JP2021197395A - Heat sink and heat transfer device - Google Patents

Abstract

To provide a technique to improve the heat dissipation efficiency and further improve the cooling performance of a heat sink.SOLUTION: A heat sink 200 forming a part of a fluid flow path extending in a first flow path direction includes a plate-shaped substrate 1, and a fin group 210 including a plurality of fins 2 protruding from the substrate. The substrate and the fin group are different parts of a single member. At least some of the plurality of fins are arranged in a first direction D1 and a second direction D2. The fin has a first side surface 21 and a second side surface 22 facing the first flow path direction Df1. The first side surface is a plane extending in the first direction. The second side surface is one of a plane that extends in the second direction and forms a corner with the first side surface, and a curved surface that protrudes toward an injection port side in the first flow path direction and is connected to the first side surface.SELECTED DRAWING: Figure 5

Description

The present invention relates to a heat sink and a heat exchange device.

Conventionally, a heat sink in which a plurality of rows of tongue-shaped fins are provided on the upper surface of a heat radiating substrate is known. A plurality of tongue-shaped fins are provided at intervals in the anteroposterior direction. The row of tongue-shaped fins is formed by cutting up the fin forming portion of the heat sink material. (See Japanese Patent Application Laid-Open No. 2001-102782)

Japanese Unexamined Patent Publication No. 2001-102782

However, when the above-mentioned heat sink is used in the heat exchange device that cools the heat-generating component by flowing the refrigerant through the internal flow path, the refrigerant flowing in the front-rear direction of the heat sink hits the tongue-shaped fins and suffers pressure loss. Therefore, the flow velocity of the refrigerant may decrease, and the heat dissipation efficiency from the fins to the refrigerant may decrease. Therefore, there is a demand for a technique for improving the heat dissipation efficiency and further improving the cooling performance of the heat sink.

An object of the present invention is to improve the cooling performance of a heat sink.

In the exemplary heat sink of the present invention, the heat sink forming a part of the fluid flow path extending in the first flow path direction includes a plate-shaped substrate and fins. The substrate spreads in the direction of the first flow path and the direction of the second flow path orthogonal to the direction of the first flow path. The fin group includes a plurality of fins protruding from the substrate. The substrate and the fin group are different parts of a single member. At least a part of the plurality of fins is arranged in the first direction and the second direction. The first direction intersects the first flow path direction at an angle and is parallel to the substrate. The second direction intersects the first flow path direction at an angle and intersects the first direction and is parallel to the substrate. The fin has a first side surface and a second side surface facing the first flow path direction. The first side surface is a plane facing the first flow path direction, and extends in the first direction. The second side surface includes a plane surface that extends in the second direction and forms an angle with the first side surface, and a curved surface that protrudes toward the injection port side in the first flow path direction and connects to the first side surface. One of us.

An exemplary heat exchange device of the present invention comprises the heat sink described above and a lid. The lid forms a fluid flow path through which the fluid flows together with the heat sink. The fluid flows between the fins of the heat sink.

According to the exemplary heat sink and heat exchange device of the present invention, the cooling performance of the heat sink can be improved.

FIG. 1 is an exploded perspective view showing an example of a heat exchange device. FIG. 2 is a cross-sectional view of the heat exchange device along the line AA of FIG. FIG. 3 is a bottom view of the heat exchange device. FIG. 4 is a local top view of the heat sink. FIG. 5 is a local perspective view of the heat sink. FIG. 6A is an example of fins. FIG. 6B is a modified example of the fin. FIG. 7 is a flowchart for explaining a method of manufacturing a heat exchange device. FIG. 8A is a perspective view of the substrate before processing. FIG. 8B is a perspective view of a substrate having a plurality of bases formed therein. FIG. 8C is a local perspective view of a substrate having a groove formed in the base portion. FIG. 8D is a conceptual diagram of the process of tearing up the convex portion. FIG. 8E is a local perspective view of a substrate having fins formed in the convex portions between the grooves. FIG. 8F is a perspective view of a substrate having a plurality of fin groups formed therein.

An exemplary embodiment will be described below with reference to the drawings.

In addition, in the present specification, in the positional relationship between any one of the orientation, the line, and the surface and any other, "parallel" is not only a state in which the two do not intersect at all no matter how long they extend, but also substantially. Includes parallel states. Further, "vertical" and "orthogonal" include not only a state in which they intersect each other at 90 degrees, but also a state in which they are substantially vertical and a state in which they are substantially orthogonal to each other. That is, "parallel", "vertical", and "orthogonal" each include a state in which the positional relationship between the two has an angular deviation to the extent that the gist of the present invention is not deviated.

Further, in the present specification, the direction from one of the substrate 1 and the lid 300, which will be described later, to the other is the vertical direction, the direction from the substrate 1 to the lid 300 is upward, and the direction from the lid 300 to the substrate 1 is directed. The direction is downward. In each component, the upward facing surface is the upper surface and the downward facing surface is the lower surface. However, these are names used only for explanation and are not intended to limit the actual positional relationship and direction.

