JP2002228121A - Manufacturing method and manufacturing device for nozzle for burner made of quartz glass - Google Patents
Manufacturing method and manufacturing device for nozzle for burner made of quartz glassInfo
- Publication number
- JP2002228121A JP2002228121A JP2001023040A JP2001023040A JP2002228121A JP 2002228121 A JP2002228121 A JP 2002228121A JP 2001023040 A JP2001023040 A JP 2001023040A JP 2001023040 A JP2001023040 A JP 2001023040A JP 2002228121 A JP2002228121 A JP 2002228121A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- quartz glass
- drill
- hole
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/12—Nozzle or orifice plates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Gas Burners (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、外管内に収容され
る多分岐管型の石英ガラス製バーナ用ノズルの製造方法
及びその製造装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for manufacturing a multi-branch tube type quartz glass burner nozzle accommodated in an outer tube.
【０００２】[0002]
【従来の技術】石英ガラス製バーナは、外管内に多数の
細管からなる多分岐管型のノズルを収容してなり、外管
から噴出する水素ガスがノズルから噴出する酸素ガスと
外部で混合して燃焼発熱することを用いて火炎加工に使
用され、又、外管から噴出する水素ガスがノズルから噴
出する酸素ガスと外部で燃焼発熱することを用いてノズ
ルの任意の細管から噴出する原料ガス（ＳｉＣｌ4 等）
を加水分解し合成石英ガラスの合成に使用されるもので
ある。2. Description of the Related Art A quartz glass burner has a multi-branch tube type nozzle comprising a large number of thin tubes housed in an outer tube, and hydrogen gas ejected from the outer tube is mixed with oxygen gas ejected from the nozzle at the outside. Hydrogen gas ejected from the outer tube is used for flame machining by using heat generated by combustion and oxygen gas ejected from the nozzle, and raw material gas ejected from an arbitrary narrow tube of the nozzle by using combustion heat generated outside. (SiCl 4 etc.)
Is used to synthesize synthetic quartz glass.
【０００３】従来、外管内に収容される多数の細管から
なる多分岐管型のノズルは、多数の透孔を有し、内部ガ
ス室の開口端部に接合される端板に、熱加工による管引
きにより製造された細管を、作業者の手作業で、透孔と
連通するようにして酸水素炎による溶着により接合して
製造されている。Conventionally, a multi-branch nozzle composed of a large number of small tubes housed in an outer tube has a large number of through-holes, and an end plate joined to the open end of the internal gas chamber is formed by thermal processing. It is manufactured by joining thin tubes manufactured by pipe drawing by welding with an oxyhydrogen flame so as to communicate with the through holes manually by an operator.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来の石英ガ
ラス製バーナ用ノズルの製造方法では、細管が熱加工に
よる管引きにより製造されているので、細管の寸法が不
揃いとなり、ノズルにおける各細管の噴出口の口径が不
揃いとなる不具合がある。又、端板と各細管の接合が、
手作業による溶着によって行われるので、各細管の位置
及び方向が不正確となる不具合がある。However, in the conventional method for manufacturing a nozzle for a quartz glass burner, since the thin tubes are manufactured by drawing by thermal processing, the dimensions of the thin tubes are not uniform, and each of the thin tubes in the nozzle becomes inconsistent. There is a problem that the diameter of the ejection port is not uniform. Also, the joining of the end plate and each capillary is
Since the welding is performed by manual welding, there is a problem that the position and the direction of each thin tube become inaccurate.
【０００５】このため、ガス流の横断面においてガスの
組成が不均一となって、バーナの加熱領域において周方
向で温度むらを生じたり、あるいはバーナの加熱領域の
焦点が広がってしまい、ひいては火炎加工に際し、作業
効率が低下する一方、合成石英ガラスの合成に際し、歩
留まりが低下したり、気泡の混入や特性の不均一性が発
生する。As a result, the composition of the gas becomes non-uniform in the cross section of the gas flow, causing temperature unevenness in the circumferential direction in the heating area of the burner or widening the focal point of the heating area of the burner. In the processing, the working efficiency is reduced, while the yield of the synthetic quartz glass is reduced, bubbles are mixed, and the characteristics are non-uniform.
