JP2002283265A - Electronic part sucking nozzle and electronic part mounting device - Google Patents

Electronic part sucking nozzle and electronic part mounting device

Info

Publication number
JP2002283265A
JP2002283265A JP2001089487A JP2001089487A JP2002283265A JP 2002283265 A JP2002283265 A JP 2002283265A JP 2001089487 A JP2001089487 A JP 2001089487A JP 2001089487 A JP2001089487 A JP 2001089487A JP 2002283265 A JP2002283265 A JP 2002283265A
Authority
JP
Japan
Prior art keywords
electronic component
suction
nozzle
electronic part
sucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001089487A
Other languages
Japanese (ja)
Inventor
Wataru Hidese
渡 秀瀬
Motoshi Himeno
素志 姫野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001089487A priority Critical patent/JP2002283265A/en
Publication of JP2002283265A publication Critical patent/JP2002283265A/en
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an electronic part sucking nozzle for surely mounting a chip type part of the microscopic size as an object, and an electronic part mounting device attached with this sucking nozzle. SOLUTION: This sucking nozzle 10 of an electronic part P vacuum-sucks the chip type electronic part P having an upper surface of an almost partial cylindrical curved surface to a lower end part. A side cross-sectional shape of an optional position formed in the lower end part of a sucking part 12 provided with a sucking hole 12a for sucking the electronic part P by abutting to the electronic part P, and orthogonal to the specific one direction in parallel to the nozzle axis of an abutting opening part 12b opening the sucking hole 12a, and abutting to an upper surface of the electronic part P, is set in an almost circular arc shape of copying after a curved surface shape of the upper surface A of the electronic part P. Thus, the chip type electronic part P can be stably held without causing positional dislocation and a sucking error.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子部品を吸着す
る電子部品の吸着ノズルおよびこの吸着ノズルが装着さ
れた電子部品実装装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component suction nozzle for sucking an electronic component, and an electronic component mounting apparatus equipped with the suction nozzle.

【0002】[0002]

【従来の技術】電子部品の移載などのハンドリングの方
法として、真空吸着による方法が広く用いられている。
この方法は吸着孔が設けられた吸着ノズルを電子部品に
当接させ、吸着孔を真空吸引することにより発生する負
圧を利用して電子部品を吸着するものである。ここで用
いられる吸着ノズルは電子部品に直接当接して用いられ
るものであるため、対象の電子部品の形状やサイズに応
じて種々の形式のものが用いられる。
2. Description of the Related Art As a handling method such as transfer of electronic parts, a method using vacuum suction is widely used.
In this method, a suction nozzle provided with a suction hole is brought into contact with an electronic component, and the electronic component is suctioned by utilizing a negative pressure generated by vacuum suction of the suction hole. Since the suction nozzle used here is used in direct contact with the electronic component, various types are used according to the shape and size of the target electronic component.

