JP2002229041A - Method for manufacturing liquid crystal display device, and liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid crystal display device, in which the distance be tween a pair of substrates filling and sealing a liquid crystal therein is kept constant for the purpose of not deteriorating picture quality of the liquid crystal display device and further preventing light transmission efficiency from lowering due to spacers being arranged in a pixel region, and to provide a method for manufacturing the same. SOLUTION: The spacers 1 are arranged on a temporary substrate 4, in advance, with an internal equal to a pixel pitch on a device substrate 7. After transferring the spacers 1 to the device substrate 7, only the spacers 1 on column electrodes 9 are made to stick by ultraviolet ray irradiation and so on. By this method, improvement in the image quality and price-reduction of the liquid crystal display device are realized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display device in which a liquid crystal material is sealed between a pair of substrates and a liquid crystal display device, and more particularly, to a spacer for maintaining a constant distance between the device substrate and a counter substrate. The present invention relates to a method for manufacturing a liquid crystal display device to be arranged at a position, and a liquid crystal display device.

[0002]

2. Description of the Related Art Generally, in a liquid crystal display device, a liquid crystal material is sealed between a pair of substrates, and a voltage applied between electrodes sandwiching the liquid crystal material is changed to change a state of the liquid crystal to display a desired image or the like. are doing. The gap between the pair of substrates in which the liquid crystal material is sealed is extremely narrow, for example, 4 μm to 5 μm.
There is only a gap of about μm. Therefore, in order to make the gap between the substrates constant over the entire screen, in a conventional liquid crystal display device, a spacer composed of plastic beads, silica spheres, or the like is widely spread between the substrates.

However, in this method of dispersing the spacers, the spacers are dispersed substantially uniformly on one of the substrates by using a required spacer dispersing device. There is a problem in that the spacers are arranged and the image quality is deteriorated due to a decrease in the light use efficiency of the pixel region. In order to solve this problem, there has been proposed a method of manufacturing a liquid crystal display device in which spacers are arranged in non-light-transmitting regions such as electrodes and elements other than pixel electrodes.

First, JP-A-6-67135 discloses that
A method has been proposed in which a spacer formed of a rod-like member formed in advance on a substrate different from the array substrate and the counter substrate is transferred to a non-light-transmitting region of the array substrate. According to the technique described in this publication, a resin pillar-shaped spacer is formed in a predetermined position on another substrate in advance by photolithography and electrodeposition, and after transferring to a non-light-transmitting region of the array substrate, the opposing substrate is overlaid. A liquid crystal material is filled between these substrates and sealed to form a liquid crystal display device.

In Japanese Patent Application Laid-Open No. 11-337951, a convex portion is formed on a transfer source substrate so as to correspond to a spacer transfer planned position on an apparatus substrate, and a spacer is transferred from the convex portion of the transfer substrate. A way to do that has been proposed. In the method described in this publication, the device substrate is preheated by a hot plate or infrared irradiation or the like, and when the transfer substrate is overlaid on the device substrate, only the spacers scattered on the projecting portions of the transfer substrate are used. Since the spacer comes into contact with the spacer arrangement area, the spacer is adhered and fixed only at the arrangement position, which is a non-light-transmitting area.

In the technique described in Japanese Patent No. 2,536,457, when a spacer is transferred, attention is paid to a selective light transmission function of a color filter, and a black matrix portion is positively charged and a spacer is provided on the portion. Is attached, and at the same time, a spacer is not attached in a light transmitting area such as a display portion, thereby achieving selective transfer.

[0007]

SUMMARY OF THE INVENTION However, Japanese Patent Laid-Open No.
In the method disclosed in Japanese Patent No. 67135, since a spacer is formed at a predetermined position on a substrate different from the device substrate and the counter substrate, the processing step is complicated, and a rod-shaped spacer is formed by electrodeposition. Since it is formed, it is difficult to obtain the necessary dimensional accuracy of the spacer. As a result, the distance between the device substrate and the counter substrate cannot be kept constant.

