JP2002280151A - Ceramic coating heater and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heater superior in adhesion of a heat generating part on a heat radiation base material and tightly retaining the heat generating part with integrating to the heat radiating base material. SOLUTION: This heater is provided with a heat radiating base material 1, a ceramic layer 2 formed on the heat radiating base material 1 as an inorganic first layer by applying ceramic coating, a heat generating body layer 3 of foil heat generating element with a designated pattern provided on the ceramic layer 2 of the first layer as a second layer, and a ceramic layer 4 formed on the foil heat generating element and the ceramic layer 2 of the first layer exposing between the pattern of the foil heat generating element with applying ceramic coating as an inorganic third layer on the heat generating body layer 3 of the second layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of a heater in which a heat ray is radiated from the surface of a heat radiating substrate provided with a heat generating portion, and more particularly to an insulating material formed on one side of the heat radiating substrate by ceramic coating. TECHNICAL FIELD The present invention relates to a ceramic coating heater having a heating portion in which a foil-like heating element is provided between layers, and a method for manufacturing the same.

[0002]

2. Description of the Related Art A conventional heater shown in FIG. 4 has a heat-generating portion 500 attached to one side of a heat-radiating base material 100 such as an aluminum plate, and a heat-reflecting plate 600 is mounted on the heat-generating portion 500. is there.

[0003] The heating section 500 is composed of two insulating layers 20.
The insulating elements 200 and 400 are formed in a sheet shape by impregnating an inorganic substance such as mica (mica) or glass fiber with a binder resin. There is also a heating element 300,
It is formed by forming a conductive metal such as nickel, platinum, and tungsten in a foil shape. In addition, the heat reflection plate 600 includes:
A metal plate made of aluminum, stainless steel, or the like having a heat reflecting film made of silver, gold, platinum, or the like formed on the surface facing the heat generating section 500.

In such a heater, when an electric current is applied to the heat generating element 300 of the heat generating portion 500 to generate heat, the direct heat from the heat generating portion 500 and the heat reflected from the heat reflecting plate 600 are converted to the heat radiating base material. Then, heat rays 800 such as far infrared rays are emitted from the surface of the heat radiation base material 100.

On the other hand, as a method of manufacturing the heater, an insulating layer 20 obtained by impregnating and drying a mica or the like with a binder resin is used.
The heating element 300 is sandwiched between 0 and 400 via an adhesive such as a silicon-based material, and heated and pressed to form the heating portion 500. The heating portion 500 is connected to the heating device 500 via an adhesive such as a silicon-based material. After laminating on one side of the heat radiating substrate 100, a heat reflecting plate 600 is arranged on the heat generating portion 500,
By fixing the whole with bolts or the like. This allows
One in which the heat generating portion 500 is integrated on one side of the heat dissipation base material 100 is obtained.

[0006]

However, in the manufacture of the above-described heater, the step of forming desired insulating layers 200 and 400 is necessary to form the heat generating portion 500, and further, the heat generating element 300 is sandwiched. Since the step of thermocompression bonding is indispensable, the number of steps is large and the manufacturing process is complicated.

Further, the heat-generating portion 500 is bonded to the heat-radiating base material 100, and the insulating layers 200 and 4 in the heat-generating portion 500 are formed.
An adhesive is used to attach the heat generating element 300 to the metal layer 00, and pinholes are formed in some places due to volatilization of organic components in the adhesive. Moreover, the insulating layers 200 and 400
Since the binder resin is also impregnated, pinholes are also formed in the insulating layers 200 and 400 themselves due to volatilization of some components of the binder resin. The heat generating portion 500 and the heat radiating base 100
In this case, the adhesiveness between the insulating layers 200 and 400 of the heating section 500 itself and the heating element 300 is reduced. Therefore, the thermal conductivity from the heat generating part 500 to the heat radiating base 100 is reduced, and the power consumption is increased.

Further, the heat generating portion 500 itself also has an insulating layer 200,
Since the heat generating element 300 is heated and pressed between the insulating layers 200 and 400 between the insulating layers 200 and 400,
It is difficult to hold 0 firmly. Insulating layer 20
0,400 and the thermal expansion coefficient of the heating element 300 are different. Therefore, if the heater is repeatedly turned on and off for a long period of time, the heat generating element 300 also repeats thermal expansion and thermal contraction, and the insulating layers 200 and 400 are peeled off over time.