【0003】ところで近年電子機器の小型化に伴い、電
子部品のサイズの微細化が進展しており、矩形のチップ
型部品では辺寸法が1mmに満たないような微小チップ
が使用されるようになっている。このような微小チップ
を対象とする吸着ノズルは、チップ型部品の上面を吸着
できるよう、下端部のサイズが辺寸法よりも小さい細径
ノズルが用いられる。
In recent years, with the miniaturization of electronic devices, the size of electronic components has been miniaturized, and microchips having side dimensions of less than 1 mm have been used for rectangular chip-type components. ing. As a suction nozzle for such a small chip, a small-diameter nozzle whose lower end is smaller than a side dimension is used so that the upper surface of the chip-type component can be suctioned.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上述の
微小チップを真空吸着により保持する場合には、以下の
ような問題点があった。以下図面を参照して説明する。
図4(a)は微小チップの斜視図、図4(b)は従来の
吸着ノズルによる微小チップの吸着保持状態の説明図で
ある。図4(a)に示すように、微小サイズのチップ型
部品Pの上面Aは必ずしも平坦な面とはならず、凸状曲
面を呈する場合が多い。そしてこのような凸状曲面のチ
ップ型部品Pを細径ノズルBで吸着すると、細径ノズル
Bの下端部は上面Aに密着性よく当接しない。このため
吸着孔Cから真空吸引する際に真空リークが生じて吸着
ミスを発生したり、吸着ノズルBとチップ型部品Pの上
面Aとの間で滑りを生じて安定した吸着保持ができず、
実装位置ずれの要因となるなどの不具合があった。
However, when the above-mentioned microchip is held by vacuum suction, there are the following problems. This will be described below with reference to the drawings.
FIG. 4A is a perspective view of a microchip, and FIG. 4B is an explanatory diagram of a state in which a microchip is sucked and held by a conventional suction nozzle. As shown in FIG. 4A, the upper surface A of the chip component P having a small size is not necessarily a flat surface, but often has a convex curved surface. When the chip-shaped component P having such a convex curved surface is sucked by the small-diameter nozzle B, the lower end of the small-diameter nozzle B does not contact the upper surface A with good adhesion. For this reason, when vacuum suction is performed from the suction hole C, a vacuum leak occurs and a suction error occurs, or a slip occurs between the suction nozzle B and the upper surface A of the chip-type component P, and stable suction holding cannot be performed.
There were inconveniences such as a shift in the mounting position.

【0005】そこで本発明は、微小サイズのチップ型部
品を対象として確実な実装を行える電子部品の吸着ノズ
ルおよびこの吸着ノズルが装着された電子部品実装装置
を提供することを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide an electronic component suction nozzle capable of reliably mounting a chip-type component having a small size, and an electronic component mounting apparatus equipped with the suction nozzle.

【0006】[0006]

【課題を解決するための手段】請求項1記載の電子部品
の吸着ノズルは、電子部品実装装置の実装ヘッドに装着
されこの実装ヘッドと連通した吸引孔から真空吸引する
ことにより、上面が略部分円筒状の曲面であるチップ型
の電子部品を下端部に真空吸着する電子部品の吸着ノズ
ルであって、前記実装ヘッドに装着され前記吸引孔が設
けられた本体部と、電子部品に当接してこの電子部品を
吸着する吸着孔が設けられた吸着部と、この吸着部の下
端部に形成され前記吸着孔が開口し前記電子部品の上面
と当接する当接開口部とを備え、この当接開口部のノズ
ル軸線に平行かつ特定一方向に直交する任意位置の側断
面形状は、前記電子部品の上面の曲面形状にならう略円
弧状である。
According to a first aspect of the present invention, the suction nozzle for an electronic component is mounted on a mounting head of an electronic component mounting apparatus, and the upper surface thereof is substantially partially removed by vacuum suction from a suction hole communicating with the mounting head. A suction nozzle of an electronic component that vacuum-adsorbs a chip-shaped electronic component having a cylindrical curved surface at a lower end portion, wherein the main body portion is mounted on the mounting head and provided with the suction hole, and is in contact with the electronic component. A suction portion provided with a suction hole for sucking the electronic component; and a contact opening formed at a lower end portion of the suction portion, the suction hole being opened and contacting the upper surface of the electronic component. The side cross-sectional shape of the opening at an arbitrary position parallel to the nozzle axis and orthogonal to the specific direction is a substantially arc shape following the curved shape of the upper surface of the electronic component.

【0007】請求項2記載の電子部品実装装置は、チッ
プ型電子部品を真空吸着により保持して基板に実装する
電子部品実装装置であって、前記電子部品の上面に当接
して真空吸着する吸着ノズルと、この吸着ノズルが装着
される実装ヘッドと、実装ヘッドを電子部品の供給部と
前記基板との間で移動させる移動手段と、前記実装ヘッ
ドを介して吸着ノズルから真空吸着する真空吸引手段と
を備え、前記吸着ノズルは、請求項1記載の電子部品の
吸着ノズルである。
According to a second aspect of the present invention, there is provided an electronic component mounting apparatus for holding a chip-type electronic component by vacuum suction and mounting the chip type electronic component on a substrate. A nozzle, a mounting head to which the suction nozzle is mounted, a moving unit for moving the mounting head between a supply unit of an electronic component and the substrate, and a vacuum suction unit for performing vacuum suction from the suction nozzle via the mounting head Wherein the suction nozzle is a suction nozzle for an electronic component according to claim 1.

