JP2002277300A - Flow rate measuring apparatus - Google Patents
Flow rate measuring apparatusInfo
- Publication number
- JP2002277300A JP2002277300A JP2001073721A JP2001073721A JP2002277300A JP 2002277300 A JP2002277300 A JP 2002277300A JP 2001073721 A JP2001073721 A JP 2001073721A JP 2001073721 A JP2001073721 A JP 2001073721A JP 2002277300 A JP2002277300 A JP 2002277300A
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- flow
- measurement
- downstream
- upstream
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、流体の流量を計測
する流量計測装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow rate measuring device for measuring a flow rate of a fluid.
【０００２】[0002]
【従来の技術】従来この種の給水装置は、特開平８−２
８５６４７号公報のようなものが知られていた。以下、
その構成について図５を参照しながら説明する。2. Description of the Related Art Conventionally, this type of water supply apparatus is disclosed in
A publication such as Japanese Patent No. 85647 is known. Less than,
The configuration will be described with reference to FIG.
【０００３】図５に示すように、測定管１へは流入管２
が配管され、測定管からは流出管３が配管されている。
これら流入管２、測定管１、流出管３の各軸線は同一立
面状に位置すると共に、流入管２と流出管３の軸心は同
一の水平な基軸線上に位置している。測定管１は下流に
向かって下り勾配の傾斜を有している。また測定管１の
両端には超音波送受波器４、５が設けられている。上記
構成において、流入管２から流入した流れは、測定管１
を通過するとき超音波送受波器４、５により流速が計測
され、その値を元に流量を計測することができるもので
ある。As shown in FIG. 5, an inflow pipe 2 is connected to a measurement pipe 1.
And an outflow pipe 3 is connected from the measurement pipe.
The axes of the inflow pipe 2, the measurement pipe 1, and the outflow pipe 3 are located on the same elevation, and the axes of the inflow pipe 2 and the outflow pipe 3 are located on the same horizontal base axis. The measuring tube 1 has a downward slope toward the downstream. Ultrasonic transducers 4 and 5 are provided at both ends of the measuring tube 1. In the above configuration, the flow flowing from the inflow pipe 2 is
The flow rate is measured by the ultrasonic transducers 4 and 5 when passing through, and the flow rate can be measured based on the value.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前記従
来の構成では、測定管１内部で超音波送受波器４の近傍
の測定管１の内部６に気泡が溜まり、計測が不安定にな
りやすく、また、超音波により計測する時に気泡が存在
すると、超音波が乱反射され受信感度が低下してしまっ
たり、特に底流量時に流体に、気泡が混入した状態で流
体が測定管１に流入すると、測定管１内の流速が遅い上
に気泡の浮力が作用し気泡が内部６に溜まりその発生確
立が大きくなるという課題があった。However, in the conventional configuration, air bubbles accumulate inside the measuring tube 1 near the ultrasonic transducer 4 inside the measuring tube 1 and the measurement tends to be unstable. In addition, if bubbles are present when measuring with ultrasonic waves, the ultrasonic waves are irregularly reflected and the receiving sensitivity is reduced. In particular, when the fluid flows into the measuring pipe 1 with bubbles mixed into the fluid at the bottom flow rate, the measurement is performed. There is a problem that the flow velocity in the tube 1 is low and the buoyancy of the bubbles acts, so that the bubbles are accumulated in the interior 6 and the probability of occurrence of the bubbles increases.
【０００５】[0005]
【課題を解決するための手段】前記従来の課題を解決す
るために、本発明の流量計測装置は、計測流路内の気泡
が、計測流路に停滞するのを防止することにより、気泡
に強い流量計測装置を提供するものである。SUMMARY OF THE INVENTION In order to solve the above-mentioned conventional problems, a flow rate measuring apparatus according to the present invention prevents bubbles in a measurement flow path from stagnating in the measurement flow path. A strong flow measurement device is provided.
