JP2002275681A - Solution leakage preventive mechanism of plating equipment - Google Patents

Solution leakage preventive mechanism of plating equipment

Info

Publication number
JP2002275681A
JP2002275681A JP2001074296A JP2001074296A JP2002275681A JP 2002275681 A JP2002275681 A JP 2002275681A JP 2001074296 A JP2001074296 A JP 2001074296A JP 2001074296 A JP2001074296 A JP 2001074296A JP 2002275681 A JP2002275681 A JP 2002275681A
Authority
JP
Japan
Prior art keywords
rolls
work
magnet
processing tank
liquid leakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001074296A
Other languages
Japanese (ja)
Other versions
JP4591984B2 (en
Inventor
Kazunori Ikubo
和則 井久保
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chuo Seisakusho KK
Original Assignee
Chuo Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chuo Seisakusho KK filed Critical Chuo Seisakusho KK
Priority to JP2001074296A priority Critical patent/JP4591984B2/en
Publication of JP2002275681A publication Critical patent/JP2002275681A/en
Application granted granted Critical
Publication of JP4591984B2 publication Critical patent/JP4591984B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electroplating Methods And Accessories (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a solution leakage preventive mechanism of a plating equipment which is capable of uniformly sealing the upper part to the lower part of a seal regardless of the volume of the solution and makes it possible to obtain good sealing performance by a simple mechanism without using air pressure, or the like. SOLUTION: The side walls of a treating vessel body 1 through which a work is put in and out are provided with slits 2 and 3 in a perpendicular direction and two pieces one set of columnar rolls 4 and 4 as well as 5 and 5 are perpendicularly disposed within the treating vessel body 1 in proximity to the slits 2 and 3 in the state that these rolls are movable horizontally with each other Two pieces one set of the columnar rolls 4 and 4 as well as 5 and 5 are adapted to be attracted to each other by magnetic force. The rolls 4 and 4 as well as 5 and 5 are housed within compartments 6 and 7.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、平板状のワークを
垂直な姿勢で移送しながらめっきするめっき装置におい
て、処理槽の入出口から処理液の漏出を防止するめっき
装置の液漏れ防止機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plating apparatus for plating a plate-like work while transferring the work in a vertical position, and to a mechanism for preventing a treatment liquid from leaking from an inlet / outlet of a processing tank. .

【0002】[0002]

【従来の技術】プリント基板のような平板状ワークをめ
っきする装置としては種々の方式のものが提供されてい
る。これらの装置のうち、平板状ワークを垂直な姿勢で
連続的に移送するめっき装置は、治具が不要であり、浴
液の噴流機構を装備することにより高速のめっきができ
るというような特徴があることから多く使用されてい
る。こうした平板状ワークを垂直な姿勢で連続的に移送
するめっき装置においては、平板状ワークが処理液面よ
り下方で処理槽に入出することから、入出口からの処理
液の漏出が問題となるため、その漏出を防止するめっき
装置の液漏れ防止機構が考えられており、例えば特表平
9−505638のようなものがある。
2. Description of the Related Art Various types of apparatuses for plating a flat work such as a printed circuit board have been provided. Among these devices, the plating device that continuously transports a flat work in a vertical position does not require a jig, and has a feature that high-speed plating can be performed by equipping with a bath liquid jet mechanism. It is often used because of its existence. In a plating apparatus that continuously transfers such a flat work in a vertical position, since the flat work enters and exits the processing tank below the processing liquid level, leakage of the processing liquid from the entrance and exit becomes a problem. A mechanism for preventing the liquid from leaking out of the plating apparatus has been considered, for example, Japanese Patent Application Laid-Open No. 9-505638.