In the method disclosed in Japanese Patent Application Laid-Open No. 11-337951, since heat is used when transferring the spacer, heat resistance of the entire device is required. It becomes difficult to use a plastic or the like having low heat resistance as the device substrate. In the technique disclosed in Japanese Patent No. 2536457, the spacer is transferred by an electrostatic attraction mechanism. However, in the case of using the electrostatic attraction mechanism, the charging may not be uniform, and in that case, the transfer of the spacer may not be uniform. In addition, the use of electrostatic attraction causes the substrate and the like to be partially charged, which causes dust and other problems.

Therefore, the present invention solves the problems in the above-described method, and keeps the distance between a pair of substrates for sealing a liquid crystal constant so as not to deteriorate the image quality of the liquid crystal display device.
Further, it is an object of the present invention to provide a method of manufacturing a liquid crystal display device and a liquid crystal display device that prevent a decrease in light transmission efficiency due to a spacer being arranged in a pixel region.

[0010]

According to a method of manufacturing a liquid crystal display device of the present invention, a step of arranging a plurality of spacers on a flat jig; a step of transferring the plurality of spacers to a temporary substrate; Removing the part of the plurality of spacers and thinning out, forming an adhesive layer in a spacer transfer scheduled area on the device substrate, and removing a part of the remaining spacers thinned out from the plurality of spacers to the device substrate. Transferring onto an adhesive layer.

According to the method of manufacturing a liquid crystal display device of the present invention, since a plurality of spacers are arranged on a flat jig and then transferred to the temporary substrate, the plurality of spacers are arranged side by side on the temporary substrate. Will be done. Thereafter, the combination of the thinning step on the temporary substrate and the step of forming an adhesive layer in the spacer transfer planned area on the device substrate makes it possible to limit the position where the spacer is provided to the spacer transfer planned area, Because of the combination of thinning,
Spacers can be accurately arranged.

According to one example of the method of manufacturing the liquid crystal display device of the present invention, the flat jig has a flat portion and a projecting portion projecting from the flat portion, and the plurality of spacers are formed on the flat portion. After the mounting, by tilting the flat jig, a part of the spacer comes into contact with the protruding portion, and the plurality of spacers are closely packed on the flat plate. In one embodiment of the present invention, the plurality of spacers are thinned out on the temporary substrate so as to form a plurality of strip-shaped arrays separated from each other by a pixel pitch of the liquid crystal display device, and function as a mask for selective exposure. The non-light-transmitting region intersects the plurality of band-shaped arrays, and a spacer on the temporary substrate is transferred to the intersection. The adhesive layer can be formed only in the non-light-transmitting region by the selective exposure, and the transfer of the spacer to the crossing portion can be easily realized.
In addition, when the adhesive layer or the resin layer is of an electron beam curing type,
Excessive heat is not transmitted to the substrate or element, and a short-time treatment by irradiation is also realized.

In another aspect of the present invention, a method of manufacturing a liquid crystal display device includes the steps of: forming a plurality of pixel control elements on an element forming substrate; forming a spacer on the pixel control elements; Transferring the formed pixel control elements together with the spacers onto a device substrate.

According to the manufacturing method, since the spacer is formed on the pixel control element for controlling the pixel of the liquid crystal display device, the transfer with the spacer is performed when the pixel control element is transferred. Since the pixel control element is originally a region through which light does not pass, the liquid crystal display device can be manufactured without lowering the aperture ratio of the liquid crystal display device.

The liquid crystal display device according to the present invention is characterized in that a plurality of spacers are separated from each other by a pixel pitch of the liquid crystal display device on a non-light transmitting region of the device substrate.
By arranging a plurality of spacers that are separated from each other by the pixel pitch on the non-light-transmitting area, the spacers are separated by the pixel pitch without lowering the aperture ratio of the liquid crystal display device. Becomes possible.

In another liquid crystal display device according to the present invention, pixel control elements are arranged on a device substrate, and a plurality of spacers are formed on the pixel control device to keep an interval between the device substrate and the counter substrate. It is characterized by having. When transferring the pixel control element, the transfer with the spacer is performed. Since the pixel control element is an area that does not originally transmit light, the aperture ratio of the liquid crystal display device is not reduced.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] A first embodiment of a method for manufacturing a liquid crystal display device according to the present invention will be described with reference to the drawings. 1 to 9 are diagrams showing a method of manufacturing a liquid crystal display device for transferring a spacer to a region where a spacer is to be arranged other than a pixel electrode on a device substrate in the order of steps, and the manufactured liquid crystal display device is an active matrix type. It is a liquid crystal display device.

