JP2002277342A - Leakage testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a leakage testing device capable of measuring accurately the pressure inside a test object without increasing test man-hours, and detecting leakage from the test object with extremely high accuracy. SOLUTION: A pipe 17 is connected to the test object 11 housed airtightly in a vacuum chamber 12. The pipe 17 is drawn out airtightly to the outside of the chamber 12 and connected to an exhaust pump 16, and a valve V2 for controlling exhaust gas from the exhaust pump 16 is installed. Air and tracer gas introduced to the inside of the test object 11 are controlled respectively by valves V4, V5. One end part of a pipe 19 is inserted into the pipe 17, and the tip thereof is arranged inside the test object 11, and the other end part is drawn out airtightly to the outside of the pipe 17 and connected to a pressure sensor 14. The exhaust gas in the test object 11 is controlled based on the pressure detection result by the pressure sensor 14. Then, the tracer gas is introduced, and the leakage from the test object 11 is detected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of introducing a tracer gas (He or the like) into a device under test or a chamber to determine whether or not there is a leak of the tracer gas from the device under test or whether there is a leak exceeding an allowable limit. The present invention relates to a leakage test device for determining.

[0002]

2. Description of the Related Art Conventionally, there are the following leak test apparatuses (leak testers). FIG. 9 is a schematic view showing a conventional leak test apparatus. As shown in FIG. 9, in a conventional leak test apparatus, a test object (work) 111 can be stored in a vacuum chamber 112 in an airtight manner. The test object 111 is connected to a pipe 117, and the pipe 117 is led out of the chamber 112 in an airtight manner. The device under test 111 is connected to the exhaust pump 116 via the pipe 117. The pipe 117 is provided with a valve V12. The pipe 117 is provided with an air source 121 and a tracer gas supply source 122, respectively.
4 through which air (air) and a tracer gas (He or the like) are introduced into the test object 111, respectively. The pipe 123 and the pipe 124 are provided with a valve V14 and a valve V15, respectively. The flow rates of the air and the tracer gas introduced into the test object 111 are adjusted by the opening degree and the opening / closing time of the valve V14 and the valve V15, respectively. Can be.

On the other hand, a vacuum chamber 112 has a pipe 118
The pipe 118 is connected to the exhaust pump 11
5. The pipe 118 is provided with a valve V11. Further, an air source 125 is connected to the pipe 118 via a pipe 126 so as to introduce air into the chamber 112.
This pipe 126 is provided with a valve V13,
The flow rate of the air introduced into the chamber 112 can be adjusted by the opening degree and opening / closing time of the valve V13. The pressure sensor 114 is connected to the pipe 117 and detects the pressure in the device under test 111. The chamber 112 is connected to a tracer gas detector 113 by a pipe 128. The pipe 128 is provided with a sensing valve (sensor pipe) V16.

Next, a description will be given of a leak test method using the conventional leak test apparatus configured as described above. It is assumed that the maximum permissible value of the pressure in the test object 111 for the normal operation of the tracer gas detector to reliably detect the leak has been obtained in advance.

First, a test object 111 is placed in a chamber 112.
And the test object 111 and the pipe 117 are connected. Next, the exhaust pumps 115 and 116 are driven, the valves V11 and V12 are opened, and the inside of the chamber 112 and the inside of the device under test 111 are exhausted. At this time, while the pressure in the test object 111 is detected by the pressure sensor 114, the pressure in the test object 111 becomes equal to or lower than a prescribed pressure (maximum allowable value) at which the tracer gas detector 113 normally operates. And the valve V11 is closed. Next, the sensing valve V16 is opened, and the chamber 112 and the detector 113 are connected. Thereafter, the valve V12 is closed, the valve V15 is opened, and the tracer gas is introduced into the test object 111. Then, the test object 111 is detected by the tracer gas detector 113.
Detects tracer gas leaked from Here, if the test object 111 has a leak, the leaked tracer gas is detected by the tracer gas detector 113 through the sensing valve V16. Then, a value after a predetermined time (leak rate value) is compared with a predetermined threshold value, and whether or not the DUT 111 passes is determined based on whether or not the leak rate value is equal to or less than the threshold value. It is determined.