【0003】この特表平9−505638の装置は処理
区画室の端壁にワークを通過させるための垂直なスリッ
トを設け、このスリットに対応して垂直な向きでルーズ
に処理浴内に対をなして配置したロッド又は管の円柱状
のものをシールとして配置し、これらのロッド又は管が
液圧により互いに又はその都度通過するワークと処理区
画室の端壁とに圧着されるようにしたものである。この
液漏れ防止機構では、浴液の液圧によりロッド又は管で
あるシールを押し付けるようにしているので、液圧の変
動によりシール性能が変動し、シールの上部と下部とで
は液圧が異なることからシールが不十分となることがあ
り、特にシャワー槽の水量が少なく液圧がかからない槽
ではシールが不十分となるという問題があった。
The apparatus disclosed in Japanese Patent Application Laid-Open No. 9-505638 is provided with a vertical slit for allowing a workpiece to pass through an end wall of a processing compartment, and a pair is loosely inserted into the processing bath in a vertical direction corresponding to the slit. A cylindrical rod or tube that has been arranged so as to be arranged as a seal so that these rods or tubes can be pressed against each other or the end wall of the processing compartment chamber with each other or each time by hydraulic pressure. It is. In this liquid leakage prevention mechanism, the seal which is a rod or a pipe is pressed by the liquid pressure of the bath liquid, so that the seal performance fluctuates due to the fluctuation of the liquid pressure, and the liquid pressure differs between the upper part and the lower part of the seal. Therefore, there is a problem that the seal may be insufficient, especially in a bath where the amount of water in the shower tub is small and the liquid pressure is not applied.

【0004】また、特開平8−239797のように空
気圧でシールロールを押し付けるものも考えられている
が、構造が複雑であり、空気の供給が断たれるとシール
性能が損なわれるという問題があった。
[0004] In addition, as in Japanese Patent Application Laid-Open No. Hei 8-239797, a method of pressing a seal roll by air pressure has been considered, but there is a problem that the structure is complicated and sealing performance is impaired if air supply is cut off. Was.

【0005】[0005]

【発明が解決しようとする課題】本発明は上記の問題点
を解決し、液量とは無関係にシールの上部から下部まで
均一なシールができ、空気圧等を使用することなく簡単
な機構で良好なシール性能が得られるめっき装置の液漏
れ防止機構を提供するためになされたものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and enables uniform sealing from the upper part to the lower part of the seal irrespective of the amount of liquid, and can be achieved with a simple mechanism without using air pressure or the like. The purpose of the present invention is to provide a liquid leakage preventing mechanism for a plating apparatus that can achieve a high sealing performance.

【0006】[0006]

【課題を解決するための手段】上記の問題は、処理槽の
ワークが入出する側壁に垂直方向のスリットを設け、該
スリットに近接する処理槽内に2個1組の円柱状のロー
ルを相互に移動可能な状態で垂直に配設し、該2個1組
のロールは磁力により相互に吸着するようにしたことを
特徴とする本発明のめっき装置の液漏れ防止機構によっ
て解決できる。
SUMMARY OF THE INVENTION The above problem is caused by providing a vertical slit in a side wall of a processing tank into which a work enters and exits, and a set of two cylindrical rolls in a processing tank adjacent to the slit. The present invention can be solved by the liquid leakage preventing mechanism of the plating apparatus according to the present invention, wherein the two rolls are arranged vertically so as to be movable so that they can be attracted to each other by magnetic force.

【0007】また、2個のロールの一方は磁石、他方は
磁性体をそれぞれ内蔵したものとすること、あるいは、
2個のロールはいずれも磁石を内蔵したものとし、該磁
石を2個のロールが相互に吸着する極性とすることによ
り具体化できる。更に、磁石又は磁性体をロールの長手
方向の両端部に内蔵すること、又は、磁石又は磁性体を
ロールの長手方向の中間部に内蔵することができる。
[0007] One of the two rolls has a magnet and the other has a built-in magnetic material.
Each of the two rolls has a built-in magnet, and can be embodied by setting the magnets to have a polarity that allows the two rolls to be attracted to each other. Furthermore, a magnet or a magnetic material can be incorporated at both ends in the longitudinal direction of the roll, or a magnet or a magnetic material can be incorporated at an intermediate portion in the longitudinal direction of the roll.