【０００６】[0006]
【発明の実施の形態】請求項１に記載の発明は、被検出
流体と、上流から下流に向かって上り勾配で前記被検出
流体が流れる計測流路と、計測流路を上流から下流に向
う流れの軸に対して垂直断面方向へ計測流路内の気泡が
排出可能な位置に計測流路への入口流路および出口流路
の少なくとも一方を設けたものである。これにより流体
中に混入した気泡が流入しても上り勾配により気泡が計
測流路内に停滞することがなく、精度良く流量計測がで
きるものである。According to the first aspect of the present invention, a fluid to be detected, a measurement flow path through which the fluid to be detected flows with an upward gradient from upstream to downstream, and a measurement flow path from upstream to downstream. At least one of an inlet flow path and an outlet flow path to the measurement flow path is provided at a position where bubbles in the measurement flow path can be discharged in a cross-sectional direction perpendicular to the flow axis. As a result, even if bubbles mixed in the fluid flow in, the bubbles do not stay in the measurement channel due to the upward gradient, and the flow rate can be measured accurately.
【０００７】請求項２に記載の発明は、出口流路は、計
測流路を上流から下流に向う流れの軸に対して垂直断面
の下方向以外の位置に設けたものであり、気泡が計測流
路内に停滞するのを防止することができ、精度良く流量
計測ができるものである。According to a second aspect of the present invention, the outlet flow path is provided at a position other than the downward direction perpendicular to the axis of the flow from the upstream to the downstream of the measurement flow path. It is possible to prevent stagnation in the flow path and measure the flow rate with high accuracy.
【０００８】請求項３に記載の発明は、入口流路の内
径、出口流路の内径、計測流路の内径を同一径で構成し
たものであり、気泡が計測流路内に流入しても下流側へ
すばやく排出され気泡が停滞するのを防止することがで
き、精度良く流量計測ができるものである。According to a third aspect of the present invention, the inner diameter of the inlet flow path, the inner diameter of the outlet flow path, and the inner diameter of the measurement flow path have the same diameter, and even if air bubbles flow into the measurement flow path. It is possible to prevent the bubbles from being discharged quickly to the downstream side and to prevent the air bubbles from stagnating, and to accurately measure the flow rate.
【０００９】請求項４に記載の発明は、入口流路は、計
測流路を上流から下流に向う流れの軸に対して垂直断面
の下方向の位置に、出口流路は、計測流路を上流から下
流に向う流れの軸に対して垂直断面の上方向の位置に設
けたもので、気泡が計測流路内に流入しても垂直断面の
上方向の位置に設けた出口流路からすばやく排出され気
泡が停滞するのを防止することができ、精度良く流量計
測ができるものである。According to a fourth aspect of the present invention, the inlet flow path is located at a position below the measurement flow path in a section perpendicular to the axis of the flow going from upstream to downstream, and the outlet flow path is located at the measurement flow path. It is provided at the upper position of the cross section perpendicular to the axis of the flow from the upstream to the downstream.Even if air bubbles flow into the measurement flow path, it quickly moves from the outlet flow path provided at the upper position of the vertical cross section. It is possible to prevent the discharged air bubbles from stagnating and to accurately measure the flow rate.
【００１０】請求項５に記載の発明は、入口流路および
出口流路を、計測流路を上流から下流に向う流れの軸に
対して垂直円形断面の接線方向に構成したもので、入口
流路および出口流路近傍に計測流路内壁に沿った旋回流
を形成することにより、計測流路内の気泡が排出され気
泡が停滞するのを防止することができ、精度良く流量計
測ができるものである。According to a fifth aspect of the present invention, the inlet flow path and the outlet flow path are formed in a tangential direction having a circular cross section perpendicular to the flow axis from the upstream to the downstream of the measurement flow path. By forming a swirling flow along the inner wall of the measurement flow path near the flow path and the outlet flow path, it is possible to prevent the bubbles in the measurement flow path from being discharged and stagnant, and to accurately measure the flow rate It is.
【００１１】請求項６に記載の発明は、入口流路の内径
および出口流路の内径は、計測流路の内径に比べ小径と
することにより、入口流路から流出される流速が速くな
る。また計測流路から出口流路へ流出する位置の流速も
速くなり、計測流路内の気泡が排出されやすくなり、気
泡が停滞するのを防止することができるため、精度良く
流量計測ができるものである。According to the invention described in claim 6, the inner diameter of the inlet flow path and the inner diameter of the outlet flow path are made smaller than the inner diameter of the measurement flow path, so that the flow velocity flowing out of the inlet flow path becomes faster. In addition, the flow velocity at the position where it flows from the measurement flow path to the outlet flow path is increased, and the bubbles in the measurement flow path are easily discharged, and the bubbles can be prevented from stagnating, so that the flow rate can be accurately measured. It is.