After the test is completed, the pressure is returned to the atmospheric pressure as follows. First, the valves V15 and V16 are closed, the valve V12 is opened, and the tracer gas in the test object 111 is exhausted. Then, the valves V13 and V14 are opened, the atmosphere is introduced into the DUT 111 and the chamber 112, and the pressure of the DUT 111 and the chamber 112 is returned to the atmospheric pressure. Thereafter, the device under test 111 is taken out of the chamber 112.

[0007]

However, in the prior art, since the pressure in the test object 111 is detected by the pressure sensor 114 connected to the pipe 117, the gas is discharged when the air is exhausted and the trace gas is introduced. This causes a problem that the pressure in the work cannot be accurately detected due to the pressure loss due to the flow of the gas.

Further, in order to accurately detect the pressure inside the test object, separately from the pressure sensor 114 connected to the pipe 117, as shown in FIG. And a pressure sensor 1 connected to the pipe 120.
27 can be provided to detect the pressure in the test object 111, but in this case, the pipe 1 is used every time a leak test is performed.
20 needs to be connected to the device under test 111. Further, there is a problem that it is necessary to provide a communication port for connecting the pipe 120 to the test object 111.

The present invention has been made in view of the above problems, and accurately measures the pressure in a test object without increasing the number of test steps, and detects leakage of the test object with extremely high accuracy. It is an object of the present invention to provide a leak test apparatus that can perform the test.

[0010]

According to a first aspect of the present invention, there is provided a leak test apparatus, comprising: a chamber capable of hermetically storing a device under test; a chamber exhaust means for exhausting the chamber;
Tracer gas detection means for detecting tracer gas in the chamber, exhaust means inside the test object provided outside the chamber for exhausting the test object, and tracer gas for supplying tracer gas inside the test object A supply unit;
A pressure sensor provided outside the chamber, an exhaust pipe connecting the device under test and the exhaust means in the device under test, and one end inserted into the exhaust pipe and having a distal end for exhausting the device under test. And a sensor pipe disposed inside the DUT and having the other end connected to the pressure sensor, and exhausting the DUT exhaust means based on a pressure detection result in the DUT by the pressure sensor. And control means for controlling (see FIGS. 1 and 2).

A leak test apparatus according to a second aspect of the present invention includes a chamber capable of hermetically storing a test object, an exhaust means in the chamber for exhausting the inside of the chamber, and a tracer gas for detecting a tracer gas in the chamber. A detecting unit, an exhaust unit provided outside the chamber for exhausting the test object, a tracer gas supply unit for supplying a tracer gas inside the test object, and a detection unit provided outside the chamber. A pressure sensor, a sensor pipe connecting the device under test and the pressure sensor, one end of which is inserted into the sensor tube and the tip of which is connected to the sensor tube and the device under test or An exhaust pipe arranged in front and having the other end connected to the exhaust means in the test object; and an exhaust pipe in the test object based on a pressure detection result in the test object by the pressure sensor. And having a control means for controlling the exhaust gas by means (see FIG. 3, FIG. 4).

A leak test apparatus according to a third aspect of the present invention includes a chamber capable of airtightly storing a device under test, a device for exhausting the device under test for exhausting the device under test, and detecting a tracer gas in the device under test. A tracer gas detecting unit, a chamber exhaust unit that exhausts the inside of the chamber, a tracer gas supply unit that supplies a tracer gas to the inside of the chamber, a pressure sensor provided outside the chamber, An exhaust pipe connecting the exhaust means in the chamber, and a sensor having one end inserted into the exhaust pipe and having a distal end disposed in the exhaust section of the chamber or inside the chamber and the other end connected to the pressure sensor. A pipe, and control means for controlling exhaust by the exhaust means in the chamber based on a detection result of the pressure in the chamber by the pressure sensor. It characterized the door (see FIG. 5, FIG. 6).