【0008】本発明によれば、吸着部の下端部に形成さ
れ電子部品の上面と当接する当接開口部の、ノズル軸線
に平行かつ特定一方向に直交する任意位置の側断面形状
を、電子部品の上面の曲面形状にならう略円弧状とする
ことにより、チップ型の電子部品を安定して保持するこ
とができる。
According to the present invention, the contact opening formed at the lower end of the suction portion and in contact with the upper surface of the electronic component has a side cross-sectional shape at an arbitrary position parallel to the nozzle axis and orthogonal to one specific direction. The chip-shaped electronic component can be stably held by being formed in a substantially arc shape following the curved shape of the upper surface of the component.

【0009】[0009]

【発明の実施の形態】次に本発明の実施の形態を図面を
参照して説明する。図1は本発明の一実施の形態の電子
部品実装装置の斜視図、図2は本発明の一実施の形態の
電子部品実装装置の実装ヘッドの部分断面図、図3は本
発明の一実施の形態の電子部品の吸着ノズルの部分断面
図である。
Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a perspective view of an electronic component mounting apparatus according to one embodiment of the present invention, FIG. 2 is a partial cross-sectional view of a mounting head of the electronic component mounting apparatus according to one embodiment of the present invention, and FIG. It is a fragmentary sectional view of the suction nozzle of the electronic component of the form.

【0010】まず図1を参照して電子部品の吸着ノズル
が使用される電子部品実装装置について説明する。図1
において、基台1の両端部には2つのY軸テーブル2
A,2Bが並設されており、Y軸テーブル2A,2Bに
はX軸テーブル3が架設されている。X軸テーブル3に
は移動ブロック4が装着されており、移動ブロック4に
はカメラ5および実装ヘッド6を備えている。実装ヘッ
ド6には電子部品Pの吸着ノズル10が装着される。
First, an electronic component mounting apparatus in which an electronic component suction nozzle is used will be described with reference to FIG. Figure 1
, Two Y-axis tables 2 are provided at both ends of the base 1.
A and 2B are arranged side by side, and an X-axis table 3 is installed on the Y-axis tables 2A and 2B. A moving block 4 is mounted on the X-axis table 3, and the moving block 4 includes a camera 5 and a mounting head 6. A suction nozzle 10 for the electronic component P is mounted on the mounting head 6.

【0011】移動ブロック4はY軸テーブル2A,2B
およびX軸テーブル3によって水平方向に移動し、供給
部7に配設されたテープフィーダ8から実装ヘッド6に
よって電子部品を真空吸着してピックアップし、基板9
上に搭載する。カメラ5は基板9の認識マークを認識
し、この認識結果により電子部品搭載時の移動ブロック
4の位置補正が行われる。Y軸テーブル2A,2Bおよ
びX軸テーブル3は、実装ヘッド6を電子部品の供給部
7と基板9との間で移動させる移動手段となっている。
The moving block 4 includes Y-axis tables 2A and 2B.
Then, the electronic component is moved in the horizontal direction by the X-axis table 3 and the electronic components are vacuum-adsorbed and picked up by the mounting head 6 from the tape feeder 8 provided in the supply unit 7, and the substrate 9 is picked up.
Mount on top. The camera 5 recognizes the recognition mark on the substrate 9, and based on the recognition result, corrects the position of the moving block 4 when the electronic component is mounted. The Y-axis tables 2A and 2B and the X-axis table 3 are moving means for moving the mounting head 6 between the electronic component supply unit 7 and the substrate 9.