First, as shown in a plan view of FIG. 1A and a sectional view of FIG. 1B, a plurality of spacers 1 are arranged on a flat plate 2f of a flat jig 2 having a ridge 3. Then, a more closely packed spacer row composed of a large number of spacers is formed on the flat plate jig 2. Here, the flat jig 2 is a synthetic resin plate,
It is a plate-like member made of a metal plate, a glass plate, or the like, and has a substantially flat surface, and the area of the rectangular flat plate portion 2f is set to a size that covers the entire display portion of the liquid crystal display device to be manufactured. The ridge 3 is an edge formed by projecting the end of the rectangular flat plate 2f in the vertical direction from the surface of the flat plate 2f. The height of the ridge 3 is about 4 μm. is there.
The ridge portion 3 is a linear portion 3 linearly extending along two edges with at least one corner 3c of the flat jig 2 interposed therebetween.
a and 3b. The linear portions 3a, 3b of the ridge 3
Need not necessarily be located at the edge of the flat jig 2.

Spacers 1 arranged on the flat jig 2
May be a known spacer 1 such as a plastic bead or a silica sphere, for example.
Has a substantially spherical shape. As the shape of the spacer 1, besides a spherical shape, a close-packable shape such as a cylinder, a prism, or a cube can be used. The plurality of spacers 1 have substantially the same diameter, and the diameter corresponds to the gap in which the liquid crystal material is sealed. In the present embodiment, the diameter is about 5 μm, for example.

When arranging a plurality of spacers 1 on the flat jig 2, the flat portion 2f is set with the corner 3c of the flat jig 2 facing downward.
Is tilted so that the corner 3c is on the lower side, so that gravity acts on each spacer 1 so as to move toward the corner 3c. As a result, as shown in FIG. A spacer layer that is closest-packed is formed based on the corner 3c.
Here, the spacers 1 are arranged linearly with reference to the linear portion 3b of the flat jig 2, and the interval L1 is about 4.33 μm.

After the spacers 1 are arranged in a substantially close-packed state on the flat plate jig 2 in this manner, the spacers 1 are maintained in the closest-packed state, for example, as shown in FIG. The temporary substrate 4 coated with the resin layer 5 is attached to the spacer 1 side of the flat jig 2 while the flat jig 2 on which the spacers 1 are arranged is inclined obliquely. The temporary substrate 4 is made of a light transmissive material, and for example, a glass substrate is used. A resin layer 5 is applied to the surface of the temporary substrate 4 made of glass or the like by a printing method, a spin coating method, or the like. The resin layer 5 is made of a synthetic resin whose adhesive strength is reduced by being irradiated with ultraviolet rays as described later. As such a resin layer 5, an acrylic resin to which silicon (meth) acrylate is added, an ultraviolet-curable pressure-sensitive adhesive whose adhesive strength is reduced by ultraviolet irradiation, or the like is used. On the surface of the temporary substrate 4 opposite to the resin layer 5, a mask 6 extended in the row direction (extending direction of the row electrodes) of the liquid crystal display device to be manufactured is formed. The mask 6 corresponds to, for example, the pixel pitch (270 μm as an example) of the liquid crystal display device, and corresponds to the spacer 1.
Has a pattern spaced 62 lines or 63 lines apart. That is, the interval L1 on the flat jig 2 is about 4.3.
3 μm, and a pattern in which one row is left for every 62 or 63 rows, the pixel pitch (for example, 270
One line is masked for each μm). Flat jig 2
The spacers 1 which are arranged in a close-packed state on the substrate 1 are in contact with the resin layer 5 of the temporary substrate 4 while being held by the flat jig 2, and are temporarily held there.

