JP2002250572A - Heat exchanger - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heat exchanger having a channel and a shape in the channel for agitating flow in upper and lower directions without increasing pressure loss and manufacturing costs, and drastically improving the heat transfer characteristics on the bottom surface, or on the channel bottom surface and channel upper surface. SOLUTION: The channel 125a of a water-cooling plate 110a has a zigzag shape including a section where a straight section continues, circles the entire region of an area where a heat generation element is arranged on the surface of the heat transfer surface of the water-cooling plate 110a, and is formed in a position relationship where the section between adjacent channels allow fluid to flow in different directions. Every two rib sections 70 having a shape of a hand drum are arranged continuously at each constant interval in each straight channel. The rib sections 7 induce a secondary three-dimensional turbulence flow in upper and lower directions to the main current of fluid (heat radiation water) flowing through the channel 125a at the downstream side to improve heat transfer characteristics by releasing the boundary layer on the bottom surface of the channel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermoelectric module which is disposed oppositely above and below a thermoelectric module, and which generates heat or cools the bonding plates on the upper and lower sides of the module via a fluid flowing through an internal flow path. Involved in the exchange heat exchanger,
The present invention relates to a flow path for improving heat transfer characteristics of upper and lower wall surfaces in a flow path and an improvement in a shape in the flow path.

[0002]

2. Description of the Related Art For example, various fluids such as ultrapure water and various chemicals used for cleaning a silicon wafer in a semiconductor manufacturing line or organic solvents used for stripping a resist pattern for etching a semiconductor substrate in the line are cooled or cooled. BACKGROUND ART As an element for heating to obtain a fluid at a constant temperature, an electronic cooling / heating element (thermo module) that performs cooling and heating using the Peltier effect is known.

In a thermo module, a plurality of N-type and P-type semiconductor elements (thermoelectric elements) are alternately arranged in the vertical and horizontal directions, and adjacent elements are joined by upper and lower bonding plates (metal electrodes). These are joined together so as to be electrically connected in series.

When a DC current flows from the N-type to the P-type in this thermo module, the upper joint plate cools and removes heat from the surroundings, and the lower joint plate generates heat and heats the surroundings. Operates to emit.

In order to cool the above-mentioned various fluids, for example, a heat exchanger (heat exchange plate) having a flow path through which a fluid to be cooled (circulating water) passes on the upper joining plate surface of the thermomodule is applied. On the other hand, a heat exchange unit (water cooling plate) having a flow path through which facility water passes is provided on the lower joining plate surface, and a heat exchange unit in this unit is described above. The energization control is performed to cool the circulating water flowing through the flow path of the heat exchange plate to the target temperature through the upper joining plate surface cooled at this time, and the heat taken by this cooling to the lower water cooling plate. The water is discharged through the facility water flowing through the flow path.

[0006] As described above, in the heat exchange unit in which the heat exchanger is disposed above and below the thermo module, it is desired that the heat exchanger has high heat transfer characteristics. Due to the structure arranged up and down,
It is desired that the heat transfer coefficient on the upper and lower wall surfaces in the flow path be high.

On the other hand, in this type of heat exchange unit,
As a factor that hinders the above-described heat transfer characteristics, a boundary layer occurs along the flow path wall on the upstream side of the linear portion of the flow path of the heat exchanger, and grows as it goes downstream of the linear portion,
There is a phenomenon that the flow path wall surface is covered with the boundary layer and the heat transfer coefficient on the wall surface is reduced.

As a conventional heat exchanger taking measures to avoid a decrease in the heat transfer coefficient caused by such a phenomenon, for example, a heat exchanger described in Japanese Patent Application No. 58-16191 or Japanese Utility Model Application Laid-Open No. 60-21890. And the like are known.

[0009] Of these, in Japanese Patent Application No. 58-16191, a part of the heat transfer tube is flattened, and an annular projection 11 is provided on the inner peripheral wall thereof.

However, in this structure, the protrusion 11
Although the turbulent flow can be generated by this, the secondary flow that is effective for improving the heat transfer coefficient on the upper and lower wall surfaces in the flow channel cannot be induced because the protrusions 11 are formed annularly on the entire inner peripheral wall, Further, there is a possibility that only an increase in pressure loss is caused.

[0011] Further, in Japanese Unexamined Utility Model Publication No. Sho 60-21890, another accelerator having a low height having a height difference of 0.15 mm or more at the rear side in the flow direction of the turbulence accelerator is provided. Is provided.

However, this structure cannot positively induce a secondary three-dimensional turbulent flow in the vertical direction in the flow channel, and can contribute to the improvement of the heat transfer coefficient on the upper and lower wall surfaces in the flow channel. Did not. Further, since the turbulence promoting body is manufactured using a plurality of members having different shapes, the workability at the time of manufacturing is poor, which increases the manufacturing cost and lowers the cost effectiveness of the entire apparatus.

[0013]

As described above, in the conventional heat exchanger, a flow path structure capable of effectively inducing a secondary three-dimensional turbulent flow in the vertical direction (in the direction of arrangement with the thermomodule) is provided. There was no problem, and there was a problem that the rate of increase in the heat transfer coefficient on the upper and lower wall surfaces in the flow channel was low.

Further, since the turbulence promoting body is formed in an annular shape on the inner peripheral wall or formed of a plurality of members, the effect of increasing the heat transfer coefficient cannot be obtained despite the increase in pressure loss. There is a problem that there is a possibility that the manufacturing cost will increase due to the deterioration of workability.

The present invention solves the above-mentioned problems, disturbs the flow in the vertical direction in the flow path without increasing the pressure loss and the manufacturing cost, and reduces the heat transfer at the flow path bottom or the flow path bottom and the flow path top. It is an object of the present invention to provide a heat exchanger having a flow path and a shape inside the flow path that can significantly improve characteristics.

[0016]

In order to achieve the above-mentioned object, the invention according to claim 1 is arranged so that upper and lower sides of a thermoelectric module are opposed to each other, and heat generation or cooling of each of upper and lower bonding plates of the module is performed. In a heat exchanger that performs heat exchange via a fluid flowing through an internal flow path with respect to the flow path,
A rib portion for inducing a secondary three-dimensional turbulent flow in a vertical direction in the flow path on the downstream side of the fluid flowing through the flow path is formed.