【０００６】そこで、本発明は、多分岐管型のノズルを
構成する多数の細管の寸法、位置及び方向を高精度とし
得る石英ガラス製バーナ用ノズルの製造方法及びその製
造装置を提供することを目的とする。SUMMARY OF THE INVENTION The present invention provides a method and apparatus for manufacturing a quartz glass burner nozzle which can make the dimensions, position and direction of a large number of thin tubes constituting a multi-branch tube nozzle highly accurate. Aim.
【０００７】[0007]
【課題を解決するための手段】前記課題を解決するた
め、本発明の石英ガラス製バーナ用ノズルの製造方法
は、外管内に収容される多分岐管型の石英ガラス製バー
ナ用ノズルを製造するに際し、石英ガラスブロックに研
削及びダイヤモンドドリルによる孔明けを施して軸心部
に貫通孔を有する円板状のノズル素体を形成し、ノズル
素体における貫通孔の周辺に軸線と平行な又は軸線の延
長上の任意の点を指向する多数の貫通孔をダイヤモンド
ドリルにより孔明けし、ノズル素体における各貫通孔の
周囲を貫通孔より大径の内径を有するダイヤモンドコア
ドリルによりノズル素体の一面側を残すように同軸的に
切削して細管群を形成した後、細管群以外のノズル素体
の残余部分を一面側を残すように切削して除去すること
を特徴とする。In order to solve the above-mentioned problems, a method of manufacturing a quartz glass burner nozzle according to the present invention is to manufacture a multi-branch tube type quartz glass burner nozzle housed in an outer tube. At this time, a quartz glass block is ground and drilled by a diamond drill to form a disk-shaped nozzle body having a through hole at the axis, and the periphery of the through hole in the nozzle body is parallel to or parallel to the axis. A large number of through-holes directed to arbitrary points on the extension of the nozzle body are drilled by a diamond drill, and the periphery of each through-hole in the nozzle body is one side of the nozzle body by a diamond core drill having an inner diameter larger than the through hole. After forming a group of thin tubes by cutting coaxially so as to leave the remaining portion, the remaining portion of the nozzle body other than the group of thin tubes is cut and removed so as to leave one surface side.
【０００８】一方、石英ガラス製バーナ用ノズルの製造
装置は、外管内に収容される多分岐管型の石英ガラス製
バーナ用ノズルの製造装置であって、軸心部を中心とし
て回動可能な円形の水平な回動板と、回動板上に搭載さ
れ、軸心部に貫通孔を有する円板状の石英ガラスからな
るノズル素体をその貫通孔に挿着される水平な回転軸を
介して回転可能に支持し、かつ、回転軸の軸線方向へ移
動可能な素体保持台と、ダイヤモンドドリル又はダイヤ
モンドコアドリルをノズル素体の他面と対向させて素体
保持台の回転軸と同じ高さに水平に把持して回転駆動
し、かつ、ダイヤモンドドリル又はダイヤモンドコアド
リルの軸線方向とそれと直角な水平方向へ移動可能なド
リル駆動台とを備えることを特徴とする。On the other hand, a quartz glass burner nozzle manufacturing apparatus is a multi-branch tube type quartz glass burner nozzle manufacturing apparatus housed in an outer tube, and is rotatable about an axis. A circular horizontal rotating plate, and a horizontal rotating shaft that is mounted on the rotating plate and has a nozzle body made of a disc-shaped quartz glass having a through hole at an axial center portion and is inserted into the through hole. A body holder that is rotatably supported via a shaft, and that can move in the axial direction of the rotation shaft, and the same as the rotation axis of the body holder, with the diamond drill or diamond core drill facing the other surface of the nozzle body It is characterized in that it comprises a drill drive base that is horizontally held at a height, is driven to rotate, and is movable in the horizontal direction perpendicular to the axial direction of the diamond drill or diamond core drill.
【０００９】[0009]
【作用】上記石英ガラス製バーナ用ノズルの製造方法及
びその製造装置においては、多分岐管型のノズルを構成
する細管群が、機械加工により、内部ガス室の開口端に
接合される端板と一体成形される。According to the method and the apparatus for manufacturing a quartz glass nozzle for a burner made of quartz glass described above, a group of thin tubes constituting a multi-branch tube type nozzle is formed by machining an end plate joined to an open end of an internal gas chamber. It is integrally molded.