【0012】次に図2を参照して実装ヘッド6に装着さ
れる電子部品Pの吸着ノズル10について説明する。こ
の吸着ノズル10は、上面が略部分円筒状の曲面である
チップ型の電子部品(図3(b)に示す電子部品P参
照)を吸着して保持するために用いられるものである。
吸着ノズル10は本体部11と本体部11から下方に延
出した軸状の吸着部12により構成される。本体部11
の上部は円錐状のテーパ部11aとなっており、テーパ
部11aを実装ヘッド6に設けられた装着部6aに挿入
することにより、吸着ノズル10は実装ヘッド6に着脱
自在に装着される。
Next, the suction nozzle 10 of the electronic component P mounted on the mounting head 6 will be described with reference to FIG. The suction nozzle 10 is used for sucking and holding a chip-type electronic component (see an electronic component P shown in FIG. 3B) whose upper surface is a curved surface having a substantially partial cylindrical shape.
The suction nozzle 10 includes a main body 11 and a shaft-shaped suction portion 12 extending downward from the main body 11. Main body 11
Is formed in a tapered portion 11a having a conical shape. The suction nozzle 10 is detachably mounted on the mounting head 6 by inserting the tapered portion 11a into a mounting portion 6a provided on the mounting head 6.

【0013】テーパ部11aの内部には吸引孔11bが
形成されており、テーパ部11aを装着部6aに装着し
た状態では、吸引孔11bは装着部6aを介して接続さ
れた真空吸引手段14と連通する。吸引孔11bは、吸
着部12の内部に下端部まで貫通して設けられた吸着孔
12aと連通している。吸着ノズル10を実装ヘッド6
に装着した状態で、真空吸引手段14を駆動することに
より、吸着孔12aから真空吸引する。
A suction hole 11b is formed inside the tapered portion 11a. When the tapered portion 11a is mounted on the mounting portion 6a, the suction hole 11b is connected to the vacuum suction means 14 connected via the mounting portion 6a. Communicate. The suction hole 11b communicates with a suction hole 12a provided to penetrate to the lower end inside the suction portion 12. Attach suction nozzle 10 to mounting head 6
By driving the vacuum suction means 14 in the state of being attached to the, vacuum suction is performed from the suction holes 12a.

【0014】吸着部12は下部がテーパ状に細径に絞ら
れた形状となっており、下端部は吸着孔12aが開口し
電子部品Pと当接する当接開口部12bとなっている。
当接開口部12bを電子部品Pの上面に当接させた状態
で真空吸引手段14を駆動することにより、電子部品P
は吸着ノズル10により吸着保持される。吸着部12の
上方に設けられた円形の鍔部13の下面は電子部品認識
時に光源より照射される照明光を反射する反射板となっ
ており、吸着ノズル10に保持された電子部品を反射光
により上方から照明する。
The suction portion 12 has a lower portion tapered and narrowed to a small diameter, and a lower end portion is a contact opening portion 12b in which a suction hole 12a is opened to contact the electronic component P.
By driving the vacuum suction means 14 with the contact opening 12b in contact with the upper surface of the electronic component P, the electronic component P
Is held by the suction nozzle 10. The lower surface of the circular flange 13 provided above the suction unit 12 is a reflecting plate that reflects illumination light emitted from a light source when the electronic component is recognized. To illuminate from above.

【0015】次に図3を参照して、吸着部12の下端部
に形成された当接開口部12bの詳細形状について説明
する。図3(a)に示すように、当接開口部12bのノ
ズル軸線(直線a)に平行かつ特定一方向(紙面に対し
て垂直方向)に直交する任意位置の側断面形状は、曲率
Rの円弧状となっている。この円弧の曲率などの詳細形
状は、吸着対象となる電子部品Pの上面の曲面形状に応
じて決定される。この曲面形状は、厳密な円弧形状から
幾分はずれた近似的な円弧(略円弧)形状であってもよ
い。
Next, referring to FIG. 3, the detailed shape of the contact opening 12b formed at the lower end of the suction section 12 will be described. As shown in FIG. 3A, the side cross-sectional shape at any position parallel to the nozzle axis (straight line a) of the contact opening 12b and orthogonal to one specific direction (perpendicular to the paper surface) is the curvature R. It has an arc shape. The detailed shape such as the curvature of the arc is determined according to the curved shape of the upper surface of the electronic component P to be suctioned. This curved surface shape may be an approximate arc shape (substantially arc shape) slightly deviating from the strict arc shape.

