JP2002244136A - Inspecting method for rubbing cloth and manufacturing method, and manufacturing device for liquid crystal display element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To control, select and correct rubbing nap by detecting disorder in the raising direction of the rubbing nap, the coarseness or the fineness of the rubbing nap and the fluctuation in the height of the rubbing nap. SOLUTION: The manufacturing device of a liquid crystal display element having an alignment layer is provided with a rubbing roller 1, a rubbing roller drive device 2, an illuminator 31 for lighting with illumination light L1, a defect- extracting means 32, 42 and 43 for optically extracting defects, a foreign matter removing system 5 for removing foreign matters and an alarm-generating device 44. The foreign matters, adhered to the rubbing cloth and attached to the rubbing roller 1, are removed by the foreign matter removing system 5, while the rubbing roller 1 is rotated, the rubbing cloth is lighted with the illumination light L1 by the illuminating means 31, the defect part is abstracted by the defect- extracting means using reflection light L2 from the rubbing cloth and the alarm is generated by the alarm-generating means 44, when the defect part has a value larger than a previously set threshold.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, wherein an alignment characteristic is given to an alignment film in order to align the liquid crystal in a specific direction. In the rubbing process, a defective portion of a rubbing roller or a rubbing cloth or a resin sheet used in the rubbing process is detected, managed, sorted, and corrected, thereby producing a liquid crystal display element that does not cause uneven rubbing and a liquid crystal display. The present invention relates to a device manufacturing device. Further, the present invention relates to an inspection method for inspecting a rubbing cloth or a rubbing roller used for manufacturing a liquid crystal display element for defects.

[0002]

2. Description of the Related Art In a liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, in order for the liquid crystal to be arranged in a specific direction, an opposite surface of the substrate (a surface in contact with the liquid crystal).
It is necessary to form an alignment film on the surface and to provide alignment characteristics to the surface. As a method for giving the orientation characteristics, for example, a rubbing treatment is used. The rubbing treatment is a method of imparting orientation characteristics by rubbing the surface of the alignment film with a cloth. A rubbing treatment cloth is wound around a cylindrical roller (called a rubbing roller), and the surface of the alignment film is rotated while rotating the rubbing roller. The method of rubbing is taken. As the cloth for rubbing treatment, a cloth in which raised pile (called rubbing hair) is woven into cloth is used.

Rubbing is a process for imparting alignment characteristics to an alignment film, and the uniformity of the rubbing has a great effect on the display quality of a liquid crystal display device. As described above, the cloth used for the rubbing treatment has the rubbing hair woven into the cloth, and therefore, the cloth is generally regularly arranged at regular intervals in the direction of the warp and the weft of the cloth woven with the rubbing hair. Therefore, unevenness occurs in the rubbing process between the portion where the rubbing hair exists and the portion where the rubbing hair does not exist, resulting in display unevenness. On the contrary,
For example, as described in JP-A-9-73087, by winding the rubbing cloth with the warp direction inclined with respect to the circumferential direction of the rubbing roller, the roughness of the rubbing hair is alleviated, and the rubbing processing unevenness is reduced. I have.

[0004] The rubbing hair is 1-3 mm long,
Due to variations in the length of the rubbing hair and the raising angle, the tip height of the rubbing hair with respect to the rubbing roller surface varies. Since the strength of the orientation treatment is determined by the frictional force with the rubbing hair, the variation in the height of the hair tips causes unevenness in the orientation treatment. On the other hand, for example, Japanese Patent Application Laid-Open No. 9-2574
As disclosed in Japanese Patent No. 33, there is a method of inspecting the protrusion of the hair tip from the envelope surface of the rubbing hair tip.

In the rubbing treatment, the tip of the rubbing hair is in contact with the alignment film. Rubbing hair length 1-3mm
On the other hand, the diameter of the rubbing hair is as thin as 20 to 30 μm, and the position of the hair tip cannot be fixed. In particular, when a frictional force acts in a direction opposite to the direction of raising the hair (a direction from the root of the hair toward the tip of the hair), stick-slip occurs, causing unevenness in the frictional force. On the other hand, for example, Japanese Patent Application Laid-Open
As disclosed in Japanese Patent No. 183908, there is a method of aligning the raising direction in a certain direction.

[0006]

Disturbances in the direction in which the rubbing hairs are raised are the major causes of uneven rubbing treatment, such as uneven density of the rubbing hairs, variations in hair tip height, and occurrence of stick-slip. However, there is also a problem that it is not possible to inspect a partial disorder of the rubbing hair in the raising direction.

An object of the present invention is to solve the above problem and to provide an inspection method for inspecting a rubbing cloth or a rubbing roller for use in manufacturing a liquid crystal display element.

Further, the present invention solves the above-mentioned problem, and detects a defective portion of the rubbing hair (for example, disturbance in the brushing direction, length, thickness, surface condition, etc.) which is a major cause of uneven rubbing. It is an object of the present invention to provide a manufacturing apparatus and a manufacturing method of a liquid crystal display element which enable the management, sorting and correction of a rubbing roller, a rubbing cloth or a resin sheet.