【００１２】請求項７に記載の発明は、計測流路の上流
から下流に向う流れの軸に対して垂直断面の最上部の位
置と、出口流路の上流から下流に向う流れの軸に対して
垂直断面の上方向の最上部の位置とを、同一面に構成し
たもので、計測流路内の最上部に流れた気泡は同一面に
構成された出口流路からすべて排出され、気泡が停滞す
るのを防止することができるため、精度良く流量計測が
できるものである。According to a seventh aspect of the present invention, the uppermost position of the cross section perpendicular to the axis of the flow going from the upstream to the downstream of the measurement flow path and the axis of the flow going from the upstream to the downstream of the outlet flow path are determined. The uppermost position of the vertical section in the upward direction is configured on the same plane, and all the bubbles flowing to the uppermost part in the measurement flow path are discharged from the outlet flow path configured on the same plane, and the bubbles are removed. Since the stagnation can be prevented, the flow rate can be accurately measured.
【００１３】請求項８に記載の発明は、計測流路の流れ
方向の同軸上で互いに対向して超音波センサを設けた構
成により、超音波センサの距離が長くなり、伝播時間も
長くなるため低流量域まで精度良く計測することができ
る。According to the eighth aspect of the present invention, since the ultrasonic sensors are provided so as to face each other coaxially in the flow direction of the measurement flow path, the distance between the ultrasonic sensors becomes longer and the propagation time becomes longer. Measurement can be performed accurately even in the low flow rate range.
【００１４】請求項９に載の発明は、複数の超音波セン
サ間に計測流路への入口流路および出口流路を設けた構
成により、流量計測装置を小型に構成することができ
る。According to the ninth aspect of the present invention, the flow rate measuring device can be miniaturized by providing the inlet flow path and the outlet flow path to the measurement flow path between the plurality of ultrasonic sensors.
【００１５】[0015]
【実施例】以下、本発明の実施例について、図面を参照
しながら説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１６】（実施例１）図１は本発明の実施例１の流
量計測装置の断面図である。図１において、７は計測流
路であり、この計測流路７は上流から下流に向かって上
り勾配に設けられている。また計測流路７には入口流路
８および出口流路９が構成されている。出口流路９は計
測流路７を上流から下流に向かう流れの軸に対して垂直
断面の下方向以外の位置である計測流路７の側面に設け
られている。また入口流路８の内径、出口流路９の内
径、計測流路７の内径は同一径で構成されている。そし
て計測流路７の流れ方向の同軸上で互いに対向した位置
には超音波センサ１０、１１が設けられている。入口流
路８および出口流路９は超音波センサ１０、１１の間に
設けられている。(Embodiment 1) FIG. 1 is a sectional view of a flow rate measuring apparatus according to Embodiment 1 of the present invention. In FIG. 1, reference numeral 7 denotes a measurement channel, and the measurement channel 7 is provided with an upward gradient from upstream to downstream. The measurement channel 7 has an inlet channel 8 and an outlet channel 9. The outlet flow path 9 is provided on a side surface of the measurement flow path 7 at a position other than the downward direction of a cross section perpendicular to the axis of the flow flowing from the upstream to the downstream of the measurement flow path 7. The inner diameter of the inlet channel 8, the inner diameter of the outlet channel 9, and the inner diameter of the measurement channel 7 are the same. Ultrasonic sensors 10 and 11 are provided at positions facing each other coaxially in the flow direction of the measurement flow path 7. The inlet channel 8 and the outlet channel 9 are provided between the ultrasonic sensors 10 and 11.
【００１７】次に動作、作用について図１を用いて説明
する。図１において入口流路８から被検出流体は、計測
流路７を通過して出口流路９から流出する。計測流路７
を通過する被検出流体は、超音波センサ１０，１１から
の信号で流量が計測される。計測の方法としては、超音
波センサ１０、１１が計測流路７の流れ方向の同軸上で
互いに対向した位置に設けられており、超音波センサ１
０から超音波センサ１１へ超音波を送信した時の到達時
間と、超音波センサ１１から超音波センサ１０へ超音波
を送信した時の到達時間の時間差を計測し演算制御部
（図示せず）で演算することにより流量を計測するもの
である。Next, the operation and operation will be described with reference to FIG. In FIG. 1, the fluid to be detected passes through the measurement flow path 7 from the inlet flow path 8 and flows out of the outlet flow path 9. Measurement channel 7
The flow rate of the fluid to be detected passing through is measured by signals from the ultrasonic sensors 10 and 11. As a measuring method, the ultrasonic sensors 10 and 11 are provided at positions opposed to each other on the same axis in the flow direction of the measurement flow path 7.