【0008】[0008]

【発明の実施の形態】次に、本発明のめっき装置の液漏
れ防止機構の実施形態について、図を参照しながら具体
的に説明する。図1は平面図であって、図1に示すよう
に処理槽本体1のワークの入口側の側壁にはスリット2
が、対向するワークの出口側の側壁にはスリット3がそ
れぞれ垂直方向に設けてある。スリット2及び3の処理
槽内側にはそれぞれ円柱状のロール4、4及び5、5を
2個1組としてそれぞれスリット2及び3に沿って垂直
に配設してあり、また、ロール4、4及び5、5は相互
に水平方向に移動可能な状態としてある。ロール4、4
及び5、5は、スリット2及び3に沿った位置から大き
く離脱しないように、スリット2及び3の処理槽内側に
設けた区画6、6及び7、7に収容してある。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a liquid leakage preventing mechanism of a plating apparatus according to the present invention will be specifically described with reference to the drawings. FIG. 1 is a plan view. As shown in FIG.
However, slits 3 are respectively provided in the side walls on the outlet side of the opposing work in the vertical direction. Inside the processing tanks of the slits 2 and 3, two cylindrical rolls 4, 4 and 5, 5 are arranged vertically along the slits 2 and 3, respectively, as a set of two rolls. , 5, and 5 are in a mutually movable state. Roll 4, 4
, 5, and 5 are accommodated in sections 6, 6, 7, and 7 provided inside the processing tanks of the slits 2 and 3 so as not to largely separate from the positions along the slits 2 and 3.

【0009】ロール4、4及び5、5は例えば図3に断
面を示すような、一方のロール4及び5の長手方向両端
部に円柱状の磁石8、9を、他方のロール4及び5の長
手方向両端部に円柱状の磁性体片10、11を内蔵させ
たものとするか、あるいは図4に示すように両方のロー
ル4、4及び5、5の長手方向両端部に円柱状の磁石
8、8及び9、9を内蔵させたものとしてある。図3及
び4では、ロール4、4及び5、5の長手方向端面に磁
石8、9及び磁性体片10、11が露出しているが、磁
石8、9及び磁性体片10、11の腐食を防ぎ、磁石
8、9及び磁性体片10、11が溶出して処理液を汚染
することを防ぐために耐食性材料で覆うことが好まし
い。
The rolls 4, 4, 5 and 5 have cylindrical magnets 8 and 9 at both ends in the longitudinal direction of one of the rolls 4 and 5, as shown in the cross section in FIG. Either cylindrical magnetic pieces 10 and 11 are built in at both ends in the longitudinal direction, or cylindrical magnets are provided at both ends in the longitudinal direction of both rolls 4, 4, 5 and 5 as shown in FIG. 8, 8, 9 and 9 are built-in. In FIGS. 3 and 4, the magnets 8, 9 and the magnetic pieces 10, 11 are exposed at the longitudinal end faces of the rolls 4, 4, 5, 5, but the corrosion of the magnets 8, 9 and the magnetic pieces 10, 11 is caused. It is preferable to cover with a corrosion resistant material in order to prevent the magnets 8 and 9 and the magnetic pieces 10 and 11 from being eluted and contaminating the processing solution.