<1. Embodiment>
FIG. 1 is an exploded perspective view showing an example of the heat exchange device 100. FIG. 2 is a cross-sectional view of the heat exchange device 100 along the line AA of FIG. FIG. 3 is a bottom view of the heat exchange device 100.

<1-1. Heat exchanger>
As shown in FIGS. 1 and 2, the heat exchange device 100 includes a heat sink 200 and a lid 300. The lid 300 forms a fluid flow path Pf through which the fluid f flows together with the heat sink 200. The heat sink 200 includes a plurality of fins 2. In the present embodiment, the lid 300 covers the upper surface of the heat sink 200 in which the plurality of fins 2 are arranged. The lower end of the lid 300 is fixed to the heat sink 200 by means such as screwing, welding, and gluing. The fluid flow path Pf is formed between the heat sink 200 and the lid 300.

The heat generating component 400 is in contact with the lower surface of the heat sink 200. Specifically, as shown in FIG. 3 in the present embodiment, the heat generating component 400 is arranged so as to be heat transferable on the lower surface of the heat sink 200 via the heat conductive sheet 401. The heat conductive sheet 401 has high heat conductivity and high heat resistance. For the heat conductive sheet 401, for example, a graphite sheet, a composite resin sheet containing a heat conductive material, or the like can be adopted. In addition, instead of the heat conductive sheet 401, thermal paste containing a heat conductive material may be used. Alternatively, the heat generating component 400 may directly contact the lower surface of the heat sink 200. The heat generating component 400 is, for example, a CPU, a power device, or the like.

The lid 300 has an injection port 301 and an discharge port 302. The injection port 301 is arranged on one side of the lid body 300 in the first flow path direction Df1 and is connected to the inlet side of the fluid flow path Pf. The discharge port 302 is arranged on the other side of the lid body 300 in the first flow path direction Df1 and is connected to the outlet side of the fluid flow path Pf. The inlet 301 and the outlet 302 are connected to a pump that circulates the fluid f (not shown), a radiator that cools the fluid f (not shown), and the like. By driving the pump, the fluid f circulates in the fluid flow path Pf, the radiator, and the pump.

The fluid f flows into the fluid flow path Pf from the injection port 301 of the lid 300. In the fluid flow path Pf, the fluid f flows between the fins 2 of the heat sink 200. The fluid f flows out of the fluid flow path Pf from the discharge port 302 of the lid 300. According to the present embodiment, it is possible to provide the heat exchange device 100 in which the fluid f flows more smoothly in the fluid flow path Pf.

In this embodiment, the fluid f is a refrigerant. The fluid f is, for example, an antifreeze liquid such as ethylene glycol or propylene glycol, a liquid such as pure water, or a gas such as air. Therefore, the heat exchange device 100 can be used as a cold plate for cooling the heat generating component 400.

While the fluid f flows in the fluid flow path Pf, the heat transferred from the heat generating component 400 to the heat sink 200 is released to the fluid f, and particularly from the fins 2. The fluid f returns to the fluid flow path Pf after being cooled by the radiator. By such a heat transfer cycle, the heat exchange device 100 can cool the heat generating component 400 in contact with the heat sink 200.

<1-2. Heat sink>
Next, the configuration of the heat sink 200 will be described with reference to FIGS. 1 to 5. FIG. 4 is a local top view of the heat sink 200. FIG. 5 is a local perspective view of the heat sink 200. In FIG. 4, a part of the fin group 210 is viewed from the normal direction of the upper surface of the substrate 1.

The heat sink 200 forms a part of the fluid flow path Pf extending in the first flow path direction Df1. In this embodiment, the heat sink 200 is formed by using a metal material such as Al or Cu.

The heat sink 200 includes a plate-shaped substrate 1. The substrate 1 spreads in the first flow path direction Df1 and the second flow path direction Df2. As described above, the first flow path direction Df1 diagonally intersects the first direction D1 described later and is parallel to the substrate 1. The second flow path direction Df2 is orthogonal to the first flow path direction Df1 and is parallel to the substrate 1. Further, in the present embodiment, the second flow path direction Df2 diagonally intersects with the first direction D1. The substrate 1 is rectangular when viewed from the normal direction of the upper surface of the substrate 1.

Further, the heat sink 200 further includes a fin group 210. The fin group 210 includes a plurality of fins 2 protruding from the substrate 1 and is arranged on the upper surface of the substrate 1. At least a part of the plurality of fins 2 is arranged in the first direction D1 and the second direction D2. The first direction D1 diagonally intersects the first flow path direction Df1 and is parallel to the substrate 1. The second direction D2 intersects the first flow path direction Df1 at an angle and intersects the first direction D1 and is parallel to the substrate 1. That is, the plurality of fins 2 are two-dimensionally arranged on the upper surface of the substrate 1. The configuration and specific arrangement of the fins 2 will be described later.

A heat generating component 400 is arranged on the lower surface of the substrate 1 via a heat conductive sheet 401. As shown in FIG. 3, preferably, the heat generating component 400 is arranged inside the outer edge portion of the fin group 210 when viewed from the normal direction of the lower surface of the substrate 1. By doing so, the heat transferred from the heat generating component 400 to the substrate 1 can be discharged to the fluid f by the fin group 210 directly above the heat generating component 400. That is, since heat can be transferred in a shorter path, the heat generating component 400 can be efficiently cooled.