According to a second aspect of the present invention, in the first aspect of the present invention, the flow path has a meandering shape including a portion where a straight line portion is continuous, and the rib portion is a straight line of the flow path. It is characterized in that a plurality of portions are continuously formed at a predetermined interval at continuous portions.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the rib portion has a substantially uniform height from the bottom surface of the flow channel to a depth less than the depth of the flow channel. ,
Further, it is characterized in that the width of the fluid in the direction of flow is formed from three-dimensional projections that are non-uniform from the portions in contact with both side walls of the flow channel to the center of the flow channel.

According to a fourth aspect of the present invention, in the third aspect of the present invention, the rib portion is any one of a drum shape, a wedge shape, a diamond shape, a ladder shape, and a shape obtained by cutting substantially half of each side thereof. It is characterized by having such a shape.

According to a fifth aspect of the present invention, in the above-mentioned fourth aspect, the hourglass-shaped rib portion is used when the cutting tool is moved in a three-dimensional direction to cut the flow path by a rotary cutting blade. The cutting depth of the rotary cutting blade is controlled to be shallower than that of the flow path, thereby being formed integrally with the flow path.

According to a sixth aspect of the present invention, in the invention of the fourth aspect, the wedge-shaped, diamond-shaped, or ladder-shaped or substantially one-sided rib portion of each of them is formed by cutting the cutting tool in a three-dimensional direction. When moving the rotary cutting blade to cut the flow path, the drum-shaped rib portion formed integrally with the flow path by controlling the cutting depth by the rotary cutting blade to be shallower than the flow path, It is characterized by being formed by further cutting with a rotary cutting blade having a different diameter.

According to a seventh aspect of the present invention, in the first or the second aspect of the present invention, the flow path is formed so as to extend around the entire thermoelectric element arrangement area on the surface of the heat transfer surface of the heat exchanger. It is characterized in that the passages are formed so as to have a positional relationship in which fluid can flow in different directions.

[0023]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 shows a heat exchange unit 1 according to the present invention.
FIG. 2 is a right side view of the heat exchange unit 100 in FIG.

As shown in FIGS. 1 and 2, the heat exchange unit 100 includes a thermo module 50 between a heat exchanger (water cooling plate) 110a and a heat exchanger (heat exchange plate) 110b.
And an O-ring 60 surrounding the entire outer periphery of the thermo module 50.

The heat exchange plate 110b has bolt through holes 111
b, 112b, 113b, 114b, 115b, 116
b, 117b, 118b, and 119b are provided. These bolt through holes 111b, 112b, 113b, 114
b, 115b, 116b, 117b, 118b, 119
b, screw holes 111a, 112a, 1 provided in the opposed water cooling plate 110a.
13a, 114a, 115a, 116a, 117a, 1
By screwing into the water cooling plates 18a and 119a (see FIG. 3), the water cooling plate 110a and the heat exchange plate 110b can be fixed with a predetermined tightening force.

The water cooling plate 110a and the heat exchange plate 110b
Alternatively, there is another method of fixing the above using a tightening bolt and a nut.

By this tightening and fixing, the water cooling plate 110
a, an airtight space is formed by the heat exchange plate 110b, the O-ring 60, and an inner O-ring 61 described below,
The thermo module 50 is sealed in the space.

The thermo-module 50 is hermetically sealed because the condensation generated when the water-cooling plate 110a or the heat-exchange plate 110b drops below the dew point of the atmospheric air during the operation of the heat exchange unit 100 does not flow into the module 50. Like, the moist atmosphere is the thermo module 5
This is a measure to prevent continuous intrusion around zero.

In the heat exchange unit 100 of the present embodiment, the water cooling plate 110a and the heat exchange plate 110b are made of copper, respectively, and have a so-called Cu jacket having channels 125a and 125b through which facility water and circulating water flow, respectively. It is a type heat exchanger.

At the ends of the flow passages 125a and 125b of the water cooling plate 110a and the heat exchange plate 110b, respectively (a fluid inlet 121a and a fluid outlet 122a) and (a fluid inlet 121a).
b, a fluid outlet 122b) is formed.

The fluid inlet 121b and the fluid outlet 122b of the heat exchange plate 110b are respectively connected to an inflow pipe and an outflow pipe (not shown) of the circulating water to be cooled, and the circulation flowing from the inflow pipe to the fluid inlet 121b. The water passes through the flow passage 125b in the heat exchange plate 110b, and flows out of the fluid outlet 122b to the outlet pipe.

The fluid inlet 121 of the water cooling plate 110a
a and a fluid outlet 122a are respectively connected to an inflow pipe and an outflow pipe (not shown) of facility water, and facility water flowing from the inflow pipe to the fluid inlet 121a passes through a flow path 125a in the water cooling plate 110a. The fluid is discharged from the fluid outlet 122a to the outlet pipe.

The heat exchange plate 110b is attached to the water cooling plate 110a so as to be offset from the water cooling plate 110a by an amount corresponding to a piping space for the inflow pipe and the outflow pipe to the fluid inlet 121a and the fluid outlet 122a.

FIG. 3 is a sectional view taken along line AA of FIG. 2, and FIG. 4 is a sectional view taken along line BB of FIG.

As can be seen from FIGS. 3 and 4, between the water cooling plate 110a and the heat exchange plate 110b, an inner O-ring 61 is interposed in addition to the outer O-ring 60.

The outer O-ring 60 is provided with screw holes 112a, 113a, 114a, 115a, 11 of the water cooling plate 110a.
6a, 117a, 118a, 119a and heat exchange plate 1
10b bolt through holes 112b, 113b, 114b,
115b, 116b, 117b, 118b, and 119b are of a size that fits just inside the inside, and have a meandering shape in which key points are meandered so as to avoid (not block) these holes.

The inner O-ring 61 has a larger diameter than the bolt through hole 111b of the heat exchange plate 110b, and is arranged so as to concentrically surround the bolt through hole 111b and the screw hole 111a of the water cooling plate 110a.

The thermo module 50 is mounted in the area between the outer O-ring 60 and the inner O-ring 61.

The thermo module 50 includes a P-type thermoelectric element,
The thermoelectric element comprises a plurality of thermoelectric element pairs each composed of an N-type thermoelectric element and an electrode plate joining these elements. Specifically, the N-type thermoelectric element and the P-type thermoelectric element are alternately arranged in the vertical and horizontal directions. After arranging a plurality of pairs, adjacent elements are mutually joined by an upper joint plate (electrode plate) and a lower joint plate so as to be electrically connected in series.

Each of the upper bonding plate and the lower bonding plate forms a plane (hereinafter, referred to as an upper bonding plate surface or a lower bonding plate surface) corresponding to the arrangement area of the thermoelectric elements.