【0010】また、ロール4、4及び5、5は図5に示
すような、一方のロール4及び5の中間部に円柱状の磁
石8、9を、他方のロール4及び5の中間部の円柱状の
磁石8、9に対向する位置に円柱状の磁性体片10、1
1を内蔵させたものとするか、あるいは図6に示すよう
に両方のロール4、4及び5、5の中間部の対向する位
置に円柱状の磁石8、8及び9、9を内蔵させたものと
してもよい。ロール4、4及び5、5の中間部に磁石
8、8及び9、9あるいは磁性体片10、11を内蔵さ
せたものとするためには、図5及び6に示すようにロー
ル4、4及び5、5を長手方向に分割し、一方の接合部
に雄ねじ部、他方の接合部に雌ねじ部を設け、螺合して
接合するようにするとともに、雌ねじ部の延長部に空洞
部12、12を形成し、該空洞部12、12に磁石8、
8及び9、9あるいは磁性体片10、10及び11、1
1を内蔵させることができる。
As shown in FIG. 5, the rolls 4, 4, 5 and 5 have cylindrical magnets 8 and 9 in the middle of one of the rolls 4 and 5, and the middle of the other rolls 4 and 5, respectively. At positions opposed to the cylindrical magnets 8 and 9, the cylindrical magnetic pieces 10 and 1 are placed.
1 or, as shown in FIG. 6, columnar magnets 8, 8 and 9, 9 at the opposing positions in the middle of the two rolls 4, 4, 5 and 5. It may be a thing. In order to incorporate the magnets 8, 8, 9 and 9 or the magnetic pieces 10 and 11 in the middle of the rolls 4, 4 and 5, 5, as shown in FIGS. , 5 and 5 are divided in the longitudinal direction, a male thread portion is provided at one joint portion, and a female thread portion is provided at the other joint portion. 12 are formed, and the magnets 8 are formed in the cavities 12, 12.
8 and 9, 9 or the magnetic pieces 10, 10 and 11, 1
1 can be built-in.

【0011】いずれにしても、これら円柱状の磁石8、
9又は円柱状の磁性体片10、11の中心軸は、ロール
4、4及び5、5の中心軸と一致させることが好まし
く、ロール4、4及び5、5の表面はシール性能を増
し、ワークを傷つけないよう弾性材とすることが好まし
い。また、両方のロール4、4及び5、5を磁石8、8
及び9、9を内蔵させたものとする場合には、2個1組
のロール4、4及び5、5が相互に吸着するように磁石
8、8及び9、9の極性を組み合わせるものとする。さ
らに、磁石8、8及び9、9あるいは磁性体片10、1
0及び11、11を内蔵させる位置は両端部あるいは中
間部に限ることはなく、要は2個1組のロール4、4及
び5、5が安定して相互に吸着する位置に配置すればよ
い。
In any case, these columnar magnets 8,
It is preferable that the central axis of the magnetic material pieces 10 and 11 in the form of 9 or a column coincide with the central axes of the rolls 4, 4, 5 and 5, and the surfaces of the rolls 4, 4, 5 and 5 increase sealing performance, It is preferable to use an elastic material so as not to damage the work. Also, both rolls 4, 4, 5 and 5 are connected to magnets 8, 8
, And 9 and 9, the polarities of the magnets 8, 8 and 9 and 9 are combined so that the pair of rolls 4, 4 and 5 and 5 attract each other. . Further, the magnets 8, 8 and 9, 9 or the magnetic pieces 10, 1
The positions for incorporating the 0, 11, and 11 are not limited to the both ends or the intermediate portion, and the point is that the rolls 4, 4, 5, and 5 in a pair are stably adsorbed to each other. .

【0012】なお、前記実施の形態においては、区画
6、6及び7、7を形成する区画形成部材13、13及
び14、14を大きく開口した処理槽本体1に取り付け
てあり、スリット2及び3は区画形成部材13、13及
び14、14の対向部分によって形成されるようにして
ある。このような構成とすることにより装置の製作が容
易になる利点があるが、一体とするか、あるいは、別の
部分で分割した構成とすることもできる。また、必要に
応じ、処理槽本体1に補強リブ等を設けること、薬液槽
では処理液の噴流装置、循環装置、攪拌装置等を、水洗
槽ではシャワー装置等を設けることは言うまでもない。
In the above-described embodiment, the partition forming members 13, 13, 14 and 14, which form the partitions 6, 6, 7 and 7, are attached to the processing tank main body 1 having a large opening, and the slits 2 and 3 are provided. Is formed by opposing portions of the partition forming members 13, 13 and 14, 14. This configuration has the advantage that the device can be easily manufactured, but it can also be integrated or divided into different parts. Needless to say, the processing tank body 1 may be provided with reinforcing ribs and the like, the chemical liquid tank may be provided with a processing liquid jet device, a circulation device, a stirring device, and the like, and the washing tank may be provided with a shower device and the like.