[0013] A leak test apparatus according to a fourth aspect of the present invention includes a chamber capable of hermetically storing a test object, an exhaust means for exhausting the test object, and detecting a tracer gas in the test object. A tracer gas detecting unit, a chamber exhaust unit that exhausts the inside of the chamber, a tracer gas supply unit that supplies a tracer gas to the inside of the chamber, a pressure sensor provided outside the chamber, A sensor pipe for connecting the pressure sensor, one end of which is inserted into the sensor pipe, and a tip of which is disposed at or near the connection between the sensor pipe and the chamber and the other end of which is exhausted into the chamber; An exhaust pipe connected to the exhaust means, and a system for controlling exhaust by the exhaust means in the chamber based on a pressure detection result in the chamber by the pressure sensor. And having means, (see FIG. 7, FIG. 8).

In these leak test devices, for example,
The sensor pipe and the exhaust pipe partially have a double structure. Further, in the first invention and the second invention, for example, after the pressure detection value in the test object by the pressure sensor has reached a predetermined value or less,
And controlling the exhaust unit and the tracer gas supply unit to introduce the tracer gas into the test object. Alternatively, in the third invention and the fourth invention, for example, the control means may introduce the tracer gas into the chamber after a pressure detection value in the chamber by the pressure sensor reaches a predetermined value or less. And controlling the chamber exhaust means and the tracer gas supply unit.

In the present invention, the pressure sensor may be a sensor pipe whose tip is disposed in the exhaust part of the test object or the inside of the test object, a sensor pipe connected to the test object, or Since the tip is connected to the exhaust part of the chamber or the sensor pipe arranged inside the chamber, or to the sensor pipe connected to the chamber, the gas flow at the time of gas exhaust in the device under test or in the chamber , The pressure in the device under test or in the chamber can be extremely accurately detected. Then, based on the detection result of the pressure in the device under test or in the chamber by the pressure sensor, in order to control the gas exhaustion by the gas exhausting means in the device under test or the gas exhausting device in the chamber, before introducing the tracer gas, Alternatively, the chamber can be evacuated with extremely high accuracy, and the leak detection accuracy of the device under test is extremely high.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described.
This will be specifically described with reference to the accompanying drawings. FIG. 1 is a schematic diagram showing a leak test apparatus according to a first embodiment of the present invention.

As shown in FIG. 1, a vacuum chamber 12 is capable of hermetically storing a device under test 11 to be inspected therein. The DUT 11 is connected to a pipe (exhaust pipe) 17. The pipe 17 is led out of the chamber 12 in an airtight manner and connected to an exhaust pump 16. The pipe 17 is provided with a valve V2, and the flow rate of gas exhausted from the device under test 11 can be adjusted by the opening degree of the valve V2. Also,
An air source 21 and a tracer gas supply source 22 are connected to the pipe 17 via pipes 23 and 24, respectively, so that air (air) and tracer gas (He or the like) are provided inside the device under test 11, respectively. Has been introduced. The pipe 23 and the pipe 24 are provided with a valve V4 and a valve V5, respectively, and the flow rates of the air and the tracer gas introduced into the DUT 11 can be adjusted by the opening degrees of the valves V4 and V5, respectively. Furthermore,
One end of a pipe (sensor pipe) 19 having a diameter D2 smaller than the diameter D1 of the pipe 17 is inserted into the pipe 17, and the tip of the pipe 19 is arranged in the exhaust part of the device under test 11. . The other end of the pipe 19 is the pipe 17
Is derived from In order to derive the pipe 19, the pipe 17 is provided with a through-hole at a position more distant from the chamber 12 than the connection position of the pipes 23 and 24, and the pipe 19 is hermetically drawn out from this through-hole. Body 1
1 is connected to a pressure sensor 14 for detecting the pressure in the pressure sensor 1. The exhaust part of the device under test 11 is a connection portion between the device under test 11 and the pipe 17. Further, the tip of the pipe 19 may extend inside the test object 11. Furthermore,
The through hole for leading out the pipe 19 may be formed at any position. For example, the through hole may be formed between the connection between the pipes 17 and 23 and the connection between the pipes 17 and 24.