Another object of the present invention is to provide a manufacturing apparatus and a manufacturing method of a liquid crystal display element which can reduce rubbing unevenness, improve display quality and reduce manufacturing cost. .

[0010]

As described above, the rubbing hairs are generally raised in a substantially constant direction, so that when light is irradiated from a specific direction, the amount of light reflected from the rubbing hairs becomes constant. . On the other hand, in the part where the raising direction is disturbed or in the part where the spacing between the rubbing hairs is uneven,
A difference appears in the amount of reflected light as compared with the normal part. The present invention
By detecting the difference in the amount of reflected light, disturbance in the raising direction is detected.

In order to solve the above problems, the present invention provides two
A method of inspecting a rubbing cloth used for rubbing an alignment film of a liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the rubbing treatment, irradiating illumination light from a direction in which the angle between the rubbing cloth attached to the rubbing roller and the rubbing direction of the rubbing bristles attached to the rubbing roller is an acute angle, and The reflected light of the rubbing hair was detected from a direction substantially 90 degrees from the irradiation direction of the illumination light, and the defect was inspected.

In order to solve the above problems, the present invention provides a
In a method of inspecting a rubbing roller used for rubbing an alignment film of a liquid crystal display element having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. Irradiating illumination light from a direction in which the angle between the rubbing roller performing the rubbing process and the rubbing direction of the rubbing bristles attached to the rubbing roller is substantially tangential during the rubbing process. By detecting reflected light from the rubbing hair or foreign matter from a direction substantially 90 degrees from the irradiation direction, the state of the rubbing hair of the rubbing roller or the state of adhesion of the foreign matter is monitored.

To solve the above problems, the present invention provides a
A method of inspecting a rubbing cloth used for rubbing an alignment film of a liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the above, irradiating illumination light from a direction that is substantially parallel to the rubbing cloth for performing the rubbing treatment and an angle made with the raising direction of the rubbing bristles attached to the rubbing cloth is an acute angle, and the irradiation direction of the illumination light Then, the reflected light of the rubbing hair is detected from a direction substantially at 90 degrees, and the defective portion is inspected.

[0014] In order to solve the above-mentioned problems, the present invention provides:
Inspection method of rubbing cloth having a structure in which liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate, and performing a rubbing treatment of the alignment film of the liquid crystal display device In the above, irradiating illumination light from a direction that is substantially parallel to the rubbing cloth for performing the rubbing treatment and an angle made with the raising direction of the rubbing bristles attached to the rubbing cloth is an acute angle, and the irradiation direction of the illumination light Then, the reflected light of the rubbing hair was detected from a direction substantially at 90 degrees, the rubbing direction of the rubbing hair was measured from the reflected light luminance, and a rubbing cloth or a resin sheet in a predetermined direction was used.

According to the present invention, in the above-described method for inspecting a rubbing cloth or a rubbing roller, the rubbing roller or the rubbing cloth is inspected while foreign substances adhering to the rubbing hair are removed by suction or comb teeth.

In order to solve the above problems, the present invention relates to
In a structure in which liquid crystal is sandwiched between two substrates, a rubbing process is performed to impart alignment characteristics to the alignment film of a liquid crystal display element having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the manufacturing method of the liquid crystal display element to be performed, the illumination light is irradiated from a direction in which the angle between the rubbing roller and the rubbing direction of the rubbing bristles attached to the rubbing roller is an acute angle, which is substantially tangential to the rubbing roller performing the rubbing process. A rubbing roller selected by detecting reflected light of the rubbing hair from a direction substantially 90 degrees from the irradiation direction of the illumination light and inspecting a defective portion is used.

To solve the above problems, the present invention provides a
In a structure in which liquid crystal is sandwiched between two substrates, a rubbing process is performed to impart alignment characteristics to the alignment film of a liquid crystal display element having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the method of manufacturing a liquid crystal display element to be performed, the illuminating light is applied in a direction that is substantially tangential to a rubbing roller that performs the rubbing process during the rubbing process and an angle between the rubbing direction of the rubbing bristles attached to the rubbing roller and the raised direction is acute. And the reflected light from the rubbing hair or foreign matter is detected from a direction substantially 90 degrees from the irradiation direction of the illumination light to monitor the state of the rubbing hair or the foreign matter adhesion state.

In order to solve the above problems, the present invention provides a
In a structure in which liquid crystal is sandwiched between two substrates, a rubbing process is performed to impart alignment characteristics to the alignment film of a liquid crystal display element having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the method for producing a liquid crystal display element to be performed, the angle between the rubbing cloth or the rubbing hair attached to the rubbing cloth or the resin sheet which is substantially parallel to the rubbing cloth or the resin sheet for performing the rubbing treatment is an acute angle. The rubbing cloth or resin sheet that is irradiated by illuminating light from a direction to be detected, detects reflected light of the rubbing hair from a direction substantially 90 degrees from the irradiation direction of the illuminating light, and is inspected for a defective portion. It was used.