【0013】前記のように構成した処理槽を処理工程に
したがって直線状に複数配置してめっきラインが構成さ
れ、ワークWは図示しない移送装置により移送される。
処理槽には処理工程にしたがって必要な薬液、洗浄水等
がそれぞれ充填してある。ワークWは入口側のスリット
2から処理槽本体1内に入り、出口側のスリット3から
出て行き、隣接する次の処理槽本体1の入口側のスリッ
ト2から次の処理槽本体1内に入っていく。移送装置に
は従来知られる構成のものが使用可能である。
A plating line is formed by arranging a plurality of processing tanks configured as described above in a straight line in accordance with the processing steps, and the work W is transferred by a transfer device (not shown).
The treatment tank is filled with necessary chemicals, washing water, etc. according to the treatment process. The work W enters the processing tank body 1 through the slit 2 on the inlet side, exits from the slit 3 on the outlet side, and enters the next processing tank body 1 from the slit 2 on the inlet side of the next adjacent processing tank body 1. Go in. A transfer device having a conventionally known configuration can be used.

【0014】ワークWが入ってくる前は、2個1組のロ
ール4、4及び5、5が磁力により相互に吸着している
ので、それぞれ実質的に一体となっており、処理槽本体
1内の薬液の液圧によってスリット2及び3に隣接する
区画6、6及び7、7の内壁面に押し付けられ、処理液
の漏出を抑止する。このとき、2個1組のロール4、4
及び5、5が相互に吸着して一体化しているので、液圧
が低くてもロール4、4及び5、5は充分に区画6、6
及び7、7の内壁面に押し付けられる。ワークWがロー
ル4、4又は5、5の間に入ってくると、2個1組のロ
ール4、4又は5、5は磁力によって相互に吸着してお
り、区画6、6及び7、7の中で移動できるので、ワー
クWは容易にロール4、4又は5、5の間に入ることが
でき、ロール4、4又は5、5はワークWを挟んで相互
に吸着した状態を維持する。これにより、ワークWとロ
ール4、4又は5、5との間はシールされることとな
る。
Before the work W enters, a pair of two rolls 4, 4, 5 and 5 are attracted to each other by magnetic force, so that they are respectively substantially integrated, and the processing tank body 1 Due to the liquid pressure of the chemical solution inside, it is pressed against the inner wall surfaces of the sections 6, 6, 7, and 7 adjacent to the slits 2 and 3, thereby preventing the treatment liquid from leaking. At this time, a set of two rolls 4, 4
Rolls 4, 4, 5 and 5 are sufficiently divided into sections 6 and 6 even when the hydraulic pressure is low because
And 7, 7 are pressed against the inner wall surface. When the work W enters between the rolls 4, 4 or 5, 5, the pair of rolls 4, 4, 5 and 5 are attracted to each other by magnetic force, and the sections 6, 6 and 7, 7 , The work W can easily enter between the rolls 4, 4, 5, and 5, and the rolls 4, 4, 5, and 5 maintain a state of being mutually attracted across the work W. . Thereby, the space between the work W and the rolls 4, 4 or 5, 5 is sealed.