After the spacers 1 arranged almost in a close-packed state are held on the resin layer 5 as described above, as shown in FIG.
An electromagnetic wave (or an energy beam) such as ultraviolet rays that penetrates the temporary substrate 4 is irradiated, and the resin layer 5 in the region 5e irradiated with such ultraviolet rays or the like reduces its adhesive strength, and is irradiated with ultraviolet rays or the like by the mask 6. The resin layer 5 in the region 5m that has not been left maintains its adhesive strength. Therefore, since the mask 6 has such a pattern that one row remains every 62 or 63 rows of the spacer 1, the area 5m of the resin layer 5 formed for one row every 62 or 63 rows of the spacer 1 A plurality of spacers 1 are held only on the upper side. In the region 5e irradiated with another ultraviolet ray or the like, the adhesive strength of the resin layer 5 is reduced, and the spacer 1 held in the region 5e is removed from the temporary substrate 4 and thinned out.
When irradiating with ultraviolet rays or the like using the mask 6, the flat jigs 2 may be kept as they are, but the irradiation with ultraviolet rays or the like may be performed by removing the flat jigs 2.
Further, in the present embodiment, the mask 6 is formed directly on the temporary substrate 4, but it is possible to scan a spot-like or linear ultraviolet ray,
Alternatively, the mask 6 may be formed between the temporary substrate 4 and the resin layer 5.

FIG. 4 is a view showing a state in which the spacers 1 are thinned out on the temporary substrate 4.
Are provided side by side. The spacers 1 are provided at intervals such that adjacent spacers 1 are substantially in contact with each other in the row direction. Will be done. The mask 6 formed on the temporary substrate 4 is removed.

Next, FIG. 5 shows that an insulating film 8 is formed on a device substrate 7 which is an array substrate of a liquid crystal display device, a column electrode 9 and a pixel electrode 10 are formed thereon, and an alignment film 11 is formed. The step of applying an ultraviolet curable resin layer to the structure is shown.
The device substrate 7 can be formed of a light-transmitting glass substrate. In particular, in the present embodiment, since a process without heat treatment can be performed by UV irradiation or the like, a light-transmitting plastic substrate or the like is used. It is also possible.
Examples of such a plastic substrate include a polycarbonate resin and a polyethylene terephthalate resin (PE).
T) or polyethersulfone resin (PES) can be used. The insulating film 8 can be composed of a light-transmitting silicon oxide film or silicon nitride film. The pixel electrode 10 is formed of a transparent electrode such as an indium oxide (ITO) film, and the alignment film 11 is formed of, for example, a polyimide film, a polyamide film, a polyimide amide film, a polypeptide alcohol film, or the like. Pixel electrode 10
Is an electrode which is opposed to a common electrode formed on a later-described opposing device substrate and is used to change the alignment state of a liquid crystal material located therebetween by changing the voltage applied between these electrodes. The alignment film 11 is a polymer material film formed to promote the alignment of the liquid crystal material, and has been subjected to a rubbing treatment or the like. The column electrode 9 is an electrode extending in the column direction of the device substrate 7, and is a metal film that does not transmit light.
It is formed by patterning a metal silicide film or the like so that the longitudinal direction is the column direction. In the present embodiment, the interval between the column electrodes 9 is one pixel (about 2 pixels) in three colors of RGB.
70 μm), the column electrodes 9 are arranged at intervals of about 90 μm.

The column electrode 9 and the pixel electrode 10 are covered with an alignment film 11, and a UV-curable resin layer is formed on the surface of the alignment film 11 by using a mask having an opening at the position of the column electrode 9. It is patterned by the printing method used. Since the adhesive layer 12c of the ultraviolet curable resin layer is extended in the column direction, the spacer 1 on the temporary substrate 4 extended in the row direction described above.
And intersect at right angles.