In FIG. 3, on the surface of the heat transfer surface of the water cooling plate 110a, a plurality of bonding plates 501a constituting, for example, a lower bonding plate surface of the thermo module 50 are provided with the above-mentioned O-ring 60.
And the entire area between the O-ring 61 (O-rings 60 and 6)
1 are arranged at an equal density.

A pair of N-type thermoelectric elements 502 and P-type thermoelectric elements 503 are provided on each of the bonding plates 501a disposed on the heat transfer surface of the water cooling plate 110a. Each bonding plate 501 on the (upper) bonding plate surface
b.

Similarly, in FIG. 4, the heat exchange plate 110b
A plurality of bonding plates 501b constituting the upper bonding plate surface of the thermo module 50 are provided on the heat transfer surface of the O-ring 60 and the O-ring 60.
They are arranged at the same density over the entire area between the ring 61 and the area (avoiding the positions where the O-rings 60 and 61 are disposed).

Each joining plate 501b disposed on the heat transfer surface of the heat exchange plate 110b has a pair of N
Type thermoelectric element 502 and a P-type thermoelectric element 503 are erected, and each of the joining plates 501a on the opposing (lower) joining plate surface
Is connected to

The arrangement of the plurality of joint plates 501a on the surface of the heat transfer surface of the water cooling plate 110a and the arrangement of the plurality of joint plates 501b on the surface of the heat transfer surface of the heat exchange plate 11b are respectively described by plural pairs of joints. It is also possible to prepare a plurality of unit thermomodules composed of the plate 501a or the joining plate 501b, and to lay out the plural pairs of thermomodules on the surface of the heat transfer surface.

For example, a positive electrode rod 131 and a negative electrode rod 132 are connected to the two joining plates 501L (for lead electrodes: see FIG. 3) at the ends of the thermo module 50 having the above structure. You.

When a direct current is passed between the electrode rods 131 and 132, each bonding plate 501 on the heat exchange plate 110b side is connected.
b is cooled, whereby the heat exchange plate 110b is cooled, and the circulating water flowing through the flow path 125b in the heat exchange plate 110b is cooled.

On the other hand, each joining plate 501 on the water cooling plate 110a side
a generates heat, and this heat is transmitted to the water cooling plate 110a, and heat is exchanged with radiating water flowing through the flow channel 125a therein to radiate heat.

Further, by reversing the direction of the current, heat generation and heat radiation are reversed, so that the circulating water can be easily heated.

In the heat exchange unit 100, the water cooling plate 1
In order to enhance the heat exchange efficiency of the heat exchange plate 10a and the heat exchange plate 110b, the flow path shape of the water cooling plate 110a and the heat exchange plate 110b is also devised in accordance with the arrangement structure of the thermoelectric elements 502 and 503 described above.

FIG. 5 shows a heat exchange unit 1 according to the present invention.
It is a figure which shows the structure of the flow path 125a of the water cooling plate 110a of No. 00.

FIG. 5 is a view similar to FIG.
0a corresponds to a view in which the upper cover plate (a thin copper plate material) 105a and the electrode rods 131 and 132 have been removed.

As can be seen from FIG. 5, the water cooling plate 110a of the heat exchange unit 100 has a flow path 125a for sending out the radiating water sent from the fluid inlet 121a to the fluid outlet 122a. A loop 125a-1 is provided so as to cover the entire arrangement area 505, and a large meandering portion 125a-1 is provided in some places.

The flow channel 125a of the water cooling plate 110a
Basically, in any part, adjacent channels (two channels correspond to one channel in FIG. 5) are configured to be capable of flowing facility water in directions different from each other.

The water cooling plate 110a shown in FIG. 5 is of a type in which a flow path 125a is divided into two by a partition plate 1251 and slits 1252 are provided at important points of the partition plate 1251. A partition plate 1251 having no slit 1252 may be formed in the channel 125a. Further, this partition plate structure includes a heat exchange plate 1.
The same applies to the flow path 125b of 10b.

In the water cooling plate 110a having such a flow path structure (in any part, the adjacent flow paths 125a are formed in such a shape that the facility water can flow in different directions).
All the thermoelectric elements 502 and 503 (see FIG. 3) arranged at the same density in the thermoelectric element installation area 505 provide a continuous heat exchange action in the entire area of the flow path 125a including the above-described meandering section 125a-1. become.

In particular, in this water cooling plate 110a, for example,
Heat is given to the sufficiently cooled radiating water immediately after being taken in from the fluid inlet 121a from the radiating water flowing in the adjacent flow path, that is, the radiating water heated by the heat radiation immediately before flowing out to the fluid outlet 122a. , And conversely, the fluid outlet 122
a from the radiating water heated by the radiating heat immediately before flowing out to the a.
The heat is taken away by the sufficiently cooled facility water immediately after being taken in from a.

Such a heat exchange action (heat offset action)
As a result of working in the entire area of the flow path 125a, the temperature distribution on the heat transfer surface of the water cooling plate 110a can be kept uniform, and the heat exchange efficiency can be increased accordingly.

The heat exchange plate 110b facing the water cooling plate 110a also has a flow passage 125b having a shape capable of providing the same heat canceling action as the flow passage 125a of the water cooling plate 110a.
(A part shown by a dotted line in FIG. 1) is formed.

Thus, in the heat exchange plate 110b, for example, the circulating water that is not sufficiently cooled immediately after being taken in from the fluid inlet 121b is discharged to the circulating water flowing in the adjacent flow path, that is, the fluid outlet 122b. The cooling action from the sufficiently cooled circulating water immediately before the cooling works, and this action works in the entire area of the flow passage 125b, so that the heat exchange plate 110b
The cooling effect can be enhanced while maintaining a uniform temperature distribution on the heat transfer surface.

As shown in FIG. 5, in the heat exchange unit 100 of the present invention, a plurality of ribs 70 are provided in the flow passage 125a of the water cooling plate 110a.

The rib portion 70 in FIG. 5 has a drum shape when viewed from above. This rib portion 70
In the meandering flow path 125a including the linear portion, two linear flow passages are continuously arranged at a predetermined interval at a portion where the linear portion is continuous.

The rib portion 70 is formed as described below.
When the flow path 125a is cut by the end mill 200, the flow path 125a is cut so as to have a depth smaller than the depth of the flow path 125a, and is formed integrally with the flow path 125a.

The ribs 70 serve to suppress the generation and growth of a boundary layer along the flow path wall surface with respect to the fluid (in this example, circulating water) flowing through the flow path 125a.

Next, the function of the rib portion 70 to suppress the boundary layer will be described.