[0009] There is also a problem that mica and the like forming the insulating layers 200 and 400 are scattered with the peeling of the insulating layers 200 and 400 to generate dust. The present invention has been made in view of the above circumstances, and has excellent adhesion of a heat generating portion to a heat radiating base material, and a ceramic coating heater in which the heat generating portion is firmly held by being integrated with the heat radiating base material. It is an object to realize a manufacturing method.

[0010]

Means for Solving the Problems Technical means of the present invention taken to solve the above problems are as follows. (1) The ceramic coating heater is "a heater provided with a heat-generating element having a heat-generating element between insulating layers on one side of a heat-radiating base material, and is formed of an inorganic material on the heat-radiating base material as the heat-generating part. A ceramic layer formed by ceramic coating as a first layer, and a second layer on the first ceramic layer
A heating element layer composed of a foil-shaped heating element having a predetermined pattern provided as a layer; and a third layer composed of an inorganic material on the second heating element layer, the above-mentioned foil-shaped heating element and the foil formed by ceramic coating. A ceramic layer formed on the first ceramic layer exposed between the patterns of the heating elements. Therefore, according to the ceramic coating heater, the first
Since the layer and the third ceramic layer are formed by ceramic coating, the first ceramic layer, the second heating element layer, and the third ceramic layer are firmly attached to each other on the heat dissipation base. It comes into close contact and integrated.

Further, since the first ceramic layer, the second heating element layer, and the third ceramic layer are firmly bonded to each other, the second heating element layer is connected to the first layer. It is firmly held between the third ceramic layers. Further, since the first layer and the third layer are ceramic layers composed only of an inorganic substance without using mica or the like, there is no generation of dust due to peeling of mica or the like as in the related art.

(2) In the ceramic coating heater, "the thickness of each of the first and third ceramic layers is 5 μm to 300 μm. That is, when the thickness of the ceramic layer is 5 μm or more, the ceramic layer resists thermal expansion of the heating element, and cracks and the like do not occur in the ceramic layer. Further, when the thickness of the ceramic layer is 300 μm or less, heat can be efficiently conducted from the heating element layer to the heat dissipation base.

(3) Another ceramic coating heater is a heater provided with a heat-generating part having a heat-generating element provided between insulating layers on one side of a heat-radiating base material. A ceramic layer formed by ceramic painting as a layer made of an inorganic material on a material, and a heating element layer made of a foil-like heating element having a predetermined pattern embedded in the ceramic layer are provided. According to this, the heating element layer is further firmly held in the ceramic layer.

(4) In any one of the ceramic coating heaters described above, wherein the thickness of the heating element layer is 10 μm to 2 μm.
00 μm. That is, if the thickness of the heating element layer is 10 μm or more, the heat generation of the foil-shaped heating element is caused by turning on and off the heater.
Even if heat shrink is repeated, there is no disconnection. When the thickness of the heating element layer exceeds 200 μm, power consumption during heat generation increases, but when the thickness is 200 μm or less, power consumption for heat generation can be suppressed.

(5) On the other hand, a method of manufacturing a ceramic coating heater is described as follows.
An inorganic metal oxide sol is applied on the heat-dissipating substrate, and the applied inorganic metal oxide sol is dried to form a ceramic layer as a first layer composed of an inorganic material. Placing a foil-like heating element having a predetermined pattern on the ceramic layer, forming a heating element layer as a second layer,
The inorganic metal oxide sol is applied to the entire surface so as to cover the second heating element layer, and the applied inorganic metal oxide sol is dried to form an inorganic ceramic layer as a third layer. I do. In short, the above-mentioned method merely requires a foil-like heating element to be interposed in the process of applying the inorganic metal oxide sol onto the heat-dissipating base material, so that the number of manufacturing steps is very small. Therefore, there is no need for a step of forming a heat generating portion with a foil-like heat generating element interposed between insulating layers (adhesive application, heat compression bonding, etc.) or a step of bonding the heat generating portion to a heat radiating base as in the conventional case, thereby simplifying the manufacturing itself. As a result, the manufacturing process is shortened.

When the above-mentioned inorganic metal oxide sol is applied to the heat-radiating substrate and dried, the substituted hydroxyl groups in the inorganic metal oxide sol undergo a hydrolysis reaction and a condensation polymerization reaction on the surface of the heat-radiating substrate, resulting in gelation. Thereafter, a strong three-dimensional bond made of an inorganic material (ceramic) is formed (see FIG. 3). Such an inorganic coating film becomes the first ceramic layer. In this manner, the first ceramic layer is formed by the so-called sol-gel method, so that no pinholes are formed in the layer due to volatilization of organic components as in the prior art, and the heat dissipation base material is not formed. It becomes firmly adhered to.