【００１０】[0010]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。外管内に収容される多分岐
管型の石英ガラス製バーナ用ノズルを製造するには、先
ず、図示しない石英ガラスブロックに研削及びダイヤモ
ンドドリルによる孔明けを施し、図１、図２に示すよう
に、軸心部に貫通孔１を有し、かつ、所要の直径と厚み
を有する円板状のノズル素体２を形成する。次に、図
３、図４に示すように、後述する製造装置を用い、ノズ
ル素体２における貫通孔１の周辺に、軸線ｌ1 の延長上
の任意の点を指向する多数の貫通孔３を、ダイヤモンド
ドリルにより貫通孔を中心とする同心円上において周方
向へ等間隔で孔明けする。次いで、図５、図６に示すよ
うに、後述する製造装置を用い、ノズル素体２における
各貫通孔１，３の周囲を貫通孔１，３より適宜大径の内
径を有するダイヤモンドコアドリルによりノズル素体２
の一面側（図５においては下端側）を残すように同軸的
に切削して細管４群を形成した後、細管４群以外のノズ
ル素体２の残余部分５を一面側を残すように研削して除
去すると、図７、図８に示すように、細管４群が、後述
する内部ガス室の開口端に接合される端板６と一体成形
された多分岐管型のノズル７となる。Embodiments of the present invention will be described below with reference to the drawings. In order to manufacture a multi-branch tube type quartz glass burner nozzle accommodated in an outer tube, a quartz glass block (not shown) is first ground and drilled with a diamond drill, as shown in FIGS. 1 and 2. A disk-shaped nozzle body 2 having a through hole 1 in the axial center portion and having a required diameter and thickness is formed. Next, as shown in FIGS. 3 and 4, using a manufacturing apparatus described later, a large number of through holes 3 directed to arbitrary points on the extension of the axis l 1 around the through hole 1 in the nozzle body 2. Are drilled at equal intervals in the circumferential direction on a concentric circle centered on the through hole by a diamond drill. Next, as shown in FIGS. 5 and 6, the periphery of each of the through holes 1 and 3 in the nozzle body 2 is formed by a diamond core drill having an inner diameter appropriately larger than the through holes 1 and 3 using a manufacturing apparatus described below. Prime field 2
After forming a group of thin tubes 4 by coaxial cutting so as to leave one surface side (the lower end side in FIG. 5), the remaining portion 5 of the nozzle body 2 other than the group of thin tubes 4 is ground so as to leave one surface side. Then, as shown in FIGS. 7 and 8, the group of thin tubes 4 becomes a multi-branch tube type nozzle 7 integrally formed with an end plate 6 joined to an opening end of an internal gas chamber described later.
【００１１】図９は本発明に係る石英ガラス製バーナ用
ノズルの製造装置の実施の形態の一例を示す概略平面図
である。この製造装置は、ノズル素体２に多数の貫通孔
３をダイヤモンドドリル８により孔明けし、かつ、ノズ
ル素体２における貫通孔３の周囲をダイヤモンドコアド
リル（図示せず）によりノズル素体２の一面側（図９に
おいては下端側）を残すように同軸的に切削するための
ものであり、図示しないベース上に軸心部を中心として
回動可能な円形の水平な回動板９を備えている。回動板
９上には、前述したノズル素体２をその貫通孔１に挿着
される水平な回転軸１０を介して回転可能に支持し、か
つ、回転軸１０の軸線ｌ2 方向へ移動可能な素体支持台
（図示せず）が搭載されている。又、ベース上には、ダ
イヤモンドドリル８又はダイヤモンドコアドリルをノズ
ル素体２の他面（図９においては上端）と対向させて素
体保持台の回転軸１０と同じ高さに水平に把持して回転
駆動し、かつ、ダイヤモンドドリル８又はダイヤモンド
コアドリルの軸線ｌ3 方向とそれと直角な水平方向へ移
動可能なドリル駆動台（図示せず）が備えられている。FIG. 9 is a schematic plan view showing an embodiment of an apparatus for manufacturing a nozzle for a quartz glass burner according to the present invention. In this manufacturing apparatus, a large number of through holes 3 are drilled in the nozzle body 2 with a diamond drill 8, and the periphery of the through hole 3 in the nozzle body 2 is formed with a diamond core drill (not shown). This is for cutting coaxially so as to leave one surface side (the lower end side in FIG. 9), and is provided with a circular horizontal turning plate 9 that can turn around an axis on a base (not shown). ing. The above-mentioned nozzle body 2 is rotatably supported on the rotating plate 9 via a horizontal rotating shaft 10 inserted into the through hole 1 and moves in the direction of the axis l 2 of the rotating shaft 10. A possible body support (not shown) is mounted. On the base, a diamond drill 8 or a diamond core drill is horizontally held at the same height as the rotation axis 10 of the base holder while facing the other surface (the upper end in FIG. 9) of the nozzle base 2. rotary driven, and the axis of the diamond drill 8 or a diamond core drill l 3 direction thereto moveable drill driver base to a horizontal direction perpendicular (not shown) is provided.