FIG. 6 is an enlarged conceptual diagram showing the configuration of the flow path 125a of the water cooling plate 110a having the ribs 70 formed thereon. Here, FIG. 6A is a top view of the flow channel 125a,
FIG. 6B is a conceptual cross-sectional view taken along line CC of FIG.
FIG. 6C is a conceptual sectional view taken along line DD of FIG. 6A.

As shown in FIG. 6, the rib 70 is
In the depth direction of 25a (see FIG. 13B), the height H2 (H1> H) from the bottom surface of the flow path 125a at the depth H1.
2), and the flow direction of the fluid in the flow path 125a (see FIG.
The widths of the portions abutting on both side walls are both W1 and the flow path 125a.
Has a width of W2 (W1> W2), and the width therebetween gradually decreases from the side wall of the flow path to the center of the flow path (a shape brought about by rotary cutting of a cutting blade 200a of an end mill 200 described later). It consists of a projection.

In the example of FIG. 6, adjacent rib portions 70 are formed at a distance W0.

The rib portion 70 having such a structure is provided in the channel 1
The flow (flow) of the fluid flowing in the direction indicated by the arrow in the arrow 25a is disturbed, and the generation and growth of the boundary layer on the flow path wall surface are suppressed.

Specifically, the rib portion 70 has a function of causing the main flow of the fluid flowing through the flow channel 125a toward the rib portion 70 to reattach to the bottom surface (Bottom wall) of the flow channel on the downstream side.

In FIG. 6, the secondary flow reattaching to the bottom surface of the flow path downstream of the rib portion 70 is indicated by a dotted line with reference numeral 80. As shown in FIGS. 6A to 6C, the secondary flow 80 induced on the downstream side of the rib portion 70 is further increased in the vertical and horizontal directions (three-dimensional direction) in addition to the flow direction of the fluid.
This is hereinafter referred to as a three-dimensional disturbance flow 80.

The boundary layer is peeled off by the secondary vertical reattachment (three-dimensional turbulent flow 80) of the fluid flowing in the flow channel 125a downstream of the rib portion 70, and the water cooling plate 1
The heat transfer coefficient at the bottom of the flow path 10a is improved. Further, the average heat transfer coefficient of the water cooling plate 110a increases due to the promotion of the turbulent mixing effect caused by the three-dimensional turbulent flow 80.

Further, in the present embodiment, as shown in FIG. 5, a plurality of rib portions 70 which perform the above-mentioned vertical disturbing action are formed in the passage 125a of the water-cooled plate 110a at a portion where the linear portion is continuous. .

By the plurality of rib portions 70 (formed at locations where the linear portions of the flow path 125a are continuous), the vertical disturbance effect by the secondary three-dimensional turbulent flow 80 is obtained by the flow path 125.
The heat transfer characteristics of the upper and lower wall surfaces in the flow path over the entire water cooling plate 110a are improved as the water is cooled downstream.

In this type of heat exchange unit, a boundary layer, which is a factor that hinders the above-described heat transfer characteristics, is generated along the flow path wall surface on the upstream side of the linear portion of the flow path, and is generated on the downstream side of the linear portion. There is a characteristic that grows as you go.

In this embodiment, as shown in FIG. 5, by forming a plurality of rib portions 70 at locations where the linear portions are continuous in the flow path 125a of the water cooling plate 110a, generation of a boundary layer at the linear portions is achieved. , Growth can be suppressed.

In this embodiment, the water cooling plate 110
A plurality of drum-shaped rib portions 70 having the same form as the water-cooling plate 110a are also formed in the flow passage 125b (see FIG. 1) of the heat exchange plate 110b that is disposed opposite to the thermo-module 50 with the thermo-module 50 therebetween.

Thus, the flow path 12 of the heat exchange plate 110b is
Also in 5b, a secondary three-dimensional turbulent flow 80 (reattachment to the bottom surface of the flow path 125b) is induced downstream of the rib portion 70, and heat is transferred to the bottom surface of the flow path of the heat exchange plate 110b. The efficiency is improved, and the average heat transfer coefficient of the water cooling plate 110a is increased by promoting the turbulent mixing effect accompanying the three-dimensional turbulent flow 80.

In the heat exchange unit 100 of this embodiment,
The water cooling plate 110a and the heat exchange plate 110b having the rib portions 70 that perform the above-mentioned vertical disturbing action are
0 and are opposed to each other (see FIG. 2).

In this structure, on the water cooling plate 110a side, the above-described three-dimensional turbulent flow 80 is induced on the downstream side of the rib portion 70 in the flow path 125a, whereby the cooling surface of the thermo module 50 and the water cooling plate 110a are interposed. In the vertical direction (the arrangement direction of the water cooling plate 110a and the thermomodule 50) is promoted, and the cooling efficiency is improved.

Similarly, also on the heat exchange plate 110b side,
The above-described three-dimensional turbulent flow 80 is induced on the downstream side of the rib portion 70 in the flow path 125b, whereby the vertical direction between the heat generation surface of the thermo module 50 and the heat exchange plate 110b (the heat exchange plate 110b and the thermo module 50 In the arrangement direction) is promoted, and the cooling efficiency is improved.

The water cooling plate 110a and the heat exchange plate 110b
And the structure that clamps the thermo module 50 (see FIG. 2)
In, the ribs 70 in the flow path 125a of the water cooling plate 110a and the flow path 125b of the heat exchange plate 110b are respectively
It is preferable to form it on the side where the thermo module 50 is in contact.

As can be understood from the description of the boundary layer suppressing action by the rib portion 70 described with reference to FIG. 6B, the flow path surface on the side where the rib 70 is formed [FIG. The secondary flow of the main flow of the fluid (three-dimensional turbulent flow 80) occurs on the bottom surface of the flow channel 125a], and the flow channel surface side on which the rib portion 70 is not formed (FIG. 6A) Then the channel 12
5a) because the heat exchange efficiency is higher than that of the [5a upper surface] side.

Incidentally, the rib portion 7 described with reference to FIG.
Focusing on the generation mechanism of the three-dimensional turbulent flow 80 caused by the heat exchanger 110 (water cooling plate 110a, heat exchange plate 110
In order to effectively induce the three-dimensional turbulent flow 80 with respect to the improvement of the heat transfer characteristics on the upper and lower wall surfaces in the flow channel in b), the height H2 of the rib portion 70 is too high or too low. It does not work in a good direction.