Similarly, the third ceramic layer also has the first ceramic layer.
It is formed by applying and drying an inorganic metal oxide sol on a second heating element layer provided on a ceramic layer. Therefore, the third ceramic layer is firmly adhered to the foil-shaped heating element and the first ceramic layer exposed between the patterns of the foil-shaped heating element. As described above, the heat dissipation base material, the first ceramic layer, the second heating element layer, and the third ceramic layer are firmly adhered to each other and integrated.

(6) Another method for manufacturing a ceramic coating heater is a method for manufacturing a heater in which a heat-generating portion having a heat-generating element provided between insulating layers is formed on one side of a heat-radiating member. An inorganic metal oxide sol is applied on a material, and a foil-like heating element having a predetermined pattern is placed on the coating while the coating is wet, and then the inorganic heating is performed by covering the foil-like heating element. A metal oxide sol is applied, and the applied inorganic metal oxide sol is dried to form an inorganic ceramic layer, and the foil heating element is embedded in the ceramic layer. In this case, one drying step may be performed at the end,
It is possible to further reduce the number of manufacturing steps, and to obtain a ceramic element in which the heating element layer composed of the foil-like heating element is more firmly held in the ceramic layer.

(7) In any one of the above-mentioned methods for manufacturing a ceramic coating heater, the drying step of the inorganic metal oxide sol is performed by heating and drying at a temperature of 80 ° C. to 200 ° C. According to this, gelation and mineralization (ceramic conversion) of the inorganic metal oxide sol are performed in a short time.

Here, when the temperature condition is lower than 80 ° C., the above-mentioned gelation and mineralization proceed without much difference from drying at room temperature, while when the temperature condition exceeds 200 ° C., the inorganic metal oxide sol becomes There is a risk that the composition components will burn during drying, and no hydrolysis reaction or polycondensation reaction will take place and a good quality ceramic layer will not be formed.

(8) In any one of the above-described methods for producing a ceramic coating heater, the above-mentioned "inorganic metal oxide sol may be a mixture containing one or more organoalkoxysilanes of the following formula (I):

[0022]

Embedded image (In the formula (I), R ¹ is an organic group having 1 to 10 carbon atoms, and R ² is an alkyl group having 1 to 5 carbon atoms or 1 carbon atom.
To 4 and n is an integer of 0, 1, or 2. Or one or two metal alkoxides of the following formula (II):
A mixture comprising more than one species,

[0023]

Embedded image (In the formula (II), M is any metal of titanium, zirconium and aluminum, R ³ is an alkyl group having 1 to 4 carbon atoms, n is 0 when M is titanium or zirconium, When M is aluminum, it is 1.) or a mixture containing at least one kind of the organoalkoxysilane of the above formula (I) and at least one kind of the metal alkoxide of the above formula (II). 』

[0024]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a sectional view of a ceramic coating heater according to an embodiment of the present invention,
FIG. 2 shows a plan view in which a part of the ceramic coating heater is cut out.

As shown in FIGS. 1 and 2, the ceramic coating heater according to the embodiment includes a heat radiating substrate 1 and a heat generating portion 5 (first ceramic layer 2) formed on one side of the heat radiating substrate 1. , Heating element layer 3 and second ceramic layer 4)
And a heat reflection plate 6 provided on the heat generating portion 5.

In the ceramic coating heater, when the heating element layer 3 is energized to cause the heating section 5 to generate heat, the direct heat from the heating section 5 and the reflection heat from the heat reflection plate 6 dissipate the heat. Then, the heat rays 8 such as far infrared rays are emitted from the heat dissipation surface side of the heat dissipation base material 1.

The heat radiating substrate 1 is a substrate that emits heat rays 8 such as far infrared rays when heated to a predetermined temperature, such as a metal plate such as aluminum, a quartz glass plate, a ceramic plate, and a plastic plate. Is used. The thickness of the heat radiating substrate 1 is not particularly limited, but is about 5 mm to 30 mm.
mm. A heat-resistant protective film 7 is provided on the heat-radiating surface side of the heat-radiating base material 1 (the surface on which the heat-generating portion 5 is not formed).
Are formed. The heat-resistant protective film 7 serves as a surface protective film such as a ceramic coating film, and may be transparent, translucent, or colored in various colors such as white, black, and red. The wavelength level range of the heat ray 8 emitted from the heat radiating surface of the heat radiating substrate 1 can be varied depending on the color of the heat-resistant protective film 7. In this example, the heat-resistant protective film 7 is formed, but the heat-resistant protective film 7 may not be formed.

