JP2002221673A5 - - Google Patents
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- Publication number
- JP2002221673A5 JP2002221673A5 JP2001018677A JP2001018677A JP2002221673A5 JP 2002221673 A5 JP2002221673 A5 JP 2002221673A5 JP 2001018677 A JP2001018677 A JP 2001018677A JP 2001018677 A JP2001018677 A JP 2001018677A JP 2002221673 A5 JP2002221673 A5 JP 2002221673A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001018677A JP2002221673A (ja) | 2001-01-26 | 2001-01-26 | アクチュエータを備えた光学ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001018677A JP2002221673A (ja) | 2001-01-26 | 2001-01-26 | アクチュエータを備えた光学ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002221673A JP2002221673A (ja) | 2002-08-09 |
| JP2002221673A5 true JP2002221673A5 (xx) | 2008-03-13 |
Family
ID=18884664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001018677A Pending JP2002221673A (ja) | 2001-01-26 | 2001-01-26 | アクチュエータを備えた光学ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002221673A (xx) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
| JP2010237273A (ja) * | 2009-03-30 | 2010-10-21 | Nec Corp | ミラーチルトアクチュエーター |
| JP5598296B2 (ja) * | 2010-12-08 | 2014-10-01 | セイコーエプソン株式会社 | アクチュエーター、光スキャナーおよび画像形成装置 |
| DE102011104556B4 (de) * | 2011-06-15 | 2021-03-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Ablenkvorrichtung für einen Scanner mit Lissajous-Abtastung |
| JP5524254B2 (ja) | 2012-02-14 | 2014-06-18 | 富士フイルム株式会社 | ミラー駆動装置及びその制御方法 |
| CN116457715A (zh) * | 2020-11-13 | 2023-07-18 | 华为技术有限公司 | 用于lissajous扫描的偏转设备 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2924200B2 (ja) * | 1990-01-18 | 1999-07-26 | 富士電機株式会社 | ねじり振動子およびその応用素子 |
| US5673139A (en) * | 1993-07-19 | 1997-09-30 | Medcom, Inc. | Microelectromechanical television scanning device and method for making the same |
| EP1121616A2 (en) * | 1998-09-15 | 2001-08-08 | Xros, Inc. | Flexible, modular, compact fiber optic switch |
| JP3721420B2 (ja) * | 1999-03-04 | 2005-11-30 | 日本航空電子工業株式会社 | 光スイッチ |
| US6466356B1 (en) * | 2000-09-28 | 2002-10-15 | Xerox Corporation | Structure for an optical switch on a silicon substrate |
| US6632373B1 (en) * | 2000-09-28 | 2003-10-14 | Xerox Corporation | Method for an optical switch on a substrate |
| US6504643B1 (en) * | 2000-09-28 | 2003-01-07 | Xerox Corporation | Structure for an optical switch on a substrate |
| US6411427B1 (en) * | 2000-09-28 | 2002-06-25 | Xerox Corporation | Structure for an optical switch on a glass substrate |
| JP2002189176A (ja) * | 2000-12-20 | 2002-07-05 | Mitsubishi Electric Corp | ミラー駆動装置 |
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2001
- 2001-01-26 JP JP2001018677A patent/JP2002221673A/ja active Pending