An arithmetic control unit (not shown) measures the time difference between the arrival time when the ultrasonic wave is transmitted from 0 to the ultrasonic sensor 11 and the arrival time when the ultrasonic wave is transmitted from the ultrasonic sensor 11 to the ultrasonic sensor 10. Is used to measure the flow rate.
【００１８】本実施例においては流体中に混入した気泡
が流入しても上り勾配により気泡が出口流路９へと上昇
し、計測流路内に停滞することがなく、精度良く流量計
測ができるものである。また出口流路９は、計測流路７
を上流から下流に向う流れの軸に対して垂直断面の下方
向以外の位置に設けたものであり、被検出流体が低流量
であっても気泡が計測流路内に停滞するのを防止するこ
とができ、精度良く流量計測ができるものである。さら
に入口流路８の内径、出口流路９の内径、計測流路７の
内径を同一径で構成したものであり、各流路間で気泡が
停滞することなく気泡を下流側へ排出することができ
る。また計測流路７の流れ方向の同軸上で互いに対向し
て超音波センサ１０、１１を設けた構成により、超音波
センサの距離が長くなり、伝播時間も長くなるため低流
量域まで精度良く計測することができる。また超音波セ
ンサ１０、１１間に計測流路７への入口流路８および出
口流路９を設けた構成により、流量計測装置を小型に構
成することができる。In this embodiment, even if bubbles mixed into the fluid flow in, the bubbles rise to the outlet channel 9 due to the upward gradient, so that the flow rate can be measured accurately without stagnation in the measurement channel. Things. In addition, the outlet flow path 9 is connected to the measurement flow path 7
Is provided at a position other than the downward direction perpendicular to the axis of the flow from the upstream to the downstream, and prevents bubbles from stagnating in the measurement flow path even when the detected fluid has a low flow rate. The flow rate can be measured with high accuracy. Furthermore, the inner diameter of the inlet flow path 8, the inner diameter of the outlet flow path 9, and the inner diameter of the measurement flow path 7 are configured to have the same diameter, and the air bubbles are discharged to the downstream side without stagnation between the flow paths. Can be. In addition, since the ultrasonic sensors 10 and 11 are provided so as to face each other on the same axis in the flow direction of the measurement flow path 7, the distance between the ultrasonic sensors is increased, and the propagation time is also increased. can do. In addition, the configuration in which the inlet flow path 8 and the outlet flow path 9 to the measurement flow path 7 are provided between the ultrasonic sensors 10 and 11 enables the flow rate measurement device to be made compact.
【００１９】（実施例２）図２は本発明の実施例２の流
量計測装置の断面図である。図２において、入口流路１
２は、計測流路１３を上流から下流に向う流れの軸に対
して垂直断面の下方向位置１４に、出口流路１５は、計
測流路を上流から下流に向う流れの軸に対して垂直断面
の上方向位置１６に設けたものである。その他は図１と
同様であり説明は省略する。(Embodiment 2) FIG. 2 is a sectional view of a flow rate measuring apparatus according to Embodiment 2 of the present invention. In FIG. 2, the inlet channel 1
2 is at a downward position 14 in a cross section perpendicular to the axis of the flow from the upstream to the downstream of the measurement flow path 13, and the outlet flow path 15 is perpendicular to the axis of the flow from the upstream to the downstream of the measurement flow path. It is provided at the upward position 16 of the cross section. Others are the same as those in FIG. 1 and the description is omitted.
【００２０】次に動作、作用について図２を用いて説明
する。図２において入口流路１２から気泡が計測流路１
３内に流入しても、気泡は傾斜を有する計測流路１３を
上昇し垂直断面の上方向位置１６に設けた出口流路１５
からすばやく排出されるため、気泡が計測流路１３に停
滞するのを防止することができ、精度良く流量計測がで
きるものである。Next, the operation and operation will be described with reference to FIG. In FIG. 2, bubbles are measured from the inlet channel 12 by the measurement channel 1.