【0016】したがって、上記特定一方向を電子部品P
の辺方向に合わせて、吸着部12を電子部品Pの上面A
に当接させた状態では、図3(b)に示すように当接開
口部12bは電子部品Pの上面Aの曲面形状にならう。
これにより、部分円筒形状などの凸状上面の頂部のみが
当接開口部12bに当接して位置ずれを生じたり、吸着
時の姿勢が不安定になるなどの不具合が発生しない。し
たがって、従来の吸着ノズルを用いた場合に発生してい
た、位置ずれや吸着ミスを防止することができ、確実な
実装を行うことができる。
Therefore, the specific one direction is determined by the electronic component P
Of the electronic component P in accordance with the side direction of the electronic component P.
3B, the contact opening 12b follows the curved shape of the upper surface A of the electronic component P as shown in FIG.
Thus, there is no problem such that only the top of the convex upper surface such as the partial cylindrical shape contacts the contact opening 12b to cause a positional shift or an unstable posture during suction. Therefore, it is possible to prevent a displacement and a suction error which occur when the conventional suction nozzle is used, and to perform a reliable mounting.

【0017】[0017]

【発明の効果】本発明によれば、吸着部の下端部に形成
され電子部品の上面と当接する当接開口部のノズル軸線
に平行かつ特定一方向に直交する任意位置の側断面形状
を、電子部品の上面の曲面形状にならう略円弧状とした
ので、チップ型の電子部品を安定して保持することがで
き、位置ずれや吸着ミスを防止して安定した実装を確保
することができる。
According to the present invention, the side cross-sectional shape at any position parallel to the nozzle axis of the contact opening formed at the lower end portion of the suction portion and in contact with the upper surface of the electronic component and orthogonal to the specific one direction, Since it has a substantially arc shape following the curved shape of the upper surface of the electronic component, it is possible to stably hold the chip-type electronic component, to prevent displacement and suction error, and to secure stable mounting. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態の電子部品実装装置の斜
視図
FIG. 1 is a perspective view of an electronic component mounting apparatus according to an embodiment of the present invention.

【図2】本発明の一実施の形態の電子部品実装装置の実
装ヘッドの部分断面図
FIG. 2 is a partial sectional view of a mounting head of the electronic component mounting apparatus according to one embodiment of the present invention;

【図3】本発明の一実施の形態の電子部品の吸着ノズル
の部分断面図
FIG. 3 is a partial sectional view of a suction nozzle of the electronic component according to the embodiment of the present invention;

【図4】(a)微小チップの斜視図 (b)従来の吸着ノズルによる微小チップの吸着保持状
態の説明図
FIG. 4A is a perspective view of a microchip, and FIG. 4B is an explanatory view of a state in which a microchip is suction-held by a conventional suction nozzle.

【符号の説明】[Explanation of symbols]

6 実装ヘッド 10 吸着ノズル 11 本体部 11b 吸引孔 12 吸着部 12a 吸着孔 12b 当接開口部 P 電子部品 Reference Signs List 6 Mounting head 10 Suction nozzle 11 Main body 11b Suction hole 12 Suction unit 12a Suction hole 12b Contact opening P Electronic component

フロントページの続き Fターム(参考) 3C007 AS08 CY03 DS01 FS01 FT08 FT10 MT04 NS08 NS17 5E313 AA03 AA11 CC03 EE24 FF24 FF28 Continued on the front page F term (reference) 3C007 AS08 CY03 DS01 FS01 FT08 FT10 MT04 NS08 NS17 5E313 AA03 AA11 CC03 EE24 FF24 FF28