【0015】ワークWが移送されるとワークWを挟んで
相互に吸着しているロール4、4又は5、5も共に移送
され、ロール4、4又は5、5は区画6、6又は7、7
のワークWの移送方向前方の壁面に押し付けられること
になり、ロール4、4又は5、5と区画6、6又は7、
7のワークWの移送方向前方の壁面との間がシールされ
る。ワークWが更に移送されれば、ロール4、4又は
5、5は区画6、6又は7、7のワークWの移送方向前
方の壁面に押し付けられた状態でワークWに従動して回
転しワークWとロール4、4又は5、5との間、ならび
に、ロール4、4又は5、5と区画6、6又は7、7の
シールが維持される。
When the work W is transferred, the rolls 4, 4, or 5, which are mutually adsorbed across the work W, are also transferred together, and the rolls 4, 4, 5, 5 are divided into sections 6, 6 or 7, 7
Is pressed against the wall in the transfer direction of the workpiece W, and the rolls 4, 4 or 5, 5 and the sections 6, 6 or 7,
7 is sealed between the work W and the wall surface on the front side in the transfer direction. When the work W is further transferred, the rolls 4, 4 or 5 and 5 rotate following the work W while being pressed against the wall surface in the transfer direction of the work W in the sections 6, 6 or 7 and 7 to rotate. The seal between W and rolls 4, 4 or 5, 5 and between rolls 4, 4 or 5, 5 and compartments 6, 6 or 7, 7 is maintained.

【0016】したがって、ワークWがないときには、磁
力により相互に吸着して一体となっているロール4、4
及び5、5が液圧により区画6、6及び7、7の内壁面
に押し付けられ、ワークWが移送されている間にはワー
クWを挟んで相互に吸着しているロール4、4又は5、
5がワークWと共に移送されて区画6、6又は7、7の
ワークWの移送方向前方の壁面に押し付けられることに
なり、常にスリット2及び3はロール4、4及び5、5
あるいはロール4、4及び5、5とワークWとによって
塞がれ、液漏れを抑止できることとなる。また、ワーク
Wの厚さが変化しても、ロール4、4又は5、5がワー
クWを挟んで相互に吸着するので、液漏れの抑止性能が
変化することはない。なお、ロール4、4及び5、5を
磁石8、8及び9、9を内蔵させたものとし、区画6、
6及び7、7の内壁に磁性材料を内蔵させておけば、ロ
ール4、4及び5、5が磁力により区画6、6及び7、
7の内壁面に吸着するので液圧が殆どかからない場合に
も確実にスリット2及び3が塞がれることになるもので
ある。
Therefore, when there is no work W, the rolls 4 and 4 which are attracted to each other by magnetic force and are integrated are formed.
, 5 and 5 are pressed against the inner wall surfaces of the compartments 6, 6 and 7 and 7 by hydraulic pressure, and the rolls 4, 4 and 5 are mutually adsorbed across the work W while the work W is being transferred. ,
5 is conveyed together with the work W and pressed against the wall in the transfer direction of the work W in the section 6, 6 or 7, 7 so that the slits 2 and 3 are always rolls 4, 4, 5 and 5.
Alternatively, the work W is closed by the rolls 4, 4, 5, and 5, and liquid leakage can be suppressed. In addition, even if the thickness of the work W changes, the rolls 4, 4, 5, and 5 adhere to each other across the work W, so that the performance of suppressing the liquid leakage does not change. The rolls 4, 4, 5, and 5 have magnets 8, 8, 9, and 9 built therein.
If a magnetic material is built in the inner walls of 6, 7, and 7, the rolls 4, 4, 5, and 5 can be divided into sections 6, 6, and 7 by magnetic force.
7, the slits 2 and 3 are surely closed even when the liquid pressure is hardly applied.