3, the bubbles rise in the measuring flow path 13 having an inclination, and the outlet flow path 15 provided at the upper position 16 in the vertical section.
, The bubbles can be prevented from stagnating in the measurement flow path 13 and the flow rate can be measured accurately.
【００２１】（実施例３）図３は本発明の実施例３の流
量計測装置の断面図である。図３において、入口流路１
７から計測流路１８への入口１９の端面２０は、計測流
路１８の壁面２１と同じ面で構成されている。すなわ
ち、計測流路１８を上流から下流に向かう流れの軸に対
して垂直円形断面の接線方向に被検出流体が流れるよう
に入口１９が構成されている。出口流路２２も同様に構
成されているので説明は省略する。２３は流れを示す矢
印である。その他は図１と同様であり説明は省略する。(Embodiment 3) FIG. 3 is a sectional view of a flow rate measuring apparatus according to Embodiment 3 of the present invention. In FIG. 3, the inlet channel 1
The end face 20 of the entrance 19 from the 7 to the measurement flow channel 18 is formed of the same surface as the wall surface 21 of the measurement flow channel 18. That is, the inlet 19 is configured so that the fluid to be detected flows in a tangential direction of a circular cross section perpendicular to the axis of the flow flowing from the upstream to the downstream in the measurement flow path 18. The outlet channel 22 is configured in the same manner, and a description thereof will be omitted. 23 is an arrow indicating a flow. Others are the same as those in FIG. 1 and the description is omitted.
【００２２】次に動作、作用について図３を用いて説明
する。図３において入口流路１７を介し入口１９から気
泡が計測流路１８に流入しても、計測流路１８の垂直円
形断面の接線方向に被検出流体が流れる結果、被検出流
体は入口１９付近全体を流路とし旋回流として流れる。
その結果、入口１９付近にある気泡は効率よく下流へと
流される。また入口流路１７の内径および出口流路２２
の内径は、計測流路１８の内径に比べ小径とすることに
より、入口流路１７から流出される流速が速くなり、ま
た計測流路１８から出口流路２２へ流出する位置の流速
も速くなり、計測流路内の気泡がさらに排出されやすく
なり、気泡が停滞するのを防止することができるため、
精度良く流量計測ができるものである。Next, the operation and operation will be described with reference to FIG. In FIG. 3, even if bubbles flow into the measurement channel 18 from the inlet 19 via the inlet channel 17, the fluid to be detected flows in the tangential direction of the vertical circular cross section of the measurement channel 18, so that the detected fluid is near the inlet 19. The whole flows as a flow path and flows as a swirling flow.
As a result, bubbles near the inlet 19 are efficiently flowed downstream. The inner diameter of the inlet channel 17 and the outlet channel 22
Is smaller than the inner diameter of the measurement flow path 18, the flow velocity flowing out of the inlet flow path 17 is increased, and the flow velocity at the position flowing out of the measurement flow path 18 to the outlet flow path 22 is also increased. Since the bubbles in the measurement flow path are more easily discharged and the bubbles can be prevented from stagnating,
It can measure the flow rate with high accuracy.
【００２３】（実施例４）図４は本発明の実施例４の流
量計測装置の断面図である。図４において、計測流路２
４の上流から下流に向う流れの軸に対して垂直断面の最
上部位置２５と、出口流路２６の上流から下流に向う流
れの軸に対して垂直断面の上方向の最上部位置２７と
を、同一面に構成したものである。その他は図１と同様
であり説明は省略する。(Embodiment 4) FIG. 4 is a sectional view of a flow rate measuring apparatus according to Embodiment 4 of the present invention. In FIG.
The uppermost position 25 of the cross section perpendicular to the axis of the flow from upstream to downstream of the outlet 4 and the uppermost position 27 of the cross section perpendicular to the axis of the flow from the upstream to the downstream of the outlet flow path 26. , On the same surface. Others are the same as those in FIG. 1 and the description is omitted.
【００２４】次に動作、作用について図４を用いて説明
する。図４において入口流路２８から流入した気泡は計
測流路内の最上部に流れ、計測流路２４の最上部位置２
５と同一面に構成された出口流路２６の最上部位置から
すべて排出され、気泡が停滞するのを防止することがで
きるため、精度良く流量計測ができるものである。Next, the operation and operation will be described with reference to FIG. In FIG. 4, the bubbles flowing from the inlet channel 28 flow to the uppermost part in the measurement channel, and the uppermost position 2 of the measurement channel 24
5 is discharged from the uppermost position of the outlet flow path 26 formed on the same surface as that of 5, so that the stagnation of bubbles can be prevented, so that the flow rate can be measured accurately.