In order to solve the above problems, the present invention relates to
In a structure in which liquid crystal is sandwiched between two substrates, a rubbing process is performed to impart alignment characteristics to the alignment film of a liquid crystal display element having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrate. In the method for producing a liquid crystal display element to be performed, the angle between the rubbing cloth or the rubbing hair attached to the rubbing cloth or the resin sheet which is substantially parallel to the rubbing cloth or the resin sheet for performing the rubbing treatment is an acute angle. Irradiating the rubbing hair from a direction substantially equal to 90 degrees from the irradiation direction of the illuminating light, measuring the rubbing hair raising direction from the reflected light luminance, Rubbing cloth or resin sheet.

According to the present invention, in the above-mentioned method for manufacturing a liquid crystal display element, a rubbing roller, a rubbing cloth or a resin sheet is inspected while removing foreign substances adhering to the rubbing hair by suction or removing them with comb teeth. According to the present invention, in the method of manufacturing a liquid crystal display element, the detected defective portion is corrected using a jig such as a comb, and then used.

In order to solve the above problems, the present invention provides two
A liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate. A display device manufacturing apparatus, comprising: a unit for rotating a roller; a unit for irradiating illumination light; a unit for optically extracting a defect; a unit for removing a foreign substance; and a unit for generating an alarm; The foreign matter adhering to the rubbing cloth or resin sheet attached to the rubbing roller is removed by the foreign matter removing means while rotating the rubbing roller by the roller rotating means, and the rubbing cloth or resin material is removed by the lighting means. The sheet is irradiated with illumination light, and reflected light from a rubbing cloth or a resin sheet is used to extract a defective portion by the defect extracting means. And to generate an alarm by said alarm generating means when it exceeds a preset threshold value.

In order to solve the above problems, the present invention provides two
A liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate. In a display device manufacturing apparatus, means for sucking and fixing a rubbing cloth or a resin sheet for performing the rubbing treatment, means for irradiating illumination light, means for optically extracting defects, and means for removing foreign matter Means for moving the defect detection means relative to the rubbing cloth or resin sheet, and means for generating an alarm, fixing the rubbing cloth or resin sheet by the suction fixing means, The foreign matter adhering to the rubbing cloth or the resin sheet is removed by the foreign matter removing means, and the suction fixing means and the defect extracting means are used by the moving means. Is changed, the illuminating means irradiates the rubbing cloth or the resin sheet with illumination light, and the reflected light from the rubbing cloth or the resin sheet is used to extract a defective portion by the defect extracting means. An alarm is generated by the alarm generating means when a threshold value set in advance is exceeded.

According to the present invention, in the above-mentioned apparatus for manufacturing a liquid crystal display element, the apparatus further comprises a defect correcting means for correcting a defective portion extracted by the defect extracting means.

In order to solve the above problems, the present invention provides two
A liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate. In the display device manufacturing apparatus, means for adsorbing and fixing the rubbing cloth or resin sheet for performing the rubbing treatment, means for irradiating illumination light, and reflected light from the rubbing cloth or resin sheet brushed in a certain direction. A means for measuring luminance, a means for removing foreign matter, a means for moving the reflected light luminance measuring means relative to the rubbing cloth or resin sheet, and a means for generating an alarm, The rubbing cloth or the resin sheet is fixed by the fixing means, and the foreign matter attached to the rubbing cloth or the resin sheet is removed by the foreign matter removing means. Meanwhile, the relative position between the suction fixing means and the reflected light luminance measuring means is changed using the moving means, and the illuminating means irradiates the rubbing cloth or the resin sheet with illumination light, and the reflected light luminance measuring means The luminance of reflected light from a rubbing cloth or a resin sheet was measured, and an alarm was generated by the alarm generating means when the luminance exceeded a preset threshold.

In order to solve the above problems, the present invention provides two
A liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate. In the method of manufacturing a display element, a rubbing cloth or a resin sheet to be subjected to a rubbing treatment is selected by a manufacturing apparatus for inspecting the rubbing cloth or a resin sheet, and then the rubbing cloth or the resin sheet is attached to a rubbing roller, and the rubbing roller is inspected. The rubbing roller is selected by rubbing with a rubbing roller determined to be usable, and during the rubbing process or after a predetermined number of rubbing processes, the rubbing roller is inspected by the liquid crystal display element manufacturing apparatus and exceeds a preset threshold value. The rubbing cloth or the resin sheet was replaced at the time.

To solve the above problems, the present invention provides
A liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates, and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrate. In the method for manufacturing a display element, a rubbing cloth or a resin sheet is selected by a manufacturing apparatus for inspecting the rubbing cloth or the resin sheet, and the rubbing roller is monitored by a manufacturing apparatus for inspecting the rubbing roller during production. I made it.

[0027]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An outline of the structure of a liquid crystal display device manufacturing apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1, 2, 3 and 4. FIG. The manufacturing apparatus for a liquid crystal display element according to the first embodiment is a manufacturing apparatus capable of inspecting a surface defect of a rubbing roller forming the manufacturing apparatus even during rubbing. As shown in FIG. 1, an apparatus for manufacturing a liquid crystal display element according to a first embodiment of the present invention includes a rubbing roller 1, a roller driving device 2, an optical system 3, a surface state detection system 4, And a removal system 5.

