JP2002249873A5 - - Google Patents

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Publication number
JP2002249873A5
JP2002249873A5 JP2001045983A JP2001045983A JP2002249873A5 JP 2002249873 A5 JP2002249873 A5 JP 2002249873A5 JP 2001045983 A JP2001045983 A JP 2001045983A JP 2001045983 A JP2001045983 A JP 2001045983A JP 2002249873 A5 JP2002249873 A5 JP 2002249873A5
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JP
Japan
Prior art keywords
sputter cleaning
film forming
substrate
plasma
sputter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001045983A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002249873A (ja
JP4436987B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2001045983A priority Critical patent/JP4436987B2/ja
Priority claimed from JP2001045983A external-priority patent/JP4436987B2/ja
Publication of JP2002249873A publication Critical patent/JP2002249873A/ja
Publication of JP2002249873A5 publication Critical patent/JP2002249873A5/ja
Application granted granted Critical
Publication of JP4436987B2 publication Critical patent/JP4436987B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001045983A 2001-02-22 2001-02-22 成膜方法及び装置 Expired - Fee Related JP4436987B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001045983A JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001045983A JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Publications (3)

Publication Number Publication Date
JP2002249873A JP2002249873A (ja) 2002-09-06
JP2002249873A5 true JP2002249873A5 (cg-RX-API-DMAC10.html) 2008-01-17
JP4436987B2 JP4436987B2 (ja) 2010-03-24

Family

ID=18907686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001045983A Expired - Fee Related JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Country Status (1)

Country Link
JP (1) JP4436987B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013011072A1 (de) * 2013-07-03 2015-01-08 Oerlikon Trading Ag, Trübbach Targetpräparation

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