JP2002277366A - Testing machine for film, and method for vacuum film formation based on measurement data provided by testing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure and evaluate before formation of a thin deposition film, behaviors of a weblike plastic film under various conditions in vacuum inside a film testing machine in the weblike plastic film formed thereon with the thin deposition film by a chemical vapor deposition method(CVD) or the like, grasp the optimum film-forming condition based on a measuered result provided by the testing machine, and form the stable thin deposition film. SOLUTION: This testing machine is provided with a vacuum chamber 27, a film fixing part 26 for regulating tensile strength of the film in the vacuum chamber 27, and a gas measuring means for measuring released gas from the film.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical vapor deposition (CVD) method using a plastic film.
In film formation processes such as Vapor and Deposition, etc., it has a mechanism that can arbitrarily set the temperature and tension of the film in order to evaluate various behaviors when forming a deposited layer, and enables film to be exposed to plasma. Related to a film testing machine.

[0002]

2. Description of the Related Art For example, as an apparatus for depositing a film on a plastic film in a vacuum, as shown in FIG.
It has a winding shaft 1 having winding means capable of winding with a constant tension such as a torque motor, and applies a predetermined back tension to the web-shaped plastic film 9 while applying a constant back tension by a torque control means such as a powder clutch. It has an unwinding shaft 2 that enables unwinding. Further, a plurality of idle rollers 3 and 4 for regulating the running of the plastic film 9 between the two shafts and a tension detector 5 for detecting tension and providing appropriate feedback to the winding shaft 1 or the unwinding shaft 2. , 6 are provided with tension rollers 7, 8.
Further, a temperature control drum 10 for controlling the temperature of the plastic film 9 and forming a film on the surface thereof, and a film forming means including an electrode 11 and a plurality of process gas ejection pipes 17 and 18 are provided. Then, after a web-shaped plastic film 9 that is unwound while being given a predetermined tension from the unwinding shaft 2 is formed on the surface of the plastic film 9 on the temperature control drum 10 by the above-described film forming means, It is wound on the winding shaft 1 with a predetermined tension,
The structure was such that a film 13 having a vapor deposited thin film formed on the surface could be obtained.

[0003]

However, the conventional technique as shown in FIG. 2 has the following problems. The pressure in the vacuum chamber rises due to the released gas from the unwound plastic film 9 and the released gas caused by the heat load during film formation and the temperature increase of the plastic film 9 due to the heat transfer from the temperature control drum 10. Film formation cannot be performed under stable conditions. Further, there is a problem that various kinds of released gas itself from the plastic film 9 are involved in the reaction and a stable film quality cannot be obtained.

[0004] Further, there is a problem that elongation or shrinkage of the plastic film 9 due to a change in temperature adversely affects the winding system, or leads to cracking or deterioration of the deposited thin film.
However, there is no means for evaluating the characteristics of the plastic film 9 in these vacuum chambers, and various kinds of thin films have been formed on the plastic film 9 by experience.

An object of the present invention is to provide a chemical vapor deposition (CV) method.
D) Before forming a thin film of a plastic film on which a vapor-deposited thin film is to be formed, the behavior of the film under various conditions in a vacuum can be measured and evaluated in a film tester. It is an object of the present invention to grasp the optimum conditions for film formation based on the measured results and to form a stable vapor-deposited thin film.

[0006]

According to a first aspect of the present invention, there is provided a vacuum chamber, a film fixing portion capable of adjusting a tension of the film in the vacuum chamber, and a gas measuring device for measuring a gas released from the film. And a film testing machine.

Next, a second aspect of the present invention is the film testing machine according to the first aspect, further comprising a film elongation measuring means.

Next, a third aspect of the present invention is a film testing machine according to the first or second aspect, further comprising a film temperature measuring means and a temperature adjusting means. is there.

A fourth aspect of the present invention is a film test apparatus according to any one of the first to third aspects, further comprising a plasma generator for plasma-treating the film. Machine.

According to a fifth aspect of the present invention, there is provided a vacuum processing apparatus comprising: performing vacuum processing under conditions adjusted based on a measurement result obtained by the film tester according to any one of the first to fourth aspects. This is a film forming method.

[0011]

According to the film tester of the present invention, the temperature change of the film in a vacuum and the type and amount of gas released from the plastic film upon plasma exposure are measured.
It is possible to evaluate and to measure the amount of elongation of the film when various temperatures and tensions are applied, so that appropriate film forming conditions in a vacuum film forming apparatus are set based on the measurement results. And a desired thin film can be obtained accurately.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a film tester according to the present invention will be described in detail with reference to embodiments.