The rubbing roller 1 is formed by directly providing rubbing bristles 12 on the surface or attaching a rubbing cloth or a rubbing resin sheet (hereinafter referred to as rubbing cloth) having the rubbing bristles 12 planted on the surface. And a roller rotating shaft 11 that is driven to rotate at a constant speed by the roller driving device 2. The rubbing bristles 12 are usually attached in a slant in one direction, and this direction is referred to as a rubbing bristling direction d1. While rotating the rubbing roller 1 at a constant speed about the roller rotation shaft 11, the rubbing hair 12 rubs the alignment film to apply an alignment force to the alignment film.

The optical system 3 includes an illumination device 31 mounted on an optical base 30, a photographing element 32, and a detection lens 3.
Three.

The illuminating device 31 can use a conventional technique such as a laser light source or a halogen light source, and can use a spot-like illumination or a linear illumination long in the direction of the roller rotation shaft 11. The illuminating device 31 is arranged such that the illuminating light L1 is emitted in a direction substantially tangential to the rubbing roller 1 and in a direction in which the angle す formed with the rubbing hair raising direction d1 forms an acute angle.

The photographing element 32 is constituted by a CCD linear sensor or the like, and detects the reflected light L2 from the rubbing hair 12 collected by the detection lens 33. The imaging element 32
Upon receiving a signal from the control device 41, the surface state of the rubbing roller 1 is photographed in synchronization with the rotation of the rubbing roller 1. The angle θ between the illumination light L1 and the optical axis S1 of the detection system is approximately 90 degrees, but can be set to 60 to 100 degrees depending on the size of the rubbing hair raising direction d1.

The optical base 30 is provided with an illuminating device 31, a photographing element 32, a detection lens 33, and a foreign matter removing nozzle 51, and a direction parallel to the roller rotating shaft 11 (paper surface) while maintaining their respective positional relationships. (In the direction perpendicular to the vertical direction). When the area that can be photographed at one time by the photographing element 32 is shorter than the rubbing roller 1, the optical base 30 is moved in parallel with the rotating shaft 11 and photographing is performed a required number of times. The foreign matter removing nozzle 51 and the illumination device 31 do not necessarily need to be attached to the optical base 30 when the one having the same length as the rubbing roller 1 can be installed.

The surface state detection system 4 includes a control device 41 and A
It has a D converter 42, a defect detector 43, and an alarm generator 44.

The control device 41 controls operations of the rubbing roller driving device 2, the optical system 3, the surface state detecting system 4, the foreign matter removing system 4, and the like.

The AD converter 42 receives a signal from the control device 41 and operates in synchronization with the imaging device 32. The AD converter 42 converts analog image data captured by the image sensor 32 into digital image data.

The defect detecting unit 43 uses the digital image data from the AD converter 42 to
Detect surface conditions such as surface defects and dirt.

The alarm generator 44 generates an alarm when the defect detector 43 detects a defect on the surface of the rubbing roller 1 or the like.

The foreign matter removing system 5 includes a foreign matter removing nozzle 51,
It has a suction device 52 composed of a vacuum cleaner or a vacuum pump. The foreign matter removing system 5 sucks and removes foreign matter attached to the rubbing hair 12 by the suction device 52. The tip of the foreign matter removing nozzle 51 may have a comb-like shape. By bringing the comb-tooth portion into contact with the rubbing hair 12, the rubbing hair raising direction d1 can be corrected simultaneously with the foreign matter removal.

In this liquid crystal display device manufacturing apparatus, an image is acquired by the photographing element 32 while the rubbing roller 1 is rotated at a constant speed and the foreign matter existing on the surface of the rubbing roller 1 is suctioned and removed by the foreign matter removing nozzle 51. . When the rubbing hair 12 is irradiated with the illumination light L1, the rubbing hair 12 is reflected on the side surface thereof. However, since the rubbing hair 12 is inclined in a substantially constant direction, the reflected light has a substantially constant brightness. However, the reflected light luminance is normal in a defective portion where the raising direction d1 of the rubbing hair is disturbed, a portion where the rubbing hair 12 has a different shape (for example, length, thickness, surface condition, etc.), and a portion where the density of the rubbing hair 12 is different. Different from the part. Also, the portion where the foreign matter is attached has a different reflected light luminance. Thus, the defect detection unit 43 can specify a defective portion using a preset threshold.

FIG. 2 shows an example of the acquired image. As shown, on the surface of the rubbing roller 11, a portion 121 where the density of the rubbing hair 12 is low, a portion 122 where the rubbing hair is long 122,
When the foreign matter 123 exists, a different state appears in the reflected light as compared with a normal surface. In the portion 121 where the density of the rubbing hairs 12 is low, the luminance of the reflected light is low and lower than the average luminance. In addition, the rubbing hair long part 122 and the foreign matter 123
Since the illumination light L1 becomes stronger, the reflected light luminance becomes higher.

