JP2002240883A5 - - Google Patents

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Publication number
JP2002240883A5
JP2002240883A5 JP2001040877A JP2001040877A JP2002240883A5 JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5 JP 2001040877 A JP2001040877 A JP 2001040877A JP 2001040877 A JP2001040877 A JP 2001040877A JP 2002240883 A5 JP2002240883 A5 JP 2002240883A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001040877A
Other languages
Japanese (ja)
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JP2002240883A (ja
JP4562930B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001040877A priority Critical patent/JP4562930B2/ja
Priority claimed from JP2001040877A external-priority patent/JP4562930B2/ja
Publication of JP2002240883A publication Critical patent/JP2002240883A/ja
Publication of JP2002240883A5 publication Critical patent/JP2002240883A5/ja
Application granted granted Critical
Publication of JP4562930B2 publication Critical patent/JP4562930B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2001040877A 2001-02-16 2001-02-16 ダイシングウェーハ収納容器 Expired - Lifetime JP4562930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001040877A JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001040877A JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Publications (3)

Publication Number Publication Date
JP2002240883A JP2002240883A (ja) 2002-08-28
JP2002240883A5 true JP2002240883A5 (enrdf_load_stackoverflow) 2007-12-20
JP4562930B2 JP4562930B2 (ja) 2010-10-13

Family

ID=18903393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001040877A Expired - Lifetime JP4562930B2 (ja) 2001-02-16 2001-02-16 ダイシングウェーハ収納容器

Country Status (1)

Country Link
JP (1) JP4562930B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006282278A (ja) 2005-03-10 2006-10-19 Epson Toyocom Corp ウェハー用梱包体
JP2009076646A (ja) * 2007-09-20 2009-04-09 Shin Etsu Polymer Co Ltd 基板保持具
CN103681418A (zh) * 2012-09-25 2014-03-26 昆山英博尔电子科技有限公司 一种十二寸晶圆框架
US9666468B2 (en) 2013-02-11 2017-05-30 Achilles Corporation Tray for a wafer with tape frame
SG11201704304XA (en) 2014-11-27 2017-06-29 Achilles Corp Ring spacer
JP7032086B2 (ja) * 2017-09-15 2022-03-08 アキレス株式会社 板状物搬送容器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2733674B2 (ja) * 1988-12-29 1998-03-30 株式会社ディスコ ウエーハ塔載フレームのプリアライメント方法
JPH08207986A (ja) * 1994-12-07 1996-08-13 Nitto Denko Corp 半導体ウエハの運搬容器
JP3472685B2 (ja) * 1997-05-28 2003-12-02 アキレス株式会社 半導体ウェハ収納容器
JP2001007056A (ja) * 1999-06-17 2001-01-12 Shin Etsu Polymer Co Ltd ウェーハフレーム

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