On the other hand, the vacuum chamber 12 is connected to a pipe 18, which is connected to an exhaust pump 15. The pipe 18 is provided with a valve V 1, and the flow rate of the gas exhausted from the chamber 12 can be adjusted by the opening degree of the valve V 1. Further, an air source 25 is connected to the pipe 18 via a pipe 26 so as to introduce air into the chamber 12. This pipe 26 is provided with a valve V3,
The flow rate of the air introduced into the chamber 12 can be adjusted by the opening degree and opening / closing time of the valve V3. In addition, the pipe 26 connected to the pipe 18 and the valve V3 are not provided,
A pipe 27 may be connected to the chamber 12, a valve V7 may be provided on the pipe 27, and the atmosphere may be introduced into the chamber 12 by opening and closing the valve V7. Further, a pipe 28 is connected to the chamber 12, and the tracer gas detector 13 is connected to the pipe 28. In the pipe 28,
A sensing valve V6 is provided.

Hereinafter, a leak test method using the leak test apparatus according to the present embodiment will be described. It is assumed that the maximum allowable value of the pressure in the DUT 11 has been determined in advance so that the tracer gas detector operates normally and the leak is reliably detected.

First, the DUT 11 is placed in the chamber 12. The tip of the tracer gas introduction pipe 17 is
Is connected directly or via a coupler or the like, and the door of the chamber 12 is closed to make it a sealed state.

Next, the chamber evacuation valve V1 is opened to evacuate the gas in the chamber 12 to a predetermined pressure, and at the same time, the specimen evacuation valve V2 is opened and the pipe 17 connected to the DUT 11 is opened. The gas in the test body 11 is evacuated to a predetermined pressure. At this time, while the pressure inside the DUT 11 is detected by the pressure sensor 14,
1. Vacuum until the pressure in 1 falls below a specified pressure (maximum allowable value).

After closing the valve V1, the sensing valve V
6 is opened, and the chamber 12 and the tracer gas detector 13 are connected. Then, the valve V2 is closed and the valve V5 is opened to supply a tracer gas of a predetermined pressure from the tracer gas supply source into the device under test 11. Here, if there is a leak in the DUT 11, the leaked tracer gas is detected by the tracer gas detector 13 through the sensing valve V6. Then, the value after a predetermined time (leak rate value) is compared with a predetermined threshold value, and whether or not the DUT 11 passes is determined by whether the leak rate value is equal to or less than the threshold value. It is determined.

When the pass / fail judgment is completed, the test object 11 and the chamber 12 are returned to the atmospheric pressure in the following procedure. First, the valve V6 for connecting the chamber 12 and the tracer gas detector 13 and the valve V5 for introducing tracer gas into the device under test 11 are closed. Then, the valve V2 is opened, and the tracer gas in the device under test 11 is exhausted by the exhaust pump 16, then the valves V4 and V3 are opened, and the atmosphere is introduced into the device under test 11 and the chamber 12, respectively. When the valve V3 is not provided and the valve V7 is provided in the chamber 12, the valve V7 is opened to open the chamber V12.
Atmosphere may be introduced inside. Thereafter, the door of the chamber 12 is opened, the test object 11 is taken out, and the leak test ends. Then, another test object 11 is placed in the chamber,
Repeat the same leak test.

In this embodiment, the pressure sensor 1
4 is for detecting the pressure in the test object 11,
Pipe 18 connected to pressure sensor 14 to chamber 12
May be connected so that the difference between the pressure inside the test object and the pressure inside the chamber 12 can be detected.