Next, the temporary substrate 4 and the device substrate 7 are opposed to each other, and as shown in FIG.
Paste. At this time, a part of the spacer 1 formed on the temporary substrate 4 via the resin layer 5 is a part of the adhesive layer 1 which is a part of the ultraviolet curable resin layer reflecting the pattern of the column electrode 9.
Touch 2c. In this state, ultraviolet rays are irradiated from the temporary substrate 4 side. Then, the resin layer 5 on the temporary substrate 4 receives the light transmitted through the temporary substrate 4 to reduce the adhesive strength, and the adhered spacer 1 is separated from the resin layer 5. At the same time as the separation by the ultraviolet irradiation, the adhesive layer 1 of the ultraviolet curable resin layer
On the surface of 2c, the spacer 1 detached from the temporary substrate 4 side
Adheres securely to the surface of the adhesive layer 12c of the ultraviolet-curable resin layer. Spacer 1 from temporary substrate 4 onto device substrate 7
During the transfer, the temporary substrate 4 can be pressed against the device substrate 7, and when a glass substrate having high heat resistance is used as the device substrate 7, the ultraviolet curable resin layer Instead, a method in which a hot-melt thermosetting resin or the like is used and heating is performed until immediately before bonding the temporary substrate 4 can be used.

As described above, the arrangement of the spacers 1 on the temporary substrate 4 is a plurality of patterns extending in the row direction, while the adhesive layer 12c of the UV-curable resin layer is a column which is a non-light-transmitting region. Since the electrodes 1 are formed in a pattern extending in the column direction, the spacers 1 located at the intersections are transferred from the temporary substrate 4 onto the device substrate 7. Since each transfer corresponds to the pixel pitch, one spacer 1 is transferred per pixel. Further, since the pixel pitch (about 270 μm) is set to an integral multiple of the diameter of each spacer 1, one spacer 1 is surely positioned at the intersection to perform transfer. At the time of transfer, the spacers 1 on the temporary substrate 4 that do not contact the adhesive layer 12c of the ultraviolet-curable resin layer on the device substrate 7 are mounted on the flat jig 2 again without being transferred to the device substrate 7.

After the transfer of the spacer 1 from the temporary substrate 4 onto the device substrate 7, the temporary substrate 4 is peeled off to obtain a state shown in FIG. In this state, a process for enhancing the adhesive strength of the adhesive layer 12c of the ultraviolet curable resin layer on the device substrate 7 can be added. The spacer 1 is arranged at one of the intersections for each pixel. FIG. 8 shows a plan view of the device substrate 7 to which the thinned spacer 1 is transferred. A row electrode 13 and a column electrode 9 are wired on the device substrate 7, and a pixel electrode 10 and a sub-pixel electrode 15 are formed in a unit lattice surrounded by the row electrode 13 and the column electrode 9 shown in FIG. . One color of RGB (red, green, blue) is displayed by one unit lattice, and one pixel having a pitch of 270 μm is formed by using a set of three lattices continuous in parallel with the row electrodes 13. A row electrode 16 for forming the storage capacitor 14 is wired in parallel with the row electrode 11. In addition, a thin film transistor element 17 schematically shown is formed at the intersection of the row electrode 13 and the column electrode 9. In addition,
FIG. 7 is a sectional view taken along line AA of the plan view of FIG.

Next, FIG. 9 shows a state in which the opposing device substrate 24 is combined, and the liquid crystal material 28 is sealed in the gap between the opposing device substrate 24 and the device substrate 7. At this time, since the spacers 1 provided for each pixel surely keep the gap between the opposing device substrate 24 and the device substrate 7 uniform at substantially the same diameter as the spacers 1, it is possible to guide a good liquid crystal display. Can be.
The opposing device substrate 24 can be made of a glass substrate having optical transparency.
Since processing without heat treatment can be performed by V irradiation or the like, a light-transmitting plastic substrate or the like can be used. Examples of such a plastic substrate include polycarbonate resin, polyethylene terephthalate resin (PET) and polyethylene sulfone resin (PE).
S) can be used. Further, a color filter 25 layer having a black matrix 23 is laminated on the opposing device substrate 24, and has a transparent common electrode 22 on the inside and an alignment film 21 on the inside. The material of the alignment film 21 is the same as that of the alignment film 11 on the device substrate 7,
For example, it is formed of a polyimide film, a polyamide film, a polyimide amide film, a polypeptide alcohol film, or the like.