For this reason, the height H2 of the rib portion 70 is
In order to induce the most effective three-dimensional turbulent flow 80,
It is necessary to determine an appropriate height from the continuous length of the linear portion in the flow channel 125 (125a, 125b), the relationship between the flow rate and the pressure of the fluid, and the like.

Similarly, the distance W0 between the adjacent ribs 70 must be set appropriately because the heat transfer coefficient cannot be improved if the distance is too short or too long.

In this regard, the inventors of the present invention [JSME Transactions, 1999, Vol. 65, no. 63
1], “Height / interval and flow state of two-dimensional ribs”, “Rectangular cross-section flow path with ribs (pattern of test rib)”, “Heat transfer performance of rib-flow path (bottom surface)” The best three-dimensional turbulent flow 80 is obtained based on the influence of the rib pattern on the axial distribution of the number of Nusselt in the center, the "nusselt number distribution between ribs", "secondary flow and separation induced by ribs" The rib height H2 and the separation distance W0 are verified, and the results are reflected in the actual shape, height, separation distance, and the like of the rib portion 70.

FIG. 7 shows the rib portion 7 as a part of the above verification.
It is a figure which shows the structure of the prototype of the heat exchanger plate for large-capacity machines used for analyzing the influence on heat transfer and pressure loss of zero.

The prototype 15 shown in FIGS. 7 (a) to 7 (f)
0a to 150f are all water cooling plates 110 shown in FIG.
Following the shape conditions of the flow path 125a of FIG. 1a and the flow path 125b of the heat exchange plate 110b shown in FIG. 1, the adjacent flow paths (two in FIG. 7 correspond to one flow path) in any part. It is configured to allow the facility water to flow in different directions.

Each of these prototypes 150a to 150f
In the above, for example, a rectangular channel 125 having a depth of 5 to 10 mm
A plurality of hourglass-shaped rib portions 70 are formed at locations where the straight line portions continue.

The height, the separation width, the width in the fluid flow direction, the arrangement position and the number of the rib portions 70 in each of the prototypes 150a to 150f are shown in FIGS.
It is as shown in (f).

For each of the prototypes 150a to 150f, the effect of the rib portion 70 on heat transfer and pressure loss is analyzed, and the most desirable rib shape and arrangement pattern for obtaining an effective three-dimensional turbulent flow 80 are obtained. ing.

In the above description, the shape of the rib portion 70 is a drum shape. However, if the rib portion 70 can induce the three-dimensional turbulent flow 80 effective for improving the heat transfer coefficient in the vertical direction as described above, the drum portion may be shaped like a drum. It goes without saying that not only the mold but also various shapes can be used.

FIG. 8 shows a heat exchanger 110 according to the present invention.
Channel 125 of (water cooling plate 110a, heat exchange plate 110b)
(125a, 125b)
It is a figure which shows the typical shape of 70k. In the figure,
The arrows indicate the flow direction of the fluid in the flow channel 125.

The rib portion 70a in FIG. 8A is the drum-shaped one described above.

The rib portion 70b in FIG. 8B has a shape (an inverted wedge type) having a wedge-shaped protruding portion in the upstream direction of the fluid.

The rib portion 70c in FIG. 8C has a shape (wedge shape) having a wedge-shaped protruding portion in the downstream direction of the fluid, contrary to the reverse wedge-shaped rib portion 70b (FIG. 8B). belongs to.

The rib 70d in FIG. 8D has a shape having a V-shaped protruding portion in the upstream direction of the fluid (an inverted V-shape).

The rib 70e in FIG. 8 (e) has a V-shaped protruding portion in the downstream direction of the fluid (as opposed to the inverted V-shaped rib 70d [FIG. 8 (d)]). V-shaped).

The rib portion 70f in FIG. 8F has a shape (diamond) having V-shaped projecting portions on both the upstream side and the downstream side of the fluid.

The rib portion 70g in FIG. 8 (g) has a shape (ladder shape) orthogonal to the flow of the fluid.

The rib portions 70h-1 and 70h in FIG.
0h-2 is the reverse wedge-shaped rib portion 70b (FIG. 8B).
Are cut off at a predetermined distance and alternately left and right.

The ribs 70i-1 and 70i in FIG.
Reference numeral 0i-2 denotes a wedge-shaped rib 70c (FIG. 8 (c)) having a shape obtained by cutting off a half on one side, and is arranged at predetermined intervals and alternately left and right.

The ribs 70j-1, 7 in FIG.
8j-2 is the inverted V-shaped rib 70d [FIG.
(D)] are obtained by shaving one half of one side, and are arranged at predetermined intervals and alternately left and right.

The rib portions 70k-1, 7 in FIG.
0k-2 is the V-shaped rib 70e [FIG. 8 (e)].
Are cut off at a predetermined distance and alternately left and right.

The rib portions 701-1 and 701-7 in FIG.
8-2 is a ladder-shaped rib portion 70g [FIG.
(G)] are obtained by shaving one half of one side, and are arranged alternately on the left and right at predetermined intervals.

Each of the ribs 70a to 70k is similar to the drum-shaped rib 70 described with reference to FIG.
5 has a height less than the depth of the flow channel 125 from the bottom surface of the flow channel 125, and the flow direction of the fluid is from a portion in contact with both side walls of the flow channel 125. It is composed of a three-dimensionally shaped protrusion having an uneven width toward the center of the path 125.

The three-dimensional shape of each of the rib portions 70a to 70k is determined during the manufacturing process of the heat exchanger 110 to be described later in the present invention.
0b, 200c) Some are brought about by rotary cutting.

Next, the manufacturing process of the heat exchanger 110 according to the present invention will be described.

FIG. 9 is a conceptual perspective view showing a manufacturing process of the heat exchanger 110 having the hourglass-shaped rib portion 70a.

Prior to the production of the heat exchanger 110, first, the material substrate 110-1 cut into a target size is prepared.
And set it at the working position of the cutting machine.

Next, an end mill (END MILL) 200 as a cutting tool is provided with a diameter (φ) corresponding to the width of the flow path 125.
= N), and thereafter, according to the design dimensions, the end mill 200 is moved back and forth, left and right, up and down (X,
The material substrate 1 is moved three-dimensionally in the Y, Z) directions.
10-1 is cut by the cutting blade 200a and the flow path 125 is cut.
And a rib portion 70a.

For example, in FIG. 9, when the end mill 200 is lowered from the work start position (X0, Y0, Zn) while rotating the cutting blade 200a of the end mill 200, the position (X0, The cutting of the material substrate 110-1 can be started at the time of reaching (Y0, Z1), and when it is further lowered to the position of (X0, Y0, Z3), a semicircular hole of width n and depth (Z3-Z1) is cut. Can be processed.