FIG. 3 shows a cross section of the luminance along AA in FIG. In FIG. 3, the horizontal axis represents A- of the surface of the rubbing roller 1.
The position on the line A and the vertical axis indicate luminance. The solid line is
The luminance of the detected reflected light is shown, and the dashed line indicates the average luminance obtained by using a moving average value, an approximate spline value, or the like.

Since the average luminance is affected by the rubbing hair raising direction d1, uneven illumination, and the characteristics of the optical system, the image luminance is corrected by the following equation (1) in order to eliminate these effects.

[0043]

(Equation 1)

Here, I (x, y) is (x, y) of the original image.
y) indicates the luminance at the coordinate, A (x, y) indicates the luminance at the (x, y) coordinate of the average luminance, and R (x, y) indicates the corrected luminance.

FIG. 4 shows the corrected luminance section. In FIG. 4, the horizontal axis represents the position on the AA line on the surface of the rubbing roller 1, the vertical axis represents the luminance ratio, and the dashed line represents the average luminance R, the upper threshold SH, and the lower threshold SL after correction. ing.
The average luminance R is “0”. These thresholds SH, SL
The portion beyond the point becomes a defective portion 120. Defective part 120
Is shown at 124. The alarm generation device 44 generates an alarm when the size or the number of detected defective portions exceeds a predetermined threshold.

According to this embodiment, the rubbing roller 1 is inspected during the rubbing process, and the rubbing hairs 12 are monitored for a change in the state (wear, turbulence) or the state of the adherence of foreign substances. In addition to being able to determine the service life, it is also possible to determine the quality of the rubbing roller before attaching it to the rubbing processing device and prevent defects from occurring, thereby improving display quality and manufacturing by preventing defects from occurring. The cost can be reduced.

An outline of the configuration of a liquid crystal display element manufacturing apparatus according to another embodiment of the present invention will be described with reference to FIGS. The apparatus for manufacturing a liquid crystal display element according to this embodiment includes a rubbing cloth or a rubbing resin sheet 1.
3 is a manufacturing apparatus adapted to detect a defect and correct the defect based on the detection result.

The apparatus for manufacturing this liquid crystal display element has an optical system 3
, A surface condition detection system 4, a foreign matter removal system 5, a defect detection system 6, and a rubbing hair straightening system 7.

The optical system 2 and the foreign matter removing system 5 have the same configuration as the embodiment shown in FIG. The surface state detection system 4 has the configuration of the surface state detection system 4 shown in FIG.
The difference is that a luminance measuring means 45 for measuring the average luminance is provided.

In order to inspect the surface of the rubbing cloth 13 with the optical system 2, the defect detection system 6
3 is a means for sucking and holding 3 and includes a stage 61 and a suction pump 62 for sucking and holding a rubbing cloth or resin sheet 13 on the stage.

The rubbing hair straightening system 7 includes a position control device 71.
, A correction jig 72, a stage 61, and a suction pump 62.

When inspecting a defect of the rubbing cloth, the rubbing cloth 1 having the rubbing hairs 12 planted on the surface thereof is used.
3 is fixed to the stage 61 of the defect detection system 6 by suction, and then receives a signal from the control device 41 and moves in synchronization with the imaging element 32 and the AD converter 42 while moving the rubbing cloth 13.
Shoot the surface of At this time, the optical base 30 may be moved with respect to the stage 61. Also, stage 61
Is an XY stage movable in the X-axis direction and the Y-axis direction, the optical system 3 is fixed, and the stage 61 of the defect detection system 6 is moved in the X-Y direction to obtain the rubbing cloth 1.
3 may be scanned. Rubbing cloth 1
The surface of the rubbing cloth 13 can be scanned by relatively moving the optical system 3 and the optical system 3. Among the defects detected by this scanning, the defect based on the foreign matter can be removed by the function of the foreign matter removing system 5.

The data from the imaging element 32 is processed in the same manner as in the embodiment shown in FIG.
The defect on the surface of No. 3 can be detected. Data relating to the position of the defective portion of the rubbing cloth 13 is stored in storage means (not shown) of the surface state detection system 4.

Next, in order to correct the defect of the rubbing hair 12 on the basis of the obtained defect position data, the rubbing cloth 13 in which the defect has been detected is sucked and held on the stage 61 of the rubbing hair correction system 7 and controlled. The position control device 71 is controlled by a control signal generated based on the position data of the defective portion from the device 41 to move the correction jig 72 to the defective portion and correct the defect on the rubbing cloth 13.

As the correction jig 72, a comb-shaped jig, a suction nozzle for sucking foreign matter, and the like can be used.

The luminance measuring section 45 calculates the average luminance of the reflected light L2 from the rubbing cloth 13. Since the rubbing hair raising direction d1 is aligned in a certain direction, there is a correlation between the rubbing hair raising direction d1 and the reflected light average luminance as shown in FIG. By utilizing this relationship, the rubbing hair raising direction d1 can be obtained.

According to this embodiment, it is possible to detect a defective portion of the rubbing hair of the rubbing cloth, which causes rubbing unevenness, and to control, sort, and correct the quality of the rubbing cloth. Manufacturing costs can be reduced by improving and preventing occurrence of defects.