As shown in FIG. 1, the film tester of the present invention is equipped with a quadrupole mass spectrometer 19 in a vacuum chamber 27, and this mass spectrometer 19 can measure various kinds of released gas from a plastic film 20. It has become.

Further, a temperature controller 24 as a heating means for the plastic film 20 is provided so that the temperature of the plastic film 20 can be changed. The temperature of the plastic film 20 can be measured by a thermocouple 22 such as a contact thermocouple or a non-contact infrared thermocouple.

By rotating a take-up roller (not shown) for fixing the plastic film 20 with a motor or the like (not shown), tension can be applied to the plastic film 20, and the rotation angle of the take-up roller 26 can be reduced. By measuring, the elongation amount of the plastic film 20 can be obtained by calculation. The tension can be measured by the tension sensor 23 attached to the other roller.

Further, an electrode 21 is provided so that various effects of the plasma discharge on the plastic film 20 can be grasped by performing a plasma discharge.

Various measurement data obtained by using the film tester of the present invention are as follows. The surface temperature of the film when applying various temperatures to the plastic film in vacuum, the elongation of the film when applying the various temperatures to the plastic film in vacuum, and the application of various temperatures to the plastic film in vacuum. The types of various gases released from the film, the amounts of those gases, and various effects on the surface state of the plastic film when the film is exposed to a plasma atmosphere in a vacuum.

A sufficient preliminary test is performed using the film tester of the present invention, and analysis is performed from various viewpoints based on the obtained various measurement data. Thereafter, various conditions when forming a film on a web-like plastic film by a vacuum film forming apparatus, for example, a temperature applied to the plastic film, a tension and a transfer speed, an introduction amount of a monomer gas serving as a deposition material, a reaction gas Various optimum thin films can be formed on a plastic film by setting the optimum conditions such as the introduction amount of the film or the degree of vacuum in the vacuum chamber and performing the film forming process.

[0019]

The film tester of the present invention is provided with a plastic film heating section, a plastic film surface temperature measuring section, a tension sensor and the like in its vacuum chamber, so that the plastic film can be heated at various temperatures in a vacuum. It is possible to measure and evaluate the surface temperature of the film when heated and the elongation of the film when various tensions are applied.Furthermore, it is equipped with a means for exposing the plastic film to plasma and a mass spectrometer. The type and amount of gas released from the film when the film is exposed to the plasma atmosphere can be grasped. Furthermore, using the film tester of the present invention, the behavior of the plastic film under various conditions is measured in advance in a vacuum, and the film forming conditions in the vacuum film forming apparatus are optimally set based on the measured data. By doing so, it is possible to efficiently form a target thin film on a plastic film.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view showing an overall view of a film tester of the present invention.

FIG. 2 is a schematic explanatory view showing an overall view of a winding type vacuum film forming apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Winding shaft 2 ... Unwinding shaft 3, 4 ... Idle roller 5, 6 ... Tension detector 7, 8 ... Tension roller 9 ... Plastic film 10 ... Temperature control drum 11 ... Film forming means (electrode, etc.) 12 ... Web-shaped plastic film raw material 13 Web-formed plastic film with deposited film 14, 15 Nip roller 16, 17 Dancer roller 18 Gas supply tube 19 Quadrupole mass spectrometer 20 Plastic film 21 Electrode 22 ... thermocouple 23 ... tension sensor 24 ... temperature controller 25 ... gas introduction pipe 26 ... winding roller 27 ... vacuum chamber 28 ... vacuum pump

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Kyoichi Yamamoto 1-5-1, Taito, Taito-ku, Tokyo Toppan Printing Co., Ltd. (72) Inventor Naoto Kusaka 1-5-1, Taito, Taito-ku, Tokyo No. Toppan Printing Co., Ltd. F-term (reference) 2G061 AA01 AB01 CA10 CB01 DA01 EA02 4K030 CA07 CA12 FA01 GA14 KA39 LA24

Claims (5)

[Claims] 1. A film tester comprising: a vacuum chamber; a film fixing portion capable of adjusting the tension of the film in the vacuum chamber; and gas measuring means for measuring gas released from the film. 2. The film testing machine according to claim 1, wherein
A film tester further comprising film elongation measuring means. 3. The film testing machine according to claim 1, further comprising a film temperature measuring means and a temperature adjusting means. 4. The film tester according to claim 1, further comprising a plasma generator for plasma-treating the film. 5. A vacuum film forming method, comprising performing a vacuum deposition process under conditions adjusted based on a result of measurement by the film tester according to claim 1.