As described above, in the leak test, after evacuating the atmosphere in the DUT 11 to a predetermined pressure or less, a tracer gas is introduced. At this time, if there is a leak in the DUT 11, the tracer gas leaks from the DUT 11 into the chamber 12. Therefore, the leaked tracer gas is detected by the tracer gas detector 13, but the tracer gas is introduced. Prior to this, if the pressure in the device under test 11 is not exhausted so as to be lower than a specified pressure value, the atmosphere leaks from the device under test 11 together with the tracer gas into the chamber. Gas detection accuracy is reduced. In order to improve the accuracy of the leak test by improving the detection accuracy of the tracer gas, it is necessary to exhaust the test object 11 so that the pressure in the test object 11 becomes equal to or lower than a specified value before introducing the tracer gas.

In this embodiment, a pipe 19 is provided separately from the pipe 17 for supplying the atmosphere and the tracer gas into the DUT 11 and for discharging the atmosphere and the tracer gas from the DUT 11. 11 placed in the exhaust part,
Since the pressure sensor 14 for detecting the pressure in the device under test 11 is connected to the pipe 19, the pressure in the device under test 11 is not affected by the pressure loss due to the gas flow of the atmosphere and the tracer gas. Can be detected with high accuracy. Therefore, when the inside of the DUT 11 is evacuated, the evacuation of the evacuation pump 16 can be accurately controlled by opening and closing the valve V2, and the pressure in the DUT 11 can be evacuated accurately to a specified pressure or less. Therefore, when there is a leak in the DUT 11, the leak of the tracer gas from the DUT 11 can be accurately detected, and the accuracy of the leak test becomes extremely high.

Next, a second embodiment of the present invention will be described. FIG. 2 is a schematic diagram illustrating the leak test apparatus of the present embodiment. In the second embodiment shown in FIG. 2, the same components as those in the first embodiment shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In the first embodiment, a pipe 1 for introducing and exhausting air and a tracer gas to and from a test object is described.
Although the pipe 19 for pressure detection was inserted in the pipe 7, in this embodiment, as shown in FIG.
7, a pipe 39 having a diameter D3 smaller than the diameter D1 is inserted into the pipe 37, and one end of the pipe 39 is disposed in the exhaust part of the device under test 11. The other end of the pipe 39 is the pipe 3
7 is hermetically guided to the outside of the pipe 37 from a through hole provided in the pipe 7 and is connected to a pressure sensor 14 for detecting a pressure in the DUT 11. An air source 21 and a tracer gas supply source 22 are connected to the pipe 37 via pipes 33 and 34, respectively, and introduce air (air) and tracer gas (He or the like) into the test object 11, respectively. It has become. The pipe 33 and the pipe 34 are provided with a valve V4 and a valve V5, respectively.
The flow rates of the air and the tracer gas introduced into 1 can be adjusted by opening the valves V4 and V5, respectively. Other configurations are the same as those of the first embodiment.

When a leak test is performed using the leak device of the present embodiment configured as described above, the pipe 39
Is formed at a position closer to the chamber 12 than the pipes 33 and 34, and the pipe 39 connecting the DUT 11 and the pressure sensor 14 is short. The test object 11
The pressure detection accuracy in the inside is improved.

In this embodiment, as in the first embodiment, the gas in the device under test 11 is exhausted, and the device under test 1 is exhausted.
Since a pressure detection pipe 39 is provided separately from the pipe 37 for supplying gas into the pipe 1, the pressure in the DUT 11 can be detected with high accuracy regardless of the gas flow in the pipe 37, and the leakage test is performed. Accuracy is extremely high.