【００１２】上記構成の製造装置により、図５、図６に
示すように、軸心部の細管４及びこの細管４の軸線ｌ1
の延長上の任意の点で軸線の延長線が交差する多数の細
管４が形成されたノズル素体２を得るには、図９に示す
ように、先ず、素体保持台の回転軸１０にノズル素体２
をその貫通孔１を介して嵌着した後、回動板９を適宜に
回動して素体保持台の回転軸１０とドリル駆動台に把持
されたダイヤモンドドリル８の軸線ｌ1 ，ｌ2 若しくは
その延長線を適宜に交差させる。次に、ドリル駆動台に
把持されたダイヤモンドドリル８を回転駆動すると共
に、ドリル駆動台をダイヤモンドドリル８がノズル素体
２に接近するようにダイヤモンドドリル８の軸線ｌ3 方
向へ移動して貫通孔３を孔明けし、１つの貫通孔３の孔
明が終了したら、素体保持台の回転軸１０を適宜角度回
転し、同様に貫通孔３を孔明けする。そして、軸心部の
貫通孔１の中心を中心とする１つの同心円上に周方向へ
等間隔で多数の貫通孔３を孔明けしたら、回動板３を適
宜に回動した後、ドリル駆動台をダイヤモンドドリル８
の軸線ｌ3 と直角な水平方向へ適宜に移動し、上述した
のと同様にダイヤモンドドリル８を回転駆動すると共
に、ドリル駆動台を移動して貫通孔３を軸心部の貫通孔
１の中心を中心とする他の１つの同心円上に周方向へ等
間隔で孔明けする。As shown in FIGS. 5 and 6, the manufacturing apparatus having the above-described configuration uses the thin tube 4 at the axial center and the axis l 1 of the thin tube 4.
In order to obtain a nozzle body 2 in which a large number of thin tubes 4 whose extension lines intersect at any point on the extension of the nozzle body are formed, first, as shown in FIG. Nozzle body 2
After fitting through the through hole 1, the rotating plate 9 is appropriately rotated to rotate the rotating shaft 10 of the body holder and the axes l 1 and l 2 of the diamond drill 8 gripped by the drill driving table. Alternatively, make the extension lines intersect appropriately. Then, with a diamond drill 8 held by the drill driver base is driven to rotate, the through-hole drill driver base diamond drill 8 moves in the axial l 3 directions of diamond drill 8 so as to approach the nozzle body 2 After the drilling of one through-hole 3 is completed, the rotation shaft 10 of the body holding table is rotated by an appropriate angle, and the through-hole 3 is similarly drilled. Then, when a large number of through holes 3 are formed at equal intervals in the circumferential direction on one concentric circle centered on the center of the through hole 1 in the axial center portion, the rotating plate 3 is appropriately rotated, and then the drill drive is performed. Table with diamond drill 8
Is appropriately moved in the horizontal direction perpendicular to the axis l 3 of the shaft, and the diamond drill 8 is rotationally driven in the same manner as described above. Are drilled at equal intervals in the circumferential direction on another concentric circle centered at.