The substrate 1 and the fin group 210 are different parts of a single member. By doing so, the substrate 1 and the fins 2 can be integrally formed, so that the thermal resistance from the substrate 1 to the fins 2 can be significantly reduced. Therefore, the cooling performance of the heat generating component 400 by the heat sink 200 can be improved. In the present embodiment, the fin group 210 is formed by subjecting the substrate 1 to skiving. The skive processing will be described later.

Preferably, as shown in FIGS. 1 and 2, the fin group 210 is plural and is arranged in the first flow path direction Df1. For example, in the present embodiment, the plurality of fin groups 210 include a first fin group 211, a second fin group 212, and a third fin group 213. That is, in this embodiment, the number of fin groups 210 is three. These are arranged from the injection port 301 side to the discharge port 302 side in the first flow path direction Df1. Further, the plurality of fin groups 210 are arranged in the first flow path direction Df1 with an interval Wg. Preferably, the distance Wg between the adjacent fin groups 210 in the first flow path direction Df1 is wider than the distance between the adjacent fins 2 in each fin group 210. For example, the above-mentioned spacing Wg is wider than the spacing Wi1 between the adjacent fins 2 in the first direction D1 and the spacing Wi2 between the adjacent fins 2 in the second direction D2 in each fin group 210. See FIGS. 1, 4 and 5). When a plurality of fin groups 210 are arranged in the first flow path direction Df1 with an interval Wg as described above, so that one fin group in which all fins 2 are two-dimensionally arranged is arranged on the upper surface of the substrate 1. Compared with this, the pressure loss of the fluid f flowing in the fluid flow path Pf in the first flow path direction Df1 can be reduced. Therefore, the fluid f can flow more smoothly in the fluid flow path Pf. The number of fin groups 210 is not limited to the above example, and may be a single number or a plurality of fin groups 210 other than 3.

Further, it is preferable that the distance between the fins 2 adjacent to each other in the fin group 210 arranged on the discharge port 302 side of the fluid flow path Pf in the first flow path direction Df1 is more preferably the fluid flow path in the first flow path direction Df1. The fin group 210 arranged on the injection port 301 side of the Pf is wider than the distance between the adjacent fins 2. More specifically, the distance between the adjacent fins 2 in the second fin group 212 is wider than the distance between the adjacent fins 2 in the first fin group 211. For example, the spacing Wi1 in the second fin group 212 is wider than the spacing Wi1 in the first fin group 211, and the spacing Wi2 in the second fin group 212 is wider than the spacing Wi2 in the first fin group 211. Further, the distance between the adjacent fins 2 in the third fin group 213 is wider than the distance between the adjacent fins 2 in the second fin group 212. For example, the spacing Wi1 in the third fin group 213 is wider than the spacing Wi1 in the second fin group 212, and the spacing Wi2 in the third fin group 213 is wider than the spacing Wi2 in the second fin group 212. That is, the fin group 210 arranged on the discharge port 302 side of the fluid flow path Pf in the first flow path direction Df1 has a wider distance between adjacent fins 2 in the arrangement direction of the fins 2. Therefore, the effect of flowing the fluid f more smoothly can be improved. However, in the above example, the distance between the fins 2 adjacent to each other in the fin group 210 arranged on the discharge port 302 side of the fluid flow path Pf in the first flow path direction Df1 is more in the first flow path direction Df1. The fin group 210 arranged on the injection port 301 side of the fluid flow path Pf does not exclude the configuration that is equal to or less than the distance between the adjacent fins 2.

<1-2-1. Arrangement of fins>
Next, the arrangement of fins 2 in each fin group 210 will be described with reference to FIGS. 4 and 5. As described above, the plurality of fins 2 are arranged two-dimensionally in the first direction D1 and the second direction D2. Preferably, as shown in FIGS. 4 and 5, the distance Wi1 between the adjacent fins 2 in the first direction D1 is wider than the width Wt1 of the fins 2 in the first direction D1. By setting Wi1> Wt1, the fluid f can smoothly pass between the fins 2 in the first direction D1. That is, since the pressure loss of the fluid f can be reduced, the decrease in the flow velocity of the fluid f can be suppressed. Therefore, since the heat dissipation efficiency from the fins 2 of the heat sink 200 to the fluid f can be improved, the cooling performance of the heat sink 200 can be improved. However, the present invention is not limited to the examples shown in FIGS. 4 and 5, and Wi1 ≦ Wt1 may be satisfied.

Further, preferably, as shown in FIGS. 4 and 5, the distance Wi2 between the adjacent fins 2 in the second direction D2 is wider than the width Wt2 of the fins 2 in the second direction D2. By setting Wi2> Wt2, the pressure loss of the fluid f can be further reduced, so that the decrease in the flow velocity of the fluid f can be further suppressed. Therefore, the cooling performance of the heat sink 200 can be further improved. However, the present invention is not limited to the examples shown in FIGS. 4 and 5, and Wi2 ≦ Wt2 or less may be used.