【0017】[0017]

【発明の効果】以上説明した本発明によれば、簡単な構
成で空気圧を使用することもなく、ワークが存在するか
否かにかかわらず、液圧の低い処理槽においても常に液
漏れを防止できる、めっき装置の液漏れ防止機構を提供
するものとして業界に寄与するところ極めて大である。
According to the present invention described above, liquid leakage is always prevented even in a processing tank having a low hydraulic pressure, regardless of the presence or absence of a work, regardless of the presence or absence of a work with a simple configuration. It is extremely large to contribute to the industry as to provide a mechanism for preventing the liquid leakage of the plating apparatus.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態を示す平面図である。FIG. 1 is a plan view showing an embodiment of the present invention.

【図2】本発明の実施の形態を示す縦断面図である。FIG. 2 is a longitudinal sectional view showing the embodiment of the present invention.

【図3】ロールの一例を示す断面図である。FIG. 3 is a cross-sectional view illustrating an example of a roll.

【図4】ロールの他の例を示す断面図である。FIG. 4 is a sectional view showing another example of the roll.

【図5】ロールの別の例を示す断面図である。FIG. 5 is a sectional view showing another example of the roll.

【図6】ロールの更に別の例を示す断面図である。FIG. 6 is a sectional view showing still another example of the roll.

【符号の説明】[Explanation of symbols]

1 処理槽本体 2 スリット 3 スリット 4 ロール 5 ロール 6 区画 7 区画 8 磁石 9 磁石 10 磁性体片 11 磁性体片 12 空洞部 13 区画形成部材 14 区画形成部材 DESCRIPTION OF SYMBOLS 1 Processing tank main body 2 Slit 3 Slit 4 Roll 5 Roll 6 Section 7 Section 8 Magnet 9 Magnet 10 Magnetic piece 11 Magnetic piece 12 Cavity part 13 Section forming member 14 Section forming member

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】処理槽のワークが入出する側壁に垂直方向
のスリットを設け、該スリットに近接する処理槽内に2
個1組の円柱状のロールを相互に水平方向に移動可能な
状態で垂直に配設し、該2個1組のロールは磁力により
相互に吸着するようにしたことを特徴とするめっき装置
の液漏れ防止機構。
1. A vertical slit is provided in a side wall of a processing tank where a work enters and exits, and a slit is provided in a processing tank adjacent to the slit.
A pair of cylindrical rolls are vertically disposed so as to be mutually movable in a horizontal direction, and the pair of rolls are attracted to each other by a magnetic force. Liquid leakage prevention mechanism.
【請求項2】ロールを処理槽内に設けた区画内に収容し
たことを特徴とする請求項1に記載のめっき装置の液漏
れ防止機構。
2. The mechanism according to claim 1, wherein the roll is accommodated in a section provided in the processing tank.
【請求項3】1組となる2個のロールの一方には磁石、
他方には磁性体をそれぞれ内蔵させたことを特徴とする
請求項1又は2に記載のめっき装置の液漏れ防止機構。
3. A magnet is provided on one of two rolls forming a set.
The liquid leakage preventing mechanism for a plating apparatus according to claim 1, wherein a magnetic material is incorporated in each of the other members.
【請求項4】1組となる2個のロールの両方に磁石を内
蔵させ、該磁石を2個のロールが相互に吸着する極性と
したことを特徴とする請求項1又は2に記載のめっき装
置の液漏れ防止機構。
4. The plating according to claim 1, wherein a magnet is incorporated in both of the two rolls forming a set, and the magnet has a polarity in which the two rolls are attracted to each other. Liquid leakage prevention mechanism of the device.
【請求項5】磁石又は磁性体をロールの長手方向の両端
部又は中間部あるいはその両方に内蔵させたことを特徴
とする請求項1乃至3の何れかに記載のめっき装置の液
漏れ防止機構。
5. A liquid leakage prevention mechanism for a plating apparatus according to claim 1, wherein a magnet or a magnetic material is incorporated at both ends or an intermediate portion or both in the longitudinal direction of the roll. .
JP2001074296A 2001-03-15 2001-03-15 Liquid leakage prevention mechanism for plating equipment Expired - Fee Related JP4591984B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001074296A JP4591984B2 (en) 2001-03-15 2001-03-15 Liquid leakage prevention mechanism for plating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001074296A JP4591984B2 (en) 2001-03-15 2001-03-15 Liquid leakage prevention mechanism for plating equipment