From this position, the end mill 200 is moved to (X
(1, Y0, Z3) in the X direction, and from here to the position (X1, Y0, Z2) in the Z direction,
Next, it is moved in the X direction to the position (X2, Y0, Z2), then lowered in the Z direction to the position (X2, Y0, Z3), and further moved from this position to the position (X3, Y0, Z3). It shall be moved in the direction.

In this case, a flow path 125 having a length of (X3-X0) and a depth of (Z3-Z1) from the end immediately below the work start position and having a depth of (Z3-Z1) is formed on the material substrate 110-1. And at the same time, [(X1-X0) + (X2-X1) / 2] in the X direction from the end in the flow channel 125.
The center of the width viewed in the direction of flow of the fluid at the position where it enters only, and a drum-shaped rib portion 70a having a width of (X2-X1) and a height (Z3-Z2) of a portion in contact with both wall surfaces is formed. can do.

Considering the above cutting operation, the drum-shaped rib 7
Obviously, the recess 71 of Oa is formed in the shape of the rotation of the cutting blade 200a of the end mill 200.

Thereafter, according to the design dimensions, the end mill 20
0 in the (X, Y, Z) direction in three dimensions.
n, Yn, Zn) while moving to the material substrate 110-1.
As shown in FIG. 9, the flow path 120 having the straight portion and the meandering portion and the six drum-shaped rib portions 70a therein can be formed by continuing the cutting process.

FIG. 10 is a conceptual perspective view showing a manufacturing process of the heat exchanger 110 having the wedge-shaped rib portion 70c shown in FIG. 8C.

To manufacture the heat exchanger 110, first, a drum-shaped rib portion 70a is formed on a material substrate 110-1 prepared in advance by the method shown in FIG.

Thereafter, the cutting blade 200a of the end mill 200
Is replaced with a cutting blade 200b having a smaller diameter suitable for forming the wedge, and as shown in the reference area of FIG.
Two portions of the concave portion on the downstream side of a are cut by the cutting blade 200b.

Thereafter, the end mill 200 equipped with the same cutting blade 200b also cuts the concave portion on the downstream side of the other rib portion 70a in the same manner as described above, so that the straight portion and the meandering as shown in FIG. A flow channel 125 having a portion and six wedge-shaped rib portions 70c therein can be formed.

FIG. 11 is a conceptual perspective view showing a manufacturing process of the heat exchanger 110 having the V-shaped rib 70e shown in FIG. 8 (e).

To manufacture the heat exchanger 110, first, a drum-shaped rib portion 70a is formed on a material substrate 110- prepared in advance by the method shown in FIG.

Thereafter, the cutting blade 200a of the end mill 200
Is replaced with a cutting edge 200c having a smaller diameter, and as shown in the reference area of FIG. 10, the region shown by the oblique line of the concave portion on the downstream side of the rib portion 70a becomes a V-shaped tip by the cutting edge 200b. Cutting.

Thereafter, the end mill 200 equipped with the same cutting edge 200c also cuts the concave portion on the downstream side of the other rib portion 70a in the same manner as described above, so that the straight portion and the meandering as shown in FIG. The flow path 125 having the portions and the six V-shaped rib portions 70e therein can be formed.

The ribs 70b, 70d, 70f to (701-1, 70) shown in FIGS. 8 (b), (d), (f) to (l).
l-2) can also be formed by a method as shown in FIGS. 10 and 11 (cutting a plurality of times by changing the cutting blade 200a of the end mill 200).

For example, an inverted wedge-shaped rib portion 70b [FIG.
(See FIG. 10 (b).) In the same manner as the wedge-shaped rib portion 70c described in FIG. 10, two upstream concave portions of the drum-shaped rib portion 70a formed in advance are replaced with end mills 200 after replacement. It can be formed by cutting with the cutting blade 200b.

The inverted V-shaped rib 70d [FIG.
(See (d)) in the same manner as the V-shaped rib 70e described with reference to FIG. Can be formed by cutting into a V-shape with the cutting blade 200c.

As another typical example, the rib portion 70
f, 70g, (70h-1, 70h-2), (70j-
1, 70j-2) and (701-1 and 701-2) are shown in FIG.

In FIG. 12A, a rhombus-shaped rib portion 70 is formed.
f (see FIG. 8 (f)) shows the hatched regions of the upstream-side concave portion and the downstream-side concave portion of the drum-shaped rib portion 70a (which is wider than the conventional one) formed by the end mill 200 in advance.
Can be formed by cutting with the cutting blade 200c.

In FIG. 12 (b), the ladder-shaped rib portion 70g (see FIG. 8 (g)) corresponds to the hatched region of the drum-shaped rib portion 70a, which is indicated by oblique lines of the upstream concave portion and the downstream concave portion. Can be formed by cutting with the cutting blade 200c of the end mill 200.

In FIG. 12C, the semi-inverted wedge alternating ribs 70h-1 and 70h-2 (see FIG. 8H) are the right half of the previously formed inverted wedge-shaped rib 70b. The left half (the area shown by oblique lines in the figure) is the cutting edge 2 of the end mill 200.
It can be formed by cutting at 00b.

In the same manner, the right half and the left half of the previously formed wedge-shaped rib portion 70c are cut by the cutting edge 2 of the end mill 200.
00b, the half-wedge alternating rib portions 70
i-1 and 70i-2 (see FIG. 8 (i)) can be formed (not shown in FIG. 12).

In FIG. 12D, the half-reverse V-shaped alternating rib portions 70j-1 and 70j-2 [see FIG. 8J]
The right and left halves (regions indicated by oblique lines in the figure) of the previously formed inverted V-shaped rib 70d can be formed by cutting with the cutting blade 200b of the end mill 200.

In the same manner, the right half and the left half of the V-shaped rib 70 e formed in advance are cut by the cutting blade 200 b of the end mill 200, so that the half-V alternate rib 70 k-1, 70 k-1, 70k-2 (see FIG. 8 (k)) (not shown in FIG. 12).

In FIG. 12E, the half-ladder alternating rib portions 701-1 and 701-2 (refer to FIG. 8L) are ladder-shaped rib portions 70g formed in advance [FIG.
2 (b)] can be formed by cutting the right and left halves (regions indicated by oblique lines in the figure) with the cutting edge 200b of the end mill 200.

The half-alternating ribs (7
0h-1, 70h-2), (70i-1, 70i-
2), (70j-1, 70j-2), (70k-1, 7)
0k-2) and (701-1 and 701-2)
It is possible to cut more or less than one half (that is, cut almost half of one side).