In the description of this embodiment, the defect detection system 6
And the rubbing hair straightening system 7 are described as being separately configured. However, the position control device 71 and the correction jig 7
By providing 2, the defect of the rubbing cloth 13 detected by the defect detection system 6 can be corrected without transferring the rubbing cloth 13 to the defect correction system 7.

A rubbing cloth inspection method in the rubbing cloth acceptance inspection and the rubbing process according to the present invention will be described with reference to FIG. When a rubbing cloth or a resin sheet 13 for manufacturing a liquid crystal display element is received (S1), FIG.
Rubbing cloth or resin sheet 1
The defect 3 is inspected, and a usable rubbing cloth or resin sheet 13 is selected (S2). The rubbing cloth or resin sheet 13 determined to be usable is attached to the rubbing roller 1 of the liquid crystal display element manufacturing apparatus shown in FIG. 1 (S3).

Next, the rubbing roller 1 attached to the manufacturing apparatus is inspected (S4), and if usable, a rubbing process is executed (S5). After rubbing a predetermined number of times, the manufacturing apparatus shown in FIG. 1 inspects the rubbing roller for defects (S4). If the inspection result exceeds a predetermined threshold, the rubbing cloth is removed and discarded. By inspecting the rubbing roller 1 before or after the rubbing treatment of the alignment film of the liquid crystal display element, the rubbing treatment of the alignment film can be performed using an appropriate rubbing roller.

As a result of the inspection of the rubbing cloth at the time of acceptance in step S2, if a defect exists beyond a predetermined range, the rubbing cloth 13 is corrected by the rubbing hair straightening system 7 (S6), and then the rubbing cloth is re-formed. Inspect for defects (S
7). As a result, the rubbing cloth 13 whose defect has been corrected and can be used can be used for the rubbing treatment. As a result of the inspection in step S7, a rubbing cloth or a resin sheet 13 in which a defect exceeds a predetermined depth is discarded as unusable.

If it is determined in step S4 that the rubbing cloth cannot be used, the rubbing cloth is removed from the rubbing roller, and a new rubbing cloth is attached.

The manufacturing apparatus shown in FIG. 1 can inspect the rubbing roller 1 for defects during the rubbing process.
If the inspection result exceeds a predetermined threshold, the rubbing process may be stopped and the rubbing cloth may be replaced.

According to the present invention, a rubbing cloth or a resin sheet can be managed, and the occurrence of defects in the alignment film of the liquid crystal display element can be prevented beforehand. Prevention can reduce manufacturing costs.

[0065]

According to the present invention, it is possible to detect a defective portion of the rubbing hair (for example, disorder in the direction of raising the hair, length, thickness, surface condition, etc.), which is a major cause of the uneven rubbing treatment. It is possible to manage, sort, and correct rollers, rubbing cloths, or rubbing resin sheets. As a result, rubbing unevenness can be reduced, so that display quality can be improved and manufacturing cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram for explaining the outline of the structure of a liquid crystal display element manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is a view showing an example of an image detected by the liquid crystal display element manufacturing apparatus of FIG. 1;

FIG. 3 is a luminance sectional view taken along the line AA in FIG. 2;

FIG. 4 is a luminance cross-sectional view after correction in FIG. 3;

FIG. 5 is a block diagram for explaining the outline of the structure of a device for manufacturing a liquid crystal display element according to a second embodiment of the present invention.

FIG. 6 is a diagram illustrating a correlation between a rubbing hair raising direction and reflected light average luminance.

FIG. 7 is a flowchart for explaining a mode of processing according to a third embodiment of the present invention;

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 rubbing roller 11 roller rotating shaft 12 rubbing hair 120 defective part 121 image example of low rubbing hair density part 122 image example of long rubbing hair part 123 foreign matter image example 124 defect part size 13 rubbing cloth or rubbing resin Sheet 2 Roller driving device 3 Optical system 30 Optical base 31 Illumination device 32 Imaging element 33 Detection lens 4 Surface condition detection system 41 Control device 42 AD converter 43 Defect detection unit 44 Alarm generation device 5 Foreign material removal system 51 Foreign material removal nozzle 52 Suction device Reference Signs List 6 defect detection system 61 stage 62 suction pump 7 rubbing hair straightening system 71 position control device 72 straightening jig A average luminance d1 rubbing hair raising direction I detected reflected light luminance L1 illumination light L2 reflected light R corrected average luminance S1 detection System optical axis SH Upper limit threshold of brightness SL Lower threshold of time

Continuation of the front page (72) Inventor Hiroshi Saeki 3300 Hayano, Mobara-shi, Chiba F-term in the Display Group, Hitachi, Ltd. (Reference) 2H090 MB02 MB03 MB05

Claims (17)