According to the method of manufacturing the liquid crystal display device of the present embodiment, the spacer 1 transferred from the temporary substrate 4
However, since the distance between the pair of substrates 7 and 24 for sealing the liquid crystal material 28 is kept constant, the image quality of the liquid crystal display device can be kept good. The spacers 1 are reliably transferred only to the intersecting portions of the adhesive layer 12c corresponding to the thinning step corresponding to the pixel pitch and the column electrode pattern, and the spacers 1 are uniformly distributed over the entire screen. The thinning step in accordance with the pixel pitch and the step of forming the adhesive layer 12c in accordance with the column electrode pattern are set so as to be based on an integral multiple of the spacer 1. The spacer 1 will be located only at. In addition, since the adhesion and peeling of the spacer 1 in the adhesive layer and the resin layer are promoted by irradiation of electromagnetic waves such as ultraviolet rays, the process becomes short and does not involve excessive heat. It becomes suitable.

In the above-described embodiment, the spacer 1 is transferred to the array substrate. However, the spacer may be formed on the opposing substrate. Further, although the present embodiment has described the active matrix type liquid crystal display device,
The manufacturing method of the present embodiment can be applied to a simple matrix type liquid crystal display device.

[Second Embodiment] An embodiment of the present invention will be described with reference to the drawings. 10 to 13 are views showing a liquid crystal display device in which a thin film transistor element having a function as a spacer in addition to an original function is arranged in a region other than a pixel electrode of a device substrate, and a method of manufacturing the same.

First, as shown in FIG. 10, a semiconductor film 33 in which a channel region, source / drain regions are formed, and a gate electrode 3 are formed on an element forming substrate 31 such as a glass substrate.
4 are formed. The thin film transistor element 32 and the element forming substrate 31
Between them, a peeling film such as an amorphous silicon film which causes peeling by laser ablation is formed. Although these thin film transistor elements 32 are formed densely, a resin layer 35 such as a polyimide layer or an ultraviolet curable resin layer is formed after these thin film transistor elements 32 are formed.
Coated. The resin layer 35 functions as a spacer described later, and the height of the resin layer 35 becomes a gap between the pair of substrates.

As shown in FIG. 11, an element isolation groove 36 is formed on an element forming substrate 31 by a technique such as etching or dicing to separate the thin film transistor element 32 together with the resin layer 35 for each element. Next, laser ablation is caused by laser irradiation from the back surface of the element formation substrate 31, and the element formation substrate 31 and the thin film transistor element 32 are separated by separation with a separation film. Here, laser ablation means that the fixed material that has absorbed the irradiation light is photochemically or thermally excited,
It means that the bond of atoms or molecules on the surface or inside is broken and released, and it appears mainly as a phenomenon in which all or a part of the fixing material undergoes a phase change such as melting, evaporation, and vaporization.

Next, as shown in FIG.
After the insulating film 42, the pixel electrode 43, and the alignment film 44 are formed thereon, the thin film transistor element 32 having the individual resin layers 35 formed thereon by transfer is disposed at a position not overlapping with the pixel electrode 43. The thin film transistor element 32 provided with the resin layer 35 also functioning as a spacer is shown in FIG.
Not only the position shown in FIG. 2 but also the other non-light-transmitting region on the device substrate. Such transfer can be performed by individual transfer methods using a vacuum chuck,
It is also possible to use a method in which a transfer source substrate and a transfer destination substrate are opposed to each other and are selectively transferred.

After the transfer of the thin film transistor element 32 having the resin layer 35, the opposing device substrate 45 is bonded.
A common electrode 46 and an alignment film 47 are formed inside the opposing device substrate 45. The thin film transistor element 32 is transferred for each pixel, and is disposed on the upper side thereof so as to contact the alignment film 47 of the opposing device substrate 45 so that the resin layer 35 functions as a spacer.

As shown in FIG. 13, finally, a liquid crystal material 48 is sealed. The transferred thin film transistor element 32
A resin layer 35 is formed thereon, and since the resin layer 35 functions as a spacer, the distance between the pair of substrates 41 and 45 that seals the liquid crystal material 48 is kept constant. Can maintain good image quality. The spacer formed of the resin layer 35 is reliably transferred together with the thin film transistor element 32 for each pixel, and the spacer is uniformly dispersed over the entire screen. Further, since the formation of the resin layer 35 proceeds on the element forming substrate 31, the material itself of the device substrates 41 and 45 does not matter when the resin layer 35 and the thin film transistor element 32 are formed.
Therefore, the degree of freedom in selecting the material of the device substrates 41 and 45 is increased, and a low heat-resistant substrate such as a synthetic resin substrate is used as the device substrate 41,
45.