The heat generating section 5 generates heat for transferring heat to the heat radiating substrate 1 as described above, and includes a first ceramic layer 2 (first layer) and a second ceramic layer 4 (third layer). )
Have a structure in which the heating element layer 3 (second layer) is sandwiched between them.

The heating element layer 3 is a resistive film made of a foil-like heating element having a predetermined pattern, and is formed on the first ceramic layer 2 by plasma jet spraying, printing, etching or the like. This heating element layer 3
The thickness of the foil-shaped heating element is approximately 10 μm.
It is formed in a range of 200 μm. That is, when the thickness of the heating element layer 3 is 10 μm or more, the on / off of the ceramic coating heater does not cause disconnection even if the foil-shaped heating element repeatedly expands and contracts due to heat.
When the thickness of the heating element layer 3 exceeds 200 μm, power consumption during heat generation increases.
Power consumption for heat generation is reduced. As the foil heating element, for example, a conductive metal such as nickel, tungsten, molybdenum, stainless steel, platinum, copper, and brass is used.

The foil-like heating element is formed in a zigzag pattern as shown in FIG. With such a pattern shape, the area of the heating element layer 3 can be increased, and the stress on the first and second ceramic layers 2 and 4 due to the thermal expansion of the foil-shaped heating element can be reduced. Further, at both ends of the foil-shaped heating element, the electric input terminals 3a and 3b are hermetically sandwiched between the joining portions of the first and second ceramic layers 2 and 4 and project outward from the edges. Although not shown, the electric input terminals 3a and 3b are connected to the second
The ceramic layer 4 may be penetrated to be exposed on the surface. Further, a plurality of foil-like heating elements having the electric input terminals 3a and 3b may be arranged and arranged. In this case,
Each of the foil-like heating elements can generate heat independently, and local heat radiation is also possible.

The first ceramic layer 2 and the second ceramic layer 4 are made of 100% inorganic material.
Layer 2 and 4
The heating element layer 3 is firmly held in between, and the heat radiating substrate 1 and the heating section 5 are integrated. The first and second ceramic layers 2 and 4 are coated with an inorganic metal oxide sol described later on the heat dissipation base 1 and dried (ceramic coating).
Formed. These first and second ceramic layers 2
4 is formed in a range of approximately 5 μm to 300 μm. That is, if the thickness of each of the ceramic layers 2 and 4 is 5 μm or more, it resists the thermal expansion of the foil-like heating element,
Cracks and the like do not occur in the ceramic layers 2 and 4. The thickness of the ceramic layers 2 and 4 is 300 μm.
If it is below, heat conduction from the heating element layer 3 to the heat dissipation base 1 can also be performed efficiently.

Since the heating element layer 3 is formed by forming a foil-like heating element into a predetermined pattern, the second ceramic layer 4 is provided on the foil-like heating element and between the patterns of the foil-like heating element. Exposed first ceramic layer 2
It is formed in a state in which it is firmly adhered on top. The first and second ceramic layers 2 and 4 have a pencil strength of about 9H in hardness, and firmly hold the heating element layer 3 between the layers 2 and 4. Since the first and second ceramic layers 2 and 4 are formed by ceramic coating, the heat generating portion 5 is firmly adhered to the surface on which the heat radiating base material 1 is formed and integrated.

As the inorganic metal oxide sol forming the first and second ceramic layers 2 and 4, for example, a mixture containing one or more of organoalkoxysilanes of the following formula (I):

[0034]

Embedded image (In the formula (I), R ¹ is an organic group having 1 to 10 carbon atoms, and R ² is an alkyl group having 1 to 5 carbon atoms or 1 carbon atom.
To 4 and n is an integer of 0, 1, or 2. Or one or two metal alkoxides of the following formula (II):
A mixture comprising more than one species,

[0035]

Embedded image (In the formula (II), M is any metal of titanium, zirconium and aluminum, R ³ is an alkyl group having 1 to 4 carbon atoms, n is 0 when M is titanium or zirconium, When M is aluminum, it is 1.) Or, a mixture containing at least one kind of the organoalkoxysilane of the above formula (I) and at least one kind of the metal alkoxide of the above formula (II) is exemplified.