【００２５】なお本実施例は、超音波を用いた流量計測
手段を例に説明したが、本発明は計測流路の気泡に計測
制度が影響される電磁流量計に用いても同様の効果を有
するものである。Although the present embodiment has been described by taking the flow rate measuring means using ultrasonic waves as an example, the present invention can be applied to an electromagnetic flow meter whose measurement accuracy is affected by bubbles in the measurement flow path. Have
【００２６】[0026]
【発明の効果】以上のように、請求項１〜９に記載の発
明によれば、流体中に混入した気泡が流入しても上り勾
配により気泡が計測流路内に停滞することがなく出口流
路から排出され、気泡の影響を受けることなく精度良く
流量計測ができるものである。As described above, according to the first to ninth aspects of the present invention, even if bubbles mixed in the fluid flow in, the bubbles do not stagnate in the measurement flow path due to the upward gradient and the outlet. It is discharged from the flow path and can accurately measure the flow rate without being affected by bubbles.
【図１】本発明の実施例１の流量計測装置を示す断面図FIG. 1 is a cross-sectional view illustrating a flow measurement device according to a first embodiment of the present invention.
【図２】本発明の実施例２の流量計測装置を示す断面図FIG. 2 is a sectional view showing a flow rate measuring device according to a second embodiment of the present invention.
【図３】本発明の実施例３の流量計測装置を示す断面図FIG. 3 is a sectional view showing a flow rate measuring device according to a third embodiment of the present invention.
【図４】本発明の実施例４の流量計測装置を示す断面図FIG. 4 is a sectional view showing a flow rate measuring device according to a fourth embodiment of the present invention.
【図５】従来の流量計測装置を示す断面図FIG. 5 is a sectional view showing a conventional flow rate measuring device.
７ 計測流路 ８ 入口流路 ９ 出口流路 7 Measurement channel 8 Inlet channel 9 Outlet channel
───────────────────────────────────────────────────── フロントページの続き (72)発明者 芝 文一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Ｆターム(参考） 2F035 DA07 DA14 DA22 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Bunichi Shiba 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. F-term (reference) 2F035 DA07 DA14 DA22
Claims (9)
出流体が流れる計測流路と、前記計測流路を上流から下
流に向う流れの軸に対して垂直断面方向へ前記計測流路
内の気泡が排出可能な位置に前記計測流路への入口流路
および出口流路の少なくとも一方を設けた流量計測装
置。1. A measurement flow path through which a fluid to be detected flows with an upward gradient from upstream to downstream, and a flow path in the measurement flow path in a direction perpendicular to an axis of a flow from upstream to downstream. A flow measurement device provided with at least one of an inlet channel and an outlet channel to the measurement channel at a position where bubbles can be discharged.
向う流れの軸に対して垂直断面の下方向以外の位置に設
けた請求項１記載の流量計測装置。2. The flow rate measuring device according to claim 1, wherein the outlet flow path is provided at a position other than a downward direction of a cross section perpendicular to an axis of the flow from the upstream to the downstream.
流路の内径を同一径で構成した請求項１または２に記載
の流量計測装置。3. The flow rate measuring device according to claim 1, wherein the inner diameter of the inlet flow path, the inner diameter of the outlet flow path, and the inner diameter of the measurement flow path have the same diameter.
向う流れの軸に対して垂直断面の下方向の位置に、出口
流路は、計測流路を上流から下流に向う流れの軸に対し
て垂直断面の上方向の位置に設けた請求項１、２又は３
記載の流量計測装置。4. An inlet channel is provided at a position in a downward direction perpendicular to an axis of a flow flowing from the upstream to the downstream of the measurement channel, and an outlet channel is provided for a flow of the flow flowing from the upstream to the downstream of the measurement channel. 4. The method according to claim 1, wherein the section is provided in an upward direction in a cross section perpendicular to the axis.
The flow measurement device as described.