Further, preferably, as shown in FIGS. 4 and 5, the heat sink 200 has a gap Ws between the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1. In other words, the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1 do not overlap each other. For example, when viewed from the first flow path direction Df1, adjacent fins 2 do not overlap each other in the first direction D1. Further, when viewed from the first flow path direction Df1, the adjacent fins 2 do not overlap each other in the second direction D2. Since the heat sink 200 has the above-mentioned gap Ws when viewed from the first flow path direction Df1, the fluid f flowing in the first flow path direction Df1 can flow more smoothly. Therefore, the cooling performance of the heat sink 200 can be further improved.

More preferably, the width of the gap Ws seen from the first flow path direction Df1 is wider than the width of at least one of the width Wt1 of the fin 2 in the first direction D1 and the width Wt2 of the fin 2 in the second direction D2. .. By making the width of the gap Ws seen from the first flow path direction Df1 wider than the width Wt1 and / or the width Wt2 of the fin 2, the fluid f flowing in the first flow path direction Df1 can flow more smoothly. Therefore, the cooling performance of the heat sink 200 can be further improved.

However, the present invention is not limited to the examples of FIGS. 4 and 5, and there may be no gap Ws between the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1. That is, the above-mentioned example does not exclude the configuration in which the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1 overlap each other. Alternatively, the width of the gap Ws seen from the first flow path direction Df1 may be equal to or less than the width of at least one of the width Wt1 and the width Wt2.

<1-2-2. Fin composition>
Next, the configuration of the fin 2 will be described with reference to FIGS. 4 to 6B. FIG. 6A is an example of fin 2. FIG. 6B is a modified example of the fin 2.

The fin 2 has a prismatic shape and projects in the normal direction from the upper surface of the substrate 1. The fin 2 has a first side surface 21. The first side surface 21 is a plane facing the first flow path direction Df1 and extends in the first direction D1.

The first side surface 21 of the fin 2 faces a predetermined side 10 on the upper surface of the substrate 1. For example, the side 10 is an edge portion extending in the first flow path direction Df1 or an edge portion extending in the second flow path direction Df2 on the upper surface of the substrate 1. The first side surface 21 forms a first angle φ1 with respect to the side 10. The first angle φ1 is the smaller angle formed by the side 10 intersecting the first flow path direction Df1 and the first direction D1 in which the first side surface 21 extends when viewed from the normal direction of the upper surface of the substrate 1. The first angle φ1 of each fin 2 is the same. Since the first angle φ1 of each fin 2 is the same, the first side surface 21 of each fin 2 is similarly tilted. Therefore, the flow of the fluid f between the fins 2 in the fin group 210 can be made more uniform. Since the fluid f can flow more smoothly, the heat dissipation efficiency from the fins 2 to the fluid f can be improved. Therefore, the cooling performance of the heat sink 200 can be improved.

Preferably, the first angle φ1 is 45 degrees. When the first angle φ1 is made smaller, the pressure loss when the fluid f flowing in the first flow path direction Df1 toward the fin 2 hits the first side surface 21 can be reduced, but the heat dissipation efficiency on the first side surface 21 is lowered. .. On the contrary, if the first angle φ1 is made larger, the heat dissipation efficiency on the first side surface 21 can be improved, but the pressure loss when the fluid f hits the first side surface 21 increases. By setting the first angle φ1 = 45 degrees, it is possible to reduce the pressure loss on the first side surface 21 and improve the heat dissipation efficiency in a well-balanced manner. However, the present invention is not limited to this example, and the first angle φ1 may be larger than 45 degrees or less than 45 degrees.

Next, the fin 2 further has a second side surface 22 facing the first flow path direction Df1. In the present embodiment, as shown in FIG. 6A, the second side surface 22 of the fin 2 is a plane extending in the second direction D2 and forms an angle with the first side surface 21. The second side surface 22 faces the side 10. The angle θ having the smaller angle when viewed from the normal direction of the upper surface of the substrate 1 is preferably 90 degrees. Here, if the angle θ is made smaller, the pressure loss when the fluid f flowing in the first flow path direction Df1 toward the fin 2 hits the first side surface 21 and the second side surface 22 can be reduced, but the heat dissipation efficiency of the fin 2 can be reduced. Decreases. On the contrary, if the angle θ is made larger, the heat dissipation efficiency of the fin 2 can be improved, but the pressure loss when the fluid f hits the first side surface 21 and the second side surface 22 of the fin 2 increases. By setting the angle θ = 90 degrees, it is possible to reduce the pressure loss of the fluid f and improve the heat dissipation efficiency of the fin 2 in a well-balanced manner.

More preferably, the width Wt1 of the fin 2 in the first direction D1 is the same as the width Wt2 of the fin 2 in the second direction D2. By setting θ = 90 degrees and Wt1 = Wt2, the fin 2 can be formed into a prism shape having a square cross section. By doing so, the fluid f that hits the corner of the fin 2 is evenly separated into the first side surface 21 side and the second side surface 22 side and easily flows, so that the fluid f can flow smoothly.