【００１３】次いで、ダイヤモンドコアドリルをドリル
駆動台に付け変えた後、回動板９を適宜に回動し、か
つ、ドリル駆動台をダイヤモンドコアドリルの軸線と直
角な方向へ適宜に移動して素体保持台の回転軸１０とド
リル駆動台に把持されたダイヤモンドコアドリルの軸線
ｌ1 が一直線をなすようにし、しかる後に、ダイヤモン
ドコアドリルを回転駆動すると共に、ドリル駆動台をダ
イヤモンドコアドリルがノズル素体２に接近するように
ダイヤモンドコアドリルの軸線方向へ移動して貫通孔１
の周囲をノズル素体２の一面側を残すように同軸的に切
削して細管４を形成する。次に、回動板９を適宜に回動
し、かつ、ドリル駆動台をダイヤモンドコアドリルの軸
線と直角な方向へ適宜に移動してノズル素体２の各貫通
孔３とダイヤモンドコアドリルの軸線が次々と一直線を
なすようにした後、ダイヤモンドコアドリルを回転駆動
すると共に、ドリル駆動台をダイヤモンドコアドリルが
ノズル素体２に接近するようにダイヤモンドコアドリル
の軸線方向へ移動してそれぞれの貫通孔３の周囲をノズ
ル素体２の一面側を残すように同軸的に切削して細管４
群を形成する。Next, after replacing the diamond core drill with the drill drive base, the rotating plate 9 is appropriately rotated, and the drill drive base is appropriately moved in a direction perpendicular to the axis of the diamond core drill to thereby obtain a body. The rotation axis 10 of the holding table and the axis l 1 of the diamond core drill held by the drill driving table are aligned with each other. Move in the axial direction of the diamond core drill so that it approaches
Is cut coaxially so as to leave one surface side of the nozzle body 2 to form a thin tube 4. Next, the rotating plate 9 is appropriately rotated, and the drill drive is appropriately moved in a direction perpendicular to the axis of the diamond core drill, so that the through-holes 3 of the nozzle body 2 and the axis of the diamond core drill are successively aligned. Then, the diamond core drill is rotated and driven, and the drill drive is moved in the axial direction of the diamond core drill so that the diamond core drill approaches the nozzle body 2 so that the periphery of each through hole 3 is adjusted. Coaxially cut so as to leave one side of the nozzle body 2
Form a group.
【００１４】ここで、上述した製造方法及びその製造装
置によって得たノズル７を、図１０に示すように、外管
１１内に収容された内部ガス室１２の開口端部に、酸水
素炎による溶着により接合すると共に、ノズル７の軸心
部の細管４に連通するようにして原料ガス導管１３を端
板６に酸水素炎により溶着により接合して合成石英ガラ
スの合成に用いる石英ガラス製バーナを作製する一方、
図示は省略するが、従来のように多数の透孔を有し、内
部ガス室の開口端部に接合される端板に、熱加工による
管引きにより製造された細管を、作業者の手作業で、透
孔と連通するように酸水素炎による溶着により接合して
同様の多分岐管型のノズルを得、これを用い同様にして
合成石英ガラスの合成に用いる石英ガラス製バーナを作
製した。そして、上記石英ガラス製バーナにより合成石
英ガラスを下記の製造条件で合成したところ、ＳｉＯ2
堆積速度は、本発明に係るものが１２．６g/min （歩留
まり：７１．３％）であるのに対し、従来のものが１
０．５g/min （歩留まり：５９．４％）となり、本発明
に係るものは、従来のものよりＳｉＯ2 堆積速度が２．
１g/min 増加し、これに伴い、歩留まりが１１．９％増
加した。 製造条件 ・ＳｉＣｌ4 供給量：５０g/min ・水素ガス供給量：１２ｍ3/h ・酸素ガス供給量：１６ｍ3/hHere, the nozzle 7 obtained by the above-described manufacturing method and the manufacturing apparatus is attached to the opening end of the internal gas chamber 12 housed in the outer tube 11 by an oxyhydrogen flame, as shown in FIG. A quartz glass burner used for synthesizing synthetic quartz glass by joining by welding and welding the source gas conduit 13 to the end plate 6 by oxyhydrogen flame so as to communicate with the thin tube 4 at the axial center of the nozzle 7. While producing
Although not shown in the drawings, a thin tube manufactured by pipe drawing by thermal processing is manually attached to an end plate having a large number of through holes as in the related art and joined to the open end of the internal gas chamber. Then, the same multi-branched pipe type nozzle was obtained by welding with an oxyhydrogen flame so as to communicate with the through-hole, and a nozzle made of quartz glass used for synthesizing synthetic quartz glass was similarly manufactured using this nozzle. Then, when synthetic quartz glass was synthesized under the following manufacturing conditions using the quartz glass burner, SiO 2 was synthesized.