The above-mentioned organoalkoxysilane refers to all substances represented by the chemical formula of the above formula (I), for example, tetramethoxysilane, tetraethoxysilane, methyltrimethoxysilane, methyltriethoxysilane, Ethyltrimethoxysilane, ethyltriethoxysilane, n-propyltrimethoxysilane, n-propyltriethoxysilane, i-propyltrimethoxysilane, i-propyltriethoxysilane, vinyltrimethoxysilane, vinyltriethoxy Silane; phenyltrimethoxysilane, phenyltriethoxysilane and the like.

The above-mentioned metal alkoxide refers to all the substances represented by the chemical formula of the above formula (II), for example, trimethoxyaluminum, triethoxyaluminum, tripropoxyaluminum, tributoxyaluminum, tri-i- Propoxyaluminum, tri-sec-butoxyaluminum, tetramethoxytitanium, tetraethoxytitanium, tetrapropoxytitanium, tetrabutoxytitanium, tetra-i-propoxytitanium, tetra-sec-butoxytitanium, tetramethoxyzirconium, tetraethoxyzirconium, Tetrapropoxyzirconium, tetrabutoxyzirconium, tetra-i-propoxyzirconium, tetra-sec-butoxyzirconium and the like can be mentioned.

It is to be noted that a filler may be added to the metal oxide sol for the purpose of increasing the color, increasing the thickness, or improving the insulating property. Such fillers include, for example, oxide powders such as silica, alumina, zirconia, and titania; carbide powders such as silicon carbide and titanium carbide; nitrides such as silicon nitride, titanium nitride, aluminum nitride, and boron nitride; kaolin; Natural or synthetic minerals such as mica; whiskers such as alumina and silicon nitride; powders, whiskers and flakes such as glass and ceramics.

The heat reflection plate 6 is made of a base material such as a metal plate such as aluminum, a quartz glass plate, a ceramic plate, a plastic plate or the like. A reflection film is formed. The thickness of the heat reflecting plate 6 is not particularly limited, but is about 5 m.
m to about 30 mm. And this heat reflection plate 6
Although not shown, is fixed so as to be in close contact with the heat generating portion 5 by a bolt reaching the heat dissipation base 1. Note that, in this example, the heat reflection plate 6 is provided, but such a heat reflection plate 6 may not be provided.

According to the ceramic coating heater, since the first and second ceramic layers 2 and 4 are formed by ceramic coating, the first ceramic layer 2 and the heating element are formed on the heat radiation base 1. The layer 3 and the second ceramic layer 4 are firmly adhered to each other and integrated.
Accordingly, the heat generating portion 5 has excellent heat conductivity from the heat generating layer 3 to the heat radiating base 1, and as a result, power consumption in the heat generating layer 3 is reduced, and energy saving can be realized.

Further, since the layers 2, 3 and 4 are firmly joined to each other, the heating element layer 3 is formed of the first ceramic layer 2
And the second ceramic layer 4. Therefore, the first ceramic layer 2 and the second ceramic layer 4 are not peeled off even when the heating element layer 3 thermally expands in practical use, and have excellent heat resistance at high temperatures, and durability against vibration and impact in practical use. Also excellent.

Further, since the first ceramic layer 2 and the second ceramic layer 4 in contact with the first ceramic layer 2 are firmly joined to each other, the area occupied by the heating element layer 3 provided between these layers 2 and 4 can be increased. As a result, the heating element layer 3 is caused to partially generate heat, so that highly accurate temperature management can be realized locally.

Further, as described above, since the heat conductive layer is excellent in heat conductivity and durability, and the area of the heating element layer 3 can be increased, the heat radiating substrate 1 can be formed thin, and as a result, a lightweight and compact one can be realized. Further, since mica or the like as in the related art is not used for the heat generating portion 5, a dust-free and clean one can be realized without generation of dust due to peeling of the mica or the like.

Hereinafter, a method of manufacturing the above-described ceramic coated heater will be described. FIG. 3 is a schematic diagram showing a molecular arrangement state of the inorganic metal oxide sol during this manufacturing process. FIG. 3 shows a case where the inorganic metal oxide is tetraalkoxysilane. In FIG. 3, reference numeral 1 denotes the heat dissipating base material, and M denotes a constituent metal of the heat dissipating base material 1.

(1) First, an inorganic metal oxide sol is applied on the heat radiating substrate 1. At this time, the inorganic metal oxide sol is added to one or more of an organoalkoxysilane represented by the formula (I) or a metal alkoxide represented by the formula (II), or a mixture of one or more of these substances. It is adjusted by adding a desired solvent.