The second side surface 22 forms a second angle φ2 with respect to the side 10. The second angle φ2 is the smaller angle formed by the side 10 intersecting the first flow path direction Df1 and the second direction D2 in which the second side surface 22 extends when viewed from the normal direction of the upper surface of the substrate 1. Preferably, the second angle φ2 of each fin 2 is the same as the first angle φ1. The flow of the fluid f toward the first side surface 21 and the second side surface 22 of the fin 2 is likely to be evenly separated into the first direction D1 and the second direction D2. Therefore, since the bias of the pressure loss of the fluid f flowing into the fin group 210 can be suppressed, the cooling performance of the fin group 210 can be improved.

However, the present invention is not limited to these examples, and the angle θ does not have to be 90 degrees, and the width Wt1 of the fin 2 in the first direction D1 may be different from the width Wt2 in the second direction D2. Further, the first angle φ1 may be different from the second angle φ2.

The second side surface 22 of the fin 2 is not limited to the example of FIG. 6A. The second side surface 22 may be a curved surface as shown in FIG. 6B. The curved surface projects toward the injection port 301 in the first flow path direction Df1 and connects to the first side surface 21. Preferably, the curved surface is smoothly connected to the first side surface 21. That is, the curved surface does not form a corner with the first side surface 21. By doing so, the fluid f can flow smoothly at the portion where the second side surface 22 is connected to the first side surface 21.

As described above, the second side surface 22 of the fin 2 protrudes toward the injection port 301 side in the first flow path direction Df1 and the plane extending in the second direction D2 to form an angle with the first side surface 21. It may be one of the curved surfaces connected to the first side surface 21. The corner formed by the first side surface 21 and the second side surface 22 (see FIG. 6A) or the curved surface protruding in the first flow path direction Df1 (see FIG. 6B) is the second facing the first flow path direction Df1 of the fin 2. By being arranged on the side surface 22, the flow of the fluid f toward the first flow path direction Df1 first hits the above corner or curved surface, and then is divided into one side and the other side of the second flow path direction Df2. , Flows along the sides of the fin 2. Therefore, for example, the fluid f can flow more smoothly than in the case where the flow of the fluid f toward the first flow path direction Df1 hits the side surface of the fin 2 extending in the second flow path direction Df2.

<1-2-3. Nearest fin>
The fin 2 closest to the predetermined side 10 on the upper surface of the substrate 1 is arranged on the outermost side in the fin group 210. Hereinafter, such fins 2 will be referred to as nearest fins 20. The fin group 210 includes a plurality of nearest neighbor fins 20. Each nearest fin 20 is the fin 2 closest to the predetermined side 10 on the upper surface of the substrate 1 in at least one of the first direction D1 and the second direction D2. The nearest fin 20 is arranged at a position away from the side 10.

In this embodiment, as shown in FIGS. 4 and 5, the distance Wd between each nearest fin 20 and the side 10 is the same. Since the above-mentioned spacing Wd is the same in each of the nearest-neighboring fins 20, a plurality of nearest-neighboring fins 20 are arranged along the above-mentioned side 10. Therefore, when manufacturing the heat sink 200, the shape of the substrate 1 seen from the normal direction of the upper surface of the substrate 1 can be made into a shape corresponding to the outer shape of the fin group 210.

As shown in FIGS. 4 and 5, the nearest fins 20 are arranged in a straight line. The "straight line" here means a one-dimensional array. That is, the "straight line" includes not only an arrangement that is not strictly deviated in the direction perpendicular to the arrangement direction but also an arrangement that is deviated in the direction perpendicular to the arrangement direction to the extent that the gist of the present invention is not deviated. By doing so, when the heat sink 200 is manufactured, the side 10 along the arrangement of the nearest fins 20 can be made into a straight line in one direction. Therefore, the shape of the heat sink 200 seen from the normal direction of the upper surface of the substrate 1 can be further simplified.

The nearest fins 20 are arranged in one of the first flow path direction Df1 and the second flow path direction Df2. In other words, a part of the plurality of nearest neighbor fins 20 is arranged in the first flow path direction Df1, and the remaining part of the plurality of nearest neighbor fins 20 is arranged in the second flow path direction Df2. For example, in the first fin group 211, the nearest fins 20 arranged on the most inlet 301 side of the first flow path direction Df1 are arranged in the second flow path direction Df2. Further, the nearest fins 20 arranged on the most one side of the second flow path direction Df2 in the first fin group 211 to the third fin group 213 are arranged in the first flow path direction Df1. In the third fin group 213, the fins 2 arranged on the most discharge port 302 side of the first flow path direction Df1 are arranged in the second flow path direction Df2. Further, the nearest fins 20 arranged on the farthest side of the second flow path direction Df2 in the first fin group 211 to the third fin group 213 are arranged in the first flow path direction Df1. By doing so, when the heat sink 200 is manufactured, the outer shape of the fin group 210 in which the fins 2 are two-dimensionally arranged on the substrate 1 can be made rectangular, and the shape of the heat sink 200 seen from the normal direction of the upper surface of the substrate 1 can be formed. Can also be rectangular. Therefore, the shape of the heat sink 200 can be further simplified.