The deposition rate according to the present invention was 12.6 g / min (yield: 71.3%), while the conventional rate was 1%.
0.5 g / min (yield: 59.4%). According to the present invention, the SiO 2 deposition rate was 2.
The yield increased by 11.9% with the increase of 1 g / min. Manufacturing conditions • SiCl 4 supply: 50 g / min • Hydrogen gas supply: 12 m 3 / h • Oxygen gas supply: 16 m 3 / h
【００１５】なお、上述した実施の形態においては、軸
心部の細管の周辺における多数の細管の軸線の延長線
が、軸心部の細管の軸線の延長線上の任意の点で交差す
る。いわゆる加熱領域に焦点を有するようにする多分岐
管型のノズルについて説明したが、これに限定されるも
のではなく、軸心部の細管の周辺における多数の細管の
軸線が、軸心部の細管の軸線と平行な多分岐管型のノズ
ルとしてもよいのは勿論である。この場合、製造装置の
操作に当って、素体保持台の回転軸とドリル駆動台に把
持されるダイヤモンドドリル又はダイヤモンドコアドリ
ルの軸線又はその延長線が一直線上又は平行となるよう
にする。又、上述した多分岐管のノズルは、合成石英ガ
ラスの合成に用いる石英ガラス製バーナを構成する場合
に限らず、酸水素炎による火炎加工に用いる石英ガラス
製バーナを構成するようにしてもよいのは自明である。In the above-described embodiment, the extended lines of the axes of the many thin tubes in the vicinity of the thin tubes at the axial center intersect at any points on the extended lines of the axes of the thin tubes at the axial center. A multi-branch tube type nozzle having a focal point in a so-called heating area has been described. However, the present invention is not limited to this. It is needless to say that a multi-branch tube type nozzle parallel to this axis may be used. In this case, in the operation of the manufacturing apparatus, the rotation axis of the body holder and the axis of the diamond drill or diamond core drill gripped by the drill drive table or an extension thereof are aligned or parallel. Further, the nozzle of the above-mentioned multi-branch pipe is not limited to constituting a quartz glass burner used for synthesizing synthetic quartz glass, but may constitute a quartz glass burner used for flame processing by oxyhydrogen flame. Is self-evident.
【００１６】[0016]
【発明の効果】以上説明したように本発明に係る石英ガ
ラス製バーナ用ノズルの製造方法及びその製造装置によ
れば、多分岐管型のノズルを構成する多数の細管群が、
機械加工により、内部ガス室の開口端に接合される端板
と一体成形されるので、従来に比べて多数の細管の寸
法、位置及び方向を格段に高精度とすることができる。As described above, according to the method for manufacturing a nozzle for a quartz glass burner and the apparatus for manufacturing the same according to the present invention, a large number of thin tube groups constituting a multi-branch tube type nozzle are formed.
Since it is formed integrally with the end plate joined to the open end of the internal gas chamber by machining, the dimensions, positions and directions of a large number of thin tubes can be made much more precise than in the past.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明に係る石英ガラス製バーナ用ノズルの製
造方法の実施の形態の一例を示す第１工程によるノズル
素体の縦断面図である。FIG. 1 is a longitudinal sectional view of a nozzle body in a first step showing an example of an embodiment of a method for manufacturing a nozzle for a quartz glass burner according to the present invention.