In the preparation of the inorganic metal oxide sol, the above-mentioned filler may be appropriately added for the purpose of increasing the color, increasing the film thickness, or improving the insulating properties. Then, in order to apply the inorganic metal oxide sol onto the heat radiating substrate 1, a spray method, a dipping method, a roll coating method,
Known methods such as a dipping method and a printing method are used. The thickness of the coating film at this time is approximately 5 μm to 300 μm.
The thickness of the first ceramic layer 2 corresponds to the thickness of the first ceramic layer 2. In addition, the heat radiation base material 1
When an aluminum plate is used, the surface to which the inorganic metal oxide sol is applied is blasted in advance and left in the air for a few days to form an oxide film having a thickness of several microns on the surface. The inorganic metal oxide sol may be applied. By doing so, the first ceramic layer 2 made of the above inorganic metal oxide becomes
What adheres more firmly to the surface is obtained.

(2) Next, the inorganic metal oxide sol after being applied to the heat radiating substrate 1 is dried, and the first ceramic layer 2 (first layer) composed only of the inorganic metal oxide is dried.
To form In the drying process, the inorganic metal oxide sol changes as shown in FIGS. 3 (a) to 3 (d).
That is, the inorganic metal oxide in the inorganic metal oxide sol applied on the heat radiation base material 1 (Si (OR) _{4 in} FIG. 3)
Are arranged on the surface of the heat radiation base material 1 as shown in FIG. Then, as the drying proceeds, as shown in FIG. 3 (b), a hydrolysis reaction of the substituted hydroxyl group in the inorganic metal oxide sol takes place, and gelation occurs. Subsequently, as the drying proceeds, as shown in FIGS. 3C and 3D, a polycondensation reaction occurs to form a strong three-dimensional bond (Si—O—Si) of the inorganic metal oxide, The first ceramic layer 2 composed of only such an inorganic metal oxide is formed.

Since the first ceramic layer 2 made of the inorganic metal oxide thus formed is formed by the so-called sol-gel method, no pinholes are formed in the layer and the first heat radiation layer is formed. The material 1 is firmly adhered.

The drying step may be natural drying or heating and drying at a temperature of 80 ° C. to 200 ° C.
That is, when heated and dried, the inorganic metal oxide sol is gelled and mineralized (ceramicized) in a short time. Here, when the temperature condition is lower than 80 ° C., the gelation and the progress of the mineralization are performed without much difference from the drying at room temperature. On the other hand, when the temperature condition is higher than 200 ° C., the composition component of the inorganic metal oxide sol is There is a possibility that a high-quality ceramic layer may not be formed without being subjected to hydrolysis reaction and polycondensation reaction due to burning during drying.

(3) Next, a foil-like heating element having a predetermined pattern is provided on the first ceramic layer 2 to form a heating element layer 3 as a second layer. The heating element layer 3 is formed by plasma jet spraying, printing, etching, or the like. The thickness of the foil-shaped heating element, which is the thickness of the heating element layer 3, is approximately 10 μm to 200 μm.
It is formed in the range of μm.

(4) Next, similarly to the case where the first ceramic layer 2 is formed, the inorganic metal oxide sol is applied to the entire surface so as to cover the second heating element layer 3, and The inorganic metal oxide sol is dried to form a third layer as a second layer.
The ceramic layer 4 is formed. Accordingly, the second ceramic layer 4 is firmly adhered to the foil-like heating element and the first ceramic layer 2 exposed between the patterns of the foil-like heating element.

The heat-resistant protective film 7 on the heat-radiating surface side (the surface on which the heat-generating portion 5 is not formed) of the heat-radiating base material 1 (see FIG. 1) is used when the second ceramic layer 4 is formed. The inorganic metal oxide sol is applied to the whole and is formed simultaneously with the formation of the second ceramic layer 2. However,
The heat-resistant protective film 7 may be formed at the same time as the formation of the first ceramic layer 2 or may be formed twice in the formation of the first ceramic layer 2 and the formation of the second ceramic layer 4. Alternatively, the first ceramic layer 2 and the second ceramic layer 4 may be formed separately.

As described above, the heat radiating substrate 1, the first ceramic layer 2, the heating element layer 3, and the second ceramic layer 4 are firmly adhered to each other and integrated. That is,
The heat generating portion 5 is almost completely integrated on one side of the heat radiation base material 1.