<1-3. Manufacturing method of heat exchanger>
Next, a method of manufacturing the heat exchange device 100 will be described with reference to FIGS. 7 to 8F. FIG. 7 is a flowchart for explaining a method of manufacturing the heat exchange device 100. 8A to 8F are views showing each manufacturing process of the heat sink 200. FIG. 8A is a perspective view of the substrate 1 before processing. FIG. 8B is a perspective view of the substrate 1 on which a plurality of base portions 11 to be described later are formed. FIG. 8C is a local perspective view of the substrate 1 having the groove 12 formed in the base portion 11. FIG. 8D is a conceptual diagram of a tear-raising process of the convex portion 13. FIG. 8E is a local perspective view of the substrate 1 in which the fins 2 are formed from the convex portions 13 between the grooves 12. FIG. 8F is a perspective view of the substrate 1 having a plurality of fin groups 210 formed therein.

Steps S1 to S3 are methods for manufacturing the heat sink 200. The heat sink 200 manufactured by the manufacturing method of steps S1 to S3 includes a fin group 210 including a plurality of fins 2 protruding from the plate-shaped substrate 1, and is one of the fluid flow paths Pf extending in the first flow path direction Df1. Form a part.

The method for manufacturing the heat sink 200 includes a base forming step S1. In the pedestal forming step S1, the pedestal 11 is formed on the upper surface of the substrate 1 shown in FIG. 8A. The number of bases 11 is the same as the number of fin groups 210. In this embodiment, as shown in FIG. 8B, the three base portions 11 are arranged in the first flow path direction Df1. The platform forming step S1 may be omitted.

The method for manufacturing the heat sink 200 includes a groove forming step S2. In the groove forming step S2, three or more grooves 12 are formed on the upper surface of the substrate 1 extending in the first flow path direction Df1. More specifically, three or more grooves 12 are formed in each base portion 11. As shown in FIG. 8C, each groove 12 extends in the first direction D1 and is aligned with the second direction D2.

The forming means in the base portion forming step S1 and the groove forming step S2 is not particularly limited. For example, a chemical processing means such as resist etching may be used, or a physical processing means such as cutting may be used.

The method for manufacturing the heat sink 200 includes a fin forming step S3. In the fin forming step S3, the fin group 210 is formed. The fins 2 of each fin group 210 are formed by so-called skiving. Specifically, the fin forming step S3 has a tearing step S31. As shown in FIG. 8D, in the tear-raising step S31, the fins 2 are projected from the substrate 1 by splitting and raising the convex portions 13 formed between the grooves 12. In the fin forming step S3, the tearing step S31 is performed a plurality of times at equal intervals in the first direction D1.

In each convex portion 13, a number of fins 2 that can be formed are formed. In each convex portion 13, the fin 2 formed at a position along the edge portion of the base portion 11 may not have the desired prismatic shape as shown in FIG. 6A or FIG. 6B. Such fins 2 may be cut off by cutting or the like. When the formation of fins by tearing is not completed in all the convex portions 13 in one base portion 11 (No in step S32), the process of FIG. 7 returns to the tearing step S31.

As shown in FIG. 8E, when the formation of the fins 2 is completed in all the convex portions 13 in one base portion 11 (Yes in step S32), the other base portions 11 are similarly torn apart. The fin 2 is formed by the above method. That is, when the formation of the fins 2 is not completed in all the bases 11 (No in step S33), the target of the tearing up step S31 is changed to the unfinished bases 11 (step S34), and the tearing up step. Carry out S31.

On the other hand, as shown in FIG. 8F, when the formation of the fins 2 is completed in all the base portions 11 (Yes in step S33), the manufacturing process of the heat sink 200 is completed.

Next, the lid 300 is fixed to the heat sink 200 and covers the upper surface of the heat sink 200 (step S4). Then, the process of FIG. 7 is completed.

According to the process of FIG. 7, in the fin group 210, a plurality of fins 2 having a two-dimensional arrangement in the first direction D1 and the second direction D2 can be formed on the upper surface of the substrate 1. Since the pressure loss received when the fluid f toward the first flow path direction Df1 diagonally intersecting the first direction D1 flows between the fins 2, it is possible to suppress a decrease in heat dissipation efficiency from the fins 2 to the fluid f. Further, the fins 2 can be formed on the heat sink 200 forming a part of the fluid flow path Pf by so-called skive processing. Since the substrate 1 and the fins 2 can be integrally formed, that is, the substrate 1 and the fins 2 can be formed from a single plate material, the thermal resistance between the substrate 1 and the fins 2 can be reduced. Therefore, the heat dissipation efficiency from the heat generating component 400 arranged on the lower surface of the substrate 1 to the fluid f via the heat sink 200 can be improved. Therefore, it is possible to manufacture the heat sink 200 and the heat exchange device 100 having improved cooling performance.

Further, the heat sink 200 can be formed at a lower cost as compared with the case where the separate fin 2 is fixed to the substrate 1. Therefore, the productivity of the heat sink 200 and the heat exchange device 100 can be improved.

Further, in the present embodiment, in the tearing step S31, the convex portion 13 is torn up by using a tool 500 having a flat blade 501. By doing so, the fins 2 can be formed in the shape of a quadrangular prism as shown in FIG. 6A.