上流から下流に向う流れの軸に対して垂直円形断面の接
線方向に構成した流量計測装置。5. The flow rate measuring device according to claim 5, wherein the inlet flow path and the outlet flow path are configured such that the measurement flow path is tangential to a circular section perpendicular to the flow axis from the upstream to the downstream.
は、計測流路の内径に比べ小径とした請求項５に記載の
流量計測装置。6. The flow measuring device according to claim 5, wherein the inner diameter of the inlet flow path and the inner diameter of the outlet flow path are smaller than the inner diameter of the measurement flow path.
に対して垂直断面の最上部の位置と、出口流路の上流か
ら下流に向う流れの軸に対して垂直断面の上方向の最上
部の位置とを、同一面に構成した請求項１、２、３、５
または６に記載の流量計測装置。7. An uppermost position of a cross section perpendicular to an axis of a flow flowing from upstream to downstream of the measurement flow path, and an upper position of a cross section perpendicular to an axis of a flow flowing from upstream to downstream of the outlet flow path. The uppermost position is formed on the same plane.
Or the flow rate measuring device according to 6.
向して超音波センサを設けた請求項１、４、５、６又は
７に記載の流量計測装置。8. The flow measuring device according to claim 1, wherein ultrasonic sensors are provided so as to face each other coaxially in the flow direction of the measurement flow path.
口流路および出口流路を設けた請求項１、４、５、６又
は７に記載の流量計測装置。9. The flow rate measuring apparatus according to claim 1, wherein an inlet flow path and an outlet flow path to the measurement flow path are provided between the plurality of ultrasonic sensors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001073721A JP4984348B2 (en) | 2001-03-15 | 2001-03-15 | Flow measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001073721A JP4984348B2 (en) | 2001-03-15 | 2001-03-15 | Flow measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002277300A true JP2002277300A (en) | 2002-09-25 |
| JP4984348B2 JP4984348B2 (en) | 2012-07-25 |
Family
ID=18931101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001073721A Expired - Fee Related JP4984348B2 (en) | 2001-03-15 | 2001-03-15 | Flow measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4984348B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007263796A (en) * | 2006-03-29 | 2007-10-11 | Smc Corp | Flow measuring device |
| KR101066597B1 (en) | 2010-01-05 | 2011-09-22 | 세메스 주식회사 | Ultrasonic flow meter and substrate processing apparatus having the same |
| JP4991963B1 (en) * | 2011-11-16 | 2012-08-08 | 株式会社アツデン | Ultrasonic flow measuring device and method of using the same |
| WO2018110631A1 (en) * | 2016-12-16 | 2018-06-21 | 株式会社荏原製作所 | Cleaning chemical liquid supply device, cleaning unit, and recording medium having program stored therein |
| JP2019106424A (en) * | 2017-12-11 | 2019-06-27 | 株式会社荏原製作所 | Cleaning solution supply apparatus, cleaning unit, and storage medium storing program |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04130224A (en) * | 1990-09-20 | 1992-05-01 | Tokico Ltd | Mass flowmeter |
| JPH07311062A (en) * | 1994-05-20 | 1995-11-28 | Tokico Ltd | Ultrasonic flowmeter |
| JPH08285647A (en) * | 1995-04-10 | 1996-11-01 | Tokyo Keiso Co Ltd | Detector for ultrasonic flowmeter |
| JP2000321100A (en) * | 1999-05-14 | 2000-11-24 | Yamatake Sangyo Systems Co Ltd | Flow-rate measuring apparatus |
-
2001
- 2001-03-15 JP JP2001073721A patent/JP4984348B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04130224A (en) * | 1990-09-20 | 1992-05-01 | Tokico Ltd | Mass flowmeter |
| JPH07311062A (en) * | 1994-05-20 | 1995-11-28 | Tokico Ltd | Ultrasonic flowmeter |
| JPH08285647A (en) * | 1995-04-10 | 1996-11-01 | Tokyo Keiso Co Ltd | Detector for ultrasonic flowmeter |
| JP2000321100A (en) * | 1999-05-14 | 2000-11-24 | Yamatake Sangyo Systems Co Ltd | Flow-rate measuring apparatus |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007263796A (en) * | 2006-03-29 | 2007-10-11 | Smc Corp | Flow measuring device |
| JP4702668B2 (en) * | 2006-03-29 | 2011-06-15 | Ｓｍｃ株式会社 | Flow measuring device |
