JP2002265237A5 - - Google Patents

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Publication number
JP2002265237A5
JP2002265237A5 JP2001062874A JP2001062874A JP2002265237A5 JP 2002265237 A5 JP2002265237 A5 JP 2002265237A5 JP 2001062874 A JP2001062874 A JP 2001062874A JP 2001062874 A JP2001062874 A JP 2001062874A JP 2002265237 A5 JP2002265237 A5 JP 2002265237A5
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JP
Japan
Prior art keywords
opening
emitted
infrared light
infrared
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001062874A
Other languages
English (en)
Japanese (ja)
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JP2002265237A (ja
JP4503196B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2001062874A priority Critical patent/JP4503196B2/ja
Priority claimed from JP2001062874A external-priority patent/JP4503196B2/ja
Publication of JP2002265237A publication Critical patent/JP2002265237A/ja
Publication of JP2002265237A5 publication Critical patent/JP2002265237A5/ja
Application granted granted Critical
Publication of JP4503196B2 publication Critical patent/JP4503196B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001062874A 2001-03-07 2001-03-07 封着室、パネル保持台及び封着方法 Expired - Lifetime JP4503196B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001062874A JP4503196B2 (ja) 2001-03-07 2001-03-07 封着室、パネル保持台及び封着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001062874A JP4503196B2 (ja) 2001-03-07 2001-03-07 封着室、パネル保持台及び封着方法

Publications (3)

Publication Number Publication Date
JP2002265237A JP2002265237A (ja) 2002-09-18
JP2002265237A5 true JP2002265237A5 (xx) 2008-02-07
JP4503196B2 JP4503196B2 (ja) 2010-07-14

Family

ID=18921952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001062874A Expired - Lifetime JP4503196B2 (ja) 2001-03-07 2001-03-07 封着室、パネル保持台及び封着方法

Country Status (1)

Country Link
JP (1) JP4503196B2 (xx)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004335225A (ja) * 2003-05-06 2004-11-25 Nippon Sheet Glass Co Ltd ガラスパネル
EP1879209B1 (en) * 2006-03-31 2011-03-16 Panasonic Corporation Plasma display panel
US8500933B2 (en) * 2007-12-14 2013-08-06 Guardian Industries Corp. Localized heating of edge seals for a vacuum insulating glass unit, and/or unitized oven for accomplishing the same
JP5557833B2 (ja) * 2009-02-25 2014-07-23 セイコーインスツル株式会社 陽極接合方法、陽極接合治具、および陽極接合装置
JP2012204116A (ja) * 2011-03-25 2012-10-22 Panasonic Corp プラズマディスプレイパネルの製造方法、プラズマディスプレイパネルの封着・排気装置
JP5951247B2 (ja) * 2011-12-12 2016-07-13 株式会社アルバック ガラス基板の封着方法、及び、ガラス基板の封着装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129828A (ja) * 1988-11-10 1990-05-17 Matsushita Electric Ind Co Ltd 画像表示装置の製造方法
JPH11287743A (ja) * 1998-04-03 1999-10-19 Ulvac Corp ウエハプロセスモニタ用の熱脱離分析室
JP4180189B2 (ja) * 1999-04-30 2008-11-12 株式会社アルバック プラズマディスプレイ装置製造方法、及びリアパネル
JP3805134B2 (ja) * 1999-05-25 2006-08-02 東陶機器株式会社 絶縁性基板吸着用静電チャック

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