JP2002246098A5 - - Google Patents

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Publication number
JP2002246098A5
JP2002246098A5 JP2001042220A JP2001042220A JP2002246098A5 JP 2002246098 A5 JP2002246098 A5 JP 2002246098A5 JP 2001042220 A JP2001042220 A JP 2001042220A JP 2001042220 A JP2001042220 A JP 2001042220A JP 2002246098 A5 JP2002246098 A5 JP 2002246098A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001042220A
Other languages
Japanese (ja)
Other versions
JP2002246098A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001042220A priority Critical patent/JP2002246098A/ja
Priority claimed from JP2001042220A external-priority patent/JP2002246098A/ja
Publication of JP2002246098A publication Critical patent/JP2002246098A/ja
Publication of JP2002246098A5 publication Critical patent/JP2002246098A5/ja
Pending legal-status Critical Current

Links

JP2001042220A 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子 Pending JP2002246098A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001042220A JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001042220A JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Publications (2)

Publication Number Publication Date
JP2002246098A JP2002246098A (ja) 2002-08-30
JP2002246098A5 true JP2002246098A5 (enrdf_load_stackoverflow) 2008-02-14

Family

ID=18904550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001042220A Pending JP2002246098A (ja) 2001-02-19 2001-02-19 真空チャンバー電力供給用の電流導入端子

Country Status (1)

Country Link
JP (1) JP2002246098A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004152536A (ja) * 2002-10-29 2004-05-27 Otax Co Ltd 電子部品用ソケット

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2965846B2 (ja) * 1994-01-20 1999-10-18 株式会社ヨコオ 電気接続用コネクタ
JP4060919B2 (ja) * 1997-11-28 2008-03-12 富士通株式会社 電気的接続装置、接触子製造方法、及び半導体試験方法
JPH11163066A (ja) * 1997-11-29 1999-06-18 Tokyo Electron Ltd ウエハ試験装置
WO2000003251A1 (en) * 1998-07-10 2000-01-20 Nhk Spring Co., Ltd. Conductive contact
JP2000243500A (ja) * 1999-02-18 2000-09-08 Yokowo Co Ltd スプリングコネクタおよびその製造方法

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