the same group are connected to any one of the ink supply units, so that the arrangement density of the pressure chambers and the ink ejection ports is high, When inks of different colors are supplied to the respective supply units, the inks of different colors are supplied to the pressure chambers divided for each group, so that a single inkjet printer head can perform multicolor printing.

[Brief description of the drawings]

FIG. 1 is a vertical sectional side view of an ink jet printer head according to a first embodiment of the present invention.

FIG. 2 is a perspective view of an inkjet printer head.

FIG. 3 is a perspective view showing a process of manufacturing the ink jet printer head and showing a state where piezoelectric members constituting a head substrate are joined.

4A and 4B show a process of manufacturing an ink jet printer head, wherein FIG. 4A is a perspective view showing a state in which grooves are formed and inner electrodes are formed, and FIG. 4B is a partially enlarged front view thereof.

FIG. 5 is a perspective view showing a process of manufacturing the ink jet printer head and showing a state in which a block laminate is formed.

FIG. 6 is a perspective view showing a process of manufacturing the ink jet printer head and showing a state in which the block laminate is sliced.

FIG. 7 is a perspective view showing a process of manufacturing the ink jet printer head and showing a state in which wiring electrodes are formed.

FIG. 8 is a perspective view showing a process of manufacturing the ink jet printer head and showing a state where the orifice plate and the cover are joined.

FIG. 9 is an explanatory diagram showing an arrangement pattern of wiring electrodes.

FIG. 10 is a perspective view showing a state in which an ink discharge port is formed after an orifice plate is joined to a head substrate.

FIG. 11 is a perspective view of an ink jet printer head according to a second embodiment of the present invention.

FIG. 12 is a vertical sectional side view thereof.

FIG. 13 is a perspective view showing an arrangement pattern of pressure chambers and wiring electrodes on a head substrate.

[Explanation of symbols]

 Reference Signs List 1 head substrate 1a to 1d piezoelectric member, member 1e member 2 pressure chamber 3 ink discharge port 4 orifice plate 5 ink supply unit 6 cover 8 groove 9 side wall 11 internal electrode 13 wiring electrode

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Shun Sugiyama 6-78, Minamicho, Mishima-shi, Shizuoka Toshiba Tec Corporation Inside the Mishima Plant (72) Inventor Isao Suzuki 6-78, Minami-cho, Mishima-shi, Shizuoka Toshiba Tec F-term (reference) at Mishima Plant of Shikisha 2C057 AF54 AF91 AF93 AG12 AG15 AG32 AG45 AG93 AP02 AP14 AP22 AP23 AP25 AP38 AP52 AP55 BA03 BA14

Claims (5)

[Claims] 1. A flat thin plate-shaped head substrate, a plurality of pressure chambers arranged in a plurality of rows so as to penetrate in a thickness direction of the head substrate, and a part or all of the pressure chambers in a thickness direction of the head substrate A large number of side walls formed integrally with the head substrate by a piezoelectric member polarized in a direction perpendicular to and arranged on both sides of the pressure chamber, a large number of internal electrodes formed on the inner surface of each of the pressure chambers, A plurality of wiring electrodes electrically connected to the internal electrodes and formed on the head substrate; and a plurality of ink discharge ports opposed to one end of the pressure chamber, which are stacked and fixed on a flat surface of the head substrate. An ink jet printer head, comprising: an orifice plate formed as described above; and a cover having an ink supply unit for supplying ink to the pressure chamber and fixed to a back surface of the head substrate. 2. A flat thin plate-shaped head substrate in which at least three or more plate-like members including one or more piezoelectric members pre-polarized in a direction perpendicular to the plate thickness direction are joined in a plane direction; A plurality of pressure chambers arranged in a plurality of rows at positions crossing a joint surface of the members including a member, and a plurality of pressure chambers penetrating in a thickness direction of the head substrate, and side walls arranged on both sides of each pressure chamber; and an inner surface of the pressure chamber A plurality of internal electrodes formed on the side wall by at least the piezoelectric member, wiring electrodes formed on the head substrate by being individually connected to the internal electrodes, and facing an opening surface of the pressure chamber. An orifice plate having a number of ink ejection ports stacked and fixed on a flat surface of the head substrate; and a cover having an ink supply unit for supplying ink to the pressure chamber and fixed to the back surface of the head substrate. The inkjet printer head having a. 3. The ink jet printer head according to claim 1, wherein the wiring electrode extends toward one side of the head substrate. 4. The ink jet printer head according to claim 1, wherein said pressure chambers and said ink discharge ports connected to one end thereof are arranged in a staggered manner. 5. The ink supply unit formed on the cover is independently formed in a plurality, and the pressure chambers are divided into a plurality of groups corresponding to colors of ink to be used.
5. The ink jet printer head according to claim 1, wherein said pressure chambers of the same group are connected to any one of said ink supply units.