By the method described above, rib portions 70a to (701-1, 70-1) of various shapes as shown in FIGS.
The target heat exchanger 110 is completed by placing the cover plate 105 (corresponding to the cover plates 105a and 105b in FIG. 2) from above on the material substrate 110-1 on which the l-2) is formed and fixing the cover with screws or the like. Can be done.

As a modification of the heat exchanger 110 according to the present invention, the ribs 70 [70a to 70a to 70
(701-1 and 701-2)], the flow path 125 or the flow path 125
And another material substrate 110 on which the rib portions 70 are formed.
A structure in which the two are joined to face each other is conceivable.

FIG. 13 is a conceptual perspective view showing the structure of one material substrate 110-2 of the heat exchanger 110B according to the first modification.

This material substrate 110-2 is, for example, as shown in FIG.
Material substrate 110 on which rib portion 70e is formed as shown in FIG.
−1, and a channel 125 having the same shape as that of the material substrate 110-1 is formed.

The material substrate 110-2 is turned upside down and
Material substrate 110 on which rib portions 70e are formed as shown in FIG.
1, the heat exchanger 110B according to the first modified example can be completed by joining the P1 and P1 points and the P2 and P2 points so as to be aligned with each other.

In this case, both material substrates 110 are used.
Bonding between -1 and 110-2 can be realized by various methods such as brazing, bonding, and screwing.

FIG. 14 shows a heat exchanger 1 according to a first modification.
It is a conceptual diagram which shows the flow path cross-section of 10B.

In the heat exchanger 110B, the three-dimensional turbulent flow 80 is induced by the rib 70e formed in the flow path 125 of the lower material substrate 110-1 with respect to the fluid flowing from the right side of the figure. It acts to strip the boundary layer at the bottom of the flow channel (Bottom wall).

That is, in the case of the heat exchanger 110B, the heat transfer coefficient is higher on the bottom surface side of the flow path than on the top surface (Top wall) of the material substrate 110-2 side. It is preferable to attach the thermo module 50 to the material substrate 110-1.

Further, as a second modification, as shown in FIG. 15, the material substrate 1 on which the rib portions 70 are formed, respectively, is used.
A structure in which 10-1 and 110-2 are joined to face each other is also conceivable.

FIG. 15 shows a heat exchanger 1 according to a second modification.
It is a conceptual diagram which shows the flow path cross-section of 10C.

This heat exchanger 110C is particularly suitable for the material substrate 110-1 on which the rib portions 70e are formed as shown in FIG.
On the other hand, a material substrate 110-2 in which ribs 70e of the same shape are formed at positions alternated with the ribs 70e on the material substrate 110-1 is joined to face each other.

According to the structure of the heat exchanger 110C, the fluid flowing from the right side of the drawing is
A three-dimensional turbulent flow 80 is induced on the downstream side by the rib portion 70e formed in the flow channel 125 of 0-1 so that the three-dimensional turbulent flow 80 strips the boundary layer of the bottom surface of the flow channel (Bottomwall). While acting, the three-dimensional turbulent flow 80 is induced on the downstream side by the rib portion 70e formed in the flow channel 125 of the upper material substrate 110-2, and the three-dimensional turbulent flow 80 is formed on the upper surface of the flow channel (Top wall). ) Acts to strip the boundary layer.

That is, in the case of the heat exchanger 110C, the secondary flow of the main flow of the fluid is caused to undulate in the vertical direction by the rib 70e on the bottom surface of the flow passage and the rib 70e on the top surface of the flow passage. Channel bottom (Bottom wall) and channel top (T
op wall) can be expected to improve the heat transfer coefficient on both sides.

Therefore, the heat exchanger 110C is connected to a heat exchange unit having a multilayer structure, for example, in which a thermo module is attached to both the lower material substrate 110-1 and the upper material substrate 110-2. Applicable.

Further, as a third modification, a heat exchanger 110D having a flow path cross-sectional structure as shown in FIG. 16 can be considered.

The heat exchanger 110D is different from the heat exchanger 110C shown in FIG. 15 in that the positions of the upper and lower ribs 70e coincide with the flow direction of the fluid.

In the heat exchanger 110D, the rib 70e formed in the flow path 125 of the lower material substrate 110-1
The secondary flow (three-dimensional turbulent flow 80) induced on the downstream side by the above causes reattachment to the bottom wall of the flow channel,
The secondary flow (three-dimensional turbulent flow 80) induced on the downstream side by the rib portion 70e formed in the flow path 125 of the upper material substrate 110-2 is returned to the flow path upper surface (Top wall). Adhesion occurs at a position that is vertically aligned when viewed from the fluid flow direction.

The present invention is not limited to the embodiment described above and shown in the drawings, but can be implemented by appropriately modifying it without departing from the scope of the invention.

For example, in the above-described example, the heat exchanger 110
Has been described as having two layers (the water cooling plate 110a and the heat exchange plate 110b), but the invention can also be applied to a case where the heat exchanger 110 is a multilayer.

The shape of the rib portion 70 in the flow path 125 may be various other than the above-described shape as long as the formation and growth of the boundary layer at the place where the linear portion of the flow path 125 continues for a long time can be suppressed. Deformation to shape is possible.

Further, in the above embodiment, the heat exchanger 110
Are made of copper, respectively. In addition, the heat exchanger 110 can be formed by forging or casting. The mold for manufacturing the heat exchanger 110 by casting can be formed by cutting with the end mill 200 described with reference to FIGS.

Further, considering the weight, the heat exchanger 11
It is also possible for 0 to be made of aluminum.

[0162]

As described above, according to the present invention,
In the flow path of the heat exchanger, a rib portion for inducing a secondary three-dimensional turbulent flow in the vertical direction in the flow path on the downstream side of the fluid flowing in the flow path is formed, so that the flow is induced on the downstream side of the rib section. Due to the secondary three-dimensional turbulent flow in the vertical direction, heat transfer on the upper and lower wall surfaces in the flow path on the downstream side can be significantly improved.

Further, if a plurality of the ribs are continuously formed at regular intervals at locations where the linear portions of the flow path are continuous,
The vertical disturbance effect due to the secondary three-dimensional disturbance flow is amplified toward the downstream side, and the heat transfer on the upper and lower wall surfaces in the flow path can be further improved.