[Claims] 1. A rubbing treatment for an alignment film of a liquid crystal display device having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrates. In the inspection method of the rubbing cloth,
Irradiating illuminating light in a direction substantially perpendicular to a rubbing cloth attached to the rubbing roller for performing the rubbing treatment and in a direction in which an angle between the rubbing direction of the rubbing hair attached to the rubbing roller and the raising direction is acute; A method for inspecting a rubbing cloth, comprising detecting reflected light of the rubbing hair from a direction substantially 90 degrees from the irradiation direction of the rubbing hair and inspecting a defective portion. 2. A structure in which a liquid crystal is sandwiched between two substrates, and is used for rubbing an alignment film of a liquid crystal display element having an alignment film for aligning the liquid crystal on at least one of opposing surfaces of the substrates. In the rubbing roller inspection method, the illuminating light is irradiated from a direction that is substantially tangential to the rubbing roller that performs the rubbing process during the rubbing process and that forms an acute angle with the rubbing direction of the rubbing hair attached to the rubbing roller. A rubbing roller inspection method characterized in that the state of the rubbing hair or the foreign matter is monitored by detecting reflected light from the rubbing hair or the foreign matter from a direction substantially 90 degrees from the irradiation direction of the illumination light. Method. 3. A rubbing treatment for an alignment film of a liquid crystal display element having a structure in which a liquid crystal is sandwiched between two substrates and having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrates. In the inspection method of the rubbing cloth,
Irradiating the illumination light from a direction that is substantially parallel to the rubbing cloth to be subjected to the rubbing treatment and an angle formed with the raising direction of the rubbing hair attached to the rubbing cloth is an acute angle,
A method for inspecting a rubbing cloth, comprising detecting reflected light of the rubbing hair from a direction substantially 90 degrees from the irradiation direction of the illumination light, and inspecting a defective portion. 4. A structure in which a liquid crystal is sandwiched between two substrates, has an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrates, and performs a rubbing process on the alignment film of the liquid crystal display element. In the rubbing cloth inspection method, irradiating illumination light from a direction that is substantially parallel to the rubbing cloth to be subjected to the rubbing treatment and an angle between the raised direction of the rubbing bristles attached to the rubbing cloth and an acute angle, The reflected light of the rubbing hair is detected from a direction substantially 90 degrees from the irradiation direction of the illumination light, the rubbing hair raising direction is measured from the reflected light luminance, and a rubbing cloth or a resin sheet in a predetermined direction is used. A method for inspecting a rubbing cloth, comprising: 5. The method for inspecting a rubbing cloth or a rubbing roller according to claim 1, wherein the rubbing is carried out while removing foreign substances adhering to the rubbing hair by suction or comb teeth. A method for inspecting a rubbing law or rubbing cloth, comprising inspecting a roller or a rubbing cloth. 6. A structure in which a liquid crystal is sandwiched between two substrates, wherein at least one of the opposing surfaces of the substrates has an alignment film for aligning the liquid crystal, and the alignment film is provided with alignment characteristics. In the method of manufacturing a liquid crystal display element that performs a rubbing process, the illuminating light is emitted from a direction that is substantially tangential to the rubbing roller that performs the rubbing process and that forms an acute angle with the rubbing direction of the rubbing hair attached to the rubbing roller. A liquid crystal display element characterized by using a rubbing roller selected by detecting reflected light of the rubbing hair from a direction substantially 90 degrees from the irradiation direction of the illumination light and inspecting a defective portion. Production method. 7. A structure in which a liquid crystal is sandwiched between two substrates, wherein at least one of the opposing surfaces of the substrates has an alignment film for aligning the liquid crystal, and the alignment film is provided with alignment characteristics. In the method of manufacturing a liquid crystal display element that performs a rubbing process, an angle between the rubbing roller that performs the rubbing process and a rubbing direction of the rubbing hair attached to the rubbing roller is an acute angle during the rubbing process. Irradiating the rubbing hair or foreign matter from the rubbing hair or the foreign matter by detecting the reflected light from the rubbing hair or the foreign matter from a direction substantially 90 degrees from the irradiation direction of the illumination light. Of manufacturing a liquid crystal display element. 8. A structure in which a liquid crystal is sandwiched between two substrates, wherein at least one of the opposing surfaces of the substrates has an alignment film for aligning the liquid crystal, and the alignment film is provided with alignment characteristics. In the method of manufacturing a liquid crystal display element for performing a rubbing process, the rubbing cloth for performing the rubbing process or the rubbing cloth substantially parallel to the resin sheet and the rubbing direction of the rubbing bristles attached to the rubbing cloth or the resin sheet. The rubbing cloth irradiated by illuminating light from a direction in which the angle formed becomes an acute angle, the reflected light of the rubbing hair is detected from a direction substantially 90 degrees from the irradiation direction of the illuminating light, and the rubbing cloth or the rubbing cloth selected by inspecting the defective portion or A method for manufacturing a liquid crystal display element, comprising using a resin sheet. 9. A structure in which a liquid crystal is sandwiched between two substrates, wherein at least one of the opposing surfaces of the substrates has an alignment film for aligning the liquid crystal, and the alignment film is provided with alignment characteristics. In the method of manufacturing a liquid crystal display element for performing a rubbing process, the rubbing cloth for performing the rubbing process or the rubbing cloth substantially parallel to the resin sheet and the rubbing direction of the rubbing bristles attached to the rubbing cloth or the resin sheet. The illuminating light is irradiated from a direction in which the angle formed becomes an acute angle, the reflected light of the rubbing hair is detected from a direction substantially 90 degrees from the irradiation direction of the illuminating light, and the raising direction of the rubbing hair is measured from the reflected light luminance. And a rubbing cloth or a resin sheet in a predetermined direction. 10. The method according to claim 6, wherein:
The method for producing a liquid crystal display element according to the above item, wherein a rubbing roller or a rubbing cloth or a resin sheet is inspected while removing foreign substances adhering to the rubbing hair by suction or removing with comb teeth or the like. Device manufacturing method. 11. The method for manufacturing a liquid crystal display device according to claim 8, wherein the detected defective portion is corrected using a jig such as a comb and then used. 12. A rubbing structure having a structure in which a liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrates, and imparting alignment characteristics to the alignment film. In a manufacturing apparatus of a liquid crystal display element for performing processing, a device for rotating a roller, a unit for irradiating illumination light, a unit for optically extracting a defect, a unit for removing a foreign substance, and a unit for generating an alarm are provided. While the rubbing roller performing the rubbing process is rotated by roller rotating means, the foreign matter removing means removes foreign matter attached to the rubbing cloth or resin sheet attached to the rubbing roller, and the illuminating means removes the foreign matter attached to the rubbing roller. The cloth or resin sheet is irradiated with illumination light, and the reflected light from the rubbing cloth or resin sheet is used to extract a defective portion by the defect extracting means. An apparatus for manufacturing a liquid crystal display element, wherein an alarm is generated by the alarm generating means when the minute exceeds a preset threshold. 13. A rubbing structure having a structure in which a liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of the opposite surfaces of the substrates, and imparting alignment characteristics to the alignment film. In a manufacturing apparatus of a liquid crystal display element for performing a treatment, a means for sucking and fixing a rubbing cloth or a resin sheet for performing the rubbing treatment, a means for irradiating illumination light, a means for optically extracting defects, and Means for removing, means for moving the defect detection means relative to the rubbing cloth or resin sheet, and means for generating an alarm, wherein the rubbing cloth or resin sheet is While fixing and removing the foreign matter adhering to the rubbing cloth or the resin sheet by the foreign matter removing means, use the moving means to adsorb and fix the defect and the defect extraction. The relative position of the means is changed, the illuminating means irradiates the rubbing cloth or the resin sheet with illumination light, and the reflected light from the rubbing cloth or the resin sheet is used to extract a defective portion by the defect extracting means, An alarm is generated by the alarm generation means when the threshold value exceeds a preset threshold value. 14. An apparatus for manufacturing a liquid crystal display element according to claim 13, further comprising a defect correcting means, wherein the defect portion extracted by said defect extracting means is corrected. 15. A rubbing structure having a structure in which a liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrates, and imparting alignment characteristics to the alignment film. In a manufacturing apparatus of a liquid crystal display element for performing a treatment, a means for sucking and fixing a rubbing cloth or a resin sheet for performing the rubbing treatment, a means for irradiating illumination light, and a rubbing cloth or a resin sheet brushed in a certain direction. Means for measuring reflected light luminance from the light source, means for removing foreign matter, means for moving the reflected light luminance measuring means relative to the rubbing cloth or resin sheet, and means for generating an alarm. A rubbing cloth or a resin sheet is fixed by the suction fixing means, and a foreign substance attached to the rubbing cloth or the resin sheet is removed by the foreign substance removing means. The relative position of the suction fixing means and the reflected light luminance measuring means is changed using the moving means, and the illuminating means irradiates the rubbing cloth or the resin sheet with illumination light, and the reflected light luminance measuring means is used. The apparatus for producing a liquid crystal display element according to claim 1, wherein the luminance of reflected light from a rubbing cloth or a resin sheet is measured by the following method, and an alarm is generated by said alarm generation means when a predetermined threshold is exceeded. 16. A rubbing structure having a structure in which a liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of opposing surfaces of the substrates, and imparting alignment characteristics to the alignment film. In the method of manufacturing a liquid crystal display element for performing a treatment, after selecting a rubbing cloth or a resin sheet to be subjected to a rubbing treatment by the means described in the above item 13, the rubbing cloth or the resin sheet is attached to a rubbing roller. A rubbing roller is selected by a manufacturing apparatus, rubbed with a rubbing roller determined to be usable, and rubbed during or after a predetermined number of times, and then inspected by a liquid crystal display element manufacturing apparatus according to claim 12. A liquid crystal display characterized by replacing a rubbing cloth or a resin sheet when a predetermined threshold is exceeded. A method for manufacturing a display element. 17. A rubbing structure having a structure in which a liquid crystal is sandwiched between two substrates, having an alignment film for aligning the liquid crystal on at least one of the opposing surfaces of the substrates, and imparting alignment characteristics to the alignment film. In a method of manufacturing a liquid crystal display element for performing a process, a rubbing cloth or a resin sheet is selected by the manufacturing apparatus according to claim 13, and the rubbing roller is monitored by the manufacturing apparatus according to claim 12 during production. A method for manufacturing a liquid crystal display element characterized by the following.