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】電子部品実装装置の実装ヘッドに装着され
この実装ヘッドと連通した吸引孔から真空吸引すること
により、上面が略部分円筒状の曲面であるチップ型の電
子部品を下端部に真空吸着する電子部品の吸着ノズルで
あって、前記実装ヘッドに装着され前記吸引孔が設けら
れた本体部と、電子部品に当接してこの電子部品を吸着
する吸着孔が設けられた吸着部と、この吸着部の下端部
に形成され前記吸着孔が開口し前記電子部品の上面と当
接する当接開口部とを備え、この当接開口部のノズル軸
線に平行かつ特定一方向に直交する任意位置の側断面形
状は、前記電子部品の上面の曲面形状にならう略円弧状
であることを特徴とする電子部品の吸着ノズル。
1. A chip type electronic component having an upper surface having a substantially cylindrical shape is vacuumed to a lower end by vacuum suction through a suction hole which is mounted on a mounting head of an electronic component mounting apparatus and communicates with the mounting head. A suction nozzle of an electronic component to be sucked, wherein the main body portion is mounted on the mounting head and provided with the suction hole, and a suction portion provided with a suction hole for contacting the electronic component and sucking the electronic component; A contact opening formed at a lower end portion of the suction portion, wherein the suction hole is open and is in contact with an upper surface of the electronic component; and an arbitrary position parallel to the nozzle axis of the contact opening and orthogonal to a specific direction. The suction nozzle of an electronic component according to claim 1, wherein the side cross-sectional shape is substantially arc-shaped following the curved shape of the upper surface of the electronic component.
【請求項2】チップ型電子部品を真空吸着により保持し
て基板に実装する電子部品実装装置であって、前記電子
部品の上面に当接して真空吸着する吸着ノズルと、この
吸着ノズルが装着される実装ヘッドと、実装ヘッドを電
子部品の供給部と前記基板との間で移動させる移動手段
と、前記実装ヘッドを介して吸着ノズルから真空吸着す
る真空吸引手段とを備え、前記吸着ノズルは、請求項1
記載の電子部品の吸着ノズルであることを特徴とする電
子部品実装装置。
2. An electronic component mounting apparatus for mounting a chip-type electronic component on a substrate while holding the electronic component by vacuum suction, comprising: a suction nozzle that abuts on an upper surface of the electronic component and vacuum-adsorbs; A mounting head, a moving unit for moving the mounting head between the electronic component supply unit and the substrate, and a vacuum suction unit for performing vacuum suction from a suction nozzle via the mounting head, wherein the suction nozzle includes: Claim 1
An electronic component mounting apparatus characterized in that the electronic component mounting nozzle is a suction nozzle for the electronic component described in the above.
JP2001089487A 2001-03-27 2001-03-27 Electronic part sucking nozzle and electronic part mounting device Pending JP2002283265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001089487A JP2002283265A (en) 2001-03-27 2001-03-27 Electronic part sucking nozzle and electronic part mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001089487A JP2002283265A (en) 2001-03-27 2001-03-27 Electronic part sucking nozzle and electronic part mounting device

Publications (1)

Publication Number Publication Date
JP2002283265A true JP2002283265A (en) 2002-10-03

Family

ID=18944411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001089487A Pending JP2002283265A (en) 2001-03-27 2001-03-27 Electronic part sucking nozzle and electronic part mounting device

Country Status (1)

Country Link
JP (1) JP2002283265A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104477643A (en) * 2014-11-26 2015-04-01 台州迈得医疗工业设备股份有限公司 Suction structure for catheter feeding
CN109968344A (en) * 2019-04-30 2019-07-05 哈尔滨工业大学 A kind of Pneumatic multifunctional flexible manipulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104477643A (en) * 2014-11-26 2015-04-01 台州迈得医疗工业设备股份有限公司 Suction structure for catheter feeding
CN109968344A (en) * 2019-04-30 2019-07-05 哈尔滨工业大学 A kind of Pneumatic multifunctional flexible manipulator

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