【図２】図１のノズル素体の平面図である。FIG. 2 is a plan view of the nozzle body of FIG. 1;
【図３】本発明に係る石英ガラス製バーナ用ノズルの製
造方法の実施の形態の一例を示す第２工程によるノズル
素体の縦断面図である。FIG. 3 is a vertical sectional view of a nozzle body in a second step showing an example of an embodiment of a method for manufacturing a nozzle for a quartz glass burner according to the present invention.
【図４】図３のノズル素体の平面図である。FIG. 4 is a plan view of the nozzle body of FIG. 3;
【図５】本発明に係る石英ガラス製バーナ用ノズルの製
造方法の実施の形態の一例を示す第３工程によるノズル
素体の縦断面図である。FIG. 5 is a longitudinal sectional view of a nozzle body in a third step showing an example of an embodiment of a method for manufacturing a quartz glass burner nozzle according to the present invention.
【図６】図５のノズル素体の平面図である。FIG. 6 is a plan view of the nozzle body of FIG. 5;
【図７】本発明に係る石英ガラス製バーナ用ノズルの製
造方法の実施の形態の一例を示す第４工程によるノズル
素体の縦断面図である。FIG. 7 is a vertical sectional view of a nozzle body in a fourth step showing an example of an embodiment of a method for manufacturing a quartz glass burner nozzle according to the present invention.
【図８】図７のノズルの平面図である。FIG. 8 is a plan view of the nozzle of FIG. 7;
【図９】本発明に係る石英ガラス製バーナ用ノズルの製
造装置の実施の形態の一例を示す概略平面図である。FIG. 9 is a schematic plan view showing an example of an embodiment of the apparatus for manufacturing a nozzle for a quartz glass burner according to the present invention.
【図１０】本発明に係る石英ガラス製バーナ用ノズルの
製造方法によって得たノズルを備えた石英ガラス製バー
ナの縦断面図である。FIG. 10 is a longitudinal sectional view of a quartz glass burner provided with a nozzle obtained by the method for manufacturing a quartz glass burner nozzle according to the present invention.
１ 貫通孔 ２ ノズル素体 ３ 貫通孔 ４ 細管 ５ 残余部分 ６ 端板 ７ ノズル ８ ダイヤモンドドリル ９ 回動板 １０ 回転軸 DESCRIPTION OF SYMBOLS 1 Through-hole 2 Nozzle body 3 Through-hole 4 Thin tube 5 Remaining part 6 End plate 7 Nozzle 8 Diamond drill 9 Rotating plate 10 Rotation axis
Claims (2)
ラス製バーナ用ノズルを製造するに際し、石英ガラスブ
ロックに研削及びダイヤモンドドリルによる孔明けを施
して軸心部に貫通孔を有する円板状のノズル素体を形成
し、ノズル素体における貫通孔の周辺に軸線と平行な又
は軸線の延長上の任意の点を指向する多数の貫通孔をダ
イヤモンドドリルにより孔明けし、ノズル素体における
各貫通孔の周囲を貫通孔より大径の内径を有するダイヤ
モンドコアドリルによりノズル素体の一面側を残すよう
に同軸的に切削して細管群を形成した後、細管群以外の
ノズル素体の残余部分を一面側を残すように切削して除
去することを特徴とする石英ガラス製バーナ用ノズルの
製造方法。When manufacturing a multi-branch tube type quartz glass burner nozzle accommodated in an outer tube, a quartz glass block is ground and drilled by a diamond drill to form a circle having a through hole in an axial center portion. A plate-shaped nozzle body is formed, and a large number of through-holes are formed around the through-holes in the nozzle body by a diamond drill and oriented at arbitrary points parallel to the axis or on an extension of the axis. After forming a group of thin tubes by forming a group of thin tubes around the periphery of each through hole with a diamond core drill having a larger inner diameter than the through holes so as to leave one surface side of the nozzle body, A method for manufacturing a quartz glass burner nozzle, characterized in that the remaining portion is removed by cutting so as to leave one surface side.