As described above, the above-mentioned method simply involves interposing the foil-like heating element (which becomes the heating element layer 3) in the process of applying the inorganic metal oxide sol on the heat dissipation base material 1. In addition, the number of manufacturing steps is very small. For this reason, there is no need to form the heat generating portion 500 with a foil-shaped heat generating element interposed between the insulating layers 200 and 400 (adhesive application, heat compression bonding, etc.) or to bond the heat generating portion 500 to the heat dissipation base 100 as in the related art. The manufacturing itself is simplified, and the manufacturing process is shortened.

Therefore, in the manufacturing method according to the above-described embodiment, the manufacturing process is simplified and the manufacturing process itself is shortened as compared with the conventional manufacturing method, so that the manufacturing cost can be reduced. Further, since the first and second ceramic layers 2 and 4 are formed by a so-called sol-gel method,
The first ceramic layer 2, the heating element layer 3, and the second ceramic layer 4, which are tightly adhered to each other and integrated on the heat radiating substrate 1, can be manufactured easily and at low cost.

(5) Finally, the heat-reflecting film forming surface side is placed on the heat-generating portion 5 side on the heat-generating portion 5 composed of the first ceramic layer 2, the heating element layer 3, and the second ceramic layer 4. The heat reflecting plate 6 is set facing the heat reflecting member 6 (see FIG. 1), and the heat reflecting plate 6 is fixed to the heat radiating base 1 with bolts. (1) to (5)
After the above steps, the ceramic coating heater shown in FIGS. 1 and 2 is completed.

In the manufacturing method according to the above embodiment, the heating element layer 3 and the second ceramic layer 4 are formed after the inorganic metal oxide sol applied on the heat radiating base 1 is dried. 1, a foil-like heating element (a heating element layer) is placed in a wet state until the applied inorganic metal oxide sol is dried, and then the inorganic metal oxide sol is placed on the foil-like heating element from above. May be applied and thereafter dried. Then, the drying process is the last 1
The number of manufacturing steps is reduced, and the number of manufacturing steps can be further reduced. In addition, the obtained heating part has a structure in which a heating element layer made of a foil-shaped heating element is embedded in a ceramic layer made of the above-mentioned inorganic metal oxide, and the heating element layer is held more firmly in this ceramic layer. It will be.

[0058]

According to the present invention, the following effects can be obtained. (1) Effect in ceramic coating heater Since the adhesiveness between each layer of the heat dissipation base material, the first ceramic layer, and the second heating element layer is high, the thermal conductivity from the heating element layer to the heat dissipation base material is high. Excellent. As a result, power consumption in the heating element layer is reduced, and energy saving can be achieved.

Since the heating element layer is firmly held between the first and third ceramic layers, even if the heating element layer thermally expands during practical use, the first and third ceramic layers may peel off. It has excellent heat resistance at high temperatures, and furthermore, has excellent durability against vibration and impact in practical use.

Moreover, since the first ceramic layer and the third ceramic layer in contact therewith are firmly joined to each other, the area occupied by the heating element layer provided between the first and third ceramic layers is reduced. Can be larger. As a result, the heating element layer is caused to partially generate heat, so that highly accurate temperature management can be realized locally. Since it is excellent in thermal conductivity and durability, and the area of the heating element layer can be increased, the heat radiation base material can be made thinner, and as a result, a lightweight and compact one can be realized. Since there is no generation of dust, a dust-free and clean product can be realized.

(2) Effects in the method of manufacturing the ceramic coating heater The manufacturing process is simplified and the manufacturing process itself is shortened, and the manufacturing cost can be reduced.

Since the first and third ceramic layers are formed by a so-called sol-gel method, the first ceramic layer and the second heating element layer are provided on the heat dissipation base material. In addition, it is possible to easily and inexpensively manufacture a structure in which the third ceramic layer is firmly adhered to each other and integrated.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a ceramic coating heater according to an embodiment of the present invention.

FIG. 2 is a plan view of a ceramic coating heater according to an embodiment of the present invention, with a portion cut away.

FIG. 3 is a schematic diagram for explaining a process of forming a first ceramic layer in the ceramic coating heater on a molecular level.