The rib portion has a substantially uniform height from the bottom surface of the flow path to less than the depth of the flow path, and has a width in the direction in which the fluid flows in contact with both side walls of the flow path. From the central part of the flow path to a non-uniform three-dimensionally shaped projection, so that a secondary three-dimensional turbulent flow in the vertical direction on the downstream side can be effectively induced. Depending on the conditions, the flow of the fluid on both side walls and the upper wall among the inner walls of the flow path is not obstructed, and an increase in pressure loss can be prevented.

The three-dimensional ribs described above can be realized in various shapes such as a drum shape, a wedge shape, and a rhombus shape. Of these, the drum shape rib portions are obtained by moving a cutting tool in a three-dimensional direction. When cutting the flow path by the rotary cutting blade, the cutting depth by the rotary cutting blade can be formed integrally with the flow path by controlling the depth to be shallower than the flow path, and the ribs other than the drum shape are formed by the above method. The drum-shaped rib can be formed by further cutting with a rotary cutting blade having a different diameter. That is, in the present invention, the rib portion can be formed integrally with the path in the step of cutting the flow path, so that the production of the flow path and the rib becomes easy, and the production cost can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is a top view of a heat exchange unit according to the present invention.

FIG. 2 is a right side view of the heat exchange unit in FIG.

FIG. 3 is a sectional view taken along line AA of FIG. 2;

FIG. 4 is a sectional view taken along line BB of FIG. 2;

FIG. 5 is a diagram showing a structure of a flow channel of a water cooling plate.

FIG. 6 is an enlarged conceptual diagram showing a configuration of a flow path of a water-cooled plate formed with rib portions.

FIG. 7 is a diagram showing a configuration of a prototype heat exchange plate for a large-capacity machine.

FIG. 8 is a view showing a typical shape of a rib portion formed in a flow path of the heat exchanger.

FIG. 9 is a conceptual perspective view showing a manufacturing process of a heat exchanger having a drum-shaped rib portion.

FIG. 10 is a conceptual perspective view showing a manufacturing process of a heat exchanger having a wedge-shaped rib portion.

FIG. 11 is a conceptual perspective view showing a manufacturing process of a heat exchanger having a V-shaped rib.

FIG. 12 is a diagram showing a typical rib cutting method.

FIG. 13 is a conceptual perspective view showing a configuration of one material substrate of a heat exchanger according to a first modification.

FIG. 14 is a conceptual diagram showing a flow path cross-sectional structure of a heat exchanger according to a first modification.

FIG. 15 is a conceptual diagram showing a flow path cross-sectional structure of a heat exchanger according to a second modification.

FIG. 16 is a conceptual diagram showing a flow path cross-sectional structure of a heat exchanger according to a third modification.

[Explanation of symbols]

Reference Signs List 100 Heat exchange unit 110, 110B, 110C, 110D Heat exchanger 110-1, 110-2 Material substrate 110a Heat exchanger (water cooling plate) 110b Heat exchanger (heat exchange plate) 105, 105a, 105b Cover plate 111a, 112a , 113a, 114a, 115a,
116a, 117a, 118a, 119a Screw holes 111b, 112b, 113b, 114b, 115b,
116b, 117b, 118b, 119b Bolt through hole 121a, 121b Fluid inlet 122a, 122b Fluid outlet 125 Channel 125a Radiating water channel 1251 Partition plate 1252 Slit 125b Circulating water channel 131, 132 Electrode rod 50 Thermo module 501a 501b Joining plate 501L Joining plate for lead electrode 502, 503 Thermoelectric element 505 Thermoelectric element array area 60, 61 O-ring 70, 70a, 70b, 70c, 70d, 70e, 70
f, 70g, (70h-1, 70h-2), (70i-
1, 70i-2), (70j-1, 70j-2), (7
0k-1, 70k-2), (701-1, 701-2)
Rib part 71 concave part of rib part 70a 80 three-dimensional turbulent flow 150a, 150b, 150c, 150d, 150e,
150f Prototype heat exchange plate for large capacity machine 200 End mill 200a, 200b, 200c Cutting edge

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Norio Takahashi 1200 Manda, Hiratsuka-shi, Kanagawa Prefecture, Komatsu Ltd. 72) Inventor Kazuya Makino 2597 Shinomiya, Hiratsuka-shi, Kanagawa F-term in Komatsu Electronics Co., Ltd. 3C022 EE07 EE15 EE17

Claims (7)

[Claims] Claims: 1. A thermoelectric module is disposed oppositely above and below a thermoelectric module,
In a heat exchanger which performs heat exchange via a fluid flowing through an internal flow path for heat generation or cooling drive of each of the upper and lower joining plates of the module, A heat exchanger characterized in that a rib portion is formed on a fluid downstream to induce a secondary three-dimensional turbulent flow in a vertical direction in a flow path. 2. The flow path has a meandering shape including a portion where a straight line portion is continuous, and the rib portion is formed by continuously forming a plurality of rib portions at a predetermined interval at a position where the straight line portion of the flow channel is continuous. The heat exchanger according to claim 1, wherein the heat exchanger is formed. 3. The rib portion has a substantially uniform height from the bottom surface of the flow path to a depth less than the depth of the flow path, and has a width in a direction in which a fluid flows in a side wall of the flow path. The heat exchanger according to claim 1, wherein the heat exchanger is formed of a three-dimensionally non-uniform projection from the contact portion to the center of the flow path. 4. The rib portion according to claim 3, wherein the rib portion has any one of a drum shape, a wedge shape, a diamond shape, a ladder shape, and a shape obtained by cutting approximately half of each side thereof. Heat exchanger. 5. The drum-shaped rib portion, when moving the cutting tool in a three-dimensional direction and cutting the flow path by a rotary cutting blade, makes the cutting depth by the rotary cutting blade shallower than the flow path. The heat exchanger according to claim 4, wherein the heat exchanger is formed integrally with the flow path by controlling. 6. The wedge-shaped, diamond-shaped, ladder-shaped or ribs having a shape obtained by cutting substantially half of one side of each of the wedges, the cutting tool is moved in a three-dimensional direction, and the flow path is cut by a rotary cutting blade. At this time, by controlling the cutting depth by the rotary cutting blade to be shallower than the flow path, the drum-shaped rib portion formed integrally with the flow path is formed by further cutting with a rotary cutting blade having a different diameter. The heat exchanger according to claim 4, wherein: 7. The flow path is formed so as to extend around the entire thermoelectric element arrangement area on the heat transfer surface of the heat exchanger, and to have a positional relationship between adjacent flow paths so that fluid can flow in different directions. 3. A method according to claim 1, wherein the step is performed.
The heat exchanger as described.