Preferably, in the tearing step S31, the blade 501 of the tool 500 is made perpendicular to the first direction D1, and the convex portion 13 is split. In this way, the fins can be formed in the shape of a quadrangular prism. Further, by performing the tearing up step S31 a plurality of times in the first direction D1 at equal intervals, the fins 2 can be arranged in the second direction D2 in which the second side surface 22 spreads.

However, the present invention is not limited to the example, and the convex portion 13 may be torn up by using a tool having a curved blade in the tearing up step S31. The curved blade 501 projects toward the injection port 301 of the fluid flow path Pf in the first flow path direction Df1. By doing so, the prismatic fin 2 as shown in FIG. 6B can be formed. That is, the second side surface 22 of the fin 2 is a curved surface and projects toward the injection port 301 side of the fluid flow path Pf in the first flow path direction Df1.

Further, preferably, in the fin forming step S3, the distance Wi1 between the adjacent fins 2 in the first direction D1 is wider than the width Wt1 of the fins 2 in the first direction D1. For example, the interval Wi3 in which the tearing step S31 is performed a plurality of times in the first direction D1 is wider than twice the width Wt1 of the fins 2 in the first direction D1. As shown in FIG. 8D, the spacing Wi3 is equal to the sum of the width Wt1 of the fins 2 in the first direction D1 and the spacing Wi1 between the adjacent fins 2 in the first direction D1. By doing so, the fluid f can smoothly pass between the fins 2 in the first direction D1. That is, since the pressure loss of the fluid f can be reduced, the decrease in the flow velocity of the fluid f can be suppressed. Therefore, since the heat sink 200 can improve the heat dissipation efficiency from the fin 2 to the fluid f, the cooling performance of the heat sink 200 can be improved.

Further, preferably, in the groove forming step S2, the width of the groove 12 in the second direction D2 is wider than the width of the convex portion 13 in the second direction D2. According to the process of FIG. 7, as shown in FIGS. 8C and 8E, the width of the convex portion 13 in the second direction D2 is the width Wt2 of the fin 2 in the second direction D2. Further, the width of the groove 12 in the second direction D2 is the distance Wi2 between the adjacent fins 2 in the second direction D2. Therefore, by making the width of the groove 12 wider than the width of the convex portion 13, the distance Wi2 between the adjacent fins 2 in the second direction D2 becomes wider than the width Wt1 of the fins 2 in the first direction D1. Since the distance Wt2 between the adjacent fins 2 in the second direction D2 becomes wider, the pressure loss of the fluid f can be further reduced, so that the decrease in the flow velocity of the fluid f can be further suppressed. Therefore, the cooling performance of the heat sink 200 can be further improved.

Further, preferably, there is a gap Ws between the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1. As described above, the second flow path direction Df2 is orthogonal to the first flow path direction Df1 and is parallel to the substrate 1. For example, the intervals Wi1 and Wi2 and the widths Wt1 and Wt2 of the fins 2 are determined so that the gap Ws can be formed. By having a gap Ws between the fins 2 closest to each other in the second flow path direction Df2 when viewed from the first flow path direction Df1, the fluid f flowing in the first flow path direction Df1 can be smoothly flowed. Therefore, the cooling performance of the heat sink 200 can be further improved.

Further, in the heat sink 200 manufactured by the manufacturing method described with reference to FIG. 7, a plurality of fin groups 210 are arranged in the first flow path direction Df1. Preferably, the groove forming step S2 and the fin forming step S3 are carried out a plurality of times in the first flow path direction Df1 with an interval of Wg. For example, in the pedestal forming step S1, a plurality of pedestals 11 are formed with an interval Wg in the first flow path direction Df1. By arranging a plurality of fin groups 210 in the first flow path direction Df1 with an interval Wg, the fluid flowing in the fluid flow path Pf is compared with the case where one fin group 210 is arranged on the upper surface of the substrate 1. The pressure loss in the first flow path direction Df1 of f can be reduced. Therefore, the fluid f can flow more smoothly in the fluid flow path Pf.

More preferably, the distance between the fins 2 adjacent to each other in the fin group 210 arranged on the discharge port 302 side of the fluid flow path Pf in the first flow path direction Df1 is more preferably the fluid flow path in the first flow path direction Df1. The fin group 210 arranged on the injection port 301 side of the Pf is wider than the distance between the adjacent fins 2. For example, the fin group 210 arranged on the discharge port 302 side of the fluid flow path Pf in the first flow path direction Df1 has a wider spacing Wi1 and Wi2 between the adjacent fins 2 in the arrangement direction of the fins 2. Therefore, the effect of flowing the fluid f more smoothly can be improved.

Further, in the heat sink 200 manufactured by the manufacturing method described with reference to FIG. 7, the fin group 210 includes a plurality of nearest neighboring fins 20. As described above, each nearest fin 20 is the fin 2 closest to the predetermined side 10 on the upper surface of the substrate 1 in at least one of the first direction D1 and the second direction D2. Preferably, in the fin forming step S3, the nearest neighbor fins 20 are linearly arranged, and the distance Wd between each nearest fin 20 and the above-mentioned side 10 is made the same. Since the distance Wd between each nearest fin 20 and the predetermined side 10 on the upper surface of the substrate 1 is the same, a plurality of nearest neighbor fins 20 arranged linearly in one direction are predetermined on the upper surface of the substrate 1. Arrange along the side 10 of. Therefore, when manufacturing the heat sink 200, the sides 10 along the arrangement of the nearest fins 20 can be made linear. Therefore, the shape of the heat sink 200 seen from the normal direction of the upper surface of the substrate 1 can be further simplified.