In the above-described embodiment, the thin film transistor element 32 having the resin layer 35 is transferred to the substrate device 41 which is an array substrate. The image may be transferred to the opposite device substrate 45 having the electrodes 46.
In addition, the shape of the resin layer 35 is not particularly limited to a rectangular shape, and may be another shape such as a pointed shape, a prismatic shape, a spherical shape, a cylindrical shape, and only a part of one element is partially used as a spacer. May be provided. The resin layer 35 itself may be a single layer, but may be formed of another adhesive layer or another composite material. Although it is possible to form the resin layer 35 on all of the thin film transistors 32, the resin layer may be formed only on a part of the thin film transistors 32 spaced by a predetermined distance. Also, the element to be transferred is not limited to a thin film transistor element.
A thin film diode element such as an IM element may be used. In addition, the structure is not limited to those in which a resin layer is formed on these active elements. In the case of a structure in which a part of a wiring portion, an electrode, an alignment film, or the like is transferred, a structure in which a portion functioning as a spacer is added thereto. There may be.

[0039]

As described above, according to the method of manufacturing a liquid crystal display device of the present invention, no spacer is provided on the pixel electrode, and the distance between the pair of substrates sealing the liquid crystal can be kept constant. The image quality (contrast) improves as well as the number of parts decreases due to the simplicity of the process,
The liquid crystal display becomes cheap. Further, in the liquid crystal display device of the present invention, by forming a resin on the element to provide a spacer function, the spacer becomes unnecessary, and the mechanical strength of the element is increased and handling becomes easy.

[Brief description of the drawings]

FIGS. 1A and 1B are diagrams showing a process in which a spacer is closely packed in a flat plate jig in a first embodiment of a method for manufacturing a liquid crystal display device of the present invention, wherein FIG. 1A is a plan view and FIG. Is a sectional view.

FIG. 2 is a process cross-sectional view showing a process of transferring a spacer from a flat jig to a temporary substrate in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 3 is a process cross-sectional view showing a process of selective exposure using a mask in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 4 is a process perspective sectional view showing a thinning process of spacers in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 5 is a process cross-sectional view showing a process of forming an adhesive layer made of an ultraviolet curable resin on a device substrate in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 6 is a process cross-sectional view showing a process of transferring a spacer from a temporary substrate to a device substrate in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 7 is a process cross-sectional view showing a state after the spacer is transferred from the temporary substrate to the device substrate in the first embodiment of the method for manufacturing the liquid crystal display device of the present invention, and is a line AA in FIG. It is sectional drawing.

FIG. 8 is a process plan view showing a state after a spacer is transferred from the temporary substrate to the device substrate in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 9 is a process cross-sectional view showing a state where a liquid crystal material is sealed in the first embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 10 is a process cross-sectional view showing a state in which a resin layer is formed after forming elements in the second embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 11 is a process cross-sectional view showing a state where an element isolation groove is formed in a second embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 12 is a process cross-sectional view showing a process of transferring an element with a resin layer in a second embodiment of the method for manufacturing a liquid crystal display device of the present invention.

FIG. 13 is a process cross-sectional view showing a state where a liquid crystal material is sealed in a second embodiment of the method for manufacturing a liquid crystal display device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Spacer 2 Flat jig 3 Ridge part 4 Temporary substrate 5 Resin layer 6 Mask 7 Device substrate 8 Insulating film 9 Column electrode 10 Pixel electrode 11 Alignment film 12c Adhesive layer 13 Row electrode 14 Storage capacitor 17 Thin film transistor element 21 Alignment film 22 Common Electrode 23 Black matrix 24 Opposite side device substrate 25 Color filter layer 28 Liquid crystal material 31 Element forming substrate 32 Thin film transistor element 35 Resin layer 41 Device substrate 45 Opposite side device substrate 48 Liquid crystal material