Next, a third embodiment of the present invention will be described. FIG. 3 is a schematic diagram illustrating the leak test apparatus according to the present embodiment. In this embodiment, as shown in FIG. 3, a pipe 49 having a diameter D1 is connected to the chamber 12. This pipe 49 is led out of the chamber 12 in an airtight manner and connected to the pressure sensor 14. A pipe D4 having a diameter D4 smaller than the diameter D1 of the pipe 49.
Is inserted into the inside of the pipe 49, and its tip extends into the device under test 11 and is arranged in the exhaust part of the device under test 11. The other end of the pipe 47 is hermetically led out of the pipe 49 through a through hole provided in the pipe 49 and is connected to the exhaust pump 16. Since the pipe 47 is airtightly led out of the pipe 49, no air flows into the pipe 49. The pipe 47 is connected to the pipe 43 and the pipe 44 and is led out of the pipe 49 in an airtight manner. Outside the pipe 49, the pipe 43 and the pipe 44 are connected to the air source 21 and the tracer gas source 22, respectively, so that the atmosphere and the tracer gas are introduced into the device under test 11, respectively.
The pipe 43 and the pipe 44 are provided with a valve V4 and a valve V5, respectively, so that the flow rates of the air and the tracer gas introduced into the device under test 11 are controlled by the valve V4 and the valve V, respectively.
5 can be adjusted. Other configurations are the same as those of the first embodiment.

In this embodiment constructed as described above, since the diameter of the pipe 49 connecting the pressure sensor 14 and the device under test 11 is large, the response of the pressure sensor 14 is high, and Pressure can be accurately detected. In this embodiment, the same effects as in the first embodiment can be obtained.

Next, a fourth embodiment of the present invention will be described. FIG. 4 is a schematic diagram illustrating the leak test apparatus of the present embodiment. As shown in FIG. 4, a pressure sensor 1 that is connected to the DUT 11 and detects the pressure inside the DUT 11 is connected to a pipe 59 having a diameter D <b> 1 that is hermetically led out of the chamber 12.
4 are connected. One end of a pipe 57 having a diameter D5 smaller than the diameter D1 of the pipe 59 is inserted into the inside of the pipe 59, and a tip thereof is disposed in an exhaust part of the device under test 11. The other end of the pipe 57 is airtightly led out of the pipe 59 through a through hole provided in the pipe 59 and is connected to an exhaust pump 16 that sucks gas in the device under test 11. Further, the pipe 57 derived from the pipe 59 is connected to the air source 21 and the tracer gas source 22 via pipes 53 and 54 outside the pipe 59, respectively. The pipes 53 and 54 are provided with valves V4 and V5, respectively, so that the flow rates of the air and the tracer gas introduced into the DUT 11 can be adjusted by the opening degrees of the valves V4 and V5, respectively. Other configurations and the leak test method are the same as those of the first embodiment.

In the present embodiment configured as described above,
Pipe 59 connecting pressure sensor 14 and device under test 11
Is shorter than that of the third embodiment, the response of the pressure sensor 14 is further increased, and the accuracy of detecting the pressure in the device under test 11 is improved. Further, pipes 53 and 54 are connected to a pipe 57 led out of the pipe 59, and through holes for the pipes 53 and 54 are provided in the pipe 59 to connect the air source 21 and the tracer gas source 22, respectively. There is no need to hermetically draw out from the pipe 59, and the device becomes simple. In this embodiment, the same effects as in the first embodiment can be obtained.

In each of the first to fourth embodiments, the tracer gas is introduced into the device under test 11 and the tracer gas leaking into the chamber 12 is detected. As in the fifth to eighth embodiments, a tracer gas may be introduced into the chamber 12 and the tracer gas leaking into the device under test 11 may be detected. In this case, the device under test 11 and the tracer gas detector are connected, and the chamber and the pressure sensor are connected. An exhaust pump for exhausting the atmosphere and the tracer gas in the chamber, and a tracer gas supply source and an air supply source for introducing the tracer gas and the atmosphere into the chamber are connected to the chamber.

Next, a fifth embodiment of the present invention will be described. FIG. 5 is a schematic diagram illustrating the leak test apparatus of the present embodiment. In the fifth embodiment shown in FIG. 5, the same components as those in the first embodiment shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, as shown in FIG.
As compared with the first embodiment shown in FIG. 1, the test object 11 and the tracer gas detector 13 are connected by a pipe 28,
The difference is that pipes 17 and 19 are connected to the chamber 12 and that the pipe 18 is connected to the device under test 11, and other configurations are the same as those of the first embodiment. That is, in this embodiment, the exhaust pump 16 exhausts the inside of the chamber 12, the air source 21 and the tracer gas supply source 22 introduce air and tracer gas into the chamber 12, and the exhaust pump 15 exhausts the inside of the DUT 11. After the air is exhausted, the air source 25 supplies air into the device under test 11. Also in this embodiment,
The same effect as in the first embodiment can be obtained.