<2. Others>
The embodiment of the present invention has been described above. The scope of the present invention is not limited to the above-described embodiment. The present invention can be implemented by making various modifications to the above-described embodiments without departing from the gist of the invention. In addition, the items described in the above-described embodiments can be arbitrarily combined as long as there is no contradiction.

The present invention is useful, for example, for a heat sink having a plurality of fins, a method for manufacturing the heat sink, and a heat exchange device provided with the heat sink.

100 ... heat exchanger, 200 ... heat sink, 210 ... fin group, 211 ... first fin group, 212 ... second fin group, 213 ... third fin group, 300 ...・ ・ Lid, 301 ・ ・ ・ Injection port, 302 ・ ・ ・ Discharge port, 401 ・ ・ ・ Heat conduction sheet, 400 ・ ・ ・ Heat generation parts, 500 ・ ・ ・ Tools, 501 ・ ・ ・ Blade, 1 ・ ・ ・Substrate, 10 ... Side, 11 ... Base, 12 ... Groove, 13 ... Convex, 2,2a ... Fin, 20 ... Nearest fin, 21 ... First Side surface, 22, 22a ... 2nd side surface, D1 ... 1st direction, D2 ... 2nd direction, Df1 ... 1st flow path direction, Df2 ... 2nd flow path direction, Pf.・ ・ Fluid flow path, f ... fluid, Wi1, Wi2, Wi3, Wd, Wg ... interval, Wt1, Wt2 ... width, Ws ... gap, θ ... angle, φ1 ... 1st angle, φ2 ... 2nd angle

Claims (12)

A heat sink that forms part of a fluid flow path that extends in the direction of the first flow path.
A plate-shaped substrate extending in the direction of the first flow path and the direction of the second flow path orthogonal to the direction of the first flow path,
A group of fins including a plurality of fins protruding from the substrate.
The substrate and the fins are different parts of a single member.
At least a portion of the plurality of fins is arranged in the first direction and the second direction.
The first direction intersects the first flow path direction at an angle and is parallel to the substrate.
The second direction intersects the first flow path direction at an angle and intersects the first direction and is parallel to the substrate.
The fin has a first side surface and a second side surface facing the first flow path direction.
The first side surface is a plane facing the first flow path direction, and spreads in the first direction.
The second aspect is
A plane that spreads in the second direction and forms a corner with the first side surface,
A heat sink that is one of a curved surface that protrudes toward the injection port side in the first flow path direction and is connected to the first side surface. The second side surface is a plane that spreads in the second direction and forms the corner with the first side surface.
The heat sink according to claim 1, wherein the angle of the smaller angle is 90 degrees when viewed from the normal direction of the upper surface of the substrate. The heat sink according to claim 2, wherein the width of the fin in the first direction is the same as the width of the fin in the second direction. The fin group is a plurality, arranged in the direction of the first flow path, and
The aspect according to any one of claims 1 to 3, wherein the distance between the adjacent fin groups in the first flow path direction is wider than the distance between the adjacent fins in each of the fin groups. heat sink. The distance between the fins adjacent to each other in the fin group arranged on the discharge port side of the fluid flow path in the first flow path direction is the injection port side of the fluid flow path in the first flow path direction. The heat sink according to claim 4, which is wider than the distance between the adjacent fins in the fin group arranged in the above. The heat sink according to claim 5, wherein the distance between the fins adjacent to each other in the first direction is wider than the width of the fins in the first direction. The heat sink according to any one of claims 1 to 6, which has a gap between the fins closest to each other in the direction of the first flow path when viewed from the direction of the first flow path. The fin group includes a plurality of nearest neighbor fins.
Each of the nearest fins is the fin closest to a predetermined side on the upper surface of the substrate in at least one of the first direction and the second direction.
The nearest fins are arranged in a straight line and
The heat sink according to any one of claims 1 to 7, wherein the distance between each of the nearest fins and the side thereof is the same. The first side surface of the fin faces the side and
The first angle is the smaller angle formed by the side intersecting the first flow path direction and the first direction in which the first side surface extends when viewed from the normal direction of the upper surface of the substrate.
The heat sink according to claim 8, wherein the first angle of each of the fins is the same. The second side surface of the fin is a plane that extends in the second direction and forms the angle with the first side surface, and faces the side.
The second angle is the smaller angle formed by the side intersecting the first flow path direction and the second direction in which the second side surface extends when viewed from the normal direction of the upper surface of the substrate.
The heat sink according to claim 9, wherein the second angle of each of the fins is the same as the first angle. The heat sink according to any one of claims 1 to 10.
A lid that forms a fluid flow path through which the fluid flows together with the heat sink is provided.
The fluid is a heat exchange device that flows between the fins of the heat sink. The heat exchange device according to claim 11, wherein the fluid is a refrigerant.

Images