ラス製バーナ用ノズルの製造装置であって、軸心部を中
心として回動可能な円形の水平な回動板と、回動板上に
搭載され、軸心部に貫通孔を有する円板状の石英ガラス
からなるノズル素体をその貫通孔に挿着される水平な回
転軸を介して回転可能に支持し、かつ、回転軸の軸線方
向へ移動可能な素体保持台と、ダイヤモンドドリル又は
ダイヤモンドコアドリルをノズル素体の他面と対向させ
て素体保持台の回転軸と同じ高さに水平に把持して回転
駆動し、かつ、ダイヤモンドドリル又はダイヤモンドコ
アドリルの軸線方向とそれと直角な水平方向へ移動可能
なドリル駆動台とを備えることを特徴とする石英ガラス
製バーナ用ノズルの製造装置。2. An apparatus for manufacturing a multi-branch tube type quartz glass burner nozzle accommodated in an outer tube, comprising: a circular horizontal rotating plate rotatable around an axis; A nozzle element made of disc-shaped quartz glass mounted on a plate and having a through hole in the axial center portion is rotatably supported via a horizontal rotating shaft inserted into the through hole, and is rotated. A body holder that can be moved in the axial direction of the shaft, a diamond drill or a diamond core drill are opposed to the other surface of the nozzle body, and are horizontally held at the same height as the rotation axis of the body holder and rotationally driven. An apparatus for manufacturing a nozzle for a quartz glass burner, comprising: a drill drive base movable in the axial direction of a diamond drill or a diamond core drill and in a horizontal direction perpendicular thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001023040A JP2002228121A (en) | 2001-01-31 | 2001-01-31 | Manufacturing method and manufacturing device for nozzle for burner made of quartz glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001023040A JP2002228121A (en) | 2001-01-31 | 2001-01-31 | Manufacturing method and manufacturing device for nozzle for burner made of quartz glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002228121A true JP2002228121A (en) | 2002-08-14 |
Family
ID=18888371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001023040A Pending JP2002228121A (en) | 2001-01-31 | 2001-01-31 | Manufacturing method and manufacturing device for nozzle for burner made of quartz glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002228121A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008145575A2 (en) * | 2007-05-25 | 2008-12-04 | Heraeus Quarzglas Gmbh & Co. Kg | Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner |
| EP2006256A1 (en) * | 2006-02-28 | 2008-12-24 | Shin-Etsu Chemical Company, Ltd. | Quartz glass made burner |
| EP2380855A3 (en) * | 2010-04-23 | 2012-05-02 | Shin-Etsu Chemical Co., Ltd. | Burner for manufacturing porous glass preform |
| CN107417084A (en) * | 2017-08-31 | 2017-12-01 | 重庆品信玻璃有限公司 | Glass cutting device |
-
2001
- 2001-01-31 JP JP2001023040A patent/JP2002228121A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2006256A1 (en) * | 2006-02-28 | 2008-12-24 | Shin-Etsu Chemical Company, Ltd. | Quartz glass made burner |
| EP2006256A4 (en) * | 2006-02-28 | 2012-07-11 | Shinetsu Chemical Co | Quartz glass made burner |
| WO2008145575A2 (en) * | 2007-05-25 | 2008-12-04 | Heraeus Quarzglas Gmbh & Co. Kg | Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner |
| WO2008145575A3 (en) * | 2007-05-25 | 2009-03-26 | Heraeus Quarzglas | Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner |
| JP2010527885A (en) * | 2007-05-25 | 2010-08-19 | ヘレウス クヴァルツグラス ゲーエムベーハー ウント コー カーゲー | Vapor deposition burner and its manufacturing method, use of vapor deposition burner and production of quartz glass block using vapor deposition burner |
| US8245543B2 (en) | 2007-05-25 | 2012-08-21 | Heraeus Quarzglas Gmbh & Co. Kg | Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner |
| CN101679099B (en) * | 2007-05-25 | 2012-11-28 | 赫罗伊斯石英玻璃股份有限两合公司 | Deposition burner and method for the manufacture thereof, use of the deposition burner and method for the production of a quartz glass body by using the deposition burner |
| EP2380855A3 (en) * | 2010-04-23 | 2012-05-02 | Shin-Etsu Chemical Co., Ltd. | Burner for manufacturing porous glass preform |
| CN107417084A (en) * | 2017-08-31 | 2017-12-01 | 重庆品信玻璃有限公司 | Glass cutting device |
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