| KR101066597B1 (en) | 2010-01-05 | 2011-09-22 | 세메스 주식회사 | Ultrasonic flow meter and substrate processing apparatus having the same |
| JP4991963B1 (en) * | 2011-11-16 | 2012-08-08 | 株式会社アツデン | Ultrasonic flow measuring device and method of using the same |
| US9588934B2 (en) | 2011-11-16 | 2017-03-07 | Atsuden Co., Ltd. | Ultrasonic type flowmeter apparatus and method of using the same |
| KR20220018074A (en) * | 2016-12-16 | 2022-02-14 | 가부시키가이샤 에바라 세이사꾸쇼 | Cleaning chemical liquid supply device, and cleaning unit |
| CN110073471A (en) * | 2016-12-16 | 2019-07-30 | 株式会社荏原制作所 | Clean chemicals feeder, cleaning unit and the storaging medium for storing program |
| TWI753066B (en) * | 2016-12-16 | 2022-01-21 | 日商荏原製作所股份有限公司 | Cleaning chemical solution supply device, cleaning unit, and memory medium storing programs |
| WO2018110631A1 (en) * | 2016-12-16 | 2018-06-21 | 株式会社荏原製作所 | Cleaning chemical liquid supply device, cleaning unit, and recording medium having program stored therein |
| US11358253B2 (en) | 2016-12-16 | 2022-06-14 | Ebara Corporation | Cleaning liquid supply device, cleaning unit, and storage medium storing program |
| KR102452928B1 (en) * | 2016-12-16 | 2022-10-11 | 가부시키가이샤 에바라 세이사꾸쇼 | Cleaning chemical liquid supply device, and cleaning unit |
| CN110073471B (en) * | 2016-12-16 | 2023-06-09 | 株式会社荏原制作所 | Cleaning unit |
| JP2019106424A (en) * | 2017-12-11 | 2019-06-27 | 株式会社荏原製作所 | Cleaning solution supply apparatus, cleaning unit, and storage medium storing program |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4984348B2 (en) | 2012-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8136413B2 (en) | Bi-directional oscillating jet flowmeter | |
| EP1816442A3 (en) | Ultrasonic flow meter | |
| JP2004271496A (en) | Ultrasonic flow measuring method | |
| US20100024570A1 (en) | Device for Determining or Monitoring a Medium Volume or Mass Flow Rate in a Conduit | |
| RU2612727C2 (en) | Ultrasonic signal coupler | |
| US7412902B2 (en) | Device for determination and/or monitoring of the volumetric and/or mass flow of a medium and having coupling element including two element portions | |
| JP4535065B2 (en) | Doppler ultrasonic flow meter | |
| JPH06249690A (en) | Ultrasonic flowmeter | |
| JP4936856B2 (en) | Flowmeter | |
| JP2002277300A (en) | Flow rate measuring apparatus | |
| US11815381B2 (en) | Ultrasonic flowmeter, use of an ultrasonic flowmeter in a shut-off device and shut-off device | |
| US11885654B2 (en) | Ultrasonic flowmeter, use of an ultrasonic flowmeter in a shut-off device and shut-off device | |
| JP2004317288A (en) | Ultrasonic acoustic velocity measuring device | |
| JP2941255B1 (en) | Flow measurement device | |
| RU2672815C1 (en) | Measuring flow in ultrasound | |
| JP7373772B2 (en) | Physical quantity measuring device | |
| JP4827008B2 (en) | Ultrasonic flow meter, ultrasonic transducer, ultrasonic transmission / reception unit, and flow measurement method using ultrasonic flow meter | |
| JP3398251B2 (en) | Flowmeter | |
| JP3355130B2 (en) | Pulsation absorption structure of flow meter | |
| RU2517996C1 (en) | Ultrasonic flowmeter sensor | |
| JPH11258020A (en) | Flowmeter | |
| JP2004045425A (en) | Flow rate measuring device | |
| EP0093505A1 (en) | Method of measuring fluid oscillation amplitude | |
| JP3500516B2 (en) | Vortex flow meter | |
| JPH06180243A (en) | Vortex flowmeter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080219 |
|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20080312 |
|
| RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20091119 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101221 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110614 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110720 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120403 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120416 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150511 Year of fee payment: 3 |
|
| LAPS | Cancellation because of no payment of annual fees |