Publications (2)

Publication Number Publication Date
JP2002275681A true JP2002275681A (en) 2002-09-25
JP4591984B2 JP4591984B2 (en) 2010-12-01

Family

ID=18931588

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP4591984B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006257454A (en) * 2005-03-15 2006-09-28 Toray Ind Inc Treatment device for sheet and production method for sheet using the same
JP2006336082A (en) * 2005-06-03 2006-12-14 Dowa Holdings Co Ltd Production method and production apparatus for composite plating material
JP2010174265A (en) * 2009-01-27 2010-08-12 Sumitomo Metal Mining Co Ltd Plating apparatus for hoop material, and continuous plating method for hoop material using the same
CN112647115A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Sealing device, container and workpiece processing device
CN112647114A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Sealing device, container and workpiece processing device
CN112647116A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Workpiece processing production system
CN114277415A (en) * 2021-07-16 2022-04-05 一诠科技(中国)有限公司 Sponge wheelset and electroplating device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326365A (en) * 1986-07-17 1988-02-03 Nippon Kokan Kk <Nkk> Sealing device
JPH01306563A (en) * 1988-06-04 1989-12-11 Nippon Steel Corp Sealing device for vacuum chamber
JPH0527042U (en) * 1991-09-19 1993-04-06 中外炉工業株式会社 Sealing device for continuous furnace for non-magnetic metal strip
JPH0741978A (en) * 1993-07-29 1995-02-10 Kawasaki Steel Corp Wringer roll
JPH09505638A (en) * 1994-05-11 1997-06-03 シーメンス ソシエテ アノニム Equipment for processing disk-shaped workpieces
JP2001335988A (en) * 2000-05-30 2001-12-07 Hideyuki Kobayashi Liquid leakage preventing mechanism by roller of plating treatment device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6326365A (en) * 1986-07-17 1988-02-03 Nippon Kokan Kk <Nkk> Sealing device
JPH01306563A (en) * 1988-06-04 1989-12-11 Nippon Steel Corp Sealing device for vacuum chamber
JPH0527042U (en) * 1991-09-19 1993-04-06 中外炉工業株式会社 Sealing device for continuous furnace for non-magnetic metal strip
JPH0741978A (en) * 1993-07-29 1995-02-10 Kawasaki Steel Corp Wringer roll
JPH09505638A (en) * 1994-05-11 1997-06-03 シーメンス ソシエテ アノニム Equipment for processing disk-shaped workpieces
JP2001335988A (en) * 2000-05-30 2001-12-07 Hideyuki Kobayashi Liquid leakage preventing mechanism by roller of plating treatment device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006257454A (en) * 2005-03-15 2006-09-28 Toray Ind Inc Treatment device for sheet and production method for sheet using the same
JP4730650B2 (en) * 2005-03-15 2011-07-20 東レ株式会社 Sheet processing apparatus and sheet manufacturing method using the same
JP2006336082A (en) * 2005-06-03 2006-12-14 Dowa Holdings Co Ltd Production method and production apparatus for composite plating material
JP2010174265A (en) * 2009-01-27 2010-08-12 Sumitomo Metal Mining Co Ltd Plating apparatus for hoop material, and continuous plating method for hoop material using the same
CN112647115A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Sealing device, container and workpiece processing device
CN112647114A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Sealing device, container and workpiece processing device
CN112647116A (en) * 2019-10-12 2021-04-13 昆山东威科技股份有限公司 Workpiece processing production system
CN114277415A (en) * 2021-07-16 2022-04-05 一诠科技(中国)有限公司 Sponge wheelset and electroplating device

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