Next, a sixth embodiment of the present invention will be described. FIG. 6 is a schematic diagram illustrating the leak test apparatus of the present embodiment. In the sixth embodiment shown in FIG. 6, the same components as those in the second embodiment shown in FIG. 2 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, as shown in FIG.
As compared with the second embodiment, the test object 11 and the tracer gas detector 13 are connected by a pipe 28,
7 and 39 are connected to the chamber 12, and the pipe 18 is connected to the device under test 11, and other configurations are the same as those of the second embodiment. In this embodiment, the same effects as in the second embodiment can be obtained.

Next, a seventh embodiment of the present invention will be described. FIG. 7 is a schematic diagram illustrating the leak test apparatus according to the present embodiment. In the seventh embodiment shown in FIG. 7, the same components as those in the third embodiment shown in FIG. 3 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, as shown in FIG.
As compared with the third embodiment, the test object 11 and the tracer gas detector 13 are connected by a pipe 28,
7 and 49 are connected to the chamber 12, and the pipe 18 is connected to the device under test 11, and other configurations are the same as those of the third embodiment. In this embodiment, the same effects as in the third embodiment can be obtained.

Next, an eighth embodiment of the present invention will be described. FIG. 8 is a schematic diagram illustrating the leak test apparatus of the present embodiment. In the eighth embodiment shown in FIG. 8, the same components as those in the fourth embodiment shown in FIG. 4 are denoted by the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, as shown in FIG.
As compared with the fourth embodiment, the test object 11 and the tracer gas detector 13 are connected by the pipe 28 and the pipe 5
7 and 59 are connected to the chamber 12, and the pipe 18 is connected to the device under test 11, and other configurations are the same as those of the fourth embodiment. In this embodiment, the same effects as those of the fourth embodiment can be obtained.

[0044]

As described in detail above, according to the present invention,
When introducing tracer gas into the DUT, one end is placed inside the exhaust section of the DUT or inside the DUT, and the other end is connected to the pressure sensor, separately from the exhaust pipe that exhausts the DUT. With the provision of the sensor pipe, the pressure in the test object can be accurately detected, and the exhaust pressure in the test object is controlled based on the accurate pressure detection result, so that the accuracy of the leak test can be significantly improved. .

On the other hand, when the tracer gas is introduced into the chamber, a sensor pipe having one end disposed in the exhaust part of the chamber or inside the chamber and the other end connected to the pressure sensor is provided separately from the exhaust pipe. Since the pressure in the chamber can be accurately detected and the exhaust in the chamber is controlled based on the accurate pressure detection result, the accuracy of the leak test can be significantly improved.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a leak test apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic view showing a leak test apparatus according to a second embodiment of the present invention.

FIG. 3 is a schematic view showing a leak test apparatus according to a third embodiment of the present invention.

FIG. 4 is a schematic view showing a leak test apparatus according to a fourth embodiment of the present invention.

FIG. 5 is a schematic view showing a leak test apparatus according to a fifth embodiment of the present invention.

FIG. 6 is a schematic view showing a leak test apparatus according to a sixth embodiment of the present invention.

FIG. 7 is a schematic view showing a leak test apparatus according to a seventh embodiment of the present invention.

FIG. 8 is a schematic diagram showing a leak test apparatus according to an eighth embodiment of the present invention.

FIG. 9 is a schematic view showing a conventional leak test apparatus.