FIG. 4 is a sectional view showing a conventional heater.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heat dissipation base material 2 1st ceramic layer (1st layer) 3 Heating element layer (2nd layer) 3a, 3b Electric input terminal 4 2nd ceramic layer (3rd layer) 5 Heat generation part 6 Heat reflection plate 7 Heat protection film 8 Heat wire

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Sakae Hattori 2-3-15 Takakuracho, Miyakojima-ku, Osaka-shi Inside Hattori Heating Industry Co., Ltd. (72) Inventor Takashi Onaka 3-chome Mikuni Honcho, Yodogawa-ku, Osaka-shi No. 9-39 Japan Aluminum Co., Ltd. (72) Inventor Kim Jong-sam In Bunmyeong-e, Wonju, Gangwon-do, Republic of Korea F-term 5-3 Korean Fine Ceramics Co., Ltd. F term (reference) 3K034 AA02 AA15 AA22 BA06 BB06 BB14 BC17 FA13 FA20 FA21 FA29 FA30 JA01 JA10 3K092 QA05 QB02 QB31 QB45 QB62 QB74 RF03 RF11 RF19 RF27 SS12 SS17 SS18 SS24 SS48 TT30

Claims (8)

[Claims] 1. A heater provided with a heat-generating part having a heat-generating element provided between insulating layers on one side of a heat-radiating base material, wherein the heat-generating part is a first layer made of an inorganic material on the heat-radiating base material. A ceramic layer formed by ceramic coating; a heating element layer including a foil-like heating element having a predetermined pattern provided as a second layer on the first ceramic layer; and a heating element layer on the second layer A ceramic layer formed on the foil-like heating element by ceramic coating and on the first ceramic layer exposed between the patterns of the foil-like heating element as a third layer composed of an inorganic material. And ceramic coating heater. 2. The ceramic coating heater according to claim 1, wherein each of the first and third ceramic layers has a thickness of 5 mm.
A ceramic coating heater having a thickness of from μm to 300 μm. 3. A heater provided with a heat-generating part having a heat-generating element provided between insulating layers on one side of a heat-radiating base material, wherein the heat-generating part is ceramic-coated on the heat-radiating base material as a layer made of an inorganic material. A ceramic coating heater comprising: a ceramic layer formed by the above method; and a heating element layer including a foil-shaped heating element having a predetermined pattern embedded in the ceramic layer. 4. The ceramic coating heater according to claim 1, wherein said heating element layer has a thickness of 10 μm to 200 μm. 5. A method of manufacturing a heater in which a heat-generating portion in which a heat-generating element is provided between insulating layers is formed on one side of a heat-radiating member, wherein an inorganic metal oxide sol is applied on the heat-radiating base material. The inorganic metal oxide sol after application is dried to form a ceramic layer as a first layer made of an inorganic material, and a foil-like heating element having a predetermined pattern is placed on the first ceramic layer. A heating element layer is formed as two layers, the inorganic metal oxide sol is applied to the entire surface covering the heating element layer of the second layer, and the inorganic metal oxide sol after the application is dried to be inorganic. A method for manufacturing a ceramic coating heater, comprising forming a ceramic layer as a third layer to be constituted. 6. A method for manufacturing a heater in which a heat-generating portion in which a heat-generating element is provided between insulating layers is formed on one side of a heat-radiating member, wherein an inorganic metal oxide sol is applied on the heat-radiating base material. A foil-like heating element having a predetermined pattern is placed on the coating film while the coating film is wet. Subsequently, the inorganic metal oxide sol is applied so as to cover the foil-like heating element. A method for manufacturing a ceramic coating heater, comprising drying a metal oxide sol to form a ceramic layer composed of an inorganic material, and embedding the foil-like heating element in the ceramic layer. 7. The method for manufacturing a ceramic coating heater according to claim 5, wherein the drying step of the inorganic metal oxide sol is carried out at 80 ° C. to 20 ° C.
A method for manufacturing a ceramic coating heater, wherein the heating is performed at a temperature of 0 ° C. 8. The method for manufacturing a ceramic coating heater according to claim 5, wherein the inorganic metal oxide sol is one or more of organoalkoxysilanes of the following formula (I).
A mixture comprising more than one species, (In the formula (I), R ¹ is an organic group having 1 to 10 carbon atoms, and R ² is an alkyl group having 1 to 5 carbon atoms or 1 carbon atom.
To 4 and n is an integer of 0, 1, or 2. Or one or two metal alkoxides of the following formula (II):
A mixture comprising more than one species, (In the formula (II), M is any metal of titanium, zirconium and aluminum, R ³ is an alkyl group having 1 to 4 carbon atoms, n is 0 when M is titanium or zirconium, When M is aluminum, it is 1) or a mixture comprising at least one organoalkoxysilane of the formula (I) and at least one metal alkoxide of the formula (II). Manufacturing method of ceramic coating heater.