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H089 LA07 LA12 MA03X QA05 TA01 TA09 TA13 2H090 LA02 5G435 AA02 AA03 AA09 AA17 BB12 CC09 HH14 KK05

Claims (17)

[Claims] A step of arranging a plurality of spacers on a flat jig; and a step of transferring the plurality of spacers to a temporary substrate.
A step of removing a part of the plurality of spacers from the temporary substrate and thinning out, a step of forming an adhesive layer in a spacer transfer planned area on the device substrate, and a part of the remaining spacers thinned out from the plurality of spacers Transferring the liquid crystal onto the adhesive layer of a device substrate. 2. The flat plate jig has a flat plate portion and a projecting portion projecting from the flat plate portion. After the plurality of spacers are placed on the flat plate portion, the flat plate jig is tilted. 2. The method according to claim 1, wherein a part of the spacer abuts on the projecting portion, and the plurality of spacers are closely packed on the flat plate portion. 3. A resin layer holding the plurality of spacers is formed on the temporary substrate, and the adhesiveness of the resin layer is selectively reduced by selective irradiation of an electromagnetic wave, and a part of the plurality of spacers is reduced. 2. The method for manufacturing a liquid crystal display device according to claim 1, wherein the liquid crystal display device is removed and thinned. 4. The liquid crystal according to claim 1, wherein the plurality of spacers are thinned out on the temporary substrate so as to form a plurality of strip-shaped arrangements separated from each other by a pixel pitch of the liquid crystal display device. A method for manufacturing a display device. 5. The method according to claim 4, wherein the pixel pitch is an integral multiple of an arrangement pitch of the plurality of spacers that are closest packed on the flat jig. 6. A non-light-transmitting region and an adhesive layer are laminated on the device substrate, and a part of the adhesive layer is removed by selective exposure using the non-light-transmitting region of the device substrate as a mask. The method for manufacturing a liquid crystal display device according to claim 1, wherein: 7. The plurality of spacers are thinned out on the temporary substrate so as to form a plurality of strips separated from each other by a pixel pitch of the liquid crystal display device, and the non-light-transmitting region is formed of the plurality of strips. 7. The method for manufacturing a liquid crystal display device according to claim 6, wherein the spacer intersects with the arrangement of the above, and the spacer on the temporary substrate is transferred to the intersection. 8. The method according to claim 6, wherein the non-light-transmitting region is a wiring layer. 9. The method for manufacturing a liquid crystal display device according to claim 1, wherein said adhesive layer is an electromagnetic wave curing type resin layer. 10. The temporary substrate is a light-transmitting substrate, and when the temporary substrate and the device substrate are combined, the electromagnetic-wave-curable resin layer is transmitted by the temporary substrate and irradiated with electromagnetic energy. The method for manufacturing a liquid crystal display device according to claim 9, wherein the spacer that is hardened and located at the hardened portion is fixed to the device substrate. 11. The transfer of the spacer according to claim 10, wherein the electromagnetic wave reduces the adhesiveness of a resin layer formed on the temporary substrate when transmitting through the temporary substrate, thereby promoting the transfer of the spacer. A method for manufacturing a liquid crystal display device. 12. The method according to claim 1, wherein the device substrate is a synthetic resin substrate. 13. A liquid crystal display device comprising a plurality of spacers separated from each other by a pixel pitch of the liquid crystal display device on a non-light-transmitting region of the device substrate. 14. A step of forming a plurality of pixel control elements on an element formation substrate, a step of forming a spacer on the pixel control element, and a step of forming the pixel control element with the spacer formed on the device substrate together with the spacer. Transferring to a liquid crystal display device. 15. A rubbing process is performed on an alignment film on a pixel electrode controlled by the pixel control element before the pixel control element is transferred onto the device substrate together with the spacer. A method for manufacturing a liquid crystal display device according to claim 14. 16. A liquid crystal display, wherein pixel control elements are arranged on a device substrate, and a plurality of spacers are formed on the pixel control elements for keeping a distance between the device substrate and the counter substrate. apparatus. 17. The liquid crystal display device according to claim 16, wherein the spacer is formed by curing a resin.