[Explanation of symbols]

11, 111; DUT, 12, 112; chamber,
17, 18, 27, 29, 37, 39, 47, 49,
57, 59, 117, 118; pipes, 15, 16,
115, 116; exhaust pump, 13, 113; tracer gas detector, V1 to V7, V11 to V16;
14, 114; pressure sensor

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yuzo Ota 283 Aoyacho, Hamamatsu-shi, Shizuoka Prefecture Yamahafa Intec Co., Ltd. F-term (reference) 2G067 AA06 BB02 CC13 DD02 EE09

Claims (7)

[Claims] 1. A chamber capable of hermetically storing a device under test, a chamber exhaust means for exhausting the inside of the chamber,
Tracer gas detection means for detecting tracer gas in the chamber, exhaust means inside the test object provided outside the chamber for exhausting the test object, and tracer gas for supplying tracer gas inside the test object A supply unit;
A pressure sensor provided outside the chamber, an exhaust pipe connecting the device under test and the exhaust means in the device under test, and one end inserted into the exhaust pipe and having a distal end for exhausting the device under test. And a sensor pipe disposed inside the DUT and having the other end connected to the pressure sensor, and exhausting the DUT exhaust means based on a pressure detection result in the DUT by the pressure sensor. And a control means for controlling. 2. A chamber capable of hermetically storing a test object, an exhaust means in the chamber for exhausting the inside of the chamber,
Tracer gas detection means for detecting tracer gas in the chamber, exhaust means inside the test object provided outside the chamber for exhausting the test object, and tracer gas for supplying tracer gas inside the test object A supply unit;
A pressure sensor provided outside the chamber, a sensor pipe connecting the device under test and the pressure sensor, one end of which is inserted into the sensor tube, and the tip of which is inserted into the sensor tube and the device under test. And an exhaust pipe whose other end is connected to or connected to the other end thereof and connected to the exhaust means in the test object, and exhausting the test object based on a pressure detection result in the test object by the pressure sensor. Control means for controlling exhaustion by the means. 3. A chamber capable of hermetically storing a device under test, an exhaust device within the device under test for exhausting the device under test,
A tracer gas detecting means for detecting a tracer gas in the device under test; an exhaust means in the chamber for exhausting the inside of the chamber; a tracer gas supply unit for supplying the tracer gas to the inside of the chamber; A pressure sensor, an exhaust pipe connecting the chamber and the exhaust means in the chamber, and one end inserted into the exhaust pipe and having a distal end disposed in the exhaust portion of the chamber or the other end thereof. Has a sensor pipe connected to the pressure sensor, and control means for controlling exhaustion by the exhaust means in the chamber based on a pressure detection result in the chamber by the pressure sensor. apparatus. 4. A chamber capable of hermetically storing a device under test, an exhaust device within the device under test exhausting the device under test,
A tracer gas detecting means for detecting a tracer gas in the device under test; an exhaust means in the chamber for exhausting the inside of the chamber; a tracer gas supply unit for supplying the tracer gas to the inside of the chamber; Pressure sensor, a sensor pipe connecting the chamber and the pressure sensor, and one end is inserted into the sensor pipe and the tip is disposed at or near the connection between the sensor pipe and the chamber. And an exhaust pipe having the other end connected to the exhaust means in the chamber, and control means for controlling exhaust by the exhaust means in the chamber based on a result of pressure detection in the chamber by the pressure sensor. A leak test device characterized by the following. 5. The leak test apparatus according to claim 1, wherein a part of the sensor pipe and the exhaust pipe have a double structure. 6. The control means, after a pressure value detected by the pressure sensor in the device under test reaches a predetermined value or less,
The leak test according to any one of claims 1, 2 and 5, wherein an exhaust means in the device under test and the tracer gas supply unit are controlled to introduce the tracer gas into the device under test. apparatus. 7. The method according to claim 6, wherein the control unit detects a pressure value in the chamber detected by the pressure sensor that has reached a predetermined value or less.
The leak test apparatus according to any one of claims 3 to 5, wherein the chamber exhaust means and the tracer gas supply unit are controlled to introduce the tracer gas into the chamber.